Background Statement for SEMI Draft Document 5411A
New Standard: SPECIFICATION FOR EQUIPMENT ENERGY SAVING
MODE COMMUNICATIONS (EESM)
Notice: This background statement is not part of the balloted item. It is provided solely to assist the recipient in
reaching an informed decision based on the rationale of the activity that preceded the creation of this Document.
Notice: Recipients of this Document are invited to submit, with their comments, notification of any relevant
patented technology or copyrighted items of which they are aware and to provide supporting documentation. In this
context, “patented technology” is defined as technology for which a patent has issued or has been applied for. In the
latter case, only publicly available information on the contents of the patent application is to be provided.
What is the problem being solved?
Previous research has demonstrated there are opportunities to reduce utility consumption for production equipment
while wafers are not being processed. While production equipment are capable of reduced utility consumption,
implementation has been slow due to a lack of a standard. The intent for this specification is to define
communications that allow the host to place the production equipment into a Sleep state where the rate of energy use
is reduced.
What is the history of this issue and ballot?
This is the second proposal of this new specification. The first was balloted in Cycle 6 of 2012. The feedback from
that process has been incorporated into this updated version.
Who will this affect? How? Why?
This new specification will not conflict with existing standards or with existing implementations.
Is this a change to an existing solution, or, is it a new activity?
This is a new activity.
Revision Control
This revision control records activity within the task force as well as formal submit and resubmit dates and results
per SEMI. Entries have been made by the task force.
Date
Version
Name
1/10/2013
0.1
Lance Rist
1/18/2013
0.2
Lance Rist
1/24/2013
0.3
Lance Rist
1/29/2013
2/1/2013
0.4
1.0
Lance Rist
Lance Rist
Edits
First working draft, based on 5411 ballot. Reviewed at ESEC TF
meeting on this date.
Second working draft, based on input at and after the January 10
ESEC TF meeting
Updated version based on emailed inputs from task force.
Reviewed at ESEC TF meeting on this date.
Incorporation of ESEC TF feedback in advance of 1/31 telecon
Final version, approved by the ESEC TF
A Note on Requirements ID’s
Requirements ID’s are included in the proposed new standard by direction of the North America Information &
Control Committee. The requirements are delimited by [Esss.ss-RQ-nnnnn-nn] at the beginning and [/RQ] at the
end. In tables where requirements are contained, a row designates a requirement with the designation [Esss.ss-RQnnnnn-nn] in column 1. All requirements are delimited in one of these two ways. No other text should be
considered a requirement. Sections near a requirement may provide examples or other supporting text that can help
with interpreting the requirement. Note that the word “should” is used in some non-requirements text and it denotes
a recommendation or a best practice, not a requirement.
Each requirement has a requirement ID as contained in the [Esss.ss-RQ-nnnnn-nn] delimiter. The Esss.ss is the
specification identifier and will be replaced by SEMI in the published version with the actual standard number (for
example E167.00), which cannot be known before approval is achieved. The “nnnnn” string is the requirement
number within this specification. The authors of this proposal have suggested requirement numbers, but the final
assignment will be made by SEMI. Corrections to the requirement numbers are considered editorial.
Review and Adjudication Information
Task Force Review
Energy Saving Equipment Communication
Task Force
Tuesday, April 2, 2013
Date:
Time & Timezone: 3:00 PM to 6:00 PM, Pacific Time
SEMI Headquarters
Location:
3081 Zanker Road
City, State/Country: San Jose, California / USA
Dan Chlus (SEMATECH)
Leader(s):
Mike Czerniak (Edwards)
Group:
Committee Adjudication
North America I&C Committee
Wednesday, April 3, 2013
8:00 AM to 4:30 PM, Pacific Time
SEMI Headquarters
3081 Zanker Road
San Jose, California / USA
Jack Ghiselli (Ghiselli Consulting)
David Bricker (Applied Materials)
Lance Rist (Industry Consultant)
Paul Trio (SEMI NA)
Paul Trio (SEMI NA)
Standards Staff:
408.943.7041 /[email protected]
408.943.7041 / [email protected]
This meeting’s details are subject to change, and additional review sessions may be scheduled if necessary. Contact
Standards staff for confirmation.
Telephone and web information will be distributed to interested parties as the meeting date approaches. If you will
not be able to attend these meetings in person but would like to participate by telephone/web, please contact
Standards staff.
Semiconductor Equipment and Materials International
3081 Zanker Road
San Jose, CA 95134-2127
Phone: 408.943.6900, Fax: 408.943.7943
DRAFT
SEMI Draft Document 5411A
New Standard: SPECIFICATION FOR EQUIPMENT ENERGY SAVING
MODE COMMUNICATIONS (EESM)
Table of Contents
1 PURPOSE .................................................................................................................................................................1
2 SCOPE .......................................................................................................................................................................1
3 LIMITATIONS .........................................................................................................................................................2
4 REFERENCED STANDARDS AND DOCUMENTS ...........................................................................................2
4.1 SEMI Standards and Safety Guidelines ............................................................................................................................... 2
5 TERMINOLOGY .....................................................................................................................................................2
6 CONVENTIONS ......................................................................................................................................................2
6.1 Requirements Identification............................................................................................................................................... 2
6.2 State Model Methodology ................................................................................................................................................. 4
6.3 Parameter Listings ............................................................................................................................................................. 4
6.4 Service Message Representation ....................................................................................................................................... 5
7 IMPLEMENTATION OVERVIEW.......................................................................................................................5
8 PREREQUISITES ....................................................................................................................................................8
9 REQUIREMENTS ...................................................................................................................................................8
9.2 Equipment Energy Saving State Model .............................................................................................................................. 9
9.3 Equipment Energy Saving Services ....................................................................................................................................15
10 TEST METHODS................................................................................................................................................. 17
11 RELATED DOCUMENTS .................................................................................................................................. 17
1 Purpose
1.1 The purpose of this specification is to define messaging and behavior to facilitate a reduced rate of energy
consumption in production equipment. A mechanism is provided for the factory system (host) to initiate (and
terminate) an equipment energy saving mode.
2 Scope
2.1 This standard defines message services and behavior between the host and production equipment to facilitate a
reduced rate of energy consumption in the production equipment.
2.2 This standard addresses:
 Definition of Equipment Energy Saving Mode Communications behavior in the form of a state model
 Specification of message services and content for the communication needed to manage Equipment Energy
Saving Mode Communications
NOTICE: SEMI Standards and Safety Guidelines do not purport to address all safety issues associated with their
use. It is the responsibility of the users of the Documents to establish appropriate safety and health practices, and
determine the applicability of regulatory or other limitations prior to use.
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document
development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
Page 1
Doc. 5411A  SEMI
LETTER (YELLOW) BALLOT
Document Number: 5411A
Date: 7/28/2017
Semiconductor Equipment and Materials International
3081 Zanker Road
San Jose, CA 95134-2127
Phone: 408.943.6900, Fax: 408.943.7943
DRAFT
3 Limitations
3.1 This specification applies only to equipment that provide a sleep mode as described in SEMI S23.
3.2 This standard does not specify the amount of energy savings to be attained or how that energy savings is to be
achieved. This approach gives the production equipment supplier the freedom to optimize the reduction in rate of
energy use.
3.3 The specific protocol for messaging between production equipment and host and the detailed message structure
is not included in this specification.
3.4 This document does not specify the internal mechanisms of production equipment. It does not specify how the
reduction in the rate of energy use is to be accomplished or the expected amount of energy savings.
4 Referenced Standards and Documents
4.1 SEMI Standards and Safety Guidelines
SEMI E30 — Generic Model for Communications and Control of Manufacturing Equipment (GEM)
SEMI S23 — Guide for Conservation of Energy, Utility and Materials Used by Semiconductor Manufacturing
Equipment
NOTICE: Unless otherwise indicated, all documents cited shall be the latest published versions.
