G
Sensor Systems
INDEX
Sensor Systems
Linear Gage
Linear Gage / Display Selection Guide
Linear Gage LGK
Linear Gage LGF
Linear Gage LGF-Z
Linear Gage LGB
Linear Gage LGB2
Linear Gage LG-Long Range
Linear Gage LG-Long Range, Motorized
Linear Gage LGD
Linear Gage LGS
Linear Gage LGF-High Resolution
Linear Gage LGB2-High Resolution
Laser Hologage LGH
Laser Hologage LGH-High Resolution
EH Counter-Multi Function
EC Counter-Single-function
EG Counter-Single-function
EB Counter-Single-function
EV Counter-Multi-function
EV Counter System Configuration
D-EV Display Unit
SENSORPAK Software
Litematic
Quick Guide to Precision Measuring
Instruments Linear Gages
Laser Scan Micrometer
Laser Scan Micrometer Selection Guide
Laser Scan Micrometer LSM-902 / 6900
Laser Scan Micrometer LSM-500S
Laser Scan Micrometer LSM-501S
Laser Scan Micrometer LSM-503S
Laser Scan Micrometer LSM-506S
Laser Scan Micrometer LSM-512S
Laser Scan Micrometer LSM-516S
Laser Scan Micrometer LSM-9506
LSM-6200 Display Unit
LSM-5200 Display Unit
Laser Scan Micrometer Optional Accessories
Quick Guide to Precision Measuring
Instruments Laser Scan Micrometers
Linear Gages
Laser Scan
Micrometers
Linear Gage LGK
Laser Scan Micrometer
LSM-500S
G-1
G-2,3
G-4
G-5
G-6
G-7
G-8,9
G-10
G-10,11
G-12,13
G-14
G-15
G-16
G-17
G-18
G-19
G-20
G-21
G-22
G-23
G-24
G-25
G-26
G-27
G-28,29
G-30,31
G-32
G-33
G-34
G-35
G-36
G-37
G-38
G-39
G-40
G-41
G-42-46
G-47
Gage Heads / Display Units
Gage Heads
5mm / .2"
Resolution
0.00001mm
0.0001mm
Measuring range
10mm / .4"
542-925A,542-926A
542-927A,542-928A
(Low measuring force)
Laser Hologage
Page G-18
LGB series (nut clamp)
Page G-16
542-158
Page G-4 542-246
LGK series
Refer to page G-16 542-181
LGF series
Page G-15
Laser Hologage
Page G-178
25mm / .1"
Page G-18
542-182
Page G-15
Page G-5 and G-15
542-711-1
542-712-1
(Low measuring force)
Page G-17
Long Stroke series (Motor-drive type)
Page G-10 and G-11
0.0005mm
LGK series
LGF series
Page G-4
Page G-5
LGK series
Page G-4
LGF¬SERIES¬s¬«M¬
high-resolution type
Page G-5
0.001mm
542-172
542-171
542-157
Page G-5
Page G-45 and G-5
542-162
542-156
542-161
Page G-4 and G-5
Page G-5
542-222,542-401 (Sine-wave output)
LGB series (ø8mm Straight) 542-204
542-222H (High-precision) 542-223 (air drive)
Refer to page G-7 542-224 (Low measuring force) 542-230 (air drive)
Page G-7
Page G-7
Long Stroke series (Motor-drive type)
Refer to page G-10 and G-11
542-262
542-262H (High accuracy)
LGB series (nut clamp)
542-244
542-264 (Low measuring force)
Page G-8
Refer to page G-8 542-421 (Sine-wave output)
542-270 (Air drive)
0.005mm
0.0005mm
542-612
LGF series
Page G-5
LGF series
Series with reference point mark
Page G-5
LGF series
Series with reference point mark
542-175
542-174
Page G-6
0.001mm
Page G-8
Page G-6
542-165
542-164
Page G-6
Page G-6
Page G-12
Page G-12
0.01mm
575-303
LGS series
Page G-14
G-2
Page G-6
575-327
575-326
LGD series
Page G-6
Page G-14
Page G-12
Gage Heads
Measuring range
50mm / 2"
100mm / 4"
Display unit
Point measurement
Calculation measurement
(addition and subtraction) Multi-point measurement
EH Counter
542-074A
542-312
542-316
542-313
(Motor-drive type)
Page G-19
Page G-10 EG Counter
542-075A
Page G-11
542-173
Page G-21
EV Counter
(LGH excluded)
542-063
EB Counter (LGH excluded) EH Counter
542-071A
542-092-2
Page G-5
542-163
Page G-5
Page G-19
Page G-22
542-332
542-336
542-333
(Motor-drive type)
Page G-23 and G-24
Page G-10
EH Counter
542-075A
Page G-11
Page G-19
542-613
Page G-5
EG Counter
542-017
542-176
Page G-6
542-166
EB Counter
542-094-2
EH Counter
Page G-21 542-073A
EV Counter
542-067
Page G-19
Page G-6
Page G-23 and G-24
Page G-22
EC Counter
542-007
575-328
Page G-12
EG Counter
542-016
EB Counter
542-093-2
Page G-20
EH Counter
542-072A
EV Counter
542-064
Page G-21
Page G-19
Page G-22
G-3
Page G-23 and G-24
Linear Gage LGK – Slim, Robust
Series 542 — Resolutions: 0.1µm, 0.5µm, 1µm
Connector
542-158
542-157
Connecting cable (2m)
82.7
s¬)DEAL¬FOR¬INTEGRATION¬INTO¬HARSH¬ENVIRONMENTS¬ s¬2ESOLUTION¬OF¬EACH¬MODEL¬CAN¬BE¬SELECTED¬
such as automation applications
FROM¬«M¬«M¬OR¬«M
s¬#OMPACT¬MODEL¬OFFERS¬THE¬VIBRATIONSHOCK¬
s¬%XCELLENT¬3LIDING¬DURABILITY¬IMPROVED¬TO¬
resistance of the proven LGF series at 1/5
remain serviceable for at least 15 million
the size compared to LGF-110L-B. CrossCycles (in-house testing).
sectional area is approx. 1/5 compared to
s¬%XCELLENT¬SHOCK¬RESISTANCE¬GMS¬)%#¬
LGF-110L-B.
60068-2-27)
RM12BPE-6PH (HIROSE)
30
20.4
Unit: mm
Optional Accessories
542 -156
s Air lifter 10: No.02ADE230
* Required air pressure: 0.2 to 0.4MPa
* Spindle extends when air is supplied.
SPECIFICATIONS
542-158
542-157
542-156
10mm (.4”)
«M¬v
«M¬v
«M¬v
,¬«M¬,MM
,¬«M¬,MM
±1 count
0.7N or less
0.75N or less
0.8N or less
Photoelectric linear encode
400mm/s
1500mm/s
90° phase difference, differential square wave (RS-422A equivalent), minimum edge intervals:
Output signal
NS¬FOR¬«M¬MODEL¬NS¬FOR¬«M¬MODEL¬NS¬FOR¬«M¬MODEL
Output signal pitch
«M
«M
«M
Mass
Approx. 175g
Dust/water resistance*2
Equivalent to IP66 (only gage head)
Contact point
’MM¬CARBIDETIPPED¬FIXING¬SCREW¬-¬0™¬STANDARD¬CONTACT¬POINT¬No.901312
Stem dia.
ø8mm
Bearing type
Linear ball bearing
Output cable length
2m (directly from casing)
Connector
Plug: RM12BPE-6PH (HIROSE), Compatible receptacle: RM12BRD-6S (HIROSE)
Operating temperature (humidity) range
0 to 40°C (RH 20 to 80%, no condensation)
Storage temperature (humidity) range
–10 to 60°C (RH 20 to 80%, no condensation)
Standard Accessories
Wrench for contact point: No.538610
Remarks
Gold banded
Blue banded
Green banded
¬7HEN¬THE¬SPINDLE¬SPEED¬EXCEEDS¬MMS¬MMS¬FOR¬«M¬MODEL¬AN¬ALARM¬SIGNAL¬WILL¬BE¬OUTPUT¬!LSO¬IF¬USING¬-ITUTOYO¬
counter, an error message will be displayed. If using counters made by other companies, please inquire separately for the alarm
SIGNALS¬&OR¬THE¬MODELS¬OF¬«M¬RESOLUTION¬NOTE¬THAT¬OVERSPEED¬ERROR¬MAY¬OCCUR¬DEPENDING¬ON¬THE¬IMPACT¬AMOUNT¬WHEN¬
releasing the contact point freely.
*2: IP Code is a standard which classifies and rates the degree of protection provided against the intrusion of solid objects and
water. This may not be applicable depending on the kind of liquid.
Order No.
Measuring range
Resolution
Measuring accuracy (20°C)
Quantizing error
Contact point upwards
Measuring
Contact point horizontal
force
Contact point downwards
Position detection method
Response speed*1
DIMENSIONS
Unit: mm
ø12
ø12
G-4
73.1
125.5
14 6.5
Rubber boot
Attachment thread for thrust stem
M9.5×0.5
0
ø8 –0.009
10.6 or longer (stroke)
73.1
125.5
14 6.5
0
ø8 –0.009
Rubber boot
Attachment thread for thrust stem
M9.5×0.5
542-156
10.6 or longer (stroke)
125.5
14 6.5
Rubber boot
10.6 or longer (stroke)
0
ø8 –0.009
73.1
542-157
Attachment thread for thrust stem
M9.5×0.5
542-158
ø12
s Rubber boot: No.238772 (spare)
Thrust stem set: *No.02ADB680
Thrust stem: No.02ADB681
Clamp nut: No.02ADB682
Spanner Wrench: No.02ADB683
* A thrust stem set is a combination of thrust stem and a
clamp nut. A special spanner is required for tightening.
If using multiple gages, a thrust stem set for each gage
and one special spanner are required.
Extension cable (5m): 902434
Extension cable (10m): 902433
Extension cable (20m): 902432
Applicable Counters
542-075A
542-071A
64PKA131
64PKA134
64PKA137
EH-101P
EH-102P
EG-101P
EB-11P
EV-16P (not compatible with 542-158)
Linear Gage LGF – Standard Dimensions,
Robust
Connector
Series 542 — Resolutions: 0.5µm, 1µm, 5µm
542-171, -161
SPECIFICATIONS
Resolution
542-163
50mm (2”)
«M¬
«M¬
(.000020”) (.000050”)
(7.5+L/50)
«M
542-613
«M¬
(.0002”)
(7.5+L/50)
«M
,¬«M
±1 count
4.0N or less
4.9N or less
1.1N or less
4.3N or less
5.3N or less
1.2N or less
4.6N or less
5.7N or less
Photoelectric linear encoder
1500mm/s
90° phase difference, differential square wave (RS-422A equivalent), minimum edge intervals: 1000ns for
«M¬MODEL¬NS¬FOR¬«M¬MODEL¬NS¬FOR¬«M¬MODEL
«M
«M
«M
«M
«M
«M
«M
«M
Approx. 260g
Approx. 300g
Approx. 400g
Equivalent to IP66 (only gage head)
’MM¬CARBIDETIPPED¬lXING¬SCREW¬-¬0™¬STANDARD¬CONTACT¬POINT¬No.901312
ø8mm
ø15mm
Linear ball bearing
2m (directly from casing)
Plug: RM12BPE-6PH (HIROSE), Compatible receptacle: RM12BRD-6S (HIROSE)
Output square wave pitch
Mass
Dust/water resistance
Contact point
Stem dia.
Bearing type
Output cable length
Connector
Operating temperature
(humidity) range
Storage temperature
(humidity) range
0 to 40°C (RH 20 to 80%, no condensation)
–10 to 60°C (RH 20 to 80%, no condensation)
DIMENSIONS
542-173, -163, -613
20.6
0.6 20
(screw top height)
542-172, -162, -612
542-171, -161
41
Wrench for contact point:
Standard Accessories
Wrench for contact point: No.210187
No.538610
*1: When the spindle speed exceeds 1500mm/s, an alarm signal will be output. Also, if using a Mitutoyo counter, an error message will
be displayed. If using counters made by other companies, please inquire separately for the alarm signals. For the models using 50mm
stroke gage, note over-speed speed error may occur depending on the impact amount when releasing the contact point freely.
*2: IP Code is a standard which classifies and rates the degree of protection provided against the intrusion of
solid objects and water. This may not be applicable depending on the kind of liquid.
