VGC50x Vacuum 䝀䞊䝆㻌䝁䞁䝖䝻䞊䝷
┯ぴ䂻⸩ᇬነዐእዊዙወ⸩ᇬኤዙኜዊኍ䞷㖐倩♾厌ኚዂዙኔዄዐ
INFICON ቿኌኣኀኳዙንቑㄒ乓⦁ቋ℡㙪ሼቮᇬቿኌኣኀኳዙንነ
ዐእዊዙቑ㠿⨚VGC50xኔዙኗቒᇬᨺmbar (10-10 ᨺ
1125 እዙወ ቑ⏷⇢⦶┪乓⦁ርቫቖ岼⸩⊳ርቫቖኖኣዙኜኖቑከኜ
ቍቬቖኤዙኜዊኍሯ♾厌ቊሼᇭ
⇑䁡
ኮኾዙኜᇬኘዐኒᇬ咻岼⸩䞷ኦአእኻእአኌኖኾከዂዙኁኦⅧኤኀኖኴዉኁቫቮ亰◧㝜⇫
栆恬楱㳮⣷⒉┪䞷浧位便ኌቿኤኀኖኴዉኁ
岼⸩⊳ቡቂቒ⦶┪⺍㣑ⓊኤኀኖኴዉኁⅧ㲹偩ぴ䲚嫷ኤኀኖኴዉኁ
USB ኺዙእ 卛槱 ርቫቖUSB ኖኣኀአኌ ⓜ槱 ኤዙኜዊኍርቫቖኮኾዙኜዊኍ㳮厌
Ethernet ኁዐኜዙኲኄዙኖ
bኲቾዙኽኃኄቿቿአኴኍዉዙኦቒᇬኇዐኁዐቡቂቒUSB ኖኣኀአኌሮቬ♾厌ቊሼ
b嵎㠃♾厌ኯኖኣኔኖⅧ⚓ኞዀዐኪወ呹䟀⸩券♾厌岼⸩⊳
浧屲⍞ㄵኰአእA/D ነዐክዙኜ
INFICON ቿኌኣኀኳዙንቑ呹╤䔈⸩
◧ዙንቡቂቒዙንነዐኰኪዙኔዄዐ⚠ሴ⺍㟿偩ㇱ䔈㊶ቫቮᇬኴዊኍኽ♾厌ᨺV ኞዀዙእ㆞
岧旁岗⒉┪(VGC502 ርቫቖVGC503 ⺑䞷
1
VGC50x Vacuum 䝀䞊䝆㻌䝁䞁䝖䝻䞊䝷
㲐㔯䛾ね⟙
2
VGC50x Vacuum 䝀䞊䝆㻌䝁䞁䝖䝻䞊䝷
ṽ㦀
ኜኁኴ
VGC501
䂻⸩ኞዀዐኪወ
VGC502
VGC503
2
3
LCD, LED backlight
LCD, LED backlight
LCD, LED backlight
10
10
10
³×F.S. …1×F.S.
³×F.S. …1×F.S.
1
䂻⸩ኞዀዐኪወ
ኤኀኖኴዉኁ
ዉዙእ
1/s
ኤኀኖኴዉኁ乓⦁Ⅷ㘴倩♾
厌ዙን
CDG (A/D)
Torr
PCG
Torr
ೕ…1125
ೕ…1125
PSG
Torr
bೕ…750
bೕ…750
MPG
Torr
…750
…750
PEG
Torr
{ಹ³
{ಹ³
MAG
Torr
{ಹ³
{ಹ³
BCG
Torr
{…1125
{…1125
BPG
Torr
{…750
{…750
HPG
Torr
…750
…750
ೕ…1500
ೕ…1500
ೕ…1000
ೕ…1000
ኤኀኖኴዉኁ乓⦁Ⅷ㘴倩♾
厌ዙን
CDG (A/D)
Torr
³×F.S. …1×F.S.
