Responding to advanced needs for semiconductor
manufacturing process control
High Purity Chemical Liquid System
Component General Catalog
WET FINE SYSTEM
CB-031A 2
CKD's high purity chemical liquid system components are
the answer to advanced needs for semiconductor manufacturing
process control.
Class 100 cleanroom
Integrated in-house production
Material procurement
Advanced production technology provided by the industry's leader
Molding
CKD boasts the industry's top results and superior reliability in process
control system components. We provide high-quality products from
advanced super- cleanrooms with integrated production covering all
steps from design, and assembly to packaging.
Machining
Part inspection
Diverse product groups and custom orders
A wide range of system components is available, including chemical
liquid valves, manual valves, regulators, units, and sensors.
Customized orders are welcomed.
Ultrasonic cleaning
DI water cleaning
Assorted fitting variations
Six types of fittings by four different manufacturers are available as
integrated components for use with various equipment and applications.
Fitting system
Super type Pillar fitting
Super 300 type Pillar fitting
J Series/P Series
Manufacturer
NIPPON PILLAR
PACKING
NIPPON PILLAR
PACKING
F-LOCK 20A series fitting
Flowell
F-LOCK 60 series fitting
Flowell
Final lock fitting
KURABO
FLARTEC fitting
Entegris,Inc.
Targeting higher purity
CKD provides a high degree of cleanness and fine
quality by reducing contamination from all angles.
Eco-friendly materials
CKD selects eco-friendly materials by eliminating
polyvinyl chlorides, etc., which generate harmful
gases.
Dry
Clean room
Assembly
Product inspection
Packaging
Shipping
Intro 3
INDEX
Page
Series variation
Intro 5
Precautions
Intro 7
Model No.
AMDZ/AMD0 PFA body
2 port valve
Air-operated valve for
chemical liquids
3 port valve
Manifold
Page
2
AMD0*2 PFA body
6
AMD3*2 PFA body
10
AMD3*2 stainless steel body
16
AMD4*2 PFA body
20
AMD4*2 stainless steel body
24
AMD5*2 PFA body
28
AMD5*2 stainless steel body
32
Sister product AMD2/3/4/5*
58
Bellows valve AMB
66
AMGZ0/AMG00 PFA body
36
AMG*02 PFA body
40
GAMD**2 PTFE body
48
2 port valve AMD3/4/5*2 PFA body
High-pressure
specifications
3 port valve AMG3/4/502 PTFE body
Flow characteristics
Manual valve
2 port valve
Drip prevention valve
Fine regulator
Fine level switch
Other high purity chemical liquid
components
Related components
Guide to CKD Electronics Catalog
56
Manifold 2 port valve GAMD3/4/5*2 PTFE body
70
MMD*02 PFA body
76
MMD*02 stainless steel body
84
Manifold GMMD*02 PTFE body
90
Sister product MMD*0
98
Toggle valve TMD*02
102
Drip prevention valve AMS
108
Integrated air-operated valve for chemical liquid/drip prevention valve AMDS
112
Electronic control drip prevention valve TQAS0
116
PYM stainless steel body
122
PMM10 PTFE body
124
PMM20 PFA body, high corrosion proof type
126
KML70 multi-point setting type, 8-point detection type with display
130
KML60 Multi-point setting type, 4/6-point detection type with internal pressure sensor
134
KML50 High accuracy (±1mm), 1-point detection type
138
Microflow adjustment valve
144
Pilot regulator
146
Dump valve (2-port valve)
148
Dump valve (3-port valve)
150
MN3EO/MN4EO miniature solenoid valve
154
MN4GA/4GB pilot-operated pneumatic 3, 5-port valve block manifold
154
4GA/4GB pilot-operated pneumatic 3, 5-port valve
155
156
Intro 4
Series variation
Air operated valve
Valve types
2 port
AMDZ/0
AMD0*2
New
Appearance, reference page
··· Page 2
Connection (fitting type)
Body material
Orifice diameter or suction rate
Super type Pillar fitting
Super 300 type Pillar fitting
F-LOCK 20 series fitting
F-LOCK 20A series fitting
F-LOCK 60 series fitting
Final lock fitting
FLARTEC fitting
PVC union joint
Rc thread
SUS weld tube
Double barbed joint
PFA/PTFE body
Ø1.6 to Ø4
Ø3 to Ø4
With flow rate
adjustment
Application
2 port
AMD2/3/4/5*··· Page 58
AMD5*2
PFA body type
··· Page 10
PFA body type
··· Page 20
PFA body type
··· Page 28
Stainless steel body type
··· Page 16
Stainless steel body type
··· Page 24
Stainless steel body type
··· Page 32
With flow rate
adjustment
With indicator
For ammonia
For nitric acid
PFA/PTFE body Stainless steel body PFA/PTFE body Stainless steel body PFA/PTFE body Stainless steel body
Ø6.3 to Ø10
Ø8/Ø10
With flow rate
With flow rate
adjustment
adjustment
With indicator
With indicator
With bypass
For ammonia
For nitric acid/
hydrofluoric acid
For high
temperatures
(5 to 160 ˚C)
Coater/developer Chemical supply system
Cleaning system
Sister product
Air operated valve
AMD4*2
··· Page 6
PFA/PTFE body
Option
AMD3*2
Chemical supply system
Cleaning system
Ø14.7 to Ø16
Ø16
Ø20
With flow rate
With flow rate
adjustment
adjustment
With indicator
With indicator
With bypass
For liquid ammonia
For liquid nitric
acid/hydrofluoric acid
For high
temperatures
(5 to 160 ˚C)
Ø20
With flow rate
With flow rate
adjustment
adjustment
With indicator
With indicator
With bypass
For ammonia
For nitric acid/
hydrofluoric acid
Chemical supply system Chemical supply system
Cleaning system
Cleaning system
Peripheral devices
Manual valve
2 port
MMD··· Page 98
Toggle valve
2 port
Regulator
PYM ··· Page 122
PMM10 ··· Page 124
TMD··· Page 102
PMM20 ··· Page 126
AMB··· Page 66
Application: Chemical supply system
Cleaning system
Intro 5
Application: Chemical supply system Application: Chemical supply system
Cleaning system
Cleaning system
Connection: Rc1/8/Rc1/4
(Ø8, Ø10 for PMM20.)
Setting pressure range: 0.02MPa to 0.2MPa
Application: Coater/developer
AMDZ
AMD0
Manual valve
AMGZ/0
Manifold
AMG3/4/502
GAMD3/4/5*2
2 port
Drip prevention valve
Manifold
MMD3/4/502
Integrated air-operated
valve/drip prevention valve
AMS
AMDS
··· Page 90
··· Page 108
··· Page 112
AMD3*2
GMMD3/4/502
AMD0*2
3 port
AMD4*2
PFA body type
··· Page 76
··· Page 40
··· Page 48
Stainless steel body type
··· Page 84
PTFE body
PTFE body
PFA/PTFE body
Stainless steel body
PTFE body
PFA/PTFE body
PFA/PTFE body
Ø1.6 to Ø4
Ø6 to Ø20
Ø6 to Ø20
Ø6.3 to Ø20
Ø8 to Ø20
Ø6 to Ø20
0.04cm3/0.12cm3
0.04cm3/0.12cm3
—
—
GAMD**2
PFA/PTFE body
AMD5*2 AMGZ0 AMG*02
AMG00
··· Page 36
High-pressure
specifications AMD
With flow rate adjustment For ammonia
With indicator
For nitric acid/
For ammonia
hydrofluoric acid
For nitric acid/
hydrofluoric acid
For high temperatures
(5 to 160 ˚C)
For ammonia
Actuator
Material: Aluminum For nitric acid/
hydrofluoric acid
Chemical supply system
Cleaning system
Chemical supply system Coater/developer
Cleaning system
Coater/developer
TQAS ··· Page 116
Sensor: Fine level switch
KML70 ··· Page 130
KML60 ··· Page 134
Detection point
: 4-point/6-point settable
Dump valve
3 port ··· Page 150
Others
Repeatability
: ±1mm
Solenoid
valve
Application: Coater/developer
··· Page 146
KML
Maximum suction rate
: 0.05cm3
Suction time
: 0.2sec to 20sec
··· Page 144
2 port ··· Page 148
KML50 series ··· Page 138
Pilot regulator
Fine
AMS AMDS TQAS regulator
Detection point: 8-point setting
Integrated communication function (RS485)
Microflow adjustment valve
TMD*02
Unit: Automatic drip prevention unit
MMD*0
Other high purity chemical liquid components
GMMD*02
Coater/developer Chemical supply system Chemical supply system
Cleaning system
Cleaning system
Flow
AMB characteristics
MMD*02
—
With flow rate adjustment
With indicator
For ammonia
For nitric acid/
hydrofluoric acid
For high temperatures
(5 to 160 ˚C)
Application: Cleaning system
Intro 6
High purity chemical gas/liquid control systems
Safety Precautions
Always read before starting use
When designing and manufacturing a device using CKD products, the manufacturer is obligated to check
that device safety mechanism, pneumatic control circuit, or water control circuit and the system operated by
electrical control that controls the devices is secured.
It is important to select, use, handle, and maintain the product appropriately to ensure that the CKD product is used safely.
Observe warnings and precautions to ensure device safety.
Check that device safety is ensured, and manufacture a safe device.
WARNING
1
This product is designed and manufactured as a general industrial machine part.
It must be handled by an operator having sufficient knowledge and experience in handling.
2
Use this product in accordance of specifications.
3
Observe corporate standards and regulations, etc., related to the safety of device design and
control, etc.
Contact CKD when using the product outside the unique specifications range, when using it outdoors, and
when using it under the conditions and environment below. Do not attempt to modify or additionally machine
the product.
1 Use for special applications requiring safety including nuclear energy, railroad, aviation, ship, vehicle, medical equipment, equipment, or applications coming into contact with beverage or food, amusement equipment, emergency shutoff circuits, press machine, brake circuits, or for safeguard.
2 Use for applications where life or assets could be adversely affected, and special safety measures are required.
ISO 4414, JIS B 8370 (pneumatic system rules), High Pressure Gas Maintenance Laws Occupational Safety
and Sanitation Laws, and other safety regulations, corporate standards, and regulations.
4
Do not handle, pipe, or remove devices before confirming safety.
5
Observe warnings and cautions on the pages below to prevent accidents.
1 Inspect and service the machine and devices after confirming safety of the entire system related to this
product.
2 Note that there may be hot or charged sections even after operation is stopped.
3 When inspecting or servicing the device, turn off the energy source (air supply or water supply), and turn
off power to the facility. Discharge any compressed air from the system, and pay enough attention to possible water leakage and leakage of electricity.
4 When starting or restarting a machine or device that incorporates pneumatic components, make sure that
the system safety, such as pop-out prevention measures, is secured.
The safety cautions are ranked as "DANGER", "WARNING" and "CAUTION" in this section.
DANGER:
When a dangerous situation may occur if handling is mistaken leading to fatal
or serious injuries, or when there is a high degree of emergency to a warning.
WARNING: When a dangerous situation may occur if handling is mistaken leading to fatal
or serious injuries.
CAUTION:
When a dangerous situation may occur if handling is mistaken leading to minor injuries or physical damage.
Note that some items described as "CAUTION" may lead to serious results depending on the situation.
In any case, important information that must be observed is explained.
Intro 7
High purity chemical gas/liquid control systems
Safety Precautions
Caution
Always read before starting use
CAUTION
Precautions in Export
Some of the products in this catalog are subject to Export Trade Control Ordinances and are indicated on each
page. Be sure to observe laws and regulations when exporting these parts or devices containing these parts.
WARNING
1
2
3
Incorrect device selection and handling results in
product problems and may cause problems in the
user's system. The user is responsible for selecting
and handling devices based on product specifications and compatibility with users' systems. Check
selection and handling before use.
Working fluid
Check the compatibility of component materials,
working fluid, and ambient atmosphere against the
Compatibility checklist on Intro 11 before starting
use. Check or consult with CKD before using fluids
not listed on the checklist and when using new fluids, including different concentrations.The PYM and
PMM Series cannot be used for corrosive fluids.The
PMM10 Series cannot be used for solvents or alcohol.
Fluid temperature
Use fluid within the working fluid temperature range
in specifications.
WARNING
1
Design & Selection
4
Fluid pressure range
Use fluid within the fluid pressure range in catalog
specifications.
5
Ambient environment
Confirm the compatibility of component materials and ambient environment before use.
2 Check that fluids do not contact the product itself.
3 Use the device within the working ambient temperature
range.
1
6
Liquid ring
Provide a relief valve so that no liquid ring circuit is
created.
7
Maintenance space
Secure sufficient space for maintenance and inspection.
8
The Rc screw is piped as explained in (1) For Rc
screws. Leakage may occur from screwed-in sections because of the heat cycle. Under these conditions, select models with an integrated fitting.
Installation & Adjustment
Incorrect installation and piping cause product problems, may cause problems in users' systems, and
may result in death or serious injury. The user is responsible for ensuring that operators read instruction manuals and fully understand precautions on
safety, such as system and fluid features, and compatibility of fluids and devices.
2
If the product has an arrow on it, connect pipes so
that the fluid flows in the direction of the arrow.
3
Lay pipes so that tension, compression, and bending, etc., are not applied to the valve.
4
When using an NC or NO type, release the port on
which operation pressure is not applied into the atmosphere. If direct suction or exhaust from the
valve is not desired due to the ambient atmosphere
or dust scattering, remove the set screw and connect a tube so that suction and exhaust are conducted where problems do not occur.
5
The solenoid valve connected to the actuator must
be chosen according to specifications and applications.
Installation
1
Check for pipe leaks during installation, and confirm
that the product is installed correctly.
Piping
1
Flush the inside of pipes before installing the valve.
Dirt or foreign matter into fluids may prevent the
valve from functioning correctly. If this could occur,
install a filter on the primary side of the valve based
on the circuit in use.
Intro 8
High purity chemical gas/liquid control systems
Safety Precautions
Always read before starting use
CAUTION
1
Installation & Adjustment
Refer to procedures on the right, and prepare the
threading section. Refer to the latest instruction
manual issued by the manufacturer of fittings and
install fittings as instructed. Contact manufacturer of
fittings for a dedicated installation jig which may be
required for the installation . For AMG, GAMD, and
GMMD, the distance between the adjacent fittings
is short, so it may be difficult to connect the fitting
with regular tools. The fitting manufacturer's dedicated installation jig may also be unusuable. Consult
with CKD in this case. (Super 300 type pillar fitting,
final lock fitting)
(1) For Rc screw
Wind PTFE sealing tape three or four times around the
joint complying with the JIS B 0203 piping taper screw.
2 Tighten to the following tightening torque:
1
Port size
Rc1/8
Rc3/8
Rc1/2
Rc3/4
Rc1
PFA fitting
0.5~0.8
1.0~1.5
1.5~2.0
2.0~2.5
2.5~3.5
PVC fitting
2.0~2.5
2.5~3.0
3.0~4.0
(N·m)
(2) Operation port
2
Replace the product with one with the same model
number. Note that even if they look the same, specifications may differ.
WARNING
1
During use & Maintenance
Use the product within the maximum working pressure and range.
CAUTION
1
Tighten at 0.4 to 0.6 N·m-Use a resin fitting for AMD3/4/5
*2, AMG3/4/502 or GAMD3/4/5 *2. To use a metal fitting
with these models, use a reinforcing ring (refer to the
page for each model).
Check the compatibility of component materials,
working fluid, and ambient atmosphere against the
Compatibility checklist on Intro 11 before starting
use. Check or consult with CKD before using fluids
not listed on the checklist and when using new fluids, including different concentrations.
2
When using gas such as N2 or air, valve seat leakage
of up to 1 cm3/min (at pneumatic pressure) could occur.
3
Valve seat leakage could occur if fluid temperature
changes suddenly.
4
Use air or inert gas that has passed through a filter
with 5 m or more filtration for operation air.
5
Handle the product carefully. It is precisely washed
and delivered in a clean package assuming that it
will be installed in a cleanroom.
Intro 9
During use
6
Do not close flow adjustment and bypass adjustment valves too far.
7
With the AMD Series and flow adjuster and the
MMD Series, turn the adjustment knob more than
the specified number of times from the fully closed
state. If not opened this far, the product could vibrate or flow fluctuate, etc., depending on working
conditions. (Refer to pages 70 to 73.) Use the
MMD**2 Series in fully closed or fully opened. This
cannot be used at an intermediate position.
8
With the AMD and AMB Series, water hammering
or vibration could occur depending on fluid pressure
conditions. In most cases, this is removed by adjusting the open/close speed with a speed controller, etc. If the state is not improved, review fluid
pressure and piping conditions.
9
With the PMM and PYM Series, vibration could occur due to conditions such as fluctuations in fluid
pressure, flow or supply pressure, or piping, etc.
Review conditions if vibration occurs.
Caution
CAUTION
During use
10
Do not use valves, etc., for stepping on or place
heavy objects on them.
11
When use has been suspended for a long time,
conduct trial operations before starting.
DANGER
12
A turbulent flow occurs on the secondary side of the
valve.If a device, such as a flow meter, requiring a
laminar fluid flow is installed on the secondary side
of the valve, provide sufficient distance so that the
turbulent flow has no effect.
Maintenance & inspection
1
Read the instruction manual thoroughly and fully
understand contents before starting work.
2
Release operation air and fluid before starting
maintenance.
3
Before replacing a valve, purge thoroughly with
pure water or air so that residual chemicals do not
adversely affect devices or personnel in the
area.The top (cylinder side) of the diaphragm is not
wetted area, but a chemical atmosphere occurs if
gas permeates thin membranes. For safety, observe the following precautions in handling.
4
A chemical atmosphere may remain between the
actuator and diaphragm of a valve used with chemicals. This valve must not be disassembled by the
user.
Contact CKD or a designated dealer when disassembly is required.
5
Conduct the following inspections regularly once or
twice a year to ensure that the valve operates optimally:
1
2
Check for leaks outside the valve.
Check for leaks from fittings.
A slight amount of permeated gas is discharged from the
bleeder hole on the side of the cylinder when the valve
operates, so check that no personnel approaches the
bleeder hole during valve operation. Crystals may form on
and around the bleeder hole.
2 Wear corrosion-resistant gloves when handling valves. Do
not touch valves with bare hands.
1
Intro 10
High purity chemical gas/liquid control systems
Safety Precautions
Always read before starting use
Products and working fluid compatibility checklist
Check the product and working fluid compatibility with conditions for each type.
The product material is indicated as
(usable),
(usable under set conditions),
Model No.
Fluid
(not usable).
AMDZ*, AMD0*,
AMD0/3/4/5*2, MMD3/4/502,
AMGZ0, AMG00, AMS,
AMG3/4/502, GAMD3/4/5*2,
AMDS, TQAS, TMDZ/0
GMMD3/4/502
DI water
Sulfuric acid
Select option "C."
(Excluding AMD0*2.)
Hydrochloric acid
Nitric acid
Hydrofluoric acid
Select option "P."
Select an all-resin actuator.
(Some models require special ordering.)
Select option "P."
(Excluding AMD0*2.)
Phosphoric acid
Select option "P."
(Excluding AMD0*2.)
Ammonium fluoride
Hydrogen peroxide
Ozone water
Consult with CKD.
Consult with CKD.
Sulfuric acid + hydrogen peroxide If the fluid temperature is 100 C or more,
select a PTFE type body (special order product).
Select an all-resin actuator (special order product).
Sulfuric acid + ozone
If the fluid temperature is 100 C or more,
select a PTFE type body (special order product).
Sodium hydroxide
Potassium hydroxide
Aqueous ammonia
Amine-based peeling agent
Select ammonia specifications (special order product).
If the fluid temperature is 80 C or more, the product should be replaced at least once a year.
When using metal piping, select a SUS body models. (Some models require special ordering.)
Acetone
Butyl acetate
Isopropyl alcohol
Thinner
Select option "M."
When using metal piping,
select SUS body models.
(Some models require special ordering.)
Consult with CKD when using TMDZ/O.
Developer
When using metal piping,
select SUS body model.
(Some models require special ordering.)
When using fluorine resin piping,
select option "M."
Provide measures to prevent
ignition from electrostatic discharge.
Air
When using gas, valve seat leakage of up to 1 cm3/min at
N2 gas
Select the standard type for blank fields.
The fluid temperature is compatible at 90 C or less.
Consult with CKD when using other fluids.
Check that fluids do not contact the product.
Intro 11
(pneumatic pressure) could occur.
Caution
AMD2/3/4/5*,
MMD2/3/4*,
Body
AMB
TMD3
PFA·PTFE
SUS
Select option "Y" for high temperature.
Select option "K" for high temperature.
Select option "P" when the fluid
temperature is between 5 and 60 C.
Select option "F" when the fluid
temperature is between 5 and 90 C.
Consult with CKD.
Consult with CKD.
If the fluid temperature is 100 C or more,
select a PTFE type body (special order product).
Select option "M" for AMD.
Select AMD ammonia specifications.
Select AMD.
Select an aluminum actuator
(special order product).
Select option "S" or "E."
When using metal piping,
select SUS body model(special order product).
When using gas, valve seat leakage of up
to 5 cm3/min at (pneumatic pressure) could occur.
: Usable
: Usable under set conditions
: Not usable
Intro 12
AMD0*2
Overview
No harmful polyvinyl
chlorides
Compatible with fluid
temperatures up to 160 ˚C
The standard-specification valve
controls fluids up to 90 ˚C.
(AMD**2, AMG**2, GAMD**2 Series)
Assorted fitting variations
PFA molded body
Assorted fitting variations
PFA molded body with integrated
fitting
The special resin body eliminates
causes of particle formation.
Selectable operation port position
No harmful polyvinyl chlorides
No harmful polyvinyl chlorides
generating toxic chlorine-based
gases are used in actuator material.
(AMDZ/0, AMD**2, AMGZ/0,
AMG*02, GAMD**2 Series)
Fine
AMS AMDS TQAS regulator KML
70
156
TMD*02
Flow characteristics
Electric catalog file list
Flow
Improved corrosion resistance
AMB characteristics MMD*02 GMMD*02 MMD*0
The operation port position is
selectable from four directions.
(AMD**2 Series)
Precautions
Intro 7
2 port valve
AMDZ/AMD0 PFA body
2
AMD0*2 PFA body
6
AMD3*2 PFA body
10
AMD3*2 stainless steel body
16
AMD4*2 PFA body
20
AMD4*2 stainless steel body
24
AMD5*2 PFA body
28
AMD5*2 stainless steel body
32
Sister product AMD2/3/4/5*
58
Bellows valve AMB
66
3 port valve
AMGZ/AMG00 PFA body
36
AMG*02 PTFE body
40
Manifold
GAMD**2 PTFE body
48
Custom order
High-pressure specifications 2, 3 port valve and manifold 56
AMGZ0
High-pressure
AMD5*2 AMG00 AMG*02 GAMD**2 specifications AMD
Features
AMD4*2
Selectable operation
port position
AMD3*2
This compact high-performance airoperated valve for chemical liquids is
available in port sizes from 1/8 inch
to 1 inch for use in semiconductor
manufacturing equipment.
AMDZ
AMD0
AMD
Air-operated valve for chemical liquids
Others
Solenoid
valve
Air-operated valve for chemical liquids
1
1
2
2
3
3
This compact high-performance valve greatly reduces causes of particle
formation with its PFA molded body.
Orifice: Ø1.6 to Ø4
AMDZ / AMD0
Series
Specifications
Descriptions
AMDZ*-*-2
Working fluid
Fluid temperature
AMD0*-*-4
Chemical liquids, pure water, N2 gas, air
˚C
5 to 80
Withstanding pressure MPa
1
Working pressure range (A —> B) MPa
0 to 0.5
Working pressure range (B —> A) MPa
0 to 0.3
Valve seat leakage cm3/min
0 (at, water pressure)
Back pressure
MPa
0 to 0.3
Ambient temperature ˚C
0 to 60
Frequency
30 times/min or less
Installation attitude
Free
Rc1/8
OD Ø3 tube connection
OD 1/8" tube connection
Connection
Orifice
Cv value
Operation Operation pressure MPa
section Operation port
Rc1/8
OD Ø6 tube connection
OD 1/4" tube connection
Ø2
Ø4
0.08 (Note 1, 2)
0.32 (Note 2)
NC/NO 0.3 to 0.5, double acting 0.2 to 0.3
M5
Note 1: The Cv for the PFA body connection Rc 1/8 is 0.12.
Note 2: The Cv of the SUS body is 80% of the Cv for the PFA body connection Rc 1/8.
Note 3: Check the compatibility of the product's configuration materials, working fluid, and ambient atmosphere before use.
Note 4: See page 6 for using this value for acidic fluids.
Note 5: See pages 72 and 73 for flow characteristics.
Internal structure and parts list
1
4
2
Port B
Port A
3
No.
Parts name
Material
1
Actuator assembly
PPS
1
2
Body
PFA
1
3
Mounting plate
SUS
1
4
Diaphragm
PTFE
1
The material differs with the model. Contact CKD for details.
2
Read the precautions on pages 7 to 12 in the introduction before use.
Quantity
1
1
AMDZ23 / AMD023Series
How to order
6
2
D
Body material
E
Model No.
D
Option
B
6
Connection
3US
Rc
1/8
Actuation
3UR
6BUR
Ø2
Ø1.6 Ø1.6
PTFE
PTFE
AMGZ0
High-pressure
AMD5*2 AMG00 AMG*02 GAMD**2 specifications AMD
Ø2
1/8" X 1/16" tube connection
Ø3 X Ø2 tube connection
Ø2
Ø3 X Ø2 tube connection
1/8" X 0.086" tube connection
Ø2
Ø3 X Ø2 tube connection
Orifice
2
Refer to the right
3UF
Super type Pillar
F-LOCK 20 series F-LOCK 60 series
fitting integrated type fitting integrated type fitting integrated type
Symbol Description
A Actuation
1
NC (normally closed)
2
NO (normally open)
3
Double acting
C
6BUS
AMD4*2
A
Orifice
AMD3*2
Connection
B
C
AMD0*2
1
AMDZ
AMDZ
AMD0
How to order
AMDZ Series
Option
Blank ON/OFF only
With flow adjustment (Only NC type)
1
D
E Body material
Blank PFA molded body or PTFE machined body
Stainless steel body
D
PFA
PFA
1
8BUW
C
Model No.
1
4
Flow
AMD0
Orifice
E
Connection
B
6
B
Connection
Actuation
Rc
1/8
Super type Pillar Super 300 type Pillar
fitting J series
fitting integrated type
integrated type
6UP
8BUP
6UF
8BUF
6UR
8BUR
6UK
8BUK
8BUW
Super 300 type Pillar F-LOCK 20 series F-LOCK 60 series Final lock fitting FLARTEC fitting
fitting P series
fitting integrated type fitting integrated type integrated type integrated type
integrated type
Ø4
Ø4
Ø3.5 Ø3.5
Ø4
Ø4
Ø3
E Body material
Blank PFA molded body or PTFE machined body
Stainless steel body
D
Fine
D Option
Blank ON/OFF only
1
With flow adjustment
AMS AMDS TQAS regulator KML
Ø4
TMD*02
Ø4
1/4" X 5/32" tube connection
Ø4
1/4" X 5/32" tube connection
Ø6.35 X Ø4.3 tube connection
Ø4
Ø6 X Ø4 tube connection
Ø6 X Ø4 tube connection
Ø4
1/4" X 5/32" tube connection
1/4" X 5/32" tube connection
Ø4
Ø6 X Ø4 tube connection
Ø6 X Ø4 tube connection
Ø4
8BUJ
1/4" X 5/32" tube connection
Orifice
4
Refer to the right
6UJ
Ø6 X Ø4 tube connection
C
8BUS
1/4" X 5/32" tube connection
Actuation
1
NC (normally closed)
2
NO (normally open)
3
Double acting
6US
Ø6 X Ø4 tube connection
Symbol Description
A
Body material
Option
D
A
AMB characteristics MMD*02 GMMD*02 MMD*0
AMD0 Series
PFA
PFA
PFA
PFA
PFA
PFA
PFA
PTFE
Others
Note on model No. selection
Solenoid
valve
Note 1: See page 6 when selecting an all-resin actuator used with acidic fluids.
Note 2: The actuator soft-shut (diaphragm) model also available reduces foaming and improves drip prevention. Contact CKD for details.
3
1
AMDZ23Series
Dimensions
Rc screw type
22
·AMDZ*-6-2
22
5
Operation port M5 depth 4.5
Port B
28
41
2-Rc1/8
45
(NC type)
11
Port A
Ø2
36
10±0.3
2-M3 depth 4
Fitting integrated type
With flow adjustment
MAX 63
·AMDZ*- *1 -2
Port B
Port A
ØB
(A)
Dimension
A
B
3US
50
2
6BUS
50
2
3UF
40
2
3UR
57
1.6
6BUR
57
1.6
*1 (Connection model No.)
4
Port B
Port A
1
AMD023Series
Dimensions
AMDZ
AMD0
Dimensions
AMD0*2
Rc screw type
30
·AMD0*-6-4
AMD3*2
AMD4*2
AMGZ0
High-pressure
AMD5*2 AMG00 AMG*02 GAMD**2 specifications AMD
Operation port M5 depth 4.5
Port B
51
2-Rc1/8
13
31
Port A
55
(NC type)
Ø4
36
20±0.3
Flow
AMB characteristics MMD*02 GMMD*02 MMD*0
20±0.3
4-M3 depth 4
Fitting integrated type
With flow adjustment
MAX 69
·AMD0*- *1 -4
Port A
Port B
TMD*02
Port B
Port A
AMS AMDS TQAS regulator KML
ØB
(A)
Dimension
Dimension
B
6US
66
4
8BUS
66
4
6UF
64
4
8BUF
64
6UJ
64
4
4
6UR
90
3.5
8BUJ
6UP
64
4
8BUR
92
3.5
68
4
6UK
71
8BUP
4
68
4
8BUK
71
4
8BUW
86
3
Solenoid
valve
A
*1 (Connection model No.)
Others
B
Fine
A
*1 (Connection model No.)
5
Air-operated valve for chemical liquids
1
2
3
Special PPS enables standard types to be used with hydrofluoric acids.
Orifice: Ø3 to Ø4
AMD0 2 Series
Specifications
1
AMD0 23 2-*-4
Descriptions
Working fluid
Fluid temperature
Pure water, chemical liquids, air, N2 gas
˚C
5 to 100 (Note 1)
Withstanding pressure MPa
1
Working pressure range (A —> B) MPa
0 to 0.5
Working pressure range (B —> A) MPa
0 to 0.3
Valve seat leakage cm3/min
0 (at, water pressure)
Back pressure
MPa
0 to 0.3
Ambient temperature ˚C
0 to 60
30 times/min or less
Frequency
Free
Installation attitude
Rc1/8, ODØ6 tube connection (fitting integrated type),
Connection
OD 1/4" tube connection (fitting integrated type)
Orifice
Ø3.5
Cv value
Operation Operation pressure range MPa
section
Operation pressure connection port
Ø4
0.28
0.32
NC/NO 0.35 to 0.5, double acting 0.3 to 0.4 (0.2 to 0.3 for fluid symbol "P")
Rc1/8
Note 1: 5 to 40 ˚C for hydrofluoric acids.
Internal structure and parts list
1
3
Port B
2
Port A
No.
4
Parts name
Material
1
Actuator
PPS
2
Body
PFA
3
Diaphragm
PTFE
4
Mounting plate
PPS
The material differs with the model.
Contact CKD for details.
6
Read the precautions on pages 7 to 12 in the introduction before use.
1
AMD0232Series
How to order
6US
4
1
C
B
Connection
B
NC (normally closed)
2
NO (normally open)
3
Double acting
6
8BUF
6UR 8BUR
6UK
Rc screw Super type Pillar fitting Super 300 type Pillar fitting Super 300 type Pillar fitting F-LOCK 20 series fitting
integrated
integrated type
J series integrated type P series integrated type
integrated type
type
F-LOCK 60 series
fitting integrated type
Final lock fitting FLARTEC fitting
integrated type integrated type
6UP
8BUP
Ø4
Ø3
PFA
PTFE
Body material
PFA: PFA molded body, PTFE: PTFE machined body
0
ON/OFF only
1
With flow adjustment
6
ON/OFF, with indicator
PFA
PFA
PFA
PFA
PFA
PFA
Operation port direction
2
Indicates that fluid flows in
3
1
2
3
4 direction of the black arrow when
1
looking at valve from above.
The white arrow indicates
operation port direction.
AMB characteristics MMD*02 GMMD*02 MMD*0
Fluid symbol
Blank
Standard
For ammonia
P
For nitric acid
Flow
M
Bottom installation type No.
(Orifice indication and hyphen (-) between
AMD0 A 2
AMGZ0
High-pressure
AMD5*2 AMG00 AMG*02 GAMD**2 specifications AMD
1/4" X 5/32" tube connection
1/4" X 5/32" tube connection
Ø3.5
8BUK 8BUW
Ø6 X Ø4 tube connection
1/4" X 5/32" tube connection
Ø4
Ø6 X Ø4 tube connection
Ø6.35 X Ø4.3 tube connection
Ø4
6UF
Ø6 X Ø4 tube connection
1/4" X 5/32" tube connection
Ø6 X Ø4 tube connection
Ø4
Option
4
E
Ø4
8BUJ
1/4" X 5/32" tube connection
D
Ø4
6UJ
Ø6 X Ø4 tube connection
C
1/4" X 5/32" tube connection
Orifice
Symbol Descriptions
8BUS
Ø6 X Ø4 tube connection
Rc1/8
6US
AMD4*2
1
E Fluid
Operation port direction
D
AMD3*2
Actuation
A
Option
Connection Orifice
M
AMD0*2
Model No.
4
AMDZ
AMD0
How to order
AMD0 1 2
B
C
D
C
and
D
are not required.)
E X
TMD*02
Bottom installation
Fine
AMS AMDS TQAS regulator KML
Others
Solenoid
valve
7
1
AMD0232Series
Dimensions
Fluid symbol [Blank]
1
·AMD0 2 2- *1 -4-03
3
Operation port direction
2
44
38
30
4-Ø3.5
4
Port B
Port A
20
1
30
8
56
Port A
6
15
37
Port B
64
Operation port Rc1/8
(NC type)
(B)
(A)
*1 Connection model No. A dimension B dimension
8
*1 Connection model No. A dimension B dimension
6
36
4
6UF
64
4
6US
66
4
8BUF
64
4
8BUS
66
4
6UR
90
3.5
6UJ
64
4
8BUR
92
3.5
8BUJ
64
4
6UK
71
4
6UP
68
4
8BUK
71
4
8BUP
68
4
8BUW
86
3
Flow
AMB characteristics MMD*02 GMMD*02 MMD*0
TMD*02
Fine
AMS AMDS TQAS regulator KML
(MAX66)
19
41
AMGZ0
High-pressure
AMD5*2 AMG00 AMG*02 GAMD**2 specifications AMD
30
60
68
AMD4*2
With indicator
With flow adjustment
AMD3*2
4-M5 depth 10
20±0.3
AMD0*2
20±0.3
AMDZ
AMD0
Port A
Port B
(MAX81)
AMD0232Series
1
Dimensions
Dimensions
Bottom installation type
Operation port Rc1/8
(NC type)
30
Others
Solenoid
valve
9
Air-operated valve for chemical liquids
1
2
3
AMD3 2 Series
Orifice: Ø6.3 to Ø10
Specifications
1
Descriptions
Working fluid
Fluid temperature
1
AMD3 23 2-*-8
AMD3 23 2-*-10
Chemical liquids, pure water (Note 1)
˚C
5 to 90 (5 to 160) (Note 5)
Withstanding pressure MPa
0.9
Working pressure range (A —> B) MPa
0 to 0.3 (Note 3)
Working pressure range (B —> A) MPa
0 to 0.1 (Note 3)
Valve seat leakage cm3/min
0 (at, water pressure)
Back pressure
MPa
0 to 0.1 (Note 3)
Ambient temperature ˚C
0 to 60
Frequency
30 times/min or less
Installation attitude
Connection
Orifice
Free
ODØ10 tube connection (fitting integrated type)
ODØ12 tube connection (fitting integrated type)
OD3/8" tube connection (fitting integrated type)
OD1/2" tube connection (fitting integrated type)
Ø6.3
Cv value
Ø6.4
0.8
Ø7.5
Ø8
Ø9.4
1.25
Ø9.5
Ø10
1.8
Bypass orifice (when bypass is installed)
Ø2.3
Operation
pressure
range
MPa
NC 0.3 to 0.5, NO 0.3 to 0.5 (0.3 to 0.35 for high temperature use), double acting 0.3 to 0.4 (0.2 to 0.25 for high temperature use)
Operation
section Operation pressure connection port
Rc1/8 (Note 2)
Note 1: Check compatibility of the product's configuration materials working fluid, and ambient atmosphere before use.
