High Purity Chemical Valve
Series LVC/LVA/LVH
Integral Fittings/Threaded Ports/Manual Operation (Integral Fittings/Threaded Ports)
LVC
Air Operated Type
Integral Fittings Series LVC
P.461
N.C./N.O. with same configuration/Double acting
Compatible with 100°C fluid temperature
LVA
LVH
LVD
LVQ
LQ1
tteerriiaall::
a
a
m
m
y
B
Booddy
A
w PF
N
Neew
LVN
TL/TIL
LQ3
Series LVC
Air Operated Type
Threaded Ports Series LVA
P.471
Diaphragm material PTFE, EPR, NBR are
selectable
l::
aatteerriiaal
m
m
y
y
d
d
B
Boo
A/
A /
F
P
w
w
e
e
N
N
steel
Series LVA
s
StainlesPS
P
Manual Operation Series LVH
Integral fitting type/Threaded type
P.481
Locking and non-locking types available
l::
aatteerriiaal
m
m
y
y
d
d
o
B
Bo
A/ /
l
e
e
t
s
s
s
Stainle PS
P
w PF
N
Neew
Series LVH
457
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Stable Sealing Surface
Guide ring
A unique guide ring on the piston rod
eliminates lateral motion of the poppet, greatly increasing seal life and
reducing particle formation with a
stable work surface.
Low particle generation
Piston bumper
Prevents Micro-Bubbles
A bumper absorbs piston momentum
to minimize impact-induced particles.
Diaphragm (PTFE)
Special diaphragm construction ensures gentle opening and closing that
prevents the formation of micro-bubbles.
Back-pressure resistance
and long life Buffer
Minimal dead space
The diaphragm is supported by a buffer
that minimizes deformation, which
gives it long life and resistance to backpressure.
In addition to a body designed for
smooth flow with minimal internal dead
space, integral fittings eliminate the
possibility of residual liquid in pipe
threads.
Outstanding corrosion
resistance Body (New PFA)
Different tubing sizes can
be selected Hyper fitting
PAT.
Compatible with chemicals such as
acids, bases and ultra DI water.
No leak design (quadruple seal)
Nut lock mechanism (sealing)
High flexural strength (tubing supports)
Main applications and fields
LVC
IC manufacturing Chemicals
lines
Medical
Analytical
equipment
Instruments
PharmaCleaning
ceutical manu- equipment
facturing
LVA
LVH
Medical
Chemicals
For shut off
Food
processing
Analytical
Instruments
IC manufacturing
Cleaning
equipment
For air
bleeding
458
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High Purity Chemical Valve
Air Operated
Integral Fitting Type Series LVC
Type
P.461
Model LVC2
Orifice diam
eter
ø4
Tubing
O.D. Metric
3, 4, 6
Inch 1/8, 3/16, 1/4
Valv
e typ
Symbol
e
Basic type
A B
B
LVC3
LVC4
LVC5
LVC6
ø8
6, 8, 10
1/4, 3/8
ø10
10, 12
3/8, 1/2
ø16
12, 19
1/2, 3/4
ø22
19, 25
3/4, 1
N.C.
PB
PA
Series LV
PA
AB
A
PB
N.O.
LVC
Double
acting acting
N.C. N.O. Double
PA
With flow rate
adjustment
B
PA
A B
A
PB
N.C. Double acting
PA
PA
With bypass
A B
B
With flow rate
adjustment
& bypass
B
A
PB
PA
A B
A
PB
N.C. Double acting
With indicator
LVA
Double
acting
LVH
N.C.
N.C. Double acting
PA
N.C.
Double
acting
LVD
N.C.
LVQ
Double
acting
LQ1
PA
B
N.C.
A
LVN
N.C.
Suck back
P P
P
A
B
A
B
Unit
Single type
Single
type
TL/TIL
Unit
LQ3
Manifold
(5 stations max.)
3 port
A
PA
R
P
N.C.
N.C.
Air Operated
Threaded Type Series LVA
Type
Model LVA1
Orifice diam
eter
ø2
Bod
y maNote 1) Sta
Port size
inless
teria
1/8 1/4
steel (S
l
US316
)
PPS
Valv
e typ PFA
Symbol
e
Basic type
PB
PA
AB
B
PA
AB
A
PB
P.471
LVA2
ø4
LVA3
ø8
LVA4
ø12
LVA5
ø20
1/8
1/4
3/8
1/2
1/4
3/8
1/2
3/4
LVA6
ø22
Note 1) Refer to the page 471 for the applicable optional body materials.
1
N.C.
N.C.
N.C. N.O. Double
acting N.O.
PA
With flow rate
adjustment
B
PA
A B
A
PB
N.C. Double acting
PA
PA
With bypass
B
A B
A
PB
N.C. Double acting
With flow rate
adjustment
& bypass
PA
B
PA
A B
A
PB
N.C. Double acting
With indicator
Double
acting
Double
acting
N.C.
Double
acting
N.C.
Double
acting
PA
B
A
N.C.
N.C.
Manifold
(5 stations max.)
3 port
A
PA
R
P
Note 2)
N.C.
Note 2) Only PFA is applicable as a body
material.
N.C.
459
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Series LV
Manually Operated Series LVH
P.481
Integral Fitting Type
Type
Model
Orifice diam
eter
Tubing
O.D. Metric
Inch
Valv
e typ
Symbol
e
LVH20
ø4
3, 4, 6
1/8, 3/16, 1/4
LVH30
ø8
6, 8, 10
1/4, 3/8
LVH40
ø10
10, 12
3/8, 1/2
Basic type
B
A
B
A
N.C.
Non-locking Locking
Manifold
(5 stations max.)
Threaded Type
Type
LVH20
LVH30
LVH40
ø4
ø8
ø12
Material Stainless steel
Stainless steel
Stainless steel
PPS
PFA
PPS
PFA
(SUS316)
(SUS316)
(SUS316) PPS PFA
Port s
Valv
iz
e typ
e
1/8 1/4 1/4 1/4 1/4 3/8 3/8 3/8 3/8 1/2 1/2 1/2
e
Model
Orifice diam
eter
Symbol
Basic type
B
A
B
A
N.C.
Non-locking Locking
Manifold
(5 stations max.)
460
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Air Operated Type
Integral Fitting Type (Hyper Fittings)
Series LVC
How to Order Valves (Single Type)
LVC 2 0
LVC
LVA
S 06
LVH
Option
Body class
Symbol Body class
2
2
3
3
4
4
5
5
6
6
Orifice dia.
ø4
ø8
ø10
ø16
ø22
Valve type
N.C.
0
N.O.
1
2 Double acting
Nil
1
2
3
4
LQ2
integral
fitting
2
Body class
3 4 5 6
Metric sizes
03
ø3
04
ø4
06
ø6
08
ø8
10
ø10
12
ø12
19
ø19
25
ø25
Inch sizes
03
1/8
05
3/16
07
1/4
11
3/8
13
1/2
19
3/4
25
1
LVD
LVQ
Note) Refer to “Variations” in the table below for
option combinations.
Options can not be combined each other.
Note) Refer to variations in
the table below for
valve type combinations.
Material
Nil
Note
–
TL/TIL
LQ3
F
PFA
PVDF
PTFE
Symbol
Nil
Application
Ports A & B same size
Hydrofluoric acid compatible
(Only LVC40, 50 type)
N
PFA
PPS
PTFE
Ammonium hydroxide compatible
Refer to the
applicable
tubing table
to the left.
Different diameter tubings can be selected
within the same body
class.
Symbol
Port B (OUT) different dia. size
Pilot port thread type
Nil
N
Variations
Model
iameter
Tubin
g O.
D. Metric
Orifice d
Type
LQ1
LVN
Actuator section Dia- Applicable option
End plate phragm 1 2 3 4
PPS
PTFE
PFA
Symbol Body
Applicable tubing size
Connecting
Symbol tubing O.D.
None
With flow rate adjustment
With bypass
With flow rate adjustment & bypass
With indicator
Va
lve
Symbol
typ
Basic type
Inch
e
Body class
2
3, 4, 5, 6
3, 4, 5, 6
LVC20
Thread type
M5
Rc 1/8
NPT 1/8
LVC30
LVC40
LVC50
LVC60
ø4
ø8
ø10
ø16
ø22
3, 4, 6
6, 8, 10
10, 12
12, 19
19, 25
1/8, 3/16, 1/4
1/4, 3/8
3/8, 1/2
1/2, 3/4
3/4, 1
N.C.
PB
PA
AB
B
PA
AB
N.O.
A
PB
N.C. N.O. Double
acting Double
Basic size
With reducer
Note) Applicable fittings for body class 6
is LQ1.
acting
With flow
rate
adjustment
PA
B
A
PB
N.C. Double
acting
With
bypass
N.C.
