ඨዉᛛⴚ㐿⊒䈱ᓟ䈱ᣇะᕈ ⎇ⓥ㐿⊒䊒䊨䉳䉢䉪䊃䈱 ࿖㓙ᛛⴚදജ䈮㑐䈜䉎⺞ᩏ⎇ⓥႎ๔ ඨዉ↥ᬺ⎇ⓥᚲ C-䊒䊨䉳䉢䉪䊃䇭࿖㓙ද⺞WG 䊒䊨䉳䉢䉪䊃䇭࿖㓙ද⺞WG ਥᩏ ፉ䇭ᢅ㜞 䋨ን჻ㅢ䋩 ౝኈ 䋱䋮 ඨዉ↥ᬺ䈮䈍䈇䈩ᛛⴚදജ䈏ᔅⷐ䈫䈘䉏䉎⢛᥊ 䋲䋮 ฦ࿖䈱ඨዉ↥ᬺ⢒ᚑ╷ 䋳䋮 ᶏᄖ䈎䉌䈱࿖㓙ᛛⴚදജ䈱䈶ដ䈔 䋴䋮 ᚒ䈏࿖䈱ඨዉ㑐ㅪᛛⴚ䊧䊔䊦 䋵䋮 ࿖ౝ䋯ᶏᄖ䈮䈍䈔䉎ᛛⴚදജ䈱ᒻᘒ䋨⁁䋩 䋶䋮 ᚒ䈏࿖䈮䈍䈔䉎ᛛⴚදജ䈱ㅴ䉄ᣇ 䋷䋮 ᚒ䈏࿖䈮䈍䈔䉎⎇ⓥ㐿⊒ᯏ㑐䋨CoE ᚒ䈏࿖䈮䈍䈔䉎⎇ⓥ㐿⊒ᯏ㑐䋨CoE䋩 CoE䋩䈱ᒻᘒ᩺ STRJ WS: March 3, 2003, T.Fukushima 2 䋱䋮 ඨዉ↥ᬺ䈮䈍䈇䈩ᛛⴚදജ䈏ᔅⷐ䈫䈘䉏䉎⢛᥊ 1-䋱䇭ታ⾰⊛䈭⎇ⓥ㐿⊒⾌䈱ᷫዋ 㧔a㧕⎇ⓥ㐿⊒⾌Ყ₸ߩૐਅ ࿑㪋㪄㪈㩷㩷ඨዉᄁ㜞䊶⸳ᛩ⾗㗵䊶㪑⎇ⓥ㐿⊒⾌䈱ផ⒖ ࿑㪋㪄㪉䇭ኻᄁ㜞Ყセ䋨ᄁ㜞䋽㪈㪅㪇㪇䋩 㪌㪇㪃㪇㪇㪇 ㊄㗵䋨ం䋩 㪋㪇㪃㪇㪇㪇 ᄁ㜞 ⸳ᛩ⾗㗵 ⎇ⓥ㐿⊒⾌ 㪊㪇㪃㪇㪇㪇 㪉㪇㪃㪇㪇㪇 㪈㪇㪃㪇㪇㪇 ኻᄁ㜞Ყセ 㪇㪅㪌㪇 㪇㪅㪋㪇 ⎇ⓥ㐿⊒⾌㪆ᄁ㜞 ⸳ᛩ⾗㗵㪆ᄁ㜞 㪇㪅㪊㪇 㪇㪅㪉㪇 㪇㪅㪈㪇 㪇㪅㪇㪇 㪎㪌 㪇 㪎㪌 㪏㪇 㪏㪌 㪐㪇 㪐㪌 ౖ䋺ㅢ↥⋭㩿㪈㪉␠⺞䈼㪀 㪏㪇 㪏㪌 㪐㪇 㪐㪌 㪇㪇 ᐕᐲ ౖ䋺ㅢ↥⋭㩿㪈㪉␠⺞䈼㪀 ࿑㪋㪄㪊㩷㩷㩷ᚒ䈏࿖䈱⎇ⓥ㐿⊒ᛩ⾗㩷䌶䌳㪅㩷⸳ᛩ⾗ 㪉㪇 㪈㪇 㪌 ᐕ 㪈㪐㪐㪌 㪈㪐㪐㪋 㪈㪐㪐㪊 㪈㪐㪐㪉 㪈㪐㪐㪈 㪈㪐㪐㪇 㪈㪐㪏㪐 㪈㪐㪏㪏 㪈㪐㪏㪎 㪈㪐㪏㪍 㪈㪐㪏㪌 㪈㪐㪏㪋 㪈㪐㪏㪊 㪈㪐㪏㪉 㪈㪐㪏㪈 㪇 㪈㪐㪏㪇 䋦 㪈㪌 ㅧᬺ㩷㩿㩼㪀 ൻቇ ㋕㍑ ┇ᬺ㪆⍹ ᯏ᪾ ౖ㪑㩷䍀ᛛⴚ⚻ᷣ⺰䍁 STRJ WS: March 3, 2003, T.Fukushima 3 㧔b㧕ᛛⴚ㧛ຠߩ㒸⣣ൻ₸ߩടㅦߣ ຠᒰߚࠅߩ⎇ⓥ㐿⊒⾌ߩᕆჇ ࿑㪋㪄㪌㩷ᚒ䈏࿖䈱㐿⊒䊥䊷䊄䉺䉟䊛 ࿑㪋㪄㪋㩷㩷㩷ᚒ䈏࿖䈱ຠ䊤䉟䊐䉰䉟䉪䊦 㪌㪅㪇 㪈㪌㪅㪇 㪈㪋㪅㪎 㪈㪊㪅㪈 㪈㪈㪅㪈 ᐕ 㪈㪇㪅㪇 ㋕㍑ 㪈㪈㪅㪈 㪈㪇㪅㪐 㪏㪅㪐 㪎㪅㪊 㪌㪅㪋 㪌㪅㪇 ోᬺಽ㊁ᐔ ဋ ⥄േゞ 㪐㪅㪋 㪐㪅㪈 㪏㪅㪈 㪌㪅㪊 㪊㪅㪏 㪋㪅㪍 㪉㪅㪐 ඨዉ䊶䊂䊋䉟 䉴 㪇㪅㪇 㪏㪐 㪐㪋 㪐㪐 ᐕᐲ 㐿⊒䊥䊷䊄䉺䉟䊛㩷㩿ᐕ㪀 ↥ᬺᯏ᪾ 㪋㪅㪇 㪋㪅㪎 㪋㪅㪊 㪋㪅㪉 㪊㪅㪇 㪊㪅㪈 㪉㪅㪇 㪊㪅㪍 㪊㪅㪋 㪊㪅㪉 㪊㪅㪇 㪉㪅㪋 㪊㪅㪇 㪉㪅㪍 㪉㪅㪊 㪈㪅㪐 㪈㪅㪌 ోᬺಽ㊁ᐔဋ ㋕㍑ ⥄േゞ ඨዉ䊶䊂䊋䉟䉴 ↥ᬺᯏ᪾ 㪈㪅㪇 㪇㪅㪇 㪏㪐 㪐㪋 ᐕᐲ 㪐㪐 STRJ WS: March 3, 2003, T.Fukushima 4 1-䋲䇭⎇ⓥ㐿⊒ኻ⽎㗔ၞ䈱ᄢ 㧔a㧕highhigh-k⛘✼⤑᧚ᢱߩ㐿⊒ߣታ↪ൻ ࿑㪋㪄㪍㩷 㩷 㪿㫀 㪾㪿㪄㫂㩷 䈮ⷐ᳞䈘 䉏䉎 ᛛⴚ ዉᐕ 2001 2002 2003 2004 2005 2006 2007 2008 2010 ᛛⴚ䊉䊷䊄 (nm) MPU/ASIC LOP EOT (nm) LSTP DRAM 130 115 100 90 80 70 65 70 45 1.3–16 2.0-24 1.2–1.5 1.1–1.6 0.9–1.4 0.8–1.3 0.7–1.2 0.6–1.1 1.8-2.2 1.6-2.0 1.4-1.8 1.2-1.6 1.1-1.5 1.0-1.4 0.5–0.8 0.8-1.2 2.4-2.8 2.2-2.6 2.0-2.4 1.8-2.2 1.6-2.0 1.4-1.8 1.2-1.6 0.9-1.3 5 4.5 4.1 3.6 3.3 3 2.7 1.55 2011 㧔b㧕ૐ⺃㔚₸ ૐ⺃㔚₸ NQY NQYM⤑᧚ᢱߩ⛉ࠅㄟߺߣታ↪ൻ k ዉᐕ 2001 2002 2003 2004 2005 2006 2007 ᛛⴚ䊉䊷䊄䇭 (nm) 130 <2.7 115 <2.7 100 <2.7 90 <2.4 80 <2.4 70 <2.4 65 <2.1 4.1 3.0–4.1 3.0–4.1 3.0–4.1 3.0-4.1 2.6–3.1 2.6–3.1 MPU/ASIC DRAM 2008 70 2010 2011 45 <1.9 2.3–2.7 ࿑ 㪋㪄㪐㩷 㩷 㫃 㫆㫎㪄㫂 㩷 䈮 ⷐ᳞ 䈘 䉏 䉎 ᛛ ⴚ STRJ WS: March 3, 2003, T.Fukushima 5 㧔D㧕࠰ࠣࡈࠖᛛⴚ PXL PEL IPL Node 130 2000 01 90 02 03 04 65 05 06 07 45 45 08 09 10 32 11 12 13 22 nm 14 PXL PEL IPL 15 2016 KrF(248nm) KrF(248nm) PXL PEL IPL PXL PEL IPL PXL PEL IPL ML2 EPL EUV F2 + PSM ML2 EPL EUV ML2 EPL EUV 㕟ᣂᛛⴚ䈱 㐿⊒ EPL EUV F2 ArF + PSM ArF(193nm) ArF(193nm) ArF KrF + PSM NGL 157nm 157nm EUV(13nm) EPL ML2 IPL PEL PXL ዉᐕ 2001 2004 2007 2010 2013 2016 ᛛⴚ䊉䊷䊄 (130nm) (90) (65) (45) (32) (22) EUV = extreme ultraviolet EPL = electron projection lithography ML2 = mask less lithography IPL = ion projection lithography PXL = proximity x-ray lithography PEL = proximity electron lithography PSM=phase shift mask ࿑ 㪋㪄㪏䇭 䊥 䉸 䉫 䊤 䊐 䉞 䈮 ⷐ ᳞ 䈘 䉏 䉎 ᛛ ⴚ ౖ +645 STRJ WS: March 3, 2003, T.Fukushima 6 1-3䇭⎇ⓥ⠪ਇ⿷ ࿑㪋㪄㪈㪇㩷⎇ⓥ㑐ଥ⠪ᢙ䋨⥄ὼ⑼ቇ䋩ផ⒖ 