ø18
61.7
34
Unit:
mm
41
56.1
ø18
20.6
0.6 20
(screw top height)
174
Rubber boot
(24.2)
G-5
(316)
29.6
M14×0.5
Attachment thread
for thrust stem
142
22
93.6
13.8
0
ø15 -0.015
6
4.5
(24.2)
Clamp nut
02ADB692
M18×1
51.5 or longer
(stroke)
Rubber boot
6.5
M14×0.5
Attachment thread
for thrust stem
18.5
9
5
(208.3)
ø15
0
-0.015
21
12.3
Thrust stem
02ADN371
0
ø18-0.018
Clamp nut
02ADB692
M18×1
Thrust stem
02ADN371
0
ø18 -0.018
124.9
Dimensions
with a thrust stem installed
Rubber boot
0
ø8-0.009
8.6
8.6
21
M9.5×0.5
Attachment thread
for thrust stem
10.6 or longer (stroke)
(13.8)
6
114.7
Cable length, 2m
34
Cable length, 2m
Thrust stem
02ADB681
0
ø9.5-0.015
Clamp nut
02ADB682
M9.5×0.5
Cable length, 2m
34
26 or longer
(stroke)
61.5
Dimensions with a thrust stem installed
84.1
4.5
18.5
9
5
15.4
0.6 14.8
(screw top height)
61.7
30.7
ø18
41
EH-101P
EH-102P
EG-101P
EB-11P
EV-16P (not compatible with 542-158)
«M¬
(.0002”)
542-173
1.0N or less
17.3
542-075A
542-071A
64PKA131
64PKA134
64PKA137
542-612, -613
542-612
,¬«M
Output
12
Applicable Counters
Measuring accuracy (20°C)
,ARBITRARY¬MEASURING¬
length (mm)
Quantizing error
Contact point
upwards
Measuring Contact point
horizontal
force
Contact point
downwards
Position detection method
Response speed*1
Dimensions with a thrust stem installed
5
45.9
14.5
9.5
4
Extension cable (5m): 902434
Extension cable (10m): 902433
Extension cable (20m): 902432
542-173, -163
542-171 542-161 542-172 542-162
10mm (.4”)
25mm (1”)
«M¬
«M¬
«M¬
«M¬
(.000020”) (.000050”) (.000020”) (.000050”)
Order No.
Measuring range
s Rubber boot (spare)
For 10mm range models: No.238772
For 25mm range models: No.962504
For 50mm range models: No.962505
s Thrust stem set
For 10mm range models: No.02ADB680
Thrust stem: No.02ADB681
Clamp nut: No.02ADB682
For 25/50mm range models: No.02ADN370
Thrust stem: No.02ADN371
Clamp nut: No.02ADB692
* External dimensions are described in the dimensional drawing of the product.
* A thrust stem set is a combination of thrust stem
and a clamp nut.
A special spanner is required for tightening. If
using multiple gages, a thrust stem set for each
gage and one special spanner are required.
s Spanner Wrench
For 10mm range models: No.02ADB683
For 25/50mm range models: No.02ADB693
s¬3HOCK¬RESISTANCE¬GMS¬)%#¬
s¬,'&:¬SERIES¬WHICH¬IS¬EQUIPPED¬WITH¬REFERENCE¬
point mark on the linear encoder (refer to
PAGE¬'¬AND¬«M¬RESOLUTION¬TYPE¬REFER¬TO¬
page G-16) are also available.
542-172, -162
75.7
s Air drive unit
For 10mm range models: No.02ADE230
For 25mm range models: No.02ADE250
For 50mm range models: No.02ADE270
* Required air pressure: 0.2 to 0.4MPa
* Spindle extends when air is supplied.
6.9 (129.5)
Optional Accessories
14
Unit: mm
s¬%XCELLENT¬VIBRATIONSHOCK¬RESISTANCE¬DUE¬TO¬
the design of the spindle guide section.
s¬3LIDING¬DURABILITY¬IMPROVED¬TO¬REMAIN¬
serviceable for at least 15 million Cycles (inhouse testing).
46.9
ø18
ø11.8
41
13.8
Linear Gage LGF-Z – with Reference Point,
Standard Dimensions, Robust
Connector
s¬,'&¬SERIES¬WITH¬REFERENCE¬POINT¬SIGNAL¬OUTPUT¬ s¬3LIDING¬DURABILITY¬IMPROVED¬TO¬REMAIN¬
function.
serviceable for at least 15 million Cycles
The master setting to use it, incorporated in
(in-house testing).
the unit, is easy to operate. The origin point s¬3HOCK¬RESISTANCE¬GMS¬
can be easily detected even when a fault,
(IEC 60068-2-27)
such as over-speed error, etc. occurs.
s¬2ESOLUTIONS¬ARE¬AVAILABLE¬IN¬«M¬OR¬«M
Sleeve
ø16.7
Series 542 — Resolutions: 0.5µm, 1µm
34.0
Unit: mm
Optional Accessories
542-174, -164
542-175, -165
s Air drive unit
For 10mm range models: No.02ADE230
For 25mm range models: No.02ADE250
For 50mm range models: No.02ADE270
* Required air pressure: 0.2 to 0.4MPa
* Spindle extends when air is supplied.
542-176, -166
SPECIFICATIONS
542-174
542-164
542-175
542-165
542-176
542-166
10mm (.4”)
25mm (1”)
50mm (2”)
«M¬
«M¬
«M¬
«M¬
«M¬
«M¬
Resolution
(.000020”)
(.000050”)
(.000020”)
(.000050”)
(.000020”)
(.000050”)
Measuring accuracy (20°C)
,«M¬,¬MEASURING¬LENGTH¬MM
Quantizing error
±1 count
Contact point upwards
1.0N or less
4.0N or less
4.9N or less
Measuring
Contact point horizontal
1.1N or less
4.3N or less
5.3N or less
force
Contact point downwards
1.2N or less
4.6N or less
5.7N or less
Position detection method
Photoelectric linear encoder
3mm from contact point tip
Reference mark position
5mm from contact point tip (lowest rest point)
(lowest rest point)
Reference mark repeatability (20°C):
≤«M¬AT¬A¬CONSTANT¬REFERENCE¬POINT¬PASSING¬SPEED¬LESS¬THAN¬MMS¬IN¬THE¬SAME¬DIRECTION
Response speed*1
1500mm/s
90° phase difference, differential square wave (RS-422A equivalent), minimum edge intervals:
Output signal
NS¬FOR¬«M¬MODEL¬NS¬FOR¬«M¬MODEL
Output square wave pitch
«M
«M
«M
«M
«M
«M
Mass
Approx. 260g
Approx. 300g
Approx. 400g
Dust/water resistance*2
Equivalent to IP66 (only gage head)
Contact point
’MM¬CARBIDETIPPED¬FIXING¬SCREW¬-¬0™¬STANDARD¬CONTACT¬POINT¬No.901312
Stem dia.
ø8mm
ø15mm
Bearing type
Linear ball bearing
Output cable length
2m (directly extended from the main unit)
Connector
Plug: PRC05-P8M (TAJIMI), Compatible receptacle: PRC05-R8F (TAJIMI)
Operating temperature (humidity) range
0 to 40°C (RH 20 to 80%, no condensation)
Storage temperature (humidity) range
–10 to 60°C (RH 20 to 80%, no condensation)
Standard Accessories
Wrench for contact point: No.538610
Wrench for contact point: No.210187
Remarks
w/ origin point mark
*1: When the spindle speed exceeds 1500mm/s, an alarm signal will be output. For use of alarm signals, please inquire separately.
For models with 50mm stroke, note that over-speed error may occur depending on the impact amount when releasing the
contact point freely.
*2: IP Code is a standard which classifies and rates the degree of protection provided against the intrusion of solid objects and
water. This may not be applicable depending on the kind of liquid.
Order No.
Measuring range
DIMENSIONS
ø16.7
30.7
34
(316)
29.6
142
Rubber boot
21
(24.2)
G-6
M14×0.5
Attachment thread
for thrust stem
6
4.5
18.5
9
5
13.8
0
ø15-0.015
51.5 or longer
(stroke)
Rubber boot
(24.2)
Clamp nut
02ADB692
M18×1
124.9
Dimensions
with a thrust stem installed
M18×1
Thrust stem
02ADN371
0
ø18 -0.018
22
(208.3)
M14×0.5
Attachment thread
for thrust stem
6.5
93.6
Clamp nut
02ADB692
8.6
0
ø15-0.015
26 or longer
(stroke)
75.7
6.9 (129.5)
14
46.9
12.3
Dimensions with a thrust stem installed
4.5
84.1
18.5
9
5
Rubber boot
10.6 or longer
(stroke)
M9.5×0.5
Attachment thread
0
for thrust stem ø8-0.009
8.6
Thrust stem
02ADN371
0
ø18-0.018
21
12
6
114.7
34
61.5
17.3
Dimensions with a thrust stem installed
5
45.9
14.5
9.5
4
(13.8)
34
Cable length, 2m
Cable length, 2m
Cable length, 2m
Thrust stem
02ADB681
0
ø9.5-0.015
Clamp nut
02ADB682
M9.5×0.5
61.7
542-073A
64PKA133
64PKA136
64PKA139
34
174
20.6
0.6 20
(screw top height)
ø16.7
61.7
56.1
34
542-174, -164
34
20.6
0.6 20
(screw top height)
Extension cable (5m): 02ADF260
Extension cable (10m): 02ADF280
Extension cable (20m): 02ADF300
Applicable Counters
ø16.7
542-175, -165
15.4
0.6 14.8
(screw top height)
Unit: mm
542-176, -166
s Rubber boot (spare)
For 10mm range models: No.238772
For 25mm range models: No.962504
For 50mm range models: No.962505
s Thrust stem set
For 10mm range models: No.02ADB680
Thrust stem: No.02ADB681
Clamp nut: No.02ADB682
For 25/50mm range models: No.02ADN370
Thrust stem: No.02ADN371
Clamp nut: No.02ADB692
* External dimensions are described in the dimensional
drawing of the product.
* Thrust stem set is a combination of thrust stem and a
clamp nut. A special spanner is required for tightening.
If using multiple gages, a thrust stem set for each gage
and one special spanner are required.
s Spanner Wrench
For 10mm range models: No.02ADB683
For 25/50mm range models: No.02ADB693
13.8
EH-102Z
EG-101Z
EB-11Z
EV-16Z
Linear Gage LGB - Slim
542-075A
542-071A
64PKA131
64PKA134
64PKA137
542-074A
EH-101P
EH-102P
EG-101P
EB-11P
EV-16P
EH-1025 (for 542-401 only)
542-204
movement and exceptional durability.
s¬.UT¬CLAMP¬TYPE¬IS¬ALSO¬AVAILABLE¬,'"¬REFER¬
to page G-9).
542-222, 542-222H,
542-224
SPECIFICATIONS
Type
L-shaped
542-230
Low measur- Air-driven contact point *1 Sine-wave output
ing force
type
542-222 542-222H 542-224 542-230*2 542-223*3
542-401
10mm (.4”)
«M¬v
*4
«M
«M
±1 count
0.5N
Approx. 0.7N or less Approx.
Approx. 0.4N or less
or less
Approx.
Approx. 0.75N or less 0.55N or less
Approx. 0.45N or less
Approx.
0.6N
Approx. 0.8N or less
Approx. 0.5N or less
or less
Equivalent to IP54 (only gage head)
150g
165g
160g
Straight
Order No.
542-204
Measuring range
5mm (.2”)
Resolution
Measuring accuracy (20°C)
«M
Quantizing error
Contact point Approx. 0.55N
upwards
or less
Measuring Contact point Approx. 0.6N
horizontal
or less
force*4
Contact point Approx. 0.65N
downwards
or less
Protection Level
Mass
145g
*1: Required air pressure: 0.3 to 0.4MPa
*2: Spindle extends when air is supplied.
*3: Spindle retracts when air is supplied.
¬$EPENDS¬ON¬THE¬SETTINGS¬OF¬THE¬CONNECTED¬COUNTER¬0OTENTIAL¬RESOLUTION¬DOWN¬TO¬«M
Slim head low measuring force series (made to order)
s Low measuring force, suitable for measurement of soft-material workpieces.
Model
LGB-105L-1
LGB-110A-1/LGB-110AR-1*2
Measuring range
5mm
10mm
Resolution
«M
«M
Contact point upwards Approx. 0.4N or less
Approx. 0.5N or less
Measuring
Approx. 0.55N or less
force*1 Contact point horizontal Approx. 0.45N or less
Contact point downwards Approx. 0.5N or less
Approx. 0.6N or less
*1: Measuring force at the retraction of the spindle
*2: The "R" suffix indicates air retracted spindle
The LGB-1 is la low measuring force model. Depending on
the operating method, the spindle
forward speed may become slow
compared to the standard model.
