Semiconducting and other major properties of gallium arsenide J. S. Blakemore Oregon Graduate Center, Beaverton, Oregon 97006 (Received 20 November 1981; accepted for pUblication 27 May 1982) This review provides numerical and graphical information about many (but by no means all) of the physical and electronic properties of GaAs that are useful to those engaged in experimental research and development on this material. The emphasis is on properties of GaAs itself, and the host of effects associated with the presence of specific impurities and defects is excluded from coverage. The geometry of the sphalerite lattice and of the first Brillouin zone of reciprocal space are used to pave the way for material concerning elastic moduli, speeds of sound, and phonon dispersion curves. A section on thermal properties includes material on the phase diagram and liquidus curve, thermal expansion coefficient as a function of temperature, specific heat and equivalent Debye temperature behavior, and thermal conduction. The discussion of optical properties focusses on dispersion of the dielectric constant from low frequencies [Ko(300) = 12.85] through the reststrahlen range to the intrinsic edge, and on the associated absorption and reflectance behavior. Experimental information concerning the valence and conduction band systems, and on the direct and indirect intrinsic gaps, is used to develop workable approximations for the statistical weights Nv(T) and Nc(T), and for the intrinsic density. Experimental data concerning mobilities of holes and electrons are briefly reviewed, as is also the vn (E) characteristic for the conduction band system. PACS numbers: 72.80.Ey, 78.20. - e, 62.20.Dc, 63.20. - e I. INTRODUCTION The material of this review article, with appropriate graphs, tables, and equations, is intended to be of value to experimental and applied physicists, materials scientists, and engineers, whose work involves gallium arsenide as an electronic material and as a device medium. The properties listed in the sections that follow are primarily "intrinsic" ones: not those found only in totally pure undoped GaAs, but those dependent on the response of the lattice rather than of specific impurity species. The III-V family of semiconductors has been reviewed in a number of books since the first published article appeared on their electronic properties. I Those prior reviews include the books by Hilsum and Rose-Innes,2 Madelung,3 and Neuberger4 on the entire I1I-V family. Some key features oflII -V binaries, including GaAs, are summarized also in appropriate sections of the books by Goryunova, 5 Kressel and Butler,6 and Casey and Panish,? and in a host of review articles. A lengthy 1965 review of electronic and related properties of GaAs itself by Hilsum 8 is still valuable. Two series of volumes are noted now 9 • 10 that will be drawn upon frequently in following sections. The first is the Institute of Physics series, 9 proceedings of the biennial conferences on gallium arsenide and related compounds. The second is the Academic Press "Semiconductors and Semimetals" series, 10 edited since 1965 by R. K. Willardson and A. C. Beer. Gallium arsenide is a feature of many volumes in that series. However, most the above cited sources do provide information about several III-V semiconductors. In contrast, the present compilation is limited to GaAs itself. Accordingly, much material has been extracted from the numerous published papers on GaAs research. For some properties, the best (or even the only!) available citation dates back to the 1960s or even 1950s. For some other parameters, successive R123 J. Appl. Phys. 53(10). October 1982 measurements over the years have led to a steadily reduced set of error limits concerning important numerical quantities. One can certainly expect that, of the numbers quoted herein, some are already known to certain persons as being outdated and erroneous. Other numbers will acquire that status over the next few years. Thus the present attempt at systematizing data for properties of GaAs is just one stage in a continuing task. The significance of GaAs, as a medium for research measurements, and as a material of technological importance, justifies the present work, without waiting for further enlightment that will not be total in any event. A. Topics covered in this review Section II of this article summarizes information about the atomic arrangement for the sphalerite lattice of GaAs, and the consequences for the Brillouin zone of reciprocal space. Section