㪎㪇㪇㪃㪇㪇㪇 ✚ᢙ䋨⎇ⓥ⠪䋩 ੱ ✚ᢙ䋨ഥ⠪䋩 㪍㪇㪇㪃㪇㪇㪇 ✚ᢙ䋨ᛛ⢻⠪䋩 㪌㪇㪇㪃㪇㪇㪇 ડᬺ䋨⎇ⓥ⠪䋩 㪋㪇㪇㪃㪇㪇㪇 ડᬺ䋨ഥ⠪䋩 㪊㪇㪇㪃㪇㪇㪇 ડᬺ䋨ᛛ⢻⠪䋩 㪉㪇㪇㪃㪇㪇㪇 ⎇ⓥᯏ㑐䋨⎇ⓥ⠪䋩 㪈㪇㪇㪃㪇㪇㪇 ⎇ⓥᯏ㑐䋨ഥ⠪䋩 㪇 ⎇ⓥᯏ㑐䋨ᛛ⢻⠪䋩 㪐㪍 㪐㪎 㪐㪏 㪐㪐 㪇㪇 㪇㪈 ᄢቇ╬䋨⎇ⓥ⠪䋩 ᐕ 㩷ౖ㪑㩷✚ോ⋭䇸ᣣ䈻䈱⛔⸘㪉㪇㪇㪉䇹 㪋㪌 㪋㪇 㪊㪌 㪊㪇 㪉㪌 㪉㪇 㪈㪌 㪈㪇 㪌 㪇 㪉㪌㪇㪇㪇 㪉㪇㪇㪇㪇 㪈㪌㪇㪇㪇 ⎇ⓥડᬺᢙ ⎇ⓥ㑐ଥ⠪䋨ੱ䋩 ࿑㪋㪄㪈㪈㩷⎇ⓥ䉕ⴕ䈦䈩䈇䉎ડᬺᒰ䉍䈱⎇ⓥ㑐ଥ⠪ᢙ䋨⥄ὼ ⑼ቇ䋩ផ⒖ ⎇ⓥ㑐ଥᓥ⠪ ⎇ⓥ⠪ ഥ⠪ ળ␠╬ᢙ 㪈㪇㪇㪇㪇 㪐㪍 㪐㪎 㪐㪏 㪐㪐 㪇㪇 㪇㪈 ᐕᐲ 㩷ౖ㪑㩷✚ോ⋭䇸ᣣ䈻⛔⸘㪉㪇㪇㪉䇹 STRJ WS: March 3, 2003, T.Fukushima 7 䋲䋮 ฦ࿖䈱ඨዉ↥ᬺ⢒ᚑ╷ 2-1䇭ඨዉ/ 䇭ඨዉ/ㅧⵝ⟎䋨೨Ꮏ⒟䋩䈱ᣣ☨䈱⩄䉲䉢䉝ផ⒖ 80 60 40 20 ᣣᧄ ☨࿖ 2000 ᐕ 1998 1996 1994 1992 1990 1988 1986 1984 1982 1980 1978 0 80 60 40 20 ᣣᧄ ☨࿖ STRJ WS: March 3, 2003, T.Fukushima 2000 ᐕ 1998 1996 1994 1992 1990 1988 1986 1984 1982 1980 1978 0 8 2-2䇭☨࿖䈱ඨዉ↥ᬺ⢒ᚑ╷䇭 䇭☨࿖䈱ඨዉ↥ᬺ⢒ᚑ╷䇭 䋨㪸䋩 ㅢ╷ 80 60 40 20 ᣣᧄ ☨࿖ 85 86 87 88 89 90 91 92 93 94 95 96 97 98 99 00 2000 ᐕ 1998 1996 1994 1992 1990 1988 1986 1984 1982 1980 1978 0 ᐕ 䊮䊏䊮䉫⺞ᩏ㐿ᆎ ᐕ䇮ᣣᧄ64KDRAM䈱䉻䊮䊏䊮䉫⺞ᩏቯ䇮 䈱䉻䊮䊏䊮䉫⺞ᩏቯ䇮 256KDRAM䈱䉻䊮 85ᐕ䇮ᣣᧄ 85 ᐕ䇮ᣣᧄ64KDRAM 64KDRAM 䈱䉻䊮䊏䊮䉫⺞ᩏቯ䇮256KDRAM 256KDRAM 䈱䉻䊮 ᐕ䇮╙৻ᰴᣣ☨ඨዉදቯ✦⚿(256K 䈜䉎SA(Suspension දቯ)) 䈜䉎 SA(Suspension Agreement) ᐕ䇮╙৻ᰴᣣ☨ඨዉදቯ✦⚿(256Kએ䈱 એ䈱DRAM 䈮㑐䈜 දቯ 86ᐕ䇮╙৻ᰴᣣ☨ඨዉදቯ✦⚿ Agreement)දቯ 86 (256K એ䈱DRAM ᐕ䇮╙ੑᰴᣣ☨ඨዉ ዉදቯ✦⚿( ዉදቯ✦⚿( ඨዉ䉲䉢䉝20% ඨዉ䉲䉢䉝20% 䈱␜╬) 䈱␜╬) 91ᐕ䇮╙ੑᰴᣣ☨ඨዉ 91 ᐕ䇮╙ੑᰴᣣ☨ඨዉදቯ⚳⚿ 96ᐕ䇮╙ੑᰴᣣ☨ඨዉදቯ⚳⚿ 96 ᐕ䇮╙৻ᰴ᳃㑆วᗧᚑ┙ 96ᐕ䇮╙৻ᰴ᳃㑆วᗧᚑ┙ 96 ᐕ䇮╙৻࿁WSC ᐕ䇮╙৻࿁WSC㐿 97ᐕ䇮╙৻࿁ 97 WSC 㐿 ᐕ䇮╙䊆࿁WSC ᐕ䇮╙䊆࿁WSC㐿 98ᐕ䇮╙䊆࿁ 98 WSC 㐿 ᐕ䇮╙ਃ࿁WSC ᐕ䇮╙ਃ࿁WSC㐿 99ᐕ䇮╙ਃ࿁ 99 WSC 㐿 99ᐕ䇮╙৻ᰴ᳃㑆දቯ⚳⚿ 99 ᐕ䇮╙৻ᰴ᳃㑆දቯ⚳⚿ STRJ WS: March 3, 2003, T.Fukushima 9 䋨䌢䋩䇭ఝㆄ⒢䋯↥ᬺ⢒ᚑ╷ 80 60 40 㪎㪎 㪎㪏 㪎㪐 㪏㪇 2000ᐕ 1998 1996 ☨࿖ 1992 1990 1988 1986 1984 1982 1980 ᣣᧄ 1978 0 1994 20 㪏㪈 㪏㪉 㪏㪊 㪏㪋 㪏㪌 㪏㪍 㪏㪎 㪏㪏 㪏㪐 㪐㪇 㪐㪈 㪐㪉 㪐㪊 㪐㪋 㪐㪌 㪐㪍 㪐㪎 㪐㪏 㪐㪐 㪇㪇 ᐕ ᴺ㩿⎇ⓥ⾌䈱Ⴧಽ⊛⒢㗵ប㒰㪉㪌㩼㪀 㪏㪈ᐕ䇮⚻ᷣᓳ⥝⒢ᴺ 䋼ఝㆄ⒢䋾 㪏㪍ᐕ䇮ᡷᱜ⒢ᴺ㩿⎇ⓥ㐿⊒㩿㪩㩽㪜㪀ប㒰䈱ㆡ↪㪀 㪏㪐ᐕ䇮⒢⺞ᴺ䋨ប㒰▚ቯᴺ ᴺ䈱৻ㇱᄌᦝ䋩㸢㪉㪇㪇㪋 㪐㪐ᐕ䇮⎇ⓥ䉟䊮䉶䊮䊁䉞䊑ᡷ⦟ᴺ 㪏㪇ᐕ䇮ᄢቇ䈶ዊⷙᮨડ ડᬺ․⸵ᚻ⛯䈐ᴺ㩿䊋䉟䊄䊷䊦ᴺ㪀 䋼↥ᬺ⢒ᚑ╷䋾 㪏㪉ᐕ䇮ዊⷙᮨડ ડᬺ㐿⊒ᴺ㩿ዊⷙᮨડᬺ䈱⎇ⓥ㐿⊒䈱Ⴧട䉕ଦㅴ㪀 ᐕ䇮࿖ኅදജ⎇ⓥᴺ㩿⁛භᱛᴺ䈱✭䇯⎇ⓥ㐿⊒䈱 㪏㪋ᐕ 䈱දജଦㅴ㪀 㪏㪍ᐕ䇮ㅪ㇌ᛛⴚ⒖ォᴺ㩿↥ᬺ⇇䇮ᄢቇ䇮࿖⎇䈱 䈱දജ⎇ⓥ䉕ᅑബ㪀 㪏㪏ᐕ䇮㜞ᐲᛛⴚ䊒䊨䉫䊤䊛㩿㪘㪫㪧㪀䉕⸳ ⸳┙ 㪐㪊ᐕ䇮࿖ኅ ኅ⑼ቇᛛⴚ⹏⼏ળ㩿㪥㪪㪫㪚㪀⸳┙ 㪐㪋ᐕ ᐕ䇮ඨዉᛛⴚ⹏⼏ળ㩿㪪㪫㪚㪀⸳┙ ෳ⠨䋩 ඨዉ↥ᬺ⇇ 㪐㪏ᐕ䇮㪝㪚㪩㪧⸳┙ 㪎㪎ᐕ䇮㪪㪠㪘⸳┙ 㪏㪉ᐕ䇮㪪㪩㪚⸳┙ ┙ 㪏㪎ᐕ䇮㪪㪜㪤㪘㪫㪜㪚㪟⸳┙ 㪐㪈ᐕ䇮㪤㫀㪺㫉㫆㫋㪼㪺㪿㩷㪉㪇 㪇㪇㩷㪮㫆㫉㫂㫊㪿㫆㫇 㪐㪉ᐕ䇮㪪㪠㪘䈲㪥㪫 㪫㪩㪪㩷㪈㪐㪐㪉 㪐㪌ᐕ䇮㪪㪜㪤㪘㪫㪜㪚㪟䈻䈱ᐭᡰេ㊄ᛩਛᱛ䉕ⷐ⺧ 㪐㪎ᐕ䇮㪪㪜㪤㪘㪫㪜㪚㪟䈻䈱㪛㪘㪩㪧㪘⾗㊄㪇 㪐㪏ᐕ䇮㪤㪘㪩㪚㪦⸳┙ 㪐㪏ᐕ䇮㪠㫅㫋㪼㫉㫅㪸㫋㫀㫆㫅㪸㫃㩷㪪㪜㪤㪘㪫㪜㪚㪟⸳┙ 㪐㪐ᐕ䇮㪠㪫㪩㪪㪈㪐㪐㪐 㪇㪇ᐕ䇮ᣂ㪠㫅㫋㵭㩷㪪㪜㪤㪘㪫㪜㪚㪟⸳┙ STRJ WS: March 3, 2003, T.Fukushima 10 䋨䌣䋩䇭ᛛⴚ䈱࿖ౝ࿐䈇ㄟ䉂 80 60 40 㪎㪏 㪎㪐 㪏㪇 㪏㪈 㪏㪉 㪏㪊 㪏㪋 㪏㪌 㪏㪍 㪏㪎 㪏㪏 㪏㪐 㪐㪇 㪐㪈 㪐㪉 㪐㪊 㪐㪋 㪐㪌 㪐㪍 㪐㪎 㪐㪏 㪐㪐 㪇㪇 2000ᐕ 1998 1996 1992 ☨࿖ 1990 1988 1986 1984 1982 1980 ᣣᧄ 1978 0 1994 20 ᐕ 㪤㩻 ⒖ 㪪㪜㪤㪘㪫㪜㪚㪟䈱੍▚ផ⒖ 㪉㪇㪇 㪪㪜㪤㪘㪫㪜㪚 㪟䈻䈱ᛩ⾗ 㪤㩻㪆ᐕ ᐭ㩿㪛㪘㪩㪧㪘㪀⾗㊄㩷䌾㪈㪇㪇㪤 㪈㪇㪇 ᐕ ᳃㑆⾗㊄㩷䌾㪈㪇㪇㪤㩻㪆ᐕ 㪇 ᄢቇ䈻䈱 ᛩ⾗ 㪪㪩㪚 ᐭ䊶᳃㑆⾗㊄㩷䌾㪊㪇㪤㩻㪆ᐕ 㪝㪚㪩㪧㩿㪤㪘㪩㪚㪦㪀 ▚ផ⒖ 㪪㪩㪚㪃㩷㪝㪚㪩㪧㩿㪤㪘㪩㪚㪦㪀䈱੍▚ 㪈㪇㪇 ᐭ䊶᳃㑆⾗㊄㩷䌾㪍㪇㪤㩻㪆ᐕ䈱⸘↹ 㪁㪪㪩㪚㪃㩷㪝㪚㪩㪧䊚䉾䉲䊢䊮 㪑㩷㩷☨࿖ඨዉᬺ⇇䈮ᔅⷐ䈭ੱ᧚䈱⢒ᚑ 㪑㩷㩷ᄢቇ䈪䈱⸳⸘䊶䊁䉴䊃䊶㈩✢ᛛⴚ㪼㫋㪺䈱㐿⊒ᒝൻ 㪉㪇㪇 㪤㩻 㪓䉮䊜䊮䊃㪕 䈱࿐䈇ㄟ䉂㩹䉕ታᣉ䇯 ⿒⦡ㇱಽ䈲䇮ᶏᄖ䊜䊷䉦䈱ෳട䉕ឃ㒰䈚䇮☨࿖ౝ䈪㩹ᛛⴚ䈱 STRJ WS: March 3, 