Supplementary information
Highly Conductive and Flexible Fiber for Textile
Electronics Obtained by Extremely LowTemperature Atomic Layer Deposition of Pt
Jaehong Leea†, Jaehong Yoona†, Hyun Gu Kimb, Subin Kanga, Woo-Suk Ohc, Hassan Algadia,
Saleh Al-Sayarid, Bonggeun Shongc, Soo-Hyun Kime, Hyungjun Kima, Taeyoon Leea*, and HanBo-Ram Leeb*
a
School of Electrical and Electronic Engineering, Yonsei University,50 Yonsei-ro, Seodaemun-
Gu, Seoul, 03722, Republic of Korea, bDepartment of Materials Science and Engineering,
Incheon National University, 119 Academy-ro, Yeonsu-gu, Incheon, 22012, Republic of Korea,
c
Department of Chemistry, Chungnam National University, 99 Daehak-ro, Yuseong-gu,
Daejeon, 34134, Republic of Korea, dPromising Center for Sensors and Electronic Devices,
Najran University, Najran, 11001, Saudi Arabia,
e
School of Materials Science and
Engineering, Yeungnam University, 280 Daehak-ro, Gyeongsan-si, Gyeongbuk, 38541,
Republic of Korea
†These authors contributed equally to this work
*Address correspondence to:
Taeyoon Lee; E-mail: [email protected]
Han-Bo-Ram Lee; E-mail: [email protected]
Figure S1. Schematic illustration of the commercial ALD chamber with 4-inch capable stage
used for the low temperature Pt ALD.
Figure S2. (a) Molecular structure of the HDMP precursor and (b) photograph showing the
precursor-included bottle at room temperature
Figure S3. XRD spectra of Pt films deposited by ALD using the HDMP precursor at the
deposition temperatures of 200, 250, and 300 °C. A metallic Pt(111) diffraction peak was
observed at 40.013° for all the Pt films deposited at the various temperatures.
Figure S4. DFT-calculated geometries of the critical points along the reaction coordinate for
the adsorption of the two Pt precursors.
Figure S5. (a–b) Typical SEM image (a) and the corresponding EDS mapping image (b) of the
conductive cotton fiber fabricated by the low temperature Pt ALD. The EDS mapping image
shows that the Pt layer is uniformly deposited onto the 3D complex structure of the cotton fiber.
(c) The EDS spectrum of the conductive cotton fiber coated with the Pt layer.
Figure S6. Typical SEM images showing the Pt layer deposited on the surface of cotton fibers
by ALD with the HDMP precursor and O2 gas. The continuity and conformality of the Pt layer
were maintained regardless of the number of ALD cycles.
Figure S7. Photographs of LED connected to the power supplier using the conductive cotton
fiber before (a) and after (b) applying external voltage of 3 V, indicating that the conductive
cotton fiber has excellent electrical properties.
Figure S8. Thermogravimetric analysis (TGA) of the conductive cotton fiber according to the
number of ALD cycles. The temperature increased from 30 °C to 600 °C
at a rate of
10 °C/min. The small reduction in the weight percentage of the conductive fiber around 100 °C
indicates the evaporation of the residual moisture in the fiber. The cotton fiber was decomposed
around 200 °C.
Figure S9. Schematic illustration showing the fabrication process of the large-area textile
pressure sensor array on a fabric. After coating the cotton fiber with Pt through the lowtemperature ALD and a PDMS coating on the surface of the conductive fiber, the textile
pressure sensors were integrated into a fabric by simply sewing the PDMS-coated conductive
fibers perpendicularly onto the fabric.
Figure S10. Photograph showing the female sitter on the fabric including textile pressure
sensor arrays of 7 × 8 array configuration. Pressure distribution generated by the sitter can be
effectively detected by using the textile pressure sensor arrays in the fabric.
Figure S11. Capacitive response mappings of the 56-pixel textile pressure sensor array against
two sitters who have around (a) 60 kg and (b) 100 kg. The response result of the array shows
that the textile pressure sensor array can clearly distinguish the weight and body shape of the
sitter by the intensities and distribution of the capacitive responses.
Supplementary Video 1. The movie showing the operation of a light-emitting diode (LED)
using the conductive cotton fibers fabricated by low-temperature ALD of Pt.