laser beam sources High-Brightness Diode Lasers and New Wavelengths The Next Generation of Applications Design considerations for highbrightness laser diodes in various new wavelength ranges are described, together with achieved results based on laser diode arrays, in the following referred to as laser bars. In addition, the new applications for laser diodes with such new wavelenghts are presented. High-Brightness Diode Lasers More and more applications ask for easeof-use, hence requiring fiber-coupled diode laser modules. Some important design rules have to be considered when high-brightness diode laser modules shall be built, especially when these are based on non-standard wavelengths: In principle, the minimum diffraction limited beam parameter product (BPP) is proportional to the wavelength, which means that the beam quality gets worse with increasing wavelength (~ λ). Fibercoupled modules require a specific beam parameter product, meaning that the number of emitters that can be coupled into an optical fiber decreases with the square of the wavelength (~ λ-2). For example, at 1940nm the number of emitters which can be coupled into a given fiber core is 4 times lower when compared to 970nm. The slow-axis divergence typically increases with the wavelength, which means that the focal length of the slowaxis collimation lenses (SACs) has to be adapted to avoid losses at the SAC. For some bars with non-standard wavelengths, the divergence in the fast-axis direction is relatively high with a full angle of up to 90°, which requires fast-axis collimating lenses (FAC) with a high numerical aperture and good quality. Additionally, the losses in the optical elements themselves have to be considered. Especially above 2200nm, significant © 2010 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim The Authors NADINE MUY Nadine Muy achieved a degree in American and Hispanic studies, as well as in economic studies with focus on marketing from the University in Mainz. Afterwards she held a position as event manager at a medical publishing house. Since June 2008 she is responsible for marketing and communications at Dilas Diodenlaser GmbH. JöRG NEUKUM Dr. Jörg Neukum studied Physics at Technische Universität Darmstadt, Germany, and did his doctor’s degree in the field of rare-earth spectroscopy. After positions as product manager at a Japanese laser diode manufacturer and several years as European sales manager for Coherent Semiconductor, he is now responsible for marketing and the worldwide sales at Dilas Diodenlaser GmbH since 2004. He is furthermore in charge of the business unit Dilas Industrial Laser Systems. JENS BIESENBACH Dr. Jens Biesenbach earned a Master’s degree in Mechanical Engineering from Rheinisch Westfälische Technische Hochschule (RWTH) Aachen, Germany, and obtained his PhD in the field of precision packaging of high-power diode laser bars. Before joining Dilas, Dr. Biesenbach was R&D Engineer at Solar Turbines Incorporated and was in charge of a research and development group for diode lasers at the Fraunhofer Institute for Laser Technology in Aachen, Germany. Since 1998 he serves as technical director for Dilas Diodenlaser GmbH. BERND KOEHLER Dr. Bernd Köhler received his diploma in Physics from the University of Kaiserslautern, Germany. He spent five years as a research assistant with the Laser and Nonlinear Optics Group of Prof. R. Wallenstein and received his PhD for his work on the generation of high-power picosecond light pulses in the ultraviolet and infra-red spectral range. Subsequently he joined the R&D Department of Dilas Diodenlaser GmbH, Germany, in 2001. Since 2009 he is responsible for Diode Laser Beam Sources and Optics. Dilas Diodenlaser GmbH Mainz, Germany E-mail: [email protected] E-mail:[email protected] E-mail:[email protected] E-mail: [email protected] Website: www.dilas.com www.laser-journal.de LTJ 45 Laser beam sources Table A: Realized optical output powers for a variety of fiber-coupled modules. *: Significant power loss due to intrinsic absorption in the micro-optics. wafers allow the production of high-power laser diodes at power levels of several watts at 630nm, up to ~20W at 680nm. Applications for such wavelengths can be found in the fields of Photodynamic Therapy (PDT), optical pumping of Cr3+:LiCAF or Cr3+:LiSAF solid-sate lasers for ultra-short pulse generation, as well as in illumination, holography and display. For display applications, the light is very often mixed with green and blue light sources to achieve a white light impression. The chosen red wavelength is therefore dependent on the wavelengths of the green and blue parts. Photodynamic Therapy works with photo sensitizers, which are injected and are used to treat human tissue. After a short period of time (normally some fractions of an hour) the photo sensitizer accumulates in particular parts of the body (e.g. in a tumor). The various photo sensitizers are wavelength selective. By using high intensity light, the photo sensitizer molecule