Fab Utility Cost Values for Cost of Ownership (COO) Calculations
International SEMATECH
Technology Transfer #02034260A-TR
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© 2002 International SEMATECH, Inc.
Fab Utility Cost Values for Cost of Ownership (COO) Calculations
Technology Transfer #02034260A-TR
International SEMATECH
March 29, 2002
Abstract:
This report provides a representative set of utility costs for semiconductor device and tool
manufaccturers. The utility costs can be used for calculating tool cost of ownership (COO) and for
estimating total energy cost savings. They are categorized as variable (operating) costs, capital
costs, indirect variable costs, and indirect capital costs. This report is for general use by
manufacturing engineers and tool suppliers.
Keywords:
Cost of Ownership, Cost Modeling, Water, Waste Management, Resources Management, Factory
Cost Analysis
Authors:
Michael O'Halloran
Approvals:
Ram Mallela, Project Manager
Walter Worth, Program Manager
Coleen Miller, Director
Laurie Modrey, Technical Information Transfer Team Leader
iii
Table of Contents
1
2
3
4
5
6
EXECUTIVE SUMMARY .....................................................................................................1
INTRODUCTION...................................................................................................................1
2.1 Participation ...................................................................................................................1
2.2 Purpose...........................................................................................................................2
2.3 Scope..............................................................................................................................2
2.4 Use and Limitations .......................................................................................................2
STUDY METHODOLOGY....................................................................................................3
SUMMARY OF STUDY DELIVERABLES AND THEIR USE ...........................................3
4.1 Utility Cost Study Report...............................................................................................3
4.2 Utility Cost Spreadsheet ................................................................................................4
MODEL FAB AND UTILITY SYSTEM DESCRIPTIONS ..................................................4
5.1 Fab Description..............................................................................................................4
5.2 Electrical System ...........................................................................................................5
5.3 Factory Electrical Energy (Tools, Equipment and/or Lighting) ....................................5
5.4 Chilled Water System (CWS)........................................................................................5
5.5 Process Cooling Water (PCW) System..........................................................................6
5.6 Ultrapure Water (UPW) System ....................................................................................6
5.7 Hot Ultrapure Water (HUPW) System ..........................................................................6
5.8 Industrial City Water (ICW) ..........................................................................................6
5.9 Acid Exhaust with House Scrubber System (AEX ) .....................................................7
5.10 Solvent Exhaust with VOC Abatement System (VOC) ................................................7
5.11 Heat Exhaust (HEX) System .........................................................................................7
5.12 Make-up Air System ......................................................................................................8
5.13 Bulk Gas Systems (BGS)...............................................................................................8
5.14 Clean Dry Air (CDA) System........................................................................................8
5.15 Process Vacuum (PV) System .......................................................................................9
5.16 Cleanroom Recirculation Air System ............................................................................9
5.17 Heating Water System (HWS).......................................................................................9
5.18 Natural Gas ..................................................................................................................10
5.19 Bulk Chemicals............................................................................................................10
5.20 Solvent Waste Collection (SWC) System....................................................................10
5.21 Industrial Waste Neutralization (IWN) System...........................................................10
5.22 Fluoride Wastewater Treatment (FWT) System..........................................................11
UTILITY COST TABLES.....................................................................................................12
Appendix:
Fab drawings and simplified process flow diagrams for the various utility
systems.....................................................................................................................22
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List of Figures
Figure 1
Figure 2
Figure 3
Figure 4
Figure 5
Figure 6
Figure 7
Figure 8
Figure 9
Figure 10
Figure 11
Figure 12
Figure 13
Figure 14
Figure 15
Figure 16
Figure 17
Figure 18
Figure 19
Figure 20
Figure 21
Figure 22
Figure 23
Figure 24
Figure 25
Figure 26
Utility Cost Relationship............................................................................................1
Floorplan for Typical “Ballroom” Fab .....................................................................22
Elevation (Section) of a Typical Fab ........................................................................23
Schematic Diagram of the Electrical System ...........................................................24
Flow Diagram for Process Cooling Water System...................................................25
Flow Diagram for Chilled Water System .................................................................26
Flow Diagram for UPW Make-Up System (Sheet 1)...............................................27
Flow Diagram for UPW Make-Up System (Sheet 2)...............................................28
Flow Diagram for UPW Make-Up System (Sheet 3)...............................................29
Flow Diagram for UPW Make-Up System (Sheet 4)...............................................30
Flow Diagram for UPW Make-Up System (Sheet 5)...............................................31
Flow Diagram for UPW Make-Up System (Sheet 6)...............................................32
Flow Diagram for UPW Polish System (Sheet 1)....................................................33
Flow Diagram for UPW Polish System (Sheet 2)....................................................34
Flow Diagram for UPW Polish System (Sheet 3)....................................................35
Flow Diagram for UPW Polish System (Sheet 4)....................................................36
Flow Diagram for UPW Polish System (Sheet 5)....................................................37
Schematic of Acid Exhaust Scrubber .......................................................................38
Schematic of VOC Abatement .................................................................................39
Schematic of Make-Up Air Handler.........................................................................40
Flow Diagram for Alternative Source Bulk Gas System .........................................41
Flow Diagram for Process Vacuum System .............................................................42
Flow Diagram for Hot Water System.......................................................................43
Typical Aqueous Chemical Distribution System......................................................44
Typical Solvent Chemical Distribution System .......................................................45
Flow Diagram for Wastewater Neutralization System .............................................46
List of Tables
Table 1
Table 2
Table 3
Table 4
Industry Average Utility Purchase Costs..................................................................12
Total Utility Costs Per Unit Use...............................................................................13
Annual Savings Per Unit of Use in Exhaust or Water Reductions...........................14
Utility Cost Spreadsheet...........................................................................................15
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Acknowledgments
The contribution by Phil Naughton of Motorola to this study and especially during the review of
the utility cost spreadsheet is gratefully acknowledged.
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1
EXECUTIVE SUMMARY
The purpose of this study was to provide a representative set of utility costs for semiconductor
manufacturing. The utility costs are intended for general use by semiconductor device and tool
manufacturers as part of cost of ownership (COO) calculations. System specialists should be
consulted about detailed questions.
The utility costs developed during this study (see Table 3) are categorized as variable (operating)
costs, capital costs, indirect variable costs, and indirect capital costs. Cost organization is shown
in Figure 1.