Note 2: Connect a resin fitting when connecting to the operation port.
(When using a metal fitting, select one with a reinforcement ring.)
Note 3: See page 56 for high-pressure specifications.
Note 4: See pages 70 and 71 for flow characteristics.
Note 5: 5 to 40 ˚C for hydrofluoric acids.
10
Read the precautions on pages 7 to 12 in the introduction before use.
1
AMD3232Series
Internal structure and parts list
AMDZ
AMD0
Internal structure and parts list
AMD0*2
1
AMD3*2
4
2
AMD4*2
Port B
Port A
No.
Parts name
Material
1
Actuator assembly
PPS
Quantity
1
2
Body
PFA
1
3
Mounting plate
PPS
1
4
Diaphragm
PTFE
1
The material differs with the model. Contact CKD for details.
AMGZ0
High-pressure
AMD5*2 AMG00 AMG*02 GAMD**2 specifications AMD
3
Flow
AMB characteristics MMD*02 GMMD*02 MMD*0
TMD*02
Fine
AMS AMDS TQAS regulator KML
Others
Solenoid
valve
11
1
AMD3232Series
How to order
AMD3*2 Series (connection: Ø10, 3/8" tube)
AMD3
1
2
10UA
8
Model No.
1
C
Connection
B
4
Option
Orifice
D
B
Actuation
10BUA
10UR
10BUR 10UK
Super 300 type
F-LOCK 20A series F-LOCK 60 series
Pillar fitting P series fitting integrated type fitting integrated type
integrated type
Final lock fitting
integrated type
Ø7.5
FLARTEC
fitting
integrated type
3/8" X 1/4" tube connection
3/8" X 1/4" tube connection
Ø7.5 Ø6.4
10BUK 10BUW
Ø10 X Ø8 tube connection
Option
Ø8
3/8" X 1/4" tube connection
Ø8
Ø10 X Ø8 tube connection
Ø8
3/8" X 1/4" tube connection
C
10UA
Ø10 X Ø8 tube connection
Ø8
10BUP
3/8" X 1/4" tube connection
Orifice
Symbol Descriptions
10UP
Ø10 X Ø8 tube connection
Double acting
10BUJ
3/8" X 1/4" tube connection
NO (normally open)
3
10UJ
Ø10 X Ø8 tube connection
2
Fluid
Super type Pillar
Super 300 type
fitting integrated type Pillar fitting J series
integrated type
3/8" X 1/4" tube connection
NC (normally closed)
10BUS
Ø10 X Ø8 tube connection
1
E
Operation port direction
Connection
10US
A
Y
Ø6.3
Body material
PFA: PFA molded body, PTFE: PTFE machined body
D
0
ON/OFF only
1
With flow adjustment
PFA
PFA
PFA
PFA
PFA
PTFE
PTFE
PTFE
PTFE
PTFE
PTFE
2
With bypass
3
With flow adjustment and bypass
6
ON/OFF, with indicator
PFA
PFA
PFA
PFA
PFA
PFA
7
With bypass/with indicator
PTFE
PTFE
PTFE
PTFE
PTFE
PTFE
Operation port direction
'Indicates that fluid flows
4
3
in direction of the black
4 arrow when looking at
valve from above.
The white arrow indicates
operation port direction.
1
2
2
3
E
PFA
1
PTFE
(Note 1)
(Note 1)
(Note 1)
(Note 1)
Fluid
Blank Standard
M
For ammonia
P
For nitric acid, for hydrofluoric acid (Note 3)
Y
For high temperature (5 to 160˚C) (Note 2)
E
For high temperature (5 to 160˚C), PTFE machined body (Note 2)
Model No. for type with coated metal section
(Orifice indication and hyphen (-) between C and
AMD3
A 2
B
C
D E
D
are not required.)
Note on model No.
selection
C
Coated
Model No. for type with operation port reinforcement ring
(Hyphen (-) between C and D is not required.)
AMD3
A 2
B
8
C
D E
Orifice
With reinforcement ring
Bottom installation type No.
(Orifice indication and hyphen (-) between
AMD3
A 2
B
C
R
D
E
C
and
D
are not required.)
X
Note 1: The final lock fitting nut and operation air
piping could interfere, so check dimensions
before selecting.
Note 2: The following C options are not available:
2 (with bypass), 3 (with flow adjustment,
bypass), 7 (with bypass/with indicator).
This valve is not compatible with nitric acid,
hydrofluoric acid, or chlorine.
Note 3: C (with coated metal section) is included in
the E Fluid P item.
Bottom installation
Model No. for type with coated metal section + operation port reinforcement ring + bottom installation
(Orifice indication and hyphen (-) between C and D are not required.)
AMD3
12
A 2
B
C
D
E
C
Coated
R
X
Bottom installation
With reinforcement ring
1
AMD3232Series
How to order
AMDZ
AMD0
AMD3*2 Series (connection: Ø12, 1/2" tube)
1
2
12UJ
10
1
Model No.
C
Option
Connection Orifice
D
B
Connection
12UA
15BUA
12UR
15BUR 12UK
15BUK 15BUW
Super 300 type
F-LOCK 20A series F-LOCK 60 series Final lock, fitting FLARTEC
Pillar fitting P series fitting integrated type fitting integrated type integrated type
fitting
integrated type
integrated type
Ø10
1/2" X 3/8" tube connection
1/2" X 3/8" tube connection
Ø9.5
Ø12 X Ø10 tube connection
Ø10
1/2" X 3/8" tube connection
Option (Note 1)
Ø12 X Ø10 tube connection
Ø10
1/2" X 3/8" tube connection
Ø12 X Ø10 tube connection
Ø10
1/2" X 3/8" tube connection
C
Ø10
15BUP
Ø12 X Ø10 tube connection
Orifice
Symbol Descriptions
12UP
Ø9.4
Body material
PFA: PFA molded body, PTFE: PTFE machined body
ON/OFF only
1
With flow adjustment
2
With bypass
3
With flow adjustment and bypass
6
ON/OFF, with indicator
7
With bypass/with indicator
PFA
PFA
PFA
PFA
PFA
PFA
PFA
PFA
PFA
PTFE PFA
PTFE
PFA
PTFE
PFA
PFA
PFA
PFA
PFA
PFA
PTFE PFA
PTFE
PFA
Operation port direction
Indicates that fluid flows
4
3
1
2
1
3
PFA
PFA
PTFE
(Note 1)
in direction of the black
4 arrow when looking at
valve from above.
The white arrow indicates
operation port direction.
Flow
2
E
PFA
AMB characteristics MMD*02 GMMD*02 MMD*0
D
0
(Note 1)
Fluid
Blank Standard
M
For ammonia
P
For nitric acid, for hydrofluoric acid (Note 3)
Y
For high temperature (5 to 160˚C) (Note 2)
E
For high temperature (5 to 160˚C), PTFE machined body (Note 2)
Model No. for type with coated metal section
(Orifice indication and hyphen (-) between C and
A 2
B
C
D
E
are not required.)
Note on model No.
selection
C
Coated
A 2
B
10
C D E
R
Orifice
With reinforcement ring
AMD3
A 2
B
C
D
E
C
and
D
are not required.)
X
Note 2: The following C options are not available:
2 (with bypass), 3 (with flow adjustment,
bypass), 7 (with bypass/with indicator).
This valve is not compatible with nitric acid,
hydrofluoric acid, or chlorine.
Note 3: C (with coated metal section) is
included in the E Fluid P item.
Bottom installation
A 2
B
C
D
E
C
Coated
R
Solenoid
valve
AMD3
Others
Model No. for type with coated metal section + operation port reinforcement ring + bottom installation
(Orifice indication and hyphen (-) between C and D are not required.)
X
Bottom installation
With reinforcement ring
Fine
Bottom installation type No.
(Orifice indication and hyphen (-) between
Note 1: The final lock fitting nut and operation air
piping could interfere, so check dimensions
before selecting.
AMS AMDS TQAS regulator KML
Model No. for type with operation port reinforcement ring
(Hyphen (-) between C and D is not required.)
AMD3
TMD*02
AMD3
D
AMGZ0
High-pressure
AMD5*2 AMG00 AMG*02 GAMD**2 specifications AMD
Super type Pillar
Super 300 type
fitting integrated type Pillar fitting J series
integrated type
1/2" X 3/8" tube connection
Double acting
15BUJ
Ø12 X Ø10 tube connection
NO (normally open)
3
12UJ
1/2" X 3/8" tube connection
2
15BUS
Ø12 X Ø10 tube connection
NC (normally closed)
Fluid
AMD4*2
Actuation
1
E
Operation port direction
12US
A
M
AMD3*2
B
4
AMD0*2
AMD3
13
1
AMD3232Series
Dimensions
Standard type
1
·AMD3 2 2- *1 -8
3
1
·AMD3 2 2- *1 -10
3
4-Ø7
5
36
22
3
36
50
62
Flow path
2
4
1
(Operation port direction)
X
Operation port Rc1/8
(NC type)
Port B
45
75
82
Y
8.5
21
Port A
ØB
(A)
AMD3 (10mm)
*1 (Connection model No.)
AMD3 (12mm)
A
B
A
B
10US
86
8
12US
*1 (Connection model No.)
95
10
10BUS
86
8
15BUS
95
10
10UJ
82
8
12UJ
90
10
10BUJ
82
8
15BUJ
90
10
10UP
86
8
12UP
94
10
10BUP
86
8
15BUP
94
10
10UA
78
8
12UA
86
10
10BUA
78
8
15BUA
86
10
10UR
110
7.5
12UR
110
9.5
10BUR
114
6.4
15BUR
114
9.5
10UK
96
7.5
12UK
102
10
10BUK
96
7.5
15BUK
102
10
10BUW
101
6.3
15BUW
103
9.4
Bottom installation type
22±0.3
22±0.3
4-M6 depth 9
14
1
AMD3232Series
Dimensions
AMDZ
AMD0
Dimensions
AMD0*2
With flow adjustment
With flow adjustment bypass
1
1
·AMD3 2 2-*-*-1
·AMD3 2 2-*-*-3
3
3
AMD3*2
AMD4*2
AMGZ0
High-pressure
AMD5*2 AMG00 AMG*02 GAMD**2 specifications AMD
X
Y
(MAX 111)
Y
(MAX 107)
X
(Refer to the dimensions for the type with bypass
for the other dimensions.)
With bypass
With indicator
AMB characteristics MMD*02 GMMD*02 MMD*0
1
·AMD3 2 2-*-*-2/7
3
1
·AMD3 2 2-*-*-6/7
3
Flow
50
38
(MAX 85)
Y
(With bypass max. 89)
X
50
62
MAX 71
4-Ø7
TMD*02
AMS AMDS TQAS regulator KML
X
49
Fine
21
Port A
8.5
Port B
79
86
Y
Others
Solenoid
valve
15
Stainless steel body air-operated valve for chemical liquids
1
2
3
AMD3 2 Series
Orifice: Ø8/Ø10
Specifications
1
Descriptions
1
AMD3 23 2-8·3BT·6S
Working fluid
AMD3 23 2-10·4BT·8S
Chemical liquids, pure water (Note 1)
Fluid temperature
˚C
Withstanding pressure
MPa
5 to 120
0.9
Working pressure range (A —> B) MPa
0 to 0.3 (Note 2)
Working pressure range (B —> A) MPa
0 to 0.1 (Note 2)
Valve seat leakage cm3/min
0 (at, water pressure)
Back pressure
MPa
Ambient temperature
˚C
0 to 0.1 (Note 2)
0 to 60
Frequency
30 times/min or less
Installation attitude
Free
Rc3/8
1/2" SUS weld tube
Double barbed fitting for 1/2" (Note 3)
Rc1/4
3/8" SUS weld tube
Double barbed fitting for 3/8" (Note 3)
Connection
Ø8
Orifice
Operation Operation pressure range MPa
section Operation pressure connection port
Ø10
NC/NO 0.3 to 0.5, double acting 0.3 to 0.4
Rc1/8
Note 1: Check the compatibility of the product's configuration materials, working fluid, and ambient atmosphere before use.
Note 2: See page 56 for high-pressure specifications.
Note 3: For the double-barbed fitting, fluorine-based lubricant is applied on the sliding surface of the front ferrule and fitting.
Internal structure and parts list
1
3
2
Port B
Port A
No.
Parts name
Material
1
Actuator assembly
PPS
1
2
Body
SUS316L
1
3
Diaphragm
PTFE
1
The material differs with the model. Contact CKD for details.
16
Read the precautions on pages 7 to 12 in the introduction before use.
Quantity
1
AMD3232Series
How to order
AMD3
1
2
8
0
A
4
E
Operation port direction
Actuator material
AMD3*2
D
AMD0*2
Model No.
AMDZ
AMD0
How to order
Connection
Connection
Ø10
NC (normally closed)
2
NO (normally open)
3
Double acting
Option
0
ON/OFF only
1
With flow adjustment
6
With indicator
Flow
AMB characteristics MMD*02 GMMD*02 MMD*0
D
1
Actuator material
Blank
A
PPS
A5056
Operation port direction
4
3
1
2
3
2
1
AMGZ0
High-pressure
AMD5*2 AMG00 AMG*02 GAMD**2 specifications AMD
1/2" tube connection
Double barbed fitting
Option
E
8S
1/2" X t1.24 SUS weld tube
C
C
Ø8
4BT
Actuation
A
Actuation
*1
10
Rc 3/8
A
6S
3/8" tube connection
Double barbed fitting
Rc 1/4
Orifice
Symbol Descriptions
3BT
3/8" X t1.0 SUS weld tube
8
AMD4*2
B
B
Indicates that fluid flows
in direction of the black
4 arrow when looking at
valve from above.
The white arrow indicates
operation port direction.
TMD*02
Fine
AMS AMDS TQAS regulator KML
Others
Solenoid
valve
17
1
AMD3232Series
Dimensions
Rc screw type
1
·AMD3 2 2-8/10
3
3
36
Flow path
36
4
2
5
1
(Operation port direction)
X
35
65
Y
Port A
10.5
Port B
Ø10
62
18±0.3
2-M4 depth 5
18
72
Operation port Rc1/8
(NC type)
1
AMD3232Series
Dimensions
AMDZ
AMD0
Dimensions
AMD0*2
SUS weld tube
Double barbed fitting
1
1
·AMD3 2 2-3BT/4BT
·AMD3 2 2-6S/8S
3
3
AMD3*2
AMD4*2
Port B
Port A
Ø10
Ø10
50
(A)
(118)
Dimension
A
Model No.
116
AMD3*2-8S
130
AMB characteristics MMD*02 GMMD*02 MMD*0
With indicator
1
·AMD3 2 2-*-1
3
Flow
With flow adjustment
AMD3*2-6S
1
·AMD3 2 2-*-6
3
X
MAX 75
Y
TMD*02
MAX 97
X
Y
AMGZ0
High-pressure
AMD5*2 AMG00 AMG*02 GAMD**2 specifications AMD
Port A
Port B
Fine
AMS AMDS TQAS regulator KML
Others
Solenoid
valve
19
Air-operated valve for chemical liquids
1
2
3
AMD4 2 Series
Orifice: Ø14.7 to Ø16
Subject to Export Trade Control Ordinances
Specifications
1
Descriptions
AMD4 23 2-*-16
Working fluid
Chemical liquids, pure water (Note 1)
Fluid temperature
˚C
5 to 90 (5 to 160) (Note 5)
Withstanding pressure MPa
0.9
Working pressure range (A —> B) MPa
0 to 0.3 (Note 3)
Working pressure range (B —> A) MPa
0 to 0.1 (Note 3)
Valve seat leakage cm3/min
0 (at, water pressure)
Back pressure
MPa
0 to 0.1 (Note 3)
Ambient temperature ˚C
0 to 60
Frequency
20 times/min or less
Installation attitude
Free
Connection
OD3/4" tube connection (fitting integrated type)
Orifice
Ø16
Cv value
5
Bypass orifice (when bypass is installed)
Ø6
Operation Operation pressure range MPa NC 0.3 to 0.5, NO 0.3 to 0.5 (0.3 to 0.35 for high temperature use), double acting 0.3 to 0.4 (0.2 to 0.25 for high temperature use)
section Operation pressure connection port
Rc1/8 (Note 2)
Note 1: Check the compatibility of the product's configuration materials, working fluid, and ambient atmosphere before use.
Note 2: Connect a resin fitting when connecting to the operation port.
(When using a metal fitting, select one with a reinforcement ring. )
Note 3: See page 56 for high-pressure specifications.
Note 4: See pages 70 and 71 for flow characteristics.
Note 5: 5 to 40 ˚C for hydrofluoric acids.
Internal structure and parts list
1
4
2
Port B
Port A
3
No.
Parts name
Material
1
Actuator assembly
PPS
1
2
Body
PFA
1
3
Mounting plate
PPS
1
4
Diaphragm
PTFE
1
The material differs with the model. Contact CKD for details.
20
Read the precautions on pages 7 to 12 in the introduction before use.
Quantity
1
AMD4232Series
How to order
AMD4
1
2
20BUS
B
1
4
Y
B
Connection
E
C
Ø16
Ø16
Ø16
Ø16 Ø15.9 Ø16 Ø14.7
Option
PFA: PFA molded body, PTFE: PTFE machined body
0
ON/OFF only
1
With flow adjustment
PFA
PFA
PFA
PFA
PFA
PFA
PFA
PFA PTFE PFA PTFE
PFA
PFA
PFA
2
With bypass
3
With flow adjustment and bypass
6
ON/OFF, with indicator
PFA
PFA
PFA
PFA
7
With bypass/with indicator
PFA
PFA
PFA
PFA PTFE PFA PTFE
D
PFA
PFA
PFA
Operation port direction
4
3
2
2
1
3
Flow
E
AMB characteristics MMD*02 GMMD*02 MMD*0
1
Indicates that fluid flows
in direction of the black
4 arrow when looking at
valve from above.
The white arrow indicates
operation port direction.
Fluid
Blank Standard
M
For ammonia
P
For nitric acid, for hydrofluoric acid (Note 2)
Y
For high temperature (5 to 160˚C) (Note 1)
E
For high temperature (5 to 160˚C), PTFE machined body (Note 1)
Model No. for type with coated metal section
(Orifice indication and hyphen (-) between C and
A 2
B
C
D E
D
are not required.)
C
Note on model No.
selection
Coated
A 2
B
16
C
D
E
R
Orifice
With reinforcement ring
AMD4
A 2
B
C
D E
C
and
D
are not required.)
X
Bottom installation
A 2
B
C D
E
C
Coated
R
Solenoid
valve
AMD4
Others
Model No. for type with coated metal section + operation port reinforcement ring + bottom installation
(Orifice indication and hyphen (-) between C and D are not required.)
X
Bottom installation
With reinforcement ring
Fine
Bottom installation type No.
(Orifice indication and hyphen (-) between
Note 1: The following C options are not
available: 2 (with bypass), 3 (with flow
adjustment, bypass), 7 (with
bypass/with indicator).
This valve is not compatible with nitric
acid, hydrofluoric acid, or chlorine.
Note 2: C (with coated metal section) is
included in the E Fluid P item.
AMS AMDS TQAS regulator KML
Model No. for type with operation port reinforcement ring
(Hyphen (-) between C and D is not required.)
AMD4
TMD*02
AMD4
AMGZ0
High-pressure
AMD5*2 AMG00 AMG*02 GAMD**2 specifications AMD
Orifice
Symbol Descriptions
AMD4*2
3/4" X 5/8" tube connection
AMD3*2
Double acting
FLARTEC fitting integrated type
NO (normally open)
3
Final lock fitting integrated type
NC (normally closed)
2
F-LOCK 60 series fitting integrated type
1
F-LOCK 20A series fitting integrated type
Option
Orifice
Super 300 type Pillar fitting P series integrated type
Actuation
Super 300 type Pillar fitting J series integrated type
C
A
Fluid
Operation port direction
Super type Pillar fitting integrated type
D
Connection
20BUS 20BUJ 20BUP 20BUA 20BUR 20BUK 20BUW
AMD0*2
Model No.
16
AMDZ
AMD0
How to order
21
1
AMD4232Series
Dimensions
Standard type
1
·AMD4 2 2- *1 -16
3
4-Ø9
5
46
28
3
46
64
82
Flow path
2
4
1
(Operation port direction)
X
Operation port Rc1/8
(NC type)
Port B
60
97
106
Y
9
27
Port A
ØB
(A)
*1 (Connection model No.)
A
B
20BUS
124
16
20BUJ
114
16
20BUP
118
16
20BUA
108
16
20BUR
134
15.9
20BUK
119
16
20BUW
122
14.7
Bottom installation type
28±0.3
28±0.3
4-M8 depth 10
22
1
AMD4232Series
Dimensions
AMDZ
AMD0
Dimensions
AMD0*2
With flow adjustment
With flow adjustment bypass
1
1
·AMD4 2 2-*-16-1
·AMD4 2 2-*-16-3
3
3
AMD3*2
AMD4*2
AMGZ0
High-pressure
AMD5*2 AMG00 AMG*02 GAMD**2 specifications AMD
X
Y
(MAX 134)
Y
(MAX 130)
X
(Refer to the dimensions for the type with bypass
for the other dimensions.)
With indicator
1
·AMD4 2 2-*-16-2/7
3
AMB characteristics MMD*02 GMMD*02 MMD*0
With bypass
1
·AMD4 2 2-*-16-6/7
3
Flow
66
(MAX 110)
64
82
MAX 91
Y
TMD*02
(With bypass max. 116)
X
50
4-Ø9
AMS AMDS TQAS regulator KML
27
64
Port A
9
Port B
Fine
101
Y
110
X
Others
Solenoid
valve
23
Stainless steel body air-operated valve for chemical liquids
1
2
3
AMD4 2 Series
Orifice: Ø16
Specifications
1
Descriptions
AMD4 23 2-15/6BT/12S
Working fluid
Fluid temperature
Chemical liquids, pure water (Note 1)
˚C
5 to 120
Withstanding pressure MPa
0.9
Working pressure range (A —> B) MPa
0 to 0.3 (Note 2)
Working pressure range (B —> A) MPa
0 to 0.1 (Note 2)
Valve seat leakage cm3/min
0 (at, water pressure)
Back pressure
MPa
0 to 0.1 (Note 2)
Ambient temperature ˚C
0 to 60
Frequency
20 times/min or less
Installation attitude
Free
Connection
Rc 1/2, 3/4" SUS weld tube, 3/4" double barbed fitting (Note 3)
Orifice
Ø16
Operation Operation pressure range MPa
section Operation pressure connection port
NC/NO 0.3 to 0.5, double acting 0.3 to 0.4
Rc1/8
Note 1: Check the compatibility of the product's configuration materials, working fluid, and ambient atmosphere before use.
Note 2: See page 56 for high-pressure specifications.
Note 3: For the double-barbed fitting, fluorine-based lubricant is applied on the sliding surface of the front ferrule and fitting.
Internal structure and parts list
1
3
2
Port B
Port A
80
No.
Parts name
Material
1
Actuator assembly
PPS
1
2
Body
SUS316L
1
3
Diaphragm
PTFE
1
The material differs with the model. Contact CKD for details.
24
Read the precautions on pages 7 to 12 in the introduction before use.
Quantity
1
AMD4232Series
How to order
AMD4
1
2
15
0
A
AMDZ
AMD0
How to order
4
AMD0*2
Model No.
AMD3*2
AMD4*2
B
Connection
Connection
A
A
Actuation
Option
Actuator material
Actuation
1
NC (normally closed)
2
NO (normally open)
3
Double acting
Option
0
ON/OFF only
1
With flow adjustment
6
With indicator
Actuator material
Blank PPS
A
E
E
Operation port direction
Flow
D
D
Ø16
AMB characteristics MMD*02 GMMD*02 MMD*0
C
C
12S
3/4" tube connection
Double barbed fitting
Rc 1/2
Orifice
Symbol Descriptions
6BT
3/4" X t1.24 SUS weld tube
15
A5056
Operation port direction
Indicates that fluid flows
4
3
1
2
3
2
1
AMGZ0
High-pressure
AMD5*2 AMG00 AMG*02 GAMD**2 specifications AMD
B
in direction of the black
4 arrow when looking at
valve from above.
The white arrow indicates
operation port direction.
TMD*02
Fine
AMS AMDS TQAS regulator KML
Others
Solenoid
valve
25
1
AMD4232Series
Dimensions
Rc screw type
1
·AMD4 2 2-15
3
3
46
Flow path
46
2
4
5
1
(Operation port direction)
X
47
84
Y
Port A
13.5
Port B
80
26±0.3
2-M5 depth 6
26
93
Operation port Rc1/8
(NC type)
1
AMD4232Series
Dimensions
AMDZ
AMD0
Dimensions
AMD0*2
SUS weld tube
Double barbed fitting
1
1
·AMD4 2 2-6BT
·AMD4 2 2-12S
3
3
AMD3*2
AMD4*2
Port A
Port B
Port A
61
(150)
(129)
With indicator
1
AMB characteristics MMD*02 GMMD*02 MMD*0
With flow adjustment
1
·AMD4 2 2-*-1
·AMD4 2 2-*-6
3
AMGZ0
High-pressure
AMD5*2 AMG00 AMG*02 GAMD**2 specifications AMD
Port B
3
Flow
Y
TMD*02
Y
MAX 97
X
MAX 117
X
Fine
AMS AMDS TQAS regulator KML
Others
Solenoid
valve
27
Air-operated valve for chemical liquids
1
2
3
AMD5 2 Series
Orifice: Ø20
Subject to Export Trade Control Ordinances
Specifications
1
Descriptions
AMD5 23 2-*-20
Working fluid
Fluid temperature
Chemical liquids, pure water (Note 1)
˚C
5 to 90 (Note 2)
Withstanding pressure MPa
0.9
Working pressure range (A —> B) MPa
0 to 0.3 (Note 4)
Working pressure range (B —> A) MPa
0 to 0.1 (Note 4)
Valve seat leakage cm3/min
0 (at, water pressure)
Back pressure
MPa
0 to 0.1 (Note 4)
Ambient temperature ˚C
0 to 60
Frequency
20 times/min or less
Installation attitude
Free
ODØ25 tube connection (fitting integrated type)/OD1" tube connection (fitting integrated type)
Connection
Nominal 16, nominal 20 (PVC union fitting integrated type)
Orifice
Ø20
Bypass orifice (when bypass is installed)
Ø6
Cv value
8
Operation Operation pressure range MPa
section Operation pressure connection port
NC/NO 0.3 to 0.5, double acting 0.3 to 0.4
Rc1/8 (Note 3)
Note 1: Check the compatibility of the product's configuration materials, working fluid, and ambient atmosphere before use.
Note 2: 5 to 50 ˚C when using PVC union fitting connection. 5 to 40 ˚C when using hydrofluoric fitting.
Note 3: Connect a resin fitting when connecting to the operation port.
(When using a metal fitting, select one with a reinforcement ring.)
Note that a reinforcement ring is attached with the PVC union fitting integrated type, so a metal fitting can also be used.
Note 4: See page 56 for high-pressure specifications.
Note 5: See pages 70 and 71 for flow characteristics.
Internal structure and parts list
1
4
2
Port B
Port A
3
No.
Parts name
Material
1
Actuator assembly
PPS
1
2
Body
PFA
1
3
Mounting plate
PPS
1
4
Diaphragm
PTFE
1
The material differs with the model. Contact CKD for details.
28
Read the precautions on pages 7 to 12 in the introduction before use.
Quantity
1
AMD5232Series
How to order
AMD5
1 2
25BUS
1
B
Connection
NO (normally open)
3
Double acting
D
Fluid
Connection
25US
25BUS
25UJ
25BUJ
25BUP 25BUA
25UR
25BUR
25UK
25BUK 25BUW 15AU
20AU
Super 300 type F-LOCK 20A F-LOCK 60 series Final lock fitting FLARTEC PVC union fitting
Pillar fitting P series series fitting fitting integrated type integrated type fitting integrated type
integrated type
integrated type integrated type
Nominal 20
Ø20
Nominal 16
Ø20
1" X 7/8" tube connection
1" X 7/8" tube connection
Ø20
Ø25 X Ø22 tube connection
Ø20
1" X 7/8" tube connection
Ø20
Ø25 X Ø22 tube connection
Ø20
1" X 7/8" tube connection (Note 2)
1" X 7/8" tube connection
Ø25 X Ø22 tube connection
Ø20
1" X 7/8" tube connection
Ø25 X Ø22 tube connection
1" X 7/8" tube connection
Ø25 X Ø22 tube connection
Orifice
25UP
Ø20
Option (Note 1)
PFA: PFA molded body, PTFE: PTFE machined body, CPVC: CPVC machined body
ON/OFF only
1
With flow adjustment
2
With bypass
3
With flow adjustment and bypass
6
ON/OFF, with indicator
7
With bypass/with indicator
PFA
PFA
PFA
PTFE
PFA
PTFE
PFA
PTFE
PTFE
PTFE
PFA
PTFE
PTFE
PTFE
CPVC
PFA
PFA
PFA
PFA
PTFE
PFA
PTFE
PFA
PTFE
PTFE
PTFE
PFA
PTFE
PTFE
PTFE
CPVC
Operation port direction
Indicates that fluid flows
4
3
2
2
3
1
in direction of the black
4 arrow when looking at
valve from above.
The white arrow indicates
operation port direction.
Flow
1
E
PFA
AMB characteristics MMD*02 GMMD*02 MMD*0
D
0
Fluid
Blank Standard
M
For ammonia
P
For nitric acid, for hydrofluoric acid (Note 1)
Model No. for type with coated metal section
(Orifice indication and hyphen (-) between C and
A 2
B
C
D E
D
are not required.)
C
Note on model No.
selection
Coated
A 2
B
20
C
D E
R
Orifice
With reinforcement ring
AMD5
A 2
B
C
D E
C
and
D
Note 1:EC (with coated metal section) is
included in the E Fluid P item.
Note 2: Also usable for the Ø25 x Ø22
diameter tube connection.
are not required.)
Fine
Bottom installation type No.
(Orifice indication and hyphen (-) between
AMS AMDS TQAS regulator KML
Model No. for type with operation port reinforcement ring
(Hyphen (-) between C and D is not required.)
AMD5
TMD*02
AMD5
X
Bottom installation
B
C
D E
C
Coated
R
Solenoid
valve
A 2
Others
Model No. for type with coated metal section + operation port reinforcement ring + bottom installation
(Orifice indication and hyphen (-) between C and D are not required.)
AMD5
AMGZ0
High-pressure
AMD5*2 AMG00 AMG*02 GAMD**2 specifications AMD
Super type Pillar
Super 300 type
fitting integrated type Pillar fitting J series
integrated type
Symbol Descriptions
C
E
Operation port direction
AMD4*2
2
Option
Orifice
B
NC (normally closed)
M
AMD3*2
Actuation
1
4
AMD0*2
C
Model No.
A
20
AMDZ
AMD0
How to order
X
Bottom installation
With reinforcement ring
29
1
AMD5232Series
Dimensions
Standard type
1
·AMD5 2 2- *1 -20
3
60
4-Ø9
5
40
3
Flow path
4
60
78
96
2
1
(Operation port direction)
X
Operation port Rc1/8
(NC type)
76
Port A
10
35
Port B
118
128
Y
ØB
(A)
A
B
25US
*1 (Connection model No.)
147
20
25BUS
147
20
25UJ
142
20
25BUJ
142
20
25UP
146
20
25BUP
146
20
25BUA
140
20
25UR
159
20
25BUR
162
20
25UK
141
20
25BUK
141
20
25BUW
156
20
PVC union fitting integrated type
Bottom installation type
40±0.3
40±0.3
Port B
Port A
94
30
4-M8 depth 13
3
(MAX 133)
1
1
AMGZ0
High-pressure
AMD5*2 AMG00 AMG*02 GAMD**2 specifications AMD
Flow
AMB characteristics MMD*02 GMMD*02 MMD*0
TMD*02
Fine
AMS AMDS TQAS regulator KML
128
3
·AMD5 2 2-*-20-6/7
·AMD5 2 2-*-20-1
Others
35
With indicator
With flow adjustment
AMD4*2
MAX 103
AMD3*2
(MAX 159)
AMD0*2
Y
Y
Port A
Port B
AMDZ
AMD0
78
96
AMD5232Series
1
Dimensions
Dimensions
X
X
With bypass
1
·AMD5 2 2-*-20-2/7
3
60
46
X
Y
Solenoid
valve
31
Stainless steel body air-operated valve for chemical liquids
1
2
3
AMD5 2 Series
Orifice: Ø20
Specifications
1
Descriptions
AMD5 23 2-8BT/16S
Working fluid
Chemical liquids, pure water (Note 1)
Fluid temperature
˚C
5 to 120
Withstanding pressure MPa
0.9
Working pressure range (A —> B) MPa
0 to 0.3 (Note 2)
Working pressure range (B —> A) MPa
0 to 0.1 (Note 2)
Valve seat leakage cm3/min
0 (at, water pressure)
Back pressure
MPa
0 to 0.1 (Note 2)
Ambient temperature ˚C
0 to 60
Frequency
20 times/min or less
Installation attitude
Free
1" SUS weld tube
Connection
Double barbed fitting for 1" (Note 3)
Orifice
Ø20
NC/NO 0.3 to 0.5, double acting 0.3 to 0.4
Operation Operation pressure range MPa
section Operation pressure connection port
Rc1/8
Note 1: Check the compatibility of the product's configuration materials, working fluid, and ambient atmosphere before use.
Note 2: See page 56 for high-pressure specifications.
Note 3: For the double-barbed fitting, fluorine-based lubricant is applied on the sliding surface of the front ferrule and fitting.
Internal structure and parts list
1
3
2
Port B
Port A
No.
Parts name
Material
1
Actuator assembly
PPS
1
2
Body
SUS316L
1
3
Diaphragm
PTFE
1
The material differs with the model. Contact CKD for details.
32
Read the precautions on pages 7 to 12 in the introduction before use.
Quantity
1
AMD5232Series
How to order
AMD5
1
2
16S
1
A
AMDZ
AMD0
How to order
4
AMD0*2
Model No.
B
Connection
D
2
NO (normally open)
3
Double acting
0
ON/OFF only
1
With flow adjustment
6
With indicator
Actuator material
Blank PPS
A
Operation port direction
A5056
Flow
E
E
AMB characteristics MMD*02 GMMD*02 MMD*0
Actuator material
NC (normally closed)
Option
Option
D
1
Operation port direction
Indicates that fluid flows
4
3
1
2
3
2
1
AMGZ0
High-pressure
AMD5*2 AMG00 AMG*02 GAMD**2 specifications AMD
Actuation
C
C
Ø20
AMD4*2
A
Actuation
16S
1" tube connection
Double barbed fitting
A
8BT
1" X t1.65 SUS weld tube
Orifice
Symbol Descriptions
Connection
AMD3*2
B
in direction of the black
4 arrow when looking at
valve from above.
The white arrow indicates
operation port direction.
TMD*02
Fine
AMS AMDS TQAS regulator KML
Others
Solenoid
valve
33
1
AMD5232Series
Dimensions
Double barbed fitting
1
·AMD5 2 2-16S
3
60
3
5
60
Flow path
2
4
1
X
Operation port Rc1/8
Port B
63
105
Y
22
Port A
Ø20
(175)
40±0.3
2-M6 depth 5
34
115
(NC type)
AMD3*2
3
·AMD5 2 2-*-1
1
·AMD5 2 2-8BT
1
3
AMGZ0
High-pressure
AMD5*2 AMG00 AMG*02 GAMD**2 specifications AMD
Y
AMD4*2
Port A
Port B
AMD0*2
With flow adjustment
SUS weld tube
(MAX 146)
AMDZ
AMD0
Flow
AMB characteristics MMD*02 GMMD*02 MMD*0
TMD*02
Y
MAX 120
AMD5232Series
1
Dimensions
Dimensions
X
(140)
Ø20
With indicator
·AMD5 2 2-*-6
1
3
X
Fine
AMS AMDS TQAS regulator KML
Others
Solenoid
valve
35
Air-operated valve for chemical liquids (3 port valve)
AMGZ0 / AMG00 Series
The fitting integrated 3-port valve eliminates dead space.