2003, T.Fukushima 11 䋨䌤䋩䇭ਥⷐ⎇ⓥ㐿⊒䊒䊨䉳䉢䉪䊃 ᦼ㑆 ᯏ㑐䇮ᬺ䇮ᐲ 䋱䋹䋸䋲䌾 䊶㪪㪩㪚 䋱䋹䋸䋷䌾 䊶㪪㪜㪤㪠㪆㪪㪜㪤㪘㪫㪜㪚㪟 䋱䋹䋸䋷䌾 䊶㪪㪜㪤㪘㪫㪜㪚㪟 䋱䋹䋹䋶䌾䋱䋹䋹䋸 䊶㪠㪊㪇㪇㪠 䋱䋹䋹䋸䌾 䊶㪠㪪㪜㪤㪘㪫㪜㪚㪟 䋱䋹䋹䋸䌾 䊶㪝㪚㪩㪧 㐿⊒ᡰេኻ⽎ ࿖䈎䉌䈱ഥ㊄㗵䇮ᡰេ₸ ၮ␆Ბ㓏䈱ᛛⴚ㐿⊒䉕ᡰេ䈜䉎䇯㽲ᄢቇ䊶࿖┙⎇䈫䈱ห⎇ⓥ䇮㽳 ᄢቇᡰេ䇮㽴․䊒䊨䉳䉢䉪䊃䈻䈱ᡰេ╬䇯㪈㪐㪐㪊ᐕ䈮䈲ෳടડᬺ㪍㪏 ␠䇯 ⋉䉮䊮䉸䊷䉲䉝䊛䈪䈅䉎䇯ㅧⵝ⟎䇮⚛᧚䇮䉸䊐䊃╬䈱㐿⊒䉕ട⋖ ડᬺ䈱ળ⾌䈪ታᣉ䇯 ☨࿖ඨዉ䊜䊷䉦䊶ⵝ⟎䊜䊷䉦䈱┹ജ⛽ᜬ䊶࿁ᓳ䉕⋡⊛䈫䈚䈢⋉ 䉮䊮䉸䊷䉲䉝䊛㩿ඨቭඨ᳃䈱․ᱶᴺੱ㪀䇯 ඨዉ䊜䊷䉦㪈㪈␠䈮䉋䉍㪎⊖ਁ䊄䊦䈪䉴䉺䊷䊃䈚䇮㪈㪐㪐㪊ᐕ 䈮䈲ㆇ༡ⷙᮨ㪊㪍⊖ਁ䊄䊦䈮ᄢ䋨㪎㪇㩼ળຬળ␠䇮ᱷ䉍䈲 ࿖㒐⋭䈫㪪㪜㪤㪘㪫㪜㪚㪟䈏⽶ᜂ䋩䇯 㪊㪅㪌⊖ਁ䊄䊦㪆ᐕ䇮࿖䈎䉌䈱ഥ䈲䈭䈚䇯 㪉㪇㪇⊖ਁ䊄䊦㪆ᐕ䋨࿖䋽㪛㪘㪩㪧㪘䈏㪌㪇㩼䋩䈪䉴䉺䋭䊃䈚䈢䈏 㪈㪐㪐㪎ᐕ䈮࿖䈱⾗㊄䈲ᛂ䈤ಾ䉍䈫䈭䉍䇮䈲ᬺ⇇⾗㊄ 䈱䉂䈪ㆇ༡䇯 㪊㪇㪇㫄㫄ⵝ⟎䊶᧚ᢱ䈱⹏ଔ䇮ᮡḰൻ䈱䊡䊷䉱ⷐ᳞䉕䉁䈫䉄䇮㪪㪜㪤㪠䈮䉟 㪪㪜㪤㪘㪫㪜㪚㪟䈱㪈㪇㪇䋦⾗䈪⸳┙䇯䇭ᬺⷙᮨ䈲㪈㪏䊱 䊮䊒䉾䊃䈜䉎ᯏ㑐䇯ᛛⴚ⠪㪋㪇㪄㪌㪇ฬ䈪᭴ᚑ䇯 䈪䇮੍▚ⷙᮨ䈲㪉㪍⊖ਁ䊄䊦䇯ഥ㊄ਇ䇯 㪪㪜㪤㪘㪫㪜㪚㪟䈱ሶળ␠䈫䈚䈩⸳┙䇯㪉㪇㪇㪇ᐕ㪈㪈ᣣ䉋䉍䇮৻ᧄൻ䈘䉏 ഥ㊄䈭䈚䇯 䈢䇯 ၮ␆⊛⎇ⓥ䉕ᄢቇ⟲Ფ䈮ⴕ䈉䇯㈩✢ᛛⴚ䇮䊂䉱䉟䊮䊶䊁䉴䊃䈱㪉ᬺ ฦᬺ㪈㪇⊖ਁ䊄䊦䌸㪍ᬺ㪆ᐕ㬍㪈㪇ᐕ㑆䋨㪉㪌㩼࿖ᡰេ䋩䇯 䋨䍪䍉䍎䍔䍛䍜䍻䍞䍎䋩䈪䉴䉺䊷䊃䈚䇮ᰴ䈮䊥䉸䇮ᧂቯ㪊䇮ว⸘㪍ᬺ䉕䉄䈙䈜䇯 㪤㪘㪩㪚㪦䈫㪛㪘㪩㪧㪘䈏ㆇ༡䊶▤ℂ䇯 STRJ WS: March 3, 2003, T.Fukushima 12 2-3䇭᰷Ꮊ䈱ඨዉ↥ᬺ⢒ᚑ╷䇮ਥⷐ⎇ⓥ㐿⊒䊒䊨䉳䉢䉪䊃 ᰷Ꮊ䈱ඨዉ↥ᬺ⢒ᚑ╷䇮ਥⷐ⎇ⓥ㐿⊒䊒䊨䉳䉢䉪䊃 EUᐭ䈱↥ᬺ⢒ᚑ╷ EUᐭ䈱↥ᬺ⢒ᚑ╷( ᐭ䈱↥ᬺ⢒ᚑ╷(৻⥸) ৻⥸) z EUട⋖ฦ࿖ᐭ䈣䈔䈪䈭䈒䇮EUᐭ䈫䈚䈩䉅ᄙ䈒䈱↥ᬺ⢒ᚑ╷䉕䈫䈦䈩䈇䉎䇯 z 䈠䈱ℂ↱䈲䇮 • 㽲☨࿖䉇ᣣᧄ䈱ડᬺ䈮Ყ䈼䇮࿖㓙┹ജ䈏ᒙ䈇䈫䈇䈉⼂䈏EUౝㇱ䈮䈅䈦䈢䇯 • 㽳ട⋖ฦ࿖䈲න⁛䈪䈲☨࿖䉇ᣣᧄ䈮Ყ䈼䈩Ꮢ႐䈏ዊ䈘䈇䇯 • 㽴ട⋖ฦ࿖Ფ䈮ⷙᩰ䈏⇣䈭䉎䈢䉄䈮ᄢ䈐䈭ડᬺ䈏⢒䈤䈮䈒䈇䇯 z 䈠䈱䈢䉄䇮వ䈝ട⋖ฦ࿖㑆䈱ⷙᩰ䈱⛔৻䉕࿑䉍䇮᰷Ꮊ䈫䈚䈩৻䈧䈱ᄢ䈐䈭Ꮢ႐䉕ᒻᚑ䈜䉎䈮ᵈജ䈚䈩䈇䉎䇯 ਥⷐ⎇ⓥ㐿⊒䊒䊨䉳䉢䉪䊃 ᦼ㑆 ᯏ㑐䇮ᬺ䇮ᐲ 䋱䋹䋸䋴䌾 䊶㪠㪤㪜㪚 䋱䋹䋸䋵䌾 䊶㪜㪬㪩㪜㪢㪘 䋱䋹䋸䋹䌾䋱䋹䋹䋶 䊶㪡㪜㪪㪪㪠 䋱䋹䋹䋷䌾䋲䋰䋰䋰 䊶㪤㪜㪛㪜㪘 䋲䋰䋰䋱䌾 䋱䋹䋹䋷䌾 䊶㪤㪜㪛㪜㪘㪂 䊶㪘㪣㪙㪘䉶䊮䉺䊷 㐿⊒ᡰេኻ⽎ ࿖䈎䉌䈱ഥ㊄㗵䇮ᡰេ₸ ὐ䈲䊔䊦䉩䊷㪆㪣㪼㫌㫍㪼㫅ᄢቇౝ䇯䇭⋡⊛䈲䇮ඨዉ㑐ㅪ䈱㽲↥ቇද ജ䋨ၮ␆⎇ⓥ䇮ᔕ↪⎇ⓥ䋩䇮㽳䊔䊦䉩䊷㪆䊐䊤䊮䉻䊷䉴ᣇ䈱↥ᬺ⢒ ᚑ䈫ੱ᧚ᵹ㒐ᱛ䇯 㪈㪐㪏㪌ᐕ䈮䈏ឭ໒䈚䇮㪜㪬䈫᰷Ꮊ⻉࿖䈱วᗧ䈱ਅ䈮㐿ᆎ䈘䉏䈢䇯᰷ Ꮊડᬺ䈱࿖㓙┹ജᒝൻ䉕⥋㗴䈫䈚䈩䈍䉍䇮Ꮢ႐ᕈ䈱䈅䉎↪ ຠ䉇ታ↪Ꮏ⒟ᛛⴚ䈱㐿⊒䈏ਥ⋡⊛䇯᰷Ꮊ⛔৻ⷙᩰ䈱㜞ຠ䊁䊧 䊎䇮䊂䉳䉺䊦䊁䊧䊎䈭䈬䈏ઍ⊛䈭ᚑഞ䇯 䊄䉟䉿䈮䈩ഃ⸳䇯᰷Ꮊ䈱ᰴઍඨዉ䉕ห䈪㐿⊒䋨వ┵䉲䉴䊁䊛䇮 䊂䉱䉟䊮ᴺ䇮ⵝ⟎䇮᧚ᢱ䋩䈜䉎䈢䉄䈱ቭ᳃วห⚵❱䇯㪈㪐㪐㪊ᐕᤨὐ䈪䇮 ડᬺ䇮⎇ⓥᯏ㑐䇮ᄢቇว䉒䈞䈩㪈㪋䊱࿖䈎䉌㪈㪌㪇࿅䈏ട⋖䇮㪍㪉ઙ䈱 䊒䊨䉳䉢䉪䊃䈮ข⚵䉖䈣䇯 㪈㪐㪏㪌ᐕ䈎䉌㐿ᆎ䈘䉏䈢㪜㪬㪩㪜㪢㪘⸘↹䈱ਛ䈪㪈㪐㪏㪐ᐕ㐿ᆎ䈚䈢㪡㪜㪪㪪㪠䈱 ᓟ⛮⸘↹䇯╙㪈ᦼ䋨䌾㪈㪐㪐㪏ᐕ䋩䈲䊙䊦䉼䊜䊂䉞䉝䉇㔚᳇ㅢାะ䈔㪘㪪㪠㪚 䉇ᣂ䈢䈭ඨዉ↢↥ᛛⴚ㐿⊒䇮╙㪉ᦼ䈲⒖േㅢାะ䈔䊂䊋䉟䉴䇮 ⥄േゞะ䈔䇮㔚ሶขᒁ↪㪠㪚䉦䊷䊄㐿⊒䈭䈬䇯ෳട࿖䈲㪈㪈䇯 䉴䉮䉾䊃䊤䊮䊄㐿⊒␠䈏䉲䉴䊁䊛㪣㪪㪠ὐ䉕⋡ᜰ䈜䊒䊨䉳䉢䉪䊃䈫䈚䈩 㐿ᆎ䇯ᄢቇ䉕ਛᩭ䈫䈜䉎䉲䉴䊁䊛䊶䊧䊔䊦䊶䉟䊮䊁䉫䊧䊷䉲䊢䊮⎇ⓥ ᚲ䇮㪠㪧ขᒁᚲ㩿㪭㪚㪯㪀䈫䊂䉱䉟䊮䊐䉜䉪䊃䊥䈱㪊␠䈱㓸Ⓧലᨐ䉕⁓䈉䇯 㪉㪇㪇㪇ᐕ੍▚䈲㪈㪇㪊⊖ਁ䊡䊷䊨䇮↥㪎㪈⊖ਁ䊡䊷䊨䇮ቭ㪊㪉 ⊖ਁ䊡䊷䊨䇯 䊜䊮䊋䊷࿖䈲㪊㪌䊱࿖䈪䈅䉍䇮㪉㪇㪇㪈ᐕᐲ✚㗵䈲㪈㪇㪃㪈㪍㪎⊖ ਁ䊡䊷䊨䇮㪐䈧䈱ᛛⴚಽ㊁䈮䉒䈢䉍㪍㪎㪎䈱䊒䊨䉳䉢䉪䊃䉕 ㅴ䉄䈩䈇䉎䇯 ✚㗵㪊㪎㪌⊖ਁ䊡䊷䊨㪆ᐕ䇮㪏ᐕ㑆䈪⚂㪊㪃㪇㪇㪇ం䈪䇮ડᬺ䊶 ⎇ⓥᯏ㑐䈪ว⸘㪌㪇㩼䇮ฦ࿖ᐭ䊶㪜㪬ᆔຬળ䈏ฦ㪉㪌㩼 ⾗䇯 ✚㗵㪉㪃㪇㪇㪇⊖ਁ䊡䊷䊨䋯䋴ᐕ㑆䈪䇮ડᬺ䈫⎇ⓥᯏ㑐䈪ว ⸘㪌㪇㩼䇮ฦ࿖ᐭ䈫㪜㪬ᆔຬળ䈏ฦ㪉㪌㩼⾗䇯 ⚂㪈㪇㪇ం㪆ᐕ䇯ഥ㊄ਇ䇯 STRJ WS: March 3, 2003, T.Fukushima 13 2-4䇭ᣣᧄ䈱ඨዉ↥ᬺ⢒ᚑ╷䇮ਥⷐ⎇ⓥ㐿⊒䊒䊨䉳䉢䉪䊃 ᣣᧄ䈱ඨዉ↥ᬺ⢒ᚑ╷䇮ਥⷐ⎇ⓥ㐿⊒䊒䊨䉳䉢䉪䊃 ᐕ ࠠࡖ࠶࠴ࠕ࠶ࡊᦼ㧦 1975ᐕ㨪1976ᐕ 1975ᐕ 1976ᐕ 䉟䊮䊐䊤ᒻᚑᦼ 1994ᐕ㨪1998ᐕ 1994ᐕ 1995ᐕ 1996ᐕ 1996ᐕ 1998ᐕ ↥ᬺ᭴ㅧᄌൻኻᔕᦼ䋺 2001ᐕ㨪 2001ᐕ 2001ᐕ 2001ᐕ ࠦࡦ࠰ࠪࠕࡓฬ ᣣᧄඨዉ↥ᬺၮ⋚ᒻᚑ LSI㐿⊒ࡊࡠࠫࠚࠢ࠻ LSIᛛⴚ⎇ⓥ⚵ว ᣣ☨⾏ᤃᡂᓟ ඨዉ↥ᬺ⎇ⓥᚲ(SIRIJ) ඨዉℂᎿቇࡦ࠲㧙(STARC) ඨዉవ┵࠹ࠢࡁࡠࠫ࠭(Selete) ᛛⴚ⎇ⓥ⚵วవ┵㔚ሶᛛⴚ㐿⊒ᯏ᭴(ASET) ඨዉᛛⴚࡠ࠼ࡑ࠶ࡊᆔຬળ(STRJ㧛JEITA) ࡊࡠࠫࠚࠢ࠻ਥዉ ߔ߆ ࡊࡠࠫࠚࠢ࠻ MIRAIࡊࡠࠫࠚࠢ࠻ HALCAࡊࡠࠫࠚࠢ࠻ STRJ WS: March 3, 2003, T.Fukushima 14 䋳䋮 ᶏᄖ䈎䉌䈱࿖㓙ᛛⴚදജ䈱䈶ដ䈔 1997ᐕ 1997ᐕ z ╙1࿁WSC䈮䈩䇮ඨዉᛛⴚ䈱ᮡḰൻ╬䈮㑐䈜䉎࿖㓙ᛛⴚදജ䈱㊀ⷐᕈ䈏⼂䈘䉏䇮 300mm䉡䉢䊊䈱ᮡḰൻ䉕ផㅴ䈜䉎䈖䈫䈏⏕䈘䉏䈢䇯 z I300I䈫Selete䇮I300I䈫J300䈫䈱㑆䈪䇮300mm䉡䉢䊊ᛛⴚ䈮㑐䈜䉎ᛛⴚᖱႎ䈱឵䉕ⴕ䈉䈖 䈫䈏䉁䈦䈢䇯 1998ᐕ 1998ᐕ z ╙2࿁WSC䈮䈩䇮SIA䉋䉍ඨዉᛛⴚ䊨䊷䊄䊙䉾䊒䈱หᚑ䈱ឭ᩺ • 6䈱ᣣ☨ඨዉ䊃䉾䊒ળ⺣䈮䈍䈇䈩ౣ䈶ෳട䈱ⷐ⺧ 