III deals briefly with mechanical, elastic, and vibrational properties of the lattice. The material of that Section bears strongly on the thermal properties discussed in their own right in Sec. IV: specific heat and Debye temperature, expansion behavior, and thermal conductivity. Section V review dielectric and optical properties, from the surprisingly controversial subject of the static dielectric constant and its temperature dependence, to the intrinsic absorption behavior. Energy bands and gaps are dealt with in Sec. VI, with an emphasis on bands close enough to the intrinsic gap to provide a possible home for mobile holes or electrons. Some aspect of carrier velocity and mobility are reported in Sec. VII, but this does not pretend to treat the complexities of carrier scattering in any great detail. Even for those topics that are mentioned in this review article, the treatment has usually been made selective and subjective, rather than encyclopaedic. Thus the material 0021-8979/82/10R123-59$02.40 @ 1982 American Institute of Physics R123 Downloaded 21 Sep 2011 to 210.32.148.91. Redistribution subject to AIP license or copyright; see http://jap.aip.org/about/rights_and_permissions • that is presented by no means exhausts the possibilities. However, it does give the experimental worker a reasonable selection of numbers, for various properties, that have considerable built-in consistency. These may not all be correct, but they do tend to agree with each other. 1[010] --- ~~- ~ I 1 I I I 1 I I B. Topics omitted from this review 1 I I I I The reader should note that, among other topics which might logically have been considered for inclusion in a GaAs review article, two major deliberate omissions are of imp urity phenomena, and recombination phenomena. In both cases, it was felt that a full and adequate coverage would be incompatible with the overall length and balance of the other sections. Neuberger4 cited literature to about 1970 concerning active foreign impurities in GaAs, including the bald "facts" of apparent donor or acceptor ionization energy, and the experimental methods used. The spectroscopy of shallow "hydrogenic" donors has become well established through the work of Stillman and coworkers. 11.12 Much information concerning deep-level impurities in GaAs was systematized in the 1973 book of Milnes. 13 Milnes has recently prepared a comprehensive review article specifically on the experimental aspects of defects and impurities in gallium arsenide. 14 It may also be noted that several chapters dealing with semiinsulating GaAs, and with the deep-level impurities associated with the semi-insulating condition, are scheduled to appear in a forthcoming volume l5 of the "Semiconductors and Semimetals" series. Omission of recombination phenomena from the list of topics to be covered here is not easily remedied by citation of other reviews. Not that there is any lack ofliterature pertaining to trapping and recombination phenomena in GaAs. Far from it! However, a single comprehensive source of experimental information concerning recombination processes and carrier lifetimes in this semiconductor has eluded this writer's search. Direct radiative and Auger proc~sses are necessarily important for a direct gap semiconductor such as GaAs. Stimulated emission in an injection diode laser has occasioned an extensive literature, including several recent books. 6.7. 16 Spontaneous radiative recombination was discussed for GaAs in some detail by Varshni, 17 from the detailed balance standpoint of van Roosbroeck and Shockley,18 and Casey and Stern 19 further analyzed the spontaneous radiative lifetime for P-type GaAs. Gershenzon 2o discussed radiative recombination in GaAs primarily from the luminescence standpoint, both spontaneous and stimulated. Landsberg and Adams 21 compared radiative and Auger processes for semiconductors including GaAs; and Landsberg also reviewed 22 a host ofnonradiative decay phenomena, including Auger types. However, GaAs was not a specific focus of that account. 22 Osbourn and Smith 23 concluded that an exciton bound to a shallow acceptor in GaAs is much more likely to decay radiatively than by an Auger process. Actual experimental data indicative of substantial Auger participation in GaAs carrier decay are usually the province of strong excitation 24 or of high temperatures. 