Orifice: Ø1.6 to Ø4
Specifications
Descriptions
AMGZ*-*-2
Working fluid
AMG0*-*-4
Chemical liquids, pure water, N2 gas, air
Fluid temperature
˚C
5 to 80
Withstanding pressure MPa
1
Working pressure range (A -> B) MPa
0 to 0.5
Working pressure range (B -> A) MPa
0 to 0.3
Valve seat leakage cm3/min
0 (at, water pressure)
Back pressure
MPa
0 to 0.3
Ambient temperature ˚C
0 to 60
Frequency
30 times/min or less
Installation attitude
Free
ODØ3 tube connection
OD1/8" tube connection
Connection
ODØ6 tube connection
OD1/4" tube connection
Orifice
Ø2
Ø4
Cv value
0.08
0.32
Operation Operation pressure MPa
section Operation port
0.3 to 0.5
M5
Internal structure and parts list
1
4
2
No.
3
Parts name
Material
1
Actuator assembly
PPS
2
2
Body
PFA
1
3
Mounting plate
SUS
2
4
Diaphragm
PTFE
2
The material differs with the model. Contact CKD for details.
36
Read the precautions on pages 7 to 12 in the introduction before use.
Quantity
AMGZ0 / AMG00Series
How to order
AMDZ
AMD0
How to order
AMGZ0 Series
A
3UF
2
Connection
3US
6BUS
3UF
3UR
AMD0*2
AMGZ0
6BUR
Super type Pillar
F-LOCK 20 series F-LOCK 60 series
fitting integrated type fitting integrated type fitting integrated type
Model No.
Body material
PFA molded body or PTFE machined body
PFA
Ø1.6 Ø1.6
PTFE
PTFE
AMG00 Series
A
AMG00
8BUF
4
8BUS
6UJ
8BUJ
Super type Pillar
Super 300 type
fitting integrated type Pillar fitting J series
integrated type
Model No.
A
Connection
6US
Connection
8BUF
Ø4
PTFE
PTFE
Ø3.5 Ø3.5
PTFE
Ø4
Ø4
Ø3
PTFE
PTFE
Note on model No. selection
Note 1: Other bore sizes are also available. Contact CKD for details.
Flow
Ø4
FLARTEC
fitting
integrated type
AMB characteristics MMD*02 GMMD*02 MMD*0
Ø4
Final lock fitting
integrated type
8BUW
1/4" X 5/32" tube connection
Ø6.35 X Ø4.3 tube connection
Ø4
8BUK
1/4" X 5/32" tube connection
Ø6 X Ø4 tube connection
Ø4
6UK
Ø6 X Ø4 tube connection
1/4" X 5/32" tube connection
Ø4
PTFE
8BUR
1/4" X 5/32" tube connection
Ø6 X Ø4 tube connection
Ø4
Ø6 X Ø4 tube connection
1/4" X 5/32" tube connection
Ø4
PFA
6UR
Super 300 type
F-LOCK 20 series F-LOCK 60 series
Pillar fitting P series fitting integrated type fitting integrated type
integrated type
Ø6 X Ø4 tube connection
Body material
PFA molded body or PTFE machined body
6UF
1/4" X 5/32" tube connection
Descriptions
Orifice
Refer to the right
8BUP
Ø6 X Ø4 tube connection
Orifice
6UP
AMGZ0
High-pressure
AMD5*2 AMG00 AMG*02 GAMD**2 specifications AMD
Ø2
AMD4*2
Ø2
AMD3*2
Descriptions
Orifice
Refer to the right
1/8" X 1/16" tube connection
Ø3 X Ø2 tube connection
Ø2
Orifice
Ø3 X Ø2 tube connection
1/8" X 0.086" tube connection
Connection
Ø3 X Ø2 tube connection
A
TMD*02
Fine
AMS AMDS TQAS regulator KML
Others
Solenoid
valve
37
AMGZ0Series
Dimensions
Fitting integrated type
·AMGZ0- *1 -2
22
Port A
A
NC
5
NO
Port B
(A)
B
Port B
11
23
11
45
(A)
Operation port M5 depth 4.5
11
28
41
Operation port M5 depth 4.5
45
B
NC
NO
ØB
ØB
10±0.3
4-M3 depth 4
23±0.5
Dimension
A
B
3US
14
2
6BUS
14
2
3UF
9
2
3UR
17.5
1.6
6BUR
17.5
1.6
*1 (Connection model No.)
38
AMG00Series
Dimensions
AMDZ
AMD0
Dimensions
Port A
AMD0*2
Fitting integrated type
AMD3*2
(A)
·AMG00- *1 -4
A
30
AMD4*2
NO
NC
AMGZ0
High-pressure
AMD5*2 AMG00 AMG*02 GAMD**2 specifications AMD
B
Port B
Port B
(A)
B
15
31
15
Operation port M5 depth 4.5
55
AMB characteristics MMD*02 GMMD*02 MMD*0
13
31
51
Operation port M5 depth 4.5
Flow
NC
NO
ØB
ØB
20
20
TMD*02
20±0.3
8-M3 depth 4
AMS AMDS TQAS regulator KML
31±0.5
Dimension
Dimension
B
6US
18
4
8BUS
18
4
6UF
17
4
8BUF
17
6UJ
17
4
4
6UR
30
3.5
8BUJ
6UP
17
4
8BUR
31
3.5
19
4
6UK
19
8BUP
4
19
4
8BUK
19
4
8BUW
28
3
Solenoid
valve
A
*1 (Connection model No.)
Others
B
Fine
A
*1 (Connection model No.)
39
Air-operated valve for chemical liquids (3 port valve)
3
4
5
Orifice: AMG302: Ø6 to Ø10
AMG402: Ø14.7 to Ø16
AMG502: Ø20
AMG 02 Series
Subject to Export Trade Control Ordinances
*Target: AMG402 and 502 only
Specifications
Descriptions
AMG302
AMG402
Working fluid
Fluid temperature
Chemical liquids, pure water (Note 1)
˚C
5 to 90 (5 to 160) (Note 5)
5 to 90 (Note 5)
Withstanding pressure MPa
0.9
Working pressure range (A -> B) MPa
0 to 0.3 (Note 4)
Working pressure range (B -> A) MPa
Valve seat leakage
Back pressure
AMG502
0 to 0.1 (Note 4)
0 (at, water pressure)
cm3/min
0 to 0.1
MPa
Ambient temperature ˚C
Frequency
0 to 60
30 times/min or less
Installation attitude
Connection
Orifice
ODØ10, Ø12 tube connection (fitting integrated type)
ODØ25 tube connection (fitting integrated type)
OD3/4" tube connection (fitting integrated type)
OD3/8", 1/2" tube connection (fitting integrated type)
OD1" tube connection (fitting integrated type)
Ø6 to Ø10 (Note 3)
Operation Operation pressure range MPa
section Operation pressure connection port
20 times/min or less
Free
Ø14.7 to Ø16 (Note 3)
Ø20
0.3 to 0.5
Rc1/8 (Note 2)
Note 1: Check the compatibility of the product's configuration materials, working fluid, and ambient atmosphere before use.
Note 2: Connect a resin fitting when connecting to the operation port.
When using a metal fitting, select one with a reinforcement ring.
Note 3: Confirm the orifice for each connection in the Model indication section.
Note 4: See page 56 for high-pressure specifications.
Note 5: 5 to 40 ˚C for hydrofluoric acids.
40
Read the precautions on pages 7 to 12 in the introduction before use.
3
AMG4502Series
Internal structure and parts list
AMDZ
AMD0
Internal structure and parts list
AMD0*2
1
AMD3*2
4
2
AMD4*2
AMGZ0
High-pressure
AMD5*2 AMG00 AMG*02 GAMD**2 specifications AMD
3
No.
Parts name
Material
1
Actuator assembly
PPS
2
Body
PTFE
3
Mounting plate
PP
4
Diaphragm
PTFE
The material differs with the model. Contact CKD for details.
Flow
AMB characteristics MMD*02 GMMD*02 MMD*0
TMD*02
Fine
AMS AMDS TQAS regulator KML
Others
Solenoid
valve
41
AMG302Series
How to order
AMG302 Series (Connection: Ø10, 3/8" tube)
AMG302
10BUS
A
Model No.
0
M
C
Connection
D
B
L
Fluid
Port A position
Option
A
Connection
10US
10BUS
10UJ
10BUJ
Super type Pillar
Super 300 type
fitting integrated type Pillar fitting J series
integrated type
10BUP
10UA
10BUA
10UR
10BUR 10UK
Super 300 type
F-LOCK 20A series F-LOCK 60 series
Pillar fitting P series fitting integrated type fitting integrated type
integrated type
ON/OFF only
1
With flow adjustment
6
With indicator
Fluid
For ammonia
(Note 1)
(Note 1)
For nitric acid, for hydrofluoric acid (Note 3)
(Note 1)
(Note 1)
Y
For high temperature (5 to 160˚C) (Note 2)
(Note 1)
(Note 1)
L
Left
Model No. for type with coated metal section
A
B
C
D
C
Coated
Model No. for type with operation port reinforcement ring
A
B
C
D
R
With reinforcement ring
Model No. for type with coated metal section + operation port reinforcement ring
A
B
C
D
C
R
Coated With reinforcement ring
Note on model No. selection
Note 1: The final lock fitting nut and operation air piping could interfere, so check dimensions before selecting.
Note 2: This valve is not compatible with nitric acid, hydrofluoric acid, or chlorine.
Note 3: C (with coated metal section) is included in the C Fluid P item.
42
(Note 1)
P
Available with PTFE machined body.
AMG302
(Note 1)
M
D Port A position
Blank Right
AMG302
Ø6.3
Option
0
Blank Standard
AMG302
Ø8
FLARTEC
fitting
integrated type
3/8" X 1/4" tube connection
Ø6
3/8" X 1/4" tube connection
Ø7
10BUK 10BUW
Final lock fitting
integrated type
Ø10 X Ø8 tube connection
3/8" X 1/4" tube connection
Ø8
Ø10 X Ø8 tube connection
3/8" X 1/4" tube connection
Ø8
Ø10 X Ø8 tube connection
Ø8
3/8" X 1/4" tube connection
Ø10 X Ø8 tube connection
Ø8
3/8" X 1/4" tube connection
C
Ø10 X Ø8 tube connection
B
3/8" X 1/4" tube connection
Ø10 X Ø8 tube connection
Orifice
Symbol Descriptions
10UP
AMG302Series
How to order
15BUA
A
M
C
Connection
D
B
L
Fluid
AMD3*2
Model No.
1
AMD0*2
AMG302
AMDZ
AMD0
How to order
AMG302 Series (Connection: Ø12, 1/2" tube)
Port A position
Option
AMD4*2
Connection
12US
15BUS
12UJ
15BUJ
Super type Pillar
Super 300 type
fitting integrated type Pillar fitting J series
integrated type
15BUP
12UA
15BUA
12UR
15BUR 12UK
Super 300 type
F-LOCK 20A series F-LOCK 60 series
Pillar fitting P series fitting integrated type fitting integrated type
integrated type
Ø10
FLARTEC
fitting
integrated type
1/2" X 3/8" tube connection
1/2" X 3/8" tube connection
Ø9
15BUK 15BUW
Final lock fitting
integrated type
Ø12 X Ø10 tube connection
1/2" X 3/8" tube connection
Ø10
Ø12 X Ø10 tube connection
1/2" X 3/8" tube connection
Ø10
Ø12 X Ø10 tube connection
Ø10
1/2" X 3/8" tube connection
Ø12 X Ø10 tube connection
Ø10
1/2" X 3/8" tube connection
C
Ø12 X Ø10 tube connection
B
1/2" X 3/8" tube connection
Ø12 X Ø10 tube connection
Orifice
Symbol Descriptions
12UP
Ø9.4
Option
0
ON/OFF only
1
With flow adjustment
6
With indicator
(Note 1)
(Note 1)
For ammonia
(Note 1)
(Note 1)
P
For nitric acid, for hydrofluoric acid (Note 3)
(Note 1)
(Note 1)
Y
For high temperature (5 to 160˚C) (Note 2)
(Note 1)
(Note 1)
Flow
M
AMB characteristics MMD*02 GMMD*02 MMD*0
Fluid
Blank Standard
D Port A position
Blank Right
L
Left
Available with PTFE machined body.
Model No. for type with coated metal section
AMG302
A
B
C
D
AMGZ0
High-pressure
AMD5*2 AMG00 AMG*02 GAMD**2 specifications AMD
A
C
Coated
TMD*02
Model No. for type with operation port reinforcement ring
A
B
C
D
R
AMS AMDS TQAS regulator KML
AMG302
With reinforcement ring
Model No. for type with coated metal section + operation port reinforcement ring
AMG302
A
B
C
D
C
R
Coated With reinforcement ring
Fine
Note on model No. selection
Others
Solenoid
valve
Note 1: The final lock fitting nut and operation air piping could interfere, so check dimensions before selecting.
Note 2: This valve is not compatible with nitric acid, hydrofluoric acid, or chlorine.
Note 3: C (with coated metal section) is included in the C Fluid P item.
43
AMG402Series
How to order
AMG402 Series
AMG402
Model No.
20BUJ
A
0
M
C
Connection
D
B
L
Fluid
Port A position
Option
A
Connection
20BUS 20BUJ 20BUP 20BUA 20BUR 20BUK 20BUW
FLARTEC fitting integrated type
Final lock fitting integrated type
F-LOCK 60 series fitting integrated type
F-LOCK 20A series fitting integrated type
Super 300 type Pillar fitting P series integrated type
Super 300 type Pillar fitting P series integrated type
Super type Pillar fitting integrated type
3/4" X 5/8" tube connection
Orifice
Symbol Descriptions
B
C
Ø16
Ø16
Ø16
Ø16
Option
0
ON/OFF only
1
With flow adjustment
6
With indicator
Fluid
Blank Standard
M
For ammonia
P
For nitric acid, for hydrofluoric acid (Note 2)
Y
For high temperature (5 to 160˚C) (Note 1)
D Port A position
Blank Right
L
Left
Available with PTFE machined body.
Model No. for type with coated metal section
AMG402
A
B
C
D
C
Coated
Model No. for type with operation port reinforcement ring
AMG402
A
B
C
D
R
With reinforcement ring
Model No. for type with coated metal section + operation port reinforcement ring
AMG402
A
B
C
D
C
R
Coated With reinforcement ring
Note on model No. selection
Note 1: This valve is not compatible with nitric acid, hydrofluoric acid, or chlorine.
Note 2: C (with coated metal section) is included in the C Fluid P item.
44
Ø15
Ø16 Ø14.7
AMG502Series
How to order
A
0
M
Connection
C
D
B
L
Fluid
AMD3*2
Model No.
25UA
AMD0*2
AMG502
AMDZ
AMD0
How to order
AMG502 Series
Port A position
Option
AMD4*2
Connection
25US
25BUS
25UJ
25BUJ
Super type Pillar
Super 300 type
fitting integrated type Pillar fitting J series
integrated type
25UR
25BUR
25BUK 25BUW
Ø20
FLARTEC
fitting
integrated type
1" X 7/8" tube connection
1" X 7/8" tube connection
Ø20
25UK
Final lock fitting
integrated type
Ø25 X Ø22 tube connection
1" X 7/8" tube connection
Ø20
Ø25 X Ø22 tube connection
Ø20
1" X 7/8" tube connection (Note 2)
1" X 7/8" tube connection
Ø20
25BUP 25BUA
Super 300 type F-LOCK 20A F-LOCK 60 series
Pillar fitting P series series fitting fitting integrated type
integrated type integrated type
Ø25 X Ø22 tube connection
Ø20
1" X 7/8" tube connection
C
Ø25 X Ø22 tube connection
B
1" X 7/8" tube connection
Ø25 X Ø22 tube connection
Orifice
Symbol Descriptions
25UP
Ø20
Option
0
ON/OFF only
1
With flow adjustment
6
With indicator
AMB characteristics MMD*02 GMMD*02 MMD*0
Fluid
Blank Standard
For ammonia
P
For nitric acid, for hydrofluoric acid (Note 1)
Flow
M
D Port A position
Blank Right
L
Left
Available with PTFE machined body.
Model No. for type with coated metal section
AMG502
A
B
C
D
AMGZ0
High-pressure
AMD5*2 AMG00 AMG*02 GAMD**2 specifications AMD
A
C
Coated
TMD*02
Model No. for type with operation port reinforcement ring
A
B
C
D
R
AMS AMDS TQAS regulator KML
AMG502
With reinforcement ring
Model No. for type with coated metal section + operation port reinforcement ring
AMG502
A
B
C
D
C
R
Coated With reinforcement ring
Fine
Note on model No. selection
Others
Note 1: C (with coated metal section) is included in the C Fluid P item.
Note 2: Also usable for the Ø25 x Ø22 diameter tube connection.
Solenoid
valve
45
3
AMG4502Series
Dimensions
Standard type
·AMG302- *1
Note: NC and NO layouts differ with the A port position.
The valve closest to the A port is the NC valve. The other valve is NO.
Port A position: Blank
·AMG402- *1
Port A position: L
A
·AMG502- *1
NO
A
NC
B
NC
B
NO
B
B
Port B
Port B
(J)
5
I
Port A
F
G
F
H
Operation port Rc1/8
(J)
NC
NO
X
X
Operation port Rc1/8
Y
A
E
B
C
D
Y
M
ØO
K
46
4-N
3
AMG4502Series
Dimensions
AMDZ
AMD0
Dimensions
C
D
E
F
G
H
I
K
M
N
59
89
96
35
18
38
74
36
38±0.3
22
M6 depth 9
AMG402
27
79
116
125
46
23
48
94
46
48±0.4
28
M8 depth 10
AMG502
35
101
143
153
60
30
62
122
60
62±0.4
40
M8 depth 13
J
O
AMG3 (10mm·3/8")
*1 (Connection model No.)
AMG4
AMG3 (12mm·1/2")
10US
25
8
10BUS
25
10UJ
23
10BUJ
*1 (Connection model No.)
AMG5
J
O
*1 (Connection model No.)
J
O
12US
29.5
10
20BUS
39
16
25US
*1 (Connection model No.)
43.5
20
8
15BUS
29.5
10
20BUJ
34
16
25BUS
43.5
20
8
12UJ
27
10
20BUP
36
16
25UJ
41
20
23
8
15BUJ
27
10
20BUA
31
16
25BUJ
41
20
10UP
25
8
12UP
29
10
20BUR
44
15
25UP
43
20
10BUP
25
8
15BUP
29
10
20BUK
36.5
16
25BUP
43
20
10UA
21
8
12UA
25
10
20BUW
38
14.7
25BUA
40
20
10BUA
21
8
15BUA
25
10
25UR
49.5
20
10UR
37
7
12UR
37
9
25BUR
51
20
10BUR
39
6
15BUR
39
9
25UK
40.5
20
10UK
30
8
12UK
33
10
25BUK
40.5
20
10BUK
30
8
15BUK
33
10
25BUW
48
20
10BUW
32.5
6.3
15BUW
33.5
9.4
AMGZ0
High-pressure
AMD5*2 AMG00 AMG*02 GAMD**2 specifications AMD
O
AMD4*2
J
AMD3*2
B
21
Model No.
AMD0*2
A
AMG302
*1 (Connection model No.)
With flow adjustment
With indicator
·AMG*02-*-6
Flow
AMB characteristics MMD*02 GMMD*02 MMD*0
·AMG*02-*-1
Y
(MAX G)
Y
X
Y
Y
X
(MAX F)
X
X
TMD*02
F
Model No.
AMS AMDS TQAS regulator KML
Model No.
G
120
AMG302
98
AMG402
149
AMG402
129
AMG502
185
AMG502
158
Fine
AMG302
Others
Solenoid
valve
47
Air-operated valve for chemical liquids (manifold/branch valve)
3
4
5
Orifice: GAMD3*2 Ø6 to Ø10
GAMD4*2 Ø14.7 to Ø16
GAMD5*2 Ø20
Subject to Export Trade Control Ordinances
No. of stations: 1 to 5 stations
GAMD *2 Series
*Target: GAMD4*2 and 5*2 only
Specifications
Descriptions
GAMD3*2
GAMD4*2
Working fluid
Chemical liquids, pure water (Note 1)
Fluid temperature
˚C
Withstanding pressure
MPa
5 to 90 (5 to 160) (Note 5)
Working pressure range (A —> B) MPa
Back pressure
0 to 0.3 (Note 4)
0 to 0.1 (Note 4)
0 (at, water pressure)
cm3/min
0 to 0.1 (Note 4)
MPa
Ambient temperature ˚C
Frequency
0 to 60
30 times/min or less
Installation attitude
Connection
Orifice
20 times/min or less
Free
ODØ10, Ø12 tube connection (fitting integrated type)
ODØ25 tube connection (fitting integrated type)
OD3/4" tube connection (fitting integrated type)
OD3/8", 1/2 tube connection (fitting integrated type)
OD1" tube connection (fitting integrated type)
Ø6 to Ø10 (Note 3)
Operation Operation pressure range MPa
section Operation pressure connection port
5 to 90 (Note 5)
0.9
Working pressure range (B —> A) MPa
Valve seat leakage
GAMD5*2
Ø14.7 to Ø16 (Note 3)
Ø20
NC/NO 0.3 to 0.5, double acting 0.3 to 0.4
Rc1/8 (Note 2)
Note 1: Check the compatibility of the product's configuration materials, working fluid, and ambient atmosphere before use.
Note 2: Connect a resin fitting when connecting to the operation port.
(When using a metal fitting, select one with a reinforcement ring.)
Note 3: Confirm the orifice for each connection in the Model indication section.
Note 4: See page 56 for high-pressure specifications.
Note 5: 5 to 40 ˚C for hydrofluoric acids.
48
Read the precautions on pages 7 to 12 in the introduction before use.
3
GAMD45*2Series
Internal structure and parts list
AMDZ
AMD0
Internal structure and parts list
AMD0*2
AMD3*2
1
4
AMD4*2
2
AMGZ0
High-pressure
AMD5*2 AMG00 AMG*02 GAMD**2 specifications AMD
3
No.
Parts name
Material
1
Actuator assembly
PPS
2
Body
PTFE
3
Mounting plate
PP
4
Diaphragm
PTFE
The material differs with the model. Contact CKD for details.
Flow
AMB characteristics MMD*02 GMMD*02 MMD*0
TMD*02
Fine
AMS AMDS TQAS regulator KML
Others
Solenoid
valve
49
GAMD3*2Series
How to order
GAMD3*2 Series (Connection: Ø10, 3/8" tube)
GAMD3
1 2
10BUS
1
C
Model No.
A
Actuation
B
3
Option
M
E
L
Fluid
Connection
F
D
Port A position
No. of stations
B
Connection
10US 10BUS 10UJ 10BUJ
Super type Pillar fitting Super 300 type
integrated type
Pillar fitting J series
integrated type
Ø8
ON/OFF only
With flow adjustment
With indicator
1 station
to
5 stations
(Note 1)
(Note 1)
(Note 1)
(Note 1)
Port A position
Blank
L
W
Right
Left
Both sides
Available with PTFE machined body.
Model No. for type with coated metal section
GAMD3
A 2
B
C
D
E
F
C
Coated
Model No. with operation port reinforcement ring (Designate R at end of Model No.)
GAMD3
A 2
B
C
D
E
F
R
With reinforcement ring
Model No. for type with coated metal section + operation port reinforcement ring
GAMD3
A 2
B
C
D
E
F
C
Coated
R
With reinforcement ring
Note on model No. selection
Note 1: The final lock fitting nut and operation air piping could interfere, so check dimensions before selecting.
Note 2: This valve is not compatible with nitric acid, hydrofluoric acid, or chlorine.
Note 3: C (with coated metal section) is included in the E Fluid P item.
50
Ø6.3
NC (normally closed)
NO (normally open)
Double acting
Standard
For ammonia
For nitric acid, for hydrofluoric acid (Note 3)
For high temperature (5 to 160˚C) (Note 2)
3/8" X 1/4" tube connection
Ø6
3/8" X 1/4" tube connection
3/8" X 1/4" tube connection
Ø7
Ø10 X Ø8 tube connection
Ø10 X Ø8 tube connection
3/8" X 1/4" tube connection
Ø10 X Ø8 tube connection
3/8" X 1/4" tube connection
Ø10 X Ø8 tube connection
Ø8
Fluid
Blank
M
P
Y
F
Ø8
No. of stations
1
to
5
E
Ø8
Option
0
1
6
D
Ø8
3/8" X 1/4" tube connection
C
Ø10 X Ø8 tube connection
1
2
3
3/8" X 1/4" tube connection
Ø10 X Ø8 tube connection
Orifice
Symbol Descriptions
A Actuation
10UP 10BUP 10UA 10BUA 10UR 10BUR 10UK 10BUK 10BUW
Super 300 type
F-LOCK 20A series F-LOCK 60 series Final lock fitting FLARTEC
Pillar fitting P series fitting integrated type fitting integrated type integrated type
fitting
integrated type
integrated type
(Note 1)
(Note 1)
(Note 1)
(Note 1)
GAMD3*2Series
How to order
1 2
12US
1
C
Model No.
Actuation
B
Option
M W
E
Fluid
Connection
F
D
AMD3*2
A
3
AMD0*2
GAMD3
AMDZ
AMD0
How to order
GAMD3*2 Series (Connection: Ø12, 1/2" tube)
Port A position
No. of stations
Ø10
1/2" X 3/8" tube connection
1/2" X 3/8" tube connection
Ø9
Ø12 X Ø10 tube connection
1/2" X 3/8" tube connection
Ø12 X Ø10 tube connection
1/2" X 3/8" tube connection
Ø12 X Ø10 tube connection
1/2" X 3/8" tube connection
Ø12 X Ø10 tube connection
Ø10
Ø9.4
NC (normally closed)
NO (normally open)
Double acting
ON/OFF only
With flow adjustment
With indicator
AMB characteristics MMD*02 GMMD*02 MMD*0
1 station
to
5 stations
Fluid
(Note 1)
(Note 1)
(Note 1)
(Note 1)
Standard
For ammonia
For nitric acid, for hydrofluoric acid (Note 3)
For high temperature (5 to 160˚C) (Note 2)
(Note 1)
(Note 1)
(Note 1)
(Note 1)
Flow
Blank
M
P
Y
F
Ø10
No. of stations
1
to
5
E
Ø10
Option
0
1
6
D
Ø10
1/2" X 3/8" tube connection
C
Ø12 X Ø10 tube connection
1
2
3
1/2" X 3/8" tube connection
Ø12 X Ø10 tube connection
Orifice
Symbol Descriptions
A Actuation
12UP 15BUP 12UA 15BUA 12UR 15BUR 12UK 15BUK 15BUW
Super 300 type
F-LOCK 20A series F-LOCK 60 series Final lock fitting FLARTEC
Pillar fitting P series fitting integrated type fitting integrated type integrated type
fitting
integrated type
integrated type
Port A position
Blank
L
W
Right
Left
Both sides
Available with PTFE machined body.
Model No. for type with coated metal section
GAMD3
A 2
B
C
D
E
F
C
TMD*02
Coated
Model No. with operation port reinforcement ring (Designate R at end of Model No.)
A 2
B
C
D
E
F
R
AMS AMDS TQAS regulator KML
GAMD3
With reinforcement ring
Model No. for type with coated metal section + operation port reinforcement ring
GAMD3
A 2
B
C
D
E
F
C
R
With reinforcement ring
Fine
Coated
AMGZ0
High-pressure
AMD5*2 AMG00 AMG*02 GAMD**2 specifications AMD
Connection
12US 15BUS 12UJ 15BUJ
Super type Pillar fitting Super 300 type
integrated type
Pillar fitting J series
integrated type
AMD4*2
B
Note on model No. selection
Others
Solenoid
valve
Note 1: The final lock fitting nut and operation air piping could interfere, so check dimensions before selecting.
Note 2: This valve is not compatible with nitric acid, hydrofluoric acid, or chlorine.
Note 3: C (with coated metal section) is included in the E Fluid P item.
51
GAMD4*2Series
How to order
GAMD4*2 Series
GAMD4
1 2
20BUS
6
C
Model No.
A
Actuation
B
2
Option
M
E
L
Fluid
Connection
F
D
Port A position
No. of stations
B Connection
20BUS 20BUJ 20BUP 20BUA 20BUR 20BUK 20BUW
FLARTEC
fitting integrated type
Final lock
fitting integrated type
F-LOCK 60 series
fitting integrated type
F-LOCK 20A series
fitting integrated type
Super 300 type Pillar fitting
P series integrated type
Super 300 type Pillar fitting
J series integrated type
Super type Pillar
fitting integrated type
3/4" X 5/8" tube connection
Symbol Descriptions
A Actuation
1
2
3
C
Ø16
Ø15
ON/OFF only
With flow adjustment
With indicator
No. of stations
1 station
to
5 stations
Fluid
Blank
M
P
Y
F
Ø16
Option
1
to
5
E
Ø16
NC (normally closed)
NO (normally open)
Double acting
0
1
6
D
Orifice Ø16
Standard
For ammonia
For nitric acid, for hydrofluoric acid (Note 2)
For high temperature (5 to 160˚C) (Note 1)
Port A position
Blank
L
W
Right
Left
Both sides
Available with PTFE machined body.
Model No. for type with coated metal section
GAMD4
A 2
B
C
D
E
F
C
Coated
Model No. with operation port reinforcement ring (Designate R at end of Model No.)
GAMD4
A 2
B
C
D
E
F
R
With reinforcement ring
Model No. for type with coated metal section + operation port reinforcement ring
GAMD4
A 2
B
C
D
E
F
C
Coated
R
With reinforcement ring
Note on model No. selection
Note 1: This valve is not compatible with nitric acid, hydrofluoric acid, or chlorine.
Note 2: C (with coated metal section) is included in the E Fluid P item.
52
Ø16 Ø14.7
GAMD5*2Series
How to order
1 2
25US
1
C
Model No.
Actuation
B
Option
P W
E
Fluid
Connection
F
D
AMD3*2
A
3
AMD0*2
GAMD5
AMDZ
AMD0
How to order
GAMD5*2 Series
Port A position
No. of stations
AMD4*2
Connection
25US 25BUS 25UJ 25BUJ
Super type Pillar fitting Super 300 type
integrated type
Pillar fitting J series
integrated type
B
AMGZ0
High-pressure
AMD5*2 AMG00 AMG*02 GAMD**2 specifications AMD
Ø20
1" X 7/8" tube connection
1" X 7/8" tube connection
Ø20
Ø25 X Ø22 tube connection
1" X 7/8" tube connection
Ø25 X Ø22 tube connection
1" X 7/8" tube connection
(Note 2)
1" X 7/8" tube connection
Ø25 X Ø22 tube connection
Ø20
Ø20
NC (normally closed)
NO (normally open)
Double acting
ON/OFF only
With flow adjustment
With indicator
AMB characteristics MMD*02 GMMD*02 MMD*0
1 station
to
4 stations
Fluid
Standard
For ammonia
For nitric acid, for hydrofluoric acid (Note 1)
Flow
Blank
M
P
F
Ø20
No. of stations
1
to
4
E
Ø20
Option
0
1
6
D
Ø20
1" X 7/8" tube connection
C
Ø25 X Ø22 tube connection
1
2
3
1" X 7/8" tube connection
Ø25 X Ø22 tube connection
Orifice
Symbol Descriptions
A Actuation
25UP 25BUP 25BUA 25UR 25BUR 25UK 25BUK 25BUW
F-LOCK
Super 300 type
F-LOCK 60 series Final lock fitting FLARTEC
series
Pillar fitting P series 20Afitting
fitting integrated type integrated type
fitting
integrated type integrated type
integrated type
Port A position
Blank
L
W
Right
Left
Both sides
Available with PTFE machined body.
Model No. for type with coated metal section
GAMD5
A 2
B
C
D
E
F
C
TMD*02
Coated
Model No. with operation port reinforcement ring (Designate R at end of Model No.)
A 2
B
C
D
E
F
R
AMS AMDS TQAS regulator KML
GAMD5
With reinforcement ring
Model No. for type with coated metal section + operation port reinforcement ring
GAMD5
A 2
B
C
D
E
F
C
With reinforcement ring
Fine
Coated
R
Note on model No. selection
Others
Note 1: C (with coated metal section) is included in the E Fluid P item.
Note 2: Also usable for the Ø25 x Ø22 diameter tube connection.
Solenoid
valve
53
3
GAMD45*2Series
Dimensions
Standard type
Port A position: Blank
·GAMD3*2- *1
A
·GAMD4*2- *1
Port A position: L
Port A position: W
A
A
A
·GAMD5*2- *1
B
B
B
B
B
B
B
B
Port A
F
Port B
Port B
Port B
(L)
5
I
Port A
G
F
H
(L)
X
(L)
X
X
Operation port Rc1/8
(NC type)
Y
Y
A
E
B
C
D
Y
N
ØP
M
54
4-O
B
3
GAMD45*2Series
Dimensions
AMDZ
AMD0
Dimensions
B
GAMD3*2
21
59
GAMD4*2
27
79
GAMD5*2
35
101
GAMD3*2
21
GAMD4*2
2
5
F
G
H
I
M
89
96
35
18
38
36
36
-
22±0.3
M6 depth 9
116
125
46
23
48
46
46
-
28±0.3
M8 depth 10
143
153
60
30
62
60
60
-
40±0.3
M8 depth 13
59
89
96
35
18
38
74
36
38±0.3
22±0.3
M6 depth 9
27
79
116
125
46
23
48
94
46
48±0.4
28±0.3
M8 depth 10
GAMD5*2
35
101
143
153
60
30
62
122
60
62±0.4
40±0.3
M8 depth 13
GAMD3*2
21
59
89
96
35
18
38
112
36
76±0.4
22±0.3
M6 depth 9
GAMD4*2
27
79
116
125
46
23
48
142
46
96±0.5
28±0.3
M8 depth 10
GAMD5*2
35
101
143
153
60
30
62
184
60
124±0.5
40±0.3
M8 depth 13
GAMD3*2
21
59
89
96
35
18
38
150
36
114±0.5
22±0.3
M6 depth 9
GAMD4*2
27
79
116
125
46
23
48
190
46
144±0.5
28±0.3
M8 depth 10
GAMD5*2
35
101
143
153
60
30
62
246
60
186±0.7
40±0.3
M8 depth 13
GAMD3*2
21
59
89
96
35
18
38
188
36
152±0.7
22±0.3
M6 depth 9
GAMD4*2
27
79
116
125
46
23
48
238
46
192±0.7
28±0.3
M8 depth 10
GAMD3*2 (10mm·3/8 ")
*1 (Connection model No.)
GAMD4*2
GAMD3*2 (12mm·1/2 ")
L
P
10US
25
8
10BUS
25
8
10UJ
23
8
10BUJ
23
10UP
*1 (Connection model No.)
L
P
12US
29.5
10
15BUS
29.5
10
12UJ
27
8
15BUJ
25
8
10BUP
25
10UA
N
O
GAMD5*2
*1 (Connection model No.)
*1 (Connection model No.)
L
P
20BUS
39
16
20BUJ
34
16
25US
43.5
20
25BUS
43.5
10
20BUP
36
16
20
25UJ
41
27
10
20BUA
31
20
16
25BUJ
41
12UP
29
10
20BUR
20
44
15
25UP
43
8
15BUP
29
10
20
20BUK
36.5
16
25BUP
43
21
8
12UA
25
10
20
20BUW
38
14.7
25BUA
40
10BUA
21
8
15BUA
25
10
25UR
20
49.5
10UR
37
7
12UR
37
9
25BUR
20
51
10BUR
39
6
15BUR
39
9
20
25UK
40.5
10UK
30
8
12UK
33
20
10
25BUK
40.5
10BUK
30
8
15BUK
20
33
10
25BUW
48
10BUW
32.5
6.3
15BUW
20
33.5
9.4
Flow
P
AMB characteristics MMD*02 GMMD*02 MMD*0
L
With flow adjustment
AMGZ0
High-pressure
AMD5*2 AMG00 AMG*02 GAMD**2 specifications AMD
4
E
AMD4*2
3
D
With indicator
·GAMD**2-*-6
Y
Y
X
X
Y
Y
Fine
AMS AMDS TQAS regulator KML
X
TMD*02
X
(MAX Q)
·GAMD**2-*-1
(MAX R)
1
C
AMD3*2
A
AMD0*2
No. of
stations Model No.