5 Terminology
5.1 Abbreviations and Acronyms
5.1.1 EESM — Equipment Energy Saving Mode Communications
5.2 Definitions
5.2.1 collection event — an event (or grouping of related events) on the equipment that is considered to be
significant to the host. A collection event may be used to initiate the collection and reporting of data to the host.
(refer to SEMI E87, E109)
5.2.2 Equipment Energy Saving Mode Communications — a capability that allows the host to manage a production
equipment’s entry and exit of sleep mode for the purpose of reduction of the rate of energy consumption.
5.2.3 host — the factory computer system or an intermediate system that represents the factory and the user to the
equipment. (refer to SEMI E87, E109)
5.2.4 idle mode — The condition where the equipment is energized and readied for process mode (all systems ready
and temperatures controlled) but is not actually performing any active function such as material movement or
processing. (refer to SEMI S23)
5.2.5 process mode – the condition where the equipment is energized and performing its intended function on target
materials (such as implanting wafers, pumping gas, or inspecting photo-masks). (refer to SEMI S23)
5.2.6 production equipment — equipment used to produce semiconductor devices, including wafer sorting, process,
and metrology equipment and excluding material handling equipment. (refer to SEMI E82, E88, E153, E157)
5.2.7 sleep mode — the condition where the equipment is energized but it is using less energy than in idle mode.
The sleep mode is primarily differentiated from idle mode in that it is initiated by a specific single command signal
provided to equipment, either from an equipment actuator, from an equipment electric interface, or a message
received through factory control software (e.g. SECS). Other than the possible initiation of the sleep mode by an
equipment actuator, entry into the sleep mode does not require manual actions. (refer to SEMI S23)
6 Conventions
6.1 Requirements Identification
6.1.1 The following notation specifies the structure of requirement identifiers.
6.1.1.1 The following requirements prefix format is used at the beginning of requirement text. See Table 1 for the
format notation of the requirements prefix.
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document
development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
Page 2
Doc. 5411A  SEMI
LETTER (YELLOW) BALLOT
Document Number: 5411A
Date: 7/28/2017
Semiconductor Equipment and Materials International
3081 Zanker Road
San Jose, CA 95134-2127
Phone: 408.943.6900, Fax: 408.943.7943
DRAFT
 [Esss.ss-RQ-nnnnn-nn]
6.1.1.2 To mark the end of the requirement text the following suffix format is used.
 [/RQ]
6.1.1.3 Requirements in the body text are highlighted with a border and light green background (may appear gray in
black and white printouts)
[Esss.ss-RQ-nnnnn-nn] Requirement text. [/RQ]
Table 1 Requirement Identifiers
Format Notation
Purpose
Esss.ss
SEMI standards specification identifier. Examples: E087.00, E087.01, E134.00
RQ
Indicates this is a requirement identifier.
nnnnn
Unique five-digit number within this specification. 90000-99999 are reserved for use by
SEMI.
.nn
Two-digit number that indicates version level of the requirement (.00 is used for the first
version of a requirement)
/RQ
Indicates the end of a requirement
6.1.2 Requirements in tables are delimited in one of two ways.
6.1.2.1 Where the requirement occupies an entire row in the table, the requirement ID is placed in column 1. No
"[/RQ]" is used to mark the end of the requirements text in this case. The table may also contain rows that are not
requirements. In this case, the column 1 cell is left blank.
6.1.2.2 Non-requirements text related to a requirements row may be included in an adjacent row. The relationship
between the rows is indicated by a broken line separating the two.
6.1.2.3 Where the requirement occupies only one cell, the text in the cell includes the requirement ID prefix and
suffix similar to requirements in the body text.
6.1.2.4 No cell in a table will contain both requirement and non-requirement text.
6.1.2.5 Cells that contain requirements are shaded light green.
6.1.2.6 Table 2 provides an example of requirements in a table. Note that in this example, the same requirement is
presented in two alternative formats. In practice, mixing the two approaches in the same table is not typically done.
Table 2 Example Table With Requirements
RequirementID
Esss.ss-RQ-nnnnn-nn
Statement
Additional Detail
There shall be no similar color in the
light panel.
The light shall be blue
The blue light is typically placed at the leftmost position in
the light panel.
[Esss.ss-RQ-nnnnn-nn]The light shall be blue. There shall
be no similar color in the light panel. [/RQ]
The blue light is typically placed at
the leftmost position in the light
panel.
6.1.3 Only text marked with the requirement identifier is a requirement of this specification.
6.1.3.1 Clarification, examples, and related recommendations may be provided near a requirement, but are not part
of the requirement.
6.1.3.2 Note that the word “should” is used in some non-requirements text, where it denotes a recommendation or a
best practice, not a requirement.
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document
development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
Page 3
Doc. 5411A  SEMI
LETTER (YELLOW) BALLOT
Document Number: 5411A
Date: 7/28/2017
Semiconductor Equipment and Materials International
3081 Zanker Road
San Jose, CA 95134-2127
Phone: 408.943.6900, Fax: 408.943.7943
DRAFT
6.1.4 Parent-child relationships of requirements are noted in the tables in APPENDIX 1. Where a parent
requirement includes conditions or selection criteria, these are passed to their children. For example, if a parent
requirement is stated to apply only to photolithography equipment, any child requirements also apply only to such
equipment. The condition need not be restated for each child requirement.
6.1.5 The following is the top level parent requirement of all others in this specification.
[Esss.00-RQ-00001-00] Conformance to this specification requires conformance to all other identified requirements
in this document as stated conditions apply. [/RQ]
6.2 State Model Methodology
6.2.1 This document uses the Harel state chart convention for describing dynamic operation of defined objects. The
outline of this convention is described in an attachment of SEMI E30. The official definition of this convention is
described in “State Charts: A Visual Formalism for Complex Systems” written by David Harel in Science of
Computer Programming 8, 1987.
6.2.2 The Harel convention does not have the concept of “creation” and “extinction” of state models for a
temporary entity. In this document, a filled, black circle denotes the entry to the state model (entity creation). If
needed, a circle with a filled, black circle inside is used for expressing extinction of an entity.
6.2.3 Transition tables are provided in conjunction with the state diagrams to describe explicitly the nature of each
state transition. A transition table contains columns for RequirementID, Transition number (#), Previous State,
Trigger, New State, and Actions (see Table 3). The “trigger” (column 4) for the transition occurs while in the
“previous” state. The “actions” (column 5) includes a combination of:
1. Actions taken upon exit of the previous state.
2. Actions taken upon entry of the new state.
3. Actions taken which are most closely associated with the transition.
6.2.3.1 When reporting to the host, no differentiation is made between these cases.
Table 3 Example Transition Table
Requirement ID
#
Previous State
Trigger
New State
Action(s)
6.2.4 A state model consists of a state model diagram, state definitions, and a state transition table.
[Esss.ss-RQ-00002-00] All state transitions in this standard, unless otherwise specified, shall correspond to
collection events. [/RQ]
6.2.5 A state model represents the host’s view of the equipment, and does not necessarily describe the internal
equipment operation.
[Esss.ss-RQ-00003-00] All state model transitions shall be mapped into the appropriate internal equipment events
that satisfy the requirements of those transitions. [/RQ]
6.2.6 In certain implementations, the equipment may enter a state and have already satisfied all of the conditions
required by the state models for transition to another state. In that case, the next state transition may occur
immediately.
6.3 Parameter Listings
6.3.1 Parameters that can be included with collection events corresponding to state model transitions are
represented in table form using the format of Table 4. Table 5 explains the contents of each column in the example
parameter table.
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document
development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
Page 4
Doc. 5411A  SEMI
LETTER (YELLOW) BALLOT
Document Number: 5411A
Date: 7/28/2017
Semiconductor Equipment and Materials International
3081 Zanker Road
San Jose, CA 95134-2127
Phone: 408.943.6900, Fax: 408.943.7943
DRAFT
Table 4 Example Parameter Table
Requirement ID
Data Parameter
Req
Description
Data Type
Table 5 Parameter Table Columns
Column
Description
RequirementID
Requirement identifier defined according to ¶6.1
Data Parameter
Name of the parameter.