Cost Per Unit
Depreciated
Capital Cost / Unit
Direct System
Capital Cost / Unit
Operating
Cost / Unit
Indirect Capital
Cost / Unit
Figure 1
Direct Operating
Cost / Unit
Indirect Operating
Cost / Unit
Utility Cost Relationship
The costs developed will assist suppliers in optimizing the design of tools with respect to capital
cost and utility consumption by providing the data necessary for evaluating the cost effectiveness
of designs.
Of particular significance are the costs associated with factory electrical energy and exhaust
usage. For factory electrical energy, the study identified frequently overlooked costs related to
removing spent electrical energy in the form of heat. These costs increased the purchase price of
electricity by 30%. Similarly, the analysis of exhaust identified the cost of make-up air to replace
the exhaust as the primary cost component. Further, the cost of make-up air comes primarily
from the capital costs and operating costs of the chiller plant used to condition the make-up air.
2
INTRODUCTION
2.1
Participation
International SEMATECH (ISMT) Environment, Safety, and Health (ESH) staff and the Energy
Project Working Group developed this study with Industrial Design and Construction-CH2M
Hill (IDC.CH2M), the consultant on the project. Work was conducted over a 3-month period in
the fall of 2001.
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2.2
Purpose
Management frequently needs information about utility costs to make decisions about
semiconductor manufacturing facilities. This is particularly true of decisions related to energy
and environmental projects. To assist with decision-making, ISMT funded the development of a
representative set of utility costs. These costs are intended for first order decision-making related
to utility costs associated with the major systems in a semiconductor manufacturing facility (fab).
In addition, it is expected that these costs will be used for COO calculations associated with
manufacturing tool design and selection. The availability of a common set of metrics should
provide for better and more consistent decision-making and more cost effective tool design.
2.3
Scope
The scope of this study included developing a representative set of utility costs for a high volume
manufacturing (HVM) fab. Costs are developed on the basis of a cost per unit of use. The study
included an examination of the major utility systems found in a modern fab. Costs do not include
the cost of the building shell space, which were excluded because spaces and structural elements
are frequently shared. This results in significant problems associated with cost allocation. This
exclusion is not considered significant.
Costs developed include the following:
•
Variable (Operating) Costs: Those costs associated with the purchase of a utility or the
operation and maintenance of the system.
•
Depreciation Costs: The capital cost related to a particular utility system amortizes over
10 years.
•
Indirect Variable Costs: Variable costs of other fab systems used to support the utility of
concern. Costs of purchasing utilities from outside sources are associated with only one
system.
•
Indirect Depreciation Costs: Depreciation costs of other systems that support the utility
system of concern.
The costs identified in this report are based on a fixed set of conditions (see Section 5 for a
description).
2.4
Use and Limitations
The costs are intended to be representative of an HVM fab. For certain systems, economies of
scale are associated with the relatively large size of the systems used in HVM fabs. The costs are
expected to be representative of relatively wide ranges of capacity. Costs should not be used for
research or development scale utility consumption.
Utility purchase prices were established by ISMT and member companies. They may vary
significantly based on geographical location or specific contract negotiations.
Austin, Texas, was used as the base climate because it has a moderate climate and is
representative of many places where semiconductor fabs are located. In most cases, cost should
not need adjustment because of climate. However, some extreme situations may require
adjustment.
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Capital costs include purchase and installation costs for equipment pad, distribution loop, and
purchase controls. Costs of a facility management system (FMS) and hookup of individual tools
served by the system utility are not included.
The capital cost assigned to the utility unit cost is an annual 10-year straight-line depreciation
divided by the annual capacity of the system. This is an assumed capital allocation rate, not a tax
calculation.
The components of each utility system are intended to represent current “state of practice” in
manufacturing. They are not intended to reflect leading-edge technology that is not in common
use.
The manufacturing technology does not significantly impact the unit cost of utilities. This study
facility is based on a 0.18 µm logic technology.
The costs developed in this study are intended as a first-order approximation across a broad
spectrum of facilities. Individual fab costs should be developed for critical decisions.
3
STUDY METHODOLOGY
A relatively large (10,000 m2) 200 mm HVM manufacturing facility was used as the base case.
The target technology was 0.18 µm logic. The utility systems are described, sized, and costed.
The capital costs of each system reflect the economy of scale associated with the system
capacity. Capital costs also include the costs of system distribution requirements.
Capital costs are based on actual information from several fabs. When available, normalized
actual data were used rather than concept data.
Initial concepts were reviewed by ISMT and member company representatives. Input from the
review process was then used to adjust the results.
The study team focused on major cost drivers. However, some minor (but controversial) costs
were left in the study for completeness. Most others were ignored.
4
SUMMARY OF STUDY DELIVERABLES AND THEIR USE
The study resulted in three deliverables:
•
This utility cost study report
•
A utility cost spreadsheet
•
A utility infrastructure design cost model (Excel model)
4.1
Utility Cost Study Report
This report describes the HVM fab that was used as the basis for utility sizing and costs. A
typical plan and section drawing of the building are included (see the appendix).
Each working system, system features, characteristics, and technology are also described. A
block diagram of the system is included for complex systems (see the appendix).
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4.2
Utility Cost Spreadsheet
This report provides the following tables:
•
Table 1 provides average purchase prices for utilities and bulk chemicals commonly
purchased by a semiconductor fab.
•
Table 2 summarizes the major fab utility systems and the “total cost” of the utility per unit
of use. The total cost includes capital and variable costs as shown in Figure 1.
•
Table 3 presents some examples of the annual savings that can be achieved by reducing one
unit of exhaust, UPW usage, and wastewater treatment. This table allows an engineer to
quickly estimate the annual savings of reducing the exhaust flow at a wet bench, for
example.
•
Table 4 is a printout of the utility cost spreadsheet. For each system, it lists the base case
capacity, capital cost, depreciation period, variable cost, depreciation cost, indirect variable
cost, indirect depreciation cost, and total costs. The utility cost spreadsheet is an electronic
version of the utility costs shown in Table 2. It is intended to provide a means of update and
distribution. Current versions of the spreadsheet will be available on the ISMT public
website. Users are advised to check the website for the latest information.
5
MODEL FAB AND UTILITY SYSTEM DESCRIPTIONS
Following are descriptions of systems used as a basis for identifying costs. In many cases,
alternative technologies or technology variations may be used at a particular fab. However, the
study required the development of a specific situation for cost purposes. It is assumed, to a first
order approximation, that alternative designs would result in similar costs.
System sizes are based on “rate of use.” Cost is based on “quantity use” of one unit.