Model No.
R
GAMD3*2
98
GAMD4*2
149
GAMD4*2
129
GAMD5*2
185
GAMD5*2
158
Solenoid
valve
Q
120
Others
Model No.
GAMD3*2
55
Air-operated valve for chemical liquids
High-pressure specifications
3
4
5
3
4
5
3
4
5
AMD *2 / AMG 02 / GAMD *2 Series
Pressure specifications
B
Descriptions
Fluid temperature
Q
˚C
5 to 90
Working pressure range MPa
Back pressure
A —> B, B —> A: 0 to 0.3 (Note 2)
Operation pressure range MPa
A —> B, B —> A: 0 to 0.4
0 to 0.3 (Note 2)
0 to 0.4
NC/NO: 0.4 to 0.5, double acting: 0.35 to 0.4
NC/NO: 0.5 to 0.6, double acting: 0.4 to 0.5
MPa
Note 1: Other specifications and external dimensions are the same as the standard type. Note that the fluid temperature is 5 to 90 ˚C.
Note 2: Fluid pressure range is usable within the range shown in Fig. 1.
Back pressure is the same value as the fluid pressure range (B—> A).
B—
> A [MPa]
(Port B side pressure)
0.3
0.2
0.1
> B [MPa]
A—
(Port A side pressure)
0
0
0.1
0.2
0.3
0.4
0.5
Fig. 1: Working fluid pressure range (B specifications)
How to order
3
AMD45*2 series
3
1
AMD45
2
15BUS
0
4
P
B
High-pressure specifications
F
A
Actuation
C
B
Option
Connection
D
E
Fluid
Operation port direction
B
Double port 0.3MPa specifications
Q
Double port 0.4MPa specifications
Note on model No. selection
Note 1: A to E are the same as standard. See individual model pages for selection.
(AMD3*2: page 10, AMD4*2: page 20, AMD5*2: page 28)
Note 2: When combining with the type with a coated metal section (C), with operation port reinforcement ring (R), and base installation (X),
designate the model as - C D E CR F X.
Note 3: If the F item is Q, the type with a bypass cannot be used.
3
AMD45*2 series (stainless steel body)
3
1
AMD45
2
8
0
A
4
B
F
A
Actuation
C
B
Option
Connection
E
D
Operation port direction
Actuator material
High-pressure specifications
B
Double port 0.3MPa specifications
Q
Double port 0.4MPa specifications
Note on model No. selection
Note 1: A to E are the same as the standard stainless steel body. See individual model pages for selection.
Note that if no symbol is indicated for D , omit the preceding hyphen (-) when indicating the model.
(AMD3*2: page 16, AMD4*2: page 24, AMD5*2: page 32)
56
Read the precautions on pages 7 to 12 in the introduction before use.
3
3
3
AMD45*2 / AMG4502 / GAMD45*2Series
How to order
AMDZ
AMD0
How to order
3
AMG4502 series
15BUS
1
M
L
AMD0*2
3
AMG4502
B
A
D
Option
Connection
C
Port A position
Fluid
AMD3*2
E
B
High-pressure specifications
Double port 0.3MPa specifications
Q
Double port 0.4MPa specifications
AMD4*2
B
Note on model No. selection
AMGZ0
High-pressure
AMD5*2 AMG00 AMG*02 GAMD**2 specifications AMD
Note 1: A to D are the same as the standard stainless steel body. See pages 40 to 47 for selection.
Note 2: When combining with the type with coated metal section (C), and with operation port reinforcement ring (R), designate the model
as - C D CR E .
3
GAMD45*2 series
3
GAMD45 1
2
15BUS
1
2
M
L
B
G
A
Actuation
C
B
Connection
Option
D
E
Fluid
No. of stations F Port A position
High-pressure specifications
B
Double port 0.3MPa specifications
Q
Double port 0.4MPa specifications
Note on model No. selection
Note 1: A to D are the same as the standard stainless steel body. See pages 48 to 55 for selection.
AMB characteristics MMD*02 GMMD*02 MMD*0
Note 2: When combining with the type with coated metal section (C), and with operation port reinforcement ring (R), designate the model
as - D E F CR G .
Flow
TMD*02
Fine
AMS AMDS TQAS regulator KML
Others
Solenoid
valve
57
Air-operated valve for chemical liquids
1
1
1
1
2
2
2
2
3
3
3
3
Eliminating causes of particle formation with PFA-molded body
AMD2 / AMD3 / AMD4 / AMD5 Series
Orifice: Ø8/Ø10/Ø12/Ø16/Ø20/Ø22/Ø25
Subject to Export Trade Control Ordinances
*Target: Valves with Ø12 or larger orifice
Specifications
Descriptions
AMD2*-10-8
AMD3*-15-12
Working fluid
Fluid temperature
AMD4*-20-20
AMD5*-25-25
Chemical liquids, pure water, N2 gas, air
˚C
5 to 60 (5 to 90) (5 to 150) (Note 3)
Withstanding pressure MPa
1.4
Working pressure range (A —> B) MPa
0 to 0.5
0 to 0.4
0 to 0.3
Working pressure range (B —> A) MPa
0 to 0.3
0 to 0.2
0 to 0.2
Valve seat leakage cm3/min
Back pressure
0 (at, water pressure)
0 to 0.3
MPa
0 to 0.2
Ambient temperature ˚C
0 to 40
30 times/min or less
Frequency
20 times/min or less
Installation attitude
Port size (Note 1)
Orifice
Cv value
Free
Rc3/8
Rc1/2
Ø10
Ø12
Ø16
Ø20
Ø22
Ø25
1.25
1.8
2.5
5.2
8
9.5
12
Operation Operation pressure MPa
section Operation port
NC/NO 0.3 to 0.5, double acting 0.2 to 0.3
Rc1/8
Note 1: The fitting integrated type is also available.
Note 2: See pages 72 and 73 for flow characteristics.
Note 3: 5 to 40 ˚C for hydrofluoric acids.
58
Rc1
Rc3/4
Ø8
Read the precautions on pages 7 to 12 in the introduction before use.
1
AMD*23Series
Internal structure and parts list
AMDZ
AMD0
Internal structure and parts list
AMD0*2
AMD3*2
1
AMD4*2
4
Port B
Port A
No.
3
Parts name
Material
1
Actuator assembly
CPVC
Quantity
1
2
Body
PFA
1
3
Mounting plate
CPVC
1
4
Diaphragm
PTFE
1
The material differs with the model. Contact CKD for details.
AMGZ0
High-pressure
AMD5*2 AMG00 AMG*02 GAMD**2 specifications AMD
2
Flow
AMB characteristics MMD*02 GMMD*02 MMD*0
TMD*02
Fine
AMS AMDS TQAS regulator KML
Others
Solenoid
valve
59
1
AMD223Series
How to order
AMD2 Series
AMD2
1
10
8
Model No.
1
F
Orifice
B
B
Connection
Connection
10
Rc
3/8
10US
D
Note on model No. selection
Note 1: Designate FM when selecting F and M.
60
Fluid
D Fluid
Blank Standard
For medium temperature (5 to 90˚C) (Note 1)
F
M For ammonia (Note 1)
10BUA
Ø8
3/8" X 1/4" tube connection
C Option
Blank ON/OFF only
1
With flow adjustment
Option
10UA
Ø10 X Ø8 tube connection
C
Actuation
1
NC (normally closed)
2
NO (normally open)
3
Double acting
10BUF
3/8" X 1/4" tube connection
Actuation
10UF
Ø10 X Ø8 tube connection
A
A
3/8" X 1/4" tube connection
Ø10 X Ø8 tube connection
Orifice
Symbol Descriptions
10BUS
Super type Pillar
F-LOCK 20 series F-LOCK 20A series
fitting integrated type fitting integrated type fitting integrated type
1
AMD323Series
How to order
1
12US
10
1
AMD0*2
AMD3
AMDZ
AMD0
How to order
AMD3 Series
Y
Model No.
Connection
Connection
15
12UF
15BUF
12UA
15BUA
Actuation
1
NC (normally closed)
2
NO (normally open)
3
Double acting
C
C
Orifice
10 Ø10
12 Ø12
Orifice
D
D Option
Blank ON/OFF only
With flow adjustment (Note 1)
1
With bypass (Note 1)
2
With flow adjustment and bypass (Note 1)
3
Option
Fluid
AMB characteristics MMD*02 GMMD*02 MMD*0
E
AMGZ0
High-pressure
AMD5*2 AMG00 AMG*02 GAMD**2 specifications AMD
1/2" X 3/8" tube connection
Ø12 X Ø10 tube connection
1/2" X 3/8" tube connection
Ø12 X Ø10 tube connection
Actuation
1/2" X 3/8" tube connection
A
A
15BUS
Super type Pillar
F-LOCK 20 series F-LOCK 20A series
fitting integrated type fitting integrated type fitting integrated type
Ø12 X Ø10 tube connection
Symbol Descriptions
12US
AMD4*2
Rc
1/2
AMD3*2
B
B
Flow
E Fluid
Blank Standard
For medium temperature (5 to 90˚C)
F
For high temperature (5 to 150˚C) (Nitric acid not permissible)
Y
For high temperature (5 to 150˚C) (Sulfuric acid not permissible)
K
M Liquid ammonia (Note 2)
Note on model No. selection
Note 1: The E item fluid Y and K cannot be designated when using the type with flow rate adjustment and bypass.
Note 2: M can be designated with F (FM), but it cannot be selected with Y or K.
TMD*02
Fine
AMS AMDS TQAS regulator KML
Others
Solenoid
valve
61
1
AMD423Series
How to order
AMD4 Series
AMD4
1
20
20
1
F
Model No.
B
Connection
Rc
3/4
Symbol Descriptions
A
A
Actuation
C
C
Orifice
16 Ø16
20 Ø20
Orifice
D
Actuation
1
NC (normally closed)
2
NO (normally open)
3
Double acting
D Option
Blank ON/OFF only
With flow adjustment (Note 1)
1
With bypass (Note 1)
2
With flow adjustment and bypass (Note 1)
3
Option
E
Fluid
E Fluid
Blank Standard
For medium temperature (5 to 90˚C)
F
For high temperature (5 to 150˚C) (Nitric acid not permissible)
Y
For high temperature (5 to 150˚C) (Sulfuric acid not permissible)
K
M Liquid ammonia (Note 2)
Note on model No. selection
Note 1: The E item fluid Y and K cannot be designated when using the type with flow rate adjustment and bypass.
Note 2: M can be designated with F (FM), but it cannot be selected with Y or K.
62
20BUS
20BUF
20BUA
F-LOCK 20A series
fitting integrated type
20
F-LOCK 20 series
fitting integrated type
Connection
Super type Pillar
fitting integrated type
B
3/4" X 5/8" tube connection
1
AMD523Series
How to order
2
25
25
1
AMD0*2
AMD5
AMDZ
AMD0
How to order
AMD5 Series
F
Model No.
Connection
Connection
25
Actuation
1
NC (normally closed)
2
NO (normally open)
3
Double acting
C
C
Orifice
22 Ø22
25 Ø25
Orifice
D
D Option
Blank ON/OFF only
With flow adjustment (Note 1)
1
With bypass (Note 1)
2
With flow adjustment and bypass (Note 1)
3
Option
Fluid
AMB characteristics MMD*02 GMMD*02 MMD*0
E
AMGZ0
High-pressure
AMD5*2 AMG00 AMG*02 GAMD**2 specifications AMD
Actuation
1" X 7/8" tube connection
A
A
25BUS
Super type Pillar
fitting integrated type
Ø25 X Ø22 tube connection
Symbol Descriptions
25US
AMD4*2
Rc 1
AMD3*2
B
B
Flow
E Fluid
Blank Standard
For medium temperature (5 to 90˚C)
F
For high temperature (5 to 150˚C) (Nitric acid not permissible)
Y
For high temperature (5 to 150˚C) (Sulfuric acid not permissible)
K
M Liquid ammonia (Note 2)
Note on model No. selection
Note 1: The E item fluid Y and K cannot be designated when using the type with flow rate adjustment and bypass.
Note 2: M can be designated with F (FM), but it cannot be selected with Y or K.
TMD*02
Fine
AMS AMDS TQAS regulator KML
Others
Solenoid
valve
63
1
AMD*23Series
Dimensions
Rc screw type
·AMD2*
·AMD3*
·AMD4*
K
I
J
·AMD5*
4-ØL
G
H
X
Control port Rc1/8
(NC type)
E
F
Y
2-A
Port A
B
C
D
Port B
ØM
Symbol
A
B
C
D
AMD2 * -10-8
Rc3/8
7
22
48
AMD3 * -15-12
Rc1/2
8
30
64
AMD4 * -20-20
Rc3/4
8
34
71
AMD5 * -25-25
Rc1
10
39
85
Model No.
* Actuation
1
NC
2
NO
3
Double acting
64
F
G
H
I
J
K
L
80
MAX 90
34
44
36
46
56
5.8
8
101
MAX 113
42
62
46
57
68
5.8
12
116
MAX 133
56
80
58
71
84
6.8
20
14
MAX 160
70
88
68
85
100
6.8
25
E
M
1
AMD*23Series
Dimensions
AMDZ
AMD0
Dimensions
AMD0*2
With low adjustment/with bypass
AMD3*2
AMD4*2
AMGZ0
High-pressure
AMD5*2 AMG00 AMG*02 GAMD**2 specifications AMD
M
Y
(With flow adjustment)
X
Flow
AMB characteristics MMD*02 GMMD*02 MMD*0
N
(With bypass)
TMD*02
AMS AMDS TQAS regulator KML
Symbol
Model No.
M
N
AMD2 * -10-8-1
MAX 111
—
AMD3 * -15-12-3
MAX 144
MAX 103
AMD4 * -20-20-3
MAX 162
MAX 130
AMD5 * -25-25-3
MAX 193
MAX 148
Fine
* Actuation
NC
2
NO
3
Double acting
Others
1
Solenoid
valve
65
Air-operated valve for chemical liquids
AMB Series
High corrosion resistance and long life
Orifice: Ø2.3/Ø3.2/Ø4
Ø6/Ø8/Ø10
Ø12/Ø16/Ø20
Ø25
Subject to Export Trade Control Ordinances
*Target: Valves with Ø12 or larger orifice
and PTFE body material
Specifications
Descriptions
AMB0*-6-5
AMB1*-6-5
AMB2*-6-4
AMB2*-8-5
AMB3*-10-4
AMB3*-15-5
AMB4*-20-4
AMB4*-20-5
AMB5*-25-5
Chemical liquids (Note 1), pure water, N2 gas, air
Working fluid
Fluid temperature (Note 2) ˚C
5 to 60
Withstanding pressure MPa
1
Working pressure range (B —> A) MPa
5 to 90
1.5
0 to 0.5
Working pressure range (A —> B) MPa
0 to 0.1
0 to 0.2
0 to 0.45
0 to 0.07
0 to 0.03
0 (at, water pressure)
Valve seat leakage cm3/min
MPa
0 to 0.3
Ambient temperature ˚C
0 to 60
Back pressure
AMB3*-10-3
0 to 0.5
0 to 0.45
0 to 0.2
0 to 40
30 times/min or less
Frequency
20 times/min or less
Rc1/8
Connection
Orifice (Cv value)
Operation Operation pressure MPa
section Operation port
15 times/min or less
Free
Installation attitude
Rc1/8
Ø2.3 (0.12) Ø3.2 (0.3)
Rc1/8
Rc1/4
Rc3/8
Rc3/8
Rc1/2
Rc3/4
Rc3/4
Rc1
Ø4 (0.36)
Ø6 (0.7)
Ø8 (1.5)
Ø10 (1.8)
Ø12 (2.5)
Ø16 (6)
Ø20 (7)
Ø25 (12)
0.3 to 0.5
M5
Rc1/8
Note 1: Check the compatibility of the product's configuration materials and working fluid before use.
Note 2: 5 to 40 ˚C for material symbol "H".
5 to 120 ˚C for material symbols "S" and "E".
5 to 60 ˚C for material symbol "P".
Internal structure and parts list
1
4
2
Port B
Port A
No.
3
Parts name
Material
1
Actuator assembly
CPVC
1
2
Body
PTFE
1
3
Mounting plate
SUS
1
4
Bellows
PTFE
1
The material differs with the model. Contact CKD for details.
66
Read the precautions on pages 7 to 12 in the introduction before use.
Quantity
AMBSeries
How to order
AMB0
1
8
4
D
C
AMB3
Material
(Note 1) E Mounting plate
(Note 2)
AMD3*2
AMB2
B1
AMD0*2
AMB1
P
AMDZ
AMD0
How to order
Orifice
AMD4*2
AMB4
AMB5
B
Connection
Symbol Descriptions
A
A
Actuation
1
NC (normally closed)
2
NO (normally open)
3
Double acting
C
Orifice
3
Refer to the right.
4
Refer to the right.
5
Refer to the right.
Actuation
D
Actuator
CPVC
CPVC
SUS304
CPVC
SUS316
CPVC
CPVC
CPVC
15
Rc
1/2
20
Rc
3/4
25
Rc
1
Ø6
Ø12
Ø16
Ø20
Ø25
Rod
SUS304
SUS304
SUS304
SUS304
SUS304
CPVC
PVDF
SUS303
Flow
Body
PTFE
PVC
SUS304
SUS304
SUS316
PTFE
PTFE
SUS316
AMB5
E
Mounting plate
Blank Side mounting plate (SUS304)
B1
Port end mounting plate (SUS304)
Corrosion proof
G
+ side mounting plate with no exposed metal sections (CPVC)
GB
Corrosion proof
+ port end mounting plate with no exposed metal sections (CPVC)
AMB characteristics MMD*02 GMMD*02 MMD*0
Material
Blank
H
S
C
E
P
F
D
10
Rc
3/8
AMB4
Ø8
Ø10
Ø4
Ø2.3 Ø3.2
AMB3
AMGZ0
High-pressure
AMD5*2 AMG00 AMG*02 GAMD**2 specifications AMD
AMB0 AMB1
AMB2
B Connection
6
6
6
8
Rc
Rc
Rc
Rc
1/8
1/8
1/8
1/4
Series
(Note 5)
(Note 6)
(Note 6)
(Note 6)
(Note 6)
(Note 6)
(Note 6)
(Note 6)
(Note 6)
(Note 6)
(Note 6)
(Note 6)
(Note 6)
(Note 6)
TMD*02
Others
Solenoid
valve
67
Fine
Note 1: For material symbol P, the piston rod material in the actuator has been changed from SUS to CPVC.
Designate this type when using strong acids (hydrofluoric acid, hydrochloric acid, nitric acid, etc.) The working fluid temperature is 5 to 60˚C.
Note 2: For material symbol F, PVDF is used for the piston rod. This type is used with strong acids at fluid temperatures between 5 and 90 ˚C.
Note 3: Designate a model with material symbol S or E when using solvents such as acetone or trichloroethylene.
Note 4: Use the AMD type with option M when using ammonia.
Note 5: AMB0 and AMB1 are installed on the back. (See the external dimension drawings.)
Note 6: G and GB are used when no symbol or H is designated for D Material symbol.
If P or F is designated for D Material symbol, the G plate is attached with no symbol.
Designate PB or FB for a port end mounting plate with P or F.
AMS AMDS TQAS regulator KML
Note on model No. selection
AMBSeries
Dimensions
AMB0-6-5
Port B
35
2-Rc1/8
57
53
Control port M5 depth 5
(NC type)
14.5
Port A
Ø2.3
20±0.3
30
20±0.3
4-M3 depth 5
AMB1-6-5
56
62
Control port M5 depth 5
(NC type)
38
2-Rc1/8
Port B
14.5
Port A
Ø3.2
32
22±0.3
4-M3 depth 5
22±0.3
40
68
AMBSeries
Dimensions
AMDZ
AMD0
Dimensions
AMD0*2
AMB2 *
AMB3 *
I
J
K
AMD3*2
AMB4 *
AMB5 *
L
AMD4*2
2
AMGZ0
High-pressure
AMD5*2 AMG00 AMG*02 GAMD**2 specifications AMD
G
H
F
Control port Rc1/8
(NC type)
E
2-A
D
Port B
C
B
3 (8)
Port A
Symbol
C
D
E
F
G
H
I
J
K
L
AMB2 * -6-4
Rc1/8
18
(24)
53
(59)
89.5
(95.5)
99.5
(105.5)
46
36
50
62
Rc1/4
28
(34)
34
AMB2 * -8-5
4.5
(Ø4.8)
AMB3 * -10- 34
Rc3/8
22
(28)
71
(77)
103
(109)
115
(121)
56
40
57
68
Rc1/2
39
(45)
42
AMB3 * -15-5
5.8
(Ø5.8)
AMB4 * -20- 45
Rc3/4
52 (58)
26 (32)
93 (99)
133 (139)
149 (155)
56
72
53
73
85
5.8 (Ø5.8)
AMB5 * -25-5
Rc1
154 (160)
174 (180)
66
84
63
87
99
5.8 (Ø5.8)
M
N
O
64
72
26
74
84
28
AMB4 * -20- 5-B1
4-B1
92
104
38
AMB5 * -25-5-B1
108
120
48
* Actuation
1
NC
2
NO
3
Double acting
62.5 (68.5) 31.5 (37.5) 109 (115)
Dimensions shown in parentheses apply to corrosion proof specifications with no exposed metal sections.
(The mounting plate material is CPVC, which differs in appearance from this drawing.)
I
O
TMD*02
2
Port end mounting plate (B1)
L
AMS AMDS TQAS regulator KML
H
M
N
Symbol
Model No.
AMB2 * -6-4-B1
AMB2 * -8-5-B1
3-B1
AMB3 * -15-5-B1
Fine
AMB3 * -10- 4-B1
Others
3 (8)
Flow
B
AMB characteristics MMD*02 GMMD*02 MMD*0
A
Model No.
* Actuation
NC
2
NO
3
Double acting
Solenoid
valve
1
69
High purity chemical liquid system components
Flow characteristics
1000
Flow characteristics (water)
( /min)
Flow rate
Differential pressure - flow rate CV
values shown in parentheses
AMD5
2 (8)
AMD4
2 (5)
AMD3
2 (1.8)
AMD3
2 (1.25)
AMD0
2 (0.32)
100
10
0.05
Differential pressure
0.1
0.5
MPa
Bypass section flow characteristics (water)
Differential pressure - flow rate CV
values shown in parentheses
100
( /min)
Flow rate
AMD4
AMD5
2
2 (0.7)
AMD3
2 (0.12)
10
0.05
0.1
Differential pressure MPa
70
0.5
High purity chemical liquid system components
Flow characteristics
AMDZ
AMD0
Flow characteristics
AMD0*2
With flow adjustment (water)
P=0.2MPa
P=0.1MPa
No. of turns - flow rate
Flow rate (
/min)
2
AMD4
2
AMD4*2
140
AMD5
AMD3*2
150
100
AMGZ0
High-pressure
AMD5*2 AMG00 AMG*02 GAMD**2 specifications AMD
120
80
100
P=0.2MPa
P=0.1MPa
7
6
Flow rate (
5
60
80
/min)
60
4
AMD0
40
2
5
3
20
2
AMB characteristics MMD*02 GMMD*02 MMD*0
3
AMD3 2 (orifice Ø10)
40
4
AMD3 2 (orifice Ø8)
Flow
20
2
1
0
0.5
1
1.5
2
2.5
3
3.5
No. of dial turns
0
0.5
1
1.5
2
2.5
3
No. of dial turns
Note 1: Set the adjustment dial so that it opens at least 1/4
turn from fully closed. If closed further, vibration or
flow fluctuation, etc., may occur, depending on
working conditions.
With bypass (water)
No. of turns - flow rate
P=0.2MPa
P=0.1MPa
Flow rate (
/min)
TMD*02
10
AMD4
AMD5
2
2
AMD3
2
AMS AMDS TQAS regulator KML
15
10
Fine
5
5
Others
0.5
1
1.5
Solenoid
valve
0
No. of dial turns
71
High purity chemical liquid system components
Flow characteristics
1000
Flow characteristics (water)
( /min)
Flow rate
Differential pressure - flow rate CV
values shown in parentheses
AMD5
(12)
AMD5
AMD4
(9.5)
(8)
AMD4
(5.2)
AMD3
(2.5)
AMD3
(1.8)
AMD2
(1.25)
100
AMD0 (0.32)
10
AMDZ (0.18)
AMDZ (0.12)
0.05
0.1
0.5
Differential pressure MPa
Bypass section flow characteristics (water)
Differential pressure - flow rate CV
values shown in parentheses
100
( /min)
Flow rate
AMD5
(1.35)
AMD4
(0.7)
AMD3
(0.12)
10
0.05
0.1
Differential pressure MPa
72
0.5
High purity chemical liquid system components
Flow characteristics
AMDZ
AMD0
Flow characteristics
AMD0*2
With flow adjustment (water)
P=0.2MPa
P=0.1MPa
No. of turns - flow rate
Flow rate ( /min)
200
Flow rate ( /min)
5
AMD5
(Orifice Ø22)
AMD0
4
AMGZ0
High-pressure
AMD5*2 AMG00 AMG*02 GAMD**2 specifications AMD
6
150
AMD4*2
7
AMD3*2
AMD5
(Orifice Ø25)
P=0.2MPa
P=0.1MPa
AMD4
(Orifice Ø20)
150
100
5
3
4
3
AMD4
(Orifice Ø16)
100
2
50
AMDZ
2
AMD3 (orifice Ø12)
50
1
AMD3 (orifice Ø10)
AMD2 (orifice Ø8)
0
1
2
3
4
5
No. of adjustment rod turns from fully closed state (times)
0
1
2
3
4
5
6
No. of adjustment rod turns from fully closed state (times)
Note 1: Set the adjustment dial so that it opens at least
3/8 turn from fully closed. If closed further,
vibration or flow fluctuation, etc., may occur,
depending on working conditions.
Flow
AMB characteristics MMD*02 GMMD*02 MMD*0
With bypass (water)
P=0.2MPa
P=0.1MPa
No. of turns - flow rate
Flow rate ( /min)
AMD5
15
20
TMD*02
15
10
AMD4
AMS AMDS TQAS regulator KML
10
5
5
AMD3
Fine
0
1
2
3
No. of dial turns from fully closed state (times)
Others
Solenoid
valve
73
MMD
AMD0*2
Overview
AMD3*2
This chemical liquid manual valve
for semiconductor manufacturing
equipment is available in 1/8 inch to
1 inch port sizes and different
operations.
AMD4*2
The spring seal provides stable
sealing.
(MMD**2, GMMD**2, TMD series)
Assorted fitting variations
The easy-to-read indicator
enables open/close status to be
checked visually.
Electric catalog file list
76
84
98
102
Flow
Manifold
GMMD*02 PTFE body
7
AMB characteristics MMD*02 GMMD*02 MMD*0
Precautions Intro
2 port valve
MMD*02 PFA body
MMD*02 stainless steel body
Sister product MMD*0
Toggle valve TMD*02
AMGZ0
High-pressure
AMD5*2 AMG00 AMG*02 GAMD**2 specifications AMD
Features
No harmful polyvinyl chlorides
No harmful polyvinyl chlorides
generating toxic chlorine-based
gases are used in actuator
material.
(MMD*02, GMMD*02 Series)
AMDZ
AMD0
Chemical liquid manual valve/toggle valve
90
156
TMD*02
Fine
AMS AMDS TQAS regulator KML
Others
Solenoid
valve
Chemical liquid manual valve
3
4
5
Orifice: MMD302: Ø6.3 to Ø10
MMD402: Ø14.7 to Ø16
MMD502: Ø20
MMD 02 Series
Subject to Export Trade Control Ordinances
*Target: MMD402 and 502 only
Specifications
Descriptions
MMD302
MMD402
Working fluid
Fluid temperature
MMD502
Chemical liquids, pure water (Note 1)
˚C
5 to 90 (Note 2, 3)
Withstanding pressure MPa
1.2
Working pressure range (A -> B) MPa
0 to 0.4
Working pressure range (B -> A) MPa
0 to 0.4
Valve seat leakage cm3/min
0 (at, water pressure)
Back pressure
MPa
0 to 0.4
Ambient temperature ˚C
0 to 60
Installation attitude
Free
ODØ10 tube connection (fitting integrated type)
Connection
ODØ12 tube connection (fitting integrated type)
OD3/8" tube connection (fitting integrated type)
ODØ25 tube connection (fitting integrated type)
OD3/4" tube connection
OD1" tube connection (fitting integrated type)
(Fitting integrated type)
Nominal 16 (PVC union fitting integrated type)
OD1/2" tube connection (fitting integrated type)
Orifice
Cv value
Ø6.3 Ø6.4 Ø7.5
0.8
Ø8
1.25
Ø9.4 Ø9.5
1.8
Ø10
Nominal 20 (PVC union fitting integrated type)
Ø14.7
Ø15.9
Ø16
Ø20
5
Note 1: Check the compatibility of the product's configuration materials, working fluid, and ambient atmosphere before use.
Note 2: 5 to 50 ˚C for PVC union fitting for MMD502 connection.
Note 3: 5 to 40 ˚C for hydrofluoric acids.
76
Read the precautions on pages 7 to 12 in the introduction before use.
8
3
MMD4502Series
Internal structure and parts list
AMDZ
AMD0
Internal structure and parts list
AMD0*2
AMD3*2
1
2
Port B
AMD4*2
4
Port A
No.
Parts name
Material
1
Actuator assembly
PP
Quantity
1
2
Body
PFA
1
3
Mounting plate
PPS
1
4
Diaphragm
PTFE
1
AMGZ0
High-pressure
AMD5*2 AMG00 AMG*02 GAMD**2 specifications AMD
3
Flow
AMB characteristics MMD*02 GMMD*02 MMD*0
TMD*02
Fine
AMS AMDS TQAS regulator KML
Others
Solenoid
valve
77
MMD302Series
How to order
MMD302 Series (Connection: Ø10, 3/8" tube)
MMD302
10UJ
8
Model No.
M
Orifice
B
Fluid
A
A
Connection
Connection
10US
10BUS
10UJ
10BUJ
Super type Pillar
Super 300 type
fitting integrated type Pillar fitting J series
integrated type
10UA
10BUA
10UR
10BUR 10UK
Super 300 type
F-LOCK 20A series F-LOCK 60 series
Pillar fitting P series fitting integrated type fitting integrated type
integrated type
FLARTEC
fitting
integrated type
3/8" X 1/4" tube connection
Ø6.4
Final lock fitting
integrated type
3/8" X 1/4" tube connection
Ø7
10BUK 10BUW
Ø10 X Ø8 tube connection
3/8" X 1/4" tube connection
Ø8
Ø10 X Ø8 tube connection
3/8" X 1/4" tube connection
Ø8
Ø10 X Ø8 tube connection
3/8" X 1/4" tube connection
Ø8
10BUP
Ø10 X Ø8 tube connection
Ø8
3/8" X 1/4" tube connection
Ø10 X Ø8 tube connection
B
3/8" X 1/4" tube connection
Ø10 X Ø8 tube connection
Orifice
Symbol Descriptions
10UP
Ø7.5
Ø6.3
PFA
PTFE
Fluid
PFA: PFA molded body, PTFE: PTFE machined body
Blank Standard
PFA
M
For ammonia
P
For nitric acid, for hydrofluoric acid
PFA
Model No. for type with coated metal section
MMD302
A
8
B
C
Coated
Bottom installation type No.
MMD302
A
8
B
X
Bottom installation
Coated metal section + bottom installation type No.
MMD302
A
8
B
C
X
Coated Bottom installation
78
PFA
PFA
PTFE PFA
MMD302Series
How to order
12UJ
10
Model No.
AMD0*2
MMD302
AMDZ
AMD0
How to order
MMD302 Series (Connection: Ø12, 1/2" tube)
M
B
AMD3*2
Orifice
Fluid
Connection
Connection
12US
15BUS
12UJ
15BUJ
15BUA
12UR
15BUR 12UK
15BUK 15BUW
Final lock fitting
integrated type
FLARTEC
fitting
integrated type
1/2" X 3/8" tube connection
1/2" X 3/8" tube connection
Ø12 X Ø10 tube connection
1/2" X 3/8" tube connection
Ø10
Ø12 X Ø10 tube connection
1/2" X 3/8" tube connection
Ø10
Ø12 X Ø10 tube connection
1/2" X 3/8" tube connection
Ø10
12UA
Super 300 type
F-LOCK 20A series F-LOCK 60 series
Pillar fitting P series fitting integrated type fitting integrated type
integrated type
Ø12 X Ø10 tube connection
Ø10
1/2" X 3/8" tube connection
Ø12 X Ø10 tube connection
B
1/2" X 3/8" tube connection
Ø12 X Ø10 tube connection
Orifice
Symbol Descriptions
15BUP
Ø9.5
Ø10
Ø9.4
PFA
PFA
PFA
Fluid
PFA: PFA molded body
Blank Standard
M
For ammonia
P
For nitric acid, for hydrofluoric acid
PFA
PFA
PFA
PFA
AMGZ0
High-pressure
AMD5*2 AMG00 AMG*02 GAMD**2 specifications AMD
Super type Pillar
Super 300 type
fitting integrated type Pillar fitting J series
integrated type
12UP
AMD4*2
A
A
Flow
AMB characteristics MMD*02 GMMD*02 MMD*0
Model No. for type with coated metal section
MMD302
A
10
B
C
Coated
Bottom installation type No.
MMD302
A
10
B
X
Bottom installation
MMD302
A
10
B
C
TMD*02
Coated metal section + bottom installation type No.
X
Fine
AMS AMDS TQAS regulator KML
Coated Bottom installation
Others
Solenoid
valve
79
MMD402Series
How to order
MMD402 Series
MMD402
20BUA
Model No.
16
M
Orifice
B
Fluid
A
A
Connection
Connection
20BUS 20BUJ 20BUP 20BUA 20BUR 20BUK 20BUW
FLARTEC
fitting integrated type
Final lock
fitting integrated type
F-LOCK 60 series
fitting integrated type
F-LOCK 20A series
fitting integrated type
Super 300 type Pillar fitting
P series integrated type
SUPER 300 type Pillar fitting
J series integrated type
Super type Pillar
fitting integrated type
3/4" X 5/8" tube connection
Symbol Descriptions
B
Orifice
Ø16
Ø16
Ø16
Ø16
Ø15.9
Ø16 Ø14.7
Fluid
PFA: PFA molded body
Blank Standard
M
For ammonia
P
For nitric acid, for hydrofluoric acid
Model No. for type with coated metal section
MMD402
A
16
B
C
Coated
Bottom installation type No.
MMD402
A
16
B
X
Bottom installation
Coated metal section + bottom installation type No.
MMD402
A
16
B
C
X
Coated Bottom installation
80
PFA
PFA
PFA
PFA
PFA
PFA
PFA
MMD502Series
How to order
20AU
20
Model No.