Req
Whether the parameter is required:
Y – Required
N – Not Required
C – Conditional (required in specified circumstances)
Description
Explanation of the parameters contents. For data parameters, the
description includes whether the parameter is transient.
Data Type
The format of the parameter’s contents (integer, string, etc.)
6.3.2 A data parameter is noted as transient in the description column if its value is assured to be valid only on
specified collection events. A non-transient parameter has a valid value at any time and can be reported with any
collection event.
6.4 Service Message Representation
6.4.1 A message service definition table defines the specific set of message services for this specification.
Table 6 Example Message Service Definition Table
RequirementID
[Esss.ss-RQ-00xxx-00]
Message Service Name
Message name
Type
N or R
Description
Purpose of the message service
6.4.1.1 Type can be either N = Notification or R = Request. Notification type message services are initiated by a
service provider and the provider does not need to get a response from the service user or requester. Request
message services ask for data or an activity from the provider. Each request message expects a specific response
message to return data or confirm acceptance or completion of a command.
7 Implementation Overview
7.1 This section provides an overview of the Equipment Energy Saving Mode Communications (EESM) capability.
This overview refers to requirements defined later in the document. However, no statement in this overview section
is intended to specify a requirement. The overview is intended to provide a general understanding of the EESM
concepts so that the detailed requirements that follow can be more easily understood.
7.2 Basic Concepts
7.2.1 The Equipment Energy Saving Mode Communications capability provides the opportunity for the host and
various production equipment to cooperate in the reduction of energy use in the factory.
7.2.2 The amount of energy consumed by a production equipment varies over time. It is likely to consume the most
energy when processing material. However a significant amount of energy is still being consumed when the
equipment is idle. This specification addresses the situation when the production equipment is not processing
material.
7.2.3 In a semiconductor factory, not all production equipment are in constant use. However, with no instructions
to the contrary, production equipment must be ready for operation the instant that product appears on the load port.
This constant readiness comes at the price of energy consumption. This specification enables the factory to notify
the production equipment that the next material for it to process will not appear for an estimated time period. This
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document
development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
Page 5
Doc. 5411A  SEMI
LETTER (YELLOW) BALLOT
Document Number: 5411A
Date: 7/28/2017
Semiconductor Equipment and Materials International
3081 Zanker Road
San Jose, CA 95134-2127
Phone: 408.943.6900, Fax: 408.943.7943
DRAFT
allows the production equipment to reduce the rate of energy usage during this time. The SEMI Guideline S23 calls
this condition “sleep mode.”
7.2.4 It is assumed that idle equipment consume as little energy as possible while still maintaining the ability to
respond immediately to a command to process new material. It is expected that further reduction of energy usage
will come at the price of a time delay to achieve the lower rate of energy use and to recover from it.
7.2.4.1 Note that the user should also consider other potential negative effects from the use of sleep mode. For
example, thermal cycling of some components may shorten their lifetime.
7.2.5 Communication of the required wakeup time is important to the process of managing sleep mode. If the host
does not understand the time needed to wake up the equipment, then production delays could result when
insufficient time is allowed for the wake up process. It is assumed that the estimate of the wakeup time will be a
rough calculation of the longest wakeup time needed in normal operation (that is, excluding error cases). It is
understood that the actual wakeup time may vary significantly from the estimate.
7.2.5.1 Because of the complexity of some equipment’s energy saving schemes, there are a few cases where the
equipment might not be able to provide a valid estimate of the time needed to wake up. This specification allows for
that possibility under certain conditions (see Table 12). However, it is discouraged due to the host’s need for an
adequate wakeup time estimate.
7.2.5.2 In the case where production equipment does not provide estimated wakeup time, the implementer must
document any situations where the equipment cannot estimate the wake up time and provide guidance to users for
making their own estimate of wakeup time (see ¶9.3.4.2.4 ).
7.2.6 Figure 1 qualitatively illustrates the concepts addressed in this specification. This diagram shows a scenario
where the energy consumption rate is highest for processing, intermediate for idle, and lowest for sleep.
7.2.6.1 A “WakingUp” period is included during which the production equipment moves from sleep mode to idle
mode. Note that waking up may take significant time in some cases. The diagram also shows that energy
consumption rate during the WakingUp period can be significantly higher than for idle mode. This suggests that the
savings of a very short sleep time might not balance the extra energy used in waking up.
Figure 1
Relative Energy Consumption Rate At Different Equipment Operating States
7.2.6.2 It is the host’s responsibility to determine the minimum practical sleep time, based on information from the
equipment supplier. The equipment does not evaluate the potential savings when it receives a command to enter the
Sleep mode.
7.2.6.3 Figure 1 is not meant to be quantitatively accurate.
equipment selected and on other factors.
Results will vary depending on the production
7.3 Black Box Operation
7.3.1 This specification standardizes communications related to sleep mode. It does not attempt to constrain the
amount of energy savings or the methods used to achieve a reduction in the rate of energy consumption. This
specification allows the equipment supplier as much freedom as possible to optimize the implementation.
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document
development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
Page 6
Doc. 5411A  SEMI
LETTER (YELLOW) BALLOT
Document Number: 5411A
Date: 7/28/2017
Semiconductor Equipment and Materials International
3081 Zanker Road
San Jose, CA 95134-2127
Phone: 408.943.6900, Fax: 408.943.7943
DRAFT
7.3.2 Each production equipment is different. The major components included with production equipment may
vary even within the same make and model. Therefore, the EESM capability treats the equipment as a black box.
7.3.2.1 When a production equipment enters sleep mode, there is no mandated communication of which production
equipment components are affected by sleep mode.
7.3.2.2 Only the overall state of the equipment is considered. For example, if one chamber of a multi-chamber
production equipment is off-line for repair, but the remainder of the equipment is available for normal operation,
then, when idle, that equipment can be placed in sleep mode.
7.4 Coordination of Remote and Local Commands
7.4.1 Some production equipment may provide the local user with the capability to control sleep mode. In this case,
the implementer should consider potential conflicts.
7.4.2 This specification defines the Equipment Energy Saving state model to track the EESM capability. This state
model provides data collection events that allow the host to track changes initiated at the equipment.
7.4.3 It is possible for the state of the production equipment to change without the knowledge of the host. This may
be due to either the host or the equipment being off-line. As long as the equipment control system is operational, it
is responsible to continue updating the Equipment Energy Saving state, even when there are no communications.
7.4.3.1 There is a non-transient parameter named EnergySavingState that provides the current state from the
Equipment Energy Saving state model. When communications are restored, this parameter can be collected by the
host from the equipment on any event or by request. By means of this parameter, the equipment can synchronize
with the equipment’s Equipment Energy Saving state as needed.
7.5 Sleep Levels
7.5.1 When a production equipment enters sleep mode, it is expected to reduce the rate of energy use in a consistent
way. This sleep level would be anticipated to have a predictable rate of energy use and a consistent pattern of wake
up times.
7.5.2 All production equipment to which this specification applies are expected to support at least one sleep level.
SEMI S23 suggests that more than one sleep level within the sleep mode might exist for a production equipment.
For example, when a production equipment is allowed more time for waking up, a lower energy use rate might be
feasible.
7.5.2.1 Different sleep levels are anticipated to have different rates of energy use and different wake times.
7.5.2.2 While this specification does not require the support of multiple sleep levels, it does provide a mechanism
for reporting sleep level if the equipment supports that concept.
7.5.3 Where multiple sleep levels are supported, the production equipment selects the sleep level to be utilized in
each case. To aid the selection of sleep level, the host provides an estimated time that sleep mode will be in effect.
In turn, each time sleep mode is entered, the production equipment tells the host the estimated required time for
waking up.
7.6 Interactions with EESM
7.6.1 While in the sleep mode, the production equipment may receive commands unrelated to EESM. For example
it might receive requests to create process jobs (SEMI E40) or control jobs (SEMI E94). This specification does not
directly limit the acceptance of such commands.
