INTERNSHIP:
Investigate Machine Calibration Process
Background Information
ASML’s lithography systems require nanometer accuracy at
high speeds. This cannot be realized using mechatronics
alone. The Metrology department has created mathematical
models to describe and compensate hardware imperfections.
The parameters of these models are calibrated through the
execution of multiple software steps in the machine setup
sequence. Each step calibrates a sub-set of the parameters
and defines a new calibration state (i.e. Rough (R) or Fine
(F)).
Calibration Parameters
calibration
steps
Calibration States
initial state
Calibration Software 1
Calibration Software 2
Calibration Software 3
calibrated state
sub-set 1
sub-set 2
sub-set 3
R
F
R
R
F
F
R
R
F
Currently, these states are not well managed and this results
in many problems. For example, state dependencies and
preconditions among the calibration software are neither
defined nor known.
Your assignment
Create a calibration state analysis framework:

Provide analytics (e.g. Markov Decision Process) to
determine when change of a sub-set leads to other
seemingly unrelated sub-sets to change drastically.

Provide analysis facilities to identify the optimal
subdivision of parameters into sub-sets, so that
calibration software can clearly define prerequisites
and dependencies.
What ASML offers
You will work on a state of the art machine in
close collaboration with the best experts. In
addition, you’ll get expert, practical guidance and
the chance to work in and experience a dynamic,
innovative team environment.
You will receive a monthly internship allowance of
500 euro maximum (depending on educational
level), plus a possible housing or travel
allowance. Terms and conditions can be found on
our website.
Join ASML
ASML is leading in the worldwide development,
production and sales of high-end lithography
systems for the semiconductor industry. Almost
14,000 people worldwide work at ASML at offices
in the United States, Asia and at the corporate
headquarters in Veldhoven. ASML employees
share a passion for technology with a customer
focus. At ASML, we work collectively to further
develop and implement complex and high-quality
technological systems. Working at ASML is
therefore challenging and dynamic, with ambitious
objectives and high standards key to our
continuing success. But hard work here pays off:
ASML invests in the development of its people
and successes are shared. ASML promises
mutual commitment to our growth and yours.
Join ASML’s expanding multidisciplinary teams
and help us to continue pushing the boundaries of
what’s possible.
Your profile
You are a master student in Mathematics, Computer science,
or a related discipline, with experience in modeling and
programming. You have a confident and exploratory
personality with a hands-on mentality. You are a conceptual
thinker and are not afraid to ask or speak up. You are fluent
in English, both verbally and in writing.
This is a full time internship which can be either an apprentice
or a graduation assignment, with duration of 6 months or
Field: Mathematics, Computer science
more. The start date is as soon as possible.
Contact: [email protected]
Please keep in mind that we can only consider students (who Telephone: +31 (0)40 268 6773
are enrolled at a school during the whole internship period)
for our internships and graduation assignments.
www.asml.com/ students