M
AMD0*2
MMD502
AMDZ
AMD0
How to order
MMD502 Series
Connection
B
Fluid
A
Connection
25US
25BUS
25UJ
25BUJ
25BUR
25BUK 25BUW
Final lock fitting
integrated type
20AU
Nominal 20
Nominal 16
Ø20
15AU
FLARTEC PVC union fitting
integrated type
fitting
integrated type
1" X 7/8" tube connection
1" X 7/8" tube connection
Ø20
25UK
Ø25 X Ø22 tube connection
1" X 7/8" tube connection
Ø20
Ø25 X Ø22 tube connection
Ø20
1" X 7/8" tube connection
(Note 1)
1" X 7/8" tube connection
Ø20
25UR
F-LOCK F-LOCK 60 series
Super 300 type
20A series
Pillar fitting P series
fitting integrated type
fitting
integrated type integrated type
Ø25 X Ø22 tube connection
Ø20
1" X 7/8" tube connection
Ø25 X Ø22 tube connection
B
1" X 7/8" tube connection
Ø25 X Ø22 tube connection
Orifice
Symbol Descriptions
25BUP 25BUA
Ø20
Ø20
PTFE
PFA
Fluid
PFA: PFA molded body, PTFE: PTFE machined body
Blank Standard
PFA
M
For ammonia
P
For nitric acid, for hydrofluoric acid
PFA
PFA
PFA
PTFE
PFA
AMGZ0
High-pressure
AMD5*2 AMG00 AMG*02 GAMD**2 specifications AMD
Super type Pillar
Super 300 type
fitting integrated type Pillar fitting J series
integrated type
25UP
AMD4*2
A
AMD3*2
Orifice
Flow
AMB characteristics MMD*02 GMMD*02 MMD*0
Model No. for type with coated metal section
MMD502
A
20
B
C
Coated
Bottom installation type No.
MMD502
A
20
B
X
Bottom installation
MMD502
A
20
B
C
TMD*02
Coated metal section + bottom installation type No.
X
AMS AMDS TQAS regulator KML
Coated Bottom installation
Note on model No. selection
Note 1: Also usable for the Ø25 x Ø22 diameter tube connection.
Fine
Others
Solenoid
valve
81
3
MMD4502Series
Dimensions
Fitting integrated type
·MMD302- *1
·MMD402- *1
·MMD502- *1
L
I
M
4-ØN
(MAX F)
G
H
Port A
C
D
Port B
ØB
A
Symbol
C
D
F
G
H
I
L
M
N
MMD302
8.5
21
106
22
36
50
36
62
7
MMD402
9
27
134
28
46
64
46
82
9
MMD502
10
35
166
40
60
78
60
96
9
A
B
A
B
10US
86
8
12US
95
10
10BUS
86
8
15BUS
95
82
8
12UJ
82
8
15BUJ
86
8
12UP
86
8
15BUP
78
8
12UA
78
8
15BUA
110
7
12UR
114
6.4
15BUR
96
7.5
12UK
96
7.5
15BUK
101
6.3
15BUW
MMD3 (10mm)
*1 (Connection model No.)
10UJ
10BUJ
10UP
10BUP
10UA
10BUA
10UR
10BUR
10UK
10BUK
10BUW
82
MMD3 (12mm)
*1 (Connection model No.)
MMD4
*1 (Connection model No.)
MMD5
A
B
A
B
20BUS
124
16
25US
*1 (Connection model No.)
147
20
10
20BUJ
114
16
25BUS
147
20
90
10
20BUP
118
16
25UJ
142
20
90
10
20BUA
108
16
25BUJ
142
20
94
10
20BUR
134
15.9
25UP
146
20
94
10
20BUK
119
16
25BUP
146
20
86
10
20BUW
122
14.7
25BUA
140
20
86
10
25UR
159
20
110
9.5
25BUR
162
20
114
9.5
25UK
141
20
102
10
25BUK
141
20
102
10
25BUW
156
20
103
9.4
3
MMD4502Series
Dimensions
AMDZ
AMD0
Dimensions
AMD0*2
PVC union fitting integrated type (MMD502)
AMD3*2
AMD4*2
AMGZ0
High-pressure
AMD5*2 AMG00 AMG*02 GAMD**2 specifications AMD
Port B
Port A
Ø20
94
AMB characteristics MMD*02 GMMD*02 MMD*0
Flow
Bottom installation type
O
O
Model No.
O
P
MMD302
22±0.3
M6 depth 9
MMD402
28±0.3
M8 depth 10
MMD502
40±0.3
M8 depth 13
4-P
TMD*02
Fine
AMS AMDS TQAS regulator KML
Others
Solenoid
valve
83
Stainless steel body chemical liquid manual valve
3
4
5
MMD 02 Series
Orifice: MMD302: Ø8/Ø10
MMD402: Ø16
MMD502: Ø20
Specifications
Descriptions
MMD302
MMD402
Working fluid
Fluid temperature
Chemical liquids, pure water (Note 1)
˚C
5 to 90
Withstanding pressure MPa
1.2
Working pressure range (A —> B) MPa
0 to 0.4
Working pressure range (B —> A) MPa
0 to 0.4
Valve seat leakage cm3/min
0 (at, water pressure)
Back pressure
MMD502
MPa
0 to 0.4
Ambient temperature ˚C
0 to 60
Installation attitude
Free
Rc1/4·Rc3/8
Connection
Ø3/8" SUS weld tube
Rc1/2
Ø3/8" double barbed fitting (Note 2)
Ø3/4" SUS weld tube
Ø1/2" SUS weld tube
Ø3/4" double barbed fitting (Note 2)
Ø1" double barbed fitting (Note 2)
Ø1/2" double barbed fitting (Note 2)
Orifice
Ø16
Ø8/Ø10
Ø20
Note 1: Check the compatibility of the product's configuration materials, working fluid, and ambient atmosphere before use.
Note 2: For the double-barbed fitting, fluorine-based lubricant is applied on the sliding surface of the front ferrule and fitting.
Internal structure and parts list
1
3
2
Port B
Port A
No.
Parts name
Material
1
Actuator assembly
PP
1
2
Body
SUS316L
1
3
Diaphragm
PTFE
1
The material differs with the model. Contact CKD for details.
84
Read the precautions on pages 7 to 12 in the introduction before use.
Quantity
MMD4502Series
3
How to order
AMD3*2
AMD4*2
MMD502
Flow
AMB characteristics MMD*02 GMMD*02 MMD*0
TMD*02
Fine
AMS AMDS TQAS regulator KML
Others
Solenoid
valve
85
AMGZ0
High-pressure
AMD5*2 AMG00 AMG*02 GAMD**2 specifications AMD
1" X 7/8" tube connection
Double barbed fitting
1" X t1.65 SUS weld tube
Rc 1/2
3/4" X 1/4" tube connection
Double barbed fitting
1/2" X 3/8" tube connection
Double barbed fitting
3/4" X t1.24 SUS weld tube
1/2" X t1.24 SUS weld tube
Aluminum
Rc 3/8
A
3/8" X 1/4" tube connection
Double barbed fitting
PP
3/8" X t1.0 SUS weld tube
P
Ø20
Ø16
Ø10
Orifice
8BT
16S
12S
15
MMD502
MMD402
MMD302
6BT
8S
10
4BT
6S
8
Connection
Ø8
Symbol Descriptions
AMD0*2
A
Model No.
3BT
Rc 1/4
Actuator material
B
Actuator material
B
MMD402
Connection
A
P
4BT
MMD302
AMDZ
AMD0
How to order
MMD*02 Series
MMD3402Series
Dimensions
Rc thread type
·MMD302-8/10
F
·MMD402-15
D
(MAX E)
G
Port B
C
Port A
ØB
A
H
2-I
86
Symbol
A
B
C
D
E
F
G
H
I
MMD302-8 · 10
62
10
10.5
49
96
36
36
18±0.3
M4 depth 5
MMD402-15
80
16
13.5
64
121
46
46
26±0.3
M5 depth 6
MMD3402Series
Dimensions
AMDZ
AMD0
Dimensions
AMD0*2
SUS weld tube
·MMD302-3BT/4BT
·MMD402-6BT
AMD3*2
AMD4*2
AMGZ0
High-pressure
AMD5*2 AMG00 AMG*02 GAMD**2 specifications AMD
Port B
Port A
ØB
C
A
A
B
C
MMD302-3BT / 4BT
116
10
50
MMD402-6BT
126
16
61
Symbol
Flow
AMB characteristics MMD*02 GMMD*02 MMD*0
Double barbed fitting
·MMD302-6S/8S
·MMD402-12S
TMD*02
AMS AMDS TQAS regulator KML
Port B
Port A
ØB
A
Fine
10
MMD302-8S
130
10
MMD402-12S
150
16
Solenoid
valve
B
116
Symbol
Others
A
MMD302-6S
87
MMD502Series
Dimensions
89
(MAX 146)
Double barbed fitting
·MMD502-16S
Port B
22
Port A
Ø20
(175)
40±0.3
2-M6 depth 5
88
MMD502Series
Dimensions
AMDZ
AMD0
Dimensions
AMD0*2
SUS weld tube
·MMD502-8BT
AMD3*2
AMD4*2
AMGZ0
High-pressure
AMD5*2 AMG00 AMG*02 GAMD**2 specifications AMD
Port A
Port B
(140)
Ø20
Flow
AMB characteristics MMD*02 GMMD*02 MMD*0
TMD*02
Fine
AMS AMDS TQAS regulator KML
Others
Solenoid
valve
89
Chemical liquid manual valve (manifold/branch valve)
3
4
5
Orifice: GMMD302: Ø6 to Ø10
GMMD402: Ø14.7 to Ø16
GMMD502: Ø20
Subject to Export Trade Control Ordinances
No. of stations: 1 to 5 stations
GMMD 02 Series
*Target: GMMD402 and 502 only
Specifications
Descriptions
GMMD302
Working fluid
Fluid temperature
GMMD402
Chemical liquids, pure water (Note 1)
˚C
5 to 90 (Note 3)
Withstanding pressure MPa
1.2
Working pressure range MPa
0 to 0.4
Valve seat leakage cm3/min
0 (at, water pressure)
Back pressure
GMMD502
MPa
0 to 0.4
Ambient temperature ˚C
0 to 60
Installation attitude
Free
ODØ10 tube connection (fitting integrated type)
Connection
ODØ12 tube connection (fitting integrated type)
OD3/4" tube connection
ODØ25 tube connection (fitting integrated type)
OD3/8" tube connection (fitting integrated type)
(fitting integrated type)
OD1" tube connection (fitting integrated type)
OD1/2" tube connection (fitting integrated type)
Orifice
Ø6 to Ø10 (Note 2)
Ø14.7 to Ø16 (Note 2)
Ø20
Note 1: Check the compatibility of the product's configuration materials, working fluid, and ambient atmosphere before use.
Note 2: Confirm the orifice for each connection in the Model indication section.
Note 3: 5 to 40 ˚C for hydrofluoric acids.
90
Read the precautions on pages 7 to 12 in the introduction before use.
GMMD4502Series
3
Internal structure and parts list
AMDZ
AMD0
Internal structure and parts list
AMD0*2
AMD3*2
1
AMD4*2
4
2
Parts name
Material
1
Actuator assembly
PP
2
Body
PTFE
3
Mounting plate
PP
4
Diaphragm
PTFE
No.
Flow
AMB characteristics MMD*02 GMMD*02 MMD*0
TMD*02
Fine
AMS AMDS TQAS regulator KML
Others
Solenoid
valve
91
AMGZ0
High-pressure
AMD5*2 AMG00 AMG*02 GAMD**2 specifications AMD
3
GMMD302Series
How to order
GMMD3 Series (Connection: Ø10, 3/8" tube)
GMMD302
10UK
4
P
L
D
Model No.
C
B
A
Port A position
Fluid
No. of stations
Connection
A
Connection
10US
10BUS
10UJ
10BUJ
10UP
10BUP
10UA
10BUA
10UR
10BUR
Super type Pillar
Super 300 type Super 300 type Pillar F-LOCK 20A series F-LOCK 60 series
fitting integrated type Pillar fitting J series
fitting P series
fitting integrated type fitting integrated type
integrated type
integrated type
Blank Right
L
Left
W
Both sides
Available with PTFE machined body.
Model No. for type with coated metal section
GMMD302
A
B
C
D
C
Coated
92
Ø8
FLARTEC
fitting
integrated type
3/8" X 1/4" tube connection
Port A position
Ø6
3/8" X 1/4" tube connection
D
Ø7
10BUK 10BUW
Final lock fitting
integrated type
Ø10 X Ø8 tube connection
For nitric acid, for hydrofluoric acid
3/8" X 1/4" tube connection
For ammonia
P
Ø8
Ø10 X Ø8 tube connection
M
3/8" X 1/4" tube connection
Fluid
Ø8
Ø10 X Ø8 tube connection
C
Blank Standard
3/8" X 1/4" tube connection
No. of stations
1
1 station
to
to
5
5 stations
Ø8
Ø10 X Ø8 tube connection
Ø8
3/8" X 1/4" tube connection
Ø10 X Ø8 tube connection
B
3/8" X 1/4" tube connection
Ø10 X Ø8 tube connection
Orifice
Symbol Descriptions
10UK
Ø6.3
GMMD302Series
How to order
12UK
4
M
L
D
C
B
A
Port A position
Fluid
AMD3*2
Model No.
AMD0*2
GMMD302
AMDZ
AMD0
How to order
GMMD3 Series (Connection: Ø12, 1/2" tube)
No. of stations
Connection
Connection
12US
15BUS
12UJ
15BUJ
12UP
15BUP
12UA
15BUA
12UR
15BUR
Ø10
FLARTEC
fitting
integrated type
1/2" X 3/8" tube connection
1/2" X 3/8" tube connection
Ø9.5
15BUK 15BUW
Final lock fitting
integrated type
Ø12 X Ø10 tube connection
1/2" X 3/8" tube connection
Ø10
Ø12 X Ø10 tube connection
1/2" X 3/8" tube connection
Ø10
Ø12 X Ø10 tube connection
1/2" X 3/8" tube connection
Ø10
Ø12 X Ø10 tube connection
Ø10
1/2" X 3/8" tube connection
Ø12 X Ø10 tube connection
B
1/2" X 3/8" tube connection
Ø12 X Ø10 tube connection
Orifice
Symbol Descriptions
12UK
Ø9.4
No. of stations
1
1 station
to
to
5
5 stations
C
Fluid
Blank Standard
M
For ammonia
P
For nitric acid, for hydrofluoric acid
D
Port A position
AMB characteristics MMD*02 GMMD*02 MMD*0
Blank Right
Left
Both sides
Flow
L
W
Available with PTFE machined body.
Model No. for type with coated metal section
A
B
C
D
C
TMD*02
GMMD302
AMGZ0
High-pressure
AMD5*2 AMG00 AMG*02 GAMD**2 specifications AMD
Super type Pillar
Super 300 type Super 300 type Pillar F-LOCK 20A series F-LOCK 60 series
fitting integrated type Pillar fitting J series
fitting P series
fitting integrated type fitting integrated type
integrated type
integrated type
AMD4*2
A
Coated
Fine
AMS AMDS TQAS regulator KML
Others
Solenoid
valve
93
GMMD402Series
How to order
GMMD4 Series
GMMD402
20BUA
4
M
L
A
Connection
20BUS 20BUJ 20BUP 20BUA 20BUR 20BUK 20BUW
FLARTEC
fitting integrated type
Final lock
fitting integrated type
F-LOCK 60 series
fitting integrated type
F-LOCK 20A series
fitting integrated type
No. of stations
Connection
Super 300 type Pillar fitting
P series integrated type
B
A
Port A position
Fluid
Super 300 type Pillar fitting
J series integrated type
C
Super type Pillar
fitting integrated type
D
Model No.
3/4" X 5/8" tube connection
Orifice
Symbol Descriptions
B
No. of stations
1
1 station
to
to
5
5 stations
C
Fluid
Blank Standard
M
For ammonia
P
For nitric acid, for hydrofluoric acid
D
Port A position
Blank Right
L
Left
W
Both sides
Available with PTFE machined body.
Model No. for type with coated metal section
GMMD402
A
B
C
D
C
Coated
94
Ø16
Ø16
Ø16
Ø16 Ø15.9 Ø16 Ø14.7
GMMD502Series
How to order
25BUK
4
M W
C
B
A
Fluid
No. of stations
Port A position
Connection
A
Connection
AMGZ0
High-pressure
AMD5*2 AMG00 AMG*02 GAMD**2 specifications AMD
Ø20
No. of stations
1
1 station
to
to
4
4 stations
C
Fluid
Blank Standard
M
For ammonia
P
For nitric acid, for hydrofluoric acid
D
Port A position
Blank Right
Left
W
Both sides
AMB characteristics MMD*02 GMMD*02 MMD*0
L
AMD4*2
Nominal 20
Ø20
Nominal 16
Ø20
1" X 7/8"
tube connection
1" X 7/8"
tube connection
Ø20
Ø25 X Ø22
tube connection
1" X 7/8"
tube connection
Ø20
Ø25 X Ø22
tube connection
Ø20
1" X 7/8"
tube connection
(Note 1)
Ø20
1" X 7/8"
tube connection
Ø25 X Ø22
tube connection
Ø20
1" X 7/8"
tube connection
Ø25 X Ø22
tube connection
Orifice
Ø25 X Ø22
tube connection
25UP 25BUP 25BUA 25UR 25BUR 25UK 25BUK 25BUW 15AU 20AU
F-LOCK
Super 300 type
F-LOCK 60 series Final lock fitting FLARTEC PVC union fitting
series fitting integrated type integrated type
fitting
Pillar fitting P series 20Afitting
integrated type
integrated type
integrated type integrated type
1" X 7/8"
tube connection
25US 25BUS 25UJ 25BUJ
Super type Pillar
Super 300 type
fitting integrated type Pillar fitting J series
integrated type
Symbol Descriptions
B
D
AMD3*2
Model No.
AMD0*2
GMMD502
AMDZ
AMD0
How to order
GMMD5 Series
Available with PTFE machined body.
Flow
Model No. for type with coated metal section
GMMD502
A
B
C
D
C
Coated
TMD*02
Note on model No. selection
AMS AMDS TQAS regulator KML
Note 1: Also usable for the Ø25 x Ø22 diameter tube connection.
Fine
Others
Solenoid
valve
95
3
GMMD4502Series
Dimensions
Fitting integrated type
Port A position: blank
·GMMD302- *1
A
·GMMD402- *1
Port A position: L
Port A position: W
A
A
A
·GMMD502- *1
B
B
B
B
B
B
B
B
Port A
E
Port B
F
E
G
(H)
A
D
MAX. C
(H)
Port B
Port B
(H)
I
Port A
M
Ø0
L
96
4-N
B
3
GMMD4502Series
Dimensions
AMDZ
AMD0
Dimensions
1
5
E
F
G
I
L
M
GMMD302
21
119
36
18
38
36
36
-
22±0.3
M6 depth 9
GMMD402
27
153
46
23
48
46
46
-
28±0.3
M8 depth 10
GMMD502
35
191
60
30
62
60
60
-
40±0.3
M8 depth 13
GMMD302
21
119
36
18
38
74
36
38±0.3
22±0.3
M6 depth 9
GMMD402
27
153
46
23
48
94
46
48±0.4
28±0.3
M8 depth 10
GMMD502
35
191
60
30
62
122
60
62±0.4
40±0.3
M8 depth 13
GMMD302
21
119
36
18
38
112
36
76±0.4
22±0.3
M6 depth 9
GMMD402
27
153
46
23
48
142
46
96±0.5
28±0.3
M8 depth 10
GMMD502
35
191
60
30
62
184
60
124±0.5
40±0.3
M8 depth 13
GMMD302
21
119
36
18
38
150
36
114±0.5
22±0.3
M6 depth 9
GMMD402
27
153
46
23
48
190
46
144±0.5
28±0.3
M8 depth 10
GMMD502
35
191
60
30
62
246
60
186±0.7
40±0.3
M8 depth 13
GMMD302
21
119
36
18
38
188
36
152±0.7
22±0.3
M6 depth 9
GMMD402
27
153
46
23
48
238
46
192±0.7
28±0.3
M8 depth 10
GMMD302 (10mm)
*1 (Connection model No.)
GMMD402
GMMD302 (12mm)
H
O
10US
25
8
10BUS
25
8
10UJ
23
8
10BUJ
23
10UP
*1 (Connection model No.)
N
H
O
12US
29.5
10
15BUS
29.5
10
12UJ
27
8
15BUJ
25
8
10BUP
25
10UA
*1 (Connection model No.)
AMGZ0
High-pressure
AMD5*2 AMG00 AMG*02 GAMD**2 specifications AMD
4
D
AMD4*2
3
C
AMD3*2
2
A
AMD0*2
No. of
stations Model No.
GMMD502
*1 (Connection model No.)
H
O
20BUS
39
16
20BUJ
34
16
25US
43.5
20
25BUS
43.5
10
20BUP
36
16
20
25UJ
41
27
10
20BUA
31
20
16
25BUJ
41
12UP
29
10
20BUR
20
44
15.9
25UP
43
8
15BUP
29
10
20
20BUK
36.5
16
25BUP
43
21
8
12UA
25
10
20
20BUW
38
14.7
25BUA
40
10BUA
21
8
15BUA
25
10
25UR
20
49.5
10UR
37
7
12UR
37
9.5
25BUR
20
51
10BUR
39
6
15BUR
39
9.5
20
25UK
40.5
10UK
30
8
12UK
33
20
10
25BUK
40.5
10BUK
30
8
15BUK
20
33
10
25BUW
48
10BUW
32.5
6.3
15BUW
20
33.5
9.4
Flow
O
AMB characteristics MMD*02 GMMD*02 MMD*0
H
TMD*02
Fine
AMS AMDS TQAS regulator KML
Others
Solenoid
valve
97
Chemical liquid manual valve
MMD20·MMD30·MMD40 Series
Metal free design with flow rate adjustment and closing functions
Orifice: Ø8/Ø10/Ø12/Ø16/Ø20
Subject to Export Trade Control Ordinances
*Target: Valves with Ø12 or larger orifice
Specifications
Descriptions
MMD20
MMD30
Working fluid
Fluid temperature
MMD40
Chemical liquids, pure water, N2 gas, air
˚C
5 to 60 (5 to 90) (Note 2)
Withstanding pressure MPa
1.4
0 to 0.5
Working pressure range MPa
0 to 0.4
Valve seat leakage cm3/min
0 (at, water pressure)
Ambient temperature ˚C
0 to 40
Installation attitude
Connection (Note 1)
Orifice
Cv value
Free
Rc1/2
Rc3/8
Rc3/4
Ø8
Ø10
Ø12
Ø16
Ø20
1.25
1.8
2.5
5.2
8
Note 1: The fitting integrated type is also available.
Note 2: 5 to 40 ˚C for hydrofluoric acids.
Internal structure and parts list
Flow rate - No. of knob turns (at differential pressure 0.1MPa)
( /min)
MMD40-20-20
100
Flow rate (water)
1
4
50
MMD30-15-12
MMD20-10-8
2
0
2
3
No. of turns (times)
No. of knob turns - flow rate at differential pressure 0.1MPa
Port A
Port B
1
Set the adjustment knob so that it opens at least 3/8 turn from
fully closed. If closed further, vibration or flow fluctuation, etc.,
may occur, depending on working conditions.
3
Tighten the knob with the following torque.
No.
1
Parts name
Material
Actuator assembly
CPVC
Quantity
1
2
Body
PFA
1
3
Mounting plate
CPVC
1
4
Diaphragm
PTFE
1
MMD20
0.4 to 0.6
MMD30
0.8 to 1.6
MMD40
2.0 to 2.8
The material differs with the model. Contact CKD for details.
98
Read the precautions on pages 7 to 12 in the introduction before use.
(N·m)
MMD230Series
How to order
10
F
8
AMD0*2
MMD20
AMDZ
AMD0
How to order
MMD2 Series
Model No.
Connection
Connection
10US
Rc
3/8
Super type
Pillar fitting
10UF
10BUF
10UA
10BUA
F-LOCK 20 series F-LOCK 20A series
fitting integrated type fitting integrated type
3/8" X 1/4" tube connection
Ø10 X Ø8 tube connection
3/8" X 1/4" tube connection
12UF
15BUF
12UA
15BUA
MMD3 Series
MMD30
12US
10
F
Model No.
A
A
Connection
Connection
15
1/2" X 3/8" tube connection
Ø12 X Ø10 tube connection
1/2" X 3/8" tube connection
Ø12 X Ø10 tube connection
1/2" X 3/8" tube connection
Ø12 X Ø10 tube connection
Symbol Descriptions
12US
Super type Pillar fitting F-LOCK 20 series F-LOCK 20A series
integrated type
fitting integrated type fitting integrated type
B
B
Orifice
10
Ø10
12
Ø12
Orifice
Fluid
C Fluid
Blank Standard
For medium temperature (5 to 90 ˚C)
F
TMD*02
C
Flow
Rc
1/2
AMB characteristics MMD*02 GMMD*02 MMD*0
Ø10 X Ø8 tube connection
15BUS
B Fluid
Blank Standard
F
For medium temperature (5 to 90 ˚C)
Fluid
AMGZ0
High-pressure
AMD5*2 AMG00 AMG*02 GAMD**2 specifications AMD
3/8" X 1/4" tube connection
Ø10 X Ø8 tube connection
Symbol Descriptions
B
10BUS
AMD4*2
10
AMD3*2
A
A
Fine
AMS AMDS TQAS regulator KML
Others
Solenoid
valve
99
MMD40Series
How to order
MMD4 Series
20
MMD40
20
F
Model No.
A
Connection
Rc
3/4
Symbol Descriptions
B
B
Fluid
Ø16
16
Ø20
20
Orifice
C
100
Fluid
C Fluid
Blank Standard
F
For medium temperature (5 to 90 ˚C)
20BUS
20BUF
20BUA
F-LOCK 20A series
fitting integrated type
20
F-LOCK 20 series
fitting integrated type
Connection
Super type Pillar
fitting integrated type
A
3/4" X 5/8" tube connection
MMDSeries
Dimensions
AMDZ
AMD0
Dimensions
AMD0*2
RC thread type
·MMD20
·MMD30
AMD3*2
·MMD40
J
I
AMGZ0
High-pressure
AMD5*2 AMG00 AMG*02 GAMD**2 specifications AMD
H
AMD4*2
4-ØK
F
G
E
Flow
AMB characteristics MMD*02 GMMD*02 MMD*0
2-A
D
Port A
TMD*02
C
Port B
B
AMS AMDS TQAS regulator KML
ØL
Fine
Symbol
A
B
C
D
E
F
G
H
I
J
K
MMD20-10-8
Rc3/8
7
22
56
MAX 100
34
44
36
46
56
5.8
8
MMD30-15-12
Rc1/2
8
30
70
MAX 115
42
62
46
57
68
5.8
12
MMD40-20-20
Rc3/4
8
34
84
MAX 136
56
80
58
71
84
6.8
20
Model No.
ØL
Others
Solenoid
valve
101
Chemical liquid toggle valve
TMDZ02·TMD002·TMD302 Series
One-touch manual open/close
Perfect for emergency shutdown and filter purging
Orifice: Ø2/Ø4/Ø10/Ø12
Subject to Export Trade Control Ordinances
*Target: Valves with Ø12 orifice
Specifications
Descriptions
TMDZ02-*-2
TMD002-*-4
Working fluid
Fluid temperature
Chemical liquids, pure water, N2 gas, air
˚C
5 to 60 (Note 4)
Withstanding pressure MPa
1.4
Working pressure range (A -> B) MPa
0 to 0.5
Working pressure range (B -> A) MPa
0 to 0.3 (TMDZ/TMD0), 0 to 0.15 (TMD3)
Valve seat leakage cm3/min
Back pressure
0 (at, water pressure)
MPa
0 to 0.3
Ambient temperature ˚C
Free
Rc1/8
OD Ø6 tube connection
OD1/4" tube connection
Rc1/8
OD Ø3 tube connection
OD1/8" tube connection
Orifice
Cv value
0 to 0.15
0 to 40
Installation attitude
Connection
TMD302-*-*
Rc1/2
OD Ø12 tube connection
OD1/2" tube connection
Ø2
Ø4
Ø10
Ø12
0.08 (Note 1)
0.32
1.8
2.5
Note 1: The Cv for the PFA body connection Rc 1/8 is 0.12.
Note 2: Consult with CKD for other port sizes.
Note 3: Consult with CKD for other knob operation types 180 ˚ movable, automatic return.
Note 4: 5 to 40 ˚C for hydrofluoric acids.
Internal structure and parts list
1
4
2
No.
3
Parts name
Material
1
Actuator assembly
CPVC
1
2
Body
PFA
1
3
Mounting plate
SUS
1
4
Diaphragm
PTFE
1
The material differs with the model. Contact CKD for details.
102
Read the precautions on pages 7 to 12 in the introduction before use.
Quantity
TMDZ02·TMD002·TMD302Series
How to order
3US
AMD0*2
TMDZ02
AMDZ
AMD0
How to order
TMDZ/TMD0 Series
2
TMD002
TMDZ
Model No.
A
Connection
6
Rc
1/8
6BUS
Super type Pillar
fitting integrated type
6
Rc
1/8
6US
8BUS
6UJ
8BUJ
6UP
8BUP
6UF
8BUF
Super 300 type
F-LOCK 20 series
Pillar fitting P series fitting integrated type
integrated type
Ø6.35 X Ø4.3 tube connection
Ø6 X Ø4 tube connection
15BUA
Ø6 X Ø4 tube connection
1/4" X 5/32" tube connection
12UA
1/4" X 5/32" tube connection
Ø6 X Ø4 tube connection
1/4" X 5/32" tube connection
Ø6 X Ø4 tube connection
15BUF
Orifice
2
Ø2
4
Ø4
TMD3 Series
12US
AMB characteristics MMD*02 GMMD*02 MMD*0
TMD302
10
Flow
Orifice
B
TMD3
Model No.
A
A
Connection
Connection
15
Rc
1/2
12US
15BUS
12UF
Super type Pillar
F-LOCK 20 series F-LOCK 20A series
fitting integrated type fitting integrated type fitting integrated type
TMD*02
1/2" X 3/8" tube connection
Ø12 X Ø10 tube connection
1/2" X 3/8" tube connection
Ø12 X Ø10 tube connection
1/2" X 3/8" tube connection
Ø12 X Ø10 tube connection
Symbol Descriptions
AMGZ0
High-pressure
AMD5*2 AMG00 AMG*02 GAMD**2 specifications AMD
Super type Pillar
Super 300 type
fitting integrated type Pillar fitting J series
integrated type
1/8" X 0.086" tube connection
B
3US
Ø3 X Ø2 tube connection
Symbol Descriptions
TMD0
Connection
AMD4*2
A
AMD3*2
Orifice
B
B
Fine
AMS AMDS TQAS regulator KML
Orifice
10
Ø10
12
Ø12
Others
Solenoid
valve
103
TMDZ02Series
Dimensions
RC thread type
·TMDZ02-6-2
22
36
Panel thickness Max. 5
19
30
48
MAX 64
M12 P=1
Port A
11
Port B
Ø2
10±0.3
2-M3 depth 4
Fitting integrated type
·TMDZ02- *1 -2
Dimension
A
B
3US
50
2
6BUS
50
2
3UF
40
2
3UR
57
1.6
6BUR
57
1.6
*1 (Connection model No.)
ØB
(A)
104
TMD002Series
Dimensions
AMDZ
AMD0
Dimensions
AMD0*2
RC thread type
·TMD002-6-4
AMD3*2
AMD4*2
30
36
Port A
Panel thickness Max. 5
MAX 71
13
Port B
36
56
M16 P=1
AMGZ0
High-pressure
AMD5*2 AMG00 AMG*02 GAMD**2 specifications AMD
19
AMB characteristics MMD*02 GMMD*02 MMD*0
Ø4
Flow
20±0.3
20±0.3
4-M3 depth 4
TMD*02
Fitting integrated type
·TMD002- *1 -4
B
6US
66
4
8BUS
66
4
6UF
64
4
8BUF
64
6UJ
64
4
4
6UR
90
3.5
8BUJ
6UP
64
4
8BUR
92
3.5
68
4
6UK
71
8BUP
4
68
4
8BUK
71
4
8BUW
86
3
(A)
105
Solenoid
valve
A
*1 (Connection model No.)
Others
B
Fine
ØB
Dimension
A
*1 (Connection model No.)
AMS AMDS TQAS regulator KML
Dimension
TMD302Series
Dimensions
RC thread type
68
57
46
OPEN
CLOSE
·TMD302-15-12
4-Ø5.8
42
62
CLOSE
117
MAX 162
M30 P=2
Panel thickness Max. 10
54
2-Rc1/2
Port A
8
30
65
Port B
Ø12
Fitting integrated type
·TMD302- *1 -10
Dimension
*1 (Connection model No.)
Ø10
(A)
106
A
12US
121
15BUS
121
12UF
112
15BUF
112
12UA
112
15BUA
112
AMS·AMDS·TQAS0
AMD0*2
Overview
AMD3*2
After the flow path closes, this
valve leads fluid in at the end of the
nozzle into the pipe to prevent fluid
from dripping from the nozzle while
the flow path is closed. Three
valves types are used: discrete drip
prevention , type integrated with
air-operated valve for chemical
liquids, and electronically
controlled.
AMD4*2
Drip prevention valve AMS
Compact, lightweight downsized
valve
Integrated fitting (molded PFA)
eliminates particles.
Piping work hours have been
reduced, realizing a lighter, more
compact valve.
Improved corrosion resistance
Fluorine resin is used for all wetted
parts, enabling use with chemical
liquids and pure water.
Contamination and leak measures
Intelligent
Improved maintenance
Others
Operation of manual mode with the
controller greatly reduces the
number of setting work hours.
116
Fine
The suction speed, suck-back rate
and time, etc., are set as needed
with electronic control. Gradual
suction and fine adjustments are
possible.
Electronic control drip prevention valve (TQAS0)
AMS AMDS TQAS regulator KML
Electronically controlled drip
prevention valve TQASO
112
TMD*02
The integrated fitting eliminates
leaks and fluid residue.
Integrated air-operated valve for chemical liquid/
dip prevention valve (AMDS)
Flow
Integrated with air-operated
valve for chemical liquids
Intro 7
108
AMB characteristics MMD*02 GMMD*02 MMD*0
Air-operated valve for chemical
liquids and drip prevention valve
integrated AMDS
Precautions
Drip prevention valve (AMS)
AMGZ0
High-pressure
AMD5*2 AMG00 AMG*02 GAMD**2 specifications AMD
Features
PPS actuator material eliminates
discoloration and melting caused
by solvents
AMDZ
AMD0
Drip prevention valve
Solenoid
valve
Drip prevention valve for chemical liquids
AMSZ2·AMS022 Series
Drip prevention valve for nozzle end control prevents dripping.
Maximum suction rate: 0.04cm3/0.12cm3
Specifications
Descriptions
AMSZ2-*
Working fluid
AMS022-*
Chemical liquids, pure water
Fluid temperature
˚C
5 to 80
Withstanding pressure MPa
0.6
Working pressure range MPa
0 to 0.2
Ambient temperature ˚C
0 to 60
Installation attitude
Side installation with port in vertical direction (OUT port upward)
Rc1/8
ODØ3 tube connection
OD1/8" tube connection
Connection
Operation
section
Operation pressure MPa
Rc1/8
ODØ6 tube connection
OD1/4" tube connection
0.3 to 0.5
Operation port
M5
0.04
Maximum suction rate cm3
Usage examples and related products
FR unit
W1000-6
0.12
Internal structure and parts list
Operation solenoid valve
3SA1·MN3E0
1
Flow control valve
SC-M5-A-F
Pneumatics
pressure source
2
4
Pneumatic piping related components
3
Fluid source
Port B
Port A
Fine valve
AMDZ·AMD0
Fine valve
AMSZ2·AMS022
Refer to the General Pneumatic Catalog and Clean Component
Catalog (Catalog No. CB-033S) for details on related products.
108
No.
Parts name
Material
1
Actuator assembly
PPS
1
2
Body
PFA
1
3
Mounting plate
SUS
1
4
Diaphragm
PTFE
1
The material differs with the model. Contact CKD for details.
Read the precautions on pages 7 to 12 in the introduction before use.
Quantity
AMSZ2·AMS022Series
How to order/Operation principle
6
D
B
Model No.
Rc
1/8
3US
6BUS
3UF
3UR
6BUR
Super type Pillar
F-LOCK 20 series F-LOCK 60 series
fitting integrated type fitting integrated type fitting integrated type
Body material
AMD3*2
AMD4*2
1/8" X 1/16" tube connection
Ø3 X Ø2 tube connection
Content
Body material
Blank PFA molded body or PTFE machined body PTFE
Stainless steel body
D
Ø3 X Ø2 tube connection
Symbol
1/8" X 0.086" tube connection
Connection
Ø3 X Ø2 tube connection
A
Connection
6
AMD0*2
AMSZ2
A
AMDZ
AMD0
How to order
AMSZ Series
B
AMS022
A
B
Model No.