Double
acting
PA
N.C.
A
PB
N.C. Double
acting
Double
acting
PA
N.C.
A
PB
N.C. Double
acting
Double
acting
PA
B
With flow
rate
adjustment &
bypass
PA
A B
A B
PA
B
A B
With
indicator
PA
B
A
N.C.
N.C.
461
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Series LVC
Standard Specifications
Model
Metric size
Tubing O.D.
Inch size
Orifice diameter
Av x 10-6m2
Flow
characteristics Cv
Withstand pressure (MPa)
Operating pressure (MPa)
Back pressure N.C./N.O.
(MPa)
Double acting
Valve leakage (cm3/min)
Pilot air pressure (MPa)
Pilot port size
Fluid temperature (°C)
Ambient temperature (°C)
Mass (kg)
LVC20
6
1/4
ø4
8.4
0.35
M5
0.09
LVC50
19
3/4
ø16
144
6
LVC40
12
1/2
ø10
60
2.5
1
LVC30
10
3/8
ø8
40.8
1.7
LVC60
25
1
ø22
192
8
0 to 0.4
0 to 0.5
0.2 or less
0.3 or less
0.3 or less
0.4 or less
0 (with water pressure)
0.3 to 0.5
Rc 1/8, NPT 1/8
0 to 100
0 to 60
0.23
0.42
0.86
1.00
Note 1) Contact SMC if the valve is to be used with vacuum and B → A flow.
Different Diameter Tubing Applicable with Reducer
Different diameter tubing can be selected (within a body class) by using a nut and
insert bushing (reducer).
With reducer
Tubing O.D.
Body
class
Metric sizes
3
4
6
8
10
Inch sizes
12
19
25
1/8 3/16 1/4
3/8
1/2
3/4
1
2
3
4
5
6
Note) Refer to page 489 for information on changing tubing sizes.
Specific Product Precautions
Be sure to read before handling. Refer to front matters 42 and 43 for
Safety Instructions, and pages 491 and 492 for High Purity Chemical
Valve Precautions.
Piping
Caution
1. Connect tubing with special
tools.
Refer to the pamphlet “High-Purity
Fluoropolymer Fittings HYPER FITTING®/Series LQ1, 2 Work Procedure
Instructions” (M-E05-1) for connecting
tubing and special tools. (Downloadable from our web site.)
Caution
2. Tighten the nut to the end
surface of the body. As a guide,
refer to the proper tightening
torques shown below.
Tightening torque for piping
Body class
Torque (N·m)
2
3
4
5
6
1.5 to 2.0
3.0 to 3.5
7.5 to 9.0
11.0 to 13.0
5.5 to 6.0
462
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Air Operated Type
Integral Fitting Type (Hyper Fittings)
Series LVC
Suck Back
A change of volume inside the suck back valve pulls in liquid at the end of the nozzle to prevent dripping.
Single type
Standard Specifications
Model
Adjustment knob
Adjusts the amount
of suck back.
Note 1)
Tubing O.D.
Lock nut
Symbol
Locks the adjustment
knob position.
B
A
Metric sizes
-6
Av x 10
LVC23U
(3), (4), 6
Inch sizes
(1/8), (3/16), 1/4
Orifice diameter
Flow
characteristics
P
LVC23
m2
Cv
—
ø3
—
4.8
—
0.2
Withstand pressure (MPa)
1
Operating pressure (MPa)
0 to 0.2
Unit type
Pilot port size
Adjustment knob
Fluid temperature (°C)
0 to 100
Ambient temperature (°C)
0 to 60
Lock nut
Locks the
adjustment
knob position.
Adjusts the flow rate.
LVD
LVQ
M5
0.08
Mass (kg)
Lock nut
LVH
0.3 to 0.5
Pilot air pressure (MPa)
Adjustment knob
LVA
0.1
Maximum suck back volume (cm3)
Adjusts the amount
of suck back.
LVC
LQ1
LVN
0.16
Note 1) Different diameter tubing shown in ( ) can be selected when used
with a reducer. Refer to page 489 for details.
Locks the
adjustment
knob position.
LQ3
How to Order
LVC 2 3
P
B
S 06
Body class
Symbol
Symbol Body class
2
2
P
A
Suck back body
Valve type
3
TL/TIL
Suck back valve
Port B (OUT)
different dia. size
Symbol
Nil
Application
Ports A & B same size
Refer to the
applicable
tubing in the
table below.
Different diameter
tubing can be selected within the
same body class.
Applicable tubing size
Body type
Nil
U
Single type
Unit type with 2 way valve
LQ2 integral fitting
Options
Connecting Body class
Symbol tubing O.D.
2
Metric sizes
03
ø3
04
ø4
06
ø6
Inch sizes
03
1/8
05
3/16
07
1/4
Basic size
With flow rate adjustment
With reducer
With bypass
The flow rate is adjusted by controlling the diaphragm stroke.
Adjustment knob
A small amount of fluid from the inlet side is allowed to flow
continuously to the outlet side by providing a bypass inside
the body.
Adjusts the flow rate.
Lock nut
Locks the adjustment
knob position.
Adjustment knob
Lock nut
Adjusts the flow rate.
Locks the adjustment
knob position.
463
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Series LVC
Construction
Standard type
N.C. type
N.O. type
PB
q
PA
e
w
B
Double acting type
PB
q
PB
PA
e
w
PA
B
A
q
e
w
B
A
A
r ty
With reducer
With flow rate adjustment
With bypass
u
i
PB
i
PA
t y
B
A
Suck back (single type)
Suck back (unit type)
i
e
i
i
P
q
P
P
yt e
yt e
A
B
B
e
A
w r
w r
With indicator
o
Parts list
No.
Material
Option
1
Actuator section
Description
PPS
2
Body
PFA
PVDF
—
3
Diaphragm
PTFE
—
4
End plate
PPS
5
Insert bushing
PFA
PVDF
—
6
Nut
PFA
—
7
Collar
PFA
—
8
Flow rate adjuster section
PPS
—
9
Indicator
PP
—
B
B
A
A
464
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Air Operated Type
Integral Fitting Type (Hyper Fittings)
Series LVC
Dimensions
Basic type
LVA
D
L
A
LVC
LVH
LVD
K
4 x øM
LVQ
LQ1
Sensor (Breathing port) R
2xQ
LVN
TL/TIL
H
PB
LQ3
C
PA
SMC
G
A
J
E
N
B
B
(F)
Dimensions
(mm)
Model
A
B
C
D
E
F
G
LVC2
LVC3
LVC4
LVC5
LVC6
30
30
54.5
44
11
36
47
79
56
16.5
106
46
60
96
68
22
58
75
129
84
26
58
75
138
84
32
H
79
28.5
13
43
17.5
131
55
154
68
165
77
J
K
L
M
N
Q
R
4
20
37
3.5
23.5
M5 x 0.8
M3 x 0.5
7.5
34
46
5.5
39
18
8
42
57
5.5
48
27.5
8
56
71
6.5
62
Rc 1/8
NPT 1/8
Rc 1/8
NPT 1/8
27.5
8
56
71
6.5
71
465
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Series LVC
Dimensions
With bypass
(Max. S)
With flow rate adjustment
PB
PA
PB
SMC
B
PA
A
B
SMC
A
SMC
Dimensions (mm)
Model
S
LVC2
LVC3
LVC4
LVC5
LVC6
12.5
(Max. T)
Dimensions (mm)
24
Model
T
29
LVC3
LVC4
LVC5
49.5
34.5
36
60.5
With indicator
(Max. S)
With flow rate adjustment & bypass
54.5
W
PB
PA
B
A
SMC
A
B
Dimensions
(Max. T)
Dimensions
(mm)
S
Model
LVC3
LVC4
LVC5
T
24
49.5
29
54.5
34.5
60.5
Suck back (Single type)
(mm)
Model
W
LVC20
LVC30
LVC40
LVC50
LVC60
64
90
110.5
147
156
Suck back (Unit type)
30
44
37
(Max. 11.5)
M5 x 0.8
4
30
(78)
12.5
B
51
SMC
45
SMC
A
M5 x 0.8
30
45
51
M5 x 0.8
SMC
A
B
61
(110)
4
12.5
20
(Max. 11.5)
4 x ø3.5
30
44
37
4.5
3.5
50
466
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Series LVC
Manifolds
Manifold Specifications
Model
LLC2A
LLC3A
LLC5A
LLC4A
Stacking type
Manifold type
Common IN/Individual OUT
P (IN), A (OUT) type
LVC
2 to 5 stations
Valve stations
Tubing size (port P)
3/8
1/2
3/4
3/4
Tubing size (port A)
1/4
3/8
1/2
3/4
LVA
LVH
Note 1) Contact SMC if the manifold will be used with vacuum and A → P flow.
