4.5 Effective energy loss function of silver derived from reflected electron energy loss spectra Z. Zhang a) , Z. Ding a) , H. Li a) , K. Tőkési, D. Varga, and J. Tóth The inelastic excitations of silver are studied both experimentally and theoretically. The effective energy loss function of silver was derived from reflected electron energy loss spectra (REELS). The full width at half maximum of the elastic peak was in the 0.4-0.6 eV region using the ESA-31 home built spectrometer based on a 180◦ hemispherical analyser [1] with 0.5 % energy resolution but with different retardation. The electron beam was produced by LEG 62 VG Microtech electron gun with tungsten filament. Prior to electron spectroscopic analysis, in-situ cleaning of the sample surface was performed using 2 keV energy Ar+ ion sputtering. The effective energy loss functions (EELF) have been derived from these experiments in Hefei, China. Inelastic scattering cross sections obtained by the Tougaard’s deconvolution method [2] is similar to the extended Landau approach, but the latter is more sophisticated. Therefore in our numerical simulation the extended Landau approach was used. The effective energy loss functions (EELF) have been derived from differential inverse inelastic mean free path as described in ref [3]. It has been revealed that the EELF is very close to the theoretical surface energy loss function in the lower energy loss region but gradually approaches the theoretical bulk energy loss function in the higher energy loss region for Ag. The simulated REELS spectra by Monte Carlo method based on the EELFs reproduced the experimental REELS spectra with considerable success. ,QWHQVLW\DUEXQLW Acknowledgements This work was partially supported by the National Natural Science Foundation of China (Grant No.10025420 and 90206009). The work was also supported by the Hungarian Scientific Research Found: OTKA No. T038016, the grant ”Bolyai” from the Hungarian Academy of Sciences, and TéT Grant No. CHN28/2003. (QHUJ\H9 Figure 1. Reflected electron energy loss spectra of 1 keV energy primary electrons. solid line: incidence angle of the primary electron beam is 0◦ and the observation angle is 50◦ , dotted line: incidence angle of the primary electron beam is 50◦ and the observation angle is 0◦ . a) Structure Research Laboratory and Department of Physics, University of Science and Technology of China, 96 Jinzhai Road, Hefei, Anhui 230026, P.R. China The incidence angle of the primary electron beam were 0◦ and 50◦ while the angle of analysed beam were measured at 50◦ and 0◦ with respect to the surface normal of the sample, respectively. During measurements the vacuum was better than 2x10−9 mbar. Fig 1. shows the typical measured electron spectra. [1] L. Kövér, D. Varga, I. Cserny, J. Tóth, and K. Tőkési, Surf. Interface Anal. 19, (1992) 9. [2] S. Tougaard, J. Kraaer, Phys. Rev. B43, 1651 (1991). [3] Z. Zhang, T. Koshikawa, T. Iyasu, R. Shimizu, and K. Goto Surf. Interface Anal. 35, 403 (2003). 42
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