5.1
Fab Description
To establish a utility cost basis relative to system size and utility quality, a fab design basis was
established as follows:
•
Technology
–
0.18 µm
–
200 mm
–
Logic (ISMT process)
•
Fab Area 10,000 m2 (110,000 ft2)
•
Location – Austin, TX
•
Capacity – approximately 30,000 wafers/month
•
Cleanroom Concept
–
Ballroom w/minienvironment
–
Class 1000/100 turbulent
–
25% ultra-low particulate air (ULPA) coverage @ 90 fpm high efficiency particulate
air (HEPA) velocity; filter fan unit (FFU) cleanroom recirculation system
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Utility system technology and performance requirements conform to International Technology
Roadmap for Semiconductor (ITRS) requirements. The above design basis was used to develop
utility unit costs that are generally appropriate over a wide range of fab designs and for
technology from 0.25 to 0.13 µm, 200 mm or 300 mm, logic, memory, and ASIC manufacturing.
For fab plan and section drawings, see the appendix.
5.2
Electrical System
The electrical system consists of four major subsystems: a high voltage substation at
transmission voltages, a normal electrical power distribution system, an emergency/standby
electrical power system, and an uninterruptible power supply (UPS) system.
High Voltage Substation: Assume that the high voltage substation is not owned by the fab. The
cost is not included.
Normal Electrical Power Distribution System: Includes overcurrent protection equipment,
isolation equipment, transformers, switchgear, and distribution system up including the final
panel serving a tool.
Emergency/Standby Electrical Power System: Assume multiple individual emergency
generators (piston engine diesel fired.) Costs include the generators associated electrical system
and fuel system. Because the system is normally off, no variable costs are associated with the
system except maintenance. The cost of emergency power adds to the cost of normal power.
UPS System: Assume this to be a 15-minute battery back-up system. The UPS system is backed
up by the emergency power system. It is assumed to be normally off with no variable cost except
maintenance. The cost of UPS adds to the cost of emergency power.
See the appendix for a drawing of the system.
5.3
Factory Electrical Energy (Tools, Equipment and/or Lighting)
A special utility was created for electrical energy used within the fab manufacturing space. The
utility does not consider the capital cost of using the tool, equipment, or lighting system. The
utility assumes electrical energy is used and dissipated to the factory as heat, which is removed
by the chilled water system. The utility thus represents the “real” cost of electrical energy used
inside the factory.
This cost should be used when heat removal is required but not otherwise accounted for.
No drawing is provided.
5.4
Chilled Water System (CWS)
The chilled water system is a closed-loop system. It has no variable cost except maintenance.
(Some insignificant variable costs are associated with the cooling tower water usage and
chemicals; they are not included.) The primary indirect cost is electrical energy.
The system consists of water-cooled, centrifugal chillers manifolded together in a primary
chilled water loop. Cooling towers and the condenser water piping system are part of the system.
The chilled water distribution system cost is included as part of this system.
Chilled water is supplied to HVAC systems and other facility systems such as process cooling
water (PCW). Chilled water is not supplied to tools.
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See the appendix for a drawing of the system.
5.5
Process Cooling Water (PCW) System
The PCW system supplies cooling water to manufacturing tools. It is a closed-loop system with
recirculation pumps, a surge tank, and other equipment. Water quality is maintained with ion
exchange canisters to produce the final PCW water at 200 to 500 kΩ-cm. Heat absorbed into the
system is rejected to the CWS by a heat exchanger. No significant variable costs are associated
with the system except maintenance. Significant indirect costs are electrical power (for pumps)
and the CWS.
The design is for a 10˚F delta T. In practice, the increase in actual temperature is normally much
lower. For cost calculations, a 3˚F delta T was used.
See the appendix for a drawing of the system.
5.6
Ultrapure Water (UPW) System
The UPW system is a continuously recirculated water system from which water is drawn. UPW
water quality is assumed to align with the ITRS requirements for 0.18 µm technology. The study
system is sized and costs are estimated based on water use. It is important to recognize that
occasionally UPW systems are referred to by the quantity of water recirculated or by the quantity
of make-up water. Recirculation water quantity is determined by the need to keep pipe velocities
high enough to minimize biological growth. Make-up water is the sum of water used plus water
rejected by the purification system. Quantities of rejection water are primarily determined by the
quality of raw water. For this study, rejection was assumed to be 25% of the water used.
The UPW system uses raw water as a direct utility. The raw water cost is assumed to include any
local sewage fee. The other primary variable cost is operation and maintenance. The UPS
distribution system is polyvinylidene fluoride (PVDF) piping.
See the appendix for a drawing of the system.
5.7
Hot Ultrapure Water (HUPW) System
The HUPW system is assumed to be an electrically heated non-recirculated water system that is
fed from the UPW system. Heating units are assumed to be distributed throughout the subfab
near tools that use HUPW. Such a system tends to have lower installation costs but higher
variable costs than alternative designs. Alternative designs include 1) central distribution and
recirculation with steam or hot water heating and 2) steam-heated non-recirculated systems.
Piping material is PVDF.
See the appendix for a drawing of the system.
5.8
Industrial City Water (ICW)
The ICW system is a simple steel pipe water distribution system with no recirculation. It uses
raw water as a primary utility. The raw water is filtered but otherwise not improved. The only
significant cost associated with this system is the raw water cost, which is assumed to include
any local sewage fee.
No drawing is provided for this system.
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5.9
Acid Exhaust with House Scrubber System (AEX )
The AEX system consists of a fab-wide distributed fiberglass collection system, exhaust fans,
scrubbers, and a scrubber working solution recirculation system. The scrubber solution is water
with NaOH for pH control. The solution pH is continuously monitored and controlled. Utilities
used include raw water and NaOH; however, their cost is a very minor contribution to the cost of
exhaust.
For exhaust cost analysis, it is most important to consider the electrical cost associated with the
fans and the cost of fab factory air being exhausted. The fab factory air is temperature- and
humidity-controlled air that has been supplied by the make-up air system. The indirect cost of the
AEX system includes the cost of the make-up system and related costs associated with the CWS
and electrical system.
Some fabs have an ammonia exhaust system. Ammonia exhaust is normally on the order of 10%
to 15% of the AEX. If a separate ammonia system is used, the cost per unit of exhaust is
approximately the same as the AEX system costs.
See the appendix for a drawing of the system.
5.10
Solvent Exhaust with VOC Abatement System (VOC)
A regenerative thermal oxidizer (RTO) system is used to destroy VOC vapors collected in a
galvanized steel solvent exhaust collection system. An RTO is basically an incinerator with
separate chambers containing beds of ceramic media that recover heat energy from the hot
exiting gases. The beds are automatically sequenced from outlet to inlet mode to transfer the heat
generated from the exiting hot gases to the incoming cool vapors. Overall, thermal efficiency of
85% to 95% can be expected.
