NANOCHEM® Purification Systems
346
Purification Media – Gases Purified and Specifications
NANOCHEM® Gas Types Purification Summary Table
GASES
PURIFIED
Inerts
Nitrogen
Argon
Helium
Xenon
Krypton
Neon
Flammables - Partial List
Methane
Ethane
Cyclopropane
Propane
Butane
Hydrogen
Deuterium
CHEMICAL
FORMULA
PURIFICATION
MEDIUM
PURIFICATION MEDIUM
DESCRIPTION
N2
Ar
He
Xe
Kr
Ne
{
OMX-Plus™
Reactive agents on a polymeric support
w/ inorganic agent for NMHC removal
{
OMX-Plus™
Reactive agents on a polymeric support
w/inorganic agent for NMHC removal
OMX™
Reactive agents on a polymeric support
OMX-Plus™
Reactive agents on a polymeric support
w/inorganic agent for NMHC removal
HCX™
High surface area inorganic medium
CH4
C2H6
C3H6
C3H8
C4H10
H2
D2
{
HCX™
IMPURITIES
REMOVED
EFFICIENCY
END POINT
DETECTION
< 100 ppt, LDL
AC or DC
< 1 ppb
< 100 ppt, LDL
Not available
H2O, O2, CO2,
THC except CH4
Halocarbons except CF4
CO at Low Flow
H2O, O2, CO2
CO at Low Flow
H2O, O2, CO2,
THC except CH4
Halocarbons except CF4
CO at Low Flow
Hydrocarbons
except CH4,
Halocarbons except CF4
< 100 ppt, LDL
DC only
< 1 ppb
< 100 ppt, LDL
Not available
H2O, O2, CO2,
THC except CH4 &
Other Halocarbons
CO at Low Flow
H2O, O2, CO2
CO
H2O, O2, CO2
< 100 ppt, LDL
AC or DC
H2O, O2, CO2,
THC except CH4
Halocarbons except CF4
CO at Low Flow
High surface area inorganic medium
Hydrocarbons
except CH4
Halocarbons except CF4
< 1 ppb
< 100 ppt, LDL
< 1 ppb
< 100 ppt, LDL
DC only
DC only
Please contact customer service for other flammables, that can be purified.
Filters & Purifiers
Halocarbons - Partial List
Carbon Tetrafluoride
CF4
OMX-Plus™
Reactive agents on a polymeric support
w/inorganic agent for NMHC removal
Hexafluoroethane
C2F6
OMX™
Reactive agents on a polymeric support
Perfluoropropane
C3F8
OMX™
Reactive agents on a polymeric support
< 1 ppb
< 100 ppt, LDL
< 1 ppb
< 100 ppt, LDL
AC or DC
AC or DC
Please contact customer service for other halocarbons, that can be purified.
Hydrides
Ammonia
Silane
Arsine
Phosphine
NH3
SiH4
AsH3
PH3
{
NHX-Plus™ Reactive agents on an inorganic support
OMA™
OMX™
ASX-II™
PHX™
< 45 ppb, LDL
H2O
< 11 ppb, LDL
CO2
< 50 ppb, LDL
O2
< 0.5 ppb, LDL
GeH4
< 3 ppb, LDL
SiH4
< 40 ppb, LDL
TEOS
Reactive agents on a polymeric support H2O, O2, CO2 in inert
< 100 ppt, LDL
gas, LDL
H2O in ammonia, LDL < 100 ppb, LDL
Reactive agents on a polymeric support H2O, O2, CO2, CO
< 100 ppt, LDL
< 75 ppb H2O in AsH3, LDL
High surface are inorganic medium
< 33 ppb H2O in PH3, LDL
Reactive agents on an inorganic support
THC = Total Hydrocarbons
LDL = Lower Limit of Detection by state-of-the-art analytical instrumentation.
Please contact customer service for other gases not included in this list
www.ChrysalisScientific.com
Not available
DC only
DC only
Not available
Not available
NANOCHEM® Purification Systems
Purification Media – Gases Purified and Specifications
347
NANOCHEM® Gas Types Purification Summary Table (continued)
GASES
CHEMICAL PURIFICATION
PURIFICATION MEDIUM
PURIFIED
FORMULA
MEDIUM
DESCRIPTION
Hydride/Inert Mixes (N2, Ar, He, Xe, Kr, Ne, & H2)
OMX™
1-10% Arsine
AsH3
Reactive agents on a polymeric support
1-10% Germane
GeH4
1-10% Phosphine
PH3
Corrosives
Boron Trichloride
BCl3
Chlorine
Cl2
Silicon Tetrachloride
SiCl4
High purity high surface area inorganic
Metal-X™
Trichlorosilane
SiHCl3
medium
Dichlorosilane
SiH2Cl2
Hydrogen Bromide
HBr
Hydrogen Chloride
HCl
Others
Metal-X™ High purity high surface area inorganic
Carbon Monoxide
CO
Nitric Oxide
NO
medium
OPX™
High surface area inorganic medium
HCX™
Carbon Dioxide
CO2
High surface area inorganic medium
Nitrous Oxide
N2O
{
IMPURITIES
REMOVED
EFFICIENCY
END POINT
DETECTION
H2O, O2, CO2
< 1 ppb
Not available
H2O < 100 ppb, LDL
Volatile Metals-Fe, Mo, Cr, Ti, Ni, Mn
H2O < 100 ppb, LDL
Volatile Metals-Fe, Mo, Cr, Ti, Ni, Mn
H2O
< 10 ppb
Hydrocarbons
< 100 ppt, LDL
except CH4
Halocarbons except CF4
H2O
< 10 ppb
High surface area inorganic medium
H2O, O2, CO2
< 100 ppt, LDL
Reactive agents on a polymeric support
H2O, O2
< 10 ppb, LDL
Reactive agents on a polymeric support
OPX
Oxygen
O2
OMX™
Dimethyl Ether
(CH3)2O
OMS™
Sulfur Hexafluoride
SF6
THC = Total Hydrocarbons
LDL = Lower Limit of Detection by state-of-the-art analytical instrumentation.
Please contact customer service for other gases not included in this list
Not available
Not available
Not available
Not available
Not available
DC only
AC or DC
Filters & Purifiers
www.ChrysalisScientific.com