Rc
1/8
Body material
6UJ
8BUJ
6UP
8BUP
6UF
8BUF
6UR
8BUR
Super 300 type
F-LOCK 20 series F-LOCK 60 series
Pillar fitting P series fitting integrated type fitting integrated type
integrated type
6UK
8BUK
Final lock fitting
integrated type
8BUW
FLARTEC
fitting
integrated type
Flow
AMB characteristics MMD*02 GMMD*02 MMD*0
1/4" X 5/32" tube connection
1/4" X 5/32" tube connection
Ø6 X Ø4 tube connection
1/4" X 5/32" tube connection
Ø6 X Ø4 tube connection
Ø6.35 X Ø4.3 tube connection
Ø6 X Ø4 tube connection
1/4" X 5/32" tube connection
Ø6 X Ø4 tube connection
1/4" X 5/32" tube connection
Ø6 X Ø4 tube connection
Symbol
Content
B Body material
Blank PFA molded body or PTFE machined body PTFE
Stainless steel body
D
8BUS
Super type Pillar
Super 300 type
fitting integrated type Pillar fitting J series
integrated type
1/4" X 5/32" tube connection
Connection
6US
Ø6 X Ø4 tube connection
A
PTFE
Connection
6
8BUS
PTFE
AMGZ0
High-pressure
AMD5*2 AMG00 AMG*02 GAMD**2 specifications AMD
AMS0 Series
PFA
PFA
PTFE
PTFE
PTFE
PTFE
PTFE
PTFE
Note on model No. selection
Note 1: Consult with CKD when selecting an all resin actuator used with acidic fluids.
TMD*02
Operation port
When fluid is stopped and air at the
operation port is released into the
atmosphere, the diaphragm rises with the
force of the spring, and the volume in the
drip prevention valve increases. This
prevents fluid from dripping.
Fine
When fluids flow, pneumatic pressure is
applied on the operation port, and the
diaphragm is lowered.
AMS AMDS TQAS regulator KML
Operation principle
Others
Solenoid
valve
109
AMSZ2Series
Dimensions
Rc screw type
22
·AMSZ2-6/AMSZ2-6-D
22
36
11
38
MAX 59
Control port M5 depth 4.5
2-Rc1/8
10±0.3
2-M3 depth 4
Fitting integrated type
·AMSZ2- *1
Dimension
*1 (Connection model No.)
(A)
110
A
3US
50
6BUS
50
3UF
40
3UR
57
6BUR
57
AMS022Series
Dimensions
AMDZ
AMD0
Dimensions
AMD0*2
Rc screw type
·AMS022-6/AMS022-6-D
30
AMD3*2
AMD4*2
AMGZ0
High-pressure
AMD5*2 AMG00 AMG*02 GAMD**2 specifications AMD
MAX 69
13
31
51
56
Control port M5 depth 4.5
2-Rc1/8
4-M3 depth 4
20±0.3
Flow
AMB characteristics MMD*02 GMMD*02 MMD*0
20±0.3
Fitting integrated type
·AMS022- *1
TMD*02
*1 (Connection model No.)
*1 (Connection model No.)
A
6UF
64
66
8BUF
64
6UJ
64
6UR
90
8BUJ
64
8BUR
92
6UP
68
6UK
71
8BUP
68
8BUK
71
8BUW
86
111
Solenoid
valve
66
8BUS
Others
6US
Fine
(A)
Dimension
A
AMS AMDS TQAS regulator KML
Dimension
Integrated air-operated valve for chemical liquid/dip prevention valve
AMDSZ0·AMDS00 Series
Downsized valve with fewer piping work hours
Maximum suction rate: 0.04cm3/0.12cm3
Specifications
Descriptions
AMDSZ0-*
Working fluid
Fluid temperature
AMDS00-*
Chemical liquids, pure water
˚C
5 to 80
Withstanding pressure MPa
0.6
Working pressure range MPa
0 to 0.2
Ambient temperature ˚C
0 to 60
Installation attitude
Side installation with port in vertical direction (OUT port upward)
Connection
Operation
section
ODØ6 tube connection
OD1/4" tube connection
ODØ3 tube connection
OD1/8" tube connection
Operation pressure MPa
0.3 to 0.5
Operation port
M5
Maximum suction rate cm3
Orifice
Cv value
0.04
0.12
Ø2
Ø4
0.08
0.32
Usage examples and related products
Operation solenoid valve
3SA1·MN3E0
Internal structure and parts list
Flow control valve
SC-M5-A-F
FR unit
W1000-6
1
OUT port
Pneumatics
pressure source
4
2
IN
OUT
IN port
Pneumatic piping related components
Fine valve
AMDSZ0·AMDS00
3
Fluid source
Refer to the General Pneumatic Catalog and Clean Component Catalog
(Catalog No. CB-033S) for details on related products.
No.
Parts name
Material
1
Actuator assembly
PPS
2
2
Body
PFA
1
3
Mounting plate
SUS
2
4
Diaphragm
PTFE
2
The material differs with the model. Contact CKD for details.
112
Read the precautions on pages 7 to 12 in the introduction before use.
Quantity
AMDSZ0·AMDS00Series
How to order
3US
Connection
3US
6BUS
3UF
3UR
6BUR
AMD0*2
AMDSZ0
A
AMDZ
AMD0
How to order
AMDSZ Series
Super type Pillar
F-LOCK 20 series F-LOCK 60 series
fitting integrated type fitting integrated type fitting integrated type
Model No.
6UK
8BUK
Final lock fitting
integrated type
8BUW
FLARTEC
fitting
integrated type
Flow
AMB characteristics MMD*02 GMMD*02 MMD*0
1/4" X 5/32" tube connection
1/4" X 5/32" tube connection
Ø6 X Ø4 tube connection
1/4" X 5/32" tube connection
Ø6 X Ø4 tube connection
Ø6.35 X Ø4.3 tube connection
Ø6 X Ø4 tube connection
1/4" X 5/32" tube connection
AMGZ0
High-pressure
AMD5*2 AMG00 AMG*02 GAMD**2 specifications AMD
6UP
8BUP
6UF
8BUF
6UR 8BUR
Super 300 type
F-LOCK 20 series F-LOCK 60 series
Pillar fitting P series fitting integrated type fitting integrated type
integrated type
Ø6 X Ø4 tube connection
1/4" X 5/32" tube connection
Ø6 X Ø4 tube connection
Content
Body material
PFA molded body or PTFE machined body
6US
8BUS
6UJ
8BUJ
Super type Pillar
Super 300 type
fitting integrated type Pillar fitting J series
integrated type
1/4" X 5/32" tube connection
Connection
PTFE
Connection
Ø6 X Ø4 tube connection
A
AMD4*2
Model No.
AMD3*2
6UJ
A
PTFE
1/8" X 1/16" tube connection
AMDS00
PFA
Ø3 X Ø2 tube connection
AMDS0 Series
Ø3 X Ø2 tube connection
Content
Body material
PFA molded body or PTFE machined body
1/8" X 0.086" tube connection
Connection
Ø3 X Ø2 tube connection
A
PFA
PTFE
PTFE
PTFE
PTFE
PTFE
PTFE
Note on model No. selection
TMD*02
Note 1: Consult with CKD when selecting an all resin actuator used with acidic fluids.
Note 2: The actuator soft-shut (diaphragm) type is used to reduce foaming and improve drip prevention. Contact CKD for details.
Fine
AMS AMDS TQAS regulator KML
Others
Solenoid
valve
113
AMDSZ0Series
Dimensions
Fitting integrated type
22
·AMDSZ0- *1
45
(A)
Control port M5
Depth 4.5
Control port M5
OUT
11
11
IN
ØB
4-M3 depth 4
10±0.3
23±0.5
Dimension
A
B
3US
73
2
6BUS
73
2
3UF
63
2
3UR
80
1.6
6BUR
80
1.6
*1 (Connection model No.)
114
MAX 59
38
41
28
45
Depth 4.5
AMDS00Series
Dimensions
AMDZ
AMD0
Dimensions
AMD0*2
Fitting integrated type
·AMDS00- *1
AMD3*2
30
AMD4*2
(A)
51
IN
31
31
51
13
OUT
13
AMB characteristics MMD*02 GMMD*02 MMD*0
ØB
20±0.3
20±0.3
8-M3 depth 4
Flow
20±0.3
55
Control port M5
Depth 4.5
MAX 69
Control port M5
Depth 4.5
AMGZ0
High-pressure
AMD5*2 AMG00 AMG*02 GAMD**2 specifications AMD
61
31±0.5
TMD*02
97
4
8BUS
97
4
6UJ
95
4
8BUJ
95
4
6UP
99
4
8BUP
99
4
6UF
95
4
8BUF
95
4
6UR
121
3.5
8BUR
123
3.5
6UK
102
4
8BUK
102
4
8BUW
117
3
Solenoid
valve
6US
Others
B
Fine
A
*1 (Connection model No.)
AMS AMDS TQAS regulator KML
Dimension
115
Automatic drip prevention unit
TQAS0 Series
Nozzle end suction control drip prevention enabling optimum drip
prevention control
Maximum suction rate: 0.05cm3
Specifications
Descriptions
TQAS0-*-5
Working fluid
TQAS0-*-20
Chemical liquids, pure water
Fluid temperature
˚C
5 to 40
Withstanding pressure MPa
0.6
Working pressure range MPa
0 to 0.2
Supply pressure range MPa
0.4 to 0.5 (electro-pneumatic regulator supply pressure)
Input signal
24VDC
24VDC ±10% (lip ratio 1% or less)
Voltage
Current consumption
200 mA or less
Ambient temperature ˚C
0 to 60
Ambient humidity
85% or less
Installation attitude
Side installation with port in vertical direction (OUT port upward)
Rc1/8
Connection
ODØ6 tube connection
OD1/4" tube connection
Operation port
M5
Maximum suction rate cm3
0.05
Suction time
Sec
Setup time
Sec
0.2 to 5
0.2 to 20
0.2 to 2.5
Usage example
Internal structure and parts list
(Drip prevention valve section)
1
Automatic drip prevention unit
(Electro-pneumatic regulator)
Automatic drip prevention unit
(Controller)
2
Port P
Port A
(Port R release)
Automatic drip prevention unit
(Drip prevention valve)
FR unit
W1000-6
Flow control valve
0.4 to 0.5MPa
Port A
Fine valve
AMDO1
Pneumatics
pressure source
Operation solenoid valve
3SA1
MN3E0
Fluid source
4
3
Port B
No.
Parts name
Material
1
Actuator assembly
A5056
1
2
Body
PFA
1
3
Mounting plate
A5056
1
4
Diaphragm
PTFE
1
The material differs with the model. Contact CKD for details.
116
Read the precautions on pages 7 to 12 in the introduction before use.
Quantity
TQAS0Series
How to order/Operation principle
TQAS0
8BUF
AMDZ
AMD0
How to order
5
AMD0*2
Model No.
Suction time
A
A
Connection
Connection
6
6US
8BUS
8BUJ
Super type Pillar
Super 300 type
fitting integrated type Pillar fitting J series
integrated type
6UP
8BUP
6UF
8BUF
6UR
8BUR
Super 300 type
F-LOCK 20 series F-LOCK 60 series
Pillar fitting P series fitting integrated type fitting integrated type
integrated type
6UK
8BUK
Final lock fitting
integrated type
8BUW
FLARTEC
fitting
integrated type
B
Suction time
5
5sec
20
20 sec
PTFE
PFA
PTFE
PTFE
PTFE
PTFE
PTFE
PTFE
AMGZ0
High-pressure
AMD5*2 AMG00 AMG*02 GAMD**2 specifications AMD
1/4" X 5/32" tube connection
1/4" X 5/32" tube connection
Ø6 X Ø4 tube connection
1/4" X 5/32" tube connection
Ø6 X Ø4 tube connection
Ø6.35 X Ø4.3 tube connection
Ø6 X Ø4 tube connection
1/4" X 5/32" tube connection
Ø6 X Ø4 tube connection
1/4" X 5/32" tube connection
Ø6 X Ø4 tube connection
1/4" X 5/32" tube connection
Ø6 X Ø4 tube connection
Content
6UJ
AMD4*2
Rc
1/8
Symbol
AMD3*2
B
Flow
AMB characteristics MMD*02 GMMD*02 MMD*0
Setup operation
TMD*02
Operation principle
Drip prevention operation
Operation port
Fine
AMS AMDS TQAS regulator KML
Others
Solenoid
valve
Air at the specified pressure is supplied to the operation
port from the electro-pneumatic regulator, and the
diaphragm is lowered and set at the desired speed.
When pressure is reduced to the set pressure by
the electro-pneumatic regulator, the diaphragm
rises at the set speed to the set position,
implementing drip prevention.
Suction is determined by the position where the
supplied air pressure and spring force are
balanced.
The diaphragm actuator eliminates all moving
parts, and enables smooth movement with
gradual suction.
117
TQAS0Series
Dimensions
Rc screw type
15
35
50
2-Rc1/8
56
Control port M5 depth 4.5
·TQAS0-6-*
34
32
20±0.3
2-M4 depth 6
Fitting integrated type
·TQAS0- *1 -*
Dimension
*1 (Connection model No.)
(A)
118
Dimension
A
*1 (Connection model No.)
A
6US
66
6UR
90
8BUS
66
8BUR
92
6UJ
64
6UK
68
8BUJ
64
8BUK
68
6UP
68
8BUW
86
8BUP
68
6UF
64
8BUF
64
TQAS0Series
Dimensions
AMDZ
AMD0
Dimensions
AMD0*2
Dedicated controller
AMD3*2
28
15
94
4
AMD4*2
103
4-Ø4.8
AMGZ0
High-pressure
AMD5*2 AMG00 AMG*02 GAMD**2 specifications AMD
SIGNAL
SUCK
SET
V
MODE
7
8
3
2
9
6
OFF
5
SET 4
7
SIG
0
1
MAX
SUCK
QUANT
IN
GND
2
3
7
CON
TR
126
SIG
V
116
GND
1
106
SUCK
SET
AUTO
IN
DC
24V
MIN
MAX
SUCK
TIME
3
V
7
OUT
MIN
MAX
SET
TIME
MADE
IN
JAPAN
3
MIN
AUTO SUCK BACK
26
AMB characteristics MMD*02 GMMD*02 MMD*0
Cable
4x0.3mm2
50
Ø6.8
Flow
Electro-pneumatic regulator
Shield wire
39
3000
45
Black
White
Red
PUSH
OPEN
54.5
Shield
CONT
VOUT
OPEN
OPEN or GND2
7.5
6-M5
Depth 6
GND2
Wiring
P
4-M3
A
R
12.5 12.5
Fine
AMS AMDS TQAS regulator KML
Green
TMD*02
(11)
49
38.5
Plug
Others
Solenoid
valve
38
119
PYM/PMM10/PMM20
AMD0*2
Overview
AMD3*2
This regulator is used with pure
water, chemical liquids, air, or N2
gas. This has an outstanding
corrosion resistance, and is
installed easily. Select either a
stainless steel or fluorine resin
depending on your application.
AMD4*2
PYM (for air, N2 gas and pure
water)
Stainless steel body, with
fluorine resin (PTFE) and
SUS316 wetted areas
Internal filter
PMM10
(for pure water, chemical liquids, air
and N2 gas)
Rectangular solid shape minimizes
installation space and downsizes the
unit.
PMM20 (for pure water)
High corrosion resistance is
attained with fluorine resin body,
and all fluorine resin (PFA,
PTFE) wetted areas.
TMD*02
Contamination is prevented with
integrated fittings.
Flow
Space-saving, compact
Intro 7
122
124
126
AMB characteristics MMD*02 GMMD*02 MMD*0
Fluorine resin body, with fluorine
resin (PTFE) and SUS316
wetted materials
Precautions
PYM stainless steel body
PMM10 PTFE body
PMM20 PFA body
AMGZ0
High-pressure
AMD5*2 AMG00 AMG*02 GAMD**2 specifications AMD
Features
Safety is enhanced by removing
debris in fluid.
AMDZ
AMD0
Fine regulator
Fine
AMS AMDS TQAS regulator KML
Others
Solenoid
valve
Fine regulator
PYM Series
Stainless steel regulator for air, N2 gas, and pure water
Specifications
Descriptions
PYM10-6
Working fluid
PYM10-8
Pure water, N2 gas, air
Fluid temperature
˚C
Withstanding pressure
MPa
1.5
Maximum working pressure
MPa
0.99
Set pressure range
MPa
0.02 to 0.2 (Note 2)
Ambient temperature
˚C
0 to 60
5 to 60
Installation attitude
Free
Rc1/8
Port size and gauge ports port size
Rc1/4
Note 1: Wetted material: PTFE, SUS316, nonrelief type
Note 2: Compatible with 0.02 to 0.4 MPa setting pressure range. Contact CKD for other applications.
Note 3: This valve is not used with acidic fluids.
Internal structure and parts list
How to order
PYM10
6
Fine regulator
A
A
3
2
4
5
1
No.
122
Parts name
Material
Quantity
1
Body
SUS316
1
2
Diaphragm
PTFE
1
3
Valve disk
PTFE
1
4
Valve
SUS316
1
5
Spring
SUS316
1
Read the precautions on pages 7 to 12 in the introduction before use.
Port size
Port size
6
Rc1/8
8
Rc1/4
PYMSeries
Characteristics table/Dimensions
Flow characteristics (air)
0
0.5
1.0
1.5
2.0
0.05
0
/min (water)
50
Flow rate
100
/min (ANR)
150
0.05
0.04
0
0.1
0.2
0.3
0.4
0.5
AMGZ0
High-pressure
AMD5*2 AMG00 AMG*02 GAMD**2 specifications AMD
Flow rate
0.1
Start point
0.06
AMD4*2
0.05
0.15
Secondary pressure MPa
0.1
Secondary pressure MPa
0.15
Flow rate 100 cm3/min (water)
Primary pressure 0.5MPa
0.2
AMD3*2
Secondary pressure MPa
Primary pressure 0.5MPa
0.2
Pressure characteristics
Primary pressure MPa
Dimensions
PYM10-6 (Rc1/8)
Flow
-64
MAX 110
M30
AMB characteristics MMD*02 GMMD*02 MMD*0
Panel thickness MAX. 4
PYM10-8 (Rc1/4)
OUT
TMD*02
18
IN
2-Rc1/8
Gauge port Rc1/4
AMS AMDS TQAS regulator KML
Gauge port Rc1/8
2-Rc1/4
AMD0*2
Flow characteristics (water)
AMDZ
AMD0
Flow characteristics/pressure characteristics
Ø45
View P
View P
2-M5 depth 6
Fine
Others
Solenoid
valve
20
123
Fine regulator
PMM10 Series
PTFE regulator for air, N2 gas, and pure water
Specifications
Descriptions
PMM10-6
PMM10-8
Working fluid
Fluid temperature
Chemical liquids, pure water, N2 gas, air
˚C
5 to 60
Withstanding pressure MPa
0.75
Maximum working pressure MPa
0.5
Set pressure range MPa
0.02 to 0.2 (Note 2)
Ambient temperature ˚C
0 to 60
Installation attitude
Free
Rc1/8
Port size
Rc1/4
Note 1: Wetted material: PTFE, SUS316, nonrelief type
Note 2: Compatible with 0.02 to 0.4 MPa setting pressure range. Contact CKD for other applications.
Note 3: This valve is not used with acidic fluids.
Internal structure and parts list
How to order
PMM10
6
Fine regulator
A
A
3
1
4
2
5
OUT
IN
No.
124
Parts name
Material
1
Body
PTFE
Quantity
1
2
Diaphragm
PTFE
1
3
Actuator assembly
CPVC
1
4
Valve
SUS316
1
5
Spring
SUS316
1
Read the precautions on pages 7 to 12 in the introduction before use.
Port size
Port size
6
Rc1/8
8
Rc1/4
PMM10Series
Characteristics table/Dimensions
0.1
0
0.5
1.0
1.5
2.0
/min (water)
0.1
0.05
0
50
Air flow rate
100
/min (ANR)
150
Start point
0.06
0.05
0.04
0
0.1
0.2
0.3
0.4
0.5
AMGZ0
High-pressure
AMD5*2 AMG00 AMG*02 GAMD**2 specifications AMD
Flow rate
0.15
Flow rate 100 cm3/min (water)
AMD4*2
0.05
0.2
Secondary pressure MPa
0.15
Secondary pressure MPa
Primary pressure 0.5MPa
0.2
Pressure characteristics
Primary pressure 0.5MPa
AMD3*2
Secondary pressure MPa
Flow characteristics (air)
AMD0*2
Flow characteristics (water)
AMDZ
AMD0
Flow characteristics/pressure characteristics
Primary pressure MPa
Dimensions
PMM10-6 (Rc1/8)
PMM10-8 (Rc1/4)
(113)
Flow
AMB characteristics MMD*02 GMMD*02 MMD*0
OUT
OUT
IN
TMD*02
2-Rc1/4
24
2-Rc1/8
AMS AMDS TQAS regulator KML
2-M4 depth 8
46
36
Others
24
Fine
Solenoid
valve
125
Fine regulator
PMM20 Series
Pure water regulator with fluorine resin wetted areas
Specifications
Descriptions
PMM20
Working fluid
Pure water
Fluid temperature
˚C
5 to 80
Withstanding pressure MPa
0.75
Maximum working pressure MPa
0.5
Set pressure range MPa
0.02 to 0.2 (Note 3)
Ambient temperature ˚C
0 to 60
Installation attitude
Free
Connection
OD Ø10 tube connection (fitting integrated type), OD3/8" (fitting integrated type)
Note 1: Nonrelief type
Note 2: Panel installation possible.
Note 3: 0.05 to 0.4 MPa setting pressure range indicated with "-H" at the end of the model name. Contact CKD for details.
Internal structure and parts list
1
3
2
4
5
OUT
IN
No.
Parts name
Material
Quantity
1
Spring rest
SUS316
1
2
Diaphragm
PTFE
1
3
Stem
PCTFE
1
4
Valve
PTFE
1
5
Bellows
PTFE
1
6
Body
PFA
1
6
How to order
PMM20
10BUS
A
Connection
8US
Fine regulator
A
Connection
10UJ
10BUJ
10UP
10BUP
10UA
10BUA
10UR
10BUR
10UK
10BUK 10BUW
PTFE
3/8" X 1/4" tube connection
3/8" X 1/4" tube connection
PTFE
Ø10 X Ø8 tube connection
3/8" X 1/4" tube connection
PTFE
Ø10 X Ø8 tube connection
Read the precautions on pages 7 to 12 in the introduction before use.
3/8" X 1/4" tube connection
PTFE
Ø10 X Ø8 tube connection
3/8" X 1/4" tube connection
PTFE
Ø10 X Ø8 tube connection
3/8" X 1/4" tube connection
Ø10 X Ø8 tube connection
126
PFA
3/8" X 1/4" tube connection
Content
Body material (Note 1)
PFA molded body or PTFE machined body
Ø10 X Ø8 tube connection
Note 1: fittings other than those on the right are also
available.
Contact CKD for details.
10BUS
Super type Pillar
Super 300 type
Super 300 type F-LOCK 20A series F-LOCK 60 series Final lock fitting FLARTEC
fitting integrated type Pillar fitting J series Pillar fitting P series fitting integrated type fitting integrated type integrated type fitting
integrated type
integrated type
integrated type
Ø8 X Ø6 tube connection
Note on model No. selection
10US
PTFE
PMM20Series
Characteristics table/Dimensions
0.1
0
5
10
15
/min (water)
0.04
0
0.1
0.2 0.3 0.4 0.5
Primary pressure MPa
/min
0.11
0.10
0.09
0.08
0
0.3
0.4 0.5 0.6 0.7
Primary pressure MPa
AMGZ0
High-pressure
AMD5*2 AMG00 AMG*02 GAMD**2 specifications AMD
Flow rate
0.05
Flow rate 6
Start point
AMD4*2
0.05
Start point
0.06
Pressure characteristics 2 (water)
Secondary pressure MPa
0.15
Flow rate
100cm3/min
AMD3*2
Secondary pressure MPa
Primary pressure 0.3MPa
0.2
Secondary pressure MPa
Pressure characteristics 1 (water)
Dimensions
Ø50
PMM20- *1
117
(70 to 74)
61
26
TMD*02
Dimension
2-M5 depth 12
52
36
94
10US
102
10BUS
102
10UJ
98
10BUJ
98
10UP
102
10BUP
102
10UA
94
94
10UR
126
10BUR
130
10UK
112
10BUK
112
10BUW
117
Solenoid
valve
10BUA
Others
(A)
8US
Fine
52
A
AMS AMDS TQAS regulator KML
*1 (Connection model No.)
Flow
OUT
AMB characteristics MMD*02 GMMD*02 MMD*0
(8)
M36
Panel thickness MAX. 6
Ø33
IN
AMD0*2
Flow characteristics (water)
AMDZ
AMD0
Flow characteristics/pressure characteristics
127
AMD0*2
Overview
AMD3*2
This switch accurately detects the
level of corrosive fluids including
pure water, acids, alkalis, and
solvents, and outputs electrical
signals.
AMD4*2
KML70
Detection points: 8 points
Remote operation
The separate sensor and display
enable the display to be installed
away from the fluid tank and
operation. Internal communication
(RS485) enables operation from a
host computer.
KML60
Detection points: 4 points or 6
points settable
A mixed manifold is established
when used with KML50 (1-point
detection type).
Highly accurate level detection
(±1 mm)
Outstanding installation
performance
Fine
Others
Models with high corrosionresistant materials are selected
based on the ambient
atmosphere.
AMS AMDS TQAS regulator KML
KML50
TMD*02
The internal fixed orifice
eliminates the need to set the
detection flow.
Flow
Detection flow setting not
required
Intro 7
130
134
138
AMB characteristics MMD*02 GMMD*02 MMD*0
The differential pressure section
detects differences in environmental
pressure and water level, enabling
detection resistant to environmental
pressure fluctuations to be used with
the same pressure environment for
the detection tube and environment
detection tube.
Precautions
KML70
KML60
KML50
AMGZ0
High-pressure
AMD5*2 AMG00 AMG*02 GAMD**2 specifications AMD
Features
Resistant to environmental
pressure fluctuation
AMDZ
AMD0
KML70/60/50
Digital fine level switch
Solenoid
valve
Digital fine level switch
KML70 Series
Detection flow setting not required
Resistant to environmental pressure fluctuations (differential pressure)
Internal communication function (RS485) for remote operation
Specifications
Descriptions
KML70-G-485
KML70-D-485
Detection type
Gauge pressure method
Differential pressure method
Working fluid
*1 Clean air, N2
Supply pressure range kPa
10 to 30
Supply fluid temperature ˚C
5 to 50
Ambient temperature ˚C
Withstanding pressure
5 to 50
Supply pressure
100
kPa Detection pressure
10
Detected water level range mm
*2 1 to 700
Environmental pressure fluctuation range kPa
-
Consumption flow rate Ncm3/min
70 or less
Monitor output
Within ±3 (detection tube and environment detection tube must be at same pressure environment)
140 or less
4 to 20MA DC (load resistance 200 to 550 )
24V DC ±10% ripple (p-p) 1% or less
Power supply voltage
Current consumption mA
130 or less (at 24VDC)
Output type
8-point NPN open collector (CH1 to CH6 a contact, CH7 to CH8 b contact)
Output rating
30VDC 50mA or less
Insulation resistance M
100 or more (500VDC for one minute)
Withstand voltage
Commercial frequency 500VAC for one minute
*2 ±3 (10 minutes or more after power ON)
Repeatability
mm
Hysteresis
mm
*2 1 to 10 setting
Response speed
ms
600 or less (at supply pressure 20kPa, detection tube inner diameter Ø4mm, length 5m)
Within ±1.2 (detected fluid: water)
Temperature characteristics mm/˚C
Detection tube ID size mm
4
Detection tube length m
Within 5
*1 Use fluids filtered with a 0.3 m or higher performance filter.
*2 The above specifications are for fluid pressure 20 kPa, power voltage 24 VDC, ambient temperature 20˚C, detection piping bore Ø4 x length 5
m, specific gravity setting 1 and nozzle installation height 0. The detected fluid is water.
Precautions
1
2
3
4
5
Install the switch at a position higher than the level to be detected.
Use a Ø4 mm ID size piping for detection. Do not install anything that may cause resistance, such as an aperture, in piping.
This switch cannot be used in a sealed fluid tank or similar fluid tank.
Do not block detection piping or detection port with a valve, etc. Supply pressure applied to the sensor chip may result in damage.
Use compressed air filtered for dirt and oil with a submicron filter or microalescer.
6 Do not stop pressure supply. Chemical liquid may flow back from the detection tube to the sensor, with adverse effects.
7 The EXH port is left open when using gauge pressure. Do not block with a plug, etc.
8 This switch cannot be used in a chemical liquid environment.
Piping example
Gauge pressure method
0.3 m
100 kPa
20 kPa
Differential pressure method
KML70-G
(Gauge pressure method)
100 kPa
20 kPa
0.3 m
P. I
P. I
P.S
P.S
EXH
EXH
Pneumatic Air dryer Air filter Oil mist filter
source
Low pressure Low pressure
regulator
regulator
Released to air
2619-1C-P80 RJB500 Series
KML70-D
(Differential pressure method)
Pneumatic Air dryer Air filter Oil mist filter
source
Detection tube
Regulator
Regulator
Exhaust duct
Environmental pressure Detection tube
detection tube
Liquid tank
Liquid tank
130
Read the precautions on pages 7 to 12 in the introduction before use.
KML70Series
How to order
AMDZ
AMD0
How to order
KML70
G
AMD0*2
Discrete
485
Model No.
A
A
Detection type
Communication
C
Sensor cable length
Descriotion
G
Gauge pressure method
D
Differential pressure method
B
485
RS485 communication
C
Blank
Sensor cable 5m
3
Sensor cable 3m
AMD4*2
B
AMD3*2
Symbol
AMGZ0
High-pressure
AMD5*2 AMG00 AMG*02 GAMD**2 specifications AMD
[Example of model number]
KML70-G-485
Model: KML70
A Detection type:
Gauge pressure method
RS485 communication
B Communication:
C Sensor cable length: 5m
Option (bracket/cable)
KML70
B
Descriotion
Symbol
Model No.
A Option
Sensor bracket
P
Power supply cable (3m)
O
Output cable (3m)
Flow
AMB characteristics MMD*02 GMMD*02 MMD*0
B
TMD*02
Fine
AMS AMDS TQAS regulator KML
Others
Solenoid
valve
131
KML70Series
Internal structure and key component materials
Sensor body
·KML70-G-485
*
11
40
*
11
40
5m (3m)
5m (3m)
35
35
·KML70-D-485
5
5
48
4
6
2
2-M3 depth 3.5
P.S
Environment detection port
2-M5
3
4
6
32±0.3
27±0.3
32±0.3
Supply port
M5
2-M3 depth 3.5
27±0.3
2
P.I
EXH
12
12
EXH
4
4
28
28
48
P.S
3
Supply port
M5
Atmospheric port
2-M5
55
P.I
6
Detection port
2-M5
1
55
6
Detection port
2-M5
1
Nipple, plug, gasket (accessories)
M5
10.5
There are two P.I ports and EXH ports on the front and back of the product. Attach the enclosed
plug to the ports not being used to prevent leakage.
*The EXH port is left open when using gauge pressure. Do not attach the plug.
8
7
8
Gauge pressure method
Ø8
M5
Differential pressure method
3
9
P.I
0.8
90 ˚
4
5
4.5
45
27
2-Ø3.2
2-Ø6.2
Sensor bracket (option)
·KML70-B
3
2-5.5
28
132
10
P.I
P.I
EXH
EXH
No.
1
2
3
4
5
6
7
8
9
10
P.I
P.I
P.S
P.S
P.S
EXH
40
32
P.I
EXH
EXH
Part name
Body A
Body B
Cross headed pan screw
Name plate
Sensor cable
Bush
Nipple
Plug
Gasket
Bracket
P.I
P.I
P.S
EXH
Material
PPS
PPS
SUS304
PET
PVC
PA
SUS304
SUS304
PTFE
SUS304
EXH
EXH
KML70Series
Internal structure and key component materials
Part name
Material drawing number
1
2
Front panel
Case
PBT
3
Bracket
SUS304
4
5
Wiring indication plate
Serial nameplate
43
45
(56)
No.
AMD3*2
(65)
4
AMD4*2
Panel thickness t1 to 5
100
5
Sensor cable connector
22
(12)
24
(19)
5
1
2
Output cable connector
3
s
les
or
.0 3
4-R
22.5 +0
+0.3
Panel hole dimension
Mounting pitch
25
45
Mounting pitch
25
AMB characteristics MMD*02 GMMD*02 MMD*0
Output cable (option)
·KML70-O
Flow
Power supply cable (option)
·KML70-P
+0.6
+0.1
Peel 7mm
3000
3000
Wiring connection diagram
KML70
Display section
Power connector
1 +24V
3
NOT
USE
4 FG
CH1
2
CH2
3
CH3
4
CH4
5
CH5
6
CH6
7
CH7
8
CH8
9 ALARM
Sensor monitoring
analog output
11 OUT+
12 OUT-
13 485+
RS485
Communication data 14 485-
Power supply voltage
+
+24
-
OV
FG
FG
White
Output cable
Brown KML70-O
Load power
Load
Red
Load
Orange
+
MAX 30V
-
OV
Load
Yellow
Load
Green
Load
Blue
Load
Purple
Load
Gray
Load
White
Load
Black
Brown
200 to 550
Load
Red
Orange
DC 4 to 20mA
I out
Fine
10 COM
Black
AMS AMDS TQAS regulator KML
1
Power supply cable
KML70-P
TMD*02
2 OV
Red
Host +
Yellow
Host Terminator
Terminator
KML70
Sensor section
+
2 -
-
3 SHILELD
SHILELD
Solenoid
valve
1 +
Others
Sensor cable
AMGZ0
High-pressure
AMD5*2 AMG00 AMG*02 GAMD**2 specifications AMD
Power cable connector
2-M4
48
AMD0*2
Display section
AMDZ
AMD0
Internal structure and key component materials
133
Fine level switch
KML60 Series
Detect 4-point or 6-point fluid levels with one detection tube.
Specifications
Descriptions
KML60-4
Precautions
KML60-6
Working fluid
*1 Air, N2
Working pressure range
10 to 30 (When detecting water at 10 to 500mm set water level)
kPa
15 to 30 (When detecting water at 10 to 1000mm set water level)
˚C
5 to 50
Fluid temperature
Ambient temperature ˚C
Withstanding pressure
1 Install the switch at a position
higher than the level to be detected.
2 Use compressed air filtered for dirt
and oil with a submicron filter or
microalescer.
3 Use an oil-prohibited low-pressure
regulator.
4 Use a Ø4 mm ID size piping for
detection. Do not install anything
that may cause resistance, such as
an aperture, in piping.
5 The manifold has six P·S ports.
Mask ports that are not required.
6 This switch cannot be used in a
sealed fluid tank or similar fluid
tank.
7 Do not block detection piping or
detection port with a valve, etc.
Supply pressure applied to the
sensor chip may result in damage.
8 When using as a mixed manifold
with the KML50 Series, see KML50
Series precautions for use.
9 Do not stop pressure supply.
Chemical liquid may flow back from
the detection tube to the sensor,
with adverse effects.
10 This switch cannot be used in a
chemical liquid environment.
5 to 50
Supply pressure
100
kPa Detection pressure
20 (2000mm when detecting water level)
Detected water level range mm
*2 10 to 1000
12 to 24VDC ±10%
Power supply voltage
Ripple (p-p) 5% or less
Current consumption mA
Output type
40 or less (at 24VDC)
50 or less (at 24VDC)
4-point NPN open collector
6-point NPN open collector
Output rating
28VDC 80mA or less
Insulation resistance M
100 or more (500VDC for one minute)
Withstand voltage
Commercial frequency 500VAC for one minute
Repeatability
mm
Hysteresis
mm
*2 ±10 (10 minutes or more after power ON)
*2 4 or less (set water level 10 to 200mmH2O)
20 or less (set water level 200 to 1000mmH2O)
Response speed
ms
600 or less (at supply pressure 20kPa, detection tube inner diameter Ø4mm, length 5m)
±1.2
Temperature characteristics mm/˚C
Detection tube ID size mm
4
Detection tube length m
Within 5
*1 Use fluids filtered with a 0.3 m or lower performance filter.