1999ᐕ 1999ᐕ z ╙3࿁WSC䈮䈩䇮SIA䈲䇮࿖㓙ᛛⴚදജ䈱ᒻᘒ䈫䈚䈩Communication䍂 Cooperation䍂 Collaboration䈱ਃ䈧䉕ข䉍䈕䇮䈫䉍䉒䈔Collaboration䈱㊀ⷐᕈ䉕ᒝ⺞䇯 2000ᐕ 2000ᐕ z ╙3࿁IFST2000䈮䈩䇮⇇11䉮䊮䉸䊷䉲䉝䊛䈮䉋䉎䇮ᓟ䈱࿖㓙ᛛⴚදജ䈮㑐䈚䈩⼏⺰䈏 ⴕ䉒䉏䇮䊥䉸䉫䊤䊐䉞䈫ESH䈮䈧䈇䈩䇮Collaboration䈱น⢻ᕈ䈏ᬌ⸛䇯 • ISMT䈏࿖㓙ᛛⴚදജ䉕䈶ដ䈔ᆎ䉄䈢ℂ↱䈲䇮 – Red Brick Wall䉕ਸ਼䉍䈋䉎䈢䉄䈮䈲䇮20䌾30ం䊄䊦䋯5ᐕ㑆䈱⾗㊄䈏ᔅⷐ䇯 – 䋱␠䉇䋱䉮䊮䉸䊷䉲䉝䊛䈪䈲⾔䈋䈐䉏䈭䈇䇯 – ฦ䉮䊮䉸䊷䉲䉝䊛䈪䈱⎇ⓥ㐿⊒䈱㊀ⶄ䉕ㆱ䈔䉎ᔅⷐ䈏䈅䉎䇯 z 11䇮Selete䈫ISMT䈫䈱㑆䈪䇮ᦝ䈮දജ㑐ଥ䉕ᷓ䉄䇮ᰴઍඨዉᛛⴚ䈮㑐䈜䉎 Collaboration䉕ㅴ䉄䉎䈖䈫䈏วᗧ䈘䉏䇮ኻ⽎ᛛⴚ㗄⋡䈱ද⼏䉕㐿ᆎ䇯 z 11䇮IMEC䉋䉍䇮Selete䈮ኻ䈜䉎䊒䊨䉶䉴ᛛⴚ䈮㑐䈜䉎⎇ⓥ㐿⊒දജ䈫䇮STARC䈮ኻ䈜䉎 䇺SoC++䇻䈮㑐䈜䉎⎇ⓥ㐿⊒දജ䈏ᛂ⸻䇯ᣣᧄ䈮䈍䈇䈩ᬌ⸛䈏㐿ᆎ䇯 STRJ WS: March 3, 2003, T.Fukushima 15 3-1 ☨࿖䈱⠨䈋ᣇ 1994ᐕᤨὐ䈪☨࿖♽䊂䊋䉟䉴䊜䊷䉦䈱࿖㓙┹ജ䈏චಽ䈮⏕┙䈘䉏䈢䇯 1994ᐕᤨὐ䈪☨࿖♽䊂䊋䉟䉴䊜䊷䉦䈱࿖㓙┹ജ䈏චಽ䈮⏕┙䈘䉏䈢䇯 ☨࿖♽ㅧⵝ⟎䊜䊷䉦䉅SEMATECH ☨࿖♽ㅧⵝ⟎䊜䊷䉦䉅SEMATECH䈱ᵴേ䉕ㅢ䈚䇮䈠䉏䈭䉍䈮࿖㓙┹ജ䉕䈧䈔 SEMATECH䈱ᵴേ䉕ㅢ䈚䇮䈠䉏䈭䉍䈮࿖㓙┹ജ䉕䈧䈔 䈢䇯 Microtech 2000 Workshop(1991ᐕ Workshop(1991ᐕ)䈪੍᷹䈚䈢300 䈪੍᷹䈚䈢300mm 300mm䉡䉢䊊ᛛⴚ䉕⏕┙䈜䉎䈢䉄 mm䉡䉢䊊ᛛⴚ䉕⏕┙䈜䉎䈢䉄 䈮䈲䇮☨࿖♽ඨዉ䊜䊷䉦䋯☨࿖♽ㅧⵝ⟎䊜䊷䉦䈱⎇ⓥ㐿⊒䈣䈔䈪䈲ታ䈏㔍䈚 䈇䇯 z ᶏᄖ䊜䊷䉦䈱SEMATECH䈻䈱ෳട䉕䈶ដ䈔䉎䈢䉄䈮䇮ᐭ䈱ᡰេ䉕ᢿ䉒䉎 ᔅⷐ䈏䈅䉎䇯 z 1995ᐕ䈮࿖㒐✚⋭䈻⾗㊄េഥਛᱛ䈱ⷐ⺧䇯 z 1996ᐕ: 300mm䉡䉢䊊ᛛⴚ⏕┙䈱䈢䉄䈱I300I䉕⸳┙䇯 z ╙1࿁WSC(1997ᐕ4)䈪300mm䉡䉢䊊䈱ᮡḰൻ䈱䈏⏕䇯หᐕ䇮I300I䈫 Selete䇮I300I䈫J300(300mmඨዉᛛⴚㅪ⛊ળ)䈫䈱㑆䈪䇮300mm䉡䉢䊊ᛛⴚ 䈮㑐䈜䉎ᛛⴚᖱႎ䈱឵䈱ข䉄䇯 ᛛⴚ㐿⊒䉕䈘䉌䈮ㅴ䉄䉎䈢䉄䈮䈲䇮ᶏᄖ䈱᧚ᢱ䋯ⵝ⟎䊜䊷䉦䇮․䈮ᣣ♽䈱᧚ᢱ䋯ⵝ ⟎䊜䊷䉦䈫䇮ᣣ᰷䈱䉮䊮䉸䊷䉲䉝䊛䈫䈱දജ䈏ਇนᰳ䇯 䈜䈪䈮ఝᕈ䉕ᜬ⛯䈚䈩䈇䉎⸳⸘ᛛⴚ䈱㐿⊒䈮䈧䈇䈩䈲䇮☨࿖ౝ䈮㐽䈛䈢ᵴേ䉕⛮ ⛯䈜䉎䇯 STRJ WS: March 3, 2003, T.Fukushima 16 3-2 ᰷Ꮊ䈱⠨䈋ᣇ IMEC䋨 IMEC䋨Interuniversity Microelectronics Center䋩 Center䋩 z ࿖㓙⚵❱䈱㊀ⷐᕈ䉕ℂ⸃䈚䈩䈍䉍䇮᰷Ꮊએᄖ䈎䉌䈱ᡰេ䉕ⷐᦸ z 䊔䊦䉩䊷ડᬺ䈎䉌䈱ᛩ⾗䈲Ყセ⊛ዋ㗵䋨2002ᐕ䈲20䋦ᧂḩ䋩 • 2002ᐕ䈱䊔䊦䉩䊷ᐭએᄖ䈱IMEC䈻䈱ᛩ⾗䈱⚂45䋦䈲䇮䊣䊷䊨䉾䊌એᄖ䋨䈾䈫䉖䈬䈲☨䈎䉌䋩 z Intel䇮TI䇮Motorola䇮National Semiconductor䇮䉸䊆䊷䇮ᣣ┙䈭䈬䈫㐿⊒䊒䊨䉳䉢䉪䊃䉕᭴ ▽ MEDEA+䋨 MEDEA+䋨MicroMicro-Electronics Development for European Applications䋩 Applications䋩 z ✁㗔䈏᰷Ꮊએᄖ䈱䈇䈎䈭䉎ᄖㇱ⚵❱䈫䈱ឭ៤䉅䈛䈩䈇䉎 • ᰷Ꮊડᬺ䉁䈢䈲᰷Ꮊၞౝ䈮⎇ⓥᣉ⸳䉕䉅䈧ડᬺ䇮࿅䈮㒢ቯ z ᰷Ꮊએᄖ䈱䈇䈎䈭䉎ห䈫䉅⋥ធឭ៤䈚䈭䈇 • 䈖䈱ᣇ㊎䈲䈖䉏䈎䉌䉅ᄌ䉒䉌䈭䈇䈣䉐䈉 Leti (Laboratoire d'Electronique de Technologie et Instrumenttation䇮㔚ሶᛛⴚⵝ⟎⎇ⓥᚲ䋩 z 䊐䊤䊮䉴ᐭ䈮䉋䉎⚵❱ z 䊐䊤䊮䉴↥ᬺ䈱㊀ⷐಽ㊁䈮⏕䈭⋉䉕䉅䈢䉌䈚䇮䈎䈧䊐䊤䊮䉴䈱㓹↪ᄢ䈮ᓎ┙䈧䈖䈫䈏 䉌䈎䈪䈭䈇㒢䉍䇮࿖㓙⊛䈭ឭ៤䈲䈭䈇 z Leti䈱ⷫળ␠䈱CEA䈏䇮࿖㒐䇮ㅢା䇮ቝቮ䈭䈬䈱䊐䊤䊮䉴↥ᬺ䉕䉃ේሶജ䉣䊈䊦䉩䊷䈮 ㊀ὐ䉕⟎䈇䈩䈇䉎 • ේሶജ↥ᬺ䈮䈲㜞ᐲ䈱ᯏኒᕈ䈏䈅䉍䇮䈖䉏䈮䉋䈦䈩CEA䈫Leti䈱⚻༡ⅣႺ䈏⸳ቯ䈘䉏䈩䈇䉎 STRJ WS: March 3, 2003, T.Fukushima 17 㪊㪄㪊㩷㩷࿖㓙ᛛⴚදജ䈮䈧䈇䈩䈱ฦ䉮䊮䉸䋭䉲䉝䊛䇮ฦ࿖ᐭ╬䈱⠨䈋ᣇ 㪊㩷㩷࿖㓙ᛛⴚදജ䈮䈧䈇䈩䈱ฦ䉮䊮䉸䋭䉲䉝䊛䇮ฦ࿖ᐭ╬䈱⠨䈋ᣇ 䋨䉁䈫䉄䋩 䉮䊮䉸䋭䉲䉝䊛╬ ᣣ 㪠㪚㪚㪠 ෳടડᬺ EIAJ ( JEITA) 䌓䌉䌒䌉䌊 䂾 䂾 ⚂䋵䋳䋰␠䇭䇭䋨ᣣᄖ⾗♽⚂䋶䋰␠䋩 ᣣᧄ䈱ඨዉ䋱䋱␠䈫ᣣᧄ䌔䌉 䌁䌓䌅䌔 䃂 䋴䋰␠䋨ᄖ⾗♽䋶␠䋩 䌓䌥䌬䌥䌴䌥 䃂 䌓䌔䌁䌒䌃 ✚੍▚䇭 ( ᐕ䋩 ᐭ⾗㊄Ყ₸ 䋨䋦䋩 䋴䋶ం 䋳ం 0 0 䋷䋲ం @䋹䋹ᐕ 100 ᣣᧄ䈱ඨዉ䋱䋱␠䈫ਃᤊ䈏৻ㇱ䍪䍽䍹䍖䍼 䍵䍯䈮ෳട 䋱䋰䋰ం 0 ᣣᧄ䈱ඨዉ䋱䋱␠ 䋶䋮䋵ం NIST: ോ⋭䋨䌄䌏䌃䋩ઍℂ 䂾 100 䌓䌉䌁 䂾 0 ISMT 䃂 ☨࿖䋸␠䇮ᶏᄖ䋵␠ 䌍䌁䌒䌃䌏䋯䌓䌒䌃 䃂 䌆䌃䌒䌐 䌅䌅䌃䌁 䂾 䌉䌍䌅䌃 䃂 䌍䌅䌄䌅䌁 䃂 Leti 䋨࿖䋩 䃂 䌁䌌䌂䌁䋨⧷࿖䋩 䌔䌓䌉䌁 䂾 䌁䌓䌔䌒䌏䋨䌅䌒䌓䌏䋯䌉䌔䌒䌉䋩 䃂 䌋䌓䌉䌁 䂾 䌃䌏䌓䌁䌒 䃂 䌉䌍䌅䋯䌅䌐䌒䌃 䃂 ☨ ᰷ บ 㖧 䉲 140ం 0 ☨࿖䈱䋵䋰એ䈱ᄢቇ䈏ෳട 35ం䇭(SRC) 25 ಽ㊁䈮䋵䌾䋱䋰䈱☨࿖ᄢቇ䈏ෳട 10ం×6ಽ㊁ 25 0 రᄢቇ䈫⇇䈱ડᬺ䋨55␠䋩䈏ෳട 110ం 27 ᰷Ꮊ䋱䋱䍔࿖䈱ડᬺ䈫⎇ⓥᯏ㑐䈮㒢ቯ 600ం 100 45 ࿖㓙ᛛⴚදജ䈮ኻ䈜䉎⠨䈋ᣇ䋨ᑼ⊒䋩 䌁䌓䌅䌔䈱⎇ⓥᵴേ䈲࿖ኅ⾗㊄䈪⾔䉒䉏䈩䈍䉍䇮ෳടᏗᦸ⠪䈲ASET䈱ⷙ ⚂䈮ᓥ䈇䇮⎇ⓥ⸘↹䈮หᗧ䈏ᔅⷐ䇯䋨'98ᐕਃᤊ䈫Intel䈏ട䋩 䌓䌥䌬䌥䌴䌥ෳടᏗᦸ⠪䈲⺕䈪䉅䉏䉎䋨ਃᤊෳടᷣ䋩䇯Equal Contribution䉕 ೨ឭ䈮䇮ઁ䉮䊮䉸䋭䉲䉝䊛䈫䈱ㅪ៤䈲น⢻䇯I-SEMATECH䈫 collaboration? (cooperation?)