LVD
LVQ
How to Order Manifold Base
LLC 2 A
02
S 11
Body class
Symbol Body class
2
2
3
3
4
4
5
5
Base type
A
Stacking type
Manifold stations
02
2 stations
…
…
05
5 stations
LQ1
LQ2 integral fitting
LVN
Tubing size for P port and L side connection
Tubing size for P port and R side connection
Symbol Tubing size
Plug
00
Ø6
06
1/4"
07
Ø8
08
Ø10
10
3/8"
11
Ø10
10
3/8"
11
Ø12
12
1/2"
13
Ø12
12
1/2"
13
Ø19, 3/4"
19
Ø12
12
1/2"
13
Ø19, 3/4"
19
Symbol Tubing size Body class
Nil
L side, R side same size
2 to 5
00
Plug
06
Ø6
07
1/4"
2
08
Ø8
10
Ø10
11
3/8"
10
Ø10
11
3/8"
3
12
Ø12
13
1/2"
12
Ø12
13
1/2"
4
19
Ø19, 3/4"
12
Ø12
13
1/2"
5
19
Ø19, 3/4"
Body class
2 to 5
2
3
4
5
TL/TIL
LQ3
How to Order Valve
LVC 2 0 A
Body class
Symbol Body class Orifice dia.
2
ø4
2
3
3
ø8
4
4
ø12
5
5
ø20
Valve type
0
1
2
N.C.
N.O.
Double acting
Body type
A
Stacking type for manifold
S 07
Option
LQ2 integral
fitting
Nil
1
4
Tubing size
Symbol Tubing size
03
Ø3, 1/8"
04
Ø4
05
3/16"
06
Ø6
07
1/4"
06
Ø6
07
1/4"
08
Ø8
10
Ø10
11
3/8"
10
Ø10
11
3/8"
12
Ø12
13
1/2"
12
Ø12
13
1/2"
19
Ø19, 3/4"
Body class
2
None
With flow rate adjustment
With indicator
Note) Options can not be combined
each other.
Material
Actuator section Dia- Applicable option
End plate phragm 1
4
PTFE
PPS
PFA
Symbol Body
Nil
3
4
F
PFA
PVDF
PTFE
N
PFA
PPS
PTFE
–
Hydrofluoric
acid
compatible
Ammonium
hydroxide
compatible
Pilot port thread type
Symbol
5
Note
Nil
N
Body class
2
3/4/5
3/4/5
Thread type
M5
Rc 1/8
NPT 1/8
467
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Series LVC
Manifold variations
How to Order Manifold Assembly (Example)
Enter the part number of the valves to be mounted together
with the manifold base part number.
ons
tati
S
.
.
2.
1
Model LVC20A LVC30A LVC40A LVC50A
materia
l
PFA
Tu
Orif bing size
1/4
3/8
1/2
3/4
ice
Va diam
lve
e
t
e
typ
r
Symbol
Ø4
Ø8
Ø10
Ø16
e
Manifold
Type
Basic type
Stations are counted
from station 1 on the left
side, with the A (OUT)
ports in front.
<Example>
LLC2A-03-S11 • • • • • 1set
A
A
A
N.C.
1 set Manifold base part no.
PB
PA
A
PB
N.O.
N.O. Double Double
acting acting
P
P
With flow rate
adjustment
∗ LVC20A-S07-1 • • • • • 2 sets 2 sets Valve part no. (stations 1 & 2)
∗ LVC20A-S07 • • • • • 1 set 1 set Valve part no. (station 3)
A
PB
PA
N.C.
PA
PB
A
A (OUT) port
P
P
P
PA
PA
PA
N.C.
A
A
PB
PA
A
PB
PA
Add the ∗ symbol at the beginning of part numbers for
valves, etc. to be mounted.
A
N.C.
Enter together in order counting from station 1
on the left side, with the A (OUT) ports in front.
Double
acting
Double
acting
Dimensions
Stations
--C
Y
4 x Mounting hole for W
D
A
K
LLCA-
(Max. S)
L1
L2
L3
2xQ
C
H
Breathing port: R
SMC
SMC
SMC
1/4
1/4
N
U
1/4
E
3/8
V
G
SMC
Pitch = B
Dimensions
Model
LLC2A
LLC3A
Dimensions
Model
LLC2A
LLC3A
LLC4A
LLC5A
A
(mm)
B
C
D
E
46.5 31
67.5
67
19
47
36.5
93.5
76
60
47
111.5
75
59
131
G
(mm)
Station
n x A port
H
K
N
Q
R
41.5
13
18
36.5 M5 x 0.8 M3 x 0.5 11.5 19
34
M4 5.5
27.5
57.5
17.5
39
53.5
95
33.5
70.5
18
50
63.5
114
33.5
70
27.5
62
64
Rc 1/8
Rc 1/8
NPT 1/8 NPT 1/8
S
U
V
W
Y
24
27.5
47
M5 6.5
29
33.5
56
M6 7.5
34.5
27.5
56.5 M6 7.5
LLC4A
LLC5A
Symbol
L1
L2
L3
L1
L2
L3
L1
L2
L3
L1
L2
L3
2
62
3
4
5
93
124 155
75 106
137 168
146 177
208 239
73 109.5 146 182.5
84 120.5 157 193.5
183 219.5 256 292.5
94 141
188 235
109 156
203 250
219 266
313 360
118 177
236 295
130 189
248 307
240 299
358 417
468
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Series LVC
3 Port
Standard Specifications
Model
LVC200
ø4
Orifice diameter
Flow
characteristics
-6
Av x 10
7.2
m2
Withstand pressure (MPa)
1
Operating pressure (MPa)
0 to 0.5
Valve leakage
LVC
0.3
Cv
LVA
LVH
0 (with water pressure)
(cm3/min)
Pilot air pressure (MPa)
0.4 to 0.5
Pilot port size
M5 x 0.8
Fluid temperature (°C)
0 to 100
Ambient temperature (°C)
0 to 60
Mass (kg)
0.120
LVD
LVQ
LQ1
LVN
TL/TIL
How to Order Valve
LVC 2 0 0
PA
R
P
A
S 07
Applicable tubing size
Body class
Symbol Body class Orifice dia.
2
2
Ø4
Valve type
N.C.
0
LQ3
N.C.
LQ2 integral fitting
Connecting Body class
Symbol tubing O.D.
2
Metric sizes
03
ø3
04
ø4
06
ø6
Inch sizes
03
1/8
05
3/16
07
1/4
Basic size
With reducer
Construction
q
e
w
Parts list
Description
No.
r
y t
Material
1
Actuator section
2
Body
3
Diaphragm
PTFE
4
End plate
PPS
5
Nut
PFA
6
Insert bushing
PFA
PPS
PFA
469
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Series LVC
Dimensions
30
A
54.5
39.5
30
R
P
M5 x 0.8
Pilot port
M3 x 0.5
Breathing port
13
PB
66.5
PA
SMC
35.5
40.5
SMC
4
22.5
SMC
11.5
79
30
20
4 x ø3.5
36.5
43
470
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Air Operated Type
Threaded Type
Series LVA
How to Order Valves (Single Type)
LVA 2 0
02
LVA
A
Nil
1
2
3
4
Orifice dia
ø2
ø4
ø8
ø12
ø20
ø22
None
With flow rate adjustment
With bypass
With flow rate adjustment & bypass
With indicator
LVD
LVQ
LQ1
Note) Refer to “Variations” in the table below for option combinations.Options
can not be combined each other.
Valve type
0
1
2
LVH
Option
Body class
Symbol Body class
1
1
2
2
3
3
4
4
5
5
6
6
LVC
LVN
Material
N.C.
N.O.
Double acting
Port size
Port size
1/8
1/4
1/8
1/4
1/4
3/8
3/8
1/2
1/2
3/4
1
Symbol
01
02
01
02
02
03
03
04
04
06
10
Note) Refer to “Variations”
in the table below
for valve type combinations.
