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OnWafer Data Set
Weir Temporal Response analysis
Origin: PEB_March12, 2003.cvs
Terrence E. Zavecz
[email protected]
Weir Temporal Analysis Overview
 Sensor Time-Response Analysis of On-Wafer Data
 Analysis of Process Phases
 Thermal Response by sensor



Temperatue
Maximum Temperature
Phase Error
 Thermal Response over Time



Phase Error as a function of time
Slope
Slope vs Time
 Zero Slope = Constant temperature phase
 Sensor positions
 Cumulative Energy into the process
 Contour Maps

Of Temperatkure, Energy, Cumulative Energy and Rise/Fall Slope
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First Analysis Screen
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Thermal Range Across Wafer
 Five transitions occur

Marked by yellow squares
 Sections of the wafer begin
dropping faster than others at
~ 70 seconds time
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Phase Response
3
4
Thresholds:
Phase: 10%
Temperature: 96 deg


Phase change transition threshold should be set lower than 10% to detect the “flat”
response of phase 3
Phase 3 has a 2-second variaiton in start time with 3.59 degrees variation
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Thermal Range by Sensor

Phase 5 interrupted so phase 1 could be
observed
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Phase 2 & 3 response magnified
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Phase Error
 Phase Error=

(Tsensor – Tmean)
 Tsensor = temperature
of the sensor
 Tmean = Mean
temperature of the
phase
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Phase #3 error @ max temp
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Phase error as function of time
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Slope as a function of time
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Slope vs Temperature
 Zero slope
implies a
constant
temperature
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Sensor Locations
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Cumulative Energy by sensor
 Activation temperature set to 96 deg.
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Phase 3 Cumulative Energy
 Phase 3
(constant
temperature)
results only.
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Temperature Mean, Rise, Phase Length, Start Value
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Temp @ end of phase
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Maximum/Minimum Slope
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Average slopes for constant temperature
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Energy for 96 degree Threshold
 Changed threshold to 96 degrees
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Energy transfer
 Energy transfer into the substrate with a 96 degree threshold
 Blowup on right shows variation at the maximum temperature
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Temperature plots across cycle
 Matrix format with
selected time-slices
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Plot matrix of temperature
 Thermal grid lines
added
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