Equipment Usage Charge: Cleanroom Facility
Internals users from AP, ABCT, ITC, EE, EIE, ISE, ME, BME and FAST are entitled to a 20% discount for
3 years (till 14-May 2018) based on the internal user rates.
Registration Fee: HK$150/user
Entrance Fee:
1). Internal user: HK$50/per 4 hours + material cost* + equipment cost
2). External academic user: lab access per user: HK$533/per hour + material cost* + equipment cost
3). External industry user: lab access per user: HK$831/per hour + material cost* + equipment cost
* User should weight the materials (Au, Pd, Pt) before and after deposition and write down on the log book,
otherwise the materials cost will be charged by estimation
The equipment cost is charged on a pro-rata basis. (One unit is 15mins)
For internal user, the maximum charge is capped at HK$2,000/month/user.
Charge (HKD/hr)
Facility
Location
1
OAI 800 Contact aligner (single side)
Class 100
2
Suss MA6 Aligner
Class 100
3
Nano-imprinter
Class 100
External users
PolyU User
$600.00
$400.00
$600.00
$400.00
$600.00
$400.00
1
4
Vacuum oven
Class 100
5
Spin coater and hotplate
Class 100
6
x1000 Optical microscopy with CCD camera Class 100
7
Novascan UV Ozone
Class 100
8
Oven
Class 100
9
LEV (Local exhaust ventilation) + Wet
station
Class 100
10
Atomic layer deposition system
(Entrance fee included)
(Entrance fee included)
(Entrance fee included)
(Entrance fee included)
(Entrance fee included)
(Entrance fee included)
(Entrance fee included)
(Entrance fee included)
(Entrance fee included)
(Entrance fee included)
(Entrance fee included)
(Entrance fee included)
$275.00
$175.00
$450.00
$300.00
$300.00
$200.00
$300.00
$200.00
$275.00
$175.00
Class
1000
Class
11
12
13
14
Inductively Coupled Plasma (ICP) etcher
E-beam deposition system
(exclude Au, Pd & Pt material cost)
Sputtering system
(exclude Au, Pt target material cost)
Thermal evaporator
(exclude Au, Pd & Pt material cost)
1000
Class
1000
Class
1000
Class
1000
2
Class
15
PVA TePla – IoN radical plasma cleaner
1000
$80.00
$50.00
16
Probe station with semiconductor parameter
analyzer
Class
1000
$400.00
$200.00
17
DektakXT Surface optical profiler
Class
1000
$180.00
$120.00
18
Rapid Thermal Processor
$270.00
$180.00
$150.00
$100.00
$300.00
$200.00
Class
1000
Class
19
Hitachi TM3000 Desk-top SEM
1000
Class
20
Aixtron PECVD
1000
21
Wet station (+LEV)
Class
1000
(Entrance fee included)
(Entrance fee included)
22
Leica S8 APO Optical microscopy
Class
1000
(Entrance fee included)
(Entrance fee included)
23
PixDro LP50 Inkjet printer
$275.00
$175.00
Class
10000
24
F&K Delvotec Semi-automatic wire bonder
Class
10000
$270.00
$180.00
25
Harrick Plasma Cleaner
Class
10000
$80.00
$50.00
* If the end user requires technical support from Scientific Officer, $200/hour will be charged.
3
Materials List for Deposition System
Pellets
Targets
Aluminum, Al
Aluminum, Al (3” dia.)
Chromium, Cr
Chromium, Cr (3” dia.)
Copper, Cu
Copper, Cu (3” dia.)
Gold, Au [HKD 468/g]
Gold, Au (2” dia.) [HKD 406/g]
Molybdenum, Mo
Indium Tin Oxide, ITO (3” dia.)
Molybdenum Oxide, MoO3 (powder)
Molybdenum, Mo (3” dia.)
Nickel, Ni
Molybdenum Oxide, MoO3 (3” dia.)
Silver, Ag
Nickel, Ni (3” dia.)
Palladium, Pd [HKD 304/g]
Platinum, Pt (2” dia.) [HKD 413/g]
Platinum, Pt [HKD 421/g]
Silicon, Si (3” dia.)
Titanium, Ti
Silicon Dioxide, SiO2 (3” dia.)
Silver, Ag (3” dia.)
Titanium, Ti (3” dia.)
Tungsten, W (3” dia.)
Tungsten Oxide, WO3 (3” dia.)
4
Consumables
Item
Consumables
Unit Price (HK$)
1
Cleanroom garment
250
2
Cleanroom notebook
40
3
Cleanroom pen
15
Tweezers – Stainless Antiacid Antimagnetic Steel
28
4
Wafer Handling
82
Teflon Coating
158
ESD Plastic
21
White Delrin Plastic
15
5
PFA beaker, 100ml
271
6
PFA narrow-mouth bottle, 100ml
287
7
Safety spectacles (eye-glasses wearer)
26
8
Safety spectacles (non eye-glasses wearer)
24
9
UVEX safety eyewear (UV protective)
221
10
ESD wrist strap
48
11
Nalgene plastic bottle, amber HDPE, 125ml
16
12
Terumo disposable syringe, luer lock tip, 10ml
3
13
Terumo disposable syringe, luer lock tip, 30ml
9
14
Millex syringe filter unit (13mm diameter sterile syringe filter with a 0.45µm pore size
hydrophilic PVDF membrane)
30
5