During startup, natural gas is burned until the desired operating temperature is reached and the
outlet beds are heated. VOC vapors are then introduced into the heated beds. When VOC
concentration is sufficient, the combustion can be self-sustaining, requiring no supplemental fuel
gas (except for the burner pilots).
For exhaust cost analysis, it is important to consider the electrical cost associated with the fans
and the cost of fab factory air that is being exhausted. The fab factory air is temperature- and
humidity-controlled air that has been supplied by the make up air system.
See the appendix for a drawing of the system.
5.11
Heat Exhaust (HEX) System
The HEX system consists of a distributed galvanized steel collection system connected to an
exhaust fan. No treatment is provided.
For exhaust cost analysis, it is important to consider the electrical cost associated with the fans
and the cost of fab factory air that is being exhausted. The fab factory air is temperature- and
humidity-controlled air that has been supplied by the make-up air system.
See the appendix for a drawing of the system.
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5.12
Make-up Air System
The make-up air system consists of a make-up air handler and its associated air distribution
system. The make-up system brings in outside air and conditions it to the humidity requirements
of the fab.
Except when it is very cold outside, this system typically needs to cool the outside air to a
temperature equal to the dew point temperature of the fab operating conditions (typically about
40% relative humidity [RH] and 70°F). After cooling, the air may be reheated with hot water to
bring the temperature up enough to control the operating temperature condition within the fab
(reheat to 65°F).
When it is very cold outside, the make-up air system uses heating water to warm outside air.
See the appendix for a drawing of the system.
5.13
Bulk Gas Systems (BGS)
Bulk gas systems consist of a gas source, purification, and distribution. The gas source may be
onsite liquid storage or a gas plant (on or offsite.) The typical approach in semiconductor fabs is
to have the gas supplier “own” the source and purification system. Gas unit cost includes the cost
of the source.
The manufacturer owns the distribution system. The distribution system cost includes
distribution throughout the fab as necessary. Within the fab, the distribution system includes
costs up to a block valve on the gas header. Tool connection is not included.
Bulk gas costs are as follows:
•
Ultrapure nitrogen (UPN2)
•
Utility nitrogen (UN2)
•
Oxygen (O2)
•
Hydrogen (H2)
•
Helium (He)
•
Argon (Ar)
See the appendix for a drawing of the system.
5.14
Clean Dry Air (CDA) System
The CDA system is frequently referred to as oil-free air (OFA), plant air, instrument air (IA), or
simply compressed air.
CDA is distributed throughout the facility. It is clean of particulate contaminants, oil, and
moisture (-100°F dew point). Normal pressure is typically 70 to 80 psig at point of use. The
assumed system consists of two-stage, oil-free, rotary screw air compressors. Multiple
compressors are required, typically with back-up. Compressors are skid-mounted with associated
equipment including intercoolers, liquid separators, silencers, and controls. The total system
includes compressors, receiver vessels, coalescing filters, air dryer, and filters (0.01 µm final
cartridge).
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Primary utilities include electrical power and chilled water for compression heat removal after
both the first stage (intercooler) and second stage (aftercooler) of compression.
See the appendix for a drawing of the system.
5.15
Process Vacuum (PV) System
Process vacuum (typically at 28 inches Hg vacuum) is distributed throughout the facility. The
system consists of skid-mounted, two-stage liquid ring vacuum pumps (with associated seal
water heat exchanger, separator, silencer, and controls); receiver vessel; and distribution system.
Process vacuum is distributed in stainless steel tubing larger than 6-inch in diameter and
schedule 80 PVC piping less than 6 inches.
See the appendix for a drawing of the system.
5.16
Cleanroom Recirculation Air System
The cleanroom air system provides a relatively clean operating environment for manufacturing
and tool maintenance. For this study, the fab was assumed to be a Class 1000 cleanroom. ULPA
filter units 99.9999% efficient for 0.12 µm particles supply clean air. The filter assemblies
contain a fan mounted integrally with the filter assembly to form an FFU. FFUs are supported in
a ceiling grid system approximately 12 feet above the factory floor. Filter coverage is 25% with
air velocity of 90 ft/min. Blank panels block grid openings not covered by filters.
The recirculated air provides two functions within the fab:
1. Protection from particle contamination
2. Heat removal
For this study, the function of cleanroom air as a heat removal fluid was not considered because
the heat removal function of the air is more or less independent of airflow volume. That is,
increasing or decreasing volume does not impact the quantity of heat removed; it does impact the
temperature rise of the air. Temperature rise is an important consideration if airflow volume is
changed but not a significant cost variable.
The capital cost elements of the recirculation air system are FFUs, associated electrical systems,
controls, grid, and blanks. Utilities used by the system include electrical power and chilled water
cooling required to remove energy dissipated by the fan motors.
No drawing is provided.
5.17
Heating Water System (HWS)
Heating hot water—typically 180°F supply and 150°F return—is frequently used for facility
heating (primarily make-up air). Alternatively, some facilities use steam as a heating fluid. It is
also possible to use natural gas-fired heating units. The options are generally competitive. The
final decision is usually based on local cost structure and facility management preferences.
The HWS system used to calculate the capital cost was assumed to consist of the following:
•
Pressure reducing and backflow prevention station
•
Expansion tank
•
Air separator
•
Heating water boiler
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•
•
•
•
Primary heating water pump
Supply and return piping system
Associated controls
Natural gas boilers fired with redundant capacity; fuel oil as a back-up energy source
See the appendix for a drawing of the system.
5.18
Natural Gas
Natural gas is supplied to the HWS system and distributed to other locations within the facility
such as abatement systems (burn boxes). The only cost that is considered significant for this
utility is the purchase price of natural gas. The depreciated cost of the internal distribution
system was thought to be negligible.
No drawing is provided.
5.19
Bulk Chemicals
A bulk chemical distribution (BCD) system is frequently provided for chemicals that are used in
large quantities. The systems consist of a bulk tank (or tote) connected to a chemical dispense
unit (CDU) and a distribution system. The chemical supply company normally owns the tank or
tote; it is now becoming very common for the chemical supply company to own the CDU. The
distribution system is typically a central header to laterals and distribution boxes connected to the
laterals. Distribution is provided to only those factory locations that use a particular chemical.