䉕ታᣉਛ䇯 ☨࿖ᐭ䈲ඨዉ↥ᬺ䉕࿖ኅ䈱ో㓚䉕ᜂ䈉㊀ⷐ䈭↥ᬺ䈫⼂䈚䇮ᡰេ 䈜䉎䇯䈠䈱䈢䉄䈮䈲࿖㓙┹ജ䈱⏕䇮⾏ᤃఝ⏕䋨ਛ࿖Ꮢ႐䈻䈱ෳ ╬䋩䉕⠨ᘦ䈜䉎䇯 ࿖㓙ඨዉᛛⴚ䊨䋭䊄䊙䉾䊒(ITRS)䈪ႎ๔䈘䉏䈩䈇䉎ᛛⴚ㓚ო䉕䊑䊧䋭䉪 䉴䊦䋭䈜䉎䈢䉄䈮䈲࿖㓙ᛛⴚදജ䈏ᔅⷐ䇯ᐭ䈲ၮ␆⎇ⓥ䈮䉅䈦䈫⾗㊄䉕 ឭଏ䈜䈼䈐䇯䉪䊨䋭䊋䊦䈮䉎䈫⎇ⓥౝኈ䈱㊀ⶄ╬ή㚝䈏䈅䉎䈱䈪䈲䇯 ISMT䈻䈱ෳട䈲⺕䈪䉅䌏䌋䇯Consortia Cooperation䉅⾥ᚑ䇯ෳട䊜䊮䊋 䋭䈻䈱ᕲᕺ䈏ᔅⷐ䇯ᓥ᧪SEMATECH᷷ሽ䋿 䌓䌒䌃䈏⸘↹䉕ਥዉ䇯ᄢቇ䈏ෳട䈚䈩ห⎇ⓥ䉕䈜䉎䇯⾗㊄䈱㑐ଥ䈪⎇ⓥౝ ኈ䇮䊥䉸䋭䉴䉕ฦ࿖䈪ಽᜂ䈜䈼䈐䇯 ઁ䉮䊮䉸䋭䉲䉝䊛䈫䈱ㇱಽදജ䈲น⢻䇯᰷Ꮊ䈱200⎇ⓥᯏ㑐䈏䌉䌍䌅䌃䈮ෳ ട䇯 ᰷Ꮊએᄖ䈱ෳട䈲ਇน䇯䉮䊮䉸䋭䉲䉝䊛㑆䈱දജ䈲࿎㔍䋨⸒⺆䇮ℂ䇮䊅 䉲䊢䊅䊥䉵䊛䈱㗴䈅䉍䋩䇯႐↥ᬺ䈻䈱᪠䉏䈏⋡⊛䇯࿖㓙ᛛⴚදജ䉕࿑ 䉎䈭䉌䉅䈦䈫ㅢ䈱⺖㗴䉕ត䈜ᔅⷐ䈏䈅䉎䇯 䊐䊤䊮䉴䈱࿖⎇䇯⹜䊤䉟䊮䈫R&Dᣉ⸳䉕ᜬ䈧䇯࿖㓙ᛛⴚදജ䈻䈱ኻᔕ䈲 น⢻䈣䈏䇮ಽ㊁䉕㒢ቯ䈜䉎ᔅⷐ䈅䉍䇯 100ం 0 60ం䇭䋨䌅䌒䌓䌏䋩 50 99ᐕ䋲䈮䌁䌓䌔䌒䌏䉕⸳┙䇯ᐭ⾗㊄50䋦䈪7␠ෳട䇯ઁ䉮䊮䉸䋭䉲䉝䊛䈫 䈱ㅪ៤䈲 䉬䊷䉴䊋䉟䉬䊷䉴䈪ኻᔕ䇯 0 ࿖⎇䈫䈚䈩ᄙ࿖☋䈱⎇ⓥຬ䉕ណ↪ 90ం 60 18ం䇭䋨䌉䌍䌅䋩 70 䃂䋺㪠㪚㪚㪠ෳട䇭⎇ⓥ㐿⊒ታᣉ࿅ 䂾䋺㪠㪚㪚㪠ෳട䇭ᡰេ࿅ 86ᐕ䈮ᐭ⾗㊄䈪⸳┙䈚ၮ␆䋯↥ᬺᛛⴚ䉕䌒䋧䌄䇯ઁ䉮䊮䉸䋭䉲䉝䊛䈫䈱 ㅪ៤䈲䋿 92ᐕ䈮䊌䉾䉬䋭䉳䊮䉫䈱䉮䊮䉸䋭䉲䉝䊛䋨䌅䌐䌒䌃䋩䉕⸳┙䈚䇮ᣣᧄડᬺ䉅ෳ ട䇯ઁ䉮䊮䉸䋭䉲䉝䊛䈫䈱ㅪ៤䈲WIN-WIN䉸䊥䊠䊷䉲䊢䊮䈏᧪䉏䈳䉇䉍䈢 䈇䇯 STRJ WS: March 3, 2003, T.Fukushima 18 䋴䋮ᚒ䈏࿖䈱ඨዉ㑐ㅪᛛⴚ䊧䊔䊦 4-1䇭ࠕࡦࠤ࠻⺞ᩏ 䇼ኻ⽎䈫䈜䉎ᛛⴚಽ㊁䇽 z ᄢ㗄⋡ • ITRS䈱12ಽ㊁䈮⚛᧚䊶ㇱຠ᧚ᢱᛛⴚ䈫IP⸳⸘ᛛⴚ䉕ട䈋䈢14ಽ㊁ z ዊ㗄⋡ • ว⸘136㗄⋡ 䇼ᛛⴚ⹏ଔᣇᴺ䇽 z ᣣ䋯☨䋯᰷䋯㖧䋯บ䋯䉲䊮䉧䊘䊷䊦䈱⋧ኻ⊛䈭Ყセ z 䋵Ბ㓏⹏ଔ • 䃁:㕖Ᏹ䈮ఝ䉏䈩䈇䉎䇮䂾:ఝ䉏䈩䈇䉎䇮䂦:ᐔဋ䇮䂥:䉇䉇ഠ䉎䇮㬍:ഠ䉎 • 䃁䋺100ὐ䇮䇮䂾䋺 75ὐ䇮䇮䂦䋺 50ὐ䇮䇮䂥䋺 25ὐ䇮䇮㬍䋺 0ὐ䇯 STRJ WS: March 3, 2003, T.Fukushima 19 4-2䇭䉝䊮䉬䊷䊃䈱ኻ⽎⠪ 䂓JEITA 䇭ඨዉᛛⴚ䊨䊷䊄䊙䉾䊒ᆔຬ 䌗䌇䋱 ⸳⸘ ⸳⸘䌔䌆 ን჻ㅢ ᣣ┙ ᧻ਅ ਃ⪉ 䌎䌅䌃 ᴒ ਃᵗ 䉲䊞䊷䊒 䉸䊆䊷 ᧲⦼ 䊨䊷䊛 ᭴ᚑຬᢙ 1 1 1 1 1 1 1 1 1 1 1 11 䌗䌇䋲 䊁䉴䊃 1 0 1 2 1 1 1 1 2 1 0 11 䌗䌇䋳 䌆䌅䌐 2 2 2 2 2 1 0 1 1 2 1 16 䌗䌇䋴 ㈩✢ 1 1 1 1 1 1 1 0 1 1 1 10 䌗䌇䋵 䊥䉸 1 1 1 1 1 1 1 1 1 2 1 12 䌗䌇䋶 䌐䌉䌄䌓 1 1 1 0 1 1 1 1 1 1 1 10 䌗䌇䋷 ታⵝ 1 1 1 1 1 1 0 1 1 1 1 10 䌗䌇䋸 䌆䌉 1 1 1 0 1 0 0 0 0 1 1 6 䌗䌇䋹 䌅䌓䌈 1 1 1 1 1 0 0 1 1 3 1 11 䌗䌇䋱䋰 Model/Sim 1 1 1 1 1 1 1 0 1 1 1 10 ⸘ 1 1 1 2 1 1 1 1 1 1 1 12 119 䂓SEAJ䇭ᛛⴚ䊨䊷䊄䊙䉾䊒ᆔຬ 䌗 䌇䋱 䊥䉸䉫䊤䊐 䉞䇭 䌗 䌇䋲 䍑䍈䍎 䍨 䍪 䍽䍹䍜䍛 8 17 䌗 䌇䋳 ⚵┙ 䌗 䌇䋴 ᬌᩏ䋨䊁䉴䊃䋩 10 17 䌗 䌇䋵 䌁䌍䌈䌓 䌗 䌇䋶 Mod䌥 䌬/Sim 䌗 䌇䋷 ⸘᷹ 3 11 ⸘ 11 77 䂓SEAJ䇭ᛛⴚડ↹ᆔຬ 䂓EDA 䊔䊮䉻䊷ᛛⴚ⠪ (ᣣᧄ䉲䊉䊒䉲䉴䇮䉬䉟䊂䊮䉴䊶䊂䉱䉟䊮䊶䉲䉴䊁䊛䉵䇮䊜䊮䉺䊷䊶䉫䊤䊐䉞䉾䉪䉴䊶䉳䊞䊌䊮䇮䉣䉴䊶䉲䊷䊶䊊䉟䊁䉪䇮䊜䉟䊮䉭䉟䊃䊶䉣䊧䉪䊃䊨䊆䉪䉴) STRJ WS: March 3, 2003, T.Fukushima 20 㪋㪄㪊䇭䉝䊮䉬䊷䊃࿁╵ ᣣᧄ ䷢ 䊥 䉸 䉫 䊤 䊐 ᛛ ⴚ ☨࿖ 䌁䌲䌆䊥䉸䉫䊤䊐䉞 㪌 㪐㪇 㪊 㪍㪇 㪉 㪋㪇 㪍㪌 㪈 㪉㪇 㪉 㪋㪇 䌆㪉䊥䉸䉫䊤䊐䉞 㪌 㪍㪌 㪊 㪍㪇 㪉 㪋㪇 㪏㪇 㪈 㪉㪇 㪋 㪏㪇 䌅䌕䌖䊥䉸䉫䊤䊐䉞 㪌 㪌㪌 㪊 㪍㪇 㪈 㪉㪇 㪈 㪉㪇 㪐㪇 㪊 㪍㪇 㪉 㪋㪇 䌘✢䊥䉸䉫䊤䊐䉞 㪌 㪐㪌 㪋 㪏㪇 㪈 㪉㪇 㪊㪇 㪉 㪋㪇 㔚ሶ䊎䊷䊛ᛩᓇ䊥䉸䉫䊤䊐䉞 㪋 㪏㪈 㪈 㪉㪌 㪊 㪎㪌 㪏㪏 㪉 㪌㪇 㪉 㪌㪇 㔚ሶ✢ឬ↹䋨䌅䌂䌄䌗䋩 㪍 㪐㪍 㪌 㪏㪊 㪈 㪈㪎 㪋㪍 㪊 㪌㪇 䊨䉳䉾䉪䊁䉴䉺 㪉 㪌㪇 㪉 㪌㪇 䊙䉴䉪ㅧ 㪊 㪐㪉 㪉 㪍㪎 㪈 㪊㪊 㪋 㪏㪏 㪍㪎 㪉 㪍㪎 䊜䊝䊥䊁䉴䉺㪍 㪎㪐 䌍䌅䌂䌄䌗 㪉 㪊㪊 㪊 㪌㪇 㪋 㪈㪇㪇 㪈 㪈㪎 㪋 㪈㪇㪇 㪋㪍 㪊 㪌㪇 䊚䉾䉪䉴䊃䉲䉫䊅䊦䊁䉴䉺 㪌 㪎㪇 㪈 㪉㪇 㪉 㪋㪇 㪉 㪌㪇㪋㪇 䉮䊷䉺䊶䊂䊔䊨䉾䊌 㪊 㪈㪇㪇 㪊 㪈㪇㪇 㪈 㪊㪊 䉝䊷䉨䊁䉪䉼䊞 䉝䊅䊨䉫䊁䉴䉺 㪌 㪈㪏㪇 㪌㪇 㪉 㪈㪋㪇 㪌㪇 㪉 㪋㪇 㪈 㪏㪏㪉㪇 㪈 㪌㪇㪌 㪈㪌㪇 㪌㪇 䊁 䊙䉴䉪ᬌᩏ 㪉 㪊㪏 㪪㫆㪚䊁䉴䉺㪋㪋 㪏㪈 㪉㪇 㪋㪌 㪈㪎 䉲䉴䊁䊛⸳⸘ 䉴 䊥䉸䉫䊤䊐䉞ᛛⴚ 㪊㪐 㪋 㪌㪎㪌 㪈㪈 㪈 㪈㪉㪌 㪉 㪉 㪈㪌㪇 㪉 㪈 㪍㪊㪉㪌 㪏 㪈㪏㪌 㪉㪉㪌㪇 㪌㪇 䊙䊦䉼䊁䉴䊃䋨ᄙᢙ 㪍 㪐㪉 㪋 㪍㪎 㪉 㪊㪊 䊃 ⺰ℂวᚑ 㪌 㪏㪇 䊂䊋䉟䉴⹏ଔ䊶᷹ቯᛛⴚ 㪍 㪎㪈 㪉 㪊㪊 㪊 㪌㪇 ᛛ 䉲䊚䊠䊧䊷䉲䊢䊮 㪌 㪍㪇 ⴚ 䊁䉴䊃ᛛⴚ 㪊㪋 㪏㪉 㪈㪍 㪋㪎 㪈㪊 㪊㪏 㪋 㪈㪉 䉲䉴䊁䊛䊧䊔䊦ᬌ⸽ 㪌 㪍㪇 䊒䊨䊷䊋 㪎 㪐㪍 㪍 㪏㪍 㪈 㪈㪋 䊊䊮䊄䊤 㪐 㪐㪋 㪎 㪎㪏 㪉 㪉㪉 䊐䊨䉝䊒䊤䊆䊮䉫 