25 Room temperature carrier lifetimes in GaAs usually indiR124 J. Appl. Phys. Vol. 53, No.1 0, October 1982 I I I 1 I I I I I I I I I .. ~ [OOlt I I I I I I I I _~~ ~ ---------- I 1---- ~ J-'-~o]. ---~ ~ -----A ----- FIG. I. Conventional unit cube for GaAs, with a volume A 3 that is four times larger than that of a primitive cell. cate 25 - 27 mostly radiative recombination for strong doping, and control assumed by defect levels for weaker doping. Among other topics omitted from this review are numerous fairly specialized deformation-related parameters. Those include piezoelectric, piezoresistive, elastoresistive and elasto-optic coefficients, deformation potentials, etc. The 1971 book compiled by Neuberger4 quoted available numbers for many of these coefficients, and other relevant literature is cited at appropriate points in the following Sections. II. THE GALLIUM ARSENIDE LATTICE Goldschmide s first created GaAs in the 1920s, and found it to have the cubic sphalerite (zincblende) lattice. This has fcc translational symmetry, with a basis of one GaAs molecule, one atom at 000, and the other at !U of the (nonprimitive) fcc unit cube. Thus the cube illustrated in Fig. 1 contains four GaAs molecules in a volume A 3. The nearestneighbor bond length is (v'3A /4) = ro, and such bonds (Ga to four As neighbors, and As to four Ga neighbors) are mutually separated by the tetrahedral bond angle if> = cos-II - 1/3) = 109.47°. X-ray diffraction measurements in the I 960s of the unit cell size, by Straumanis and Kim 29 for the temperature range 5-65 °C, and by Pierron et al. 30 for T = 24°C, are both in T ABLE I. Unit cell size, atomic density, and crystal density at T = 300 K. for stoichiometric GaAs. a Length of side of unit cube A,oo Nearest-neighbor distance ro = v'3A /4 Unit cube volume A3 Primitive cell volume !A 3 Molecular density N /2 V = 4/A 3 Atomic density N /V = 8/A 3 Molecular weight M = (69.720 + 74.922) Calculated crystal density P3CX) a 5.65325 2.44793 1.80674 X 10- 22 4.51684X 10-2> 2.2139X 1022 4.4279 X 1022 144.642 5.3174 A A cm' cm' cm-' cm- 3 amu g/cm' Based on x-ray diffraction measurements of Driscoll et af. (Ref. 31). as supported by the earlier work of Straumanis and Kim (Ref. 29). and of Pierron et al. (Ref. 30). J. S. Blakemore R124 Downloaded 21 Sep 2011 to 210.32.148.91. Redistribution subject to AIP license or copyright; see http://jap.aip.org/about/rights_and_permissions excellent agreement with the 300 K value subsequently obtained by Driscoll et al. 31 for undoped melt-grown and epitaxial GaAs: A300 = 5.65325 ± 0.00002 A. (1) That value carries connotations for unit cell volume and crystal density as indicated in Table I. Note, for comparison, that Straumanis and Kim 29 made direct weighing experiments which (converted to 300 K equivalence) indicated P300 = 5.3174 ± 0.0026 g/cm3 for stoichiometric GaAs. Driscoll et al. reported 31 that the GaAs lattice constant A increases by up to 0.02% for large concentrations of dopants such as Sn or Te. Straumanis and Kim 29 found that GaAs grown from the melt has a compositional range, narrow, but of nonzero extent. They reported the Ga-rich extremeat 50.002% Ga, with A then enlarged by 0.001 %. The As-rich composition was found to extend to 50.009% As, with A then decreased by 0.004%. That total range is too small to be apparent in a conventional Ga-As binary phase diagram,32-34 as reproduced later in Fig. 9 of Sec. IV. GaAs cleaves most readily on ! 110 I family planes. This can sometimes happen unexpectedly and inadvertently! Goryunova 5 noted that GaAs can also cleave on ! 1111 planes, and between (Ill) and (011). Figure 2 shows the unit cube of the previous figure, as bisected by the (110) plane. Note that this type of plane contains both kinds of atom. For any atom in a ! 110 I plane, two of its four nearest-neighbor bonds lie within that plane. That this should be coupled with a cleavage propensity led Goryunova 5 to speculate that GaAs might be less ionic than other sphalerite-structured solids. However, Phillips 35 deduced a fraction}; = 0.31 for ionic bonding in GaAs, near average for III-V compounds,36 though naturally less than in II-VI solids. Bonding, fractional ionicity, valence electron distribution, etc., are further discussed in Sec. VI. A. The ! 1111 family of planes is also an important one for a sphalerite solid such as GaAs. Figure 3 shows the unit cube as truncated by (111). The terminator plane in Fig. 3 contains only one atomic species: the smaller, shaded, type of sphere. The larger, unshaded, sphere lies below this plane in Fig. 3. .. [001] ~- FIG. 3. Truncation of the GaAs unit cube by the (III) plane. Note that a plane of this family contains only one kind of atom. Of the eight planes in the ! 