Please check if this restriction is
compatible with the application.
Please contact Mitutoyo to verify the
application
Connector
30
Connecting cable (2m)
20.4
Connecting cable (2m)
47
Applicable Counters
s¬#OMPACT¬FORM¬’MM¬STRAIGHT¬STEM¬IS¬AN¬
optimal choice as a built-in type sensor.
s¬4HE¬SPINDLE¬GUIDE¬USES¬HIGH¬PRECISION¬
linear ball bearings for extremely smooth
30
20.4
(HIROSE)
RM12BPE-6PH
100
s Rubber boot (spare)
For 5mm range models: No.238773
For 10mm range models: No.238772
s Extension cable (5m): 902434
s Extension cable (10m): 902433
s Extension cable (20m): 902432
Series 542 — Resolution: 1µm
82.7
Optional Accessories
Dsub 15 pin
Unit: mm
Sine wave output model
(542-401, 542-421)
Unit: mm
External dimensions: refer to page G-9.
G-7
Linear Gage LGB2 – Slim, w/Clamp Nut
Series 542 — Resolution: 1µm
Optional Accessories
s¬3LIM¬DESIGN¬NUT¬CLAMP¬TYPE¬¬3TEM¬DIA¬IS¬
ø9.5mm)
542-244
s¬4HE¬SPINDLE¬GUIDE¬USES¬HIGH¬PRECISION¬
linear ball bearings for extremely smooth
movement and exceptional durability.
542-262/542-262H
542-264
s Rubber boot (spare)
For 5mm range models: No.238773
For 10mm range models: No.238772
s Extension cable (5m): 902434
s Extension cable (10m): 902433
s Extension cable (20m): 902432
542-270
Applicable Counters
542-075A
542-071A
64PKA131
64PKA134
64PKA137
542-074A
SPECIFICATIONS
Low measuring
Air-driven Sine-wave output
force
contact point*1
type
Order No.
542-244
542-262
542-262H
542-264
542-270*2
542-421
Measuring range
5mm (.2”)
10mm (.4”)
Resolution
«M¬v
*3
Measuring accuracy (20°C)
«M
«M
«M
Maximum response speed
900mm/s
Contact point Approx. 0.55N or
Approx. 0.5N or
Approx.
0.7N
or
less
Approx. 0.7N or less
upwards
less
less
Approx.
0.55N
or
Measuring Contact point Approx. 0.6N or
Approx. 0.75N or less
Approx. 0.75N or less
horizontal
less
less
force
Contact point Approx. 0.65N or
Approx.
0.6N
or
Approx. 0.8N or less
Approx. 0.8N or less
downwards
less
less
Protection Level*4
IP54
Mass
160g
170g
170g
180g
*1: Required air pressure: 0.3 to 0.4MPa
*2: Spindle extends when air is supplied.
¬$EPENDS¬ON¬THE¬SETTINGS¬OF¬THE¬CONNECTED¬COUNTER¬0OTENTIAL¬RESOLUTION¬DOWN¬TO¬«M
*4: IP Code is a standard which classifies and rates the degree of protection provided against the intrusion of solid objects and
water. This may not be applicable depending on the kind of liquid.
Type
L-shaped
Straight
Slim head low measuring force series (made to order)
s Low measuring force, suitable for measurement of soft-material workpieces.
Model
LGB2-105L-1
LGB2-110AR-1
Measuring range
«M
«M
Resolution
«M
«M
Contact point upwards Approx. 0.4N or less
Approx. 0.5N or less
Measuring Contact point horizontal/
force*
Contact point upwards Approx. 0.45N or less Approx. 0.55N or less
Contact point downwards Approx. 0.5N or less
Approx. 0.6N or less
* Measuring force at the retraction of the spindle
The LGB2-1 is a low measuring force model. Depending on the
operating method, the spindle forward
speed may become slow compared to
the standard model. Please check if this
restriction is compatible with the application. Please contact Mitutoyo to verify
the application
Connector
30
20.4
Connecting cable (2m)
47
82.7
Connecting cable (2m)
20.4
(HIROSE)
RM12BPE-6PH
100
30
Dsub 15 pin
Unit: mm
External dimensions: refer to page G-9.
G-8
Sine wave output models
(542-401/21)
Unit: mm
EH-101P
EH-102P
EG-101P
EB-11P
EV-16P
EH-1025 (for 542-401 only)
Linear Gage LGB2 – Slim
Series 542 — Resolution: 1µm
Unit: mm
542-204
542-222/No.542-222H
542-224
542-230
9.2 4.9 9.6
Refer to the connector section.
Refer to the connector section.
10.5
Refer to the connector section.
Compatible air hose
(ID: ø2.5)
113
34.9 15.4
0
ø8 -0.009
(39.3)
Rubber boot
7.3
75
24.6 9
0
ø8-0.009
542-223
Compatible air hose
(ID: ø2.5)
0
ø8 -0.009
Rubber boot
The spindle extends when
air is supplied.
Refer to the connector section.
Refer to the connector section.
Connecting cable (2m)
Connectable to Mitutoyo linear
scale counter.
542-244
0
ø8-0.009
7.3
Rubber boot
34.9 15.4 21.2
0
ø8 -0.009
113
40.9
Connecting cable (2m)
7.3
Rubber boot
542-401
Standard cable (2m)
60.1
ø9
Connecting cable (2m)
Stroke
10.4mm or more 23.9 15.4 21.2
102
Connecting cable (2m)
ø9
18
9.2
5
14.3
The spindle retracts when air
is supplied.
Rubber boot
10
542-262/542-262H
542-264
Refer to the connector section.
Refer to the connector section.
Connecting cable (2m)
ø9
18
Connecting cable (2m)
542-270
Refer to the connector section.
Compatible air hose
(ID: ø2.5)
Connecting cable (2m)
L=11.5~13.0
542-421
Refer to the connector section.
Clamp nut
(Parts No.200365)
L=11.5~13.0
4.5
102
0
ø9.5 -0.009
15.9
L
ø12
0
ø9.5-0.009
ø14
Clamp nut
(Parts No.200365)
Rubber boot
Knurl
Stroke
10.4mm or more
L=11.5~13.0
Knurl
113
34.9 15.9 20.2
4.9 (thread) L
0
ø9.5 -0.009
ø14
Clamp nut
(Parts No.200365)
Rubber boot
60.1
ø9
ø4.2
ø7.9
39.3
113
34.9 15.4
EH-101P
EH-102P
EG-101P
EB-11P
EV-16P
EH-1025 (for sine wave gages only)
75
25.1 15.9 6.3
4.9 (thread) L
542-075A
542-071A
64PKA131
64PKA134
64PKA137
542-074A
DIMENSIONS
The spindle extends when air
is supplied.
Connecting cable (2m)
ø4.2
ø7.9
Knurl
113
34.9 15.9 20.2
4.9 (thread) L
Applicable Counters
ø12
0
ø9.5-0.009
ø14
Clamp nut
(Parts No.200365)
Rubber boot
L=11.5~13.0
Connectable to Mitutoyo linear
scale counter.
G-9
締め付
（パーツ
ゴ
Linear Gage LG – Long Range
Series 542 — Resolutions: 0.1µm, 1µm
Lifting clip attachment
s¬!¬SERIES¬TO¬COVER¬MAXIMUM¬MEASURING¬RANGE¬
100mm.
s¬4HREE¬VERSIONS¬ARE¬AVAILABLE¬STANDARD¬MODEL¬
low measuring force model, and rubber boot
type (made to order).
s¬4HE¬RESOLUTION¬OF¬EACH¬MODEL¬CAN¬BE¬SELECTED¬
FROM¬«M¬AND¬«M
SPECIFICATIONS
Type
Order No.
Measuring range
Resolution
Measuring accuracy (20°C)
Quantizing error
Contact point
downwards
Measuring Contact point
force
horizontal
Contact point
upwards
Position detection method
Response speed*1 (max.
electrical response speed)
Output signal
Spindle drive
Spindle guide
Stem diameter
Contact point
Shock resistance
Cable length
Spindle sealing method
Dust/water resistance*2
Operating temperature
(humidity) range
Storage temperature
(humidity) range
137693 (standard)
Lifting clip
542-312
Optional Accessories
Standard spar
type
542-312
Low measuring Rubber boot type Standard spar Low measuring Rubber boot type
force
type
force
542-316
542-314
542-332
542-336
542-334
100mm (.4”)
«M¬v
«M¬v
,«M≤«M¬,¬MEASURING¬LENGTH¬MM
,«M≤«M¬,¬MEASURING¬LENGTH¬MM
±1 count
Approx.
Approx.
Approx.
Approx.
Approx.
Approx.
8.0N or less
3.0N or less
8.0N or less
8.0N or less
3.0N or less
8.0N or less
Approx.
Approx.
Approx.
Approx.
—
—
6.5N or less
6.5N or less
6.5N or less
6.5N or less
Approx.
Approx.
Approx.
Approx.
—
—
5.0N or less
5.0N or less
5.0N or less
5.0N or less
Photoelectric linear encoder
Approx. 400mm/s
Approx. 800mm/s
90° phase difference, differential squarewave (RS-422A equivalent)
Helical extension spring
Bearing guide
ø20mm
’MM¬CARBIDETIPPED¬FIXING¬SCREW¬-¬0™
Standard contact point No.901312
60g (in-house testing)
Approx. 2m (directly extended from the gage unit)
Scraper type
Rubber boot type
Scraper type
Rubber boot type
Equivalent to
Equivalent to
Equivalent to IP54
Equivalent
to
IP54
IP66
IP66
0 to 40°C (RH 20 to 80%, no condensation)
–10 to 60°C (RH 20 to 80%, no condensation)
For calculation: RM12BPE-6PH (HIROSE)
Compatible receptacle: RM12BRD-6S (HIROSE)
Mass (including cables)
Approx. 750g
Approx. 780g
Approx. 750g
Approx. 780g
Wrench for contact point: No.210187
(EXAGON¬SOCKET¬HEAD¬CAP¬SCREW¬-™™¬¬PCS¬FOR¬GAGE¬FIXING
Standard Accessories
Round flat washer, nominal 4, 2 pcs. (for gage fixing)
Lifting clip: No.137693
Fixing holder: 02ADG181 (for fixing lifting lever)
Low Measuring w/ rubber boot
Low Measuring w/ rubber boot
Remarks
Standard
Standard
force
force
*1: Note that over-speed error may occur depending on the indentation amount when releasing the contact point freely after indentation.
*2: IP Code is a standard which classifies and rates the degree of protection provided against the intrusion of solid objects and
water. This may not be applicable depending on the kind of liquid. (Only gage head)
Input/output connector
49
DIMENSIONS
17
G-10
243.5
473.5
Rubber boot
Stroke 102 or longer
ø6
34
7
67
6
36
50
0
ø20-0.013
236
Output cable length, 2m
34
68
6
13
36 7
50
Stroke 102 or longer
Output cable length, 2m
429
243.5
RM12BPE-6PH (HIROSE)
2-ø4.5, ø9 depth 5
542-314, -334
0
ø20-0.013
191.5
Unit: mm
RM12BPE-6PH (HIROSE)
33
2-ø4.5, ø9 depth 4
49
542-312, -316, -332, -336
33
20
17
s Rubber boot: 02ADA004 (for rubber boot type)
Extension cable (5m): 902434
Extension cable (10m): 902433
Extension cable (20m): 902432
Applicable Counters
For 542-312, 542-316, 542-314
542-075A
EH-101P
542-071A
EH-102P
64PKA131
EG-101P
64PKA134* EB-11P
For 542-332, 542-336, 542-334
542-075A
EH-101P
542-071A
EH-102P
64PKA131
EG-101P
64PKA134* EB-11P
64PKA137* EV-16P
¬.OT¬FOR¬USE¬WITH¬«M¬RESOLUTION¬GAGES
Linear Gage LG – Long Range, Motorized
Series 542 — Resolutions: 0.1µm, 1µm
Motor drive unit
No.02ADG400
(standard accessory for LGM series main unit)
s¬,ONG¬STROKE¬MM¬MOTORDRIVEN¬SPINDLE
s¬2UBBER¬BOOT¬TYPE¬MADETOORDER¬IS¬ALSO¬
available.
s¬2ESOLUTIONS¬ARE¬AVAILABLE¬IN¬«M¬AND¬«M
SPECIFICATIONS
For 542-313, and 542-315
542-075A
EH-101P
542-071A
EH-102P
EG-101P
64PKA131
64PKA134* EB-11P
For 542-333, and 542-335
542-075A
EH-101P
542-071A
EH-102P
64PKA131
EG-101P
64PKA134* EB-11P
64PKA137* EV-16P
¬.OT¬FOR¬USE¬WITH¬«M¬RESOLUTION¬GAGES
Standard Accessories
Remarks
*1: The speed and measuring force are adjustable on the motor drive unit. Note that the rubber boot type cannot be used in the
horizontal position.
