2007A1904
BL20XU
ᐔ᧼⁁᭴ㅧࠍ᦭ߔࠆࠛ࡟ࠢ࠻ࡠ࠾ࠢࠬታⵝၮ᧼ߩ
ࡑࠗࠢࡠធวㇱߦ߅ߌࠆ X ✢ਇቢో CT ߦࠃࠆ↹⾰ะ਄ߩ⎇ⓥ
Quality improvement on X-ray micro-CT images obtained by incomplete
projection data of microjoints on electronic packaging with planer structure
ጟᧄ૫ਯ*1㧘㜞ᩉ Პ*1㧘㊒⼱ᶈਯ*2㧘૒ጊ೑ᒾ*2㧘਄᧖ஜᄥᦶ*3㧘᫪ቁ↵*4
Yoshiyuki Okamoto*1, Takeshi Takayanagi*1, Hiroyuki Tsuritani*2, Toshihiko Sayama*2,
Kentaro Uesugi*3, Takao Mori*4
*1
ࠦ࡯࠮࡞ᩣᑼળ␠, *2 ንጊ⋵Ꮏᬺᛛⴚ࠮ࡦ࠲࡯, *3 㜞ノᐲశ⑼ቇ⎇ⓥ࠮ࡦ࠲࡯, *4 ንጊ⋵┙ᄢቇ
*1
Cosel Co., Ltd., *2Toyama Industrial Technology Center, *3SPring-8/JASRI,
*4
Toyama Prefectural University
1. ߪߓ߼ߦ
ࠆታⵝၮ᧼ߦ߅ߌࠆࡑࠗࠢࡠធวㇱߩቢోߥ㕖
㔚ሶၮ᧼ߩࡑࠗࠢࡠធวㇱߦ߅޿ߡߪ‫∋ޔ‬ഭ
⎕უᬌᩏߢ޽ࠆ‫ޕ‬
៊்߇‫ޔ‬㔚ሶၮ᧼ߩା㗬ᕈߦᄢ߈ߥᓇ㗀ࠍਈ߃
ߘߎߢ‫⎇ᧄޔ‬ⓥߢߪ‫ޔ‬㔚ሶၮ᧼ߩᒻ⁁⊛ߥ․
ࠆ࿃ሶߢ޽ࠆ‫ޔߡߞ߇ߚߒޕ‬㔚ሶᯏེߩା㗬ᕈ
ᓽ㧔㕙Ⓧߪᐢ޿߇⭯޿㧕ࠍ⠨ᘦߒ‫ޔ‬ਇቢోߥㅘ
ะ਄߅ࠃ߮ታⵝߩ㜞ᐲൻߦࠃࠆᣂߒ޿㔚ሶᯏེ
ㆊ↹௝࠺࡯࠲߆ࠄ CT ↹௝ࠍౣ᭴ᚑߔࠆߚ߼ߦ‫ޔ‬
ߩ㐿⊒ߩߚ߼‫ޔ‬ᓸ⚦ߥᰳ㒱߿៊்ࠍ㕖⎕უߢᬌ
ᛩᓇᣇᴺ߿ౣ᭴ᚑᣇᴺࠍᬌ⸛ߒߚ‫ޔߜࠊߥߔޕ‬
