Laboratory:
Title:
Class:
Description:
Sandia National Laboratories
Dual E-beam Evaporator
Processing/Manufacturing
The dual E-beam evaporator affords the ability to make thin layers of alloys, including
compositions that can be difficult to achieve stemming from conventional and vacuum
miscibility constraints. The instrument is an Angstrom Sciences EBES 67369 with two electron
beam sources, each rated to 10 kV, 500 mA. Each beam source also has four pockets for
evaporation target material. The evaporator has Xtal thickness monitors, so layers from a few
angstroms to a few microns are achievable.
Capability Bounds:
Unique Aspects:
Availability: As the instrument is not housed within a traditional user facility, scheduling is fairly open. The
site is within the Sandia/California Property Protection Area, so access depends upon meeting
requirements for entering the facility and coordinating use with the instrument owner.
Capability Richard Karnesky, Senior Member of Technical Staff, Karnesky, [email protected], (925) 294Expert: 2106; Josh Whaley, R&D Laboratory Support Technologist, [email protected], (925) 294-2677
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References: Website: -
045 LightMat Capability
December 2015