7.6.2 However, the equipment is not able to perform its intended function when in sleep mode. The process of
reducing the rate of energy use will place many equipment resources in a low-power or powered off state. These
resources would not be available to participate in equipment activities.
7.6.3 A process job or control job might be accepted and queued, but it cannot start until the needed resources
become available. This would require the jobs to wait until the equipment wakes up and returns to the idle mode.
7.6.4 In the idle mode, the equipment’s resources would be available. This would allow the job execution to begin
(if all other pre-conditions are met) and thus move the equipment to the process mode.
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document
development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
Page 7
Doc. 5411A  SEMI
LETTER (YELLOW) BALLOT
Document Number: 5411A
Date: 7/28/2017
Semiconductor Equipment and Materials International
3081 Zanker Road
San Jose, CA 95134-2127
Phone: 408.943.6900, Fax: 408.943.7943
DRAFT
7.6.5 The same logic would apply to carrier delivery/removal and any other activities that require equipment
resources.
7.7 Communication
7.7.1 The message services in this specification are defined independently of the protocol to be used. Additional
specification of how these message services and the related data are mapped to a specific protocol is necessary in
order to implement the EESM capability. This mapping may be provided in a separate specification. For example,
SEMI E87 defines behavior and message services related to carrier management, while E87.1 specifies the mapping
of E87 message services and data to the SECS-II protocol.
7.8 Simple Scenario
7.8.1 EESM provides a very simple base scenario for managing sleep mode. It begins when the production
equipment is idle.
 The factory determines that the production equipment is not needed for production or other purposes for a time
period sufficient to support energy savings.
 The host sends a Sleep command to the production equipment, specifying the estimated time available for sleep
mode.
 The production equipment accepts the Sleep command.
 The production equipment determines the most appropriate sleep level (if more than one exists) and estimates
the time that will be needed to wake up 1.
 The production equipment transitions to sleep mode. An event reports the transition with the estimated wake
time. Energy reduction begins. The production equipment remains in sleep mode until told to wake up
(assuming no fault occurs).
 The host determines the actual time that the production equipment will be needed (e.g., for processing).
 Allowing enough lead time for the production equipment to wake up, the host issues a WakeUp command to the
production equipment.
 The production equipment begins the waking up process.
 When the production equipment is ready for normal use, it transitions to the Idle state and reports the transition
to the host.
8 Prerequisites
8.1 The Equipment Energy Saving Mode Communications capability requires a communication protocol or
protocols to support exchange of messages between host and production equipment to manage energy reduction.
The specific communication protocol is not specified in this document.
[Esss.ss-RQ-00004-00] Production equipment shall implement a communications protocol or protocols capable of
transporting the message services defined in this specification. [/RQ]
8.2 Required Standards — There are no specific standards required as prerequisites. Some SEMI standards can be
used to meet certain prerequisites. Support for these standards is not mandatory for compliance with this standard.
9 Requirements
9.1 The requirements for this specification can be divided into two parts: behavior and message services. The
behavior is specified in the form of a state model as specified in ¶9.2 . Message services are specified in ¶9.3 .
[Esss.ss-RQ-00005-00] The Equipment Energy Saving Mode Communications capability shall not affect the
production equipment’s ability to communicate or to accept and process commands. [/RQ]
1
Some equipment will have only one sleep level and a fixed estimated wake up time.
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document
development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
Page 8
Doc. 5411A  SEMI
LETTER (YELLOW) BALLOT
Document Number: 5411A
Date: 7/28/2017
Semiconductor Equipment and Materials International
3081 Zanker Road
San Jose, CA 95134-2127
Phone: 408.943.6900, Fax: 408.943.7943
DRAFT
9.1.1 The production equipment’s supervisory control system is expected to be unaffected by the EESM capability.
However, the production equipment’s ability to perform tasks requiring physical equipment resources will be
affected in some situations.
9.2 Equipment Energy Saving State Model
9.2.1 This state model specifies the production equipment behavior related to EESM. Figure 2 shows the diagram
of the Equipment Energy Saving state model. The states are described in ¶9.2.2 and the transitions are specified in
Table 7.
[Esss.ss-RQ-00006-00] Production equipment shall implement one instance of the Equipment Energy Saving state
model according to the descriptions of its states, transitions, and associated collection events and data parameters.
[/RQ]
1
C
Process
7
10
1a
6
1b
Idle
9
2
5
11
Initiating
Sleep
WakingUp
3
NotReadyFor
NormalOperation
4
8
12
Sleep
NormalOperation
EquipmentEnergySaving
Figure 2
Equipment Energy Saving State Model
9.2.2 Equipment Energy Saving States
9.2.2.1 The following subsections describe each state defined for the Equipment Energy Saving state model.
9.2.2.2 The current state of the production equipment with respect to the Equipment Energy Saving state model can
be obtained using the data parameter EnergySavingState as specified in ¶9.3 .
9.2.2.3 NoState
9.2.2.3.1 The state model is not actively tracked when the equipment control system is not operational (for example,
when the equipment is powered down). This condition is referred to as “NoState”. NoState is not a genuine state.
9.2.2.3.2 The solid black dot shown in Figure 2 is the entry point for the state model from the NoState condition to
the actively tracked states contained in the EquipmentEnergySaving state (see transition #1).
9.2.2.3.3 The solid black dot inside a circle represents the exit point from actively tracked states to the NoState
condition (see transition #10).
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document
development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
Page 9
Doc. 5411A  SEMI
LETTER (YELLOW) BALLOT
Document Number: 5411A
Date: 7/28/2017
Semiconductor Equipment and Materials International
3081 Zanker Road
San Jose, CA 95134-2127
Phone: 408.943.6900, Fax: 408.943.7943
DRAFT
9.2.2.4 EquipmentEnergySaving State
[Esss.ss-RQ-00007-00] The EquipmentEnergySaving state is the top-level super-state that holds all the sub-states of
the state model. [/RQ]
9.2.2.4.1 The
sub-states
of
NotReadyForNormalOperation.
the
EquipmentEnergySaving
state
are
NormalOperation
and
9.2.2.4.2 In the EquipmentEnergySaving state the production equipment provides the Equipment Energy Saving
Mode Communications capability (see definition in ¶5.2.2 ).
[Esss.ss-RQ-00008-00] The EquipmentEnergySaving state shall be in effect only when the production equipment is
powered up and the equipment control system is operational. [/RQ]
9.2.2.4.3 Note that RQ-00008 requires that the production equipment track the EquipmentEnergySaving state and
its sub-states independent of whether the production equipment is currently communicating with the host.
9.2.2.5 NormalOperation State
[Esss.ss-RQ-00009-00] The NormalOperation state is a substate of the EquipmentEnergySaving state. [/RQ]
9.2.2.5.1 The substates of the NormalOperation state are Process, Idle, InitiatingSleep, Sleep, and WakingUp.
9.2.2.5.2 The NormalOperation state represents the time the production equipment is capable of performing its
intended function. While the equipment is capable, it may not be ready to perform a new task if it is busy (see
Process state) or in a state associated with a reduced rate of energy use (see Sleep, InitiatingSleep, and WakingUp
states).
9.2.2.6 Process State
[Esss.ss-RQ-00010-00] The Process state is a substate of NormalOperation. [/RQ]
9.2.2.6.1 When in the Process state, the production equipment is busy performing its intended function. This
includes operation on product or non-product material or with no material.
9.2.2.6.2 The Process state represents that the equipment is in the process mode (see definition in ¶5.2.5 ).
9.2.2.6.3 In the Process state, equipment resources are busy and unavailable for sleep. Therefore, the EESM
capability to initiate sleep is not available.
[Esss.ss-RQ-00011-00] When in the Process state, production equipment shall reject all Sleep commands received.