Actuator section Dia- Applicable option
End plate phragm 1 2 3 4
PPS
Stainless
PTFE
steel
—
Symbol Body
Body class
Note
TL/TIL
—
LQ3
1
A
2
B
PPS
PPS
PTFE
Except LVA60
C
PFA
PPS
PTFE
Except LVA10
D
Stainless
steel
NBR
Except LVA60
E
Stainless
steel
PPS
—
PPS
—
3
4
5
6
EPR
Except LVA60
F
PFA
PVDF
PTFE
Hydrofluoric acid
compatible
(Only LVA40, 50 type)
G
PPS
PPS
NBR
Except LVA60
H
PPS
PPS
EPR
Except LVA60
N
PFA
PPS
PTFE
Ammonium hydroxide
compatible
Except LVA10
Thread type
Symbol Thread type
Rc
Nil
NPT
N
Variations
Body
Model
Orifice diame
ter
Port size
Stainle
ss
materi
al Note)
steel (S
US316
)
Valv
e ty
Symbol
Type
Basic type
1/4
1/8
1/4
LVA30
ø8
1/4
3/8
LVA40
ø12
3/8
1/2
LVA50
ø20
1/2
3/4
LVA60
ø22
Note) Refer to the “Material” table for the
applicable optional body materials.
1
PPS
PFA
PA
PB
AB
AB
B
A
PB
N.O. Double
N.C.
acting
PA
PA
B
A
B
A
PB
Double acting
N.C.
With bypass
PA
PA
B
A
B
A
PB
Double acting
N.C.
With flow rate
adjustment &
bypass
1/8
LVA20
ø4
N.C.
PA
With flow
rate
adjustment
pe
LVA10
ø2
PA
B
A
PA
B
A
PB
N.C. Double acting
With indicator
N.O.
Double
acting
N.C.
Double
acting
N.C.
Double
acting
N.C.
Double
acting
PA
B
A
N.C.
N.C.
471
Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com
Series LVA
Standard Specifications
Model
Orifice diameter
Port size
-6
Av x 10
Flow
characteristics Cv
m2
LVA10
LVA20
LVA30
LVA40
LVA50
LVA60
ø2
ø4
ø8
ø12
ø20
ø22
1/8, 1/4
1/8, 1/4
1/4, 3/8
3/8, 1/2
1/2, 3/4
1
1.7
8.4
40.8
79.2
144
192
0.07
0.35
1.7
3.3
6
8
Withstand pressure (MPa)
1
Operating pressure (MPa)
0 to 0.5
Note 2)
Back pressure N.C./N.O. 0.15 or less
(MPa)
Double acting 0.3 or less
Valve leakage
Basic type
0 to 0.4
0.3 or less
0.2 or less
0.4 or less
0.3 or less
0 (with water pressure)
(cm3/min)
0.3 to 0.5
Pilot air pressure (MPa)
M5
Pilot port size
Rc 1/8, NPT 1/8
Fluid temperature (°C)
0 to 100 Note 1)
Ambient temperature (°C)
0 to 60
Mass (kg)
Stainless steel
(SUS)
0.12
0.18
0.44
0.86
1.67
1.96
PPS
0.05
0.08
0.18
0.32
0.73
—
PFA
—
0.09
0.20
0.35
0.78
0.90
Note 1) 0 to 60°C when the diaphragm is NBR or EPR.
Note 2) The N.O. type is not available for LVA10.
Note 3) Contact SMC if the valve will be used with vacuum and B → A flow.
Specific Product Precautions
With flow rate adjustment
Be sure to read before handling. Refer to front matters 42 and 43 for
Safety Instructions, and pages 491 and 492 for High Purity Chemical
Valve Precautions.
Piping
Caution
1. Avoid using metal fittings with a resin body (taper threads).
This can cause damage to the valve body.
Options
With flow rate adjustment
Adjusts the flow rate by controlling the diaphragm stroke.
Adjustment knob
Adjusts the flow rate.
Lock nut
Locks the adjustment knob position.
472
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Air Operated Type
Threaded Type
Series LVA
Construction
Standard type
N.C. type
N.O. type
PB
PA
B
Double acting type
Y packing
PB
q
e
w
PA
Y packing
q
PB
q
PA
e
e
w
B
A
LVC
LVA
w
B
A
LVH
A
r
LVD
LVQ
LQ1
With flow rate adjustment
With indicator
LVN
t
TL/TIL
y
LQ3
PB
PA
B
B
A
A
Parts list
No.
1
Description
Actuator section
Material
Option
PPS
PVDF
Stainless steel
2
Body
PPS
—
PFA
PTFE
3
Diaphragm
NBR
—
EPR
4
End plate (PFA body only)
PPS
5
Flow rate adjuster section
PPS
PVDF
—
6
Indicator
PP
—
473
Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com
Series LVA
Dimensions
A
Body material: Stainless steel
Basic type
2xQ
Sensor (Breathing port) R
H
PB
N
G
C
PA
A
E
B
B
C
L
L
C
2xP
A
B
B
LVA10
2xF
A
B
LVA20
LVA60
With indicator
Dimensions
(mm)
Model
S
LVA2
LVA3
LVA4
LVA5
LVA6
12.5
W
Dimensions
B
B
K
(Max. S)
With flow rate
adjustment
A
24
29
B
34.5
A
36
Dimensions
(mm)
Model
W
LVA20
LVA30
LVA40
LVA50
LVA60
66.5
89.5
110
140.5
148
(mm)
Model
A
B
C
E
F
G
LVA1
20
33
49.5
10
M5 x 0.8
27.5
H
K
L
11
—
13
N
P
Q
Rc 1/8, 1/4
NPT 1/8, 1/4
M5 x 0.8
27.5
LVA2
30
33
57
10
M5 x 0.8
31
13
22
22
26
LVA3
36
47
78.5
13
M6 x 1.0
42.5
17.5
37
26
38.5
Rc 1/4, 3/8
NPT 1/4, 3/8
LVA4
46
60
95.5
16
M8 x 1.25
54.5
18
47.5
33.5
47.5
Rc 3/8, 1/2
NPT 3/8, 1/2
Rc 1/2, 3/4
NPT 1/2, 3/4
LVA5
58
75
122.5
19
M8 x 1.25
61.5
27.5
60
43
55.5
LVA6
58
85
130
24
M8 x 1.25
69
27.5
60
43
63
R
ø4.2
M3 x 0.5
Rc 1/8
NPT 1/8
Rc 1/8
NPT 1/8
Rc 1
NPT 1
474
Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com
Air Operated Type
Threaded Type
Series LVA
Dimensions
D
L
A
Body material: PPS
Basic type
LVC
LVA
LVH
4 x øM
K
LVD
LVQ
2xQ
LQ1
Sensor (Breathing port) R
LVN
H
PB
TL/TIL
C
PA
B
G
N
LQ3
A
E
J
SMC
B
2xP
With flow rate adjustment
With indicator
49.5
(Max. S)
LVA10
A
W
B
Dimensions
L
2 x Ø2
Depth 4
B
A
SMC
(mm)
Model
S
LVA2
LVA3
LVA4
LVA5
12.5
B
24
A
SMC
29
34.5
Dimensions
(mm)
Model
W
LVA20
LVA30
LVA40
LVA50
LVA60
67
88.5
110.5
147
–
K
Dimensions
(mm)
Model
A
B
C
D
E
G
LVA1
20
33
49.5
—
10
27.5
H
J
K
L
M
N
P
11
—
4
11
—
27.5
Rc 1/8, 1/4
NPT 1/8, 1/4
Q
R
ø4.2
M5 x 0.8
LVA2
30
36
57.5
44
11
31.5
13
4
20
37
3.5
26.5
Rc 1/4
NPT 1/4
LVA3
36
47
77.5
56
15
41.5
17.5
7.5
34
46
5.5
37.5
Rc 3/8
NPT 3/8
LVA4
46
60
96
68
22
55
18
8
42
57
5.5
48
Rc 1/2
NPT 1/2
LVA5
58
75
129
84
26
68
27.5
8
56
71
6.5
62
Rc 3/4
NPT 3/4
M3 x 0.5
Rc 1/8
NPT 1/8
Rc 1/8
NPT 1/8
475
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Series LVA
Dimensions
D
L
A
Body material: PFA
Basic type
K
4 x øM
2xR
Sensor (Breathing port) U
H
PB
B
G
N
C
PA
A
J
E
SMC
B
2xP
Q (LVA6)
Dimensions
B
A
SMC
W
With indicator
(Max. S)
With flow rate
adjustment
(mm)
Model
S
LVA2
LVA3
LVA4
LVA5
LVA6
12.5
24
Dimensions
A
B
29
SMC
34.5
36
Dimensions
(mm)
Model
W
LVA20
LVA30
LVA40
LVA50
LVA60
70.5
92.5
110.5
147
156
(mm)
Model
A
B
C
D
E
G
LVA2
30
36
61
44
14.5
35
LVA3
36
47
81.5
56
19
LVA4
46
60
96
68
22
H
J
K
L
M
N
P
Q
R
U
13
4
20
37
3.5
30
Rc 1/4
NPT 1/4
—
M5 x 0.8
M3 x 0.5
45.5
17.5
7.5
34
46
5.5
41.5
Rc 3/8
NPT 3/8
—
55
18
8
42
57
5.5
48
Rc 1/2
NPT 1/2
—
Rc 1/8
NPT 1/8
Rc 1/8
NPT 1/8
—
117
LVA5
58
75
129
84
26
68
27.5
8
56
71
6.5
62
Rc 3/4
NPT 3/4
LVA6
58
75
138
84
32
77
27.5
8
56
71
6.5
71
Rc 1
NPT 1
476
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Series LVA
Manifolds
Manifold Specifications
LLA2A
Model
LLA3A
Manifold type
LLA5A
LLA4A
Stacking type
P (IN), A (OUT) type
Common IN/Individual OUT
Valve stations
LVC
2 to 5 stations
Port size (port P)
1/4
3/8
1/2
3/4
Port size (port A)
1/4
3/8
1/2
3/4
LVA
LVH
Note 1) Contact SMC if the manifold will be used with vacuum and A → P flow.