*2: IP Code is a standard which classifies and rates the degree of protection provided against the intrusion of solid objects and
water. This may not be applicable depending on the kind of liquid.
DIMENSIONS
49
33
49
542-313, -333
542-315, -335
0
ø20 –0.013
13
36 7
50
34
ø6
36
50
7
0
ø20 –0.013
20
17
G-11
Unit: mm
33
243.5
Applicable Counters
Gage (counter output)
Input/
output
Gage (I/O for driving)
connector
Motor drive unit
(for external control)
Mass (including cables)
473.5
Extension cable (5m): 902434
Extension cable (10m): 902433
Extension cable (20m): 902432
34
67
s Rubber boot: 02ADA004 (for rubber boot type)
Rubber boot
Optional Accessories
RM12BPE-6PH (HIROSE)
2-ø4.5, ø9 depth 4
120V AC
Shock resistance
Cable length
Spindle sealing method
Dust/water resistance*2
Operating temperature (humidity) range
Storage temperature (humidity) range
Stroke 102 or longer
Power supply
Contact point
HR10A-7P-6P (HIROSE)
Approx. 700g
Drive unit cable length, 2m
Output cable length, 2m
236
Mass
243.5
Spindle stop signal at upper limit
Approx. 800mm/s
90° phase difference, differential squarewave (RS-422A equivalent)
Motor drive
Bearing guide
ø20mm
’MM¬CARBIDETIPPED¬FIXING¬SCREW¬-¬0™
Standard contact point: No.901312
60g (in-house testing)
Approx. 2m (directly extended from the gage unit)
Scraper type
Rubber boot type
Scraper type
Rubber boot type
Equivalent to IP54
Equivalent to IP66
Equivalent to IP54
Equivalent to IP66
0 to 40°C (RH 20 to 80%, no condensation)
–10 to 60°C (RH 20 to 80%, no condensation)
Connector for counter: RM12BPE-6PH (HIROSE)
Compatible receptacle: RM12BRD-6S (HIROSE)
Gage side plug: HR10A-7P-6P (HIROSE)
Receptacle on motor drive unit: HR10A-7R-6S (HIROSE)
Receptacle on motor drive unit: HR10A-10R-10S (HIROSE)
Motor drive unit plug: HR10A-10P-10P (HIROSE)
Approx. 940g
Approx. 970g
Approx. 940g
Approx. 970g
Wrench for contact point: No.210187
(EXAGON¬SOCKET¬HEAD¬CAP¬SCREW¬-™™¬¬PCS¬FOR¬GAGE¬FIXING
Round flat washer, nominal 4, 2 pcs. (for gage fixing)
Motor drive unit: No.02ADG400
Motor-driven Type
429
External output signal
Approx. 400mm/s
68
Spindle retract
Spindle extend
RM12BPE-6PH (HIROSE)
2-ø4.5, ø9 depth 5
External input signal
Quantizing error
Contact point downwards
Measuring
Contact point horizontal
force
Contact point upwards
Position detection method
Response speed*1
(max. electrical response speed)
Output signal
Spindle drive
Spindle guide
Stem diameter
6
¬7™¬$™¬(MM¬RUBBER¬BOOT¬EXCLUDED
Measuring accuracy (20°C)
191.5
External dimensions
Rubber boot type
Standard spar type
Rubber boot type
542-315
542-333
542-335
100mm (.4”)
«M¬v
«M¬v
,¬«M¬≤¬«M¬
,¬«M¬≤¬«M¬
,ARBITRARY¬MEASURING¬LENGTH¬MM
,ARBITRARY¬MEASURING¬LENGTH¬MM
±1 count
H4 (9.5N)
L9 (6.0N)
H4 (9.5N)
L9 (6.0N)
L7 (6.5N)
—
L7 (6.5N)
—
L3 (3.0N)
L4 (4.5N)
L3 (3.0N)
L4 (4.5N)
Reflection type photoelectric linear encoder
Stroke 102 or longer
Can be set with the rotary switch of the main unit (to one
of the combinations of H/L and a number between 0 and 9)
depending on the mounting position.
HR10A-7P-6P (HIROSE)
Measuring force
Standard spar type
542-313
Drive unit cable length (2m)
Output cable length, 2m
s A unit to move the spindle of the LGM series forward
and backward.
542-313
Type
Order No.
Measuring range
Resolution
17
Linear Gage LGD – Absolute, Standard
Dimensions, Robust
Series 575 — Resolution: 10µm
575-326
575-327
575-328
SPECIFICATIONS
Order No.*1
575-326
575-327
575-328
Measuring range
.4" / 10mm
1" / 25mm
2" / 50mm
Resolution
¬¬«M
Measuring accuracy (20°C)
¬¬«M
«M
Quantizing error
±1 count
Contact point upwards
1.0N or less
4.0N or less
4.9N or less
Measuring Contact point horizontal
1.1N or less
4.3N or less
5.3N or less
force
Contact point downwards
1.2N or less
4.6N or less
5.7N or less
Position detection method
ABSOLUTE electrostatic capacitance type linear encoder
Response speed
Unlimited (not applicable to scanning measurement)
Output
Digimatic output
External input
Reference-setting signal (Absolute reference position*2 can be changed externally.)
Mass*3
Approx. 260g
Approx. 300g
Approx. 400g
Contact point
’MM¬CARBIDETIPPED¬FIXING¬SCREW¬-¬0™¬STANDARD¬CONTACT¬POINT¬.O
Stem dia.
ø8
ø15
Bearing type
Linear ball bearing
Dust/water resistance*4
Equivalent to IP66 (only gage head)
Output cable length
2m, 3m, 5m, 7m
(directly extended from the main unit)
Operating temperature (humidity) range
0 to 40°C (RH 20 to 80%, no condensation)
Storage temperature(humidity) range
–10 to 60°C (RH 20 to 80%, no condensation)
Wrench
for
contact
point:
Standard Accessories
Wrench for contact point: No.210187
No.538610
*1: The last number of the Code No. represents special cable length. (meters)
*2: The absolute reference point is near the lowest rest point at shipment.
*3: Mass including 2m cable.
*4: IP Code is a standard which classifies and rates the degree of protection provided against the intrusion of solid objects and
water. This may not be applicable depending on the kind of liquid.
Connector
8.6
37
20
s¬!BSOLUTE¬POSITION¬DETECTION¬MAKES¬IT¬POSSIBLE¬ s¬4HE¬SPINDLE¬GUIDE¬USES¬HIGH¬PRECISION¬
to maintain the reference point even when
linear ball bearings for extremely smooth
the power is switched off.
movement and exceptional durability.
s¬%XCELLENT¬PROTECTION¬AGAINST¬DUST¬AND¬
s¬3LIDING¬DURABILITY¬IMPROVED¬TO¬REMAIN¬
splashing water (IP66) in the factory floor.
serviceable for at least 15 million cycles
s¬5LTRACOMPACT¬DESIGN¬ENABLES¬INSTALLATION¬IN¬
(in-house testing).
very tight spaces.
s¬3HOCK¬RESISTANCE¬GMS¬
(IEC 60068-2-27)
Unit: mm
Optional Accessories
s Air drive unit
For 10mm range models: No.02ADE230
For 25mm range models: No.02ADE250
For 50mm range models: No.02ADE270
* Required air pressure: 0.2 to 0.4MPa
* Spindle extends when air is supplied.
s Rubber boot (spare)
For 10mm range models: No.238772
For 25mm range models: No.962504
For 50mm range models: No.962505
s Thrust stem set
For 10mm range models: No.02ADB680
Thrust stem: No.02ADB681
Clamp nut: No.02ADB682
For 25/50mm range models: No.02ADN370
Thrust stem: No.02ADN371
Clamp nut: No.02ADB692
* External dimensions are described in the dimensional
drawing of the product.
* Thrust stem set is a combination of thrust stem and a
clamp nut. A special spanner is required for tightening.
If using multiple gages, a thrust stem set for each gage
and one special spanner are required.
s Spanner Wrench
For 10mm range models: No.02ADB683
For 25/50mm range models: No.02ADB693
Digimatic Power Supply Unit: 965370
SPC cable extension adapter: 02ADF640
Extension cable (0.5m): 02ADD950
Extension cable (1m): 936937
Extension cable (2m): 965014
*when connecting an extension cable, an SPC cable
extension adapter is required (02ADF640)
Digimatic cable extension
adapter 02ADF640
Applicable Counters
542-007A
64PKA132
64PKA135
542-072A
542-064
G-12
EC-101D Counter, 120V
EG-101D
EB-11D
EH-102D
EV-16D COUNTER
Linear Gage LGD – Absolute, Standard
Dimensions, Robust
Series 575 — Resolution: 10µm
DIMENSIONS
575-326
Unit: mm
575-328
37
37
20
20
61.5
34
56.1
14
Cable length
=2, 3, 5, 7m
12.3
(316)
M14×0.5
Attachment thread
for thrust stem
142
21
34
30.7
61.7
114.7
Cable length
=2, 3, 5, 7m
8.6
(208.3)
Rubber boot
22
93.6
13.8
21
(24.2)
6.5
Clamp nut
02ADB692
M18×1
0
ø15-0.015
M14×0.5
Attachment thread
for thrust stem
26 or longer
(stroke)
4.5
18.5
9
5
Thrust stem
02ADN371
0
ø18-0.018
G-13
51.5 or longer
(stroke)
Rubber boot
(24.2)
20.6
0.6 20
(screw top height)
29.6
4.5
18.5
9
5
124.9
Dimensions with a thrust
stem installed
Clamp nut
02ADB692
M18×1
0
ø15-0.015
37
575-327
LGD®-1025L-B, -1025L/3-B, -1025L/5-B,
-1025L/7-B
8.6
20
84.1
Dimensions
with a thrust
stem installed
EC-101D Counter, 120V
EG-101D
EB-11D
EH-102D
EV-16D COUNTER
Thrust stem
02ADN371
0
ø18-0.018
6
12
8.6
Applicable Counters
542-007A
64PKA132
64PKA135
542-072A
64PKA138
34
46.9
10.6 or longer
(stroke)
M9.5×0.5
Attachment thread
0
for thrust stem ø8 -0.009
6.9 (129.5)
6
Rubber boot
(13.8)
75.7
Cable length
=2, 3, 5, 7m
Thrust stem
02ADB681
0
ø9.5 -0.015
Clamp nut
02ADB682
M9.5×0.5
61.7
20.6
0.6 20
(screw top height)
17.3
Dimensions with a thrust stem installed
45.9
5
14.5
9.5
4
15.4
0.6 14.8
(screw top height)
174
8.6
8.6
13.8
Linear Gage LGS – Absolute
Series 575 — Resolution: 10µm
575-303
Connector
8.6
37
20
s¬!"3/,54%¬ELECTROSTATIC¬CAPACITANCE¬TYPE¬ENCODER¬
makes it possible to maintain the reference point even
when the power is switched off.
s¬%XCELLENT¬PROTECTION¬AGAINST¬DUST¬AND¬SPLASHING¬WATER¬
(IP66) on the factory floor.
Unit: mm
SPECIFICATIONS
Inch
Order No.
Measuring range
Resolution
Measuring accuracy (20°C)
Quantizing error
Measuring Contact point upwards
Contact point horizontal
force
Contact point downwards
Position detection method
Response speed
Output
Mass
s Rubber boot: No.238774 (spare)
s Air drive unit (metric): No.903594
s¬!IR¬DRIVE¬UNIT¬INCH¬No.903598
s SPC cable extension adapter: No.02ADF640
s Extension cable (0.5m): No.02ADD950
s Extension cable (1m): No.936937
s Extension cable (2m): No.965014
* When connecting an extension cable, an SPC cable
extension adapter is required. (0ZADF640)
Digimatic cable extension
adapter 02ADF640
Applicable Counters
542-007A
64PKA132
64PKA135
542-072A
64PKA138
EC-101D Counter, 120V
EG-101D
EB-11D
EH-102D
EV-16D COUNTER
DIMENSIONS
Unit: mm
25
17.4
35
0
ø8 -0.008
38.7
15.2
6.2
575-313
.5"
.0005"
.0008"
±1 count
1.6N or less
1.8N or less
2N or less
ABSOLUTE electrostatic capacitance type linear encoder
Unlimited (not applicable to scanning measurement)
Digimatic output
Approx. 190g
’MM¬CARBIDETIPPED¬FIXING¬SCREW¬-¬0™
Contact point
Standard contact point No.901312
Stem dia.