[/RQ]
[Esss.ss-RQ-00012-00] When in the Process state, production equipment shall reject all WakeUp commands
received. [/RQ]
9.2.2.7 Idle State
[Esss.ss-RQ-00013-00] The Idle state is a sub-state of NormalOperation. [/RQ]
9.2.2.7.1 In the Idle state the production equipment is ready for all normal operations.
9.2.2.7.2 The Idle state represents that the equipment is in the idle mode (see definition in ¶5.2.4 ).
9.2.2.7.3 Production equipment in the Idle state can accept a Sleep command in most circumstances. See the
definition of the Sleep command in ¶9.3.2 for more detail.
[Esss.ss-RQ-00014-00] When in the Idle state, production equipment shall accept any valid Sleep command
received. [/RQ]
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document
development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
Page 10
Doc. 5411A  SEMI
LETTER (YELLOW) BALLOT
Document Number: 5411A
Date: 7/28/2017
Semiconductor Equipment and Materials International
3081 Zanker Road
San Jose, CA 95134-2127
Phone: 408.943.6900, Fax: 408.943.7943
DRAFT
[Esss.ss-RQ-00015-00] When in the Idle state, production equipment shall reject all WakeUp commands received.
[/RQ]
9.2.2.8 InitiatingSleep State
[Esss.ss-RQ-00016-00] The InitiatingSleep state is a substate of NormalOperation. [/RQ]
9.2.2.8.1 While in the InitiatingSleep state, the production equipment is performing the activities necessary to
achieve the targeted reduction in the rate of energy use.
[Esss.ss-RQ-00017-00] When in the InitiatingSleep state, production equipment shall reject all Sleep commands
received. [/RQ]
9.2.2.8.2 In most equipment, the process that takes place in the InitiatingSleep state will be brief. Therefore, it is
typically not necessary to allow a WakeUp command to interrupt this process. However, in some cases, the process
may be long. This would motivate the acceptance of the WakeUp command in this state. The implementer should
determine whether this feature is needed.
[Esss.ss-RQ-00018-00] When in the InitiatingSleep state, production equipment are allowed to accept WakeUp
commands. If the production equipment accepts WakeUp commands when in this state, it shall accept all WakeUp
commands when in the InitiatingSleep state. [/RQ]
9.2.2.9 Sleep State
[Esss.ss-RQ-00019-00] The Sleep state is a substate of NormalOperation. [/RQ]
9.2.2.9.1 While in the Sleep state, the production equipment is operating at a reduced rate of energy consumption.
9.2.2.9.2 The Sleep state represents that the equipment is in the sleep mode (see definition in ¶5.2.7 ).
[Esss.ss-RQ-00020-00] Under normal conditions, the energy savings achieved in the Sleep state shall not cause the
need for external assistance in order to return to the idle state or the need for requalification, calibration or other
maintenance. [/RQ]
9.2.2.9.3 The production equipment is responsible for determining and achieving the optimal energy savings
possible within the limits implied by the parameters specified in the Sleep command.
9.2.2.9.4 The sleep level can be modified by sending a new Sleep command to the production equipment while it is
in the Sleep state.
[Esss.ss-RQ-00021-00] When in the Sleep state, production equipment shall accept any valid Sleep command
received. The production equipment shall adjust its sleep level according to the command parameters. [/RQ]
9.2.2.9.5 In some cases, the new Sleep command will not change the sleep level of the production equipment (see
SleepLevel in Table 12) or the time needed to wake up (see EstimatedWakeDuration in Table 12). In this case, the
production equipment will remain in the Sleep state and no event message will result.
9.2.2.9.6 For the case where the new Sleep command does result in a change to the sleep level or the
EstimatedWakeDuration, see the specification for state transition 12.
[Esss.ss-RQ-00022-00] When in the Sleep state, production equipment shall accept any valid WakeUp command
received. [/RQ]
9.2.2.10 WakingUp State
[Esss.ss-RQ-00023-00] The WakingUp state is a substate of NormalOperation. [/RQ]
9.2.2.10.1 The WakingUp state encompasses the time the production equipment spends to move from its reduced
rate of energy consumption back to the Idle state where it is ready for normal operation.
[Esss.ss-RQ-00024-00] The production equipment shall remain in the WakingUp state until it reaches the conditions
necessary for its intended function or an equipment failure is encountered. [/RQ]
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document
development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
Page 11
Doc. 5411A  SEMI
LETTER (YELLOW) BALLOT
Document Number: 5411A
Date: 7/28/2017
Semiconductor Equipment and Materials International
3081 Zanker Road
San Jose, CA 95134-2127
Phone: 408.943.6900, Fax: 408.943.7943
DRAFT
9.2.2.10.2 The process of WakingUp concludes with the restoration of the normal Idle state rate of energy use. The
rate of energy use during the WakingUp period might exceed that of the Idle state.
[Esss.ss-RQ-00025-00] When in the WakingUp state, production equipment shall reject all Sleep commands
received. [/RQ]
[Esss.ss-RQ-00026-00] When in the WakingUp state, production equipment shall reject all WakeUp commands
received. [/RQ]
9.2.2.11 NotReadyForNormalOperation State
[Esss.ss-RQ-00027-00] The NotReadyForNormalOperation state is a sub-state of the EquipmentEnergySaving state.
[/RQ]
[Esss.ss-RQ-00028-00] The NotReadyForNormalOperation state includes all situations where the equipment control
system is operational, but the production equipment is not available for normal operation. If the equipment has no
such situations, this state is not required. [/RQ]
9.2.2.11.1 The equipment may be in the NotReadyForNormalOperation state due to an equipment detected problem
or due to a user initiated activity.
9.2.2.11.2 Although the energy consumption rate of the production equipment while in the
NotReadyForNormalOperation state might be reduced under some conditions, such reductions are not in the scope
of this specification and are not covered by the Equipment Energy Saving state model.
9.2.3 Equipment Energy Saving Transitions
9.2.3.1 Table 7 defines the state transitions for the Equipment Energy Saving state model.
9.2.3.2 Note that RQ-00002 in ¶6.2.4 requires that there be a collection event for each transition defined in Table 7.
Table 7 Equipment Energy Saving State Transition Table
Requirement ID
#
Previous
State
Trigger
Production equipment
initialization is completed
and the control system is
operational
[Esss.ss-RQ-00029-00]
1 NoState
Equipment which have no
need of the NotReadyFor
NormalOperation state are
not required to provide the
transition to that state.
New
State
Conditional:
1a) Idle
or
1b) NotReadyFor
NormalOperation
Action(s)
Conditions for selection of
new state are equipment
specific. The production
equipment shall choose the
appropriate new state.
Required event data
parameters:
EnergySavingState
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document
development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
Page 12
Doc. 5411A  SEMI
LETTER (YELLOW) BALLOT
Document Number: 5411A
Date: 7/28/2017
Semiconductor Equipment and Materials International
3081 Zanker Road
San Jose, CA 95134-2127
Phone: 408.943.6900, Fax: 408.943.7943
[Esss.ss-RQ-00030-00]
#
Previous
State
2 Idle
New
State
Trigger
Production equipment
accepts Sleep command
Action(s)
InitiatingSleep
Production equipment
determines the optimal sleep
level and begins process of
reducing energy
consumption.
Required event data
parameters:
EnergySavingState
Sleep
Required event data
parameters:
EnergySavingState
EstimatedWakeDuration
SleepLevel (if defined)
WakingUp
Production equipment
begins the process of
moving from reduced energy
consumption to a condition
where normal operation is
possible.
Required event data
parameters:
EnergySavingState
EstimatedWakeDuration
Idle
Required event data
parameters:
EnergySavingState
WakeDuration
Process
Required event data
parameters:
EnergySavingState
The production equipment
could also provide for a
Sleep command to be issued
via its user interface
[Esss.ss-RQ-00031-00]
[Esss.ss-RQ-00032-00]
3 InitiatingSleep
4 Sleep
Production equipment
achieves the intended
reduction in the rate of
energy use.
WakeUp command is
accepted by the production
equipment
The production equipment
could also provide for a
WakeUp command to be
issued via its user interface.