1111 family for GaAs, four are (lIlA) planes containing only gallium atoms. The other four are (1IIB) planes comprised entirely of arsenic atoms. Thus a <111) -oriented GaAs wafer with plane parallel faces has a (lIlA) plane for one face, and a (lIlB) plane for the other. These have different chemical activity and behavior. 37 Most of the chemical etching solutions that have been developed for chemical polishing of this semiconductor38 .39 work poorly for the (lIlA) surface, with a slower rate of attack and an irregular surface finish. A. Reciprocal space: The Brillouin zone The crystal structure of GaAs has, among its various consequences, imposed bcc symmetry on reciprocal space, the coordinate system needed for description of the dispersion of lattice vibrations and of electronic states. Figure 4 shows the first Brillouin zone (BZ) of reciprocal space for GaAs. Since sphalerite has fcc translational symmetry, this zone is the same shape as for an fcc solid. 40 The zone comd _/ _/- .: [010] I R' -~--------~--------~ I _- I /- _-- ....... - I I r"------ I I I I I I I I I I I I I I I I I I I I I I I I I I I I I .. I I I I I I I I I I I [001]~ ~ I I I I II I I -------..J _....... ~ - l~~______ C ~ .--------~~ \ [100] ---., FIG. 2. Bisection of the GaAs unit cube (Fig. I) by the (110) plane. R125 I J. Appl. Phys. Vol. 53. No. 10. October 1982 .......".......- _-- ________ 1/// R b G200----- It.kl = (41T/A), It.ql = 2 FI G. 4. First Brillouin zone for the GaAs lattice: the same as for other solids with sphalerite. diamond. or fcc lattices. J. S. Blakemore R125 Downloaded 21 Sep 2011 to 210.32.148.91. Redistribution subject to AIP license or copyright; see http://jap.aip.org/about/rights_and_permissions ~ _________:;.U_~X~__,,_________~ , I I I I I I 6. L' I tances between selected pairs of locations in dimensionless "q-space" units. [In q-space, the distance Irx I = 1. Thus from a distance listed in Table II in q-space units, the corresponding distance in wave-vector space (k-space) is obtained by multiplying with the factor (211"/A) = 1.111 X 10K cm -I.] I I I L I I I I I R't A K' cf> r I I I I L I R III. MECHANICAL, ELASTIC, AND VIBRATIONAL PROPERTIES I I I I I I I I : I I ~--------- ---------! d c - - - - - - - - G oi2" - - - - - - - - l6.ql = Va FIG. 5. Hexagonal cross section of the GaAs first Brillouin zone as intersected by the (Oil) plane. (Locations a, b, c, and d in Fig. 4.) Note that this is not a regular hexagon. prises a truncated octahedron, lying within a cube (shown with dashed lines) with a wave-vector space (k-space) side length (411"/A ) = 2.223 X 108 cm - I. For the purposes of interpreting the vibrational spectrum of GaAs, or of describing the electronic energy band structure of this semiconductor, the most important paths through the Brillouin zone are those from the zone center to the high symmetry points X, L, and K on the zone boundary. Figure 5 shows a (011) plane section through the zone center. This figure illustrates that the paths t1X, AL, and ~K form one quadrant of the BZ cross section in the (011) plane. Note that locations U and K of Figs. 4 and 5 are equivalent (as also areX and R ), since in each case the separation is a reciprocal lattice vector, namely Gill' Thus when the dispersion of the vibrational spectrum for GaAs is shown in Fig. 7 of Sec. III, the v-q dispersion shown between K and R is indicative also of that along the zone boundary, from U to r r r r X. Table II lists coordinates for some high symmetry locations on or near the zone boundary, and also shows the disTABLE II. Relative location and distances for high symmetry points of the Brillouin zone for GaAs. Location Distance" r=ooo x= 100 =1 W=I~ =M 2 ~ L=...!...l...!... lUX I = IUWI =N8 1 ITU I =,J978 IrL I =.Jf74 K=ol~ 4 4 ~ ITK I 11LKI u=l...!...l 4 4 222 R =011 a ~irRI = ,J978 =M ={i 11KR I = Iux I = N8 Distances in dimensionless "q-space" units. To convert to wave-vector space (k-space) dimensions and units, multiply by the factor (21'1 A)= 1.11IX108 cm-'. R126 J. Appl. Phys. Vol. 53, No.1 0, October 1982 Gallium arsenide is of medium grey appearance, and can be mechanically polished with moderate difficulty. Chemical etching can produce a bright shiny appearance for most low-order crystal planes,'9 excepting the (lIlA) gallium face. The hardness is moderate, between 4 and 5 on the Mohs scale. 