* 2 T h e a b o v e s p e c i f i c a t i o n s a r e f o r f l u i d p r e s s u r e 2 0 k P a , p o w e r v o l t a g e 2 4 V D C , an d a m b i e n t
temperature 20˚C. The detected fluid is water.
Internal structure and parts list
Usage example
1
Pneumatic source
Air dryer
10 to 30 kPa
Pressure gauge
Low pressure
regulator
RJB500 Series
2
Submicron air filter
100 kPa
Pressure gauge
Low pressure
regulator
2619-1C-P80
KML60-6-0
KML50-2C-A-0
P.I
P.I
POWER
SW.1
SW.2
SW.3
SW.4
SW.5
SW.6
P.I
Oil mist filter
KML60-4-0
POWER
SW.1
SW.2
SW.3
SW.4
P.I
MXKML2C-A-5
11640
P.I
3
Detection point
No.
134
Parts name Material
Quantity
1
1
Circuit board Epoxy resin with glass
2
Sensor
Fe/Ni alloy
Nickel plating, silicone bonding
1
3
Base
PVC
1
Read the precautions on pages 7 to 12 in the introduction before use.
KML60Series
How to order
4
R
0
Description
Symbol
A
A No. of output points
No. of output points
Setting trimmer operation indicator direction
4-point setting type
6
6-point setting type
B Setting trimmer operation indicator direction
Blank
P.I port side
R
P.I. port back side
C Installation *1
Installation
[Example of model number]
KML60-4R-0
Model: KML60
A No. of output points:
4 point
B Setting trimmer operation indicator direction: P.I. port back side
C Installation:
For sub-plate installation
Blank
For discrete manifold
0
For sub-plate installation
*1: When installing the C 0 product on the manifold subbase, two of the
supply ports on the manifold subbase become unusable. When using top
ports on a manifold, other supply ports must be used.
Manifold
MXKML
1C-A
3
146
R
Description
Symbol
Model No.
A
KML50 model for combination mounting
A KML50 model for combination mounting
KML50-1C-A-0 combination mounting
1C-B
KML50-1C-B-0 combination mounting
2C-A
KML50-2C-A-0 combination mounting
2C-B
KML50-2C-B-0 combination mounting
0A-A
KML50-0A-A-0 combination mounting
0A-B
KML50-0A-B-0 combination mounting
1B-A
KML50-1B-A-0 combination mounting
2B-A
KML50-2B-A-0 combination mounting
2B-B
KML50-2B-B-0 combination mounting
Flow
KML50 not mounted together
1C-A
AMB characteristics MMD*02 GMMD*02 MMD*0
00-0
B No. of sub-plate stations
B
No. of sub-plate stations
2 stations
3
3 stations
4
4 stations
5
5 stations
C Manifold switch layout *1*2*3*4
0
Masking
1
KML50 type designated with A item
4
KML60-4-0
6
KML60-6-0
D Setting trimmer operation indicator direction
D
MXKML-1C-A-4-1046-R
P.I port side
R
P.I. port back side
*1: Designate the switch layout on the manifold with 0, 1, 4, or 6 number
arrays.
*2: Designate the array from the front left (P.I port side) of the manifold.
*3: Designate the same number of digits as the number of sub-plate stations
designated in item B .
*4: When using masking, always designate 0 at the masking position.
Others
Solenoid
valve
Model: MXKML
A KML50 model for combination mounting: KML50-1C-A-0
4 stations
B No. of sub-plate stations:
C Manifold switch layout:
Arranged in order of KML50-1C-A-0,
masking, KML60-4-0, and KML60-6-0
from front left.
D Setting trimmer operation indicator direction: P.I. port back side
Blank
Fine
[Example of model number]
Setting trimmer operation
indicator direction
AMS AMDS TQAS regulator KML
Manifold switch layout
1 station
2
TMD*02
C
1
AMGZ0
High-pressure
AMD5*2 AMG00 AMG*02 GAMD**2 specifications AMD
C
4
AMD4*2
B
AMD3*2
Model No.
AMD0*2
KML60
AMDZ
AMD0
How to order
Discrete
135
KML60Series
Dimensions
KML60-4
Cable length 1m
SW.1
SW.2
SW.3
103
SW.4
4-M3
Depth 10
P.S port (supply port)
Nipple for 4mm ID size tube
P.S
10
P. I
20
50
20±0.3
P.I port (supply port)
Nipple for 4mm ID size tube
47
20±0.3
56
27±0.3
35
35
27±0.3
35
4-M3
Depth 10
35
KML60-6
50
Cable length 1m
136
KML60Series
Dimensions
AMDZ
AMD0
Dimensions
AMD0*2
MXKML-0A-A-*-* (manifold)
AMD3*2
AMD4*2
AMGZ0
High-pressure
AMD5*2 AMG00 AMG*02 GAMD**2 specifications AMD
POWER
SW.1
POWER
SW.2
SW.1
SW.3
SW.2
SW.4
SW.3
SW.5
SW.4
SW.6
2-Ø4.5
Exhaust port
P.I
P.I
10
20
38
Flow
P.S port (supply port)
6-Rc1/8
16
9
18
36
53
P.I port (detection port)
Rc1/8
A
B
C
No. of sub-plate stations
A
B
C
1
-
66
76
2
36
102
112
3
72
138
148
4
108
174
184
5
144
210
220
TMD*02
Wiring connection diagram
AMS AMDS TQAS regulator KML
Shield wire
Red Power supply
Cable
12 to 24VDC
Black COM
White SW.1 Output
Brown SW.2 Output
Gray SW.4 Output
Orange SW.5 Output
(KML60-6)
Load
Load
Load
MAX
28VDC
80 mA
Load
Others
Pink SW.6 Output
(KML60-6)
0V
Load
Fine
Yellow SW.3 Output
AMB characteristics MMD*02 GMMD*02 MMD*0
25
30
50
P.I
Load
Solenoid
valve
137
Fine level switch
KML50 Series
Fluid level detector with ±1 mm detection accuracy and outstanding
installation performance
Specifications
KML50-0A-A
B
Descriptions
A
KML50-1B
C-B
Air, N2
Working fluid
Working pressure range kPa
Fluid temperature
15 to 35
10 to 30
5 to 60
˚C
Ambient temperature ˚C
15 to 40
5 to 60
Withstanding pressure kPa
Water level range
Contact capacity
A
KML50-2B
C-B
mm
50
8 to 100
3A 125/250V AC resistance load
A type
0.25A 100V DC resistance load
B type
Switching *1 Switching point
water level level mm Hysteresis
Repeatability
1 to 600
8 to 12
8 to 12
1 to 3
5 or less
2 or less
2 or less
±1
mm
Response speed
ms
200 or less (at detection flow rate
75cm3/min(ANR),
detection tube ID size Ø4mm, length 2m)
4
Detection tube ID size ømm
Detection tube length m
Within 2
Air consumption rate cm3/min (ANR)
750 or less (at supply pressure 20kPa)
Remarks:
1
2
*1. The above specifications apply to the supply pressure 20 kPa (ambient temperature 24±2˚C). Supply highly clean air.
These are values for measuring water.
The microswitch is the C contact, and the reed switch is the A contact.
Precautions
1 Install the switch at a position higher than the level to be
detected.
2 Use compressed air filtered for dirt and oil with a
submicron filter or microalescer.
3 Use an oil-prohibited low-pressure regulator.
4 The switch is adjusted with water or a fluid with
equivalent viscosity before shipment.
5 Use a Ø4 mm ID size piping for detection. Do not install
anything that may cause resistance, such as an
aperture, in piping.
6 The manifold has eight P·S ports. Mask ports that are
not required.
7 This switch cannot be used in a sealed fluid tank or
similar fluid tank.
8 The switch may be damaged if a load exceeding 50 kPa
is applied on the PS port. Gradually increase pressure
from 0.
9 Set the switch facing upward at a position higher than
the fluid level.
10 The needle is adjusted before shipment, so do not
readjust it.
11 Excessive pressure may result in damage if the EXH port
is plugged. Leave the EXH port open.
12 If corrosive gas may be led in from the detection tube, do
not stop supplied gas. This switch prevents corrosive gas
from entering the detector by discharging the detected
gas from the detection tube.
13 This switch cannot be used in a chemical liquid
environment.
138
Internal structure and parts list
1
4
2
3
No.
Parts name
Material
1
Microswitch
-
1
2
Body
PVC
1
3
Diaphragm
PTFE
1
4
Diaphragm
U
1
The material differs with the model. Contact CKD for details.
Read the precautions on pages 7 to 12 in the introduction before use.
Quantity
KML50Series
How to order
1
Model No.
B
Symbol
A Detection class
0 (Note 1)
1 (Note 1)
2 (Note 1)
Detection class
Diaphragm
PTFE
U
U
C
Switch type
A
B
Microswitch
Reed switch
Option
Blank
0
Discrete
Discrete for manifold
D
Option
AMGZ0
High-pressure
AMD5*2 AMG00 AMG*02 GAMD**2 specifications AMD
Material combination
A
B
C
Switch type
D
Body
PVC
A6063
PVC
B
Material combination
C
Hysteresis
5
2
2
AMD4*2
B
Description
Switching point
8 to 12
8 to 12
1 to 3
AMD3*2
A
B
AMD0*2
KML50
AMDZ
AMD0
How to order
Discrete
Manifold
MKML
Model No.
1
A
B
B
4
2
Symbol
A Detection class
0 (Note 1)
1 (Note 1)
2 (Note 1)
Detection class
Material combination
A
B
C
C
C
Switch type
A
B
Switch type
D
No. of masks
Diaphragm
PTFE
U
U
Microswitch
Reed switch
D
No. of sub-plate stations
1
1 station
2
2 stations
3
3 stations
4
4 stations
5
5 stations
E
No. of masks
0
1
2
3
4
No. of sub-plate stations
E
Body
PVC
A6063
PVC
Flow
B
Material combination
Hysteresis
5
2
2
AMB characteristics MMD*02 GMMD*02 MMD*0
B
Description
Switching point
8 to 12
8 to 12
1 to 3
TMD*02
No masking
1 attached
2 attached
3 attached
4 attached
AMS AMDS TQAS regulator KML
Note on model No. selection
Note 1: When A is 0, only A is used for B . If A is 1 or 2, only B or C is used for B .
Fine
Others
Solenoid
valve
139
KML50Series
Dimensions
KML50-0A-A
68
Terminal box
COM
(Attached)
NO
NC
EXH port (exhaust port)
10
20
P.S
30
P.I
20±0.3
EXH
Nipple for 4mm ID size tube
50
P.I port (supply port)
70
Nipple for 4mm ID size tube
P.S port (supply port)
Nipple for 4mm ID size tube
35
47
4-M3 depth 10
56
27±0.3
4-M3 depth 10
27±0.3
140
20±0.3
KML50Series
Dimensions
AMDZ
AMD0
Dimensions
AMD0*2
MKML-0A-A-*-* (manifold)
AMD3*2
AMD4*2
9
AMGZ0
High-pressure
AMD5*2 AMG00 AMG*02 GAMD**2 specifications AMD
D
COM
NO
2-Ø4.5
NC
Exhaust port
P.I
10
20
25
30
P.I
50
P.I
38
36
A
P.I port (detection port)
B
Rc1/8
9
Flow
8-Rc1/8
AMB characteristics MMD*02 GMMD*02 MMD*0
P.S port (supply port)
16
18
53
C
No. of sub-plate stations
A
66
76
44
102
112
80
138
148
116
108
174
184
152
144
210
220
188
36
3
72
4
5
Fine
AMS AMDS TQAS regulator KML
D
2
B
TMD*02
C
1
Others
Solenoid
valve
141
AMD0*2
AMD3*2
AMD4*2
AMGZ0
High-pressure
AMD5*2 AMG00 AMG*02 GAMD**2 specifications AMD
144
146
148
150
Microflow adjustment valve
Pilot regulator
Dump valve (2-port valve)
Dump valve (3-port valve)
AMDZ
AMD0
Other high purity chemical liquid components
Custom order
Flow
AMB characteristics MMD*02 GMMD*02 MMD*0
TMD*02
Fine
AMS AMDS TQAS regulator KML
Others
Solenoid
valve
Microflow adjustment valve Series
Realizing stable microflow adjustment by separating flow control
and valve open/close functions
Specifications
Descriptions
LYX-0961-*, LYX-0965-*
Working fluid
Chemical liquids, pure water
Fluid temperature
˚C
5 to 60
Withstanding pressure MPa
0.6
Working pressure range MPa
0 to 0.3
Ambient temperature ˚C
0 to 60
Installation attitude
Free
Note 1: This valve cannot be used with acidic fluids.
Note 2: See AMDZ on page 2 for air-operated valve specifications.
Model No.
LYX
0961
6BUS
1
A
A
Type
0961 Air-operated valve integrated type
0965 Only microflow adjustment valve (no valve closing function)
Type
B
B
Connection
6
Rc1/8
3US
Super type Pillar fitting integrated type
6BUS
3UF
F-LOCK 20 series fitting integrated type
3UR
F-LOCK 60 series fitting integrated type
6BUR
Connection
C
C
Actuation
(Select only for LYX-0961)
Actuation
1
NC (normally closed)
2
NO (normally open)
3
Double acting
Flow characteristics/pressure characteristics
Comparison of flow characteristics
Fluid: Water Differential pressure: 0.1MPa
Flow rate [cm3/min]
1200
1000
AMDZ with flow control
800
600
400
LYX-0961, LYX-0965
200
0
1.0
2.0
3.0
4.0
5.0
No. of dial turns
144
Read the precautions on pages 7 to 12 in the introduction before use.
Ø3 X Ø2 tube connection
1/8" X 0.086" tube connection
Ø3 X Ø2 tube connection
Ø3 X Ø2 tube connection
1/8" X 1/16" tube connection
11
Fine
2-Rc1/8
Ø1
28
Port A
Port B
AMS AMDS TQAS regulator KML
MAX 70
TMD*02
11
Flow
AMB characteristics MMD*02 GMMD*02 MMD*0
Port A
Port B
11
20.5±0.5
4-M3 depth 4
Ø2
Ø1
45
41
11
20.5
8.5
AMGZ0
High-pressure
AMD5*2 AMG00 AMG*02 GAMD**2 specifications AMD
10±0.3
22
Dimensions
LYX-0961-6BUS-1
(68)
Control port M5 depth 4.5
(NC type)
LYX-0965-6
22
36
2-M3 depth 4
Others
Solenoid
valve
145
AMD4*2
22
AMD3*2
MAX 70
AMD0*2
10±0.3
AMDZ
AMD0
11
LYXSeries
Dimensions
Pilot regulator Series
Enabling accurate pressure control with air drive
Subject to Export Trade Control Ordinances
*Target: LYX-0960 only
Specifications
Descriptions
LYX-0958
Working fluid
LYX-0959
Pure water, chemical liquids
Maximum working pressure MPa
0.3
Maximum working pressure MPa
0.1
Set pressure range MPa
0.02 to 0.1
Fluid temperature
Set flow rate
LYX-0960
˚C
5 to 40
/min
Connection
0.1 to 2
2 to 10
10 to 30
Rc1/4, 1/4" tube connection
Rc1/2, 1/2" tube connection
Rc3/4, 3/4" tube connection
Note 1: Consult with CKD when using acidic fluids.
Note 2: The secondary side of the pilot regulator must be released to air. (There is no valve closing function.)
How to order
Small flow type
LYX
0958
Medium flow type
8BUS
A
LYX
0959
Connection
A
A
Connection
8
Rc1/4
6US
Super type Pillar fitting integrated type
8BUS
6UJ
Super 300 type Pillar fitting J series integrated type
8BUJ
6UP
Super 300 type Pillar fitting P series integrated type
8BUP
6UF
F-LOCK 20 series fitting integrated type
8BUF
6UR
F-LOCK 60 series fitting integrated type
8BUR
6UK
Final lock fitting integrated type
8BUK
8BUW FLARTEC fitting integrated type
0960
Ø6 X Ø4 tube connection
1/4" X 5/32" tube connection
Ø6 X Ø4 tube connection
1/4" X 5/32" tube connection
Ø6 X Ø4 tube connection
1/4" X 5/32" tube connection
Ø6 X Ø4 tube connection
Ø6.35 X Ø4.3 tube connection
Ø6 X Ø4 tube connection
1/4" X 5/32" tube connection
Ø6 X Ø4 tube connection
1/4" X 5/32" tube connection
1/4" X 5/32" tube connection
Connection
15
Rc1/2
12US
Super type Pillar fitting integrated type
15BUS
12UJ
Super 300 type Pillar fitting J series integrated type
15BUJ
12UP
Super 300 type Pillar fitting P series integrated type
15BUP
12UA
F-LOCK 20A series fitting integrated type
15BUA
12UR
F-LOCK 60 series fitting integrated type
15BUR
12UK
Final lock fitting integrated type
15BUK
15BUW FLARTEC fitting integrated type
20BUR
A
Connection
A
Connection
Rc3/4
20
20BUS Super type Pillar fitting integrated type
20BUJ Super 300 type Pillar fitting J series integrated type
20BUP Super 300 type Pillar fitting P series integrated type
20BUA F-LOCK 20A series fitting integrated type 3/4 " X 5/8 " tube connection
20BUR F-LOCK 60 series fitting integrated type
20BUK Final lock fitting integrated type
20BUW FLARTEC fitting integrated type
146
Connection
A
Large flow type
LYX
12UJ
Read the precautions on pages 7 to 12 in the introduction before use.
Ø12 X Ø10 tube connection
1/2" X 3/8" tube connection
Ø12 X Ø10 tube connection
1/2" X 3/8" tube connection
Ø12 X Ø10 tube connection
1/2" X 3/8" tube connection
Ø12 X Ø10 tube connection
1/2" X 3/8" tube connection
Ø12 X Ø10 tube connection
1/2" X 3/8" tube connection
Ø12 X Ø10 tube connection
1/2" X 3/8" tube connection
1/2" X 3/8" tube connection
LYXSeries
Characteristics table/Dimensions
AMDZ
AMD0
Flow characteristics (water)
0.06
0.04
0.02
0
2
Flow rate
4
/min (water)
6
Secondary pressure MPa
0.08
Primary pressure 0.3MPa
0.1
0.08
0.06
0.04
0.02
0
10
20
30
Flow rate /min (water)
Primary pressure 0.3MPa
0.1
0.08
0.06
0.04
0.02
0
AMD4*2
Secondary pressure MPa
Primary pressure 0.3MPa
0.1
LYX-0960
AMD3*2
Secondary pressure MPa
LYX-0959
AMD0*2
LYX-0958
20
40
60
Flow rate /min (water)
AMGZ0
High-pressure
AMD5*2 AMG00 AMG*02 GAMD**2 specifications AMD
Dimensions
Control port Rc1/8
LYX-0958- *1
LYX-0959- *1
LYX-0960- *1
F
OUT
A
B
IN
4-C
G
D
Flow
AMB characteristics MMD*02 GMMD*02 MMD*0
LYX-0958
Dimension
B
C
D
E
F
G
LYX-0958
28
40
M6 depth 16
50±0.4
50±0.4
76
84
LYX-0959
32
47
M8 depth 19
60±0.4
60±0.4
92
118
LYX-0960
35
55
M8 depth 19 80±0.4
80±0.4
110 146
*1 (Connection model No.)
LYX-0960
LYX-0959
H
*1 (Connection model No.)
H
*1 (Connection model No.)
H
15
118
20
146
6US
120
12US
177
20BUS
224
8BUS
120
15BUS
177
20BUJ
214
6UJ
118
12UJ
172
20BUP
218
8BUJ
118
15BUJ
172
20BUA
208
6UP
122
12UP
176
20BUR
234
8BUP
122
15BUP
176
20BUK
219
6UF
118
12UA
168
20BUW
222
8BUF
118
15BUA
168
6UR
144
12UR
192
8BUR
146
15BUR
196
6UK
125
12UK
184
8BUK
125
15BUK
184
8BUW
140
15BUW
185
Others
84
Fine
8
AMS AMDS TQAS regulator KML
Model No.
A
TMD*02
E
G
H
Solenoid
valve
147
Air-operated valve for chemical liquids
Discharge valve (2-port valve) Series
Orifice: Ø25/Ø32/Ø40/Ø50
Specifications
Descriptions
LYX-0877
LYX-0878
Working fluid
LYX-0879
Chemical liquids, pure water (Note 1)
Fluid temperature
˚C
Withstanding pressure
MPa
0.1
Working pressure range MPa
0.02
Valve seat leakage
5 to 90
cm3/min
0 (at, water pressure)
Ambient temperature ˚C
0 to 40
Frequency
6 times/min or less
Installation attitude
Free
Connection (PVC union fitting integrated type)
Nominal 25
Ø25
Orifice
Nominal 30
Ø32
Operation Operation pressure range MPa
section
LYX-0880
Nominal 40
Ø40
Nominal 50
Ø50
0.4 to 0.5
Operation pressure connection port
Rc1/8
Note 1: Check compatibility of product configuration materials, working fluid, and ambient atmosphere before use.
How to order
LYX
0877 25AU
A
Connection
2P A
B
O ring material
A
Connection
0877-25AU
0878-32AU
0879-40AU
0880-50AU
PVC union fitting
Orifice
Symbol Descriptions
B
148
Nominal 25
Nominal 30
Nominal 40
Nominal 50
Ø25
Ø32
Ø40
Ø50
O ring material
A
EPDM
I
FKM
Read the precautions on pages 7 to 12 in the introduction before use.
AMGZ0
High-pressure
Flow
GAMD**2
High pressure
specifications
Flow characteristics
characteristics
GMMD*02 MMD*0
AMD AMB
AMD5*2 AMG00 AMG*02 GAMD**2
MMD*02 GMMD*02
specifications
ØE
AMD4*2
TMD*02
Dimensions
H
G
(C)
B
Dimension
F
G
H
25
75
147
76
70
18
32
45
LYX-0878-32AU
32
101
189
100
96
29
49
63
LYX-0879-40AU
40
101
183
100
96
29
49
63
LYX-0880-50AU
50
109
205
130
120
29
52
67
Solenoid
valve
149
Fine
LYX-0877-25AU
Others
AMS AMDS TQAS regulator KML Others
E
C
AMD3*2
2-control port Rc1/8
F
D
B
A
Model No.
AMD0*2
ØD
AMDZ
AMD0
B
A
A
Discharge valve (2-port valve)
Dimensions
Air-operated valve for chemical liquids
Discharge valve (3-port valve) Series
Orifice: Ø32/Ø40/Ø50
Specifications
Descriptions
LYX-0882
LYX-0883
Chemical liquids, pure water (Note 1)
Working fluid
5 to 90
Fluid temperature
˚C
Withstanding pressure
MPa
0.1
Working pressure range MPa
0.02
Valve seat leakage
0 (at, water pressure)
cm3/min
0 to 40
Ambient temperature ˚C
6 times/min or less
Frequency
Free
Installation attitude
Connection (PVC union fitting integrated type)
Orifice
Operation Operation pressure range
section
LYX-0884
Nominal 30
Nominal 40
Nominal 50
Ø32
Ø40
Ø50
0.4 to 0.5
MPa
Rc1/8
Operation pressure connection port
Note 1: Check the compatibility of the product's configuration materials, working fluid, and ambient atmosphere before use.
How to order
LYX
0882 32AU
A
Connection
3P A
B
O ring material
A
Connection
0882-32AU
0883-40AU
0884-50AU
PVC union fitting
Orifice
Symbol Descriptions
B
O ring material
A
I
150
EPDM
FKM
Read the precautions on pages 7 to 12 in the introduction before use.
Nominal 30
Nominal 40
Nominal 50
Ø32
Ø40
Ø50
Discharge valve (3-port valve)
Dimensions
AMDZ
AMD0
Dimensions
M
M
AMD0*2
L
L
K
K
K
AMD4*2
K
AMD3*2
AMGZ0
High-pressure
AMD5*2 AMG00 AMG*02 GAMD**2 specifications AMD
I
(G)
J
AMB characteristics MMD*02 GMMD*02 MMD*0
B
H
F
A
4-control port Rc1/8
B
B
Flow
4-M8 depth 15
ØA
C
TMD*02
D
D
(E)
B
C
D
E
F
G
H
I
J
K
L
M
LYX-0882-32AU
32
130
90
70
230
90
190
200
15
40
15
10
10
LYX-0883-40AU
40
130
90
70
230
90
198
200
15
40
15
10
10
LYX-0884-50AU
50
140
110
80
270
100
224
230
20
40
15
10
15
Fine
A
Model No.
AMS AMDS TQAS regulator KML
Dimension
Others
Solenoid
valve
151
AMDZ
AMD0
Operation solenoid valve
AMD0*2
Overview
AMD3*2
Solenoid valves for chemical liquid
air-operated valves are available.
AMD4*2
These compact, space-saving,
high-performance solenoid valves
have safety functions and are ecofriendly.
4GA/4GB
154
154
155
Flow
AMB characteristics MMD*02 GMMD*02 MMD*0
miniature solenoid valve
pilot-operated pneumatic
3/5-port valve block manifold
pilot-operated pneumatic
3/5-port valve
AMGZ0
High-pressure
AMD5*2 AMG00 AMG*02 GAMD**2 specifications AMD
MN3E0/MN4E0
MN4GA/4GB
TMD*02
Fine
AMS AMDS TQAS regulator KML
Others
Solenoid
valve
MN3E0/MN4E0 Series
(3/4 port valve, two built-in 3-port valves integrated type)
Extra compact (height 39.5mm), high-performance block manifold
Compact and space saving
A 40mm or less valve height is realized with a 10mm coil width (CKD
conventional part: 46mm)
This valve improves the equipment's foot print, and can be installed
anywhere.
Environment protection
Environment-friendly non-halogen lead wires are used for the internal wire.
(T30 type D sub-connector)
High performance
· Well balanced responsiveness of 12ms between A port and B port
(CKD data value using type with two built-in 3-port valves)
· No more bothersome wiring work
Adoption of connectors allows wiring work to be completed during
assembly.
(Catalog No. CC-691)
Specifications
MN3E0
Descriptions
MN4E0
Compressed air
Working fluid
Pilot operated
Actuation
Soft spool
Valve structure
0.2 to 0.7
Working pressure MPa
Ef. sec. area
mm2
2.5 to 2.7
2.4 to 2.7
Electrical specifications
Rated voltage
V
12, 24 DC
Power consumption
W
0.6
MN4GA/4GB Series
(3/5 port valve block manifold)
User and eco-friendly next-generation block manifold
(Catalog No. CB-23S)
Environment resistance
Paintless: Dust is not generated by peeling paint.
Indication of material names: Material names are displayed on key
components to facilitate recycling, etc.
Safety
Miss-operation prevention mechanism is incorporated in connection key
Ease-of-use
Reduced wiring: Serial transmission(compact slave station OPP4)
Piping connection: Direct piping type, base piping type
TAG nameplates available
Flexibility
Mixed blocks compatible with MN4G1 and 2 mounting
Reliability
Responsiveness 12ms±2ms (CKD data value for 4G1 series)
Life cycles 60 million or more (with clean air at 0.5MPa pressure)
Specifications
MN3G
Descriptions
MN4G
Compressed air
Working fluid
Pilot operated
Actuation
Soft spool
Valve structure
Working pressure MPa
0.2 to 0.7
mm2
3.2 to 13
Ef. sec. area
Electrical specifications
Rated voltage V DC
AC
100
Power consumption W 12, 24 DC
0.55 (0.6)
Apparent power VA 100V AC
1.0 (1.2)
Values in parentheses apply when a lamp is installed.
154
12, 24
4GA/4GB Series
(3/5 port valve)
4G
Compressed air
Working fluid
Pilot operated
Actuation
Soft spool
Valve structure
0.2 to 0.7
Working pressure MPa
Ef. sec. area
mm2
3.2 to 19
4 to 19
Electrical specifications
Rated voltage V DC
AC
12, 24
100
Power consumption W 12, 24 DC
0.55 (0.6)
Apparent power VA 100V AC
1.0 (1.2)
Values in parentheses apply when a lamp is installed.
AMGZ0
High-pressure
AMD5*2 AMG00 AMG*02 GAMD**2 specifications AMD
3G
Descriptions
AMD4*2
Specifications
AMD3*2
(Catalog No. CB-23S)
AMD0*2
Safety
Protective cover protects miss-operation of the manual override caused by
external force, etc.
Cylinder miss-operation caused by back pressure is prevented when using a
single-acting cylinder.
Reliability
· Life cycles 60 million or more (with clean air at 0.5MPa pressure)
60 million cycles exceeded in CKD's specified strict durability test.
· Responsiveness 12ms±2ms (CKD data value for 4G1 series)
New sliding mechanism accurately improves reliability of life and
responsiveness, etc.
Ease-of-use
· Common wiring connectors for top or side mounting
Top and side wiring are possible just by inserting the wire. PAT.
AMDZ
AMD0
General-purpose valves for diverse needs
Flow
AMB characteristics MMD*02 GMMD*02 MMD*0
TMD*02
Fine
AMS AMDS TQAS regulator KML
Others
Solenoid
valve
155
Guide to CKD Electronic Catalog
(CAD DATA)
Using and ordering the electronic catalog
The electronic catalog, which aims to make CAD designing more efficient, is provided on a CD-ROM as a
pneumatic and control component related CAD database which focuses on the designers needs.
Please contact your CKD Sales person or your nearest sales office to order this CD.
Indicate the following information when placing your order:
(1) CAD software name and version
(2) OS name
There are three types of CD-ROMS according to the recorded CAD software and OS type. Always indicate the
name of the CAD software and the OS you are using.
Compatible CAD types
1
MICRO CADAM Ver 1.9
2
DMNDOS (MICRO CADAM DOS ver.)
3
DXF
Note 1: The CAD software names are registered trademarks of the respective companies.
Note 2: Use DXF data when using CAD software other than those listed above.
DXF data can be downloaded from the CKD internet website.
http://www.ckd.co.jp/
Searching the electronic catalog file name
1. Searching from the catalog
If there is a CAD mark (
) in the catalog, the CAD data is registered. Search for the
registered file using the applicable product model, listed on the following page, as a key. Input
"CAD data file name" from the CAD software to call out the drawing.
2. Searching from the CD-ROM
Open kensaku.exe, List.txt (for DXF) or LIST_MC.txt (for MICRO CADAM) on the CD-ROM,
and search for the registered file name using the applicable product Model No. as a key. The
drawings can then be called out by inputting the "CAD data file name" from the CAD
software.
156
CAD Electric Catalog
File list
AMDZ
AMD0
Air-operated valve for chemical liquids
AMDZ/AMD0 PFA body
Product Model No.
AMDZ
amdz_ _6_2.dxf
amdz_ _6_2_1.dxf
amdz_ _3us_2.dxf
amdz_ _3us_2_1.dxf
amdz_ _6bus_2.dxf
amdz_ _6bus_2_1.dxf
amdz_ _3uf_2.dxf
amdz_ _3uf_2_1.dxf
amdz_ _3ur_2.dxf
amdz_ _3ur_2_1.dxf
amdz_ _6bur_2.dxf
amdz_ _6bur_2_1.dxf
amd0_ _6_4.dxf
amd0_ _6_4_1.dxf
amd0_ _6us_4.dxf
amd0_ _6us_4_1.dxf
amd0_ _8bus_4.dxf
amd0_ _8bus_4_1.dxf
amd0_ _6uj_4.dxf
amd0_ _6uj_4_1.dxf
amd0_ _8buj_4.dxf
amd0_ _8buj_4_1.dxf
amd0_ _6up_4.dxf
amd0_ _6up_4_1.dxf
amd0_ _8bup_4.dxf
amd0_ _8bup_4_1.dxf
amd0_ _6uf_4.dxf
amd0_ _6uf_4_1.dxf
amd0_ _8buf_4.dxf
amd0_ _8buf_4_1.dxf
amd0_ _6ur_4.dxf
amd0_ _6ur_4_1.dxf
amd0_ _8bur_4.dxf
amd0_ _8bur_4_1.dxf
amd0_ _6uk_4.dxf
amd0_ _6uk_4_1.dxf
amd0_ _8buk_4.dxf
amd0_ _8buk_4_1.dxf
amd0_ _8buw_4.dxf
amd0_ _8buw_4_1.dxf
AMD3*2
AMD4*2
AMGZ0
High-pressure
AMD5*2 AMG00 AMG*02 GAMD**2 specifications AMD
AMD0
File name
AMD0*2
Flow
AMB characteristics MMD*02 GMMD*02 MMD*0
AMDZ*-6-2
AMDZ*-6-2-1
AMDZ*-3US-2
AMDZ*-3US-2-1
AMDZ*-6BUS-2
AMDZ*-6BUS-2-1
AMDZ*-3UF-2
AMDZ*-3UF-2-1
AMDZ*-3UR-2
AMDZ*-3UR-2-1
AMDZ*-6BUR-2
AMDZ*-6BUR-2-1
AMD0*-6-4
AMD0*-6-4-1
AMD0*-6US-4
AMD0*-6US-4-1
AMD0*-8BUS-4
AMD0*-8BUS-4-1
AMD0*-6UJ-4
AMD0*-6UJ-4-1
AMD0*-8BUJ-4
AMD0*-8BUJ-4-1
AMD0*-6UP-4
AMD0*-6UP-4-1
AMD0*-8BUP-4
AMD0*-8BUP-4-1
AMD0*-6UF-4
AMD0*-6UF-4-1
AMD0*-8BUF-4
AMD0*-8BUF-4-1
AMD0*-6UR-4
AMD0*-6UR-4-1
AMD0*-8BUR-4
AMD0*-8BUR-4-1
AMD0*-6UK-4
AMD0*-6UK-4-1
AMD0*-8BUK-4
AMD0*-8BUK-4-1
AMD0*-8BUW-4
AMD0*-8BUW-4-1
DXF
Folder name
TMD*02
Fine
AMS AMDS TQAS regulator KML
Others
Solenoid
valve
157
CAD Electric Catalog
File list
AMD3*2 PFA body
Product Model No.