[Esss.ss-RQ-00033-00]
5 WakingUp
WakeUp process has
completed and production
equipment is ready for
normal operational
[Esss.ss-RQ-00034-00]
6 Idle
Production equipment
begins performing its
intended function
7 Process
Production equipment
completes current
Idle
performance of its intended
function
[Esss.ss-RQ-00035-00]
Required event data
parameters:
EnergySavingState
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document
development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
Page 13
Doc. 5411A  SEMI
LETTER (YELLOW) BALLOT
Requirement ID
DRAFT
Document Number: 5411A
Date: 7/28/2017
Semiconductor Equipment and Materials International
3081 Zanker Road
San Jose, CA 95134-2127
Phone: 408.943.6900, Fax: 408.943.7943
[Esss.ss-RQ-00036-00]
#
Previous
State
New
State
Trigger
The user or the production
equipment has caused the
equipment to become not
ready for normal operation,
but the equipment remains
powered up and the control
Required event data
NotReadyFor
parameters:
8 NormalOperation system operational.
NormalOperation
EnergySavingState
Equipment which have no
need of the NotReadyFor
NormalOperation state are
not required to provide this
transition.
The production equipment
or user has determined that
the equipment is ready for
normal operation.
[Esss.ss-RQ-00037-00]
9
[Esss.ss-RQ-00038-00]
10
NotReadyFor
NormalOperation Equipment which have no
need of the NotReadyFor
NormalOperation state are
not required to provide this
transition.
Equipment
EnergySaving
Idle
The production equipment
powered down or the control NoState
system is not operational.
A Sleep command is
accepted by the production
equipment.
[Esss.ss-RQ-00039-00]
Action(s)
11 InitiatingSleep
Required event data
parameters:
EnergySavingState
No collection event is
associated with this
transition.
WakingUp
Required event data
parameters:
EnergySavingState
EstimatedWakeDuration
InitiatingSleep
Production equipment
initiates the change to the
sleep level.
Required event data
parameters:
EnergySavingState
This transition is allowed but
not required. See also RQ00018
The production equipment
could also provide for a
Sleep command to be issued
via its user interface
Production equipment
accepts Sleep command and
determines that a change is
required to the sleep level or
the EstimatedWakeDuration.
[Esss.ss-RQ-00040-00]
12 Sleep
This transition is required
only in the case where the
production equipment
supports multiple sleep
levels.
The production equipment
could also provide for a
Sleep command to be issued
via its user interface.
Note that in the case where
the EstimatedWakeDuration
and sleep level do not
change, this transition does
not occur and no event is
sent.
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document
development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
Page 14
Doc. 5411A  SEMI
LETTER (YELLOW) BALLOT
Requirement ID
DRAFT
Document Number: 5411A
Date: 7/28/2017
Semiconductor Equipment and Materials International
3081 Zanker Road
San Jose, CA 95134-2127
Phone: 408.943.6900, Fax: 408.943.7943
DRAFT
9.2.3.3 Transition 1 is a conditional transition with two possible endpoints. RQ-00029 and Figure 2 designate the
two variations as 1a and 1b for those messaging systems that require separate naming for the two.
9.2.3.4 As noted in Transitions 2, 4, 11, and 12 above, implementers may choose to allow a user to initiate sleep or
wakeup at the production equipment’s user interface.
[Esss.ss-RQ-00041-00] If the production equipment allows a user at the equipment user interface to initiate sleep or
wakeup, then that sleep capability shall be governed by the Equipment Energy Saving state model. [/RQ]
9.3 Equipment Energy Saving Message Services
9.3.1 The three message services required to support EESM are listed in Table 8.
Table 8 Energy Saving Message Services
RequirementID
Message Service Name
Type
Description
[Esss.ss-RQ-00042-00]
Sleep
R
Command from the host for the production equipment to
transition to the Sleep state for the purpose of reduce energy
consumption
[Esss.ss-RQ-00043-00]
WakeUp
R
Command from the host for the production equipment to
transition to the Idle state via the WakingUp state
[Esss.ss-RQ-00044-00]
EventReport
N
Notification from the production equipment to the host that
the Equipment Energy Saving state model has transitioned to
a new state
9.3.2 Sleep Command
9.3.2.1 The Sleep command requests the production equipment to transition from the Idle state to the Sleep state
(see ¶9.2.2.8 and Transition 2 in Table 7. The equipment can accept the Sleep command only in selected states of
the Equipment Energy Saving state model. For more detail, see the descriptions of the individual states in ¶9.2.2 .
9.3.2.2 The Sleep command includes one input parameter, EstimatedSleepPeriod, defined in Table 9. This value is
provided to allow the production equipment to select the optimal sleep level.
9.3.2.2.1 EstimatedSleepPeriod is provided to the production equipment for planning purposes only.
production equipment is not intended to take any action as a result of the expiration of this time period.
The
9.3.2.3 The response to the Sleep command indicates whether the command is accepted or rejected. Acceptance
does not mean that a reduced rate of energy use has been reached, but rather that the change has been initiated. If
rejected, the AcknowledgeCode (see Table 9) returns the reason for rejection.
9.3.2.3.1 The “Cannot perform now” reject code is intended to cover the case where the Equipment Energy Saving
state model is in a state which does not allow this command.
Table 9 Sleep Command Service Parameters
RequirementID
Parameter
[Esss.ss-RQ-00045-00]
EstimatedSleepPeriod
[Esss.ss-RQ-00046-00]
In / Out
In
Description
Format
Host estimate of the amount of time (in minutes)
until the production equipment will be needed to
perform its intended function.
Integer
If the EstimatedSleepPeriod is zero, it instructs
the production equipment to choose a default
sleep level. The implementer shall document the
sleep level that will result in this case.
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document
development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
Page 15
Doc. 5411A  SEMI
LETTER (YELLOW) BALLOT
Document Number: 5411A
Date: 7/28/2017
Semiconductor Equipment and Materials International
3081 Zanker Road
San Jose, CA 95134-2127
Phone: 408.943.6900, Fax: 408.943.7943
[Esss.ss-RQ-00047-00]
Parameter
AcknowledgeCode
In / Out
Description
Format
Acknowledgement of the success or reason for
rejection of the Sleep command. Codes:
Command accepted
Cannot perform now
Invalid parameter
Out
Protocol
specific
9.3.2.4 The information specified in RQ-00046 should be included in the equipment documentation for the interface
that implements this standard.
9.3.3 WakeUp Command
9.3.3.1 The WakeUp command requests that the production equipment begin the process of transitioning from the
Sleep state back to the Idle state via the WakingUp state (see Transition 4 in Table 7). There are no input
parameters for the WakeUp command.
9.3.3.2 The response to the WakeUp command indicates whether the command is accepted or rejected. If rejected,
the AcknowledgeCode (see Table 10) gives the reason for rejection.
9.3.3.3 The “Cannot perform now” reject code is intended to cover the case where the Equipment Energy Saving
state model is in a state which does not allow this command.
Table 10 WakeUp Command Service Parameters
RequirementID
[Esss.ss-RQ-00048-00]
Parameter
AcknowledgeCode
In / Out
Out
Description
Format
Acknowledgement of the success or reason for
rejection of the WakeUp command. Codes:
Command accepted
Cannot perform now
Protocol
specific
9.3.4 Collection Event Reporting
[Esss.ss-RQ-00049-00] An event report message shall notify the host of every occurrence of each collection event if
reporting is enabled by the host. The host shall have the capability to disable and enable the reporting of selected
collection events. [/RQ]
9.3.4.1 The mechanism for enabling and disabling the reporting of collection events is protocol specific.
Table 11 Event Report Service Parameters
RequirementID
Parameter
Description
Format
[Esss.ss-RQ-00050-00]
EventID
Identifier for the collection event.
Protocol dependent
[Esss.ss-RQ-00051-00]
TimeStamp
Time at which the collection event occurred
Protocol dependent
[Esss.ss-RQ-00052-00]
DataParameters
List of data parameters (if any) selected by the
user to be included with the event
Protocol dependent
9.3.4.2 Event Data Parameters
[Esss.ss-RQ-00053-00] A mechanism shall be provided to allow the host to select the data parameters reported for
each collection event. [/RQ]
9.3.4.2.1 The mechanism for selecting the data parameters to be reported with each collection event is protocol
specific.