Distribution systems are typically double-contained. Materials of construction are appropriate to
the chemical. For non-solvents, perfluoroalkoxy (PFA) tubing is common for headers and
laterals with clear PVC pipe for double containment. Solvents are distributed in single-contained,
316L, electropolished stainless steel.
The CDUs and distribution systems are relatively economical to design and construct. Because
of this, the cost of the raw chemical is far greater than the capital cost of the system. The systems
use negligible quantities of electricity and nitrogen. As a result, for these systems, the raw
chemical cost is considered to be the only variable cost of the system.
See the appendix for a drawing of the system.
5.20
Solvent Waste Collection (SWC) System
The SWC system collects concentrated solvent waste from throughout the facility for recycling
or offsite treatment and disposal. The SWC system is composed of piped collection systems,
solvent collection tanks, and a secondary containment system with sump. The system has
essentially no operational cost other than maintenance.
No drawing is provided.
5.21
Industrial Waste Neutralization (IWN) System
The IWN system collects wastewater, including acidic and alkaline waste, from throughout the
facility and chemically neutralizes it to a pH range of 6–9 for eventual discharge to the sanitary
sewer. For the base case, a continuous three-stage process is assumed. Wastewater is collected in
separate PVC piping systems (separate systems for ultrapure water plant regeneration
wastewater, treated fluoride wastewater, and industrial wastewater) from which is flows by
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gravity to the first stage neutralization tank. Depending on the wastewater’s pH, acid or caustic is
added. Because the mixed wastewater stream from a semiconductor fab is typically acidic, the
IWN system normally uses caustic addition as a utility. The other utility used is electrical energy
for pumping and mixing.
See the appendix for a drawing of the system.
5.22
Fluoride Wastewater Treatment (FWT) System
The FWT system collects fluoride wastewater from throughout the facility. Fluoride is then
chemically removed from the wastewater stream before joining with other industrial wastewater
streams.
Fluoride removal is accomplished by precipitating fluoride with calcium in the form of CaCl2.
The precipitate formed is calcium fluoride (CaF2). Excess calcium (greater than
stoichiometrically required) is added to the wastewater stream to push the fluoride reaction to
completion. Since optimal fluoride removal takes place at pHs of 8 to 8.5, NaOH is added to
achieve the desired pH.
Fluoride waste is collected in a polypropylene, gravity flow collection system that feeds a batch
treatment system. The capacity of the treatment system is expressed as the tankage capacity. The
collection system first feeds storage tanks. The storage tanks are pumped into a reaction tank at a
constant rate using a feed pump. NaOH is mixed with the stream before the reaction tank for pH
adjustment. After the pH is adjusted, CaCl2 is added and continuously stirred. The typical
reaction time needed is 1 hour.
After reaction, polymer is added; in a series of steps, the flocculant is settled, thickened, and
pressed to remove the water. The final solid waste (cake) is disposed off site.
Capital cost of the system is relatively high for the volume of fluid treated. Operating variable
costs include chemicals, electricity, disposal cost, and maintenance.
See the appendix for a drawing of the system.
International SEMATECH
Technology Transfer #02034260A-TR
12
6
UTILITY COST TABLES
Table 1
Industry Average Utility Purchase Costs
Elec. Cost
$0.05
kwh
Water Cost
$0.005
gal
Natural Gas Cost
$0.30
100SCF
HPN2
$0.75
100SCF
UN2
$0.55
100SCF
O2
$0.75
100SCF
H2
$1.47
100SCF
Ar
$3.25
100 SCF
He
$9.00
100 SCF
Sulfuric Acid
$9.55
gal
$29.89
gal
HCl
$9.30
gal
HF
$33.00
gal
NH4OH
$7.80
gal
Peroxide
$14.70
gal
IPA
$29.89
gal
Nitric Acid
Technology Transfer #02034260A-TR
International SEMATECH
13
Table 2
Total Utility Costs Per Unit Use
Design
Capacity
Capacity
Units
ELECTRICAL POWER NORMAL
29,900
kw
$0.060
kwh
EMERGENCY GENERATOR ADDER
7,500
kw
$0.004
kwh
UPS ADDER (add to generator)
1,800
kw
$0.008
kwh
1
kw
$0.0676
Kw-hr
CHILLED WATER SYSTEM
10,330
Ton
$0.062
Ton-hr
PCW SYSTEM
5,860
gpm
$0.0003
gal
UPW SYSTEM (consumption based)
587
gpm
$0.0187
gal
HOT UPW SYSTEM (consumption)
200
gpm
$0.0403
gal
1,400
gpm
$0.0051
gal
SCRUBBER SYSTEM
280,000
cfm
$0.0316
100ft3
VOC/solvent EXHAUST
20,000
cfm
$0.0316
100ft3
MISC BUILDING EXHAUST
60,000
cfm
$0.0314
100ft3
MUA w/Duct FAB & PRIMARY
380,000
cfm
$0.0312
100ft3
HIGH PURITY NITROGEN
1,300
cfm
$0.7640
100ft3
UTILITY NITROGEN
2,100
cfm
$0.5614
100ft3
OXYGEN
40
cfm
$1.0322
100ft3
HYDROGEN
20
cfm
$1.7601
100ft3
PROCESS HELIUM
10
cfm
$10.1183
100ft3
ARGON
40
cfm
$3.5422
100ft3
4,000
cfm
$0.0300
100ft3
750
cfm
$0.1362
100ft3
CLEANROOM RECIRCULATION AIR
2,750,000
cfm
$0.00011
100ft3
HEATING SYSTEM Steam or Hot Water
3,000
Bhp
$0.1545
Bhp-hr
NATURAL GAS
100
cfm
$0.3176
100ft3
SULURFIC ACID
N.A.
$9.5500
gal.
NITRIC ACID
N.A.
$29.8900
gal.
HCl
N.A.
$9.3000
gal.
HF (conc.)
N.A.
$33.0000
gal.
NH4OH
N.A.
$7.8000
gal.
Peroxide
N.A.
$14.7000
gal.
IPA
N.A.
$29.8900
gal.
System
FACTORY ELECTRICAL ENERGY
INDUSTRIAL CITY WATER
AIR SYSTEMS CDA/OFA/Plant air
PROCESS VACUUM
SOLVENT WASTE COLLECTION SYSTEM
Total Cost
$/unit Use
Units
of Use
25
gpm
$0.0061
gal
INDUSTRIAL WASTE TREATMENT
1,600
gpm
$0.0003
gal
FLUORIDE WASTE COLLECTION SYSTEM
6,500
gal.
