Supplementary Material Cycling Excitation Process: An Ultra Efficient and Quiet Signal Amplification Mechanism in Semiconductor Yu-Hsin Liu1, Lujiang Yan2, Alex Zhang2, David Hall2, Iftikhar Ahmad Niaz2, Yuchun Zhou2, L. J. Sham3, and Yu-Hwa Lo1,2* 1 Materials Science and Engineering Program, University of California, San Diego, 9500 Gilman Drive, La Jolla, California 92093-0418, USA 2 Department of Electrical and Computer Engineering, University of California, San Diego, 9500 Gilman Drive, La Jolla, California 92093-0409, USA 3 Department of Physics, University of California, San Diego 9500 Gilman Drive, La Jolla, California 92093, USA * [email protected] 1. Device Fabrication The OMCVD sample was grown by an epitaxial vendor. The 650nm deep device mesa was formed by inductively coupled plasma reactive-ion etching (ICP-RIE) with C4F8 and SF6 gases. The device mesa has a light sensitive area of 35 by 55 micrometers. After the mesa etch, a 300 nm thick layer of SiO2 was deposited and patterned lithographically to form n- and p-metal contacts. E-beam evaporated Ti/Au was used to form the n- and p-Ohmic contacts. The metal contact was annealed at 290°C for 40 seconds in a rapid thermal annealing chamber. 2. Dynamic Analysis of CEP Devices Here we model the characteristics of the CEP junction by a set of rate equations, and calculate the CEP gain under steady state. The model takes into account carrier excitation from impurity states in the compensated region and the roles of phonons, including the critical phonon absorption process required for the generation of new e-h pairs and the countering process of phonon emission. At first, all symbols are defined and listed below. ππ΄ : Concentration (ππβ3 ) of βunoccupiedβ acceptors in the n-region. ππ· : Concentration (ππβ3 ) of βoccupiedβ donors in the p-region. πβ : Concentration (ππβ3 ) of holes in the valence band of the n-region. ππ : Concentration (ππβ3 ) of electrons in conduction band of the p-region. ππ΄ : Total acceptor concentration (ππβ3 ) in the n-region. ππ· : Total donor concentration (ππβ3 ) in the p-region. ππ : Effective volume (ππ3 ) in the n-region that contributes to the CEP effect. ππ : Effective volume (ππ3 ) in the p-region that contributes to the CEP effect. πΊπ : Effective volume (ππ3 ) of Coulomb interaction between an energetic electron and an occupied acceptor. πΊπ : Effective volume (ππ3 ) of Coulomb interaction between an energetic hole and an unoccupied donor. π : Single path carrier transit time (π ππ) across the depletion region. πβ : Phonon absorption time (π ππ) for an unoccupied acceptor in the n-region to absorb a phonon to produce a hole in the valence band. ππ : Phonon absorption time (π ππ) for an occupied donor in the p-region to absorb a phonon to produce an electron in the conduction band. ππ : Phonon emission coefficient (ππ3 βπ ) between electrons and the unoccupied donors in the p-region. πβ : Phonon emission coefficient (ππ3 βπ ) between holes and the occupied acceptors in the