಴‫⹏ޔ‬ଔߔࠆᛛⴚࠍ㐿⊒ߔࠆߎߣ߇‫࠻ࠢ࡟ࠛޔ‬
㔚ሶၮ᧼ࠍടᎿߔࠆߎߣߥߊ‫ޔ‬SP-PCT ࠍ↪޿ߡ
ࡠ࠾ࠢࠬ㑐ㅪ↥ᬺߦ߅޿ߡߪᕆോߣߥߞߡ޿ࠆ‫ޕ‬
ቢోߥ㕖⎕უߢⷰኤߒ‫ޔ‬ታ↪ߦ⠴߃߁ࠆࠃ߁ CT
ߎࠇ߹ߢ‫ޔ‬ᚒ‫⎇ߩޘ‬ⓥࠣ࡞࡯ࡊߢߪ‫ޔ‬LSI㧔Large
↹௝ߩ↹⾰ะ਄ࠍ࿑ߞߚ‫ޕ‬
Scale Integrated circuit㧕߇ࡈ࡝࠶ࡊ࠴࠶ࡊ㧔FC‫ޔ‬
Flip Chip㧕ታⵝߐࠇߚ㔚ሶၮ᧼ࠍኻ⽎ߣߒ‫ߩߘޔ‬
2. X ✢ࡑࠗࠢࡠ CT ⵝ⟎ߩ᭴ᚑߣ․ᓽ
ࡑࠗࠢࡠߪࠎߛធวㇱߩᾲ∋ഭߦࠃࠆ៊்㧔ᓸ
SP-PCT ߢߪ‫ߩࠄ߆࠲࡯࡟ࡘࠫࡦࠕޔ‬᡼኿శࠍ‫ޔ‬
⚦⚵❱ߩᄌൻ߿∋ഭ߈ⵚ㧕ࠍ‫ޔ‬᡼኿శࠍశḮߣ
Si ߩੑ⚿᥏ಽశེߦࠃࠅන⦡ൻߒߚ X ✢ࠍ⹜ᢱ
ߔࠆ X ✢ࡑࠗࠢࡠ CT ⵝ⟎㧔એਅ‫ޔ‬SP-PCT㧕
ߦᾖ኿ߔࠆ‫ ߩߎޕ‬X ✢ߪ‫ޔ‬ᡆૃ⊛ߦᐔⴕశߣ⷗
ࠍ↪޿ߡ⹏ଔߔࠆ⎇ⓥࠍⴕ޿‫⹏ޔ‬ଔᛛⴚߩታ↪
ߥߖࠆ߶ߤ㜞޿ᜰะᕈࠍ᦭ߒߡ߅ࠅ‫ޔ‬㜞ಽ⸃⢻
น⢻ᕈࠍ㜞߼ߡ߈ߚ
‫ޔߒ߆ߒޕ‬ቢోߥㅘㆊ↹
ߩ 3 ᰴర↹௝ࠍౣ᭴ᚑߔࠆߎߣ߇น⢻ߢ޽ࠆ‫ޕ‬
௝࠺࡯࠲߆ࠄ CT ↹௝ࠍౣ᭴ᚑߔࠆߚ߼ߦߪ‫ޔ‬ᬌ
߹ߚ‫ޔ‬න⦡శൻߦࠃࠅ‫ ߩߘޔ‬X ✢ࠛࡀ࡞ࠡߦኻ
ᩏኻ⽎ߩᄢ߈ߐ߿ᒻ⁁ߦ೙⚂߇޽ࠅ‫ޔ‬න৻ߩធ
ߔࠆ X ✢✢ๆ෼ଥᢙ㧔LAC, Linear Attenuation
ว૕߿㔚ሶၮ᧼ߩ৻ㇱࠍಾᢿߒߚ⹜㛎૕ࠍⷰኤ
Coefficient㧕ߩ 3 ᰴరಽᏓࠍቯ㊂⊛ߦ⹏ଔߔࠆߎ
ߖߑࠆࠍᓧߥ߆ߞߚ‫৻ޕ‬ᣇ‫ࠬࠢ࠾ࡠ࠻ࠢ࡟ࠛޔ‬
ߣ߇น⢻ߢ޽ࠆ‫ ߩߎޔߦࠄߐޕ‬X ✢ߩࠦࡅ࡯࡟
㑐ㅪ↥ᬺߦ߅ߌࠆ࠾࡯࠭ߪ‫ޔ‬ᐔ᧼⁁᭴ㅧࠍ᦭ߔ
ࡦ࠻ߥ․ᕈࠍ೑↪ߒ‫࡞ࡀ࡟ࡈޔ‬࿁᛬ߦࠃߞߡࠛ
࠶ࠫࠍᒝ⺞⴫␜ߐߖࠆߎߣ߽น⢻ߢ޽ࠆ‫ޕ‬
