1. USM SURF Application Cover Sheet
Last Name: Beaty
First Name: Eric
M.I.: T
Project Title: Micro-Electro-Mechanical-Resonator Research and Development
College Address:
John Mitchell Center
34 College Ave
Gorham, ME 04038
College Phone: (360) 981-0668
Permanent Address:
43 Hillview Rd
Gorham, ME 04038
Home Phone: (360) 981-0668
E-mail Address: [email protected]
Expected Graduation Date: Spring 09
Major(s): Electrical Engineering
(Students graduating in May 2008 are NOT eligible for Summer Fellowships.)
Academic standing as of January 1, 2008: Junior
Faculty Supervisor: Professor Mustafa Guvench
Department: Electrical Engineering
Address: 123 John Mitchell Center
37 College Ave
Gorham, ME 04038
Phone: (207) 780-5581
E-mail Address: [email protected]
1
Eric Beaty
Summer Undergraduate Research Fellowship
Micro-Electro-Mechanical-Resonator Research
Personal Statement:
My academic interests are primarily in the areas of mathematics and science. In pursuit of these
interests, I elected to enroll as an electrical engineer. Engineering courses are primarily applications of a
wide array of different sciences and math for the purpose of problem solving though design. I have
enjoyed taking courses in calculus, physics, mechanical engineering, electrical engineering, and
computer science.
Upon graduation, I plan on becoming a professional engineer working in a design orientated
environment. It is my hope to begin a career as a control systems engineer and continually make
contributions to the engineering society.
For the summer of 2007, I participated in a 10 week NASA and Maine Space Grant Consortium research
internship program. The purpose of this program was to provide research opportunities to
undergraduate students in aerospace-related research which is broadly defined to include biological,
physical, social, earth science, human exploration and development of space, space science, and other
science, technology, computer or engineering related fields. I performed my internship at Lanco
Assembly Systems in Westbrook, Maine. My research focused on the operation of vision guided
robotics. As required by the program, I submitted weekly progress reports and a final report detailing all
that I had learned.
Gaining real world engineering experience though development and research of a true dynamic
engineering application is critical for developing crucial professional engineering skills and enrichment of
the engineering society. The USM Summer Undergraduate Research Fellowship would assist in creating
this opportunity while still in an academic setting. This is the opportunity to apply knowledge and skills
obtained in class. This is the chance to acquire knowledge and new skills that cannot be learned in the
classroom.
2
Eric Beaty
Summer Undergraduate Research Fellowship
Micro-Electro-Mechanical-Resonator Research
Automated Measurement of Micro-Electro-Mechanical
Resonators
Abstract:
This research will involve the development of a computer-controlled test system used to measure and
characterize the response of Micro-Electro-Mechanical-Resonators to various gas mixtures and
concentrations. The initial phase of the research will involve the implementation of LabView, a software
platform, for interfacing, communicating, data acquisition and control between a personal computer and
the measurement setup via GPIB bus and serial ports. Once successfully tested using the automated
system, the MEMS Resonators will provide an inexpensive, reliable and miniature means of testing and
monitoring atmospheric conditions. Potential uses include many health and safety issues, as well as space
exploration and defense applications.
Micro-Electro-Mechanical-Resonator Research and Development
The University of Southern Maine
Micro-Electro-Mechanical-Resonators, “MEMRs”, are
being developed by Prof. Guvench at the Microelectronics
Research Labs of Electrical Engineering Dept. at The University of
Southern Maine for frequency control and gas sensing applications
in high temperature environments. These MEMRs oscillate at a
unique frequency precisely determined by their mass and
geometry, similar to musical tuning forks, except with dimensions
Figure 1. MEMS chip, size 5mm x 5mm wire
measured on the micrometer scale. Due to the incredibly intricate
bonded to a J-LDCC gold package
3
nature and the minute size of these devices, measurement and characterization becomes an
increasingly difficult and highly sensitive endeavor. With the use of computer automated
measurement, delicate packaging techniques and specialized equipment, significant progress
may be made in terms of data collection, quantification, and characterization of the devices. It is
the goal of this research to further improve upon and implement these measurement techniques
in order to gain further insight into the operation and potential advancement into wide-scale
production and application in everyday life.
Like many state-of-the-art projects, initial application will most likely involve NASA or
a government related project using the MEMR devices as gas sensors in high temperature
environments including space flight; an application where reliability and durability is clearly of
uttermost concern. As gas sensors, integrated in large numbers, these little devices effectively
act as an electronic nose; when properly designed and coated with gas absorbing films.
Additionally, a MEMR device can be used as an oscillator for a microprocessor, eliminating the
need for a separately packaged and processed quartz crystal oscillator; this is due to the ability to
process the MEMR device at the same time as the microprocessor itself.
Much of this project involves the further
development and implementation of a computer controlled
test system in order to measure and characterize response,
of these MEMR based systems, to various gas mixtures and
concentrations. MEMR resonance frequency is determined
by the inverse of the product of its vibrating mass and
HP 54504A Digital Oscilloscope
Computer, running
LabView software
HP 5335A Universal
Counter
MEMR
Controlled
Environment
Figure 3. Resonance curve from a
spectrum analyzer
spring constant. Thus, Similar
to Quartz-Crystal-Microbalance
HP 4194A Impedance/Gain
sensors, a Silicon MEMR device
GPI
Analyzer
B
coated with a thin film of a
polymer with unique gas
MFC
absorption properties, responds
Quartz Crystal Monitor
Gas Out
to
the
presence
and
Gas
concentration of the gas to be
Gas
Programmable
sensed with a decrease in its
Power supply
In
Computer controlled
resonance
frequency;
this
Mass Flow Controller Unit
response is inspected through a
resonance curve (peak) using a
Figure 2. The computer automated MEMR testing system
spectrum analyzer, see figure 2. The
system being developed employs a software platform, LabView, for interfacing communication,
data acquisition and control between a personal computer and the measurement setup via the
4
GPIB bus and serial ports. Gas or the analyte vapor to be sensed is mixed with an inert carrier
gas in order to effectively adjust its concentration. Flow rates and concentration levels are
determined by computer controlled mass flow controllers. The LabView program, in addition to
the gas mixture ratio, controls the injection time of the analyte and synchronizes cycling of
sample temperature with purging and gas injection in the test chamber. Upon each injection, the
MEMR response, temperature level, and gas concentrations are measured and quantified in order
to generate plots of sensor response versus injected gas concentration and temperature, see figure
3. With this data, much insight may be gained into the intricacies of each unique polymer coated
MEMR device and further development and improvement upon fabrication techniques and
measurements techniques may be made.
The initial phase of research will involve the application of LabView in order to setup the
computer controlled experiment described above to collect data automatically via GPIB and
serial interface. Much time will be spent learning to implement LabView and how to properly
control each device. Once this system is operating properly the latter phase of the research will
involve measurement, quantization, and characterization and evaluation of gas sensing response
through frequency response shifts due to absorbed mass. In the aforementioned phase of
experimentation, much cooperation will be made with the USM Chemistry Department and
Professor Henry Tracy in order to develop the gas absorbing polymers to be deposited on the
MEMRs.
Proposed General Timeline
June-July’08: Development of automated controls using LabView
July-Aug.’08: Initial Characterization of MEMRs with the Automated Testing System
Fall’08 :
Continued testing and characterization (enrolled in ELE 402 Senior Design
Projects I course)
Spring’09:
Completion of the project; write final report (enrolled in ELE 403 Senior
Design Projects II) and present it at Electrical Engineering Senior Design
Presentations in May’09
April 2009:
Prepare and present a poster at Thinking Matters Conference 2009
5