Zero Metrology Time
Shany Ganon
Roey Shemla
Ron Livne
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Zero Metrology Time
Revision control
Rev
Detailed
Description
1
First revision
31.5.08
2
Final revision
25.7.08
3
Final revision
1.9.08
Approved
2
Date
Zero Metrology Time
Table of Contents
Revision control and Table of content _____________________________2-3
Introduction and Installation ______________________________________ 4
Training ___________________________________________________ 5-21
Reference___________________________________________________ 22
FAQ and Limitations___________________________________________ 23
Folders and files______________________________________________ 24
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Introduction
ZMT software is an expert system aided for the researchers of the project and
was designed to fit their use perfectly.
The goal of the software is to run new real time scheduling algorithms that
were implemented by the project team that will reduce the cycle time of
products in a FAB factory. The simulation environment provides tools for
measuring the efficiency of each algorithm with different parameters
configurations on changed FAB factory models. The software extends a
global standard FAB simulation model called AutoSched.
Installation
2.1 Software requirements
1. Windows XP/ Vista
2. Applied materials AutoSched
3. .NET Framework version 2.0
2.2 Install ZMT software
Run ZMT.exe on your computer
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Training
Start Page
ZMT software starts with a default working calibrated model.
You can add new models to your workspace using the Add Model option.
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Experiments Tree View
In the left size of the screen you can always see a tree view of the
experiments, right click on your user name, working environments and
experiments to get a sub menu.
Right click on your user name allows you to create a new working
environment.
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Right click on a working environment allows you to:
1. Edit the working environment
2. Create new experiment in the working environment
3. Run all the experiments in the working environment
4. Analyzing all the experiments in the working environment
5. Delete the working environment with all its experiments
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Right click on a experiment allows you to:
1. Edit the experiment
2. Run the experiment
3. Analyze the experiment
4. View experiment's results
We will now go through all the menus options and explain them.
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Create new Working Environment
In the "Create New Work Environment" tab enter name to the working
environment. The Days, Warm up and partitions parameters will be used as
default parameters to all of the experiments of this working environment, you
can change them if you want when you create the new experiment or when
you edit it.
Days are the number of days the experiment will be simulated.
Warm up is the number of days that takes the system to stabilize.
Partitions are the number of parts the results will be split into.
We suggest Warm up time of at least 450 days if you work on our default
calibrated model. (Of course the number of days should be larger than that)
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Create new experiment
In the "new Experiment" tab you should enter all the parameters to create a
new experiment.
Experiment Name is a unique name that will identify the experiment.
Inspection Policy is the algorithm of the experiment.
Work Environment is the work environment that the experiment will be
associated with; you choose any one of your working environments.
Description is a short description to the experiment.
Days are the number of days the experiment will be simulated.
Warm up is the number of days that takes the system to stabilize.
Partitions are the number of parts the results will be split into.
Days, Warm up and Partitions are set as default to the work environment's
parameters, you can change them though in here.
We will Explain about each Inspection Policy parameters next.
After defining all the above mentioned parameters you can click on the button
"Create" to create the experiment.
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Fixed Skip Rate Algorithm
In the experiment's inspection policy combo you check "Fixed Skip Rate"
The Yield parameters will appear in every algorithm so it will be explained
once:
Transition ICOOC is the probability that a machine will turn from in control
mode to out of control mode.
Yield IC is the probability that the product won't damage while the machine is
in control.
Yield OOC is the probability that the product won't damage while the machine
is out of control.
Measure Rate parameters:
Inspect X Out of Y meaning that X products will be inspected and Y products
won't be inspected.
You can change this parameters for each operation separately, for tool group
or for all operations at once.
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Freshest Lot Algorithm
In the experiment's inspection policy combo you check "Freshest Lot"
MLT Algorithm
In the experiment's inspection policy combo you check "MLT"
You can change the MLT (Metrology less than) parameter for each operation
separately, for tool group or for all operations at once.
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MLT BMT Algorithm
In the experiment's inspection policy combo you check "MLTBMT"
You can change the MLT (Metrology less than) BMT (Bleeder more than)
parameters for each operation separately, for tool group or for all operations
at once.