4. ਇቢో CT ߦࠃߞߡᓧࠄࠇࠆ↹௝ߩ↹⾰ะ਄
SP-PCT ᧄ૕ߪ‫♖ޔ‬ኒ࿁ォࠬ࠹࡯ࠫ‫ ߮ࠃ߅ޔ‬X
Fig.㧝ߪ‫ޔ‬ౣ᭴ᚑߒߚ޿ߊߟ߆ߩ CT ↹௝ߩ଀
✢ᬌ಴ⵝ⟎ߦࠃߞߡ᭴ᚑߐࠇࠆ‫ޕ‬X ✢ᬌ಴ⵝ⟎
ࠍ␜ߔ‫↹ޕ‬௝
aߪ‫ޔ‬180q࿁ォߩߔߴߡߩㅘㆊ
㧔ᵿ᧻ࡎ࠻࠾ࠢࠬ␠⵾ AA50 ߅ࠃ߮ C4880-41S㧕
↹௝ࠍߘߩ߹߹↪޿ߡ‫ޔ‬ౣ᭴ᚑࠍⴕߞߚ߽ߩߢ
ߪ‫⹜ޔ‬㛎૕ࠍㅘㆊߒߚ X ✢ࠍⰯశ᧼ߢนⷞశߦ
޽ࠆ‫⹜ޕ‬㛎૕ࠍ࿁ォߐߖࠆߣ‫ޔ‬X ✢ࡆ࡯ࡓߣၮ
ᄌ឵ߒ‫ޔ‬㗼ᓸ㏜↪ኻ‛࡟ࡦ࠭ߦࠃߞߡ᜛ᄢߒߚ
᧼ߩ㐳ᚻᣇะߣ߇ᐔⴕߦㄭߊߥࠆ࿁ォⷺߩ▸࿐
ᓟ‫ޔ‬CCD ࠞࡔ࡜ߢ᠟ᓇߔࠆ߽ߩߢ޽ࠆ‫ޕ‬
ߦ߅޿ߡߪ‫ޔ‬X ✢߇ၮ᧼ߩ㐳ᚻᣇะߦߪㅘㆊߒ
ߒ߆ߒ‫⃻ޔ‬ታ⊛ߦ‫ޔ‬1Pm ⒟ᐲߩ㜞޿ಽ⸃⢻ࠍ
ߦߊ޿ߩߢ‫ޔ‬ㅘㆊ↹௝ߩ S/N Ყ߇㕖Ᏹߦዊߐߊ
ታ⃻ߔࠆߚ߼ߦߪ‫⹜ޔ‬㛎૕ࠍ X ✢ᬌ಴ⵝ⟎ߦน
ߥࠆ‫ޔ߼ߚߩߎޕ‬CT ↹௝ߦߪ‫ޔ‬ᢳ߼ᣇะߩ⋥✢
⢻ߥ㒢ࠅㄭߠߌࠆᔅⷐ߇޽ࠆ‫ޔߚ߹ޕ‬ᄢ߈ߥ㔚
⊛ߥᒝ޿ࠕ࡯࠹ࠖࡈࠔࠢ࠻߇⊒↢ߒ‫ࡃߛࠎߪޔ‬
ሶၮ᧼ࠍ࿁ォߐߖࠆ႐ว‫ޔ‬X ✢߇ၮ᧼ߩ㐳ᚻᣇ
ࡦࡊౝߩᓸ⚦⚵❱ࠍ߁߹ߊ್೎ߢ߈ߥ޿↹⾰ߣ
ะߦߪㅘㆊߒߦߊ޿‫⹜ޔߡߞ߇ߚߒޕ‬㛎૕ࠍዊ
ߥߞߚ‫ޕ‬
ߐߥኸᴺߦടᎿߖߑࠆࠍᓧߥ޿႐ว߇ᄙ޿‫ޕ‬
ߎߩ໧㗴ࠍ⸃᳿ߒ‫ࠍ⾰↹ޔ‬ะ਄ߐߖࠆߚ߼ߦ‫ޔ‬
޿ߊߟ߆ߩᚻᴺࠍᬌ⸛ߒߚ‫ޔߕ߹ޕ‬චಽߦ X ✢
3. ⹜㛎ᣇᴺ
߇ㅘㆊߒߡ޿ߥ޿⚂ 20qߩ࿁ォⷺߦኻᔕߔࠆㅘ
ⷰኤ↪ߩ⹜㛎૕ߪ‫ޔ‬Si ࠴࠶ࡊߣ FR-4 ၮ᧼߇‫ޔ‬
ㆊ↹௝ࠍ↪޿ߕߦ‫ޔ‬CT ↹௝ߩౣ᭴ᚑࠍⴕߞߚ‫ޕ‬
ࡑࠗࠢࡠߪࠎߛࡏ࡯࡞㧔Sn-37wt%Pb ౒᥏‫ޔ‬એਅ‫ޔ‬
↹௝