LVD
LVQ
How to Order Manifold Base
LLA 2 A
05
02
LQ1
C
LVN
Body class
Symbol Body class
2
2
3
3
4
4
5
5
Symbol
C
Symbol Thread type
Nil
Rc
N
NPT
Base type
A
Manifold
PFA
LQ3
Port size (port P)
Stacking type
Manifold stations
02
TL/TIL
Material
Thread type
2 stations
…
…
05
5 stations
Symbol
02
03
04
06
Port size
1/4
3/8
1/2
3/4
Body class
2
3
4
5
How to Order Valve
LVA 2 0 A
02
C
Option
Body class
Symbol Body class Orifice dia.
2
2
ø4
3
3
ø8
4
4
ø12
5
5
ø20
Nil
1
4
Valve type
0
1
2
N.C.
N.O.
Double acting
None
With flow rate adjustment
With indicator
Note) Options can not be combined
each other.
Material
Body type
A
Stacking type for manifold
C
Port size (port A)
Symbol
02
03
04
06
Port size
1/4
3/8
1/2
3/4
Applicable option
Actuator section
Diaphragm
End plate
1
4
PPS
PTFE
PFA
Symbol Body
Body class
2
3
4
5
Note
—
F
PFA
PVDF
PTFE
Hydrofluoric acid
compatible
(Only LVA40, 50 type)
N
PFA
PPS
PTFE
Ammonium hydroxide
compatible
Thread type
Symbol Thread type
Nil
Rc
N
NPT
477
Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com
Series LVA
How to Order Manifold Assembly (Example)
Manifold variations
Enter the part number of the valves to be mounted together
with the manifold base part number.
ons
tati
S
.
.
2.
1
Model LVA20A LVA30A LVA40A LVA50A
materia
PFA
l
Orif Port size
3/8
1/2
3/4
1/4
ice
Valv diame
t
e ty
e
r
Symbol
ø8
ø12
ø20
ø4
pe
Manifold
Type
Basic type
P
A (OUT) port
<Example>
LLA2A-03-02-C • • • • • 1 set
∗ LVA20A-02-C1
∗ LVA20A-02-C
•••••
•••••
P
P
P
Stations are counted
from station 1 on the left
side, with the A (OUT)
ports in front.
A
A
A
PB
PA
A
PB
PB
PA
N.C.
PA
PB
PA
N.O.
A
A
N.C.
N.O. Double Double
acting acting
1 set Manifold base part no.
With flow rate
adjustment
2 sets 2 sets Valve part no. (stations 1 & 2)
1 set 1 set Valve part no. (station 3)
P
P
PA
PA
A
Add the ∗ symbol at the beginning of part numbers for
valves, etc. to be mounted.
A
PB
PA
A
PB
PA
A
N.C. Double acting
Enter together in order counting from station 1
on the left side, with the A (OUT) ports in front.
N.C.
Double
acting
Dimensions
LLAA-
Stations
--C
4 x Mounting hole for W
Y
K
A
Dimensions
L1
L2
L3
Sensor (Breathing port) U
2xR
(mm)
Model
S
LLA2A
LLA3A
LLA4A
LLA5A
11.5
24
29
34.5
H
(mm)
C
Station
Model
V
E
N
P
G
Symbol
LLA2A
Pitch = B
(Max. S)
A (OUT) port n x Q
P (IN) port 2 x Q
LLA3A
LLA4A
LLA5A
Dimensions
L1
L2
L3
L1
L2
L3
L1
L2
L3
L1
L2
L3
2
3
4
5
62
93 124 155
75 106 137 168
118 149 180 211
74 111 148 185
90 127 164 201
118 155 192 229
94 141 188 235
112 159 206 253
144 191 238 285
118 177 236 295
140 199 258 317
178 237 296 355
(mm)
Model
A
B
C
E
G
LLA2A
LLA3A
LLA4A
LLA5A
50
31
68
20.5
47
37
88.5
60
47 103.5
75
59 135.5
H
K
M
N
P
41.5
13
18
4.5
34
35
25.5
52.5
17.5
39
5.5
42.5
51.5 Rc 3/8, NPT 3/8
29
62.5
18
50
48
62.5 Rc 1/2, NPT 1/2
32.5
74.5
27.5
61
61
68.5 Rc 3/4, NPT 3/4
6.5
Q
R
Rc 1/4, NPT 1/4 M5 x 0.8
Rc 1/8
NPT 1/8
U
M3 x 0.5
Rc 1/8
NPT 1/8
V
W
Y
19
M4
5.5
23.5
M5
6.5
26
M6
7.5
29
M6
7.5
478
Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com
Series LVA
3 Port
Standard Specifications
Model
LVA200
ø4
Orifice diameter
1/4
Port size
Flow
characteristics
Av x 10-6m2
7.2
Cv
0.3
Withstand pressure (MPa)
1
Operating pressure (MPa)
0 to 0.5
LVC
LVA
LVH
Valve leakage (cm3/min)
0 (with water pressure)
Pilot air pressure (MPa)
0.4 to 0.5
Pilot port size
M5 x 0.8
Fluid temperature (°C)
0 to 100
Ambient temperature (°C)
0 to 60
Mass (kg)
0.162
LVD
LVQ
LQ1
LVN
TL/TIL
How to Order Valve
LVA 2 0 0
02
LQ3
C
PA
Material
Body class
R
P
A
Symbol Body Actuator section Diaphragm
Symbol Body class Orifice dia.
2
Ø4
2
C
Thread type
PFA
PPS
PTFE
Symbol Thread type
Rc
Nil
NPT
N
N.C.
Valve type
0
Port size
N.C.
Symbol
02
Port size
1/4
Construction
q
e
w
Parts list
R
r
P
No.
Description
1
Actuator section
2
Body
3
Diaphragm
4
End plate
Material
PPS
PFA
PTFE
Stainless steel
479
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Series LVA
Dimensions
P
26
41
30
R
A
3 x Rc1/4
(3 x NPT1/4)
M5 x 0.8
Pilot port
M3 x 0.5
Breathing port
13
PB
22.5
41
46
72
PA
6.5
30
52.5
20
2 x M5 x 0.8
Depth 6
480
Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com
Manually Operated
Integral Fitting Type/Threaded Type
Series LVH
How to Order Valve (Single Type)
LVC
Applicable tubing size
Body class
Symbol Body class
2
2
3
3
4
4
Integral
fitting type
Threaded
type
LQ2 integral
fitting
Orifice dia.
ø4
ø8
ø10
LVH 2 0
LVH 2 0
Port B (OUT) different dia. size
S 06
02
Symbol
Nil
Application
Ports A & B same size
Refer to the
applicable
tubing table
to the right
Different diameter tubings can be selected
within the same body
class.
A
Body class
Symbol Body class Orifice dia.
2
ø4
2
3
ø8
3
4
ø12
4
Material
Symbol
Valve type
0
N.C.
A
Lever operation
B
Lever operation
Symbol
Non-locking type (self-reset type)
Nil
Locking type
L
C
Connecting Body class
Symbol tubing O.D.
2 3 4
Metric sizes
03
ø3
04
ø4
06
ø6
08
ø8
10
ø10
12
ø12
Inch sizes
03
1/8
05
3/16
07
1/4
11
3/8
13
1/2
Basic size
Note)
With reducer
LVA
LVH
LVD
LVQ
LQ1
LVN
TL/TIL
LQ3
Actuator section
Diaphragm
End plate
PP
Stainless steel
PTFE
(SUS)
—
PP
PTFE
PPS
PPS
PP
PTFE
PFA
PPS
Body
Note) Refer to “Variations” for port size and
material combinations.