’
Bearing type
Slide bearing
Dust/water resistance
Equivalent to IP66 (only gage head)
Output cable length
2m (directly extended from the main unit)
Operating temperature (humidity) range
0 to 40°C (RH 20 to 80%, no condensation)
Storage temperature(humidity) range
–10 to 60°C (RH 20 to 80%, no condensation)
* IP Code is a standard which classifies and rates the degree of protection provided against the intrusion of solid objects and
water. This may not be applicable depending on the kind of liquid.
Optional Accessories
26
575-303
12.7mm
«M
«M
±1 count
1.6N or less
1.8N or less
2N or less
ABSOLUTE electrostatic capacitance type linear encoder
Unlimited (not applicable to scanning measurement)
Digimatic output
Approx. 190g
’MM¬CARBIDETIPPED¬FIXING¬SCREW¬-¬0™
Contact point
Standard contact point No.901312
Stem dia.
ø8mm
Bearing type
Slide bearing
Dust/water resistance
Equivalent to IP66 (only gage head)
Output cable length
2m (directly extended from the main unit)
Operating temperature (humidity) range
0 to 40°C (RH 20 to 80%, no condensation)
Storage temperature(humidity) range
–10 to 60°C (RH 20 to 80%, no condensation)
* IP Code is a standard which classifies and rates the degree of protection provided against the intrusion of solid objects and
water. This may not be applicable depending on the kind of liquid.
146.1
66.2
Metric
Order No.
Measuring range
Resolution
Measuring accuracy (20°C)
Quantizing error
Measuring Contact point upwards
Contact point horizontal
force
Contact point downwards
Position detection method
Response speed
Output
Mass
Rubber boot
G-14
7.6
ø10.9
Linear Gage LGF – High Resolution,
Standard Dimensions, Robust
Series 542 — Resolution: 0.1 µm
Connector
s¬«M¬RESOLUTION¬TYPE¬OF¬RELIABLE¬,'&¬SERIES¬
gage.
s¬%XCELLENT¬PROTECTION¬AGAINST¬DUST¬AND¬
splashing water (IP66) on the factory floor.
30
82.7
20.4
542-181
542-182
Unit: mm
SPECIFICATIONS
Unit: mm
DIMENSIONS
82.7
542-182
542-181
20.4
12.3
Rubber boot
(24.2)
G-15
22
6.5
93.6
Clamp nut
02ADB692
M18×1
0
15-0.015
M14×0.5
Attachment thread
for thrust stem
(208.3)
8.6
Thrust stem
02ADN371
0
ø18 -0.018
26 or longer
(stroke)
Rubber boot
75.7
6.9 (129.5)
M9.5×0.5
Attachment thread
0
for thrust stem ø8-0.009
14
6
34
114.7
Cable length, 2m
21
(13.8)
61.7
30.7
61.5
34
Cable length, 2m
Thrust stem
02ADB681
0
ø9.5 -0.015
Clamp nut
02ADB682
M9.5×0.5
30
20.6
0.6 20
(screw top height)
46.9
15.4
0.6 14.8
(screw top height)
20.4
30
10.6 or longer
(stroke)
EH-101P
EH-102P
17.3
542-075A
542-071A
*1: When the spindle speed exceeds 400mm/s, an alarm signal will be output. Also, if using a Mitutoyo counter, an error message
will be displayed. If using counters made by other companies, please consult your local Mitutoyo office. Note that over-speed
error may occur depending on the impact amount when releasing the contact point freely.
*2: IP Code is a standard which classifies and rates the degree of protection provided against the intrusion of solid objects and
water. This may not be applicable depending on the kind of liquid.
82.7
Applicable Counters
542-182
25mm (1")
«M¬v
,¬«M¬,ARBITRARY¬MEASURING¬LENGTH¬MM
±1 count
1.0N or less
4.0N or less
1.1N or less
4.3N or less
1.2N or less
4.6N or less
Photoelectric linear encoder
400mm/s
90° phase difference, differential squarewave (RS-422A equivalent)
Output signal
Minimum edge-to-edge interval, 200ns
Output signal pitch
«M
Mass
Approx. 310g
Approx. 350g
Dust/water resistance*2
Equivalent to IP66 (only gage head)
Stylus
’MM¬CARBIDETIPPED¬FIXING¬SCREW¬-¬0™¬STANDARD¬CONTACT¬POINT¬No.901312
Stem dia.
ø8
ø15
Bearing type
Linear ball bearing
Output cable length
2m (directly extended from the main unit)
Connector
Plug: RM12BPE-6PH (HIROSE), Compatible receptacle: RM12BRD-6S (HIROSE)
Operating temperature (humidity) range
0 to 40°C (RH 20 to 80%, no condensation)
Storage temperature(humidity) range
–10 to 60°C (RH 20 to 80%, no condensation)
Standard Accessories
Wrench for contact point: No.538610
Wrench for contact point: No.210187
12
s Rubber boot (spare)
For 10mm range models: No.238772
For 25mm range models: No.962504
For 50mm range models: No.962505
s Thrust stem set
For 10mm range models: No.02ADB680
Thrust stem: No.02ADB681
Clamp nut: No.02ADB682
For 25mm range models: No.02ADN370
Thrust stem: No.02ADN371
Clamp nut: No.02ADB692
* External dimensions are described in the dimensional
drawing of the product.
* Thrust stem set is a combination of thrust stem and a
clamp nut. A special spanner is required for tightening.
If using multiple gages, a thrust stem set for each gage
and one special spanner are required.
s Wrench
For 10mm range models: No.02ADB683
For 25mm range models: No.02ADB693
s Extension cable (5m): 902434
s Extension cable (10m): 902433
s Extension cable (20m): 902432
s Air drive unit
For 10mm range models: No.02ADE230
For 25mm range models: No.02ADE250
For 50mm range models: No.02ADE270
* Required air pressure: 0.2 to 0.4MPa
* Spindle extends when air is supplied.
542-181
10mm (.4")
Order No.
Measuring range
Resolution
Measuring accuracy (20°C)
Quantizing error
Contact point upwards
Measuring Contact point horizontal
force
Contact point downwards
Position detection method
Response speed*1
Dimensions with a thrust stem installed
45.9 5
14.5
9.5
4
Optional Accessories
Dimensions with a thrust stem installed
4.5
84.1
18.5
9
5
RM12BPE-6PH (HIROSE)
13.8
Linear Gage LGB2 – High Resolution,
Slim, with Clamp Nut
Series 542 — Resolution: 0.1µm
s¬3LIM¬TYPE¬HIGHPRECISION¬LINEAR¬GAGE¬WITH¬
RESOLUTION¬OF¬«M¬)T¬IS¬AN¬OPTIMAL¬CHOICE¬
as a built-in type sensor.
s¬(IGH¬PRECISION¬LINEAR¬BALL¬BEARINGS¬ARE¬USED¬
in the spindle guide for extremely smooth
movement and exceptional durability.
542-246
SPECIFICATIONS
Order No.
542-246
Measuring range
5mm(.2")
Resolution
«M¬v
Measuring accuracy (20°C)
«M
Contact point upwards
Approx. 0.55 or less
Measuring Contact point horizontal
Approx. 0.6N or less
force
Contact point downwards
Approx. 0.65 or less
Output signal
90° phase difference, differential square wave (RS-422A equivalent)
Position detection method
Photoelectric linear encoder
Response speed
380mm/s
Mass
160g
Dust/water resistance*
Equivalent to IP54 (only gage head)
Contact point
Carbide ball (M2.5x0.45)
Steel ball (4-48UNF)
Stem dia.
ø9.5mm
Bearing type
Linear ball bearing
Output cable length
2m
Connector
Plug: RM12BPE-6PH (HIROSE), Compatible receptacle: RM12BRD-6S (HIROSE)
Operating temperature (humidity) range
10 to 30°C (RH 20 to 80%, no condensation)
Standard Accessories
Wrench for contact point: No.538610 Wrench for contact point: No.538610, Stem bushing
*1: IP Code is a standard which classifies and rates the degree of protection provided against the intrusion of solid objects and
water. This may not be applicable depending on the kind of liquid.
DIMENSIONS
Unit: mm
20.4
30
(HIROSE)
RM12BPE-6PH
75
25.115.9 6.3
4.9 (thread) L
82.7
ø9
18
ø9
Connecting cable (2m)
0
ø9.5 -0.009
ø14
Clamp nut
(Parts No.200365)
Rubber boot
L=11.5~13.0
G-16
Optional Accessories
s Rubber boot: No.238773 (spare)
s Extension cable (5m): 902434
s Extension cable (10m): 902433
s Extension cable (20m): 902432
Applicable Counters
542-075A
542-071A
EH-101P
EH-102P
Laser Hologage LGH – High Resolution
Series 542 — Resolution: 0.1µm
Connector
20.4
30
82.7
RM12BPE-6PH (HIROSE)
Unit: mm
Optional Accessories
s Laser Hologage stand: No.971750
s Stem fixture for fixing to top surface: No.971751
s Stem fixture for fixing to bottom surface: No.971752
s Spindle lifting cable: No.971753
s Rubber boot: No.238772 (spare)
Extension cable (5m): 902434
Extension cable (10m): 902433
Extension cable (20m): 902432
s¬4HE¬-ITUTOYO¬,ASER¬(OLOGAGE¬IS¬A¬HIGHEND¬ s¬4HE¬DESIGN¬IS¬HIGHLY¬RESISTANT¬TO¬UNFAVORABLE¬
digital gaging system that employs laser
environmental conditions such as air movement
beam interference to make highly accurate
and atmospheric pressure changes.
and repeatable measurements.
s¬,OW¬MEASURING¬FORCE¬MODELS¬ARE¬AVAILABLE¬
s¬4HE¬COMPACT¬GAGE¬HEAD¬REDUCES¬THE¬COSTS¬
(LGH-1010C) for easily deformed precision
required for assembling the laser scale unit
molded workpieces.
for each device. The head can also contribute s¬4HE¬SPINDLE¬GUIDE¬USES¬HIGH¬PRECISION¬
to downsizing the entire system. The master
linear ball bearings for extremely smooth
gage is the best tool available for measuring
movement and exceptional durability.
tools or for a length measurement sensor
of the control unit, as well as for measuring
high-precision components.
s¬(IGH¬PRECISION¬MEASUREMENT¬IN¬HIGH¬
RESOLUTION¬OF¬«M
542-711-1
Applicable Counters
DIMENSIONS
Unit: mm
45.4
Connector
for lifting cable
85
This system uses a low-power invisible laser beam (780nm) which
corresponds to a CLASS 1 (invisible radiation) of IEC60825-1 for
measurement. The CLASS 1 laser warning label as shown below is
attached to the main unit.
Order No.
542-711-1
542-712-1
Measuring range
10mm (.4")
Resolution
«M¬v
Measuring accuracy (20°C)
«M
Repeatability (2)
«M
Retrace error
«M
Contact point upwards
Approx. 0.35N or less
Approx. 0.1N
Measuring
Contact point horizontal
Approx. 0.45N or less
—
force
Contact point downwards
Approx. 0.55N or less
—
Output signal
«M¬PITCH¬ª¬PHASE¬SQUARE¬WAVE
Position detection method
Laser hologram length measuring sensor
Response speed
250mm/s
Mass
200g (cables excluded)
Dust/water resistance
—
Stylus
’MM¬CARBIDETIPPED¬FIXING¬SCREW¬-¬0¬X¬¬STANDARD¬CONTACT¬POINT¬No.901312
Stem dia.
ø15mm
Bearing type
Linear ball bearing
Output cable length
2m
Connector
Plug: RM12BPE-6PH (HIROSE), Compatible receptacle: RM12BRD-6S (HIROSE)
Operating temperature (humidity) range
10 to 30°C (RH 30 to 70%, no condensation)
–10 to 50°C (RH 30 to 70%, no condensation)
Storage temperature(humidity) range The temperature and humidity
range for storage after unpacking is as same as that of operation.
Standard Accessories
Wrench for contact point: No.538610
0
ø15h6 -0.011
(Stem dia.)
