52300
Sensing and Actuation in Miniaturized Systems
Topics： Microlens array bio-sensing system
Professor：Cheng-Hsien Liu
Students：Den-Hua Lee
Tsu-Wei Huang
2008/11/11
1
Contents
• Introduction
• The Goal
• Discussion
• Conclusion
2008/11/11
2
Introduction
• Improved light out-coupling in organic light
emitting diodes employing ordered microlens
arrays. 2002
• A novel method to fabricate gapless hexagonal
micro-lens array. 2004
• Microlens array film with full fill factor for
enhancing outcoupling efficiency from OLED
lighting. 2007
2008/11/11
3
Improved light out-coupling in organic
light emitting diodes employing
ordered microlens arrays
S. Möller and S. R. Forrest
J. of Applied Physics, 91 p.3324-3327 (2002)
2008/11/11
4
Mold transfer process
Si mold was etched in
HNO3+CH3COOH+HF
used Si3N4 layer as a mask
2008/11/11
PDMS microlens array fabricated
from the mold
5
Paper printout
Lens sheet covered
Image blurring due to the thickness
2008/11/11
OLED with lens sheet covered
Covered area is brighter
6
A novel method to fabricate gapless
hexagonal micro-lens array
M.C. Chou, C.T. Pan, S.C. Shen, M.-F. Chen,
K.L. Lin, and S.T. Wu
Sensors and Actuators A, 118, p298-306 (2005)
2008/11/11
7
Si
Reflow process
of AZ4620 thick PR for
fabricating half-spherical column
2008/11/11
Ni as seed layer
Electroplate Ni-Co mold
CMP
Hot embossing PMMA
8
90%
95%
45%
100%
Different shape with different fill factor
2008/11/11
Distribution reflowing to form
gapless hexagonal lens 9
Sequence of Ni-Co electroplating
process
2008/11/11
Different gapless lens form by
different distributions
10
Laser passes through hot-embossed PMMA-based gapless hexagonal
micro-lens.
2008/11/11
11
Microlens array film with full fill factor
for enhancing outcoupling efficiency
from OLED lighting
Hyouk Kwon, Youngjoo Yee, Chi-Hwan Jeong1, HyoJin Nam, Ki-Won Park, Gun-Woo Lee, and Jong-Uk
Bu
uTAS proceeding, 2EK5P, p1091-1094 (2007)
2008/11/11
12
Micro Lens Array provide brightness increasing
Higher fill factor, higher efficiency
2008/11/11
13
Trench structure keep lens’ shape closing to half-spherical
Conformal coating process decrease
the height of lens
Outcoupling efficiency
according to the sag ratio
Applying trench to keep higher sag
height
2008/11/11
14
MLA is made by UV stamping on transparent PET film
2008/11/11
15
31.3% improvement
2008/11/11
16
OLED with MLA looked brighter
2008/11/11
17