Micro-Bulk Gas Purifiers
Solutions that meet your needs
Service that exceeds your expectations
Specialty Gas
Industrial Gas
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[email protected]
Advanced Research Manufacturing
Colorado Springs, CO USA
Micro-Bulk Purifiers
Micro-Bulk purifiers typically offer a moderate flow rate serving a lab or production work cell through high purity, permanently installed plumbing to
each point-of-use. This brochure outlines the features/benefits/performance of ARM’s Micro-Bulk purifiers.
ARM Inc. purifiers are categorized into 3 groups. The primary distinction is based on flow rate of the gas being purified. The following is offered as a
general rule:
Category
Point-of-Use
Micro-Bulk
Bulk
Flow Rate
0.1-100 slpm
100-1200 slpm
60-5000 nm3/hr
Point-of-Use and Bulk Purifiers are described in their own brochures.
Vessels Only Many gas/impurity combinations can be effectively purified with an ambient temperature purifier. In these applications it can be very
cost effective to simply have an ambient temperature purifier upstream of the use point.
Suitable vessel size is based on the anticipated flow rate of the gas being purified, input impurity load and desired lifetime between regeneration or replacement. In some cases it is desirable to oversize the vessel to enhance purity or lifetime performance. The chart at right lists nominal flow rates at 150
psi line pressures to achieve specified impurity removal to <1ppb for a nominal 1 year service life. Max flow rates listed are based on filtration option specified, FP=0.003µm, CR=0.1µm.
Vessel Size
Nominal flow
for 1 year life
Maximum
flow FP
Maximum
flow CR
975
7 slpm
60 slpm
100 slpm
977
10 slpm
120 slpm
200 slpm
05K
43 slpm
200 slpm
400 slpm
07K
135 slpm
500 slpm
700 slpm
08K
170 slpm
650 slpm
850 slpm
50K
225 slpm
1000 slpm
1500 slpm
Dimensions
Model Units
975
977
05K
A
07K
08K
B
50K
VCRTM
A
B
mm
202.0
76.0
inch
7.94
3.00
mm
254.0
76.0
inch
10.00
3.00
mm
462.0
76.0
inch
18.20
3.00
mm
440.0
102.0
inch
17.30
4.00
mm
864.0
102.0
inch
34.00
4.00
mm
701.0
152.0
inch
27.60
6.00
Flow slpm
Nominal Max FP Max CR
7.0
60
100
10
120
200
43
200
400
135
500
700
170
650
850
225
1000
1500
Nominal flow rates are based on 1 yr service life
Max flow rates are at 150 psig gas pressure
Weights range from 1 to 10 lbs based on size and fill material
Dimensions
Fill Class Designations for the fill material required to remove specific impurities from specific gas streams are listed in the chart below. This is not a
comprehensive list of every possible impurity that can be removed from every possible gas. If the gas to be purified, or impurities are not listed, contact
ARM, Inc. for assistance.
C
Ar, He, Kr, Ne, Xe, N2, & H2
CO, CO2, H2, H2O, NMHC, O2
Removal
Efficiency 1
<1 ppb
CA
Ar, He, Kr, Ne, Xe, N2, & H2
CO, CO2, H2, H2O, NMHC, O2
<1 ppb
F
C2F6, C3F8, C4F8, CClF3, CCl2F2, CCl4, CF4, CHClF2, CHF3, & CH3F
CO, CO2, H2, H2O, NMHC, O2
<1 ppb
No
OX
CDA & O2
CO2, H2O, NMHC, Amines, NOx
<1 ppb
Yes
Class
Gases Purified
Impurities removed
Regen
Capable
Yes
Yes
T
BCl3, BF3, CL2, ClF3, F2, HBr, HCl, HF, NF3, SF4, WF6
H2O
<1 ppb
No
W
Ar, He, Kr, Ne, Xe, H2, & N2
H2O
<1 ppb
Yes
Y
AsH3, B2H6, CH4, D.C.S.(SiH2Cl2), Ge2H6, GeH4, H2Se, NH3, PH3, SF6,
SiH2, SiH4, Si2H6, DMHZ, & Hydride/Carrier Gas mix
CO2, H2O, O2
<1 ppb
Yes
1. < 1 ppb removal efficiency is based on 5N5 (99.9995%) inlet gas purity at nominal flow and rated pressure.
www.arminc.com 719-538-5959
[email protected]
Advanced Research Manufacturing
Colorado Springs, CO USA
Inlet/Outlet Connections
The standard inlet/outlet connections are 1/2” VCRTM face seal fittings. Other connection types are optional, contact ARM for quote.
Filtration
All purifiers include an integral filter. Two standard options are available CR-0.1 micron and a FP-0.003 micron, these filter particles
down to the size specified to less than 1 particle per cubic foot of gas.
Specification Common to All
Open Frames
Max Operating Pressure
200 PSIG (17.24 BAR)
1
Max Operating Temperature
400°C
Nominal Flow Rate2
0.3 slpm to 20.0 slpm
Maximum Flow Rate2
4.5 slpm to 300 slpm
Pressure Drop2
<1 ATM typical
Filtration
0.1 µm standard, optional 0.003 µm
Wetted Surfaces
Electro-polished, <10Ra, 316L stainless steel
Typical Inlet Gas Purity
99.999%4
Outlet Purity
<1 ppb
Input Power
100VAC, 120VAC, 230VAC, 50/60Hz, 600W (max)
Inlet/Outlet Fittings
VCRTM standard, optional SwagelokTM or tube stub
3
Operating Air Supply
1.
2.
3.
4.
60-90 psig CDA
Applicable to heated vessels in Nova and Pro-Panel Series only
Dependent on vessel size.
Only applicable with air operated valve option.
