MEMS Design and Application
Course Number: ME/EE - 685
(Spring 2014) – San Diego State University
Instructor:
Dr. Kassegne is a professor of mechanical engineering at
the Mechanical Engineering department of SDSU. He was
previously at Marc Madou’s BioMEMS Research Group at
UC Irvine and had also worked at Microfabrica, a MEMS
start-up company in the LA area and Nanogen, a San
Diego based DNA-chip Company.
Grading and Assignments:
Time: 4:00-7:00 PM (W)
Place: E301
Instructor: Prof. Samuel K. Kassegne
Department of Mechanical Engineering
San Diego State University
5500 Campanile Dr., San Diego, CA 92182
Tel: 619-594-1815 (Office)
E-mail: [email protected]
Homework – 15%
Mid-term – 40%
Review Paper – 10%
Design Project – 35%
Office Hours: M/W, 1:00-4:00 PM.
Text Book and References
1. Stephen Senturia – Microsystem Design, Kluwer
Academic Press, 2001.
Course Description:
2. Nadim Maluf - An Introduction to
Micro-electro-mechanical systems, or MEMS, is an
Microelectromechanical Systems Engineering, 2nd
emerging area with applications to a variety of
Edition, (Artech House).
engineering fields such as mechanical, electrical, 3. Marc Madou – Fundamentals of Microfabrication
aerospace and biomedical engineering. This course
equips the student with a fundamental of the science
and engineering of microfabrication. This Software
knowledge is then applied to the designing and Coventorware™ , FEMLAB.
micromachining of a variety of MEMS devices Review Paper
varying from capacitive accelerometers to genomic This will involve reviewing an existing MEMS technology
and proteomic chips using SDSU’s MEMS clean in such areas as Micro-mirrors, Inertial Sensors, Pressure
room. This is a graduate level course open to Sensors, Accelerometers, DNA chips/arrays, Biosensors,
aerospace, electrical, computer, mechanical and Microfluidics, Optoelectronics, RF MEMS, etc. The
biomedical students as well as chemistry and physics graduate student is expected to critically examine the core
IP of an application, its engineering (including
graduate students.
manufacturing) and business sense and market
potential/performance.
Course Objectives:
Upon completion of the course work, the student
will gain skills in:
 fundamental micromachining processes such as
lithography, surface and bulk micromachining.
 Layout for MEMS using CAD and then
populate a wafer with these layouts.
 Simulation of MEMS devices.
 developing and exercising critical thinking in
microengineering design issues such as
fabrication, packaging and testing.
 microscale physics for use in designing MEMS
Design Project
The design project involves a group work on the complete
engineering of a MEMS device. Included are:
1. Physical and mask layout (Coventorware,
AutoCAD, etc)
2. Simulation/modeling (FEMLAB, Coventorware,
ANSYS, etc).
3. Microfabrication. This will be done at SDSU’s
MEMS Clean-room.
The final design will be presented at the end of the
semester.
ME/EE 685 - MEMS Design and Application – S. Kassegne