㪌 㪍㪇࿁ ⸳ 䊋䊷䊮䉟䊮ⵝ⟎ 㪎 㪐㪊 㪌 㪎㪈 㪉 㪉㪐 ㈩⟎㈩✢ ಽ㊁ᛛⴚ㗄⋡㪌 㪏㪌╵ ⸘ ᢙ 䊁䉴䊃ㄝᛛⴚ 㪉㪊 㪐㪌 㪈㪏 㪎㪏 㪌 㪉㪉 䉺䉟䊚䊮䉫䉪䊨䊷䉳䊞 㪌 㪦㪧㪚 㪌 䌍䌐䌕 䌍䌃䌕 䉝䊅䊨䉫࿁〝䉲䊚䊠䊧䊷䉲䊢䊮 㪌 䌄䌓䌐 䊂䊋䉟䉴⸳⸘ 㪌 䊙䊦䉼䊜䊂䉞䉝䊒䊨䉶䉾䉰 䌍䌐䌅䌇િᒛ❗䌌䌓䌉 䊌䉺䊷䊮⸳⸘ 㪌 䉫䊤䊐䉞䉾䉪䌌䌓䌉 㜞ᵄ࿁〝ᛛⴚ 䉭䋭䊃䉝䊧䉟 㪌 䉴䉺䊮䉻䋭䊄䉶䊦 䊁䉴䊃ᛛⴚ㩿㪛㪝㪫㪀 㪋 䊂 䊒䊨䉫䊤䊙䊑䊦䊶䊨䉳䉾䉪 䊋 䊚䉾䉪䉴䊃䉲䉫䊅䊦ᛛⴚ 㪌 䌄䌒䌁䌍 䉟 䌄䌒䌁䌍ᷙタ䌌䌓䌉 ⸳⸘ᛛⴚ 㪎㪋 䉴 䌓䌒䌁䌍 䌉䌐ౣ↪ᛛⴚ ᛛ 䌅䌅䌐䌒䌏䌍 㪌 䌉䌐⸳⸘ ⴚ 䌉䌐⚵䉂ว䉒䈞ᛛⴚ 䊐䊤䉾䉲䊠䊜䊝䊥 㪌 ᛛⴚ 䌉䌐ᵹㅢᛛⴚ䊶䉟䊮䊐䊤ᒝ⺃㔚䊜䊝䊥 㪌 䉝䊅䊨䉫䌉䌃 䊌䊪䋭䊂䊋䉟䉴 䌉䌐⸳⸘ᛛⴚ 㪈㪌 ᛛ ⴚ 㪋㪇 㪎㪇 㪎㪌 㪏㪇 㪏㪇 㪌㪌 㪏㪈 㪍㪇 㪍㪍 㪌㪇 㪊㪇 㪉㪇 㪊㪊 㪈 㪈 㪉㪇 㪉 㪋㪇 㪈 㪈㪎 㪈 㪈㪎 㪈㪇㪇 㪈 㪊㪊 㪋 㪈㪇㪇 㪈 㪉㪌 㪈㪏㪈 㪈㪎 㪉 㪌㪇 㪈 㪈㪎㪈 㪉㪌 㪈㪐㪌 㪊㪊 㪋 㪈㪏㪇 㪊㪊 㪈 㪉㪇 㪉 㪋㪇 㪐㪇 㪊 㪍㪇 㪉 㪋㪇 㪉 㪋㪇 㪈㪇㪇 㪌 㪈㪈 㪋 㪈㪇㪇 㪉㪉 㪌㪋㪇 㪋 㪉 㪐 㪋㪇 㪌 㪏㪊 㪉 㪎㪐 㪋㪇 㪈 㪈㪎 㪉 㪋㪇 㪈 㪉㪇 㪐㪉 㪋 㪍㪎 㪉 㪊㪊 㪈 㪐㪇 㪉㪇㪉㪉 㪍㪌 㪉 㪋㪇 㪈 㪈㪈 㪊㪉 㪈㪉㪇 㪊 㪉 㪋㪇 㪍㪋 㪈 㪈㪋 㪊 㪋㪊 㪊 㪉㪍㪇㪉㪐 㪍㪋 㪉 㪉㪉 㪊ᣣᧄ 㪊㪊 㪊 㪊㪊 㪋 㪏㪇 㪎㪐 㪉 㪉㪐 㪋 㪌㪎 㪈 㪈㪋 ✚㪉 㪋㪇 㪊 㪍㪇 ᓧ 㪍㪏 㪌 㪉㪉 㪈㪇 㪋㪊 㪍 㪉㪍 ὐ 㪉 㪍 㪌㪏 㪌 㪎㪌 㪈 㪍 㪍㪊 㪈 㪌 㪎㪌 㪌 㪏㪇 㪉 㪌 㪏㪌 㪌 㪏㪌 㪌 㪏㪇 㪈 㪌 㪍㪇 㪌 㪏㪌 㪌 㪈㪉 㪏㪌 㪌 㪐㪇 㪈 㪌 㪍㪌 㪌 㪐㪌 㪌 㪏㪌 㪌 㪍㪌 㪌 㪎㪇 㪈 䌃䌃䌄 㪋 㪈㪇㪇 䌃䌍䌏䌓䉟䊜䋭䉳䉶䊮䉰 㪊 㪌㪏 ඨዉ䊧䋭䉱 㪊 㪐㪉 ൻว‛ඨዉ䊂䊋䉟䉴 㪋 㪍㪊 䊂䊋䉟䉴 ᛛⴚ 㪈㪇㪈 㪎㪍 㪋㪇 㪉 㪉㪇 㪉㪇 㪈 㪉 㪋㪇 䃁 㪈 㪉㪇 㪊 㪋㪇 㪊㪋㪈 㪉㪇 㪋㪊 㪋㪇 㪉㪉 㪋㪇 㪊 㪍㪇 㪊㪈 㪋㪇 㪊㪉 㪋㪇 㪍㪇 㪋㪈 㪍㪇 㪊㪎㪈 㪏㪇 㪋㪇 㪈㪈 㪏㪇 㪈㪈 㪋㪇 㪈㪈㪊 㪉㪇 㪉㪇 㪊㪉 㪉 㪊 㪉 㪉㪌 㪉 㪊 㪊 㪈㪍 㪋 㪉㪇 㪉 㪋 㪉 㪈 㪈㪎 㪋 㪈㪇㪇 㪉 㪍㪎 㪋㪇 㪋㪇 㪈 㪈 㪉 㪊㪊 䂾 㪌㪇 㪉㪇 㪍㪇 㪍㪎 㪏㪇 㪍㪇 㪋㪇 㪋㪇 㪍㪇 㪍㪇 㪉㪇 㪋㪇 㪎㪌 㪏㪇 㪉㪇 㪉㪇 㪌㪇 㪉㪇 㪉㪇 㪉㪇 㪉㪇 㪍㪇 㪉㪇 㪉㪇 㪋㪇 㪉㪇 㪊㪊 㪊㪊 㪌㪇 㪊㪊 㪉 㪉 㪈 㪈 㪈 㪉䂦 㪋㪇 㪊㪊㪊 㪍㪇㪈 㪋㪇 㪉㪇 㪈㪈㪎 㪈 䂥 㪈㪎 㪈 㪈㪈 㪉㪇 㬍 㪇 㪈㪎 㪉㪇 㪈㪉㪇 㪉㪇 㪈㪉㪇 㪉㪇 㪈 㪈 㪉㪇 㪉 㪋㪇 㪈 㪉㪇 㪈㪈㪎㪉㪇 㪈 㪉㪇 㪈 㪈㪉㪇 㪈 㪊 㪉 㪈 㪈 㪉㪊 㪉㪇 㪉㪇 㪈 㪈 㪈 㪈 㪊 㪍㪇 㪉㪋㪇 㪈㪊 㪉 㪍㪎 㪉 㪉㪋 㪌㪇 㪉㪋 㪉 STRJ WS: March 3, 2003, T.Fukushima 㪉 㪈 㪉㪇 㪈 㪉㪇 㪉㪇 㪉㪇 㪉㪇 㪉㪇 㪉 21 㪉 㪋㪄㪋䇭䉝䊮䉬䊷䊃⚿ᨐ 䋨䉁䈫䉄䋩 䊂䊋䉟䉴ᛛⴚ 䍱䍡䍼䍶䍻䍖䍼䍃䍚 䍮䍋 䍸㪄 䍚 䍌 䍻 㪈㪇㪇 ⸳⸘ᛛⴚ 㪏㪇 ᰳ㒱ᷫᛛⴚ 䌉 䌐⸳⸘ᛛⴚ 㪍㪇 㪋㪇 ⸘᷹ᛛⴚ 䊁 䉴䊃ᛛⴚ 㪉㪇 㪇 䌅䌓 䌈 䊥䉸䉫䊤䊐䉞ᛛⴚ ⚵┙ᛛⴚ ᣣ ☨ ᰷ 㖧࿖ บḧ 䍪䍹䍻䍢䍒䍻䍢䍼ᛛⴚ ⚛᧚䊶 ㇱຠ᧚ᢱᛛⴚ ㈩✢ᛛⴚ 䍪䍅䍖䍢䍶䍐䍻䍡䍖䍼䍸㪄 䍚 䍌 䍻 䊂䊋䉟䉴䊜䊷䉦 STRJ WS: March 3, 2003, T.Fukushima 22 䋵䋮࿖ౝ䋯ᶏᄖ䈮䈍䈔䉎ᛛⴚදജ䈱ᒻᘒ䋨⁁䋩 㪸㪅䇭࿖ౝᄖ䉮䊮䉸䊷䉲䉝䊛㑆 䇭䇭䇭䇭䇭䇭䇭䇭䇭䇭䇭䇭㪹㪅䇭ᶏᄖࠦࡦ࠰ࠪࠕࡓ߳ߩડᬺෳട 䇭 ᣣᧄ䈱ડᬺෳട Selete䋯STARC ᰷Ꮊ䈱ડᬺෳട ISMT ᣣᧄ ☨࿖ 䇭䇭䇭䇭䇭IMEC IMEC ᰷Ꮊ 䋨㪸䋩䇭࿖ౝᄖ䉮䊮䉸䊷䉲䉝䊛䈱࿖㓙ᛛⴚදജ ☨࿖䈱ડᬺෳട 㖧࿖䈱ડᬺෳട 䋨㪹䋩䇭ᶏᄖࠦࡦ࠰ࠪࠕࡓ߳ߩ࿖ౝන⁛ડᬺෳട STRJ WS: March 3, 2003, T.Fukushima 23 㪺㪅㩷㩷࿖ౝࠦࡦ࠰ࠪࠕࡓᒻᚑ 㪻㪅㩷㩷ડᬺ㑆ࠕࠗࠕࡦࠬ ࿖ౝ㧭␠ෳട ࿖ౝ㧮␠ෳട 1 STARC㧛HALCA ࿖ౝ㧯␠ෳട ޓ࿖ౝT␠ ☨ޓ࿖I␠ ࿖ౝ㧰␠ෳട 䋨㪺䋩 ࿖ౝࠦࡦ࠰ࠪࠕࡓᒻᚑ 䋨㪻䋩 ડᬺ㑆ࠕࠗࠕࡦࠬ(࿖ౝᶏᄖ) STRJ WS: March 3, 2003, T.Fukushima 24 㪌㪄㪌㩷㩷ᛛⴚදജ䈱ᒻᘒ䈮ኻ䈜䉎䉝䊮䉬䊷䊃⚿ᨐ ᣣᧄഠ ᶏᄖ䍘䍻䍝䍎䍚䍏䍯 䈻䈱න⁛ෳ↹ ࿖ౝ䍘䍻䍝䍎䍚䍏䍯 ᣣᧄఝ z䌉䌐⸳⸘ᛛⴚ䋨IPౣ↪䍂IPᵹㅢ䋩 9⇇䈱⧷⍮䈱⚿㓸 z䌅䌕䌖䌌 zൻቇ‛⾰▤ℂ 9㐿⊒䊥䉴䉪ಽᢔ z⥄േ៝ㅍ䉲䉴䊁䊛 z䉭䊷䊃ᒻᚑᛛⴚ 9⇇ᮡḰൻ zᱠ⇐䉍䍱䍡䍼䍶䍻䍖䍼 zᎿ႐↢↥▤ℂᛛⴚ 9㐿⊒䊥䉴䉪䈱シᷫ z䊝䊂䊥䊮䉫䋨䊥䉸䇮࿁〝ⷐ⚛䇮ⵝ⟎/䍢䍬䍽䍹䍚䍼䋩 z䉟䊮䊒䊤ᛛⴚ z⸳⸘ᛛⴚ 䋨䍏䍎䍕䍡䍖䍟䍊䇮䍚䍛䍡䍯⸳⸘䇮䍡䍼䍨䍼䍐䍛⸳⸘䋩 z⸳⸘ᛛⴚ䋨OPC䋩 z䊝䊂䊥䊮䉫 z䉣䉾䉼䊮䉫ᛛⴚ 䋨䍪䍽䍹䍜䍛䋯䍡䍼䍨䍼䍐䍛ᢙ୯ൻ䋩 z䌅䌐䌌 z䌆䋲 䊥䉸 z䊁䉴䊃ᛛⴚ䋨䍹䍚䍼䍍䍖♽䋩 zᰳ㒱ᬌ z㓚⸃ᨆ z⚵┙ᛛⴚ z⸳⸘ᛛⴚ 䋨䍚䍮䍋䍸䍎䍚䍌䍻䍂䍚䍛䍡䍯䍸䍫䍼䍷ᬌ⸽䇮⺰ℂวᚑ䋩 z䌅䌓䌈ᛛⴚ ડᬺ㑆┹ ડᬺㅪ៤ 9ᶏᄖవㅴᛛⴚ䈱ๆ 9㐿⊒䊥䉴䉪䈱シᷫ 9࿖㓙┹ജ䈱࿁ᓳ 9వⴕᛛⴚ䈱࿐䈇ㄟ䉂 9㐿⊒䊥䉴䉪ಽᢔ 9㐿⊒䊥䉴䉪䈱シᷫ ࿖㓙ද⺞䈱⋡⊛ ࿖㓙ද⺞䈱ᒻᘒ ᶏᄖ䍘䍻䍝䍎䍚䍏䍯䈫 ࿖ౝ䍘䍻䍝䍎䍚䍏䍯䈫 䈱ㅪ៤ ᛛⴚജ䈱⁁ z䊂䊋䉟䉴ᛛⴚ䋨䌍䌐䌕䋯䌄䌓䌐䋩 z䊐䊨䊮䊃䉣䊮䊄ᛛⴚ䋨㒰䈒䍗䍼䍎䍢ᒻᚑ䋩 z䊂䊋䉟䉴ᛛⴚ䋨䊜䊝䊥㑐ㅪ䋩 9ડᬺ┹㗔ၞ z䍪䍅䍖䍢䍶䍃䍐䍻䍡䍖䍼䍸䍎䍚䍌䍻 z䊁䉴䊃ᛛⴚ䋨䊜䊝䊥♽䋩 9↥ᬺᵴᕈൻ 9Ꮕൻᚢ⇛ 䋨䍭䍛䍖䍸䍐䍲䍎ᢙ䋩 