nregion. Fig. S1: Illustration of the cycling excitation process. The processes from a,b and d,e take place in sequence: (a) Primary photo generated electron excites an electron from a compensating acceptor in the n-region to the conduction band, (b) followed by a phonon absorption process to produce a hole carrier. (d) The Auger-cum-phonon created hole may similarly add an electron-hole pair from a compensating donor in the p-region. (e) The electron carrier is created by another phonon absorption. (c)(f) Phonon emission as countering process to (b,d). Assume that the primary photocurrent, πΌπ is generated at π‘ = 0 and enters the partially compensated P/N junction from the p-region. In the depletion region of junction, we can write the following rate equations for ππ΄ , πβ ππ· , and ππ as illustrated in Figure S1, ππ ππ πππ΄ πΌπ ππ΄ =( + ) (ππ΄ β ππ΄ )πΊπ β ππ‘ πππ πππ πβ (1) ππβ ππ΄ πβ = β β πβ (ππ΄ β ππ΄ )πβ ππ‘ πβ π (2) πππ· πβ ππ ππ (ππ· β ππ· )πΊπ β = ππ‘ πππ ππ (3) πππ ππ· ππ = β β ππ (ππ· β ππ· )ππ ππ‘ ππ π (4) We can then find the steady-state solution for ππ΄ , ππ· , πβ , ππ from equations (1) to (4). Without any input signal (i.e. πΌπ = 0), we have the trivial solution of ππ΄ = ππ· = πβ = ππ = 0. However, when the input current is present, the solution is rather complicated. Without losing any key features or generality of the CEP mechanism, for a simpler model, we assume all material parameters for electrons and holes are the same and symmetric as: ππ΄ = ππ· = π; πβ = ππ = π; ππ = πβ = π; πΊπ = πΊπ = Ξ©; ππ = ππ = π. Hence, at steady state, we have the simplified rate equations, if input current is from p-side only, πΌπ ππ ππ΄ ( + ) (π β ππ΄ )πΊ β =0 ππ π π ππ΄ πβ β β π(π β ππ΄ )πβ = 0 π π πβ ππ· (π β ππ· )πΊ β =0 π π ππ· ππ β β π(π β ππ· )ππ = 0 π π (5) (6) (7) (8) The current across the junction and Gain are defined as, πΌπ πΌπ ππ πβ ππ πβ = + + β πΌπ = πΌπ + ππ ( + ) ππ ππ π π π π πΌ0 ππ ππ πβ πΏππππ π πππππ πΊπππ: πΊ = =1+ ( + ) πΌπ πΌπ π π ππΌ0 π ππ πβ π·ππππππππ‘πππ πΊπππ: π = = 1 + ππ ( + ) ππΌπ ππΌπ π π πβ ππ πππ π¦ = π‘βππ π€π βππ£π, π π ππ (π₯ + π¦) πΏππππ π πππππ πΊπππ: πΊ = 1 + πΌπ ππΌ0 π (π₯ + π¦) π·ππππππππ‘πππ πΊπππ: π = = 1 + ππ ππΌπ ππΌπ (9) (10) (11) π·ππππ‘π π₯ = Therefore, equations (5) to (8) become, (12) (13) πΌπ ππ΄ ( + π¦) (π β ππ΄ )πΊ = ππ π ππ΄ β π₯ β π(π β ππ΄ )ππ₯ = 0 π ππ· π₯(π β ππ· )πΊ = π ππ· β π¦ β π(π β ππ· )ππ¦ = 0 π (14) (15) (16) (17) From (15) and (17), we can find, (1 + πππ)ππ₯ 1 + ππππ₯ (1 + πππ)ππ¦ ππ· = 1 + ππππ¦ (18) ππ΄ = (19) Substitute (18) and (19) into (14) and (16). After some simplification, we have, πΌπ π 1 + πππ ( + π¦) (1 β π₯) = π₯ ππ π πΞ© π 1 + πππ π₯ (1 β π¦) = π¦ π πΞ© π·ππππ‘π ππππ π‘πππ‘π : π΄ = (20) (21) 1 + πππ π πΌπ ; π΅= ; πΆ= πΞ© π ππ With the new notation, equations (20) and (21) become, (πΆ + π¦)(1 β π΅π₯) = π΄π₯ π₯(1 β π΅π¦) = π΄π¦ (22) (23) Solve (22) (23) for x and y, π₯= 1βπ΄ π΄β1 2 π΄πΆ + β( ) + 2π΅ 2π΅ π΅(1 + π΄ + π΅πΆ) (24) π¦= 1 β π΄ β π΅πΆ π΄ + π΅πΆ β 1 2 πΆ + β( ) + (π΄ + 1)π΅ 2π΅ 2π΅ (25) From (12), we can find the large signal gain as, πΊ = 1+ ππ π₯+π¦ (π₯ + π¦) = 1 + πΌπ πΆ 1 1βπ΄ π΄ + π΅πΆ β 1 2 1 π΄β1 2 π΄ β β πΊ= + + ( ) + + ( ) + (π΄ + 1)π΅πΆ 2 π΅πΆ 2π΅πΆ 2π΅πΆ π΅πΆ(1 + π΄ + π΅πΆ) (26) From (13), we can get the differential gain, π= ππΌ0 π ππΊ (π₯ + π¦) = πΊ + π΅πΆ β = 1 + ππ ππΌπ ππΌπ π(π΅πΆ) Further denote π§ = π΅πΆ, we can write the gain in terms of z, 1 1βπ΄ 1 π΄2 + 1 1 π΄β1 2 1 π΄β1 2 1 π΄ 1 β β πΊ(π§) = + + + β +( ) 2+ ( ) 2+ β 2 π§ 4 2π΄ + 2 π§ 2 π§ 2 π§ 1+π΄+π§ π§ ππΊ π(π§) = πΊ + π§ β ππ§ π πππππ ππππ π‘πππ‘π : π΄ = (27) (28) 1 + πππ π πΌπ ; π΅= ; πΆ= πΞ© π ππ To get a more concise expression of the CEP gain, we will examine the input current injection level to get an estimate of z and then simplify G based on the z value range. π·ππππ‘π βΆ πΌπ = πππ ππ π πππππππππ ππ’πππππ‘. πβππ, π π§ = π΅πΆ = π πΌπ β πΌπ = πππ πΌπ From the dimension of our CEP device, the volume of one side of the depletion region is, π~35ππ × 55ππ × 10ππ = 35 × 10β4 × 55 × 10β4 × 10 × 10β7 = 1.925 × 10β11 (ππ3 ) We estimate π β 25ππ for effective phonon absorption time [1]. πππ 1.602 × 10β19 × 2 × 1019 × 1.925 × 10β11 πΌπ = = = 2.5 (π΄πππ ) π 25 × 10β12 (29) This reference current value is huge compare to the current injection level in our measurements, which is on the order of nano-ampere. Therefore, all the measurements were assumed to be done under low current injection condition. π. π. πΌπ βͺ πΌπ β π§ = πΌπ βͺ1 πΌπ Re-arrange equation (27) also considering π§ βͺ 1 πΊ(π§) = 1 1βπ΄ + 2 π§ π΄β1 1 1 2 2 2 π΄2 + 1 2 2 β +| β |{ β( ) βπ§ + β( ) βπ§+1 2 π§ 4 π΄β1 2π΄ + 2 π΄ β 1 2 2 π΄ + β1 + ( ) β βπ§} π΄β1 1+π΄ 1 2 2 2 π΄2 + 1 2 2 2 2 π΄ β β π·ππππ‘π, π(π§) = β( ) βπ§ + β( ) βπ§+1+ 1+( ) β βπ§ 4 π΄β1 2π΄ + 2 π΄ β 1 π΄β1 1+π΄ πΊ(π§) = 1 1βπ΄ π΄β1 1 + +| β | β π(π§) 2 π§ 2 π§ (30) Apply Taylor series expansion on π(π§) β π(π§) = β π(π) (0) π=0 π! π π§ = π(0) + π(1) (0) 1! βπ§+ π(2) (0) 2! β π§2 + β― (31) π(0) = 2 π (1) (0) = π΄+1 (π΄ β 1)2 π (2) (0) = β8π΄2 (π΄ + 1)2 (π΄ β 1)4 Under the low input current injection condition, i.e. π§ βͺ 1, we keep up to the second order terms, which gives, π(π§) β π(0) + π πππππ π΄ = π (1) ( 0) 1! 1 + πππ πΞ© βπ§+ π (2) ( 0) 2! β π§2 = 2 + π΄+1 4π΄2 β π§ β β π§2 (π΄ β 1)2 (π΄ + 1)2 (π΄ β 1)4 Based on the simple symmetric model we used, term A must be larger than 1. The detailed discussion on this is covered in the later part. Here π΄ > 1 means the value of Ξ© cannot exceed 1βπ + ππ. Physically, it demands that the effective Coulomb interactive volume cannot be greater than the space between the compensating dopant atoms plus the effective volume which compensates for the loss of carriers by phonon emission. As π΄ > 1, from (32) πΊ(π§) = 1 1βπ΄ π΄β1 1 π΄+1 4π΄2 + + β β [2 + β π§ β β π§2 ] (π΄ β 1)2 (π΄ + 1)2 (π΄ β 1)4 2 π§ 2 π§ Then πΏππππ π πππππ ππππ: πΊ(π§) = 1 + 1 2π΄2 β βπ§ π΄ β 1 (π΄ + 1)2 (π΄ β 1)3 (32) From (28) ππΊ 1 2π΄2 2π΄2 π(π§) = πΊ + π§ β = 1+ β β π§ + π§ β [β ] (π΄ + 1)2 (π΄ β 1)3 ππ§ π΄ β 1 (π΄ + 1)2 (π΄ β 1)3 π·ππππππππ‘πππ ππππ: π(π§) = 1 + π πππππ ππππ π‘πππ‘π : π΄ = 1 4π΄2 β βπ§ π΄ β 1 (π΄ + 1)2 (π΄ β 1)3 (33) 1 + πππ π πΌπ πππ πΌπ ; π΅= ; πΆ= ; πΌπ = πππ π§ = π΅πΆ = πΞ© π ππ π πΌπ The photo-current (differential) gain can be written as, 1 4π΄2 πΌπ π =1+ β β π΄ β 1 (π΄ + 1)2 (π΄ β 1)3 πΌπ π€βπππ π΄ = (34) 1 + πππ πππ πππ πΌπ = πΞ© π From (32), since measured gain is as large as several thousand, the A value must be close to 1. Therefore, in the high gain regime, the gain can also be expressed as, lim π = π΄β1 1 1 πΌπ β β 3 π΄ β 1 (π΄ β 1) πΌπ π·πππππ πΊ0 = 1 πΞ© 1 + πππ = ~ π΄ β 1 1 + πππ β πΞ© 1 + πππ β πΞ© Note that only Ξ© in πΊ0 is bias dependent. πΌπ π = πΊ0 (1 β πΊ02 β ) πΌπ π€βπππ πΌπ = (35) πππ β 2.5(π΄) π Equation (35) is the gain expression in the main text. ππ The maximum achievable gain can be found by settingππΊ = 0, which gives the maximum gain π under a given input current, πΊπππ₯ ~ 2β3 9 πΌ β βπΌπ (36) π Estimate of the numerical value of πΎπ΅π The term, πππ in Go can be treated as the time ratio between carrier transmission through the depletion region and carrier transition from the mobile bands to the localized compensating impurity states via phonon emission. From [2], the electron capture cross section, 2 20|π’π | 1 2 π= × 10β12 (ππ2 ) π€βπππ |π’π | β π 65 Using this result and approximate the thermal velocity of electrons by RMS value β©π£βͺ β ββ©π£ 2 βͺ = β 3ππ΅ π 3ππ΅ π =β β π 0.26ππ Therefore the electron capture / phonon emission coefficient @ room temperature is approximated by, π = πβ©π£βͺ = 20 × 10β12 3 × 1.38 × 10β23 × 300 ×β × 102 (ππ3 βπ ) β 2.4 × 10β8 (ππ3 βπ ) 65 × 300 0.26 × 9.11 × 10β31 For our device, π~2 × 1019 (ππβ3 ) and the carrier transit time, Ο, across the narrow (~20nm) depletion region is around 0.1ps. Thus πππ~2.4 × 10β8 × 2 × 1019 × 10β13 = 0.05 βͺ 1 The result indicates that phonon emission plays a relatively minor role for the CEP device. Therefore, in the discussion of the main text we have omitted this effect for simplicity. Discussions Equation (34) shows analytically, after some approximations, several key features of the CEP gain: (1) the dependence of the CEP gain on the input signal which is proportional to the light intensity; (2) the relation between the achievable gain and the bias-dependent Coulomb interaction between energetic carriers and the compensating ionized dopants represented through the effective interaction volume Ξ© (cm3); (3) dependence of the CEP gain on the concentration of compensating impurity and the phonon absorption time the latter of which we refer to as βphonon bottleneckβ. We describe each effect in more detail next. 1. Gain decrease with increasing input signal From equation (34), the model predicts the decrease in gain with increasing current injection πΌπ . This characteristic has been experimentally observed as shown in Fig. S2 (also in Fig. 2 in the main text). Within the range of primary photocurrent that has been measured, the gain decreases almost linearly with the primary photocurrent (i.e. input signal