PCG
Torr
ೕ…1125
PSG
Torr
bೕ…750
MPG
Torr
…750
PEG
Torr
{ಹ³
MAG
Torr
{ಹ³
BCG
Torr
{…1125
BPG
Torr
{…750
HPG
Torr
…750
ኤኀኖኴዉኁ乓⦁Ⅷ㘴倩♾
厌ዙን
PCG
PSG
3
mbar
mbar
VGC50x Vacuum 䝀䞊䝆㻌䝁䞁䝖䝻䞊䝷
ṽ㦀
ኜኁኴ
VGC501
VGC502
VGC503
MPG
mbar
…1000
…1000
PEG
mbar
ಹ²
ಹ²
MAG
mbar
ಹ²
ಹ²
BCG
mbar
{…1500
{…1500
BPG
mbar
{…1000
{…1000
HPG
mbar
…1000
…1000
mbar, Torr, Pa, hPa,
Micron, V
mbar, Torr, Pa, hPa,
Micron, V
ኤኀኖኴዉኁ乓⦁Ⅷ㘴倩♾
厌ዙን
PCG
mbar
ೕ…1500
PSG
mbar
ೕ…1000
MPG
mbar
…1000
PEG
mbar
ಹ²
MAG
mbar
ಹ²
BCG
mbar
{…1500
BPG
mbar
{…1000
HPG
mbar
…1000
䂻⸩ዃከአእ 指㔭♾厌
䂻⸩ዃከአእ 指㔭♾厌
mbar, Torr, Pa, hPa,
Micron, V
岼⸩⊳
岼⸩⊳ዉዙ
2
4
6
ኞዀዐኪወ━ቭ㇢
1
1 or 2
1, 2 or 3
sensor dependent
sensor dependent
sensor dependent
adjustable
adjustable
adjustable
ዉዙነዐኜኌእ
floating changeover
contact
floating changeover
contact
floating changeover
contact
ነኪኌኜ
D-sub, 15-pin, male
D-sub, 25-pin, female
D-sub, 25-pin, female
嵎㠃乓⦁
ኯኖኣኔኖ
岼⸩⊳
4
VGC50x Vacuum 䝀䞊䝆㻌䝁䞁䝖䝻䞊䝷
ṽ㦀
ኜኁኴ
VGC501
VGC502
VGC503
V (ac) • A
30 / 1
30 / 1
30 / 1
V (dc) • A
60 / 0.5
60 / 0.5
60 / 0.5
0 ... 10.3, sensor
analog output signal
0 ... 10.3, sensor
analog output signal
0 ... 10.3, sensor
analog output signal
ቿኧዊኍ⒉┪
1
2
3
ኴዊኍኽ♾厌ቿኧዊኍ⒉
┪
-
1
1
D-Sub, 15-pin, male
D-Sub, 9-pin, male
D-Sub, 9-pin, male
ነዐኜኌእ⸩㫋
岼⸩⊳
ነዐኜኌእ⸩㫋
ቿኧዊኍ⒉┪
乓⦁
V
ቿኧዊኍ⒉┪
ነኪኌኜ
ኁዐኜዙኲኄዙኖ ኤንኜወ
ነኪኌኜ
USB slave, master and USB slave, master and USB slave, master and
Ethernet, USB Typ A
Ethernet, USB Typ A
Ethernet, USB Typ A
(stick), USB Type B,
(stick), USB Type B,
(stick), USB Type B,
FCC68/RJ45
FCC68/RJ45
FCC68/RJ45
榊┪
∪俵
V (ac)
100 ... 240
100 ... 240
100 ... 240
Hz
50 ... 60
50 ... 60
50 ... 60
W
ื
ื
ื
°C
+5 ... +50
+5 ... +50
+5 ... +50
榊┪
⛷㽱㟿
榊┪
䀗彊
㝜⇫䂸ㄵ 䜿⬒
5
VGC50x Vacuum 䝀䞊䝆㻌䝁䞁䝖䝻䞊䝷
⮠㱽
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RateWatche䛿INFICON䛾⓮㧁䛷䛩ˤ䛭䛾Ṿ䛩䜉䛶䛾⓮㧁䛿ˣ䛭䜜䛮䜜䛾㚱侭䛾屯䓋䛸䛺䜚䜎䛩ˤ
30.11.2015
Generation
Data
Sheet_Entfer
nung gelber
(2015-12)
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