41 The surface microhardness has been reported 41,42 as 750 ± 40 kg/mm2, using Knoop's pyramid test. As previously noted in Sec. II, cleavage occurs most readily on !110 1family planes. A. Elastic constants, and the speeds of sound Of the many aspects of the elastic response of a solid, this subsection deals in any detail only with the stress-strain relation for a small applied stress, and the relevance to acoustic wave speeds. The tensor relation of stress to strain involves the second-order elastic moduli. Ultrasonic speed of sound measurements for monocrystal GaAs in various crystal directions have determined these moduli accurately.43-46 Third-order elastic constants affect wave propagation in stressed GaAs,47 and the six third-order moduli have been measured by Drabble and Brammer,46 and by McSkimin and Andreatch. 48 The present account will not pursue that further. Extrapolation of elastic behavior to a large hydrostatic pressure provides another specialized area, which has received attention for GaAs,49 among other III-V solids. Among various equations of state for a solid, so the choice appropriate for GaAs should be dictated by the second- and third-order moduli (as noted by Drabble and Brammer46 ), or equivalently from the pressure dependence of the bulk modulus, as used by McSkimin et al. 44 Figure 6 shows the latter's estimate for the pressure dependence of specific volume. The curve of Fig. 6 was based on a simplified (Birch-type) equation of state, with bulk modulus assumed linearly dependent on pressure. An upper limit of 250 kbar was used for the modeling, since GaAs assumes the more compact rocksalt structure above that pressure. 49 For the cubic lattice of GaAs, the small-stress adiabatic elastic response tensorS I simplifies to only three independent second-order moduli: CII' C 12 , and C 44 . (That is true provided piezoelectric complications can be averted in the measurement. 52 ) Together with the crystal density p, the quantities C II' C 12' and C 44 determine the speeds oflong wavelength (i.e., nondispersive) longitudinal and transverse acoustic waves, for any direction and polarization. Table III lists expressions in terms of these quantities for longitudinal and transverse waves along the high symmetry directions [100], [110], and [Ill]. These expressions are valid for any cubic solid,sl a category that includes the sphalerite structure of GaAs. J. S. Blakemore R126 Downloaded 21 Sep 2011 to 210.32.148.91. Redistribution subject to AIP license or copyright; see http://jap.aip.org/about/rights_and_permissions 1.00 .---,--,----,---,--,-----,----,--,--...,---, TABLE IV. Speeds for (nondispersive) long-wavelength sound waves in GaAs for the three principal lattice directions! Direction of wave propagation 0.96 0.92 ~ "> Wave speed (in units of 10' cm/s) Wave character T= 300 K T=77K VL 4.731 ± 0.005 4.784 ± 0.015 Vr 3.345 ± 0.003 3.350 ± 0.005 Vn 5.238 3.345 2.476 ± 0.008 ± 0.003 ± 0.005 5.289 ± 0.015 3.350 ± 0.005 2.479 ± 0.012 v'I 5.397 ± 0.008 5.447 ± 0.015 v; 2.796 ± 0.007 2.799 ± 0.015 [100] 0.88 COMPRESSION OF GaAs VI [110) 0.84 0.80 o [III) 25 50 75 100 125 150 175 200 225 250 utll PRESSURE (KBAR) FIG. 6. Pressure-volume relation for GaAs, as calculated by McSkimin et a/44 from the bulk modulus for zero pressure, and the derivative (dB, / dP). Thus speed of sound measurements for two or three directions in GaAs single crystals can permit a deduction of the three moduli. These can, in turn, be used to express all other second-order adiabatic moduli (and compliances), and related parameters such as Poisson's ratio, etc. The results of such ultrasonic speed of sound measurements are expressed in Table IV, and the concomitant elastic parameter set of Table V. The numbers expressed in Tables IV and V incorporate small adjustments, in effecting a consensus among values reported from the various speed of sound experiments. 43 -46 Garland and Park 45 made measurements through the range 77-300 K, and estimated extrapolations to zero temperature. Higher precision room temperature measurements were made by McSkimin et af.44 and by Drabble and Brammer. 