50 ppm maximum
With NEMA Enclosures
Features
Heated operation
Vessel Only
Pro-Panel
Series
No
Yes
Optional inlet/outlet/bypass valves
Yes
Yes
Optional pneumatic inlet/outlet valves
N/A
Yes
Power status indication
N/A
Yes
Ready (for operation) indication
N/A
Yes
Thermocouple fault indication
N/A
Yes
Process indication
N/A
Yes
Alarm indication
N/A
Yes
Valves open indication
No
Yes
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Relief
Inlet
Outlet
MOV
AOV
Inlet
MOV Sample
AOV
MOV
Outlet
MOV Sample
AOV
MOV
PX
MOV
PX
MOV
MFM
Particle
Filter
Heated
Getter
Vessel
Gases Purified
N2, N2/Noble gas mix
H2
Hydrides
Hydrogen
Removal
Vessel
Purifier Cabinet
Impurities Removed to <1.0 ppb
CH4, CO, CO2, H2, H2O, O2
CO, CO2, H2O, N2, O2
CO2 , H2O, O2
Optional Components
Relief
Regen
Outlet Inlet
Inlet
Inlet
MOV Sample
AOV
MOV
Outlet
Outlet
MOV Sample
MOV
AOV
AOV
MOV
PX
PX
MOV
MFM
AOV
AOV
AOV
Gases Purified
O2, CDA
N2
X
Impurities Removed to <1.0 ppb
CH4, CO, CO2, H2, H2O, THC
CH4, CO, CO2, H2, H2O, O2, THC
Adsorber
Vessels
(heated
regen)
AOV
Heated
Getter
Vessel
Purifier Cabinet
Relief
Regen
Outlet Inlet
Inlet
MOV
AOV
MOV
AOV
Inlet
Sample
AOV
AOV
AOV
Optional Components
Outlet
Outlet
MOV Sample
MOV
AOV
PX
Particle
Filter
AOV
MOV
PX
MOV
MOV
MFM
AOV
AOV
AOV
AOV
Adsorber
Vessels
(heated regen)
Particle
Filter
AOV
AOV
Purifier Cabinet
AOV
Gases Purified
Ar, He, Kr, Ne, Xe, N2, H2,
CDA, CO2, N2O, O2
Ar, CO, H2, He, Kr, N2, Ne, Xe
Impurities Removed to <1.0 ppb
CO, CO2, H2, H2O, NMHC, O2
CO2, H2O, NMHC, Amines, NOx
H2O
AOV
Optional Components
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Advanced Research Manufacturing
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Standard Features/Options
Hardware
Instrumentation & Controls
Standard
Optional
√
Inlet pressure transducer
Standard
316L stainless steel tubing, fittings, components
√
Wetted surfaces electro-polished
√
Steel and aluminum enclosures, powder coated
√
Optional
√
Manually operated bypass valves
√
Outlet pressure transducer
Pneumatic/electric operated valves
√
Captured overpressure exhaust
√
Industry standard inlet/outlet connections
√
Emergency shutdown
√
Gas-to-gas heat exchangers (as required)
√
PLC control of automatic functions
√
Air cooled heat exchangers (as required)
√
Microprocessor control of automatic functions
√
Water cooled heat exchanges
√
Remote Internet access for control, upgrades
√
Flow meter/flow totalizer
√
√
Touchscreen HMI
Overpressure relief protection
√
Remote Internet access for troubleshooting
√
√
Particle filtration
Specifications Common to All
Specification
Maximum allowable working pressure
Inlet/outlet tube diameters
Flow rate
Range
Specification
Range
150 to 250 PSI
Pressure drop
1 ATM or less
1/2” to 1”
Outlet purity
Down to < 1PPB
100 to 1200 slpm
Input power
100 to 240 VAC 50/60 Hz
Control & Instrumentation
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Advanced Research Manufacturing
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Enclosures
SF Enclosure
MF Enclosure
LF Enclosure
NEMA Enclosures
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Advanced Research Manufacturing
Colorado Springs, CO USA
Pro-Panel Series, A Different Approach….
….. from initial inquiry to commissioning
www.arminc.com 719-538-5959
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Advanced Research Manufacturing
Colorado Springs, CO USA
How to begin….. Its as easy as a phone call. We will discuss your specifics, gas, flow, pressure, duty cycle, etc. Below is a document located on our
website that will assist you in collecting the information we will ask about in order to define the type of technology, level of automation, and any recommended options to meet your particular gas purification requirements.
Each Pro-Panel Series purifier built is assigned a model number identifying the basics about the purifier. As an example, working with the customer, it
is determined that the system will be purifying Argon gas at an 85 Nm3/hr. When quoted, the model number would be P-50KC-30-Ar. P indicates
an Pro-Panel Series purifier, 50KC indicates the vessel size and media used, 30 indicates the rated flow, and Ar indicates Argon gas is being purified.
This is not the only way we identify a particular purifier, each system is serialized with documentation tying that particular unit back to engineering
drawings, test records, control software, anything that may be unique to that particular purifier, which will assists us in after sales support need it be
required.
and note that the gases and impurities, hardware descriptions, and options identified in this brochure are only
the most common configurations. If you don’t find your gas/
impurities or other specifications it does not mean we won’t have a
solution. We have the knowledge, experience and willingness to
pursue the technology that will work for your application.
Phone: 719-538-5959
E-mail: [email protected]
For assistance with other gases, customization or
other high purity requirements contact ARM,
Inc., or your local rep/distributor.
Purifier Parameters PDF Form
(http://www.arminc.com/assets/arm_psg_form07.pdf)
www.arminc.com 719-538-5959
[email protected]
Advanced Research Manufacturing
Colorado Springs, CO USA