Port size
Symbol Port size
01
1/8
02
1/4
02
1/4
03
3/8
03
3/8
04
1/2
Body class
Pilot port thread type
2
Symbol Thread type
Nil
Rc
N
NPT
3
4
Integral fitting type/Variations
Model
Orifice d
Tubin
iameter
g O.
Type
Symbol
D. Metric
Va
lve
typ
e
Inch
LVH20
LVH30
LVH40
ø4
ø8
ø10
3, 4, 6
6, 8, 10
10, 12
1/8, 3/16, 1/4
1/4, 3/8
3/8, 1/2
Basic
type
B
A B
A N.C.
Non-locking Locking
Threaded type/Series variation
Model
LVH20
LVH30
LVH40
iameter
ø4
ø8
ø12
Port
Valv
s
iz
e
e typ
1/8 1/4 1/4 1/4 1/4 3/8 3/8 3/8 3/8 1/2 1/2 1/2
e
Orifice d
Type
Symbol
Basic
type
B
A B
A N.C.
Stainless
Stainless
Stainless
steel PPS PFA
steel PPS PFA
steel PPS PFA
(SUS316)
(SUS316)
(SUS316)
Non-locking Locking
481
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Series LVH
Standard Specifications/Integral Fitting Type
Model
LVH20
LVH30
LVH40
6
10
12
1/4
3/8
1/2
ø4
ø8
ø10
8.4
40.8
60
0.35
1.7
2.5
Metric size
Tubing O.D.
Inch size
Orifice diameter
Av x 10-6m2
Flow
characteristics Cv
1
Withstand pressure (MPa)
0 to 0.5
Operating pressure (MPa)
Back pressure (MPa)
0.3 or less
Valve leakage (cm3/min)
0 (with water pressure)
Action
Toggle type (non-locking/locking)
Fluid temperature (°C)
0 to 60
Ambient temperature (°C)
0 to 60
Mass (kg)
0.06
0.14
0.26
Note) Contact SMC if the valve is to be used with B → A flow.
Specific Product Precautions
Be sure to read before handling.
Refer to front matters 42 and 43 for
Safety Instructions, and pages 491
and 492 for High Purity Chemical
Valve Precautions.
Piping
Different Diameter Tubing Applicable with Reducer
Different diameter tubing can be selected (within a body class) by using a nut and
insert bushing (reducer).
With reducer
Tubing O.D.
Body
class
Metric sizes
3
Caution
2
Integral fitting type
3
1. Connect tubing with special tools.
4
Refer to the pamphlet “High-Purity Fluoropolymer Fittings HYPER FITTING®/Series
LQ1, 2 Work Procedure Instructions” (ME05-1) for connecting tubing and special
tools. (Downloadable from our web site.)
4
6
Port size
Av x 10
Flow
characteristics Cv
Body class
Torque (N·m)
2
1.5 to 2.0
3
3.0 to 3.5
4
7.5 to 9.0
Threaded type
1. Avoid using metal fittings with a
resin body (taper threads).
12
1/8
3/16
1/4
3/8
1/2
Standard Specifications/Threaded Type
Orifice diameter
Tightening torque for piping
Inch sizes
10
Note) Refer to page 489 for information on changing tubing sizes.
Model
2. Tighten the nut to the end surface
of the body. As a guide, refer to
the proper tightening torques
shown below.
8
-6
m2
LVH20
LVH30
LVH40
1/8, 1/4
1/4, 3/8
3/8, 1/2
ø4
ø8
ø12
8.4
40.8
60
0.35
1.7
2.5
Withstand pressure (MPa)
1
Operating pressure (MPa)
0 to 0.5
Back pressure (MPa)
Valve leakage
0.3 or less
(cm3/min)
0 (with water pressure)
Action
Toggle type (non-locking/locking)
Fluid temperature (°C)
0 to 60
Ambient temperature (°C)
Stainless steel
(SUS)
Mass (kg)
PPS
0 to 60
PFA
0.15
0.36
0.71
0.04
0.09
0.17
0.05
0.11
0.20
This can cause damage to the valve
body.
482
Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com
Manually Operated
Integral Fitting Type/Threaded Type
Series LVH
Construction
Integral fitting type
Threaded type
u
u
q
q
e
w
e
w
B
LVC
A
B
A
r
Parts list
No.
1
rty
LVA
Description
Material
2
LVH
PP
Actuator section
PFA
With reducer
Note
Stainless
steel
Body
PPS
i
Integral fitting type
LVD
Threaded type
LVQ
PFA
t y
3
Diaphragm
PTFE
–
4
End plate
PPS
5
Insert bushing
PFA
PFA body only
–
6
Nut
PFA
–
7
Lever
PP
–
8
Collar
PFA
–
LQ1
LVN
TL/TIL
LQ3
Dimensions/Integral Fitting Type
4 x øM
A
D
L
G
N
K
Non-locking type
Locking type
(H2)
C
(H1)
°
60
A
J
E
B
B
(F)
Dimensions
(mm)
Model
A
B
C
D
E
LVH20
LVH30
LVH40
30
30
52
44
11
36
47
81.5
56
46
60
68
100
F
G
H1
H2
72.5
74
J
K
L
M
N
4
20
37
3.5
27
79
10
16.5
106
19
111
113
7.5
34
46
5.5
37.5
22.5
131
20.5
139
143
8
42
57
5.5
50
483
Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com
Series LVH
Dimensions/Threaded Type
N
Body material: PPS
N
L
Non-locking type
Locking type
G
A
D
G
A
Body material:
Stainless steel
60
K
(H1)
(H2)
°
4 x øM
Non-locking type
C
Locking type
60
°
A
2xP
(H1)
(H2)
E
B
C
B
A
SMC
J
L
E
B
2xF
B
2xP
K
Body material: PFA
A
D
L
G
N
K
4 x øM
Non-locking type
Locking type
60
C
(H1)
(H2)
°
A
B
J
E
SMC
B
2xP
Dimensions
Body material
(mm)
Model
A
B
C
D
E
LVH20
30
33
54.5
—
10
M5 x 0.8
10
36
47
81
—
13
M6 x 1
19
46
60
99
—
16
M8 x 1.25
20.5
138
30
36
55
44
11
—
10
36
47
80
56
15
—
19
46
60
99.5
68
22
—
20.5
30
36
58.5
44
14.5
—
10
36
47
84
56
19
—
19
46
60
99.5
68
22
—
20.5
Stainless steel
LVH30
(SUS)
PPS
PFA
LVH40
LVH20
LVH30
LVH40
LVH20
LVH30
LVH40
F
G
H1
H2
J
K
L
M
N
P
75
76.5
—
22
22
—
27
Rc 1/8, 1/4, NPT 1/8, 1/4
110.5 112.5
—
37
26
—
37
Rc 1/4, 3/8, NPT 1/4, 3/8
—
47.5
33.5
—
50
Rc 3/8, 1/2, NPT 3/8, 1/2
4
20
37
3.5
27
Rc 1/4, NPT 1/4
109.5 111.5
7.5
34
46
5.5
37
Rc 3/8, NPT 3/8
138.5 142.5
8
42
57
5.5
50
Rc 1/2, NPT 1/2
4
20
37
3.5
27
Rc 1/4, NPT 1/4
113.5 115.5
7.5
34
46
5.5
37
Rc 3/8, NPT 3/8
138.5 142.5
8
42
57
5.5
50
Rc 1/2, NPT 1/2
75.5
79
142
77
80.5
484
Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com
Series LVH /Integral
Fitting Type
Manifolds
Manifold Specifications
LLH2A
Model
LLH4A
LLH3A
Stacking type
Manifold type
Common IN/Individual OUT
P (IN), A (OUT) type
LVC
2 to 5 stations
Valve stations
Tubing size (port P)
3/8
1/2
3/4
Tubing size (port A)
1/4
3/8
1/2
LVA
LVH
Note 1) Contact SMC if the manifold will be used with vacuum and A → P flow.
LVD
LVQ
How to Order Manifold Base
LQ1
LLH 2 A
05
S 11
Body class
Tubing size for port P and L side connection
Symbol Body class
2
2
3
3
4
4
Base type
A
LVN
Stacking type
Manifold stations
02
2 stations
…
…
05
5 stations
LQ2 integral fitting
Symbol Tubing size
00
Plug
06
Ø6
07
1/4"
08
Ø8
10
Ø10
11
3/8"
10
Ø10
11
3/8"
12
Ø12
13
1/2"
12
Ø12
13
1/2"
19
Ø19, 3/4"
Body class
2 to 4
2
3
4
Tubing size for port P and R side connection
Symbol Tubing size
00
Plug
06
Ø6
07
1/4"
08
Ø8
10
Ø10
11
3/8"
10
Ø10
11
3/8"
12
Ø12
13
1/2"
12
Ø12
13
1/2"
19
Ø19, 3/4"
Body class
2 to 4
TL/TIL
LQ3
2
3
4
How to Order Valve
LVH 2 0 A
S 07
Body class
Symbol Body class Orifice dia.