bߪ‫ ߩߎޔ‬CT ↹௝ࠍ␜ߔ‫ࠔࡈࠖ࠹࡯ࠕޕ‬
౒᥏ߪࠎߛ㧕ߦࠃߞߡ‫ࡊ࠶࠴ࡊ࠶࡝ࡈޔ‬ធวߐ
ࠢ࠻ߪᄢ᏷ߦૐᷫߐࠇ‫࡞࡯ࡏߛࠎߪޔ‬ౝߦ߅ߌ
ࠇߚ᭴ㅧߢ޽ࠆ‫⋥ޕ‬ᓘ⚂ 150Pm ߩߪࠎߛࡏ࡯࡞
ࠆ Sn ࡝࠶࠴⋧‫ޔ‬Pb ࡝࠶࠴⋧ߩฦ⋧߇್೎น⢻ߥ
߇‫ ⚂ޔ‬250Pm 㑆㓒ߢජ㠽ߦ㈩೉ߐࠇߡ޿ࠆ‫߹ޕ‬
߹ߢ↹⾰߇ᡷༀߐࠇߚ‫ޔߚ߹ޕ‬චಽߦ X ✢߇ㅘ
ߚ‫⹜ޔ‬㛎૕ߩᄖᒻኸᴺߪ‫ޔ‬㐳ߐ 35mm˜᏷ 35mm
ㆊߒߡ޿ߥ޿㗔ၞߦኻߒߡ‫ࠛ࡝࡯ࡈޔ‬ᄌ឵ߦࠃ
˜ෘߐ 1.0mm ߢ޽ࠆ‫ޕ‬
ࠆ๟ᵄᢙⓨ㑆਄ߢᒝᐲࠍᓢ‫ߦޘ‬ᷫዋߐߖࠆࡈࠖ
SP-PCT ࠍ↪޿‫࡞࡯ࡏߛࠎߪޔ‬ౝߩᓸ⚦⚵❱ߩ
࡞࠲࡝ࡦࠣࠍታᣉߒߚ‫↹ޕ‬௝
cߪ‫ ߩߎޔ‬CT ↹
ⷰኤࠍ⹜ߺߚ‫⹜ޕ‬㛎૕ߣ X ✢ᬌ಴ⵝ⟎ߣ߇ᐓᷤ
௝ࠍ␜ߔ‫ޕ‬චಽߣߪ޿߃ߥ޿߇‫ޔ‬ᢳ߼ᣇะߩࠕ
ߒߥ޿ࠃ߁ߦ‫ޔ‬20mm ⒟ᐲߩ〒㔌ࠍ߅޿ߡ⹜㛎૕
࡯࠹ࠖࡈࠔࠢ࠻ߪ‫ⷰ❱⚵ޔ‬ኤߦᄢ߈ߥᓇ㗀ࠍਈ
ࠍ࿁ォࠬ࠹࡯ࠫߦ࿕ቯߒߚ‫ޔߡߞ߇ߚߒޕ‬ᓧࠄ
߃ߥ޿࡟ࡌ࡞߹ߢૐᷫߐࠇߚ‫ޕ‬
ࠇࠆ CT ↹௝ߪ‫ࠍࠫ࠶ࠛ߿߿ޔ‬ᒝ⺞ߒߚ↹௝ߣߥ
ᰴߦ‫ޔ‬චಽߦ X ✢߇ㅘㆊߒߡ޿ߥ޿㗔ၞߢߩ
ࠆ‫⹜ߩߎޕ‬㛎૕ࠍ 180q࿁ォߐߖߡ 900㨪3600 ᨎ
ᖱႎ㊂ਇ⿷ࠍ⵬߁ߚ߼‫ోޔ‬ᛩᓇᢙࠍჇ߿ߒߡ CT
ߩㅘㆊ↹௝ࠍ᠟ᓇߒߚ‫ޕ‬
ㅘㆊ↹௝৻ᨎ޽ߚࠅߩ X
↹௝ߩ↹⾰ࠍᡷༀߔࠆߎߣࠍ⹜ߺߚ‫ޕ‬Fig.2 ߪ‫ޔ‬
✢ߩ㔺శᤨ㑆ߪ 0.3 sec ߢ޽ࠆ‫ޔߚ߹ޕ‬ㅘㆊ↹௝
ోᛩᓇᢙࠍ 900 ߆ࠄ 3600 ߩ▸࿐ߢᄌ߃ߚߣ߈ߩ
ߩ᠟ᓇ㗔ၞߪ‫ޔ‬1000Pm˜656Pm ߣߒߚ‫ޕ‬ㅘㆊ↹
CT ↹௝ߩᲧセࠍ␜ߔ‫ోޕ‬ᛩᓇᢙࠍჇ߿ߔߎߣߦ
௝߆ࠄ CT ↹௝ߩౣ᭴ᚑߦߪ‫ߺ⇥ޔ‬ㄟߺㅒᛩᓇᴺ