$0.2851
gal
Note: Extracted from the detailed utility cost study.
International SEMATECH
Technology Transfer #02034260A-TR
14
Table 3
Annual Savings Per Unit of Use in Exhaust or Water Reductions
Unit of Use
Savings ($/Yr)
Scrubbed Exhaust
CFM
9.46
Heat Exhaust
CFM
7.88
VOC Exhaust
CFM
16.29
Ultrapure Water *
GPM
9,828.00
WW Treatment
GPM
157.68
* Includes wastewater (WW) treatment cost
Technology Transfer #02034260A-TR
International SEMATECH
Table 4
Utility Cost Spreadsheet
Capacity
Units
System
Cost (K$)
Capital
Cost $/Unit
Capacity
29,900
kw
$25,415
$
850
10.0
$
0.050
$
0.010
$
-
$
-
$
0.060
kwh
EMERGENCY GENERATOR ADDER
7,500
kw
$2,438
$
325
10.0
$
0.000
$
0.004
$
-
$
-
$
0.004
kwh
UPS ADDER (add to generator)
1,800
kw
$1,260
$
700
10.0
$
0.000
$
0.008
$
-
$
-
$
0.008
kwh
1
kw
NA
-
10.0
$
0.050
System & Associated Subsystems
ELECTRICAL POWER NORMAL
FACTORY ELECTRICAL ENERGY
Design
Capacity
$
Depreciation Period
(years)
Indirect
Variable Cost Capital Cost Variable Cost
$/unit Use
$/Unit Use
$/Unit Use
$
-
Chiller Plant
CHILLED WATER SYSTEM
Indirect
Capital Cost
$/Unit Use
$ 0.0123
$ 0.0052
$ 0.0123
$ 0.0052
$
10,330
Ton
$9,138
$
885
10.0
$
0.001
$
0.010
$
0.043
5,860
gpm
$2,397
$
409
10.0
$ 0.0000
$
0.000
$ 0.0002
0.008
Total Cost
$/unit Use
Units
of Use
$ 0.0676
Kw-hr
$
Ton-hr
0.062
Chillers/w mfg. local control
Installation
Primary pumps and piping
Cooling towers
Installation, pad/trim piping etc
Chemical feed package
Condenser pumps
Condenser piping
Chilled water mains
Chilled water secondary piping
Chilled water tertiary equip.
Chilled water tertiary
Electrical
PCW SYSTEM
International SEMATECH
Technology Transfer #02034260A-TR
$ 0.0001
$ 0.0003
gal
15
International SEMATECH
System & Associated Subsystems
16
Technology Transfer #02034260A-TR
Capacity
Units
System
Cost (K$)
Capital
Cost $/Unit
Capacity
Depreciation Period
(years)
587
gpm
$14,452
$ 24,600
10.0
$ 0.0086
$
0.005
200
gpm
$5,478
$ 27,391
10.0
$ 0.0003
$
0.005
1,400
gpm
$805
$
10.0
$ 0.0050
$ 0.0001
Design
Capacity
Indirect
Variable Cost Capital Cost Variable Cost
$/unit Use
$/Unit Use
$/Unit Use
Indirect
Capital Cost
$/Unit Use
Total Cost
$/unit Use
Units
of Use
$ 0.0042
$ 0.0012
$ 0.0187
gal
$ 0.0239
$ 0.0085
$ 0.0379
gal
$ 0.0051
gal
equipment
Mains
Secondary distribution
Laterals
Chilled Water System
Raw water
Electrical
UPW SYSTEM (consumption based)
UPW Equip. & Piping
UPW mains and secondaries circulation
UPW laterals
Chemicals
Raw Water
Waste Treatment
Electrical
HOT UPW SYSTEM (consumption)
Hot DI Equipment & Piping
Hot UPW Distribution
Electrical
UPW
INDUSTRIAL CITY WATER
System & equipment
Industrial water distribution
Raw Water
575
$
-
$
-
System & Associated Subsystems
SCRUBBER SYSTEM
Design
Capacity
Capital
Cost $/Unit
Capacity
Depreciation Period
(years)
Indirect
Variable Cost Capital Cost Variable Cost
$/unit Use
$/Unit Use
$/Unit Use
Indirect
Capital Cost
$/Unit Use
Total Cost
$/unit Use
Units
of Use
$ 0.0007
$ 0.0008
$ 0.0018
100ft3
$ 0.0013
$ 0.0009
$ 0.0008
$ 0.0031
100ft3
$ 0.0000
$ 0.0001
$ 0.0007
$ 0.0008
$ 0.0015
100ft3
$ 0.0000
$ 0.0002
$ 0.0006
$ 0.0005
$ 0.0013
100ft3
Capacity
Units
System
Cost (K$)
280,000
cfm
$3,595
$
13
10.0
$ 0.0000
$ 0.0002
20,000
cfm
$1,400
$
70
10.0
$ 0.0001
60,000
cfm
$252
$
4
10.0
380,000
cfm
$3,705
$
10
10.0
Scrubbers & equipment
Duct mains & secondary
Duct laterals
Electrical
Water & chemicals
Make up Air
VOC/solvent EXHAUST
Abatement equipment
Duct
Natural Gas
Electrical
Make up Air
MISC BUILDING EXHAUST
Misc. Exhaust Fans
Misc. Exhaust Duct
Electrical
Make up Air
MUA w/Duct FAB & PRIMARY
Make up air units fab+pri
Fab bldg. Duct
Chilled Water System
Heating Water System
International SEMATECH
Technology Transfer #02034260A-TR
17
International SEMATECH
System & Associated Subsystems
18
Technology Transfer #02034260A-TR
Design
Capacity
Capital
Cost $/Unit
Capacity
Depreciation Period
(years)
Indirect
Variable Cost Capital Cost Variable Cost
$/unit Use
$/Unit Use
$/Unit Use
Indirect
Capital Cost
$/Unit Use
Capacity
Units
System
Cost (K$)
Total Cost
$/unit Use
Units
of Use
1,300
cfm
$959
$
738
10.0
$ 0.7500
$ 0.0140
$
-
$
-
$ 0.7640
100ft3
2,100
cfm
$1,262
$
601
10.0
$ 0.5500
$ 0.0114
$
-
$
-
$ 0.5614
100ft3
40
cfm
$593
$ 14,830
10.0
$ 0.7500
$ 0.2822
$
-
$
-
$ 1.0322
100ft3
20
cfm
$305
$ 15,250
10.0
$ 1.4700
$ 0.2901
$
-
$
-
$ 1.7601
100ft3
10
cfm