9.3.4.2.2 The data parameters defined in Table 12 are intended to be made available for the reporting of collection
events corresponding to transitions of the Equipment Energy Saving state model. See Table 7 (Action(s) column)
for specification of which data parameters are required to be available for the collection event corresponding to each
transition in the Equipment Energy Saving state model.
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document
development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
Page 16
Doc. 5411A  SEMI
LETTER (YELLOW) BALLOT
RequirementID
DRAFT
Document Number: 5411A
Date: 7/28/2017
Semiconductor Equipment and Materials International
3081 Zanker Road
San Jose, CA 95134-2127
Phone: 408.943.6900, Fax: 408.943.7943
DRAFT
Table 12 EESM Event Data Parameters
Requirement ID
[Esss.ss-RQ-00054-00]
Data Parameter
EstimatedWakeDuration
Req
Description
Estimated period of time in minutes that
will be required for the production
equipment to remain in the WakingUp state
while restoring the Idle state conditions in
effect prior to sleep. This time may vary
depending on the sleep level. This is a
transient parameter.
Y
Data Type
Integer
[Esss.ss-RQ-00055-00]
EstimatedWakeDuration = 0 indicates that
the production equipment cannot estimate
wakeup time with an acceptable level of
confidence.
A zero value is not allowed if the
production equipment supports multiple
sleep levels.
[Esss.ss-RQ-00056-00]
C
Level of reduction in the rate of energy use
selected for this episode (sleep level).
Values are equipment specific and defined
by the implementer. This is a transient
parameter.
This parameter is required only if the
production equipment supports multiple
sleep levels.
String
Y
Amount of time in minutes that the
production equipment spent in the
WakingUp state in this instance. This is a
transient parameter.
Integer
Y
Current state of the production equipment
with respect to the Energy Saving state
model. This is a non-transient parameter.
When included in an event report related to
a transition of the Equipment Energy
Saving state model, it shall reflect the new
state of the transition as shown in Table 7.
Protocol
dependent
[Esss.ss-RQ-00057-00]
[Esss.ss-RQ-00058-00]
SleepLevel
WakeDuration
EnergySavingState
9.3.4.2.3 While EstimatedWakeDuration can be a zero value in some cases, the implementer should strive to
provide a non-zero value for this parameter. If the host does not know the required time for waking up, then
insufficient allowance may be made for the wakeup process and production delays could result. Thus, for
equipment where a zero value may be provided, an explanation is needed.
[Esss.ss-RQ-00059-00] If the production equipment is designed to return a zero value for EstimatedWakeDuration
in any or all cases, then the implementer is required to document the reason(s) that the equipment cannot estimate
the WakeDuration and directions for users to make their best estimate of the WakeDuration. [/RQ]
9.3.4.2.4 The information specified in RQ-00059 should be included in the equipment documentation for the
interface that implements this standard.
10 Test Methods
10.1 No test methods are defined for this specification
11 Related Documents
11.1 D. Harel. Statecharts: A visual formalism for complex systems. Science of Computer Programming, 8:231--274,
1987.
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document
development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
Page 17
Doc. 5411A  SEMI
LETTER (YELLOW) BALLOT
Document Number: 5411A
Date: 7/28/2017
Semiconductor Equipment and Materials International
3081 Zanker Road
San Jose, CA 95134-2127
Phone: 408.943.6900, Fax: 408.943.7943
DRAFT
APPENDIX 1
STATEMENT OF COMPLIANCE
NOTICE: The material in this Appendix is an official part of SEMI [designation number] and was approved by full
letter ballot procedures on [A&R approval date].
A1-1 Statement of Compliance
[Esss.ss-RQ-90001-00] A supplier shall submit a completed Capability Requirements Compliance Table per Table
A1-1, Esss.ss Capability Requirements, when reporting on compliance of equipment or an application to this
specification to a customer. [/RQ]
A1-2 Compliance Table: Capability Requirements
[Esss.00-RQ-90002-00] Each supplier shall document compliance to Esss.ss capabilities requirements per Table
A1-1, Esss.ss Capability Requirements, with the following values: C – Comply, NC – Not Comply, WC – Will
Comply, NA – Not Applicable. [/RQ]
[Esss.00-RQ-90003-00] The NA code for Not Applicable shall be used only in the case where a requirement is
conditional and the condition evaluates to render the requirement not applicable for the current implementation.
[/RQ]
A1-2.1 Child requirements inherit the conditional status of the parent requirement. Where a parent requirement is
marked NA, the child requirements should also be marked NA.
[Esss.00-RQ-90004-00] An explanation for NC shall be provided by the supplier. [/RQ]
A1-2.2 If WC is assigned, supplier should provide a date for implementation.
Table A1-1 Esss.ss Capability Requirements
Compliance
Section
Requirement ID
Parent Requirement ID
Condition / Selection Criteria
(C/NC/WC)
Capability: Statement of Compliance
A1-1
Esss.ss-RQ-90001-00
-
-
A1-2
Esss.ss-RQ-90002-00
Esss.ss –RQ-90001-00
-
A1-2
Esss.ss-RQ-90003-00
Esss.ss -RQ-90002-00
-
A1-2
Esss.ss-RQ-90004-00
Esss.ss -RQ-90002-00
-
A1-3
Esss.ss-RQ-90005-00
Esss.ss -RQ-90002-00
-
Capability: 6 Conventions
6.1.5
Esss.ss-RQ-00001-00
-
-
6.2.4
Esss.ss-RQ-00002-00
Esss.ss-RQ-00001-00
-
6.2.5
Esss.ss-RQ-00003-00
Esss.ss-RQ-00001-00
-
Esss.ss-RQ-00001-00
-
Capability: 8 Prerequisites
8.1
Esss.ss-RQ-00004-00
Capability: 9 Requirements
Capability: 9.2 Equipment Energy Saving State Model
9.1
Esss.ss-RQ-00005-00
Esss.ss-RQ-00001-00
-
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document
development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
Page 18
Doc. 5411A  SEMI
LETTER (YELLOW) BALLOT
Document Number: 5411A
Date: 7/28/2017
Semiconductor Equipment and Materials International
3081 Zanker Road
San Jose, CA 95134-2127
Phone: 408.943.6900, Fax: 408.943.7943
DRAFT
Compliance
Section
Requirement ID
Parent Requirement ID
Condition / Selection Criteria
(C/NC/WC)
9.2
Esss.ss-RQ-00006-00
Esss.ss-RQ-00001-00
-
Capability: 9.2.2 Equipment Energy Saving States
9.2.2
Esss.ss-RQ-00007-00
Esss.ss-RQ-00006-00
-
9.2.2
Esss.ss-RQ-00008-00
Esss.ss-RQ-00007-00
-
9.2.2
Esss.ss-RQ-00009-00
Esss.ss-RQ-00007-00
-
9.2.2
Esss.ss-RQ-00010-00
Esss.ss-RQ-00009-00
-
9.2.2