25
Laser Beam Safety Precautions
SPECIFICATIONS
10 (measuring range)
EH-101P
EH-102P
148.3 (0.1µm type)
542-075A
542-071A
Rubber boot
18
40
(0.1µm type)
10
Carbide, R1.5 contact point
20
G-17
Laser Hologage LGH – High Resolution,
High Accuracy
Optional Accessories
Series 542 — Resolution: 0.01µm
s¬%XCELLENT¬MEASURING¬STABILITY
The design is also highly resistant to
unfavorable environmental conditions such
as air movement and atmospheric pressure
changes.
s¬,OW¬MEASURING¬FORCE¬MODELS¬ARE¬ALSO¬
available.
Low measuring force models are available for
easily deformed precision workpieces.
s¬(IGHRELIABILITY¬AND¬EXCELLENT¬DURABILITY
High precision linear ball bearings are used
in the spindle guide for extremely smooth
movement and exceptional durability.
s¬«M¬RESOLUTION¬,'(¬IS¬FOR¬USE¬WITH¬
counter EH-102S.
DIMENSIONS
Unit: mm
45.4
Connector
for lifting cable
146 (0.01µm type)
10 (measuring range)
25
85
s¬4HE¬-ITUTOYO¬,ASER¬(OLOGAGE¬IS¬A¬HIGHEND¬
digital gaging system that employs laser
beam interference to make highly accurate
and repeatable measurements.
s¬4HE¬COMPACT¬GAGE¬HEAD¬REDUCES¬THE¬COSTS¬
required for assembling the laser scale unit
for each device. The head can also contribute
to downsizing the entire system. The master
gage is the best tool available for measuring
tools or for a length measurement sensor
of the control unit, as well as for measuring
high-precision components.
s¬(IGH¬RESOLUTION¬AND¬HIGH¬ACCURACY
Highly accurate measurement due to
an ultra-high resolution of 0.00001mm
«M¬WHICH¬IS¬CLOSE¬TO¬THE¬PERFORMANCE¬
of laser interferometers.
s Laser Hologage stand: No.971750
s Stem fixture for fixing to top surface: No.971751
s Stem fixture for fixing to bottom surface: No.971752
s Spindle lifting cable: No.971753
s Rubber boot: No.238772 (spare)
0
ø15h6 -0.011
(Stem dia.)
Rubber boot
18
40
(0.01µm type)
R5 carbide contact point
10
20
EH-102S
LGH-110
144
144
SPECIFICATIONS
542-925A
542-927A
542-926A
542-928A
Set
of
1-axis
Gage
Head
Set
of
2-axis
Gage
Head
Set
of
1-axis
Gage
Head
Set
of
2-axis Gage Head
Configuration
and Display Unit
and Display Unit
and Display Unit
and Display Unit
Measuring range
10mm
Resolution
«M¬¬MICROINCH
Measuring accuracy (20°C)
«M
1
Repeatability (2 )
«M
Retrace error
«M
138 0.1N
Contact point upwards
Approx. 0.35N or less
Approx.
Measuring
RS LINK
Contact
point
horizontal
Approx.
0.45N
or
less
— INPUT
force
B
A
Contact point downwards
Approx. 0.55N or less
—
OUT
Code No.
542-***
Model
Serial No. EH-12P
000001
Stylus
’MM¬CARBIDETIPPED¬lXING¬SCREW¬-¬0™¬STANDARD¬CONTACT¬POINT¬.O
MADE IN JAPAN
DC IN
RS-232C
I/O
Output cable length
2m
2341
Display range
±999.99999mm
DC12-24V
700mA
Minimum reading
«M
Operating temperature (humidity) range
10 to 30°C (RH 30 to 70%, no condensation)
–10 to 50°C (RH 30 to 70%, no condensation) The temperature138
and humidity range for
Storage temperature (humidity) range
storage
B INPUTA
RS LINK
after unpacking is the same as that for operation.
OUT
Code No.
542-***
Wrench for contact point: No.538610 Model
Serial No. EH-12P
000001
Standard Accessories
AC adapter:
No.02ADN460
MADE IN JAPAN
144
144
DC IN
AC cable (USA): No.02ZAA010*
RS-232C
I/O
2341
Mass (Gage Head + Display Unit)
1400g
72
Code No.
(3.1)
(Approx.10º)
11.2
138
RS LINK
INPUT
A
68
Code No.
Model
Serial No.
OUT
542-***
EH-12S
000001
B
MADE IN JAPAN
DC IN
RS-232C
I/O
2
3
1
4
DC12-24V
700mA
156.7
68
148.2
137
DC12-24V
700mA
72
*1: Indication accuracy applies when used with counters.
Laser Beam Safety Precautions
138
INPUT
A
DC IN
RS LINK
G-18
A
11.2
DC IN
DC12-24V
700mA
INPUT
A
IN
Code No.
Model
Serial No.
542-***
EH-12S
000001
MADE IN JAPAN
RS-232C
OUT
B
138
68
B
OUT
Code No.
542-***
Model
Serial No. EH-12P
000001
MADE IN JAPAN
RS-232C
68
RS LINK
DC IN
27
INPUT
68
(3.1)
B
OUT
Code No.
542-***
Model
Serial No. EH-12Z
000001
MADE IN JAPAN
RS-232C
I/O
138
21
34
(Approx.10º)
RS LINK
5.1
138
This system uses a low-power invisible laser beam (780nm) which
corresponds to a CLASS 1 (invisible radiation) of IEC60825-1 for
measurement. The CLASS 1 laser warning label as shown below is
attached to the main unit.
68
IN
137
AC adapter
EH Counter – Multi-function Type
Series 542 — Versatile, Multi-function Displays for all Linear Gage
Formats
s¬Two types are available for this model: a 1-axis
s¬!¬MULTIPOINT¬MAX¬¬POINTS¬MEASURING¬
display and a 2-axis display, which enables addition
system can easily be configured with the builtor subtraction calculations between two gages.
in RS Link networking function. Refer to "Quick
s¬-ULTIFUNCTIONAL¬COUNTER¬EQUIPPED¬WITH¬ZERO
Guide to Precision Measuring Instruments" on
setting, presetting, tolerance judgment.
page G-32 for details of the RS link.
s¬23#¬AND¬53"¬ARE¬EQUIPPED¬AS¬STANDARD¬¬ s¬%MPLOYS¬$).¬SIZE¬XMM¬AND¬MOUNT
Data transfer to a PC is possible. (*USB is
on-panel configuration to facilitate system
supported only by Mitutoyo SENSORPAK.)
integration.
Optional Accessories
s I/O output connector (with cover): No.02ADB440
SPECIFICATIONS
542-075A
542-071A
LGE, LGF, LGK, LGB, LGM, LG, LGH (not compatible with
LGH-110, reference point, or sine wave models)
1
1 axis
Number of gage inputs
Number of axes to be displayed
Quantizing error
Maximum input frequency
542-073A
542-074A
542-072A
sine wave output / Linear
LGF with reference point mark LGBscale
LGD,
LGS, ID, SD
sine wave output
2
2 axes
±1 count
2.5MHz (2-phase square wave)
1MHz (2-phase sine wave)
—
0.01mm (±9999.99mm) / .0005" (±99.9995")
0.001mm (±999.999mm) / .00005" (±9.99995")
Automatic setting by gage
0.0001mm (±99.9999mm) / .000005" (±.999995") [Parameter set]
—
¬¬«M
Sign plus 8 digits (Green LED)
LED display (3 steps: Amber, Green, Red/ 5 steps: Amber, Amber flashing, Green, Red flashing, Red)
RS-232C/USB/parameter selection via digimatic (only DP-1VR, digimatic mini-processor can be connected)
(USB used only with SENSORPAK.)
Selection by parameter from 3-step, 5-step, or digit BCD
Total tolerance judgment output (when tolerance function is enabled)
Analog output (1V-4V)
Normal operation signal (NOM): open-collector
Display BANK switching, peak mode, presetting, display hold, hold per axis:
open-collector or no-voltage contact signal (with/without contact point)
Supplied AC adapter, or 12 - 24V DC
8.4W (max. 700mA)
Ensure at least 1A is available per unit.
0 to 40°C (RH 20 to 80%, no condensation)
–10 to 50°C (RH 20 to 80%, no condensation)
¬7¬™¬(¬™¬$¬MM
AC adapter: No.02ADN460 /
AC cable (USA): No.02ZAA010*,
Differential square-wave
Differential sine-wave
Digimatic code output
Approx. 760g
Approx. 800g
Approx. 800g
Approx. 900g
Approx. 800g
Resolution
Display
Tolerance judgment display
Interface
Input/output
Control output
Control input
Power supply voltage
Rating
Power consumption
Operating temperature (humidity) range
Storage temperature(humidity) range
External dimensions
AC adapter / AC cable
(standard accessory)
Applicable input
Mass
DIMENSIONS
156.7
148.2
137
144
Indicates AC
adapter
installation
138
RS LINK
72
IN
Code No.
Model
Serial No.
DC IN
Code No.
Model
Serial No.
MADE IN JAPAN
Kawasaki, Japan
RS-232C
I/O
2
3
27
DC12-24V
700mA
542-075
542-071
138
RS LINK
DC IN
1
4
DC12-24V
700mA
137
A
OUT
*******
*******
******
1
4
5.1
(Approx 10°)
(3.1)
IN
I/O
2
3
Unit: mm
INPUT
B
MADE IN JAPAN
Kawasaki, Japan
OUT
RS-232C
11.2
138
RS LINK
*******
*******
******
68
Applicable gage head
68
Order No.
138
B
INPUT
RS LINK
A
138
RS LINK
INPUT
A
RS-232C
I/O
2
3
DC IN
1
4
Code No.
Model
Serial No.
OUT
IN
*******
*******
******
MADE IN JAPAN
B
Kawasaki, Japan
RS-232C
I/O
2
3
INPUT
542-074
G-19
A
OUT
542-***
EH-12S
000001
B
68
IN
Code No.
Model
Serial No.
MADE IN JAPAN
RS-232C
I/O
2
3
1
4
DC IN
Code No.
Model
Serial No.
*******
*******
******
MADE IN JAPAN
Kawasaki, Japan
I/O
DC IN
1
4
DC12-24V
700mA
138
RS LINK
OUT
RS-232C
2
3
1
4
DC12-24V
700mA
542-073
DC IN
DC12-24V
700mA
542-072
68
Kawasaki, Japan
68
IN
OUT
*******
*******
******
MADE IN JAPAN
68
IN
Code No.
Model
Serial No.
EC Counter – Single-function Type
Series 542 — Simple Display for LGD, LGS, or other Digimatic Gages,
Go/NG Judgment and Output
s¬0RODUCES¬STEPSTEP¬¬KINDS¬OF¬TOLERANCE¬
output and BCD output.
s¬%MPLOYS¬$).¬SIZE¬™MM¬AND¬MOUNT
on-panel configuration to facilitate system
integration.
542-007
SPECIFICATIONS
Order No.
Applicable head/input
Number of gage inputs
Resolution
Display
Tolerance judgment display
Tolerance judgment
External output output
(switching type)
Data output
Control input
Power supply voltage
Rating
Power consumption
542-007A
LGD, LGS, ID, SD, Digimatic code (SPC)
1
0.01mm (±9999.99) / .0005" (±99.9995") / .001" (±999.999")
0.001mm (±9999.999) / .00005" (±9.99995") / .0001" (±99.999")
[automatic setting by gage]
Sign plus 6 digits (Green LED)
LED display (3 steps: Amber, Green, Red)
–NG, OK, +NG (open-collector)
Digimatic output
External PRESET, external HOLD
Supplied AC adapter, or 9 - 12V DC
4.8W (max. 400mA)
Ensure at least 1A is available per unit.
Operation: 0 - 40°C / Storage: –10 to 50°C
¬7¬™¬¬(¬™¬¬$¬MM
AC adapter: No.06AEG302JA
220g
Operation/storage temperature range
External dimensions
Standard Accessories
Mass
DIMENSIONS
48
44.4
Unit: mm
96
542-007
EC-101D
000001
44.4
Code No.
Model
Serial No.