$588
$ 58,777
10.0
$ 9.0000
$ 1.1183
$
-
$
-
$ 10.1183
100ft3
Filters replacement
Electrical
HIGH PURITY NITROGEN
Source (included w/ gas cost)
Mains High Purity nitrogen HP N2
Latrals High Purity nitrogen HP N2
Secondary High Purity nitrogen HP N2
UTILITY NITROGEN
Source (included w/ gas cost)
Mains Utility nitrogen UN2
Laterals Utility nitrogen UN2
OXYGEN
Source (included w/ gas cost)
Mains
Secondary distribution
Laterals
HYDROGEN
Source (included w/ gas cost)
Mains
Secondary distribution
Laterals
PROCESS HELIUM
System & Associated Subsystems
Capacity
Units
System
Cost (K$)
Capital
Cost $/Unit
Capacity
Depreciation Period
(years)
40
cfm
$614
$ 15,359
10.0
$ 3.2500
$ 0.2922
4,000
cfm
$1,379
$
345
10.0
$ 0.0003
$ 0.0066
$ 0.0194
750
cfm
$443
$
590
10.0
$ 0.0006
$ 0.0112
$ 0.1043
Design
Capacity
Indirect
Variable Cost Capital Cost Variable Cost
$/unit Use
$/Unit Use
$/Unit Use
Indirect
Capital Cost
$/Unit Use
Total Cost
$/unit Use
Units
of Use
$ 3.5422
100ft3
$ 0.0037
$ 0.0300
100ft3
$ 0.0201
$ 0.1362
100ft3
Source (included w/ gas cost)
Mains
Secondary distribution
Laterals
ARGON
$
-
$
-
Source (included w/ gas cost)
Process argon mains HPAR
Process argon Secondary HPAR
Process argon laterals HPAR
AIR SYSTEMS CDA/OFA/Plant air
Compressors & equipment
Oil free air piping
Oil free air fab distribution
Humidification Air piping
Instrument air mains
Chiller
Electrical
PROCESS VACUUM
Source system & equipment
Distribution
Electrical
International SEMATECH
Technology Transfer #02034260A-TR
19
International SEMATECH
System & Associated Subsystems
CLEANROOM RECIRCULATION AIR
20
Technology Transfer #02034260A-TR
Capital
Cost $/Unit
Capacity
Depreciation Period
(years)
Indirect
Variable Cost Capital Cost Variable Cost
$/unit Use
$/Unit Use
$/Unit Use
Design
Capacity
Capacity
Units
System
Cost (K$)
2,750,000
cfm
$9,130
$
3.32
10.0
$ 0.0000
$ 0.00006
$ 0.00004
3,000
Bhp
$2,757
$ 919.00
10.0
$ 0.0005
$ 0.0105
$ 0.1435
100
cfm
$0
10.0
$
0.300
$
-
Indirect
Capital Cost
$/Unit Use
Total Cost
$/unit Use
Units
of Use
$ 0.00001
$ 0.00011
100ft3
$ 0.1545
Bhp-hr
$ 0.3176
100ft3
Fan Filters installed
Blanks installed
Grid installed
electrical
HEATING SYSTEM Steam or Hot Water
$
-
Boiler & Equipment w/ inst& CUB piping
Fuel Oil System (back up)
Heating distribution piping
Natural gas
NATURAL GAS
$
-
$ 0.0123
$ 0.0052
Source (included w/ gas cost)
Natural gas distribution piping (Burn Boxes)
SULURFIC ACID
N.A.
$
9.550
$
-
$
-
$
-
$ 9.5500
gal.
NITRIC ACID
N.A.
$ 29.890
$
-
$
-
$
-
$ 29.8900
gal.
HCl
N.A.
$
9.300
$
-
$
-
$
-
$ 9.3000
gal.
HF (conc.)
N.A.
$ 33.000
$
-
$
-
$
-
$ 33.0000
gal.
NH4OH
N.A.
$
$
-
$
-
$
-
$ 7.8000
gal.
7.800
System & Associated Subsystems
Design
Capacity
Capacity
Units
System
Cost (K$)
Capital
Cost $/Unit
Capacity
Depreciation Period
(years)
Indirect
Variable Cost Capital Cost Variable Cost
$/unit Use
$/Unit Use
$/Unit Use
Indirect
Capital Cost
$/Unit Use
Total Cost
$/unit Use
Units
of Use
Peroxide
N.A.
$ 14.700
$
-
$
-
$
-
$ 14.7000
gal.
IPA
N.A.
$ 29.890
$
-
$
-
$
-
$ 29.8900
gal.
SOLVENT WASTE COLLECTION SYSTEM
25
gpm
$759
$ 30,360
10.0
$ 0.0003
$ 0.0058
$
-
$
-
$ 0.0061
gal
1,600
gpm
$2,752
$
1,720
10.0
$ 0.0000
$ 0.0003
$
-
$
-
$ 0.0003
gal
6,500
gal.
$1,651
$
254
10.0
$ 0.2850
$ 0.0000
$
-
$
-
$ 0.2851
gal
Epmnt. & specialties allowance
Collection System
Chemicals
INDUSTRIAL WASTE TREATMENT
IWT equipment
Collection System
Operating cost
FLUORIDE WASTE COLLECTION SYSTEM
Fluoride Equipment (batch system)
Collection System
Chemicals
International SEMATECH
Technology Transfer #02034260A-TR
21
International SEMATECH
Technology Transfer #02034260A-TR
APPENDIX: FAB DRAWINGS AND SIMPLIFIED PROCESS FLOW DIAGRAMS
FOR THE VARIOUS UTILITY SYSTEMS
Figure 2
Floorplan for Typical “Ballroom” Fab
22
Figure 3
International SEMATECH
Elevation (Section) of a Typical Fab
Technology Transfer #02034260A-TR
23
International SEMATECH
24
Technology Transfer #02034260A-TR
H IGH VO LTAGE
S UBS TATION
UTIL ITY OPTIO N
SECON D
TRAN S MIS SIO N
L IN E
O PTION
METERING
NO
1 2 .4 7 -2 0 .4 8 KV
FU S E AN D
S WITCH
CAS E
NC
SECTIOIN ALIZED
S WITCH
NC
NC
NC
NO
NC
NC
NO
SECTIOIN ALIZED
SWITCH
NO
NC
NC
NC
NC
NO
4 ,1 8 0 V
4 8 0 /2 7 7 V
4802 0 8 /1 2 0 V
H ARMO N IC
RATED
OPTION
4802 0 8 /1 2 0 V
4802 0 8 /1 2 0 V
HP
HP
CH ILL ER/
CH IL LER/
AIR CO MPRES SOR
AIR COMPRES SOR
(STARTER AN D P.F.