Esss.ss-RQ-00010-00
Esss.ss-RQ-00009-00
-
9.2.2
Esss.ss-RQ-00011-00
Esss.ss-RQ-00010-00
-
9.2.2
Esss.ss-RQ-00012-00
Esss.ss-RQ-00010-00
-
9.2.2
Esss.ss-RQ-00013-00
Esss.ss-RQ-00010-00
-
9.2.2
Esss.ss-RQ-00014-00
Esss.ss-RQ-00013-00
-
9.2.2
Esss.ss-RQ-00015-00
Esss.ss-RQ-00013-00
-
9.2.2
Esss.ss-RQ-00016-00
Esss.ss-RQ-00009-00
-
9.2.2
Esss.ss-RQ-00017-00
Esss.ss-RQ-00016-00
-
9.2.2
Esss.ss-RQ-00018-00
Esss.ss-RQ-00016-00
-
9.2.2
Esss.ss-RQ-00019-00
Esss.ss-RQ-00009-00
-
9.2.2
Esss.ss-RQ-00020-00
Esss.ss-RQ-00019-00
-
9.2.2
Esss.ss-RQ-00021-00
Esss.ss-RQ-00019-00
-
9.2.2
Esss.ss-RQ-00022-00
Esss.ss-RQ-00019-00
-
9.2.2
Esss.ss-RQ-00023-00
Esss.ss-RQ-00009-00
-
9.2.2
Esss.ss-RQ-00024-00
Esss.ss-RQ-00023-00
-
9.2.2
Esss.ss-RQ-00025-00
Esss.ss-RQ-00023-00
-
9.2.2
Esss.ss-RQ-00026-00
Esss.ss-RQ-00023-00
-
9.2.2
Esss.ss-RQ-00027-00
Esss.ss-RQ-00007-00
-
9.2.2
Esss.ss-RQ-00028-00
Esss.ss-RQ-00027-00
NotReadyForNormOp =
Capability: 9.2.3 Equipment Energy Saving Transitions
9.2.3
Esss.ss-RQ-00029-00
Esss.ss-RQ-00006-00
NotReadyForNormOp =
9.2.3
Esss.ss-RQ-00030-00
Esss.ss-RQ-00006-00
-
9.2.3
Esss.ss-RQ-00031-00
Esss.ss-RQ-00006-00
MultipleSleepLevels=
9.2.3
Esss.ss-RQ-00032-00
Esss.ss-RQ-00006-00
-
9.2.3
Esss.ss-RQ-00033-00
Esss.ss-RQ-00006-00
-
9.2.3
Esss.ss-RQ-00034-00
Esss.ss-RQ-00006-00
-
9.2.3
Esss.ss-RQ-00035-00
Esss.ss-RQ-00006-00
-
9.2.3
Esss.ss-RQ-00036-00
Esss.ss-RQ-00006-00
NotReadyForNormOp =
9.2.3
Esss.ss-RQ-00037-00
Esss.ss-RQ-00006-00
NotReadyForNormOp =
9.2.3
Esss.ss-RQ-00038-00
Esss.ss-RQ-00006-00
-
9.2.3
Esss.ss-RQ-00039-00
Esss.ss-RQ-00006-00
WakeFromInitSleep =
9.2.3
Esss.ss-RQ-00040-00
Esss.ss-RQ-00006-00
MultipleSleepLevels =
9.2.3
Esss.ss-RQ-00041-00
Esss.ss-RQ-00006-00
UserInterfaceSleep =
Capability: 9.3 Equipment Energy Saving Services
9.3
Esss.ss-RQ-00042-00
Esss.ss-RQ-00001-00
-
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document
development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
Page 19
Doc. 5411A  SEMI
LETTER (YELLOW) BALLOT
Document Number: 5411A
Date: 7/28/2017
Semiconductor Equipment and Materials International
3081 Zanker Road
San Jose, CA 95134-2127
Phone: 408.943.6900, Fax: 408.943.7943
DRAFT
Compliance
Section
Requirement ID
Parent Requirement ID
Condition / Selection Criteria
(C/NC/WC)
9.3
Esss.ss-RQ-00043-00
Esss.ss-RQ-00001-00
-
9.3
Esss.ss-RQ-00044-00
Esss.ss-RQ-00001-00
-
Capability: 9.3.2 Sleep Command
9.3
Esss.ss-RQ-00045-00
Esss.ss-RQ-00042-00
-
9.3
Esss.ss-RQ-00046-00
Esss.ss-RQ-00045-00
-
9.3
Esss.ss-RQ-00047-00
Esss.ss-RQ-00042-00
-
Esss.ss-RQ-00043-00
-
Capability: 9.3.3 Wakeup Command
9.3
Esss.ss-RQ-00048-00
Capability: 9.3.4 Event Report Notification
9.3.4
Esss.ss-RQ-00049-00
Esss.ss-RQ-00044-00
-
9.3.4
Esss.ss-RQ-00050-00
Esss.ss-RQ-00049-00
-
9.3.4
Esss.ss-RQ-00051-00
Esss.ss-RQ-00049-00
-
9.3.4
Esss.ss-RQ-00052-00
Esss.ss-RQ-00049-00
-
9.3.4
Esss.ss-RQ-00053-00
Esss.ss-RQ-00049-00
-
9.3.4
Esss.ss-RQ-00054-00
Esss.ss-RQ-00052-00
-
9.3.4
Esss.ss-RQ-00055-00
Esss.ss-RQ-00052-00
MultipleSleepLevels =
9.3.4
Esss.ss-RQ-00056-00
Esss.ss-RQ-00052-00
MultipleSleepLevels =
9.3.4
Esss.ss-RQ-00057-00
Esss.ss-RQ-00052-00
-
9.3.4
Esss.ss-RQ-00058-00
Esss.ss-RQ-00052-00
-
9.3.4
Esss.ss-RQ-00059-00
Esss.ss-RQ-00046-00
ZeroWakeDuration =
A1-3 Compliance Table: Equipment Conditional Criteria
[Esss.00-RQ-90005-00] Each equipment supplier shall document Esss.ss specific conditional criteria per Table A12, Equipment Conditional Criteria. [/RQ]
A1-3.1 Conditional criteria are used to identify when Conditional requirements are to be implemented on the
equipment.
Table A1-2 Conditional Criteria
Name
Values
True
NotReadyForNormOp
MultipleSleepLevels
UserInterfaceSleep
False
Description
True – Implementer has implemented the
NotReadyForNormalOperation state.
False – Implementer has not implemented the
NotReadyForNormalOperation state.
True
True – Implementer has defined multiple sleep levels.
False
False – Implementer has defined only a single sleep level.
True
True – The production equipment provides Sleep and Wakeup
commands via its user interface.
False – The Sleep and Wakeup command are available only
remotely.
False
Section
9.2.2.11
9.3.4.2
9.2.3.4
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document
development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
Page 20
Doc. 5411A  SEMI
LETTER (YELLOW) BALLOT
Document Number: 5411A
Date: 7/28/2017
Semiconductor Equipment and Materials International
3081 Zanker Road
San Jose, CA 95134-2127
Phone: 408.943.6900, Fax: 408.943.7943
Values
True
WakeFromInitSleep
False
True
ZeroWakeDuration
False
Description
Section
True – Implementer allows WakeUp command while in
InitiatingSleep.
False – Implementer does not allow WakeUp command while in
InitiatingSleep.
9.2.3
True – The production equipment will provide a zero value for
EstimatedWakeDuration in some cases.
False – The production equipment will never provide a zero
value for EstimatedWakeDuration.
9.3.4.2
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document
development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
Page 21
Doc. 5411A  SEMI
LETTER (YELLOW) BALLOT
Name
DRAFT
Document Number: 5411A
Date: 7/28/2017
Semiconductor Equipment and Materials International
3081 Zanker Road
San Jose, CA 95134-2127
Phone: 408.943.6900, Fax: 408.943.7943
DRAFT
NOTICE: Semiconductor Equipment and Materials International (SEMI) makes no warranties or representations as
to the suitability of the Standards and Safety Guidelines set forth herein for any particular application. The
determination of the suitability of the Standard or Safety Guideline is solely the responsibility of the user. Users are
cautioned to refer to manufacturer’s instructions, product labels, product data sheets, and other relevant literature,
respecting any materials or equipment mentioned herein. Standards and Safety Guidelines are subject to change
without notice.
By publication of this Standard or Safety Guideline, SEMI takes no position respecting the validity of any patent
rights or copyrights asserted in connection with any items mentioned in this Standard or Safety Guideline. Users of
this Standard or Safety Guideline are expressly advised that determination of any such patent rights or copyrights,
and the risk of infringement of such rights are entirely their own responsibility.
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document
development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
Page 22
Doc. 5411A  SEMI
LETTER (YELLOW) BALLOT
Document Number: 5411A
Date: 7/28/2017