is excited and, upon returning into its ground state, can generate free oxygen radicals which are highly reactive and hence destroy surrounding (tumor) cells. The range of wavelengths between 808nm and 976nm is considered standard for high-power diode lasers. This range has been investigated for a long time, resulting in various wavelengths for optical pumping of solid-state laser materials (see Table B). The development and optimization in optical power generation, and hence the availability of wavelengths, has been pretty much focused on the aforementioned wavelengths, which fit various absorption lines of active ions (in most cases rare-earth ions) in various host crystals (e.g. Nd:YAG). Aside from optical pumping of solid-state material, a further application has been developed over the last years. It began with the optical pumping of alkaline gases for the production of spin-polarized noble gases used for medical diagnostics in magnetic resonance imaging (MRI). In such applications, a gas mixture of Rubidium and Xenon isotopes (129Xe) for example is put into an optical cell under high pressure and under the influence of a magnetic field. By illuminating the cell homogeneously with circular polarized light at 794.8nm, the Rubidium is excited which, by collision, transfers its spin to the nucleus of the Xenon isotope. The spin-polarized Xenon isotopes can then be frozen out, conserving the spin polarization. This process is utilized in MRI to visualize heart or lung activity. Temperature tuning is used in order to reach the necessary wave- 46 LTJ April 2010 No. 2 © 2010 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim water absorptions occur due to the OH-stretching. These absorptions affect nearly all materials used for micro-optics today. An overview of the realized optical output powers for a variety of fiber-coupled modules (Fig. 1.) can be seen in Table A. New Wavelengths and Their Applications With research in all fields, various new wavelengths have been developed for a variety of applications. Very often, this starts in the low power range as in the case with 405nm for Blue Ray Disk for example. If one is able to get larger pieces of such GaN-based wafers, e.g. 10mm width and 1mm resonator length, the power scaling just by the high number of emitters on such a chip allows the generation of several watts (~ 4W) of optical power in this wavelength range. Such highpower diode lasers in the 405nm to 440nm range can then be used in applications like: Epoxy curing in screen printing, Lithography in the printing and semiconductor industry, Optical pumping of praseodymiumdoped crystals and fibers. Unfortunately, investigation of semiconductor laser structures in the green wavelength range has been stopped some years ago, with the advent of blue lasers. However, Wavelength Range Figure 1: Fiber-coupled diode laser modules, based on 1, up to 3, up to 6 and up to 12 laser diode bars. recently some results at 515nm in the low power range have been reported. Hence, we expect to see first green high-power diode lasers in a few years. Another interesting wavelength range in the visible spectrum is between 630nm to 690nm. Whereas these wavelengths are available for pointers and for DVD applications in the low power range, laser bars based on such InGaAlP-structures on GaAs Number of Bars per Fiber-Coupled Module Fiber Core and Cladding at NA 0.22 Output Power ex Fiber [W] 1 200µm modestrip 3.2 638nm 1 400µm modestrip 5.5 2 400µm modestrip 13 650nm 1 400µm/480µm 5 670nm 1 400µm/480µm 12 1 400µm/480µm 35 2 400µm/480µm 65 1 400µm/480µm 13 1 400µm/480µm 15 2 400µm/480µm 30 3 600µm/660µm 45 6 600µm/660µm 90 1 600µm/660µm 6 2 600µm/660µm 12 3 600µm/660µm 18 1 600µm/660µm 2.2* 1064nm 1210nm 1470nm 1550nm 1940nm 2200nm 51nanoFI-... / 51nanoFCM-... Laser Diode Beam Sources laser beam sources with singlemode and polarization-maintaining fiber cables P1 938nm Yb3+:YAG 976nm Yb3+:glass Table B: Important diode laser wavelengths for the optical pumping of solidstate lasers (DPSSLs). length, whereas the small line width required for the gaseous transition can be achieved using line narrowing of the laser diode by a virtual bragg grating (VBG). What has been demonstrated with Rubidium and Xenon isotopes, also works with other alkaline gases such as Cesium, and other noble gases such as 3He. The alkaline gases are only used to generate a spin-polarized noble gas, which is the only element introduced into the patient, and which can leave the human body without any negative impact after the diagnostic treatment. Another important application is based on similar optical pumping as described above, but used for the pumping of gas lasers. As surprising as this may sound, the concept is pretty straightforward to understand. When trying to build 50kW or 100kW lasers for ballistic-missile defense systems, the first choice was the use of diode-pumped solid-state lasers. However, by scaling up the power, heat becomes an issue in the laser gain media itself. Instead