(STARTER AN D P.F.
CORRECTIO N IN CLU DED) CORRECTION IN CLU DED)
4 8 0 /2 7 7 V
4 8 0 /2 7 7 V
48 02 0 8 /1 2 0 V
ATS
EMERGEN CY
EN GIN E
GEN ERATOR
LO AD BAN K
OPTION
B USDU CT
MOTOR
CON TROL
CEN TER
PAN EL
PAN EL
MOTOR
CON TROL
CEN TER
PAN EL
PAN EL
PAN EL
MO TO R
CON TROL
CEN TER
PAN EL
PAN EL
4 8 0 /2 7 7 V
UPS
4 802 0 8 /1 2 0 V
BUS DUCT
PAN EL
Figure 4
MO TOR
CO N TROL
CEN TER
Schematic Diagram of the Electrical System
PAN EL
PAN EL
Figure 5
International SEMATECH
FIL TER
H EAT
EXCH AN GER
FIL TER
H EAT
EXCH AN GER
FIL TER
H EAT
EXCH AN GER
Flow Diagram for Process Cooling Water System
Technology Transfer #02034260A-TR
25
International SEMATECH
26
Technology Transfer #02034260A-TR
FROM
COOLING
TOWER
EXPANSION
TANK
TO
COOLING
TOWER
CHILLER #1
PUMP #1
STANDBY
SERVICE
LOOP
ICW
CHILLER #2
BACKFLOW
& PRESSURE REDUCING
STATION
PUMP #2
STANDBY
SERVICE
LOOP
BYPASS LOOP QUICK FILL
CHILLER #N+1
PUMP #N+1
CAPACITY BYPASS LOOP
NORMAL FLOW
TO
DISTRIBUTION
PUMP
PUMP
CHEMICAL FEEDER
FROM
DISTRIBUTION
PUMP
Figure 6
Flow Diagram for Chilled Water System
Figure 7
International SEMATECH
Flow Diagram for UPW Make-Up System (Sheet 1)
Technology Transfer #02034260A-TR
27
International SEMATECH
Technology Transfer #02034260A-TR
Figure 8
Flow Diagram for UPW Make-Up System (Sheet 2)
28
Figure 9
International SEMATECH
Flow Diagram for UPW Make-Up System (Sheet 3)
Technology Transfer #02034260A-TR
29
International SEMATECH
Technology Transfer #02034260A-TR
Figure 10
Flow Diagram for UPW Make-Up System (Sheet 4)
30
Figure 11
International SEMATECH
Flow Diagram for UPW Make-Up System (Sheet 5)
Technology Transfer #02034260A-TR
31
International SEMATECH
Technology Transfer #02034260A-TR
Figure 12
Flow Diagram for UPW Make-Up System (Sheet 6)
32
Figure 13
International SEMATECH
Flow Diagram for UPW Polish System (Sheet 1)
Technology Transfer #02034260A-TR
33
International SEMATECH
Technology Transfer #02034260A-TR
Figure 14
Flow Diagram for UPW Polish System (Sheet 2)
34
Figure 15
International SEMATECH
Flow Diagram for UPW Polish System (Sheet 3)
Technology Transfer #02034260A-TR
35
International SEMATECH
Technology Transfer #02034260A-TR
Figure 16
Flow Diagram for UPW Polish System (Sheet 4)
36
Figure 17
International SEMATECH
Flow Diagram for UPW Polish System (Sheet 5)
Technology Transfer #02034260A-TR
37
International SEMATECH
Technology Transfer #02034260A-TR
Figure 18
Schematic of Acid Exhaust Scrubber
38
Figure 19
International SEMATECH
Schematic of VOC Abatement
Technology Transfer #02034260A-TR
39
International SEMATECH
Technology Transfer #02034260A-TR
Figure 20
Schematic of Make-Up Air Handler
40
TANK
Figure 21
International SEMATECH
Flow Diagram for Alternative Source Bulk Gas System
Technology Transfer #02034260A-TR
41
International SEMATECH
42
Technology Transfer #02034260A-TR
TO
VENT
AIR/ WATER
SEPARATOR
VACUUM PUM P
PACKAG E
SEAL WATER
HEAT
EXCHANG ER
PRO CESS
VACUUM
PROCESS
VACUUM
RECEIVER
AIR/ WATER
SEPARATOR
VACUUM PUM P
PACKAG E
SEAL WATER
HEAT
EXCHANG ER
AIR/ WATER
SEPARATOR
VACUUM PUM P
PACKAG E
SEAL WATER
HEAT
EXCHANG ER
FRO M
CHILLED WATER
SUPPLY
TO
CHILLED WATER
RETURN
Figure 22
Flow Diagram for Process Vacuum System
FROM
S OFT WATER
DIS TRIBUTION S YS TEM
PRESS URE REDUCIN G
& B ACK FLOW PREVEN TION
MAKEUP WATER METER
WITH REMOTE READOUT
AIR CH ARGIN G
PORT
AIR
S EPARATOR
EXPAN S ION
TAN K
DRAIN
B OILER PACKAGE
WITH PU MP
& CON TROL S
BOILER PACKAGE
WITH PUMP
& CON TROLS
PUMP
H EATIN G WATER
CH EMICAL FEEDER
PUMP
TO
H EATING WATER
DIS TRIBUTION S YS TEM
H EATIN G WATER
FROM
H EATING WATER
DIS TRIBUTION S YS TEM
Figure 23
International SEMATECH
Flow Diagram for Hot Water System
Technology Transfer #02034260A-TR
43
International SEMATECH
Technology Transfer #02034260A-TR
Figure 24
Typical Aqueous Chemical Distribution System
44
Figure 25
International SEMATECH
Typical Solvent Chemical Distribution System
Technology Transfer #02034260A-TR
45
International SEMATECH
46
Technology Transfer #02034260A-TR
FROM
H 2 S O4 S UPPLY
FROM
WAS TE CCOLLECTION
S YS TEM
FROM
N aOH S UPPLY
pH
pH
pH
AUTO
S AMPLER
DIS CH ARGE
Figure 26
Flow Diagram for Wastewater Neutralization System
International SEMATECH Technology Transfer
2706 Montopolis Drive
Austin, TX 78741
http://www.sematech.org
e-mail: [email protected]