INTERNSHIP:
Modelling and optimization of Wafer
Table edge two-phase flow
Background Information
The immersion lithography machines of ASML are
characterised by the presence of water between the
last lens element and a wafer, the so-called lens
bath. During scanning motions, the lens bath will
cross the edge of the wafer and water may flow
down into microscale geometries of the Wafer Table.
A good understanding of the two-phase flow through
such microscale geometries is essential to improve
machine performance.
What ASML offers
You will work on a state of the art machine in close
collaboration with the best experts. In addition, you’ll get
expert, practical guidance and the chance to work in and
experience a dynamic, innovative team environment.
You will receive a monthly internship allowance of 500
euro maximum (depending on educational level), plus a
possible housing or travel allowance. Terms and
conditions can be found on our website.
Your assignment
You will be working with the Wafer Tables
Development group to optimize the water flow
behaviour under the wafer. This can be achieved by
fine-tuning the Wafer Table edge geometry using
two-phase (water/air) CFD calculations. You will:

Develop a CFD model of the current wafer
table edge design, building on previous
research

Validate the model against available data or
by performing simple experiments.

Come up with creative new design
concepts and test their feasibility in the
CFD model.
Join ASML
ASML is leading in the worldwide development,
production and sales of high-end lithography systems for
the semiconductor industry. Almost 14,000 people
worldwide work at ASML at offices in the United States,
Asia and at the corporate headquarters in Veldhoven.
ASML employees share a passion for technology with a
customer focus. At ASML, we work collectively to further
develop and implement complex and high-quality
technological systems. Working at ASML is therefore
challenging and dynamic, with ambitious objectives and
high standards key to our continuing success. But hard
work here pays off: ASML invests in the development of
its people and successes are shared. ASML promises
mutual commitment to our growth and yours.
The main deliverables of the project are a numerical
model and a set of recommendations for future
wafer table edge designs.
Your profile
You are a master student in (Applied) Physics,
Chemical Engineering, Mechanical Engineering or a
related
discipline
with
a
background
in
(computational)
fluid
dynamics
or
process
technology. You are creative, curious, goal oriented
and capable of working independently. You have
good communication skills and apply critical thinking
to challenge and improve the status quo. You are
fluent in English, both verbally and in writing.
This is a graduation or apprentice internship with
duration of 6+ months, for 5 days a week. The start
date is as soon as possible.
Please keep in mind that we can only consider
students (who are enrolled at a school during the
whole internship period) for our internships and
graduation assignments.
Join ASML’s expanding multidisciplinary teams and help
us to continue pushing the boundaries of what’s
possible.
Field: Applied Physics, Chemical Engineering,
Mechanical Engineering, etc
Contact: [email protected]
Telephone: +31 (0)40 268 6773
.
www.asml.com/ students