of waiting for the crystals to cool down for the next laser the company Dilas Diodenlaser GmbH Mainz, Germany Dilas, the diode laser company, is focused on delivering the most innovative technologies and advanced product solutions for the industrial, defense, graphic arts, and medical markets. Founded in 1994 in Mainz, Germany, with operations in North America and China, Dilas designs, develops and manufactures high-power semiconductor laser components, modules and systems, including fiber-coupled products for worldwide distribution. www.dilas.com © 2010 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim 51nanoFI-... low Noise 51nanoFCM-... low •Coherencelength300µm •Noise<0.1%RMS(<1MHz) •Spectralrange405nmto1080nm •Beamprofilerotationalsymmetrywith Gaussian intensity distribution P1 for increased •Laseroutputpowerupto30mW accuracy and reproducibility in laser •FC-APCconnector (8°-polish), metrology and optional DINAVIOorE2000 CoHeReNCe and reduced Speckle y Yb3+:glass an 915nm 5 rm Nd3+:YAG, Nd3+:YVO4, etc. + 4 Ge 880nm-range: Appl.: Fig. n Nd3+:YAG, Nd3+:YVO4, etc. ei 808nm-range: nanotechnology ad Nd3+: YLF New 51nanoFI-... with integrated Faraday isolator M 793nm, 797nm: pulse, the idea came up to simply exchange the laser gain media. This is best achieved by using a gaseous laser medium and high flow rate pumps, resulting in the concept of diode-pumped alkaline vapor lasers based on Rubidium (pumped at 794.8nm, for example) or Cesium (pumped at 780nm or 852nm). Other alkaline vapor lasers are also under investigation. Again, the difficulty is the small absorption line width of the optical transitions of these gases, even when using pressure-broadening of the absorption lines by a buffer gas. Hence, line narrowing techniques, such as the use of VBGs or internal line narrowing by distributed feedback (DFB) structures, have to be applied [1]. The demand from defense-related pro jects is increasing and the targeted power as well as the number of systems planned, allows for bespoke development of highpower diode lasers with the required specification. Another wavelength for high-power diode lasers is 1064nm. Aside from the replacement of Nd:YAG lasers, however, there is not much commercial interest in this. Since high-power diode lasers normally suffer from a poorer beam quality than solid-state lasers and an inability to create super pulses, semiconductor-based lasers at 1064nm are only able to replace Nd:YAG lasers in low brightness applications as in the case of fiber-coupled, cw applications in the medical field. The really new wavelength range for high-power diode lasers starts beyond 1064nm. Applications range from 1210nm which is used in laser-assisted liposuction, a technique that supposedly destroys fat cells and tightens skin simultaneously. This is followed by the range of 1320nm to 1380nm (based on InP-wafers) which is essentially a Nd:YAG wavelength formerly used in medical applications. The effect on human tissue is based on water absorption. With the now well-established 1470nm (also based on InP) high-power diode lasers, such applications show comparable, if not better results when compared with the Nd:YAG wavelengths. The light is absorbed by the water inside the cells and heats the water until the cell bursts. This is an effect which is used for tissue removal in prostate treatment (BPH = Benign Prostatic Hyperplasia) for example. By flushing cold water during the treatment, the pain for the patient is reduced and the cell debris is removed [2]. Further applications of 1470nm are in all medical treatments which rely on water absorption of laser light. Aside from the fact that Advantagesoflaserbeamsources 51nanoFCM-... / 51nanoFI-... LaserSpeckles LaserSpectrum Noise 2.0 1.6 1.2 0.8 50% 0.4 0 0 Pnoise peak value in % 60 min FWHM 1.5 nm Low speckle contrast from reduced coherence length: uniform illumination of 4-quadrant diodes for AFM with improved edge detection Broadened spectrum (~1.5 nm FWHM) with reduced coherence length (~ 0.3 mm) as a result of rF modulation. No mode hopping occurs rF modulation results in constant mean laser power with noise < 0.1% rMS (<1MHz) Disadvantagesofconventionallaserdiodesources Noise 2.0 LaserSpectrum LaserSpeckles Mode hopping: temporal shifts between modes. The coherence length changes over time. It can be > 1 m. The laser spot produced by a standard laser diode beam has a speckle pattern, increasing the statistical uncertainty in position determinations 1.6 1.2 0.8 0.4 0 0 Pnoise peak value in % 60 min Power noise resulting from laser diode which generates an external cavity with the fiber coupling Applications 51nanoFI-... 51nanoFCM-... A tomic F orce icroM scopy 1 51nanoFI-... Back-reflection particlemeasurement Lasers for Adjustment and Alignment FIBEROPtIC Fabry-Perot Interferometer 2 3 Scratch Detector 51nanoFI-... 4 5 A tomic F orce icroM scopy Application: Fiber-optic Fabry-Perot Interferometers with 51nanoFI-... 