6.6
91.4
G-20
67
(8)
Function
s Preset
s Tolerance judgment (3/5-step, 3 kinds)
s¬:ERO
Optional Accessories
s Connecting cable for digimatic mini-processor:
No.936937 (1m), No.965014 (2m)
s DC plug PJ-2: No.214938
s I/O cable (2m): No.C162-155
EG Counter – Single-function Type
Function
Series 542 — Simple Display, Multi-Step Go/NG Judgment and Output,
BCD Output, Open Collector
Optional Accessories
s¬0RODUCES¬STEPSTEP¬¬KINDS¬OF¬TOLERANCE¬ s¬$YNAMIC¬MEASUREMENT¬POSSIBLE¬WITH¬
output and limit value output independently
simplified analog output.
for each of 7 channels.
s¬%MPLOYS¬$).¬SIZE¬™MM¬AND¬MOUNT
s¬#OMES¬WITH¬SERIAL¬"#$¬OUTPUT¬CAPABILITY¬FOR¬
on-panel configuration to facilitate system
connection to a programmable controller or
integration.
personal computer, etc.
542-015
542-017
SPECIFICATIONS
Order No. (counter only)
Package No. (counter w/AC adapter)
Applicable gage head
Number of gage inputs
Quantizing error
Maximum input frequency
542-016
542-015
542-017
64PKA131
64PKA133
LGE, LGF, LGK, LGB, LGM, LG, LGH
(Not compatible with LGH110, LGF with reference point mark
reference point or sine wave
(LGF-Z)
models)
1
±1 count
1.25MHz, response speed depends on gage specification.
542-016
64PKA132
LGD, LGS, ID, SD
—
0.01mm (±9999.99mm) / .0005"
0.01mm (±9999.99mm) / .0005" (±99.9995") / .001" (±999.999") (±99.9995")
/ .001" (±999.999")
0.005mm (±9999.995mm) / .00005" (±9.99995") / .0001" (±99.999")
0.001mm (±999.999mm) /
0.001mm (±999.999mm) / .00005" (±9.99995") / .0001"(±99.999") .00005"
(±9.99995")
/.0001"
0.0005mm (±99.9995mm) / .000005" (±.999995") / .00001" (±9.99999")
(±99.999")
0.0001mm (±99.9999mm) / .000005" (±.999995") /.00001" (±9.99999") [Automatic
setting by gage]
Sign plus 6 digits (Green LED)
LED display (3 steps: Amber, Green, Red/ 5 steps: Amber, Amber flashing, Green, Red flashing, Red)
L1 to L5 (Open-collector / Switchover between L1 to L5 and BCD output with parameter)
Normal operation signal (NOM): open-collector
Open-collector / Switchover between 6-digit (positive/negative-true logic) and tolerance judgment
output with parameter
Presetting, display hold, peak value clear, tolerance judgment BANK switch
12 - 24V DC
6W or less (500mA max.)
Ensure at least 1A is available per unit.
0 to 40°C (RH 20 to 80%, no condensation)
–10 to 50°C (RH 20 to 80%, no condensation)
¬7¬™¬¬(¬™¬¬$¬MM
Differential square-wave with
Differential square-wave
Digimatic code (SPC)
origin point mark
1
Approx. 400g
Resolution
Display
Tolerance judgment display
Tolerance judgment output
Control output
BCD output
Control input
Power supply voltage
Rating
Power consumption
Operating temperature range
Storage temperature range
External dimensions
Applicable input
Number of gage inputs
Mass
DIMENSIONS
Unit: mm
44.4
(11)
137
154.6
137
48
48
137
154.6
(11)
(11)
INPUT
6.6
96
96
6.6
44.4
44.4
INPUT
6.6
***-***
*******
-V
48
******
Code No.
Model
Serial No.
96
96
91.4
INPUT
+V
OUTPUT
DC IN 12-24V 500mA
154.6
542-016
EG-101D
91.4
-V
91.4
+V
542-017
EG-101Z
OUTPUT
542-015
EG-101P
DC IN 12-24V 500mA
s I/O output connector (with cover): No.02ADB440
s AC adapter: No.02ADN460*
s AC cable (USA): 02ZAA010*
s Terminal connecting cable: No.02ADD930*
* Included in package Order No.
DC IN 12-24V 500mA
s Preset
s Direction switch
s Tolerance judgment (3/5-step, 3 kinds)
s Peak (max., min., runout) measurement
s Constant number
s Smoothing
s Error display/output
s Key protection
G-21
96
96
EB Counter – Single-function Type
Series 542 — Simple Display, Multi-Step Go/NG Judgment and Output,
BCD Output, Analog Output
s¬0RODUCES¬STEPSTEP¬¬KINDS¬OF¬TOLERANCE¬ s¬$YNAMIC¬MEASUREMENT¬POSSIBLE¬WITH¬
output and limit value output independently
simplified analog output.
for each of 7 channels.
s¬%MPLOYS¬$).¬SIZE¬™MM¬AND¬MOUNT
s¬#OMES¬WITH¬SERIAL¬"#$¬OUTPUT¬CAPABILITY¬FOR¬
on-panel configuration to facilitate system
connection to a programmable controller or
integration.
personal computer, etc.
542-092-2
542-094-2
SPECIFICATIONS
542-092-2
542-094-2
542-093-2
64PKA134
64PKA136
64PKA135
LGF, LGK, LGE, LGB
point mark
(not compatible with reference point LGF with reference
LGS, LGD, LGD-M
(LGF-Z)
or sine wave output type models)
1
±1 count
1.25MHz (2-phase square wave), response speed depends on Response speed depends on gage
gage specification.
specification.
0.01mm (±9999.99mm) / .0005" (±99.9995")
0.01mm (±9999.99mm) / .0005" (±99.9995")
0.005mm (±9999.995mm) / .00005" (±9.99995")
0.005mm (±9999.995mm) / .00005" (±9.99995")
0.001mm (±999.999mm) / .00005" (±9.99995")
0.001mm (±999.999mm) / .00005" (±9.99995")
0.0005mm (±99.9995mm) / .000005" (±.999995")
0.0005mm (±99.9995mm) / .000005" (±.999995")
0.0001mm (±99.9999mm) / .000005" (±.999995")
0.0001mm (±99.9999 mm) / .000005" (±.999995")
Sign plus 6 digits (Green LED)
LED display (3 steps: Amber, Green, Red / 5 steps: Amber, Amber flashing, Green, Red flashing, Red)
L1 to L5, open-collector
Normal operation signal (NOM), open-collector
Presetting, display hold, peak value clear, tolerance judgment BANK switch, open-collector or novoltage contact signal (with/without contact point)
Bit serial format, open-collector
6#OUNTING¬VALUE™¬6OLTAGE¬RESOLUTION¬M6M6¬&ULLSCALE¬¬TO¬6
¬s¬Connecting to the external switch box (No.02ADF180) makes it easy to enter tolerance limits and preset values.
Note) This function is not available when the gage is connected to DP-1VR, Digimatic Mini-Processor.
¬s¬It can only be connected to DP-1VR Digimatic Mini-Processor (No.264-504-5A).
¬s¬Number of tolerance steps can be expanded by assembling EB-D counters.
12 - 24V DC
6W or less (50mA max.)
Ensure at least 1A is available per unit.
0 to 40°C (RH 20 to 80%, no condensation)/ –10 to 50°C (RH 20 to 80%, no condensation
7™(™$MM
Differential square-wave with
Differential square-wave
Digimatic code (SPC)
origin point mark
Approx. 400g
Approx. 400g
Approx. 400g
Order No. (counter only)
Package No. (counter w/AC Adapter)
Applicable gage head
Number of gage inputs
Quantizing error
Maximum input frequency
Resolution
Display
Tolerance judgment display
Tolerance judgment output
Input/ Control output
output
Control input
Serial BCD
Analog output
Interface
Rating
542-093-2
Digimatic input/output
Power supply voltage
Power consumption
Operating temperature range
External dimensions
Applicable input
Mass
DIMENSIONS
44.4
******
(11)
(11)
INPUT
・DO NOT REMOVE
THIS COVER
・DO NOT REMOVE
THIS COVER
WARNING:警告
154.6
MAX
TIR
6.6
137
6.6
137
154.6
WARNING:警告
6.6
WARNING:警告
BANK
UNIT
96
96
BANK
EB-□
MIN
UNIT
＋/−
MAX
TIR
Fn
MODE
L7
BANK
L1
P.SET
BANK
G-22
Fn
MODE
P.SET
MAX
UNIT
TIR
EB-□
MIN
＋/ −
48
L1
96
96
EB-□
MIN
＋ /−
L7
48
48
・DO NOT REMOVE
THIS COVER
96
96
BANK
91.4
(11)
-V
DC IN 12-24V 500mA
154.6
542-093-2
EB-11D
44.4
+V
OUTPUT
44.4
91.4
542-094-2
EB-11Z
91.4
137
542-092-2
EB-11P
Unit: mm
L7
L1
BANK
Fn
MODE
P.SET
Function
s Preset
s Tolerance judgment output (3/5-step, 7 kinds)
s Limit value output (2 kinds independently for each of
the 7 channels)
s Peak (max., min., runout) measurement
s Diverse data output
(Serial BCD, Simplified analog, Digimatic)
Optional Accessories
s I/O output connector (with cover): No.02ADB440
s AC adapter: No.02ADN460*
s AC cable (USA): 02ZAA010*
s Terminal connecting cable: No.02ADD930*
* Included in package Order No.
The tolerance values or preset values can be easily input.
No.02ADF180 (with 2m cable)
EV Counter – Multi-function, Multiple
Input Type
Series 542 — Processor (Optional Display), Multi-function/output
s¬5P¬TO¬SIX¬GAGES¬CAN¬BE¬CONNECTED¬TO¬ONE¬
unit, extendable up to 10 units (60 gages
at maximum) using the RS Link function* to
facilitate the configuration of a multi-point
measurement system.
* Refer to "Quick Guide to Precision Measuring
Instruments" on page G-32 for details of the RS link.
542-063
542-067
SPECIFICATIONS
Function
s External Control (Zero-set, Preset etc.)
s Direction switch
s Error display
s Tolerance judgment output
s Diverse data output
(RS-232C, BCD, Segment)
s Peak measurement
Maximum value, minimum value, runout, and differential
measurement between two gages
Addition, averaging, maximum value, minimum value,
and maximum width
Optional Accessories
s D-EV External display unit: No.02ADD400
s SPC cable (0.5m): No.02ADD950
s SPC cable (1m): No.936937
s SPC cable (2m): No.965014
s AC adapter: No.02ADN460*
s AC cable (USA): 02ZAA010*
s Terminal connecting cable: No.02ADD930*
* Included in package Order No.
s¬!¬RANGE¬OF¬OUTPUT¬MODES¬TO¬CHOOSE¬FROM¬
I/O output for tolerance judgment and
segment output, BCD data output and
RS-232C output are available.
s¬/THER¬THAN¬NORMAL¬MEASUREMENT¬PEAK¬
measurement or differential measurement
between gages are available.
Order No.
Pkg No.(counter w/AC adapter)
542-064
542-063
64PKA137
LGE, LGF, LGK, LGB, LGM, LG
542-067
64PKA139
542-064
64PKA138
LGF with reference point mark
(LGF-Z)
LGD, LGS
Applicable gage head
not compatible with reference point mark, sine
WAVE¬OUTPUT¬TYPE¬OR¬«M¬RESOLUTION¬MODELS
Number of input channels
6
1.25MHz (2-phase square wave), 1.25MHz (2-phase square wave),
response speed depends on gage response speed depends on gage Response speed depends on
specification.
specification.
gage specification.
Max. counting speed: 5MHz
Max. counting speed: 5MHz
±1 count
«M¬¢MM¬¬¬¢
«M¬¢MM¬¬¬¢ «M¬¢MM¬¬¬¢
«M¬¢MM¬¬¬¢
«M¬¢MM¬¬¬¢ Depends on gage specification.
«M¬¢MM¬¬¬¢*1 «M¬¢MM¬¬¬¢
[Parameter set]
[Parameter set]
Maximum input frequency
Quantizing error
Resolution
LED display
Error message
External display
Number of input switches
Function of input switches
Tolerance judgment
output
BCD output
Input/
output
8 digits for parameter display (displays settings), 1 for error display
Overspeed, gage error etc.
Dedicated external display unit D-EV (optional) can be connected.
4
Measurement mode switching, parameter setting
1 to 6 channels (L1, L2, L3), open-collector
Parallel BCD output (positive/negative-true logic), open-collector
Segment output
Function to set on only the terminals corresponding to the counting values, open-collector
Control output
Normal operation signal (NOM), open-collector
Control input
RS-232C
Interface
RS link
Output channel designation (segment, in the BCD mode), presetting, peak value clear, range
changeover (at segment output), holding counting value
open-collector or no-voltage contact signal (with/without contact point)
Measurement data output and control input
EIA RS-232C-compatible
Use cross cables for home position, DTE (terminal definition).