AMD3*2-10US-0
AMD3*2-10US-1
AMD3*2-10US-2
AMD3*2-10US-3
AMD3*2-10BUS-0
AMD3*2-10BUS-1
AMD3*2-10BUS-2
AMD3*2-10BUS-3
AMD3*2-10UJ-0
AMD3*2-10UJ-1
AMD3*2-10UJ-2
AMD3*2-10UJ-3
AMD3*2-10BUJ-0
AMD3*2-10BUJ-1
AMD3*2-10BUJ-2
AMD3*2-10BUJ-3
AMD3*2-10UP-0
AMD3*2-10UP-1
AMD3*2-10UP-2
AMD3*2-10UP-3
AMD3*2-10BUP-0
AMD3*2-10BUP-1
AMD3*2-10BUP-2
AMD3*2-10BUP-3
AMD3*2-10UA-0
AMD3*2-10UA-1
AMD3*2-10UA-2
AMD3*2-10UA-3
AMD3*2-10BUA-0
AMD3*2-10BUA-1
AMD3*2-10BUA-2
AMD3*2-10BUA-3
AMD3*2-10UR-0
AMD3*2-10UR-1
AMD3*2-10UR-2
AMD3*2-10UR-3
AMD3*2-10BUR-0
AMD3*2-10BUR-1
AMD3*2-10BUR-2
AMD3*2-10BUR-3
AMD3*2-10UK-0
AMD3*2-10UK-1
AMD3*2-10UK-2
AMD3*2-10UK-3
AMD3*2-10BUK-0
AMD3*2-10BUK-1
AMD3*2-10BUK-2
AMD3*2-10BUK-3
AMD3*2-10BUW-0
AMD3*2-10BUW-1
AMD3*2-10BUW-2
AMD3*2-10BUW-3
AMD3*2-12US-0
AMD3*2-12US-1
AMD3*2-12US-2
AMD3*2-12US-3
AMD3*2-15BUS-0
AMD3*2-15BUS-1
AMD3*2-15BUS-2
AMD3*2-15BUS-3
AMD3*2-12UJ-0
AMD3*2-12UJ-1
AMD3*2-12UJ-2
AMD3*2-12UJ-3
AMD3*2-15BUJ-0
AMD3*2-15BUJ-1
AMD3*2-15BUJ-2
AMD3*2-15BUJ-3
AMD3*2-12UP-0
AMD3*2-12UP-1
AMD3*2-12UP-2
158
DXF
Folder name
AMD3_2
File name
amd3_2_10us_0.dxf
amd3_2_10us_1.dxf
amd3_2_10us_2.dxf
amd3_2_10us_3.dxf
amd3_2_10bus_0.dxf
amd3_2_10bus_1.dxf
amd3_2_10bus_2.dxf
amd3_2_10bus_3.dxf
amd3_2_10uj_0.dxf
amd3_2_10uj_1.dxf
amd3_2_10uj_2.dxf
amd3_2_10uj_3.dxf
amd3_2_10buj_0.dxf
amd3_2_10buj_1.dxf
amd3_2_10buj_2.dxf
amd3_2_10buj_3.dxf
amd3_2_10up_0.dxf
amd3_2_10up_1.dxf
amd3_2_10up_2.dxf
amd3_2_10up_3.dxf
amd3_2_10bup_0.dxf
amd3_2_10bup_1.dxf
amd3_2_10bup_2.dxf
amd3_2_10bup_3.dxf
amd3_2_10ua_0.dxf
amd3_2_10ua_1.dxf
amd3_2_10ua_2.dxf
amd3_2_10ua_3.dxf
amd3_2_10bua_0.dxf
amd3_2_10bua_1.dxf
amd3_2_10bua_2.dxf
amd3_2_10bua_3.dxf
amd3_2_10ur_0.dxf
amd3_2_10ur_1.dxf
amd3_2_10ur_2.dxf
amd3_2_10ur_3.dxf
amd3_2_10bur_0.dxf
amd3_2_10bur_1.dxf
amd3_2_10bur_2.dxf
amd3_2_10bur_3.dxf
amd3_2_10uk_0.dxf
amd3_2_10uk_1.dxf
amd3_2_10uk_2.dxf
amd3_2_10uk_3.dxf
amd3_2_10buk_0.dxf
amd3_2_10buk_1.dxf
amd3_2_10buk_2.dxf
amd3_2_10buk_3.dxf
amd3_2_10buw_0.dxf
amd3_2_10buw_1.dxf
amd3_2_10buw_2.dxf
amd3_2_10buw_3.dxf
amd3_2_12us_0.dxf
amd3_2_12us_1.dxf
amd3_2_12us_2.dxf
amd3_2_12us_3.dxf
amd3_2_15bus_0.dxf
amd3_2_15bus_1.dxf
amd3_2_15bus_2.dxf
amd3_2_15bus_3.dxf
amd3_2_12uj_0.dxf
amd3_2_12uj_1.dxf
amd3_2_12uj_2.dxf
amd3_2_12uj_3.dxf
amd3_2_15buj_0.dxf
amd3_2_15buj_1.dxf
amd3_2_15buj_2.dxf
amd3_2_15buj_3.dxf
amd3_2_12up_0.dxf
amd3_2_12up_1.dxf
amd3_2_12up_2.dxf
CAD Electric Catalog
File list
DXF
File name
Folder name
AMD3_2
amd3_2_12up_3.dxf
amd3_2_15bup_0.dxf
amd3_2_15bup_1.dxf
amd3_2_15bup_2.dxf
amd3_2_15bup_3.dxf
amd3_2_12ua_0.dxf
amd3_2_12ua_1.dxf
amd3_2_12ua_2.dxf
amd3_2_12ua_3.dxf
amd3_2_15bua_0.dxf
amd3_2_15bua_1.dxf
amd3_2_15bua_2.dxf
amd3_2_15bua_3.dxf
amd3_2_12ur_0.dxf
amd3_2_12ur_1.dxf
amd3_2_12ur_2.dxf
amd3_2_12ur_3.dxf
amd3_2_15bur_0.dxf
amd3_2_15bur_1.dxf
amd3_2_15bur_2.dxf
amd3_2_15bur_3.dxf
amd3_2_12uk_0.dxf
amd3_2_12uk_1.dxf
amd3_2_12uk_2.dxf
amd3_2_12uk_3.dxf
amd3_2_15buk_0.dxf
amd3_2_15buk_1.dxf
amd3_2_15buk_2.dxf
amd3_2_15buk_3.dxf
amd3_2_15buw_0.dxf
amd3_2_15buw_1.dxf
amd3_2_15buw_2.dxf
amd3_2_15buw_3.dxf
AMD0*2
AMD3*2
AMD4*2
AMGZ0
High-pressure
AMD5*2 AMG00 AMG*02 GAMD**2 specifications AMD
AMB characteristics MMD*02 GMMD*02 MMD*0
AMD3*2-12UP-3
AMD3*2-15BUP-0
AMD3*2-15BUP-1
AMD3*2-15BUP-2
AMD3*2-15BUP-3
AMD3*2-12UA-0
AMD3*2-12UA-1
AMD3*2-12UA-2
AMD3*2-12UA-3
AMD3*2-15BUA-0
AMD3*2-15BUA-1
AMD3*2-15BUA-2
AMD3*2-15BUA-3
AMD3*2-12UR-0
AMD3*2-12UR-1
AMD3*2-12UR-2
AMD3*2-12UR-3
AMD3*2-15BUR-0
AMD3*2-15BUR-1
AMD3*2-15BUR-2
AMD3*2-15BUR-3
AMD3*2-12UK-0
AMD3*2-12UK-1
AMD3*2-12UK-2
AMD3*2-12UK-3
AMD3*2-15BUK-0
AMD3*2-15BUK-1
AMD3*2-15BUK-2
AMD3*2-15BUK-3
AMD3*2-15BUW-0
AMD3*2-15BUW-1
AMD3*2-15BUW-2
AMD3*2-15BUW-3
AMDZ
AMD0
Product Model No.
AMD3*2 stainless steel body
Product Model No.
AMD3_2_S
File name
Flow
AMD3*2-8-0
AMD3*2-8-1
AMD3*2-3BT-0
AMD3*2-3BT-1
AMD3*2-6S-0
AMD3*2-6S-1
AMD3*2-10-0
AMD3*2-10-1
AMD3*2-4BT-0
AMD3*2-4BT-1
AMD3*2-8S-0
AMD3*2-8S-1
DXF
Folder name
amd3_2_8_0.dxf
amd3_2_8_1.dxf
amd3_2_3bt_0.dxf
amd3_2_3bt_1.dxf
amd3_2_6s_0.dxf
amd3_2_6s_1.dxf
amd3_2_10_0.dxf
amd3_2_10_1.dxf
amd3_2_4bt_0.dxf
amd3_2_4bt_1.dxf
amd3_2_8s_0.dxf
amd3_2_8s_1.dxf
TMD*02
Fine
AMS AMDS TQAS regulator KML
Others
Solenoid
valve
159
CAD Electric Catalog
File list
AMD4*2 PFA body
Product Model No.
AMD4*2-20BUS-0
AMD4*2-20BUS-1
AMD4*2-20BUS-2
AMD4*2-20BUS-3
AMD4*2-20BUJ-0
AMD4*2-20BUJ-1
AMD4*2-20BUJ-2
AMD4*2-20BUJ-3
AMD4*2-20BUP-0
AMD4*2-20BUP-1
AMD4*2-20BUP-2
AMD4*2-20BUP-3
AMD4*2-20BUA-0
AMD4*2-20BUA-1
AMD4*2-20BUA-2
AMD4*2-20BUA-3
AMD4*2-20BUR-0
AMD4*2-20BUR-1
AMD4*2-20BUR-2
AMD4*2-20BUR-3
AMD4*2-20BUK-0
AMD4*2-20BUK-1
AMD4*2-20BUK-2
AMD4*2-20BUK-3
AMD4*2-20BUW-0
AMD4*2-20BUW-1
AMD4*2-20BUW-2
AMD4*2-20BUW-3
DXF
File name
Folder name
AMD4_2
amd4_2_20bus_0.dxf
amd4_2_20bus_1.dxf
amd4_2_20bus_2.dxf
amd4_2_20bus_3.dxf
amd4_2_20buj_0.dxf
amd4_2_20buj_1.dxf
amd4_2_20buj_2.dxf
amd4_2_20buj_3.dxf
amd4_2_20bup_0.dxf
amd4_2_20bup_1.dxf
amd4_2_20bup_2.dxf
amd4_2_20bup_3.dxf
amd4_2_20bua_0.dxf
amd4_2_20bua_1.dxf
amd4_2_20bua_2.dxf
amd4_2_20bua_3.dxf
amd4_2_20bur_0.dxf
amd4_2_20bur_1.dxf
amd4_2_20bur_2.dxf
amd4_2_20bur_3.dxf
amd4_2_20buk_0.dxf
amd4_2_20buk_1.dxf
amd4_2_20buk_2.dxf
amd4_2_20buk_3.dxf
amd4_2_20buw_0.dxf
amd4_2_20buw_1.dxf
amd4_2_20buw_2.dxf
amd4_2_20buw_3.dxf
AMD4*2 stainless steel body
Product Model No.
AMD4*2-15-0
AMD4*2-15-1
AMD4*2-6BT-0
AMD4*2-6BT-1
AMD4*2-12S-0
AMD4*2-12S-1
DXF
File name
Folder name
AMD4_2_S
amd4_2_15_0.dxf
amd4_2_15_1.dxf
amd4_2_6bt_0.dxf
amd4_2_6bt_1.dxf
amd4_2_12s_0.dxf
amd4_2_12s_1.dxf
AMD5*2 PFA body
Product Model No.
AMD5*2-25US-0
AMD5*2-25US-1
AMD5*2-25US-2
AMD5*2-25US-3
AMD5*2-25BUS-0
AMD5*2-25BUS-1
AMD5*2-25BUS-2
AMD5*2-25BUS-3
AMD5*2-25UJ-0
AMD5*2-25UJ-1
AMD5*2-25UJ-2
AMD5*2-25UJ-3
AMD5*2-25BUJ-0
AMD5*2-25BUJ-1
AMD5*2-25BUJ-2
AMD5*2-25BUJ-3
AMD5*2-25UP-0
AMD5*2-25UP-1
AMD5*2-25UP-2
AMD5*2-25UP-3
AMD5*2-25BUP-0
AMD5*2-25BUP-1
AMD5*2-25BUP-2
AMD5*2-25BUP-3
AMD5*2-25BUA-0
AMD5*2-25BUA-1
AMD5*2-25BUA-2
AMD5*2-25BUA-3
AMD5*2-25UR-0
AMD5*2-25UR-1
AMD5*2-25UR-2
160
DXF
Folder name
AMD5_2
File name
amd5_2_25us_0.dxf
amd5_2_25us_1.dxf
amd5_2_25us_2.dxf
amd5_2_25us_3.dxf
amd5_2_25bus_0.dxf
amd5_2_25bus_1.dxf
amd5_2_25bus_2.dxf
amd5_2_25bus_3.dxf
amd5_2_25uj_0.dxf
amd5_2_25uj_1.dxf
amd5_2_25uj_2.dxf
amd5_2_25uj_3.dxf
amd5_2_25buj_0.dxf
amd5_2_25buj_1.dxf
amd5_2_25buj_2.dxf
amd5_2_25buj_3.dxf
amd5_2_25up_0.dxf
amd5_2_25up_1.dxf
amd5_2_25up_2.dxf
amd5_2_25up_3.dxf
amd5_2_25bup_0.dxf
amd5_2_25bup_1.dxf
amd5_2_25bup_2.dxf
amd5_2_25bup_3.dxf
amd5_2_25bua_0.dxf
amd5_2_25bua_1.dxf
amd5_2_25bua_2.dxf
amd5_2_25bua_3.dxf
amd5_2_25ur_0.dxf
amd5_2_25ur_1.dxf
amd5_2_25ur_2.dxf
CAD Electric Catalog
File list
DXF
File name
Folder name
AMD5_2
amd5_2_25ur_3.dxf
amd5_2_25bur_0.dxf
amd5_2_25bur_1.dxf
amd5_2_25bur_2.dxf
amd5_2_25bur_3.dxf
amd5_2_25uk_0.dxf
amd5_2_25uk_1.dxf
amd5_2_25uk_2.dxf
amd5_2_25uk_3.dxf
amd5_2_25buk_0.dxf
amd5_2_25buk_1.dxf
amd5_2_25buk_2.dxf
amd5_2_25buk_3.dxf
amd5_2_25buw_0.dxf
amd5_2_25buw_1.dxf
amd5_2_25buw_2.dxf
amd5_2_25buw_3.dxf
amd5_2_15au_0.dxf
amd5_2_15au_1.dxf
amd5_2_15au_2.dxf
amd5_2_15au_3.dxf
amd5_2_20au_0.dxf
amd5_2_20au_1.dxf
amd5_2_20au_2.dxf
amd5_2_20au_3.dxf
AMD0*2
AMD3*2
AMD4*2
AMGZ0
High-pressure
AMD5*2 AMG00 AMG*02 GAMD**2 specifications AMD
AMD5*2-25UR-3
AMD5*2-25BUR-0
AMD5*2-25BUR-1
AMD5*2-25BUR-2
AMD5*2-25BUR-3
AMD5*2-25UK-0
AMD5*2-25UK-1
AMD5*2-25UK-2
AMD5*2-25UK-3
AMD5*2-25BUK-0
AMD5*2-25BUK-1
AMD5*2-25BUK-2
AMD5*2-25BUK-3
AMD5*2-25BUW-0
AMD5*2-25BUW-1
AMD5*2-25BUW-2
AMD5*2-25BUW-3
AMD5*2-15AU-0
AMD5*2-15AU-1
AMD5*2-15AU-2
AMD5*2-15AU-3
AMD5*2-20AU-0
AMD5*2-20AU-1
AMD5*2-20AU-2
AMD5*2-20AU-3
AMDZ
AMD0
Product Model No.
AMD5*2 stainless steel body
Product Model No.
AMD5*2-8BT-0
AMD5*2-8BT-1
AMD5*2-16S-0
AMD5*2-16S-1
DXF
File name
Folder name
AMD5_2_S
amd5_2_8bt_0.dxf
amd5_2_8bt_1.dxf
amd5_2_16s_0.dxf
amd5_2_16s_1.dxf
Product Model No.
DXF
Folder name
AMD_02
File name
amd2_10.dxf
amd2_10_1.dxf
amd3_15.dxf
amd3_15_1.dxf
amd3_15_2.dxf
amd3_15_3.dxf
amd4_20.dxf
amd4_20_1.dxf
amd4_20_2.dxf
amd4_20_3.dxf
Flow
AMD2-10
AMD2-10-1
AMD3-15
AMD3-15-1
AMD3-15-2
AMD3-15-3
AMD4-20
AMD4-20-1
AMD4-20-2
AMD4-20-3
AMB characteristics MMD*02 GMMD*02 MMD*0
Sister product AMD**
TMD*02
Fine
AMS AMDS TQAS regulator KML
Others
Solenoid
valve
161
CAD Electric Catalog
File list
Manual valve
MMD302 PFA body
Product Model No.
MMD302-10US
MMD302-10BUS
MMD302-10UJ
MMD302-10BUJ
MMD302-10UP
MMD302-10BUP
MMD302-10UA
MMD302-10BUA
MMD302-10UR
MMD302-10BUR
MMD302-10UK
MMD302-10BUK
MMD302-10BUW
MMD302-12US
MMD302-15BUS
MMD302-12UJ
MMD302-15BUJ
MMD302-12UP
MMD302-15BUP
MMD302-12UA
MMD302-15BUA
MMD302-12UR
MMD302-15BUR
MMD302-12UK
MMD302-15BUK
MMD302-15BUW
DXF
File name
Folder name
MMD302
mmd302_10us.dxf
mmd302_10bus.dxf
mmd302_10uj.dxf
mmd302_10buj.dxf
mmd302_10up.dxf
mmd302_10bup.dxf
mmd302_10ua.dxf
mmd302_10bua.dxf
mmd302_10ur.dxf
mmd302_10bur.dxf
mmd302_10uk.dxf
mmd302_10buk.dxf
mmd302_10buw.dxf
mmd302_12us.dxf
mmd302_15bus.dxf
mmd302_12uj.dxf
mmd302_15buj.dxf
mmd302_12up.dxf
mmd302_15bup.dxf
mmd302_12ua.dxf
mmd302_15bua.dxf
mmd302_12ur.dxf
mmd302_15bur.dxf
mmd302_12uk.dxf
mmd302_15buk.dxf
mmd302_15buw.dxf
MMD402 PFA body
Product Model No.
MMD402-20BUS
MMD402-20BUJ
MMD402-20BUP
MMD402-20BUA
MMD402-20BUR
MMD402-20BUK
MMD402-20BUW
DXF
File name
Folder name
MMD402
mmd402_20bus.dxf
mmd402_20buj.dxf
mmd402_20bup.dxf
mmd402_20bua.dxf
mmd402_20bur.dxf
mmd402_20buk.dxf
mmd402_20buw.dxf
AMD502 PFA body
Product Model No.
MMD502-25US
MMD502-25BUS
MMD502-25UJ
MMD502-25BUJ
MMD502-25UP
MMD502-25BUP
MMD502-25BUA
MMD502-25UR
MMD502-25BUR
MMD502-25UK
MMD502-25BUK
MMD502-25BUW
DXF
File name
Folder name
MMD502
mmd502_25us.dxf
mmd502_25bus.dxf
mmd502_25uj.dxf
mmd502_25buj.dxf
mmd502_25up.dxf
mmd502_25bup.dxf
mmd502_25bua.dxf
mmd502_25ur.dxf
mmd502_25bur.dxf
mmd502_25uk.dxf
mmd502_25buk.dxf
mmd502_25buw.dxf
MMD302 stainless steel body
Product Model No.
MMD302-8-P
MMD302-3BT-P
MMD302-6S-P
MMD302-10-P
MMD302-4BT-P
MMD302-8S-P
DXF
File name
Folder name
MMD302
mmd302_8_p.dxf
mmd302_3bt_p.dxf
mmd302_6s_p.dxf
mmd302_10_p.dxf
mmd302_4bt_p.dxf
mmd302_8s_p.dxf
MMD402 stainless steel body
Product Model No.
MMD402-15-P
MMD402-6BT-P
MMD402-12S-P
DXF
File name
Folder name
MMD402
mmd402_15_p.dxf
mmd402_6bt_p.dxf
mmd402_12s_p.dxf
MMD502 stainless steel body
Product Model No.
MMD502-15AU
MMD502-20AU
MMD502-8BT-P
MMD502-16S-P
162
DXF
Folder name
MMD502
File name
mmd502_15au.dxf
mmd502_20au.dxf
mmd502_8bt_p.dxf
mmd502_16s_p.dxf
CAD Electric Catalog
File list
DXF
Product Model No.
File name
Folder name
MMD_0
mmd20_10.dxf
mmd20_10us_bus.dxf
mmd20_10uf_buf.dxf
mmd20_10ua_bua.dxf
mmd30_15.dxf
mmd30_ _us_bus.dxf
mmd30_ _uf_buf.dxf
mmd30_ _ua_bua.dxf
mmd40_20.dxf
mmd40_20bus.dxf
mmd40_20buf.dxf
mmd40_20bua.dxf
AMD0*2
AMD3*2
AMD4*2
MMD20-10
MMD20-10US/BUS
MMD20-10UF/BUF
MMD20-10UA/BUA
MMD30-15
MMD30-*US/BUS
MMD30-*UF/BUF
MMD30-*UA/BUA
MMD40-20
MMD40-20BUS
MMD40-20BUF
MMD40-20BUA
AMDZ
AMD0
Sister product MMD*0
AMGZ0
High-pressure
AMD5*2 AMG00 AMG*02 GAMD**2 specifications AMD
Toggle valve TMD*02
DXF
Product Model No.
TMDZ02-6
TMDZ02-6BUS
TMD002-6
TMD002-8BUS
TMD302-15
TMD302-*US/BUS
TMD302-*UF/BUF
TMD302-*UA/BUA
File name
Folder name
tmdz02_6.dxf
tmdz02_6bus.dxf
tmd002_6.dxf
tmd002_8bus.dxf
tmd302_15.dxf
tmd302_ _us_bus.dxf
tmd302_ _uf_buf.dxf
tmd302_ _ua_bua.dxf
TMD
Drip prevention valve
Drip prevention valve AMS
DXF
Product Model No.
File name
amsz2_6.dxf
amsz2_3us.dxf
amsz2_6bus.dxf
amsz2_3uf.dxf
amsz2_3ur.dxf
amsz2_6bur.dxf
ams022_6.dxf
ams022_6us.dxf
ams022_8bus.dxf
ams022_6uj.dxf
ams022_8buj.dxf
ams022_6up.dxf
ams022_8bup.dxf
ams022_6uf.dxf
ams022_8buf.dxf
ams022_6ur.dxf
ams022_8bur.dxf
ams022_6uk.dxf
ams022_8buk.dxf
ams022_8buw.dxf
AMS
Flow
AMB characteristics MMD*02 GMMD*02 MMD*0
AMSZ2-6
AMSZ2-3US
AMSZ2-6BUS
AMSZ2-3UF
AMSZ2-3UR
AMSZ2-6BUR
AMS022-6
AMS022-6US
AMS022-8BUS
AMS022-6UJ
AMS022-8BUJ
AMS022-6UP
AMS022-8BUP
AMS022-6UF
AMS022-8BUF
AMS022-6UR
AMS022-8BUR
AMS022-6UK
AMS022-8BUK
AMS022-8BUW
Folder name
Integrated air-operated valve for chemical liquid/drip prevention valve AMDS
AMDS
File name
amdsz0_3us_0.dxf
amdsz0_6bus.dxf
amdsz0_3uf.dxf
amdsz0_3ur.dxf
amdsz0_6bur.dxf
amds00_6us.dxf
amds00_8bus.dxf
amds00_6uj.dxf
amds00_8buj.dxf
amds00_6up.dxf
amds00_8bup.dxf
amds00_6uf.dxf
amds00_8buf.dxf
amds00_6ur.dxf
amds00_8bur.dxf
amds00_6uk.dxf
amds00_8buk.dxf
amds00_8buw.dxf
Fine
AMS AMDS TQAS regulator KML
Others
AMDSZ0-3US-0
AMDSZ0-6BUS
AMDSZ0-3UF
AMDSZ0-3UR
AMDSZ0-6BUR
AMDS00-6US
AMDS00-8BUS
AMDS00-6UJ
AMDS00-8BUJ
AMDS00-6UP
AMDS00-8BUP
AMDS00-6UF
AMDS00-8BUF
AMDS00-6UR
AMDS00-8BUR
AMDS00-6UK
AMDS00-8BUK
AMDS00-8BUW
DXF
Folder name
TMD*02
Product Model No.
Solenoid
valve
163
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静岡県静岡市駿河区宮竹1-3-5
静 岡 県 浜 松 市 和 田 町 4 3 8
三 重 県 四日市 市 新 正 5 - 3 - 2 0
愛 知 県 小 牧 市 応 時 2 - 2 5 0
西
〒542-0073
〒570-0083
〒591-8021
〒524-0033
〒612-8414
〒639-1123
〒673-0016
〒542-0073
国
四
国
●高松営業所 〒760-0055 香川県高松市観光通2-2-15（ダイヤビル）
●松山営業所 〒790-0053 愛媛県松山市竹原2-1-33（サンライト竹原1階）
海
〒485-8551
〒473-0912
〒422-8035
〒435-0016
〒510-0064
〒485-8551
●広島営業所 〒734-0023 広 島 市 南 区 東 雲 本 町 3 - 1 - 1 0
●岡山営業所 〒700-0916 岡 山 県 岡 山 市 西 之 町 1 0 - 1 0 4
●山口営業所 〒747-0034 山 口 県 防 府 市 天 神 2 - 2 - 2
九
本
大阪市中央区日本橋1-17-17（銀泉 日本一ビル）
大阪府守口市京阪本通1-2-3（損保ジャパン守口ビル6階）
大阪府堺市新金岡町5-5-6（泉マンション1階）
滋賀県守山市浮気町字中ノ町300-21（第2小島ビル4階）
京都市伏見区竹田段川原町35-3
奈良県大和郡山市筒井町460-15（オッシェム･ロジナ1階）
兵庫県明石市松の内2-6-8（西明石スポットビル3階）
大阪市中央区日本橋1-17-17（銀泉 日本一ビル）
●このカタログに掲載の仕様および外観を、改善のため予告なく変更することがあります。
●北九州営業所
●福岡営業所
●大分営業所
●熊本営業所
州
〒802-0976
〒812-0013
〒871-0015
〒869-1103
北九州市小倉南区南方5-13-34
福岡市博多区博多駅東1-10-27（アスティア博多ビル5階）
大分県中津市牛神町1-11-1
熊本県菊池郡菊陽町久保田2799-13
社
●本社・工場 〒485-8551 愛 知 県 小 牧 市 応 時 ２ - ２５０
７7-1123
TEL（０５６８）
７７-１１１１ FAX（０５６８）
●営 業 本 部 〒485-8551 愛 知 県 小 牧 市 応 時 ２ - ２５０
TEL（０５68）74-1303 FAX（０５68）77-3410
●海外営業部 〒485-8551 愛 知 県 小 牧 市 応 時 ２ - ２５０
TEL（０５68）74-1338 FAX（０５68）77-3461
喜開理（上海）機器有限公司
CKD（SHANGHAI） CORPORATION
● 南京事務所 / NANJING OFFICE
PHONE +86（0 ）
25-86633426 FAX +86-（0）25-83733596
● 重慶事務所 / CHONGQING OFFICE
（0 ）
PHONE +8623-68610533 FAX +86-（0）23-68631161
● 成都事務所 / CHENGDU OFFICE
（0 ）
PHONE +8628-86624906 FAX +86-（0）28-86620216
● 西安事務所 / XIAN OFFICE
（0）29-88793422 FAX +86（0 ）
PHONE +8629-88709982
● 深 事務所（SHENZHEN OFFICE）
PHONE +86（0）755-83646644 FAX +86（0 ）
755-83646699
● 営業部 / 上海事務所 SALES HEADQUARTERS / SHANGHAI OFFICE
（0 ）
PHONE +8621-58798266 FAX +86-（0）21-58797507
● 北京事務所 / BEIJING OFFICE
（0 ）
PHONE +8610-63951008 FAX +86-（0）10-63957378
● 天津事務所 / TIANJIN OFFICE
PHONE +86（0 ）
22-27492788 FAX +86-（0）22-27483916
● 無錫事務所 / WUXI OFFICE
（0 ）
PHONE +86510-2753506 FAX +86-（0）510-2750156
● 広州事務所（GUANGZHOU OFFICE）
PHONE +86（0 ）
20-83313461 FAX +86-（0）20-83313462
● 大連事務所 / DALIAN OFFICE
PHONE +86（0 ）
411-83779312 FAX +86-（0）411-83779313
● 長春事務所 / CHANG CHUN OFFICE
（0 ）
PHONE +86431-2909875 FAX +86-（0）431-2909875
● 杭州事務所（HANGZHOU OFFICE）
PHONE +86（0 ）
571-85800055 FAX +86-（0）571-85800054
CKD CORPORATION EUROPE BRANCH
PHONE +31（
- 0）23-5541490
FAX +31（
- 0）23-5541491
CKD KOREA CORPORATION
PHONE +82（
- 0）2-783-5201∼5203 FAX +82（
- 0）2-783-5204
CKD UK REPRESENTATIVE
PHONE +44（
- 0）121-4219330
FAX +44（
- 0）121-4220475
日商喜開理股 有限公司台湾分公司
CKD CORPORATION TAIWAN BRANCH
PHONE +886（
- 0）2-2523-5081
- 0）2-2523-0374 FAX +886（
CKD SINGAPORE PTE. LTD.
CKD BELGIUM REPRESENTATIVE
PHONE +65-6744-2623 FAX +65-6744-2486
PHONE +32（
- 0）2-541-4768
FAX +32（
- 0）2-541-4702
CKD USA CORPORATION
CKD CO.,LTD.,o.s.CZECH OFFICE
PHONE +420-321-612-001
FAX +420-321-800-000
CKD THAI CORPORATION LTD.
● SALES HEADQUARTERS-BANGKOK OFFICE
PHONE +66（
- 0）2-267-6300 FAX +66（
- 0）2-267-6305
● LAEMCHABANG OFFICE
PHONE +66（
- 0）38-330-133 FAX +66（
- 0）38-330-079
● NAVANAKORN OFFICE
+
+
PHONE 66（
- 0）2-909-2158 FAX 66（
- 0）2-909-1168
● RAYONG OFFICE
PHONE +66（
- 0）38-608-549 FAX +66（
- 0）38-609-299
● LAMPHUN OFFICE
PHONE +66（
- 0）53-582-116 FAX +66（
- 0）53-582-079
● KORAT OFFICE
PHONE +66（
- 0）4424-8860 FAX +66（
- 0）4424-8862
M-CKD PRECISION SDN.BHD.
● HEADQUARTERS
PHONE +1-847-368-0539
● CINCINNATI OFFICE
PHONE +1-859-283-2776
● AUSTIN OFFICE
PHONE +1-512-821-9900
● SAN JOSE OFFICE
PHONE +1-510-659-9245
FAX +1-847-788-0575
FAX +1-859-283-2785
FAX +1-512-821-9903
FAX +1-510-659-9485
● HEADQUARTERS
PHONE +60（
- 0）3-5541-1468 FAX +60（
- 0）3-5541-1533
● JOHOR BAHRU OFFICE
+
PHONE 60（
- 0）7-352-9129 FAX +60（
- 0）7-352-9144
● MELAKA OFFICE
PHONE +60（
- 0）6-286-9989 FAX +60（
- 0）6-288-2700
● PENANG OFFICE
PHONE +60（
- 0）4-399-9611 FAX +60（
- 0）4-390-9811
：Distributors
OVERSEAS DPT. SALES DIV. 2-250 Ouji Komaki, Aichi 485-8551, Japan PHONE+81-(0)568-74-1338 FAX+81-(0)568-77-3461
U.S.A
CKD USA CORPORATION
● HEADQUARTERS
4080 Winnetka Avenue, Rolling Meadows, IL 60008 USA
● CINCINNATI OFFICE
1420 Jamike Drive, Erlanger, KY 41018 USA
● AUSTIN OFFICE
8403 Cross Park Drive, Suite 3G, Austin, TX 78754, USA
● SAN JOSE OFFICE
48501 Warm Spring Boulevard, Suite 114
Fremont, CA 94539 USA
EUROPE
CK EUROPE BRANCH
De Fruittuinen 28 Hoofddorp 2132NZ The Netherlands
Malaysia
M-CKD PRECISION SDN.BHD.
● HEADQUARTERS
Lot No.6,Jalan Modal 23/2, Seksyen 23, Kawasan, MIEL,
Fasa 8, 40300 Shah Alam,Selangor Darul Ehsan, Malaysia
● JOHOR BAHRU OFFICE
116&118 Jalan Rosmerah 2/17, Taman Johor Jaya, 81100
Johor Bahru, Malaysia
● MELAKA OFFICE
No.B-10, Ground Floor, Bachang Permai，Jalan Tun Fatimah
Batu Berendam 75350 Melaka, Malaysia
● PENANG OFFICE
No.2678, Ground Floor, Jalan Chain Ferry, Taman Inderwasih,
13600 Prai, Penang, Malaysia
Thailand
CKD THAI CORPORATION LTD.
● SALES HEADQUARTERS-BANGKOK OFFICE
Suwan Tower, 14/1 Soi Saladaeng 1, North Sathorn Rd.,
Bangrak, Bangkok 10500 Thailand
● LAEMCHABANG OFFICE
53/67, 69 Moo 9, Tungsukla, Sriracha, Chonburi
20230 Thailand
● NAVANAKORN OFFICE
176/4-6, Moo 13, Paholyothin Rd., Klongneung,
Klongluang, Prathumthani 12120 Thailand
● RAYONG OFFICE
125/32 M.Charoen Nakorn, T.Maptapud, Rayong 21150, Thailand
● LAMPHUN OFFICE
133 Moo 4, Banklang Muang, Lamphun, 51000, Thailand
● KORAT OFFICE
982/3-4 Mittraphab Rd., Naimuang, Muang,
Nakhonratchasima 30000, Thailand
Singapore
CKD SINGAPORE PTE LTD.
705 Sims Drive #03-01/02, Shun Li Industrial Complex,
387384 Singapore
Taiwan
日商喜開理股 有限公司台湾分公司
CKD CORPORATION TAIWAN BRANCH
中華民国台湾省台北市中山北路二段96號嘉新大楼第14楼1405室
Rm.1405, 14F, No.96, Sec.2, Chung Shan N.Rd., Taipei,
Taiwan, R.O.C.
China
喜開理（上海）機器有限公司
CKD (SHANGHAI) CORPORATION
● 営業部/上海事務所（SALES HEADQUARTERS / SHANGHAI OFFICE）
中国上海市浦東新区張楊路188号 湯臣商務中心3楼304室
Room 304, 3'rd Floor, Tomson Business Center, No.188,
ZhangYang Road, PuDong, ShangHai, 200120, China
● 北京事務所（BEIJING OFFICE）
中国北京市復興路戊12号 恩菲科技大廈1015室
En-Fei-Ke-Ji Bdg. Room #1015, Fu-xing-Lu-Wu 12,
Beijing,100038, China
● 天津事務所（TIANJIN OFFICE）
中国天津市南開区白堤路148号
Bai-Di-Lu, 148, Nankai-Qu, Tianjin, 300193, China
● 無錫事務所（WUXI OFFICE）
中国江蘇省無錫市中山路389号吟春大廈1708室
Room 1708, Yin-Chun Bdg., Zhongshan Road No.389,
Wuxi, Jiangsu Province, 214001,China
●Specifications are subject to change without notice.
● 南京事務所（NANJING OFFICE）
中国南京市山西路57号杰源山西路商務中心502室
Room 502, Jieyuan Shanxi Road Business Center
No.57, Shanxi Road, Nanjing, 210009, China
● 重慶事務所（CHONGQING OFFICE）
中国重慶市石橋舗楡洲路8号秦興科技広場1634号
Taixing Keji Square Room 1634, Yuzhou Road No. 8
Shiqiaopu, ChongQing, 400039, China
● 成都事務所（CHENGDU OFFICE）
中国四川省成都市西玉龍街210号成都外貿大廈22楼2207号
Chengdu Waimao Bdg. 22F, Room #2207, Xi-Yu-LongJie 210, Chengdu city, Sichuan Prov., 610015, China
● 西安事務所（XIAN OFFICE）
中国陜西省西安市労働南路296号西北民航大廈610号
Xi-bei-min-hang Bldg. Room #610, Lao-dong-nan-lu
296, Xian city, Shangxi Prov., 710082, China
● 深 事務所（SHENZHEN OFFICE）
中国広東省深 市華富路1006号航都大廈7B単元
HangDu Building 7B, No.1006 HuaFu Road, Shenzhen, 518031, China
● 広州事務所（GUANGZHOU OFFICE）
中国広東省広州市環市東路339号広東国際大酒店A楼24C
Guangdong Guoji Dajiudian A-24C, No.339, Huanshidong-Lu,
Guangzhou City, Guangdong, 510098 China
● 大連事務所（DALIAN OFFICE）
中国遼寧省大連市西崗区新開路99号大連珠江国際大廈808室
DaLian ZhuJiang GuoJi-Bld. Room #808, XinKai-Lu 99,
DaLian city, LiaoNing Province, 116011, China
● 長春事務所（CHANG CHUN OFFICE）
中国吉林省長春市長春一汽越野路16号単元4楼中門16-1
16-1Dan Yuan 4-Lou Zhong Men, 16, Chang Chun Yi Qi
Yue Ye Lu, Chang Chun City, JiLin Province, 130011, China
● 杭州事務所（HANGZHOU OFFICE）
中国浙江省杭州市分暉路108号浙江省出版印刷大廈410室
Zhejiangsheng Chuban Yinshua Daxia Room 410, No.108,
Fenhui-Lu, Hangzhou City, Zhejiang, 310004 China
Korea
CKD KOREA CORPORATION
Room No.1105, 11th FL, The Korea Teachers Pention B/L.
27-2, Yoido-Dong, Youngdeungpo-Gu, Seoul, 150-742, Korea
2006.1.DCC