2
2
Ø4
3
3
Ø8
4
4
Ø10
Tubing size
Valve type
0
N.C.
Body type
A
Stacking type for manifold
Lever operation
Lever operation
Symbol
Nil Non-locking type (self-reset type)
Locking type
L
LQ2 integral fitting
Symbol Tubing size
03
Ø3, 1/8"
04
Ø4
05
3/16"
06
Ø6
07
1/4"
06
Ø6
07
1/4"
08
Ø8
10
Ø10
11
3/8"
10
Ø10
11
3/8"
12
Ø12
13
1/2"
Body class
2
3
4
485
Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com
Series LVH
Threaded type manifold/Variations
How to Order Manifold Assembly (Example)
Enter the part number of the valves to be mounted together
with the manifold base part number.
ons
tati
.. S
.
2
1
Type
Symbol
Stations are counted
from station 1 on the left
side, with the A (OUT)
ports in front.
<Example>
LLH2A-03-SH
•••••
1 set
LVH20
LVH30
LVH40
PFA
ype
P
Manifold
A (OUT) port
Model
Manifold
materia
l
Tubin
g siz
Orif
e
ice
Val diame
ve
ter
t
1/4
3/8
1/2
Ø4
Ø8
Ø10
P
A
A
A
A
N.C.
Non-locking Locking
1 set Manifold base part no.
∗ LVH20A-S07 • • • • • 2 sets 2 sets Valve part no. (stations 1 & 2)
∗ LVH20AL-S07 • • • • • 1 set 1 set Valve part no. (station 3)
Add the ∗ symbol at the beginning of part numbers for
valves, etc. to be mounted.
Enter together in order counting from station 1
on the left side, with the A (OUT) ports in front.
Dimensions
Stations
-
4 x Mounting hole for W
Y
D
A
K
LLHA-
L1
L2
L3
N
Non-locking type
Locking type
(H2)
C
(H1)
60
°
G
U
SMC
1/4
1/4
V
SMC
E
SMC
SMC
3/8
2 x P port
1/4
Pitch = B
n x A port
Dimensions
Model
A
(mm)
B
C
65
LLH2A 46.5 31
36.5
94.5
LLH3A 47
47
115
LLH4A 60
D
E
G
67
19
76
27.5 19
95
33.5 20.5 154
10
H1
H2
K
N
U
V
W
Y
85.5
87
18
27
19
34
M4
5.5
39
37
27.5
47
M5
6.5
50
50
33.5
56
M6
7.5
125.5 127.5
158
(mm)
Station
Model
LLH2A
LLH3A
LLH4A
Symbol
L1
L2
L3
L1
L2
L3
L1
L2
L3
2
3
4
5
62
93
124
155
75
106
137
168
146
177
208
239
73
109.5
146
182.5
84
120.5
157
193.5
183
219.5
256
292.5
94
141
188
235
109
156
203
250
219
266
313
360
486
Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com
Series LVH /Threaded
Type
Manifolds
Manifold Specifications
LLH2A
Model
LLH4A
LLH3A
Stacking type
Manifold type
Common IN/Individual OUT
P (IN), A (OUT) type
LVC
2 to 5 stations
Valve stations
Port size (port P)
1/4
3/8
1/2
Port size (port A)
1/4
3/8
1/2
LVA
LVH
Note 1) Contact SMC if the manifold will be used with vacuum and flow A → P.
LVD
LVQ
How to Order Manifold Base
LLH 2 A
05
02
LQ1
LVN
C
Body class
TL/TIL
Material
Symbol Body class
2
2
3
3
4
4
Thread type
Symbol Thread type
Rc
Nil
NPT
N
Base type
A
LQ3
Manifold
PFA
Port size (port P)
Stacking type
Symbol Port size
1/4
02
3/8
03
1/2
04
Manifold stations
…
2 stations
…
02
Symbol
C
05
5 stations
Body class
2
3
4
How to Order Valve
LVH 2 0 A
Threaded type
02
C
Body class
Material
Symbol Body class Orifice dia.
2
2
ø4
3
3
ø8
4
4
ø12
Symbol Body
Valve type
0
C
N.C.
PFA
Actuator section
End plate
PP
PPS
Diaphragm
PTFE
Thread type
Symbol Thread type
Rc
Nil
NPT
N
Body type
A
Stacking type for manifold
Lever operation
Lever operation
Symbol
Non-locking type (self-reset type)
Nil
Locking type
L
Port size (port A)
Symbol
02
03
04
Port size
1/4
3/8
1/2
Body class
2
3
4
487
Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com
Series LVH
How to Order Manifold Assembly (Example)
Threaded type manifold/Variations
Enter the part number of the valves to be mounted together
with the manifold base part number.
ons
tati
.. S
.
2
1
Manifold
Type
Symbol
Manifold
A (OUT) port
<Example>
LLH2A-03-02-C
∗ LVH20A-02-C
∗ LVH20AL-02-C
P
Stations are counted
from station 1 on the left
side, with the A (OUT)
ports in front.
Model
LVH20
materia
l
Orif Port size
ice
Val diame
ve
ter
typ
e
LVH30
LVH40
PFA
1/4
3/8
1/2
ø4
ø8
ø12
P
A
A
A
A
N.C.
Non-locking Locking
•••••
1 set
1 set Manifold base part no.
•••••
2 sets
1 set
2 sets Valve part no. (stations 1 & 2)
1 set Valve part no. (station 3)
•••••
Add the ∗ symbol at the beginning of part numbers for
valves, etc. to be mounted.
Enter together in order counting from station 1
on the left side, with the A (OUT) ports in front.
Dimensions
Stations
Y
--C
4 x Mounting hole for W
N
A
K
LLHA-
G
Locking type
L1
L2
L3
Non-locking type
60
R
E
U
C
(H1)
(H2)
°
Pitch = B
A (OUT) port n x P
P (IN) port 2 x P
Dimensions
(mm)
Model
A
B
C
LLH2A
LLH3A
LLH4A
50
31
65
20.5 10
47
37
90
25.5 19
60
47
107
E
29
G
H1
H2
K
N
P
85.5
87
18
27
112.5 114.5 39
20.5 146
150
50
R
U
W
Y
Rc1/4, NPT1/4
19
34
M4
5.5
37
Rc3/8, NPT3/8
23.5 42.5
M5
6.5
50
Rc1/2, NPT1/2
24
M6
7.5
48
(mm)
Station
Model
LLH2A
LLH3A
LLH4A
Symbol
L1
L2
L3
L1
L2
L3
L1
L2
L3
2
3
4
5
62
93
124
155
75
106
137
168
118
149
180
211
74
111
148
185
90
127
164
201
118
155
192
229
94
141
188
235
112
159
206
253
144
191
238
285
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Series LV
Fittings and Special Tools
Fittings
Changing tubing sizes
LVC
The tubing size can be changed within the same body class (body size) by replacing the nut and insert bushing.
LVA
Part composition
Component parts
Tubing O.D.
Body
class
Metric sizes
3
4
6
8
Nut Insert Collar (insert assembly)
Inch sizes
10
12
19
25
1/8
3/16
1/4
3/8
1/2
3/4
Yes
Basic size
Reducer type Yes
1
2
3
4
5
6
Yes
No
Yes
Yes
LVD
Caution
LVQ
1. Connect tubing with special tools.
Refer to the pamphlet “High-Purity Fluoropolymer Fittings HYPER FITTING®/Series
LQ1, 2 Work Procedure Instructions” (M-E051) for connecting tubing and special tools.
(Downloadable from our web site.)
Changing the tubing size
Example) Changing the tubing from an O.D. 1/4" to O.D. 1/8" in body class 2.
LVH
Prepare an insert bushing and nut for 1/8" O.D. tubing (LQ-2U03) and change the
tubing size. (Refer to the section on how to order fitting parts.)
LQ1
LVN
TL/TIL
LQ3
Note) Tubing is sold separately.
Insert bushing
LQ-2B07
Insert bushing
LQ-2B03
Nut
LQ-2N07
Tubing O.D. 1/4"
LQ-2U07
(Basic size)
Collar
Tubing
2 U 03
Tubing
Tubing O.D. 1/8"
LQ-2U03
(Reducer type)
How to order fitting parts
LQ
Nut
LQ-2N03
∗ Type U is recommended when changing tubing sizes.
Tubing size
Type of fitting
Symbol Applicable fitting
LQ2
Nil
LQ1
1
Body class
Symbol Body class
2
2
3
3
4
4
5
5
6
6
Applicable fitting
LQ2
LQ1
Type of part
Symbol
Type of part
U
Insert bushing & nut
B
Insert bushing
N
Nut
Symbol Tubing O.D.