Max. connecting unit: 10 (6 when using EF counter)
Connecting cable length: Max. 10m (sum of link cable length)
Data transfer time: 1sec./60ch (when transmission rate is 19200bps)
Power supply
12 - 24V DC, terminal block (M3 screw)
voltage
Power
8.4W or less (700mA max.)
consumption
Ensure at least 1A is available per unit.
Operating temperature
0 to 40°C (RH 20 to 80%, no condensation)
(humidity) range
Storage temperature
–10 to 50°C (RH 20 to 80%, no condensation)
(humidity) range
External dimensions
¬7¬™¬¬(¬™¬$¬MM
Mass
Approx. 910g
Approx. 910g
Approx. 830g
Standard Accessories
&IXING¬FOOT¬¬CONNECTING¬BRACKET¬¬FIXING¬SCREW¬-™¬
Applicable input
Differential square-wave
Digimatic code (SPC)
*1: Available when using D-EV.
¬$%6¬IS¬REQUIRED¬WHEN¬SELECTING¬«M¬RESOLUTION
Rating
G-23
EV Counter System Configuration
Series 542 — Processor (Optional Display), Multi-function/output
System Configuration
A counter system performs output and display for connected Mitutoyo linear gages.
D-EV
Display
Unit
Tolerance judgment output/BCD
output
Segment output/RS-232C output
Programmable controller
(third party product)
Linear Gages
EV
Counter
RS-232C output
PC
(third party product)
Linear Gages
EH Counter
RS LINK
IN
64
F
OUT
E
Unit: mm
Err.
5
LOAD 8 7 MODE 6
INPUT
D
RS-232C
4
3 SEL.
C
2 1 DATA
B
A
72
4
DIMENSIONS
+V -V
IO/BCD
6.5
Code No.***-***
Model EV-16P
DC12-24V
700mA
6
4
Code No.***-***
5
161
16
139
5
16
11
12
6.5
4
136
144
4
5
RS LINK
5
OUT
Err.
LOAD 8 7 MODE 6
E
INPUT
D
4
3
SEL.
2 1
C
DATA
B
A
72
F
5
16
M4×8, pan head screw (8 pcs., standard accessories)
Connecting bracket (4 pcs., standard accessories)
IN
161
139
16
4.5
6
4
72
64
4
4
4.5
136
144
4
+V
IO/BCD
Code No.***-***
Model EV-16D
6.5
-V
DC12-24V
700mA
6
Serial No. ******
4.5
RS-232C
4
136
144
4
5
16
161
5
139
16
Fixing foot (4 pcs., standard accessories)
G-24
D-EV Display Unit for EV Counter
Function
s External Control (Zero-set, Preset etc.)
s Direction switch
s Error display
s Tolerance judgment output
s Data output
(RS-232C, BCD, Segment)
s Peak measurement
Maximum value, minimum value, runout, and differential
measurement between two gages
Addition, averaging, maximum value, minimum value,
and maximum width
s¬$ISPLAY¬UNIT¬FOR¬THE¬%6¬COUNTER
s¬!LLOWS¬SETUP¬OF¬%6¬COUNTER¬WITHOUT¬A¬
personal computer or other equipment.
s¬!BLE¬TO¬DISPLAY¬EACH¬GAGE¬MEASUREMENT¬
value and GO/NG judgment result, total GO/
NG judgment result for all gages, setting
details, and errors.
Optional Accessories
02ADD400
SPECIFICATIONS
02ADD400
1 EV counter per unit
Sign plus 6 digits (8 digits internal to EV counter)
Channel display (also for judgment result display): 3 (3-color LED)
LED display
Measurement mode display (current data, maximum value, minimum value, runout): 2
Status display: 1 (2 colors)
Operation switches
4
Channel switching, measurement mode switching (current data, maximum value,
Function of operation switch
minimum value, runout), parameter setting, presetting, tolerance setting
Input/output
RS Link connectors: 1 each for IN, OUT
Error message
Overspeed, gage error etc.
Power supply
Terminal block (M3 screw), 12 - 24V DC, 200mA
Operating temperature (humidity) range
0 to 40°C (RH 20 to 80%, no condensation)
Storage temperature(humidity) range
–10 to 50°C (RH 20 to 80%, no condensation)
External dimensions
7™(™$MM
Order No.
Number of connections
Number of digits
DIMENSIONS
Unit: mm
GAGE
Code No. 02ADD400
Model
EV-I
Serial No. 000001
TIR
MIN
+NG
GO
-NG
DISP
Fn
MODE
96
44.4
MAX
UNIT
48
s SPC cable (0.5m): No.02ADD950*1
s SPC cable (1mm): No.936937*1
s SPC cable (2m): No.965014*1
s AC adapter: No.02ADN460
s AC cable (USA): 02ZAA010*2
s Terminal connecting cable: 02ADD930*2
*1: Required when connecting with EV-16P/D/Z.
*2: Required when using AC adapter.
Note: AC adapters may not be needed if using power
from EV counter to power the D-EV.
DC12-24V
200mA
MADE IN JAPAN
IN
RS LINK
OUT
P.SET
6.6
67
400
DD
02-IA 1
.
No EV0000
0
de
Co del o.
T
N
Morial N
OU
JAPA
Se
E IN
K
LIN
RS
MAD
IN
G-25
(11)
4V
12-2
DC 0mA
20 -V
+V
91.4
+V
-V
Sensorpak Software
Dynamically Displays Positions, Tolerances, and Calculations,
and Acquires Basic Data from EH, EV Counters and Litematics
s¬4HIS¬SOFTWARE¬FACILITATES¬LOADING¬MEASUREMENT¬ s¬¬CHANNELS¬MAX¬OF¬MEASUREMENT¬DATA¬
data onto a personal computer from a linear
can be processed.
gage counter with RS-232C output (EH, EV), s¬!RITHMETICAL¬CALCULATIONS¬AND¬MAXIMUM¬
with USB output (EH), or from a Litematic
width calculations can be performed
display (VL).
using the measurement data.
s¬%XPORTING¬MEASUREMENT¬DATA¬INTO¬-3
Excel format is supported.
s¬2EAL¬TIME¬GRAPHICAL¬DISPLAY¬BY¬MEANS¬OF¬
bar-graph or meter is provided.
s¬!NY¬GAGE¬THAT¬CAN¬BE¬CONNECTED¬TO¬
an EH or EV counter can be used in
Sensorpak.
Measurement screen
Meter screen
Chart screen
SPECIFICATIONS
Order No.
02NGB030
(Software only)
02NGB040
(Software plus I/O cable)
Display type: Counter, bar graph, meter, chart (capable of simultaneous display)
Tolerance judgment result: Color display (green/red)
Connectable gages: max. 60 gages
Calculation items: Sum, difference, total, average, maximum, minimum, range (maximum–minimum),
Calculation functions
calculation with a constant
Connectable gages: Max. 30 calculation functions (between two gages)
Total tolerance
GO/NG judgment (by specifying gages to be used for total tolerance judgment)
judgment
GO/NG signal output with optional I/O cable
Trigger function: by means of key, timer or external TRG (with optional I/O cable)
Input function
Data input frequency: Max. 9999 times (with 60 gages connected) to 60000 times (with 6 gages
connected)
Output function
Direct output to EXCEL spreadsheet, CSV file output (compatible with MeasureLink)
Connectable items
Various Mitutoyo counters (those compatible with RS Link)
Recommendation: PC/AT compatible machine, CPU: Pentium4 2GHz or higher, Memory: 256MB or more
System Environments
Disk: 100MB or more
OS: Windows XP,7(32 bit)
Display function
Currently supported languages: English, German, French, Spanish
User’s manual: English
G-26
Litematic – Low Force Measurement
Optional Stand for VL-50S-B
Unit: mm
No.957460
ø50
Series 318 — Low Force, High-resolution, Motorized
measurement of easily-deformed parts
Litematic head
Column
Hex socket set screw
(4-M4×0.7)
Bracket
365
270
157
Height adjustment nut
15
80
Base
48
56
250
80
Clamp screw
300
Optional Accessories
s Foot switch: No.937179T
s Dedicated stand: No.957460*4
s SPC cable (1m): No.936937*5
s SPC cable (2m): No.965014*5
s Weight set: No.02AZE375*6
s Recommended contact point:
Shell type
Carbide-tipped spherical contact point, ø7.5
Carbide-tipped spherical contact point, ø10.5
Carbide-tipped needle contact point, ø0.45
*4: Only available for VL-50S models
*5: Refer to page G-32 for details of the RS link.
*6: Not applicable to VL-50-100-B, VL-50S-100-B.
Measurement Examples
Glass dimensional measurement
s¬4HE¬,ITEMATIC¬IS¬DESIGNED¬FOR¬MEASURING¬EASILYDEFORMED¬
workpieces and high-precision parts, with extra-low
measuring force of 0.01N.
s¬.¬AND¬.¬TYPES¬ARE¬CAPABLE¬OF¬MEASURING¬AT¬A¬CERTAIN¬
measuring force by using a Litematic feature, while the 0.01N
type is suitable for measuring delicate workpieces.
*1: 0.15N, 1N types are factory-installed option.
s¬4HE¬MOTORDRIVEN¬SPINDLE¬MOVES¬UPDOWN¬AND¬STOPS¬
when the contact point touches the workpiece. Then the
maximum, minimum values, and runout value are measured
under a constant force.
s¬(IGH¬RESOLUTION¬OF¬«M¬AND¬WIDE¬MEASURING¬RANGE¬OF¬MM
s¬-EASURING¬SYSTEM¬6,"¬INTEGRATED¬DISPLAY¬TYPE¬AND¬
VL-50S-B, a separate display type, are available.
s¬4HE¬MEASURING¬TABLE¬SUPPLIED¬WITH¬6,"¬IS¬CERAMIC¬
corrosion-free for easier maintenance and storage.
s¬4HE¬SPINDLE¬IS¬MADE¬OF¬LOW¬THERMAL¬EXPANSION¬MATERIAL
318-226A
SPECIFICATIONS
Order No.
Model
Measuring range
Resolution
Display unit
Detection method
Stroke
Indication accuracy
(20°C)*1
Accuracy guaranteed
temperature*2
Repeatability*1
Measuring force*1
Feed Measurement
speed Fast feed
Standard contact point
Measuring table
Input
Output
Power supply
Rating Power
consumption
Thin sheet metal thickness
318-221A
318-221A
VL-50-B
318-222A
VL-50-15-B
318-223A
318-226A
318-227A
VL-50-100-B
VL-50S-B
VL-50S-15-B
0 to 50mm (0-2")
«M¬
8 digits/14mm (.6") character height (without signs)
Reflection type linear encoder
51.5mm (.2") (when using a standard contact point)
318-228A
VL-50S-100-B
,«M¬¬,ARBITRARY¬MEASURING¬LENGTH¬MM
20 ± 1°C
«M
0.15N*3
1N*3
0.01N
0.15N*3
Approx. 2mm/s (.08"/s) or 4mm/s (.16"/s) (changeable by parameter)
Approx. 8mm/s (.3"/s)
’MM¬CARBIDE¬TIPPED¬FIXING¬SCREW¬-¬0™¬No.901312
ø100 (ceramic, grooved, removable)
—
Foot switch input (when optional foot switch is used)
External Control
Digimatic output/RS-232C output (changeable by parameter)
85 - 264V AC (depends on AC adapter)
0.01
1N*3
Max. 12 W (12V, 1A)
AC adapter: No.357651, Power cable/grounding wire: No.02ZAA000,
Standard Accessories
AC cable (USA): No.02ZAA010*
Hex wrench (2 pcs, for fixing contact point and for removing fixing bracket)
*1: Normal measurement using standard contact point.
*2: Or less temperature change. Hot or cold direct air flow should be avoided.
*3: 0.15N, 1N types are factory-installed option.
85
DIMENSIONS
150
Unit: mm
170
103.2
Scale unit
56
29
Display
Operation switch
56
This system uses a low-power invisible laser beam (780nm) which
corresponds to a CLASS 1 (invisible radiation) of IEC60825-1 for
measurement. The CLASS 1 laser warning label as shown below is
attached to the main unit.
Clamp screw
for measuring
table
380.2
Measuring table ø100
Stylus
Laser Beam Safety Precautions
80.2
80 14.8
172
Thickness measurement of non-metallic sheet
Display unit
12.5
82.95
Connecting cable 2m
ø32
(11
°)
4-M4×0.7 depth 10
186.4
202
300
G-27
50.2