z䌘✢䊥䉸䋯䌅䌂䌄䌗 z⚛᧚䇮ㇱຠ᧚ᢱᛛⴚ STRJ WS: March 3, 2003, T.Fukushima 25 㧢㧚ᚒ߇࿖ߦ߅ߌࠆᛛⴚදജߩㅴᣇ 6-1䇭䊆䊷䉵ኻᔕဳᛛⴚ⎇ⓥ㐿⊒ R&D ߪޔߦ⊛⥸৻ޔ ߘߩ⋡⊛߇㕟ᣂ⊛ߥࠕࠗ࠺ࠖࠕߦၮߠߊޕဳޠ࠭ࠪޟ ޓ㧔ߘߩߩ⚿ᨐ߇ޔᔕ↪ൻ⎇ⓥޔታ↪ൻ⎇ⓥ߳ߣ⊒ዷߒߦ⊛⚳ᦨޔᣂⷙ↥ᬺߩഃ⸳߇ᦼ ᓙߐࠇࠆ߽ߩ㧕 Ꮢ႐߿ㅧ႐߆ࠄߩⷐ᳞ߦၮߠߊ࠭࠾ޟኻᔕޕဳޠ ޓ㧔ߘߩ⚿ᨐ߇ࠬࡓ࠭ߦታ↪ൻ(ㅧޔຠൻ)߳ߣㅴዷߔࠆߎߣ߇ᦼᓙߐࠇࠆ߽ߩ㧕 ߦಽߌࠄࠇࠆ ޓ ඨዉಽ㊁ߦ߅ߌࠆᓟߩᄢඨߩR&Dߪ,࠭࠾ޟኻᔕޕဳޠ z ITRSߢ㧝㧡ᐕవ߹ߢߩᛛⴚⷐ᳞߇ߦߢߔޔࠄ߆ߦߐࠇߡࠆޕ z ߒ߆߽ਅ⸥ߩ㧟Ბ㓏ߢಽ㘃ߐࠇߡࠆޕ • ᛛⴚ߇ߔߢߦ⛉ࠅㄟ߹ࠇޔታ↪ൻ⎇ⓥߪࠆޔታ↪ൻߩᲑ㓏 • ᛛⴚߩ⛉ㄟߺ߇ⴕࠊࠇߡࠆᲑ㓏 • ᛛⴚ߇ోߊઃ߆ߞߡߥᲑ㓏 STRJ WS: March 3, 2003, T.Fukushima 26 6-2䇭䉫䊨䊷䊋䊦䈭ᮡḰൻ䈫 䊨䊷䉦䊦䈭ᮡḰൻ R&D䋨ᔕ↪ൻ⎇ⓥ䇮ታ↪ൻ⎇ⓥ䋩䈭䉌䈶䈮ታ↪ൻᲑ㓏䈪䈱ᮡḰൻ䈲䍂৻⥸⊛䈮䇮 䇸䉫䊨䊷䊋䊦䈭ᮡḰൻ䇹䋺ᣧ䈇ᤨᦼ䈎䉌䍀䉫䊨䊷䊋䊦䈭ᮡḰൻ䍁䈏ⷐ᳞䈘䉏䉎䉅䈱 z ታ↪ൻᲑ㓏䋨ㅧ䋯ຠൻ䋩䈮䈍䈔䉎ේ᧚ᢱ z ㅧⵝ⟎䈱ᚻ䈱ኈᤃᕈ z ᧪䈱䉫䊨䊷䊋䊦䈭Ꮢ႐ዷ㐿 䇸䊨䊷䉦䊦䈭ᮡḰൻ䇹䋺䇱䈱ડᬺౝ䇮䈅䉎䈇䈲․ቯડᬺ㑆/䉫䊦䊷䊒ౝ䈪䈱ㅢൻ䈪චಽ䈭䉅 䈱 z ᛛⴚ䊉䉡䊊䉡䈱⫾Ⓧ z ㅧ䇮ຠൻ䈮䈍䈔䉎Ꮕൻ z ડᬺ㑆┹䉇࿖㓙┹䈮䈍䈔䉎ఝᕈ䈱⏕ ޓޓ䈮ಽ䈔䉌䉏䉎 ඨዉಽ㊁䈲䇮䇸䉫䊨䊷䊋䊦䈭ᮡḰൻ䇹䈫䇸䊨䊷䉦䊦䈭ᮡḰൻ䇹䈏ਗሽ STRJ WS: March 3, 2003, T.Fukushima 27 6-3䇭ኾ㐷 (Focus) ᛛⴚ䈫 ㅢ(Cross Cut)ᛛⴚಽ㊁ 䂓 ኾ 㐷 (Focus) ᛛ ⴚ ಽ ㊁ 䂾 㩷 㪛㪼 㫊 㫀 㪾 㫅 䂾㩷 㪠㪧 䂾㩷 㪫㪼㫊㫋 䂾 㩷 㪝 㫉 㫆 㫅 㫋 㩷 㪜 㫅 㪻 㩷 㪧㫉 㫆 㪺 㪼 㫊 㫊 㪼 㫊 䂾㩷 㪠㫅 㫋㪼㫉 㪺㫆 㫅 㫅 㪼㪺㫋 䂾㩷 㪣㫀 㫋㪿 㫆 㪾㫉 㪸㫇 㪿 㫐 䂾 㩷 㪧㫉 㫆 㪺 㪼 㫊 㫊 㩷 㪠 㫅 㫋 㪼 㪾 㫉 㪸 㫋 㫀 㫆 㫅 䂾 㩷 㪘 㫊 㫊 㪼 㫄 㪹 㫃 㫐 㩷 㩽 㩷 㪧㪸 㪺 㫂 㪸 㪾 㫀 㫅 㪾 䂾㩷 㪝㪸 㪺㫋㫆 㫉 㫐㩷 㪠㫅 㫋㪼㪾㫉 㪸 㫋㫀 㫆 㫅 䂾㩷 ⚛᧚䊶 ㇱຠ᧚ᢱ 䂓 ㅢ 䋨Cross Cut 䋩 ᛛ ⴚ ಽ ㊁ 䂾㩷 㪜㫅 㫍㫀 㫉 㫆 㫅 㫄 㪼㫅 㫋㩷 㪪 㪸 㪽 㪼㫋㫐㩷 㩽㩷 㪟 㪼㪸 㫃 䂾㩷 㪤㪼㫋㫉 㫆 㫃 㫆 㪾㫐 䂾㩷 㪰㫀 㪼㫃 㪻 㩷 㪜㫅 㪿 㪸 㫅 㪺㪼㫄 㪼㫅 㫋 䂾㩷 㪤㫆 㪻 㪼㫃 㫀 㫅 㪾㩷 㩽㩷 㪪 㫀 㫄 㫌 㫃 㪸㫋㫀 㫆 㫅 STRJ WS: March 3, 2003, T.Fukushima 28 6-4 䇭ᛛⴚදജߩㅴᣇ 㧔߹ߣ㧕 䊆䊷䉵ኻᔕဳ⎇ⓥ㐿⊒ ኾ㐷ᛛⴚಽ㊁ ఝಽ㊁ 䉮䊮䉸䊷䉲䉝䊛䋯⎇ⓥᯏ㑐䈱᭴ᚑ 䉮䊮䉸䊷䉲䉝䊛䋯⎇ⓥᯏ㑐䈱ਥᜂᒰ ᛛⴚ䊧䊔䊦 ᶏᄖ⎇ⓥ㐿⊒⾗㊄䈱ዉ ᶏᄖੱ⊛䊥䉸䊷䉴䈱ዉ 䉮䊮䉸䊷䉲䉝䊛㪆⎇ⓥᯏ㑐䈱ὐ ᶏᄖ䉮䊮䉸䊷䉲䉝䊛㪆⎇ⓥᯏ㑐䈫䈱ᖱႎ឵ ᶏᄖ䉮䊮䉸䊷䉲䉝䊛㪆⎇ⓥᯏ㑐䈫䈱ಽᜂ㐿⊒ 㐿⊒㐿ᆎᤨᦼ䋨ᦼ㑆䋩 ᜂᒰ⋭ᐡ ㅢᛛⴚಽ㊁ ห╬㪆ഠಽ㊁ ห╬㪆ഠಽ㊁ ၮ␆ ↥ቭቇ ᔕ↪ൻ ↥ቭቇ ታ↪ൻ ↥ ၮ␆ ↥ቭቇ ᔕ↪ൻ ↥ቭቇ ታ↪ൻ ↥ ၮ␆ ↥ቭቇ ᔕ↪ൻ ↥ቭቇ ታ↪ൻ ↥ቭቇ ቇ䋯࿖⎇ ↥ ↥ ቇ䋯࿖⎇ ↥ ↥ ቇ䋯࿖⎇ ↥ ↥ 㪁㽲㩷㩷 㪁㽳 㪁㽴 㪁㽲㩷㩷 㪁㽳 㪁㽴 㪁㽲㩷㩷 㪁㽳 㪁㽴 䃁ᤚ䋨ല䋩 䂦㒢ቯᤚ 䃁ᤚ䋨ല䋩 ࿖ౝ 䃁ᤚ䋨ല䋩 㬍㕖 䋵䌾䋱䋰ᐕ೨ 䋳䌾䋵ᐕ೨ ᢥ⑼⋭ ⚻↥⋭ ⚻↥⋭ ᢥ⑼⋭ 䂦㒢ቯᤚ 䃁ᤚ䋨ല䋩 ࿖ౝ 䂦㒢ቯᤚ 䋲䌾䋳ᐕ೨ 㵪 䃁ᤚ䋨ല䋩 䂦㒢ቯᤚ 䋵䌾䋱䋰ᐕ೨ 䋳䌾䋵ᐕ೨ ᢥ⑼⋭ ⚻↥⋭ ⚻↥⋭ ᢥ⑼⋭ ࿖ౝᄖ䉕䉒䈝ᦨ䉅ലᨐ⊛䈭ᚲ 䂦㒢ቯᤚ 䋲䌾䋳ᐕ೨ 㵪 䃁ᤚ䋨ല䋩 䃁ᤚ䋨ല䋩 䋵䌾䋱䋰ᐕ೨ 䋳䌾䋵ᐕ೨ ᢥ⑼⋭ ⚻↥⋭ ⚻↥⋭ ᢥ⑼⋭ 䋲䌾䋳ᐕ೨ ⚻↥⋭ ᢥ⑼⋭ 㪓ᛛⴚ䊧䊔䊦㪕 㪁㽲 㪁㽳 㪁㽴 䋺䇭⸃䈫䈭䉎ᛛⴚ䈏ో䈒䈧䈎䈦䈩䈇䈭䈇Ბ㓏䇯 䋺䇭⸃䈫䈭䉎ᛛⴚ䈱Ბ㓏䇯 䋺䇭⸃䈫䈭䉎ᛛⴚ䈱⛉ㄟ䉂䈱Ბ㓏䇯 STRJ WS: March 3, 2003, T.Fukushima 29 䋷䋮ᚒ䈏࿖䈮䈍䈔䉎⎇ⓥ㐿⊒ᯏ㑐䋨᩺䋩 ၮ␆䋯ᔕ↪ൻ䋯ታ↪ൻ⎇ⓥ㐿⊒ CoE ⼂⠪䈮䉋䉎⻁ᆔຬળ ၮ␆⎇ⓥ㐿⊒CoE 㩿↥ቭቇ䋩 ⎇ⓥቶ䇮ോᚲ ⎇ⓥ䊶ታ㛎 ታ↪ൻ⎇ⓥ㐿⊒CoE ᔕ↪ൻ⎇ⓥ㐿⊒ CoE 㩿↥ቭቇ䋩 㩿↥䋩 ⎇ⓥቶ䇮ോᚲ ⎇ⓥቶ䇮ോᚲ ⎇ⓥ䊶ታ㛎 ⎇ⓥ䊶ታ㛎 ੱ䊶䊉䉡䊊䉡䈱⒖േ 䉮䊚䊠䊆䉬䊷䉲䊢䊮 㩿䊜䊷䊦䇮TVળ⼏䇮㔚䇮ቯળ⼏䋩 ᄢⷙᮨಽᢔὐ ᄢⷙᮨಽᢔὐ ዊⷙᮨಽᢔὐ ዊⷙᮨಽᢔὐ 䉮䊚䊠䊆䉬䊷䉲䊢䊮 㩿䊜䊷䊦䇮TVળ⼏䇮㔚䇮ቯળ⼏䋩 ᄢⷙᮨಽᢔὐ ᄢⷙᮨಽᢔὐ ዊⷙᮨಽᢔὐ ዊⷙᮨಽᢔὐ 䉮䊚䊠䊆䉬䊷䉲䊢䊮 㩿䊜䊷䊦䇮TVળ⼏䇮㔚䇮ቯળ⼏䋩 ᄢⷙᮨಽᢔὐ ᄢⷙᮨಽᢔὐ ዊⷙᮨಽᢔὐ ዊⷙᮨಽᢔὐ STRJ WS: March 3, 2003, T.Fukushima 30 ෳ⠨䋩 䌓䌔䌁䌒C䊆䊠䊷䉴䇭No.14 䋨2002ᐕ1025ᣣ䋩 䊌䊈䊦⸛⺰ળ䇸䉫䊨䊷䊋䊦ൻᤨઍ䈮䈍䈔䉎⑼ቇᛛⴚ⎇ⓥ㐿⊒䈱䈅䉍ᣇ䇹 䊌䊈䊦⋡⊛䋺↥ᬺ⇇䈱䊥䉴䊃䊤䉪䉼䊞䊥䊮䉫䈮䉋䉎⎇ⓥ㐿⊒䈱❗ዊൻ䈏ㅴ䉃ਛ䇮↥ᬺ⇇䈍䉋䈶ᄢቇ 䈏䈠䉏䈡䉏䈮ኻ䈚䈩䉕ᦼᓙ䈜䉎䈱䈎䇮↥ቇㅪ៤䉕ታ䈱䈅䉎䉅䈱䈮䈜䉎䈮䈲䈬䈱䉋䈉䈮䈜䉏䈳䉋 䈇䈎䉕⼏⺰䈜䉎䇯 䊌䊈䊥䉴䊃䋺ᔨ䋨ᚑくᄢቇ䋩䇮Ꮉ䋨᧲⦼䋩䇮ᧃศ䋨ᾢᧄᄢቇ䋩䇮ਛፉ䋨䊜䊥䊷䊤䊮䊄ᄢቇ䋩䇮᎑䇭䋨᧻ਅ䋩 䊌䊈䊤䊷䈱ᗧⷐ⚂䋺 z ↥ቇㅪ៤䈮ㆊᄢ䈭ᦼᓙ䈲‛䇯䌔䌌䌏䈲↥䈫䈱⓹ญ䈫䈭䉎䈏䇮ോ⊛䈭⚫䈮㒢䉌䉏ౝኈ䉁 䈪䉂䈢䉧䉟䊄䈲䈪䈐䈭䈇䇯䈖䈱ὐ䈲䇮☨࿖䈱ᄢቇ䈫䈲ᄢ㆑䈇䈪䈅䉎䇯⚵䉂䉕䉍䈜䈑䉎䈫䉥䊷 䊋䊷䊓䉾䊄䈏Ⴧ䈋䉎䇯 z ᄢቇᚑᨐ䈱↥ᬺ⇇䈻䈱ㆡ↪䈪䈲ᣣᧄ䈲᰷☨䈮ᄢ䈐䈒ㆃ䉏䈢䇯᰷Ꮊ䈪䈱⚻㛎䈎䉌䇮ડᬺ䈱ၮ ␆⎇ⓥ䉝䉡䊃䉸䊷䉴ൻ䈱ኻᔕ䈫䈚䈩ᄢቇᢎ䈱ડᬺ⎇ⓥᚲ㐳ോ䇮䊐䊧䉨䉲䊑䊦䈭ᨒ⚵䉂 ᭴▽╬䉕ឭ᩺䇯 z ᝄ䉍࿁䈘䉏䈢ᣣᧄ䈱⎇ⓥ㐿⊒䈫䈚䈩ㆊ䈱㗴ὐ䉕ᜰ៰䇯↥ᬺ⇇䈲ᄢቇ䉕シⷞ䈚䈢䈖䈫䈏 ⵣ⋡䈮䈪䈩䈇䉎䇯ታ䈱䈅䉎↥ቇㅪ៤䈮ะ䈔䈩䇮ⷙ✭䊶ੱ᧚ౣᢎ⢒䊶⥄ὼ䈭ᵹ䇮䈏ᔅⷐ䇯 z 䌅䌃䌁䌄ᛛⴚ┙࿖ᓳ⥝䈻䈱⚵䉂䈏ᔅⷐ䇯☨࿖䈱䉮䊮䊏䊠䊷䉺⑼ቇ䊶Ꮏቇಽ㊁䈱ᛛⴚജ䈲 ᣣᧄ䈱300䇮䈖䈱Ꮕ䈲ᄢቇᢎ⢒䈱䈅䉍ᣇ䉕⺰䈛䈢䈣䈔䈪䈲ၒ䉁䉌䈭䈇䇯․⸵┙࿖ᐲ䊶↥ ቇදหᡰេ╷╬䉝䊜䊥䉦䈮ቇ䈹ὐ䈲ᄙ䈒䇮⚵䉂䉍䈏㊀ⷐ䇯 ↥ᬺ⇇䈎䉌䈱ᄢቇ䈻䈱ᦼᓙ䈲䇮ఝ⑲䈭ੱ᧚䈱⢒ᚑ䊶ᰴઍ䈪䈱↥ᬺൻ䈮䈧䈭䈏䉎⎇ⓥᚑᨐ䈪䈅 䉎䈏䇮ታ䈲ᄢቇ㒮䈱䊧䊔䊦䈏ૐ䈒࿖㓙┹䈏䈭䈇䇮⚻ᷣᵴേ䈮䈫䈦䈩㝯ജ䈅䉎⎇ⓥ䊁䊷䊙䈏 ਲ䈚䈇䇮ᄢቇ䈱ℂᔨ䈏ᦌᤒ䇮╬⺖㗴䈲ᄙ䈇䇯☨࿖䈱ᄢቇ䈱ᒝ䈘䈮ቇ䈹䈼䈐䇯 STRJ WS: March 3, 2003, T.Fukushima 31 ෳ⠨䋩 ᣣᧄ‛ℂቇળ䇭㫍㫆㫃㪅㪌㪎㩷㩷㪥㫆㪅㪊㩷㪉㪇㪇㪉 䊘䉴䊄䉪䊶છᦼ䊶ᤨ㒢䊒䊨䉳䉢䉪䊃䇮 ᣣᧄဳห⎇ⓥ䉴䉺䉟䊦䈱ឭ⸒ 䋨ਣጊℭ৻䋩 z 䌊䌒䌃䌁䌔䈱⚻㛎䈪䉅䈉䈵䈫䈧㊀ⷐ䈭䈖䈫䈲䇮䊘䉴䊄䉪䈱ੱᢙ䈏↥ቭቇ䈇䈝䉏䈎䉌䈱⎇ⓥ⠪䉋䉍䉅ᄙ䈒䇮⋧ኻ⊛䈮᭴ᚑຬ䈱䊙䉳䊢䊥䊁䉞䋭䉕භ䉄䈢䈖䈫䈪䈅䉎䇯 䈖䉏䈲䊘䉴䊄䉪⥄り䈱⽿છᗵ䉕㜞䉄䇮䉋䈇ᗧ䈪䈱䈍䈇䈱䊤䉟䊋䊦ᗧ⼂䉕ᜬ䈢䈞䉎ὐ䈪䊒䊤䉴䈮䈇䈢䈫ᕁ䈉䇯䊘䉴䊄䉪䈏⎇ⓥቶ䈱䇸䈍ቴ᭽䇹䉁䈢䈲䇸ถ 䇹䈮䈭䉌䈭䈇䉋䈉䈮䈜䉎䈮䈲䇮䈅䉎⒟ᐲ䈱䇸䉪䊥䊁䉞䉦䊦䊙䉴䇹䈏ᔅⷐ䈪䈅䉎䇯䈖䉏䈲ᄖ࿖ੱ⎇ⓥ⠪䈮䈧䈇䈩䉅ห᭽䈱䈖䈫䈏䈇䈋䉎䇯 z ᧄᩰ⊛䈮⎇ⓥ䉕ⴕ䈉䈢䉄䈮䈲䋳ᐕ䈫䈇䈉છᦼ䈲⍴䈇䇯ᦨೋ䈱䋱ᐕ䉴䉺䊷䊃䉝䉾䊒䈮䇮⚳䉒䉍䈱䋱ᐕ䈲䉁䈫䉄䈫⡯ត䈚䈮⾌䉇䈘䉏䉎䈫䇮ታᤨ㑆䈲䋱ᐕᒝ䈫䈇 䈉䈖䈫䈮䈭䉎䇯䈖䉏䉕ᢇ䈉䈢䉄䈮䌊䌒䌃䌁䌔䈪䈲䇸䌊䌒䌃䌁䌔䊐䉢䊨䉡䇹䈫ฬ䈨䈔䈢⁛⥄䈱䉫䊤䊮䊃ᐲ䉕䉍䇮ઁ䈱⊛䉫䊤䊮䊃䈫૬↪䈚䈩䇮⎇ⓥ䈱⛮⛯䈏ᔅⷐ䈭 ႐ว䈲䉫䊤䊮䊃䉕ಾ䉍឵䈋䈩䋶ᐕ䇮䉁䈢⒘䈮䈲䈠䉏એ䈱ൕോ䈏น⢻䈪䈅䉎䉋䈉䈮䈚䈢䇯 z z 䊘䉴䊄䉪䈱છᦼ⚳ੌᓟ䈱⡯ត䈚䉕ኈᤃ䈮䈜䉎䈢䉄䈮䈲䇮⎇ⓥ␠ળ䈮ᵹേᕈ䈏ᔅⷐ䈪䈅䉎䇯䈚䈎䈚䇮ᣣᧄ䈱ਛ䈪䈵䈫䈧䈱⚵❱䈣䈔䈏ᵹേൻ䈜䉎䈫䈇䈉䈖䈫 䈲䈅䉍ᓧ䈭䈇䈎䉌䇮࿖ో䈮છᦼ䈱⎇ⓥ⚵❱䉕Ⴧ䉇䈘䈭䈒䈩䈲䈭䉌䈭䈇䇯 ╩⠪䈏ᚲዻ䈚䈩䈇䉎ℂൻቇ⎇ⓥᚲ䈲䈖䈖ᢙᐕ䈪ᕆ⤘ᒛ䈚䈢䇯ℂ⎇ో䈪450ฬ䈾䈬䈪䈅䉎䈏䇮䈠䈱䈾䈎䈮છᦼ䈱⎇ⓥ⠪䈲2,000ฬᒙ☋䈜䉎䇯 ╩⠪䉕䉄䈩䈪䈅䉎䈏䇮䈎䉏䉌䈲䈜䈼䈩䋱ᐕ䈗䈫䈱ᄾ⚂ᦝᣂ䈏ᔅⷐ䈪䈅䉎䇯䈧䉁䉍䇮ቯຬ䈱⚂䋴䈱છᦼ⎇ⓥ⠪䈏⎇ⓥ䉶䊮䉺䊷䈅䉎䈇䈲⎇ⓥ䉲䉴䊁䊛 䈫䈳䉏䉎ᤨ㒢⚵❱䈪⎇ⓥ䈮ᓥ䈚䈩䈇䉎䈱䈪䈅䉎䇯䈖䈱ᢙሼ䈏ᣣᧄ࿖ౝ䈪䈇䈎䈮⇣䈎䈫䈇䈉䈖䈫䈲䇮છᦼ䈧䈐⎇ⓥ⠪䈱ో⎇ⓥ⠪䈮ኻ䈜䉎Ყ₸䈏ో ࿖䈱࿖⎇䈪1.3%䇮࿖┙ᄢ䈪0.1%䈫䈇䈉⛔⸘䉕䉏䈳ℂ⸃䈪䈐䉎䈣䉐䈉䇯 z ⎇ⓥ⠪䈱છᦼ䈱䈅䉍ᣇ䈮䈧䈇䈩䈲䇮䋱ᐕ䈗䈫䈱ᄾ⚂ᦝᣂ䉕ၮᧄ䈮䈜䉎䉅䈱䈱䇮৻ቯᦼ㑆䈱㓹↪䉕⚂᧤䈜䉎䊨䋭䊥䊮䉫䊁䊆䊠䉝䊷䈱ዉ䈭䈬䉅ᬌ⸛䈘䉏 䈩䈇䉎䇯 z ᣂⷙណ↪䈮䈅䈢䈦䈩⎇ⓥഥ⠪䉋䉍䉅⎇ⓥ⠪䉕ఝవ䈚䈩ណ↪䈜䉎ะ䈏࿖⎇䉇ᄢቇ䈪⊒↢䈚䇮⎇ⓥഥ⠪䈱ਇ⿷䉕䉁䈰䈇䈢䇯 z છᦼ䈱ᤨ㒢䊒䊨䉳䉢䉪䊃䈮䈍䈇䈩䈲ੱઙ⾌䉕․ᛒ䈇䈜䉎ℂ↱䈏䈭䈒䈭䉎䈱䈪䇮⎇ⓥ⾌䈱ਛ䈎䉌ੱઙ⾌䉕⸘䈚䈩䊁䉪䊆䉲䊞䊮䉇䉶䉪䊧䉺䊥䊷䉕ᔅⷐ䈭 ᢙ䈣䈔ណ↪䈜䉎䈖䈫䈏น⢻䈮䈭䉎䇯䈢䈣䈚䇮ஜᐽ㒾䊶ᄬᬺ㒾䊶ᐕ㊄䈭䈬䈱䉶䊷䊐䊁䉞䊷䊈䉾䊃䈏㊀ⷐ䈪䈅䉎䈖䈫䈲䈇䈉䉁䈪䉅䈭䈇䇯 z 䉒䈏࿖䈪䈲ዞቇੱญ䈱ᷫዋะ䈫䈫䉅䈮⧯ᐕഭੱญ䈲᧪ᷫዋ䈜䉎䈏䇮ㅒ䈮ਛ㜞ᐕ䈱ഭੱญ䈲Ⴧᄢ䈜䉎䇯䈒ᗧ᰼䈲චಽ䈅䉎䈱䈮ቯᐕㅌ⡯䉇䊥 䉴䊃䊤䈮䉋䈦䈩ਇᧄᗧ䈭䈏䉌ᄬᬺ⠪䈮䈭䉎ഭജ䉕ᵴ↪䈪䈐䈭䈔䉏䈳䇮䈖䉏䉁䈢࿖ኅ⊛៊ᄬ䈪䈅䉎䇯৻⥸䈮⎇ⓥഥ⠪䈫䉋䈳䉏䉎ੱ䇱䈱䈭䈎䈮䈲䉮䊮 䊏䊠䊷䉺䊷䉇ᄢဳಽᨆᯏེ䈱䊜䊮䊁䊅䊮䉴䈱䉋䈉䈮వ┵⊛ᛛⴚ䈱ᔅⷐ䈭䉅䈱䉅䈅䉎䈏䇮ታ㛎േ‛䈱㘺⢒䈱䉋䈉䈮㜞ᐲᛛⴚ䉋䉍䉅䊦䊷䉼䊷䊮ᕈ䈏ᔅⷐ䈭䉅 䈱䉅䈅䉎䇯ડᬺ䉕ቯᐕㅌ⡯䈚䈢䈏䇮䉁䈣⥄ಽ䈱ᛛⴚ䉕ᵴ䈎䈚䈩䈐䈢䈇䈫⠨䈋䉎ੱ䇱䈮䈫䈦䈩䇮છᦼ䈱⎇ⓥഥ䈲ᩰᅢ䈱⡯႐䈪䈅䉎䇯㓹↪䈜䉎䈮䈫䈦 䈩䉅䇮ᐕ㊄ฃ⛎⠪䈪䈅䉏䈳㜞⛎䈱ᔅⷐ䈲䈭䈇䈚䇮䊌䊷䊃ᄾ⚂䈜䉎䈖䈫䉅䈪䈐䉎䈫䈇䈉ὐ䉅䈅䉎䇯 䈚䈎䈚䇮䉒䈏࿖䈱⎇ⓥ⠪ੱญ䈱70%ㄭ䈒䈲᳃㑆䈮ᚲዻ䈚䈩䈇䉎䇯☨࿖䉕䉏䈳80%એ䈪䈅䉎䇯 z z ડᬺ䈲ᣂᛛⴚ䉕䇸䉝䉡䊃䉸䊷䉲䊮䉫䇹䈮䉋䈦䈩ዉ䈚䉋䈉䈫䈚䈩䈇䉎䇯䈚䈎䈚䇮ᣣᧄ䈱ᄢቇ䈎䉌ᣂᛛⴚ䉕ዉ䈪䈐䉎䈱䈣䉐䈉䈎䇯䉝䉡䊃䉸䊷䉲䊮䉫䈱ᚑഞ䉕 䈅䈕䉎䈫ℂ⸃䈚䉇䈜䈇䈫ᕁ䈉䈏䇮㖧࿖ડᬺ䈏ඨዉ䈫ᶧ᥏䊂䉞䉴䊒䊧䉟䈪ᣣᧄ䉕∩䉄䈧䈔䈩䈇䉎䈱䈏䉝䉡䊃䉸䊷䉲䊮䉫䈱ᚑഞ䈪䈅䉎䇯䈖䉏䈮⽸₂䈚䈢䈱 䈏ᣣᧄ䈱ᄢડᬺ䉕ቯᐕ䉇䊥䉴䊃䊤䈪ㅌ⡯䈚䈢ᛛⴚ⠪䈢䈤䈪䈅䉎䇯䈭䈎䈮䈲ᓎᛛⴚ䈱䉝䊦䊋䉟䊃䉅䈅䉎䈫䈇䈉䇯䈧䉁䉍䇮ᛛⴚ⒖ォ䈱ᧄ⾰䈲ᥧ㤩⍮䉕ᜬ䈦䈢 ੱ㑆䈏⒖േ䈜䉎䈖䈫䈮䈅䉎䇯 z 䈖䈱䉋䈉䈭㐽Ⴇ⁁ᘒ䉕ᛂ㐿䈜䉎䈢䉄䈮䇮䈵䈫䈧䈱ឭ⸒䉕䈚䈢䈇䇯䊘䉴䊄䉪䈲࿖⾌䉕ᛩ䈚䈩䇸৻ਁੱ⸘↹䇹䈏⢒ᚑ䈚䈢䉒䈏࿖䈱⾆㊀䈭ੱ᧚䈪䈅䉎䇯䈖䉏䉌䈱 ੱ᧚䈱ᵴ↪䈱䈢䉄䈮䈲↥ቭቇ䈏දജ䈚䈩⍮ᕺ䉕⛉䉌䈭䈒䈩䈲䈭䉌䈭䈇䇯 z 䊘䉴䊄䉪䈱ᄙ䈒䈲᧪䇮ડᬺ⎇ⓥ⠪䉕⋡ᜰ䈘䈭䈒䈩䈲䈭䉌䈭䈇䇯䈠䉏䈭䉌䈳䇮⧯䈇䈉䈤䈮ડᬺ㛎䇮䊔䊮䉼䊞䊷㛎䉕䈘䈞䉎䈖䈫䈏ᔅⷐ䈪䈅䉎䇯ᄢቇ䈪䉅䇸䊔 䊮䉼䊞䋭1,000␠䇹䉕ታ䈜䉎䈢䉄䈮䈲䇮ડᬺታ⠌䈏ᔅ㗇䈪䈅䉎䇯䈠䈱䈢䉄䈮䈲䇮䈋䈳䇮࿖䈏䉫䊤䊮䊃䉕䈜䊘䉴䊄䉪䈮ᐕ㑆2䉦䈱ડᬺታ⠌䉕⟵ോ䈨䈔 䉎䈖䈫䈭䈬䈲䇮හೞታᣉ䈪䈐䉎╷䈪䈅䉎䇯䈖䉏䉕䊘䉴䊄䉪䈮䈫䈦䈩䈱䊨䉴䈫⠨䈋䉎䈎䇮䈎䉏䉌䈱᧪䈱䈢䉄䈮ᔅⷐ䈭㛎䈫⠨䈋䉎䈎䈲╷⊛್ᢿ䈪䈅䉎䇯 䈚䈎䈚䇮ᣣᧄ䈱䊘䉴䊄䉪䈏ᄖ࿖䈱䊘䉴䊄䉪䈮Ყ䈼䈩ᨵエᕈ䈫▸࿐䈱ᐢ䈘䉕ᰳ䈇䈩䈇䉎ታ䉕䉏䈳䇮ᖡ䈇䈖䈫䈪䈲䈭䈇䈣䉐䈉䇯 z ╩⠪䈏䈖䈱ዊ⺰䈪⸷䈋䈢䈎䈦䈢䈱䈲䇸ᛛⴚ䈲ੱ䈫䈫䉅䈮⒖ォ䈜䉎䇹䈫䈇䈉䈖䈫䈪䈅䉎䇯䉒䉏䉒䉏䈲䊘䉴䊄䉪䊶છᦼ䊶ᤨ㒢䊒䊨䉳䉢䉪䊃䉕ലᨐ⊛䈮ᵴ↪䈚䈩䉒 䈏࿖䈱⎇ⓥ⚵❱䈮ᵹേᕈ䉕⏕₸䈚䈭䈔䉏䈳䈭䉌䈭䈇䇯䈠䈖䈮䉒䈏࿖䈱᧪䈏䈎䈎䈦䈩䈇䉎䈱䈪䈅䉎䇯 STRJ WS: March 3, 2003, T.Fukushima 32
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