APPROVAL REQUIREMENTS
Title
Dept.
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Signature/ E-mail approval
Date
NFL Director
RES
Thomas S Ferraguto
n/a
9/12/13
Supervisor
EEM
Signature or e-mail approval
EEM
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DESCRIPTION
DATE
A
Initial Release
9/12/13
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Document Number (Assigned by T.Ferraguto)
Introduction .................................................................................................................................................................3
1.0
Purpose ........................................................................................................................................................3
2.0
Description ...................................................................................................................................................3
Related Documents ....................................................................................................................................................3
3.0
List related internal documents: ...................................................................................................................3
4.0
List related external documents: ..................................................................................................................3
Operation ....................................................................................................................................................................3
5.0
Process Description .....................................................................................................................................3
6.0
Safety ...........................................................................................................................................................5
7.0
Maintenance .................................................................................................................................................5
Document Revision History.........................................................................................................................................6
1
Filmetrics SOP
10/3/2013
RES-01-006-A
Introduction
1.0
Purpose
1.1
2.0
Purpose of this Standard Operating Procedure is to guide the user in the basic use of the
Filmetrix Thin Film Measurement Tool.
Description
2.1
The We can measure all at-least-partially-transparent films, plus all semiconductors
(transparent or not). The measured film must be at least somewhat shiny in appearance.
We can usually measure up to three individual films in a stack. In some circumstances we
can measure dozens of layers. The Thickness measurement range is from 4nm to 40
microns at wavelengths of 200-1100nm.
2.2
List Chemicals needed for process.
2.2.1
3.0
4.0
Not Applicable
List related internal documents:
3.1
ETIC OPERATIONS MANUAL
3.2
NANO FABRICATION LABORATORY CLEAN ROOM PROTOCOL
List related external documents:
1
4.1
Filmetrics F40 Operating Manual
Operation
5.0
Process Description
5.1
Power on the Filmetrics dedicated lap top
5.2
Initiate the software by clicking on the filmeasure icon
5.3
Enter the password “filmetrics”
5.4
Power on the UV Light Source (generally source power is on but lamps are off)
5.4.1
Deuterium Lamp (takes a few minutes to light the switch)
5.4.2
Halogen Lamp
5.4.3
Shutter
5.4.4
Wait 5 minutes for Lamps to warm up
5.5
Power on Filmetrics 40 Power is on unless it is unplugged (Note the light on the far right of
the F40 Power supply.
5.6
Calibration
Filmetrics SOP
10/3/2013
RES-01-006-A
5.6.1
From the Filmetrics Software select the appropriate material recipe (for calibration
select SiO2 on Si).
5.6.2
Place the standard on the stage and center the focus block under the objective
5.6.3
Make sure the objective is set to 15X
5.6.4
Click on the Live Video Tab and use the vertically mounted micrometer to focus the
image.
5.6.5
Click on the Baseline Icon
5.6.6
Slide the sample so that the SiO2 square is under the objective
5.6.7
Execute the Take Sample Reflectance
5.6.8
Place the standard on the stage with the SiO2 box under the objective
5.6.9
Click on Take Reflectance Background
5.6.10 Slide the Standard to the Center for Reflectance Standard
5.6.11 Click on the Take Reflectance Standard
5.6.12 Remove silicon standard and place the “45 degree background standard”
5.6.13 Make sure that the beam is hitting the mirror and not the stage.
5.6.14 Click on “Take Background”
5.6.15 Clici on “Finish”
5.6.16 Replace Silicon Standard and move it so that the SiO2 film is under the objective
1
5.6.17 Click on the “Measure Icon”
5.6.18 The sample should measure 3103.9 Angstroms +-10 Angstroms. If it does not, please
call Nanofabrication Laboratory Equipment Manager
5.7
S1813 Resist Measurement
5.7.1
The Filmetrics is currently set up to measure S1813 using a detailed filed provided n
& k file provided by Filmentrics.
5.7.2
Place the wafer/sample on the stage , make sure the objective is set to 15X
5.7.3
Click on the Live Video Tab and use the vertically mounted micrometer to focus the
image.
5.7.4
Click on the “Edit Recipe” Icon
5.7.5
Select the S1813fft recipe
5.7.6
Click on the Analysis tab
5.7.7
In the Analysis Method window, select “FFT Thickness Only”
5.7.8
Click on “OK” in the lower left.
5.7.9
Click on the Measure Icon
5.7.10 You will be prompted to take a “Reflectance Sample” (Your sample),
5.7.11 You will then be prompted to take a “Reflectance Standard (The filmetrics standard)
Filmetrics SOP
5.7.12 You will then be prompted to take a “Background” with the 45 degree mirror provided.
10/3/2013
RES-01-006-A
5.7.13 Click on Finish in the Background window (You are now ready to measure your
sample(s).
5.7.14 Re-Place your sample and measure the sites.
5.7.15 Note the goodness of fit on the lower right hand side of the screen. It should be
greater than .9.
6.0
7.0
8.0
Safety
6.1
Engineering Controls: (none required)
6.2
Administrative Controls:
6.2.1
Receive laboratory-specific training.
6.2.2
Read this SOP and applicable safety data sheets.
6.2.3
Do not work alone in the lab. Implement the buddy system.
6.3
PPE Requirement
6.4
Storage location for chemicals: (Be aware of incompatibility with other chemicals already in
use in the lab.)
6.5
Hazardous waste: Label the hazardous waste container with a UMass Lowell hazardous
waste label before pouring hazardous waste in the container. Fill out all the information on
the hazardous waste label (generator information, full names of chemicals, hazard classes,
etc.) When the waste is full, please date the waste. EEM-EHS checks satellite
1
accumulation
areas (SAAs) every Wednesday. If the waste is generated on a Thursday,
Friday, Saturday, or Sunday; please call extension 42543 to schedule a pick-up of your
waste. The hazardous waste can only be stored in your lab for a total of 3 days once it is
dated. If the waste is dated on a Monday, Tuesday, or Wednesday (before the SAA check),
there will be no need to call to schedule the pick-up of the waste since the waste will be
picked up within 3 days.
6.6
Safety Protocol
Accident Procedures: (Found in the Safety Data Sheet)
7.1
Contact,Skin,Eyes, Inhalation , Ingestion
7.2
Spill or leak: (How do you deal with a small spill? Are there specific absorbents that should
be used?) For spills that are an inhalation hazard, please evacuate the lab and post a
restriction on the door. Call 44911 from a campus phone.
7.3
Fire: (Are there specific concerns to be considered in the event of a fire? For example,
some chemicals are water reactive, and using water on a fire where these chemicals are
involved will make the problem worse.) Evacuate the lab and pull the nearest fire pull alarm
before exiting the building.
Maintenance
8.1
Filmetrics SOP
Preventive Maintenance Instruction
10/3/2013
RES-01-006-A
8.2
Maintenance Contact information
Document Revision History
Date
Description of Modifications
Name
Revision
1
Filmetrics SOP
10/3/2013
RES-01-006-A
Training Certification Check Sheet
UCard ID
Name (Last, First)
Signature
Date
Trainer
Trainee
Operation
Number
Operation Description
1
Measure Standard
2
Load Recipes
3
Measure S1813
Initial if the
Trainee is
Proficient
4
5
6
1
7
8
9
10
11
12
13
14
Filmetrics SOP
10/3/2013
RES-01-006-A