46 In making a consensus among the various reported values, slight adjustments have been made for differences in thermometry, and in assumptions about the crystal density. It is quite clear from the quoted speeds of Table IV that GaAs is not perfectly isotropic in its elastic properties. A TABLE III. Acoustic wave speeds for major directions in the cubic sphalerite lattice of GaAs, as controlled by the three second-order elastic constants. a Wave propagation direction Direction or plane of particle motion Expressions for wave speed, as a function of crystal density p and the elastic constants c", C'2' C44 [100] vL = (c,,/p)112 (100) plane v T = (C44 /P) '12 [I00} [lID] = [(c" + C'2 + 2C44 )12p1'/2 [110] [001] V, [lTO] V,, = [(c" - C'2)/2p] '12 [111] v; = [(c, I (111) plane v; = [(c" - C'2 v'lI = v T = (C 44 /p)1I2 + 2C l2 + 4c44 )13p)'12 [111] a + c44 )13p} '/2 Among other standard sources, the development of these equations is provided by de Launay (Ref. 51). R127 J. Appl. Phys. Vol. 53, NO.1 0, October 1982 a The speeds for both 300 and 77 are consistent with the crystal densities and elastic moduli quoted in Table V, using the equations of Table III. Garland and Park (Ref. 45) measured [lID] and [Ill] speeds for both temperatures. The 300 K values indicated above and in Table V are influenced by the precise [100] and [110] speed measurements made by McSkimin etal. (Ref. 44) and by Drabble and Brammer (Ref. 46). perfectly isotropic solid would be one for which constant frequency surfaces in wave-vector space were spheres concentric upon the zone center r; and then there is just one speed for longitudinal sound waves, and one for all transverse sound waves, regardless of direction. This requires that Cli = CI2 + 2C44 for the solid (i.e., that C44 equal the shear modulus c' of Table V, or equivalently that the isotropy ratio S = I). Anisotropy of the sound speeds listed in Table IV, and the fact that S = 0.55 as indicated in Table V, are equivalent manifestations of the lack of spherical symmetry in the tetrahedral bonding of a sphalerite lattice. A diamond lattice nearest-neighbor force constant model developed in 1914 by Born (see Ref. 51) would require that the "Born ratio," last item in Table V, be unity. This is some 5% off the mark for GaAs, presumably because of effects of more remote neighbors. The Cauchy-Poisson relations indicate that Cl2 should equal C44 for a cubic lattice with appropriate centrosymmetric character for the bonding and deformation properties. The required conditions have often been interpreted as mandating only central (completely ionic) interatomic forces, which mostly covalent GaAs does not satisfy. However, Weiner53 has recently analyzed elastic moduli theory on the basis of the HeIIman-Feynman theorem, and adduced a less restrictive condition for the Cauchy relations that does not automatically exclude covalent bonding. On that basis, the value C12/C44 =0.95 in Table V implies that equal electrondensity contours in GaAs deform under stress in a way similar to that of the nuclear array deformation. Values for Cll' C12 ' and C44 extrapolated to T=O permit calculation of the zero-temperature "elastic" Debye temperature &~l. de Launay5l reported &~l = (3h /k )(c44/p)1/2[3NJa/41TV(18 + v'J)] 1/3 (2) for cubic solids. The factorfa = I only for an isotropic solid, in which S = (C'/C44 ) = 1. Since C44 > c' for GaAs, then fa < 1; and de Launay provided tables for interpolation J. S. Blakemore R127 Downloaded 21 Sep 2011 to 210.32.148.91. Redistribution subject to AIP license or copyright; see http://jap.aip.org/about/rights_and_permissions TABLE V. Second-order adiabatic elastic parameters for GaAs.· Temperature (A) Elastic moduli: T= 300 K T=77K Tc::;O 119.0 ± 0.1 53.8 ± 0.1 59.5 ± 0.1 32.6 ± 0.2 75.5 ± 0.1 122.1 ± 0.3 56.6 ± 0.3 59.9±0.1 32.8 ± 0.5 78.4 ± 0.3 (extrapolated) 112.6 57.1 60.0 32.8 78.9 (units of 1010 dyn/cm2) c" C 12 C44 Shear modulus Bulk modulus c' = (c" - c 12 )/2 B, = (c" + 2C'2)13 Y. _ (c" + 2cd(c" - cd [100] Young's modulus 85.5 0- (c" +cn! (B) Dimensionless ratios: (100] Poisson ratio Isotropy ratio Cauchy ratio Born ratio a 86.2 C44 ) ± 0.7 0.32 0.55 0.95 1.05 0.31 0.55 0.90 1.05 (70 = C'2/(C" +cd S:=C'/C 44 = (C" - C ,2 )/2c44 C ,2 /C 44 (c" + C ,2 )2/4c"(c,, - ± 0.3 86.3 0.32 0.55 0.95 1.05 Room temperature data from Refs. 43-46, converted to 300 K equivalence using P,oo = 5.3173 g/cm'. 