ࠃࠅ‫ޔ‬ᓸ⚦⚵❱߇᣿⏕ߦߥࠅ‫ߚ߹ޔ‬ᢳ߼ᣇะߩ
㧔Convolution back-projection method㧕ࠍ↪޿ߚ‫ޕ‬
ࠕ࡯࠹ࠖࡈࠔࠢ࠻߽ૐᷫߔࠆലᨐ߇޽ߞߚ‫ޕ‬
CT ↹௝ߦ߅޿ߡߪ‫ޔ‬LAC ୯ߩಽᏓࠍ⴫␜ߔࠆߎ
ߣߢ‫ޔ‬Pb ࡝࠶࠴⋧߅ࠃ߮ Sn ࡝࠶࠴⋧ߩᒻ⁁ࠍน
5. ߹ߣ߼
ⷞൻߔࠆߎߣ߇ߢ߈ࠆ‫ޔ߅ߥޕ‬X ✢ࠛࡀ࡞ࠡߣ
᡼኿శశḮࠍ೑↪ߒߚ X ✢ࡑࠗࠢࡠ CT ⵝ⟎
ߒߡ‫ޔ‬Sn ߩ K ๆ෼┵ࠃࠅ߽߿߿ૐ޿ 29.0keV ࠍ
㧔SP-PCT㧕ࠍ↪޿ߡ‫ޔ‬㔚ሶၮ᧼㧔ࡈ࡝࠶ࡊ࠴࠶
ㆬᛯߒߚ‫ޕ‬
ࡊߪࠎߛធว᭴ㅧ૕ߩߪࠎߛធวㇱ㧕ࠍ‫ޔ‬㕖⎕
უߢⷰኤߒߚ‫ޕ‬㔚ሶၮ᧼ߩᒻ⁁⊛ߥ․ᓽ㧔㕙Ⓧ
ߪᐢ޿߇⭯޿㧕ࠍ⠨ᘦߒ‫ޔ‬ਇቢోߥㅘㆊ↹௝࠺
ෳ⠨ᢥ₂
࡯࠲߆ࠄ⚵❱ⷰኤࠍⴕ߁ߚ߼ߦචಽߥ↹⾰ߩ CT
1) Uesugi, K. et al., Nucl. Instr. Method., Sec. A,
Vol. 467-468 (2001), 853-856.
↹௝ࠍౣ᭴ᚑߔࠆߎߣ߇น⢻ߣߥߞߚ‫੹ޕ‬ᓟ‫ޔ‬
ታ㓙ߩ㔚ሶၮ᧼᭴ㅧߩⷰኤߦኻߒߡ‫ޔ‬SP-PCT ࠍ
2) Tsuritani, H. et al., Proc. of InterPACK’07,
ㆡ↪ߔࠆߎߣ߇ᦼᓙߐࠇࠆ‫ޕ‬
Fig.1
Fig.2
ASME, New York (2007), IPACK2007-33170
Quality improvement of CT images reconstructed using imperfect projection data
CT images reconstructed using various set of projections with different angular
increments