Ion beam assisted
deposition of thin films on
solid and nonrigid substrates
I.S.Tashlykov, S.M.Baraishuk
Belarusian State Pedagogical University,
220050 Minsk Sovetskaya 18
Schematic representation of SIAD: 1—vacuum
arc ion source, 2—ionized fraction, 3—neutral
fraction, 4—target, 5—target holder, 6—modified
surface, 7—current integrator, 8—high voltage
power supply, 9—electric field.
. RBS spectra of the initial rubber (1) and a sample
upon which the Mo coating was deposited and also
irradiated with 3 keV Mo+ ions (2)
The depth distribution of indicated components in the
rubber sample (a) and in the silicon sample (b) with Mo
coatings.
RBS spectra of untreated Si – curve (1); and with
deposited Ti-based thin film – curve (2).
Relative content of species in SIAD Ti-based thin film on
Si (4 hours deposition).
H – content in SIAD Ti-based layer deposited on Si (2
hour deposition).
Cross-section high-resolution TEM micrograph of (100)
Si sample with SIAD constructed Zr/Si structure
(accelerated voltage of 5 keV). Image of the interface
area of the Zr-based film and Si substrate (a), image of
the central area of the film [9]. The Low scale Zr
crystal inserts in the coating are shown in circuits.
AFM images of surface morphology and view profiles of
topography of rubber: untreated surface (a), the surface
after 3 hours of Mo-based coating deposition (b).
AFM images of surface morphology and view profiles of
topography of silicon: untreated surface (a), the surface
after 3 and a half hours titanium-based coating
deposition (b).
Changes of average surface roughness (rave), the root
mean square value of the surface roughness (means
square) and (square area)/(projected area) (rho) of
rubber and silicon surfaces, modified by means of SIAD
of coatings.
SEM image of rubber surface modified by Cr.
ECr+ = 10 keV.
Thicknesses of the coatings.
PPT-curves for SIAD Me-based coatings on rubber. R-pin
fixed on virgin rubber.
Adhesion of Me SIAD coatings on rubber measured
using the Pin Pull Test. ETi+ ,Mo+ ,W+ =20 keV, ECr+
,Zr+ = 10 keV. R-Pin Pull Test on initial rubber.
Contact angle of water to Me-based SIAD coatings on
rubber.
Thank you for your attention!
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