77 K data and extrapolation to T:;:::;O from Garland and Park (Ref. 45), usingpn = 5.3360 g/cm 3 based on the T-:::=.O values of C II , C 12 , C44 • This yields fa = 0.679 for GaAs, and with other relevant substitutions into Eq. (2) yields e~1 = 345 ± 3 K. That agrees well with low temperature specific heat experiments, 54 which Holste has analyzed 55 to yield a calorimetric Oebye temperature ~al = 344.6 ± 2 K. Specific heats and the associated calorimetric Oebye temperature behavior are further discussed in Sec. IV C. The physics of low temperature ballistic phonon motion in GaAs involves the speeds of fairly energetic acoustic phonons, as well as the weakness of phonon scattering/annihilation mechanisms (i.e., the thermal conduction considerations of Sec. IV 0). Crandall56 reported ballistic motion of such phonons (v~ 10 12 Hz, hv-4 meV, A~30 A, Iql-0.2) through insulating GaAs at liquid helium temperatures. His flight times were shorter than the 1 J-ls instrumental resolution. More recently, Narayanamurti et al. 57 have resolved the separate arrival of LA and T A phonon pulses, on a sub- microsecond time scale. As expected from Table IV, one T A pulse speed was seen along [100] and [111], but two distant TA species for [110] propagation. B. Lattice vibrational spectrum: The phonon dispersion relations e r [::; Conventional ultrasonic methods explore the variation of acoustic wave frequency with wavelength (or wave vector) only for a small portion of the Brillouin zone, nearest to the zone center. In practice, the vibrational spectrum of GaAs extends to nearly 7x 10 12 Hz for acoustic modes, and to almost 9 X 10 12 Hz for intramolecular (optical) modes. (The vibrational spectrum has mode branches for both acoustic and optical phonons, since GaAs has a two-atom primitive basis.) As with many other crystalline solids, the inelastic scattering of slow neutrons has proved useful in GaAs for determining phonon frequency-momentum relationships. r XR A L 9 8 N 7 I ~ 0 6 FIG. 7. Room temperature dispersion curves for acoustic and optical branch phonons in GaAs, obtained by Waugh and Dolling'" by inelastic neutron scattering. Labelled high symmetry points of the zone are as marked in Figs. 4 and S. The dashed lines have slopes for the various speeds of sound, as listed in Table IV. L .. 5 ;:::, >- 4 T u Z w 3 => a w 2 a:: u.. o 0.2 0.4 0.6 0.8 [qOO] 1.0 1.0 0.8 0.6 0.4 [Oqq] 0.2 o 0 0.1 0.2 0.3 0.4 0.5 (qqq] REDUCED (DIMENSIONLESS) WAVE-VECTOR, R128 J. Appl. Phys. Vol. 53, No.1 0, October 1982 q J. S. Blakemore R128 Downloaded 21 Sep 2011 to 210.32.148.91. Redistribution subject to AIP license or copyright; see http://jap.aip.org/about/rights_and_permissions Waugh and Dolling58 used this experimental method in deducing the form of the various v-q phonon dispersion curves for room temperature. Their data are reproduced in Fig. 7, for q expressed along [100], [110], and [Ill] directions. As is customary with this type of data presentation, that for q along [110] is extended beyond the zone boundary. For, as noted in Sec. II in connection with Figs. 4 and 5, the path in reciprocal space K -+R is equivalent to that along the surface of the zone boundary from U to X. Accordingly, the normal mode frequencies for X = 100 and for R = 011 are the same. The various curves in Fig. 7, some with solid lines and others dotted, for v(q) of the acoustic and optical phonon branches, represent the attempts by Waugh and Dolling58 to fit their data with two different versions of a dipole approximation force constant model. 59 The straight dashed lines, inclined upwards from the locations of q = 0, have been added to show the slopes corresponding to the various speeds of sound in Table IV. Table VI lists the phonon frequencies and energies reported by Waugh and Dolling 58 for four important highsymmetry q -space locations. Several of these frequencies are prominent in Fig. 8. This shows an angular "curve" of g(v) for the summation of all GaAs normal lattice modes, acoustic and optical branches combined, as calculated60 from the v(q) data of Fig. 7. The density of states with respect to frequency, g(v), receives a major boost when Vq (v)-+O for one of the various branches, and this happens predominantly when q for that branch reaches a zone boundary. Consequently, g(v) of Fig. 8 shows a first maximum near 2 X 10 12 Hz (8 meV) TABLE VI. GaAs phonon frequencies and energies for Brillouin zone high symmetry locations, deduced from 296 K neutron scattering! Reciprocal space location r (q = (00) X(q = 1(0) Mode v character (10 12 Hz) hv (meV) LO 8.55 ± 0.2 35.4 ± 0.8 TO 8.02 ± 0.08 33.2 ± 0.3 TO 7.56 ± 0.08 31.3 ± 0.3 LO 7.22 ± 0.15 29.9 ± 0.6 LA TA 6.80 ± 0.06 2.36 ± 0.Ql5 28.1 ± 0.25 9.75 ± 0.06 TO LO 7.84 ± 0.12 7.15±0.07 32.4 ± 0.5 29.6 ± 0.3 LA TA 6.26 ± 0.10 1.86 ± 0.02 25.9 ± 0.4 7.70 ± 0.08 TOil TO LO 7.90±0.15 7.SI±0.12 6.44 ± 0.12 32.7 ± 0.6 31.1±0.S 26.6 ± 0.5 and R (q=OII) L(q=+; +) K(=rJ-~) q 44 LA TAil TA j a 5.65 ± 0.12 3.48 ± 0.06 2.38 ± 0.04 23.4 ± 0.5 14.4 ± 0.25 9.58±0.15 From experiments of Waugh and Dolling (Ref. 58), as illustrated in Fig. 7. R129 J. Appl. Phys. Vol. 53, No. 10, October 1982 hI' 0 ;:>. (meV) 10 20 30 T", 300 K 0' IJl W ~<[1Jl ~~ IJlz lJ,.:J 0>>-0:: ~<[ -0:: 1Jl~ zwill 00:: <[ zz 0 0 I 0... 