1/8", ø3
03
ø4
04
3/16"
05
ø6
06
1/4"
07
ø6
06
ø8
08
ø10
10
1/4"
07
3/8"
11
ø10
10
ø12
12
3/8"
11
1/2"
13
ø12
12
1/2"
13
3/4", ø19
19
3/4", ø19
19
1", ø25
25
Body class
Applicable fitting
2
3
LQ2
4
5
6
LQ1
489
Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com
Applicable Fluids
Material and fluid compatibility check list for air and manually operated high purity valves
Diaphragm material
Body material
Chemical
Stainless
steel
SUS316
Acetone
Polyphenylene
Fluoro resin
sulfide resin
PFA
PPS
Note 1)
Note 1)
Fluoro
resin
PTFE
Nitrile
rubber
NBR
Ethylene
propylene
rubber
EPR
Note 2)
Note 2)
Ammonium hydroxide
Isobutyl alcohol
Note 1)
Note 1)
Note 2)
Isopropyl alcohol
Note 1)
Note 1)
Note 2)
Ethyl acetate
Note 1)
Note 1)
Note 2)
Butyl acetate
Note 1)
Note 1)
Note 2)
Hydrochloric acid
Ozone (dry)
Hydrogen peroxide Concentration 5% or less, 50°C or less
Note 2)
Nitric acid (except fuming nitric acid) Concentration 10% or less
DI water
Sodium hydroxide Concentration 50% or less
Nitrogen gas
Super pure water
Toluene
Note 1)
Note 1)
Note 2)
Hydrofluoric acid
Note 2)
Sulfuric acid (except fuming sulfuric acid)
Note 2)
Phosphoric acid Concentration 80% or less
The material and fluid compatibility check list provides reference values as a guide only.
Note 1) Use a stainless steel body, as static electricity may be generated.
Note 2) Use caution as permeation may occur and any permeated fluid could effect other
material parts.
Table symbols
: Can be used
: Can be used in certain conditions
: Cannot be used
• Compatibility is indicated for fluid temperatures of 100°C or less.
• The material and fluid compatibility check list provides reference values as a guide only, therefore we do not guarantee the application to our product.
• The data above is based on the information presented by the material manufacturers.
• SMC is not responsible for its accuracy and any damage happened because of this data.
490
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Series LV
High Purity Chemical Valve
Precautions 1
Be sure to read before handling.
Refer to front matters 42 and 43 for Safety Instructions.
Design & Selection
Warning
Piping
Caution
1. Confirm the specifications.
Give careful consideration to operating conditions such as the
application, fluid and environment, and use within the operating ranges specified in this catalog.
2. Fluids
Operate after confirming the compatibility of the product's component materials with fluids, using the check list on features
page 490. Contact SMC regarding fluids other than those in
the check list.
Operate within the indicated fluid temperature range.
3. Maintenance space
Ensure the necessary space for maintenance and inspections.
4. Fluid pressure range
Keep the supplied fluid pressure within the operating pressure
range shown in the catalog.
5. Ambient environment
Operate within the ambient operating temperature range. After
confirming the compatibility of the product's component materials with the ambient environment, operate so that fluid does
not adhere to the product's exterior surfaces.
6. Liquid seals
When circulating fluid
Provide a relief valve in the system so that fluid does not get
into the liquid seal circuit.
7. Countermeasures for static electricity
Since static electricity may be generated depending on the fluid being used, implement suitable countermeasures.
Mounting
Warning
1. If air leakage increases or equipment does not operate properly, stop operation.
After mounting, perform suitable function and leak tests to confirm that the mounting is correct.
2. Instruction manual
Mount and operate the product after reading the manual carefully and understanding its contents. Also keep the manual
where it can be referred to as necessary.
LVC
1. Preparation before piping
Before piping is connected, it should be thoroughly blown out
with air (flushing) or washed to remove chips, cutting oil and
other debris from inside the pipe.
Install piping so that it does not apply pulling, pressing, bending or other forces on the valve body.
2. Use the tightening torques shown below when making connections to the pilot port.
LVA
LVH
LVD
LVQ
Operating port tightening torque
Operating port
Torque (N·m)
M5
1/6 turn with a tightening tool after first tightening by hand
Rc, NPT 1/8
0.8 to 1.0
LQ1
LVN
3. Use of metal fittings
Do not use metal fittings for piping on taper threads made of
resin, as this may cause damage to the threads.
TL/TIL
LVA PPS body ported tightening torque for fittings.
LQ3
Size
Breaking torque
(N·m)
Tightening torque
(N·m)
Guideline for
tightening torque
(Number of turns)
2 to 3
0.5 to 1
2 to 3 turns
6 to 8
2 to 3
3 to 4 turns
11 to 14
5 to 7
3 to 4 turns
18 to 20
8 to 10
3 to 4 turns
LVA20
LVA30
LVA40
LVA50
∗ Guideline for tightening torque
Number of turns when the fitting is screwed into the body
with 2 to 3 windings of sealant tape applied to threaded portion of the piping.
The value may differ for types other than sealant type.
4. Use pilot ports and sensor (breathing) ports as indicated below.
PA Port
PB Port
Sensor (breathing) port
N.C.
Pressure
Breathing
Breathing
N.O.
Breathing
Pressure
Breathing
Double acting
Pressure
Pressure
Breathing
In the case of N.C. and N.O. types, the port which does not receive operating pressure is released to atmosphere. When intake and exhaust directly from the valve is not desired due to
problems with the ambient environment or scattering of dust,
etc., install piping and perform intake and exhaust at a location
which does not present a problem.
5. Connect tubing with special tools.
Refer to the pamphlet “High-Purity Fluoropolymer Fittings HYPER FITTING®/Series LQ1, 2 Work Procedure Instructions”
(M-E05-1) for connecting tubing and special tools. (Downloadable from our web site.)
491
Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com
Series LV
High Purity Chemical Valve
Precautions 2
Be sure to read before handling.
Refer to front matters 42 and 43 for Safety Instructions.
Operating Air Supply
Warning
Precautions on Usage
Warning
1. Use clean air.
Do not use compressed air which includes chemicals, synthetic oils containing organic solvents, salt, or corrosive gases,
etc., as this may cause damage or malfunction.
Operating Environment
Warning
1. Do not use in a location having an explosive atmosphere.
2. Do not operate in locations where vibration or impact occurs.
3. Do not use in locations where radiated heat will be
received from nearby heat sources.
Maintenance
Warning
1. Maintenance should be performed in accordance
with the procedures in the instruction manual.
Incorrect handling can cause damage or malfunction of machinery and equipment, etc.
2. Before removing equipment or compressed air supply/exhaust devices, shut off the air and power supplies, and exhaust compressed air from the system.
Further, when restarting equipment after remounting or replacement, first confirm safety and then
check the equipment for normal operation.
3. Perform work after removing residual chemicals and
carefully replacing them with DI water or air, etc.
4. Do not disassemble the product. Products which
have been disassembled cannot be guaranteed.
If disassembly is necessary, contact SMC.
5. In order to obtain optimum performance from
valves, perform periodic inspections to confirm that
there are no leaks from valves or fittings, etc.
1. Operate within the ranges of the maximum
operating pressure and back pressure.
Caution
1. When the diaphragm is made of PTFE
Please note that when the product is shipped from the factory,
gases such as N2 and air may leak from the valve at a rate of
1cm3/min (when pressurized).
2. When operated at a very low flow rate, the series
LV with flow rate adjustment may vibrate, etc.
depending on the operating conditions. Therefore,
operate it after careful examination of the flow rate,
pressure and piping conditions.
3. In the series LV, water hammering may occur
depending on the fluid pressure conditions. In most
cases, improvement is possible by adjusting the
pilot pressure with a speed controller, etc., but the
flow rate, pressure and piping conditions should be
reviewed.
4. To adjust the flow rate for the series LV with flow
rate adjustment, open gradually starting from the
fully closed condition.
Opening is accomplished by turning the adjustment
knob counter clockwise. Additionally, do not apply
any unreasonable force to the adjustment knob
when nearing a fully opened or closed state. This
may result in deformation of the orifice sheet
surface or damage to the threaded part of the
adjustment knob. It is in the fully closed condition
when the product is shipped from the factory.
5. After a long period of nonuse, perform a test run
before beginning regular operation.
6. Since the LVC is packaged in a clean room use
sufficient care in handling when opened.
7. Take extra care when setting the operating direction
and when handling the lever of series LVH.
Caution
1. Removal of drainage
Flush drainage from filters regularly.
492
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