to the CEP junction), as predicted by equation (34). The different magnitude of gain under different bias in Fig. S2 is due to the voltage dependence of the βAβ coefficient to be explained next. Fig. S2 (Fig. 2b): Input power (represented by the primary photocurrent under 635nm light at zero bias) dependence of gain under different reverse bias. 2. Gain dependence on voltage bias At a bias voltage as low as 3V, our measurement shows a maximum gain of several thousand in Fig. S2. Correspondingly, the model shows when the only voltage dependent term βAβ in equation (34), approaches 1, the highest gain is reached. Under this condition, the effective interaction volume of the impurity, "β¦" approaches the maximum value of 1βπ + ππ , signifying the strongest achievable CEP effect. This means the effective CEP volume "β¦" for the compensating impurity rises quickly with the increasing bias and saturates at about ~3V. In such condition, every hot carrier βseesβ the whole volume of its path covered by the compensating impurity thus having the maximum chance to excite new generation carriers. Furthermore, the additional term ππ in πΊ besides 1βπ compensates for the loss of excited carriers due to recombination via phonon emission, which is a relatively minor effect since phonon emission time (2.5ps) is usually much slower than the carrier transit time across the CEP junction (~0.1 ps)1-2. 3. Gain increase with increasing temperature With a higher temperature, the effective phonon absorption time, T, is reduced due to the BoseEinstein distribution of phonons. The current πΌπ in equation (34) is equal to πΌπ = πππ π , so a longer phonon absorption time causes a greater gain decrease with input current. In other words, for the same input signal, the CEP device having a longer phonon absorption time shows a lower gain according to our model. This is consistent with the observed gain decrease at lower temperature as shown in Fig. S3. Fig. S3 (Fig. 2c): Temperature dependence of gain under 635nm illumination. The gain values are normalized to the 300K gain at 3V reverse bias. 4. Gain saturation with increasing voltage While increasing the voltage, the effective CEP volume quickly saturates to the value of 1 π + ππ that produces the highest gain. The maximum achievable gain under a given input current is πΊπππ₯ ~ 2β3 9 πΌ β βπΌπ as derived in equation (36). Note that the maximum achievable CEP gain π decreases with increasing input current and the phonon absorption time, and increases with the amount of compensating impurity. For a quick numerical estimation from equation (29), in our device we have πΌπ β 2.5(π΄πππ ) and have used input photocurrent of around πΌπ β 1(ππ΄), the above equation suggests a maximum gain of around 20,000, which is of the same order as our measured value in Fig. S2. Reference 1. T. R. Hart, R. L. Aggarwal and B. Lax, Phys. Rev. B. 1, 638 (1970). 2. H. Gummel and M. Lax. Annals of Physics. 2.1, 28-56 (1957).
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