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Edit experiment
You can view and edit the experiment in the "Edit exp" tab.
Clicking on the "Open Model" button allows you to view the experiment
updated model:
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Run experiment
You can run a single experiment through its menu, a whole working
environment through its menu, or open the run tab through the main menu
and manually choose as many experiments as you want and run them.
Clicking the "Run" button will start the simulation, in case of multiple
experiments run; they will run one after another. You can watch which
experiment is currently running in the "Running experiment" label.
In the bottom of the window you can watch the run's progress.
During a run you can't delete the experiment or close the program.
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Analyze experiment
You can view the CT vs. Yield graph for a single experiment by right clicking
on its menu or view the graph for a whole working environment by right
clicking on its menu.
By analyzing a working environment you can compare the performances of
the experiments in the working environment.
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View experiment Results
You can view the experiment's results by right clicking on the experiment.
You can watch:
1. Route Table
2. Tool Group Table
3. Work Environment Table
4. Experiments Table
5. Production Cell Table
6. Metro Tool Group Table
7. Process Tool Group Table
8. Operation Table
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1. Route Table
2. Tool Group Table
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3. Work Environment Table
4. Experiments Table
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5. Production Cell Table
6. Metro Tool Group Table
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7. Process Tool Group Table
8. Operation Table
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Reference
Add new model – In the main tab use the browse button to upload your
model, give it a unique name and click the Add button.
Change default model – In the main tab choose the model you want to use
as default and click Apply.
Change current model – In the main tab choose the model you want to
currently use and click Apply.
Create new working environment – In the main window click on "New Work
Environment" or right click on the user and choose the same option.
Create new experiment – In the main window click on "New Experiment" or
right click on a working environment for which you want to add the experiment
to.
Edit working environment – right click on the working environment and click
Edit.
Edit experiment – right click on the experiment and click edit.
Delete working environment – right click on the working environment and
click Delete.
Delete experiment – right click on the experiment and click delete.
Run working environment – right click on the working environment and click
Run, this will run the entire working environment's experiments one after the
other.
Run experiment – right click on the experiment and click Run.
Analyze working environment – right click on the working environment and
click Analyze, this will analyze the entire working environment's experiments.
Analyze experiment – right click on the experiment and click Analyze.
View experiment results – right click on the experiment and click View
Results, in the results tab you can click on the various buttons to view many
kinds of results.
Export model – to export some calibrated experiment model, click on edit
experiment and right click the open model button, copy the entire folder to
local folder on your computer and then add the folder as a new model.
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FAQ
Q: Can I install ZMT software on any computer?
A: You can install ZMT software on any computer with an autoSched installed
on it and with access to the ZMT DB.
Q: I have installed ZMT software on two computers, why can't I see
experiments I have defined in the other computer?
A: ZMT is user based software, it takes your user name out of your windows
logging, if you have different user names on the two computers it will identify
each of them as separate user.
Q: How to create a new Model?
A: A new model can be created by changing the default model and saving as
a new model or by defining it from stretch in the AutoSched
Q: I am trying to analyze an experiment and I get error message, what have I
done wrong?
A: You must run the experiment before analyzing it, the analysis is made on
the data from the experiment's run.
Q: I am trying to analyze a working environment and I get error message,
what have I done wrong?
A: Check that all the experiments within the working environment were run
already. You can run the entire working environment by tight clicking it and
press "Run Experiments" and when the run is over analyze it.
Limitations
The system is aimed for expertise that understands the world of manufacture.
Running an experiment for many days may take long time, during this time
you cannot close the software.
The software can work only on computers that have access to the software's
data base.
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Folders and files
There should be a library called: c:\ZMT.
In it, there should be the following files and folders:
c:\ZMT\outputs is the directory where all the output files (text files) will be
written to after running a simulation.
c:\ZMT\outputs\outputs.ini is the ini file where definitions from the GUI will be
written to AutoSched. Please don't change it unless you know what you're
doing.
Except for the files of the ZMT software, you will also need an AutoSched
model , and make sure that in the extdef file, the path is to the DLL file where
you installed AutoSched.
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