CW Nd:YAG LASER SYSTEMS Components of a CW Nd:YAG Laser CW Nd:YAG lasers are available in output from a few milliwatts to as high as a kilowatt in power. Although they vary considerably in size and complexity of design, all have the same basic elements shown in Figure 1. The active medium is an Nd:YAG laser rod. It is optically pumped by a continuous-pumping lamp and is placed between two external mirrors that form the optical cavity for the laser beam. This section discusses each of the basic subsystems of such a laser. Fig. 1 Basic design of CW Nd:YAG lasers. Laser Rod The rods used for CW operation are usually from one to four millimeters in diameter and have lengths from one inch to about six inches. Smallerdiameter rods are preferred because they present fewer cooling problems than larger rods. The rod ends are usually antireflection coated from the Nd:YAG wave-length of 1.06 microns. The rod is mounted inside a quartz or glass water jacket. Cooling is provided by water flow directly across the rod surface. Optical Cavity The optical cavity of the Nd:YAG laser usually consists of two mirrors mounted separately from the laser rod. Several cavity configurations may be used, but all employ at least one spherical mirror. Both long radius and long radius hemispherical cavities are commonly employed. In some systems, shaping of the beam within the cavity is desirable, and two mirrors with 1 different radii of curvature are used. The HR mirror has a reflectivity of about 99.9% and the output coupler transmission varies from less than one percent on small lasers to about eight percent on larger ones. The optical cavities of Nd:YAG lasers are often equipped with an adjustable or interchangeable aperture for selection of multimode or TEM00 mode operation. Optical Pumping System ARC-LAMP Arc lamps are gas-discharge devices similar to flashlamps in design but intended to be operated continuously. There are two main types of arc lamps: linear lamps and short-arc lamps. The linear lamps are very like flashlamps, except for electrode design, having pointed cathodes instead of the rounded cathodes used in flashlamps. They are cylindrical in shape and have bore diameters that typically lie in the range between 4 and 7 mm and typically have arc lengths between 5 and 15 cm. They are filled with gas at a pressure usually between one and three atmospheres. They are well-suited to act as the pump sources for solid-state lasers, because the shape of the spectral emission is well-matched to the absorption of laser rods. A typical arrangement for pumping a solid-state laser with a linear arc lamp is illustrated in Figure 1. Fig. 1 Typical configuration for continuous arc-lamp pumping of a solid-state laser In short-arc lamps, the distance between electrodes is much shorter, typically less than one millimeter, so that these devices act essentially as point sources of light. They are suited for applications like illumination and exposure of photoresist. The structure of linear lamps and short-arc lamps is compared in Figure 2. 2 Fig. 2 Typical forms for linear arc lamp (top) and short-arc lamp (bottom) Arc lamps may be filled with a number of different gases, including krypton, xenon, mercury, and mercury-xenon. The linear krypton-filled arc lamp emits a spectrum that is well-matched to the absorption of Nd:YAG. Linear krypton arc lamps are used almost universally for pumping continuous Nd:YAG lasers and continuously pumped, repetitively pulsed Nd:YAG lasers. Since the Nd:YAG laser is the most common solid-state laser, for our purposes we will emphasize the linear krypton arc lamp. Krypton Arc Lamps Krypton arc lamps emit a spectrum of light that is marked by a number of strong spectral lines in the 750-900-nm region. A typical example of the spectrum of a continuous krypton arc lamp is shown in Figure 3. This spectrum is similar to the spectrum of the krypton flashlamp with relatively low input energy Typical spectral distribution of light emission from a continuous krypton arc lamp 3 Because the peak absorption of Nd:YAG is in the 800-nm region, krypton arc lamps make very effective pumps for Nd:YAG lasers. The useful light output of krypton arc lamps for excitation of Nd:YAG lasers increases rapidly with lamp input power, bore diameter, and gas fill pressure. Figure 4 shows how the light output of a krypton arc lamp increases with input power for a fixed bore diameter of 4 millimeters at several different fill pressures. Output increases rapidly with fill pressure up to about 4 atmospheres, but increases only slowly at higher pressures. Light output useful for pumping an Nd:YAG laser for continuous krypton arc lamps for various fill pressures. Figure 5 shows the useful light output as a function of lamp input power for krypton arc lamps filled to 6 atmospheres cold pressure and with several bore diameters. The output is a strong function of bore diameter up to a diameter around 4 millimeters, but increases more slowly at larger diameters. 4 Light output versus lamp input power for krypton arc lamps with the indicated bore diameters Krypton arc lamps are available as both linear lamps and short-arc lamps, but the linear type is used for excitation of solid-state lasers. Table 1 shows characteristics of some representative high-power rod-seal continuous krypton arc lamps, suitable for pumping of solid-state lasers, to give an idea of what is commercially available. Rod-seal construction will be discussed in the section on mechanical characteristics. Table 1. Characteristics of Commercially Available High-Power Continuous Krypton Arc Lamps.* Bore Diamete r (mm) Arc Lengt h (mm) Maximu m Average Input Power (W) Maximu m SteadyState Voltage (V DC) Maximu m SteadyState Current (A DC) Minimu m Starting Anode Voltage (V DC) Minimu m Trigger Voltage (kV) 4 48 2200 104 20 1800 25 4 51 2100 95 20 2000 25 4 51 2200 110 20 2000 25 4 76 3200 160 20 2500 25 5 4 76 3200 155 20 2500 30 6 76 3000 120 40 2500 30 6 76 5000 122 40 2500 30 6 102 5500 140 38 3000 30 *Based on information from EG&G Electro-Optics 6
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