5 FIBER-OPtIC Fabry-Perot B D A Interferometer Interferometer C F E Signal (V) 785nm: Tm3+:YAG time (ms) (ms) time Schemeofafiber-opticinterferometer Schemeofafiber-opticinterferometer A laser beam source D Fc-pc fiber 51nanoFl-... E cantilever B Singlemode fiber F Detector and interferometric signal C Fiber-optic beam splitter For measurement of the cantilever movement, the interference is evaluated between the partially reflected light at the fiber end facette (approx. 4%) and the light reflected at the cantilever. Accessories Fiber collimators 60Fc-... Micro focus optic 5M-... Vacuum Feed-throughs V-KF-... Fiber-optic Beam Splitters FBS-... For more information see www.SuKHamburg.de/dl/fibercat_e.pdf www.laser-journal.de LTJ 47 Kieler Straße 212 • d-22525 Hamburg [email protected] www.SuKHamburg.de 630 – 635, 652, 668 √ 670 √ 689, 730 √ Semiconductor Lithography √ Avionics √ Instrumentation Materials Processing √ Defense Printing 405 DPSSL λ [nm] Medical Laser beam sources √ √ √ 780, Δλ<1 √ √ 785, 792, 797 795, Δλ<1 √ √ 805 / 808 √ √ 810± 10 √ √ √ √ 830 852 Δλ<1, 868-888 √ 901 √ √ √ 905 √ 915 √ √ 940 √ √ 968, 973 – 976 √ √ 980 ± 10 √ 1064 √ 1210 √ 1330 – 1380 √ 1450 – 1470 √ √ √ √ 1530, 1650, 1700 √ √ √ √ 1850-2200 √ √ √ √ √ √ Conclusion √ Table C: Summary of high-power diode laser wavelengths and applications. this wavelength was originally developed to use the minimum optical absorption of glass fibers in order to reach longer distance data transfer in telecommunications, the usage of high-power diode lasers in the 1470nm range opens up applications such as plastics welding of white polymers [3] in medical device manufacturing, as well as applications in defense, such as turbulence-detection in front of airplanes or optical pumping of Er3+-doped crystals to generate laser wavelengths in the 2µm range. Further wavelengths generated from InPbased semiconductor structures, which become especially interesting for defense applications, are 1550nm as well as 1650nm. Such laser wavelengths are sometimes described with the misleading term “eyesafe”, since these wavelengths are already absorbed in the tear fluid. The point should be made that any high-power diode laser 48 LTJ April 2010 No. 2 A series of new wavelengths for highpower diode lasers has been developed in the last years by m2k-Laser, a spin-off company of the Fraunhofer Institute for Applied Solid State Physics, but now part of Rofin Sinar Technologies Inc. Here, GaSb-wafers are used to generate edge emitting solid-sate laser structures in the wavelength range of 1800nm to 2300nm. A variety of applications can be addressed, ranging from welding of transparent plastics for medical device manufacturing using the intrinsic vibronic absorption of polymer chains to direct medical applications in surgery, relying on the even larger absorption of water in human tissue (about three orders of magnitude higher than at 980nm) [4]. Defense applications such as IRCM or laser range gated imaging can also be found in this wavelength range. The wavelength 1940nm can directly be used for illumination, replacing Tm3+based solid-state lasers. Additional interest is raised by the fact that optical pumping at 1908nm of Ho3+-doped solid-state laser crystals will result in an emission wavelength of >2100nm, which is of high interest in defense applications. will do harm to human tissue due to the aforementioned water absorption. These wavelengths can be used for il lumination purposes or infra-red counter measures (IRCM), in which the infra-red target acquisition system of an incoming missile is misled by an active high-intensity signal, which will override the steering cues from the target. A further interesting application is laser range gated imaging, in which laser pulses at 1550nm for example are used with a gated camera system, sensitive for this wavelength range. Subsequent pictures created by the back-scattered light from different distances are gathered. Here, the time-of-flight information of the light, together with the photographic sampling allows to “look through” clouds of smoke or through a camouflage net, by only taking pictures whose back-scattered time-of-flight is related to scenes behind the obstacle. The novel wavelengths available for highpower diode lasers open up new applications (see Table C). All power values mentioned in the achieved results are based on application-relevant lifetime expectations. Further investigation, improvement and optimization for such new wavelengths is expected to lead to an additional enhancement of the optical output power or to result in longer lifetimes. References [1] Bernd Köhler et al.: “Wavelength stabilized high-power diode laser modules”; Proc. of SPIE Vol. 7198 (2009) [2] biolitec AG: www.biolitec.com [3] Treffert GmbH & Co. KG: www.treffert. org [4] George M. Hale and Marvin R. Querry: „Optical Constants of Water in the 200nm to 200-µm Wavelength Region,“ Appl. Opt. 12 (1973) 555 © 2010 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim
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