0 2 8 PHONON FREQUENCY V Hz) FIG. 8. Frequency dependence of the total spectral density g(v) of all lattice vibrational modes (acoustic plus optical mode branches), for GaAs at 296 K, after Dolling and Cowley."" That work was based on the phonon dispersion curve data of Waugh and Dolling,'" as provided in Fig. 7. associated with T A modes. Short wavelength LA modes contribute smaller peaks near 5.7X 10 12 Hz (23 MeV) and 6.8 X 10 12 Hz (28 meV). The massive concentration of optical phonons near 8x 10 12 Hz (33 meV) provides the largest peak. Multiphonon absorption of infrared photons (discussed in Sec. V C) requires that any photon annihilation satisfy the requisite optical selection rules, and is most prominent for a maximum in thejoint density of phonon states adding up to zero wave vector. Thus when data concerning phonon combination bands are presented in Sec. V B, it is not surprising that the strongest of these bands lies just below 40 meV, assisted by peaks in the T A and optical branch spectral densities. The neutron scattering results of Table VI have error limits of 1%-2%. Other experimental methods are hard pressed to do better for most ofthese numbers. That is not so long-wave optical phonons. for the first two entries, for Optical methods, further discussed in Sec. V, can potentially provide VTO and VLO with several significant figures. These tend to confirm vTO of Table VI, but indicate a VLO value some 2% larger. The ratio VLO/V TO is interesting in the context of the Lyddane-Sachs-Teller relation,61 in relating dielectric constants below and above the reststrahlen range. r, IV. THERMAL PROPERTIES A. Solid-liquid-vapor phase equilibria for GaAs The general features of the "normal pressure" Ga-As binary phase diagram were delineated some 25 years ago, by Koster and Thoma,32 and by van den Boomgaard and Schol. 33 The liquidus curve on the Ga-rich side was further measured by Hall,62 and the phase diagram shown here as Fig. 9 incorporates data points from both Refs. 32 and 62. J. S. Blakemore R129 Downloaded 21 Sep 2011 to 210.32.148.91. Redistribution subject to AIP license or copyright; see http://jap.aip.org/about/rights_and_permissions T m c::::::1513-3.5P __--Q--~-----1513K Liquid Phase :x: Go As + Liquid 1200 1083 K ~ / 1000 GoAs + Liquid W 0::: ::> ~ <t en 800 <t o 0::: W 0- ::E t!) / I \ ~ " 0.98 600 '- w ~ / /'~-~ T~'K· 1090 \ "'"---------" I iJ.Hm / GoAs 1- 0 0.4 0.6 0.8 1.0 ARSENIC FRACTION, X As FIG. 9. Conventional metallurgical format for the Ga-As binary phase diagram, with arsenic fraction X A , as a linear abscissa scale. The inset shows the extreme arsenic-rich end, with the eutectic freezing point depressed below that of pure As. Data points shown are: 0 Work of Koster and Thoma"; 6. Measurements of Hall 62 for the gallium-rich end. The normal melting temperature T m for stoichiometric GaAs was reported to be 1511 K by Koster and Thoma, 1510 ± 3 K by van den Boomgaard and Schol, 1511 K by Richman,63 and Tm 1513 = ±1K (3) in the subsequent work of Lichter and Sommelet. ± 0.6 kcal/mole = 728 ± 17 Jig. (5) (6) which is slightly larger than values estimated from analyses of the Ga-As system liquidus curve.34.63.69 An interesting feature of the arsenic-rich end of the Ga-As liquidus curve, shown as an inset in Fig. 9, is that a Gao02As098 eutectic has a melting point some 7 K below that of pure arsenic. The form of the liquidus curve on the gallium-rich end has received far more attention, with thermodynamic analyses by Vieland,70 Thurmond,69 Arthur,71 Sirota,34 and Panish,72 among others. The underlying thermodynamics is reviewed extensively in the book by Casey and Panish. 7 The Ga-As liquidus curve is shown again in Fig. 10, this time with a logarithmic scale for x As so as to give most attention to the gallium-rich end of the spectrum: a region of immense technological importance for liquid phase epitaxial growth of GaAs itself, and of ternary and quaternary materials which are lattice matched go GaAs.7.73-76 That topic lies outside the scope of the present review. Since arsenic is much more volatile than either gallium or GaAs, the three-phase equilibrium among solid GaAs, a Ga-As melt, and its vapor mixture, is of importance. The GoAs + Solid Go 0.2 25.2 iJ.Sm = 16.64 ± 0.40 cal/mole K, Solid As 200 0 = That corresponds to an entropy of fusion 400 303 K (4) Lichter and Sommelet64 measured the heat offusion for stoichiometric GaAs by direct calorimetry, obtaining I 1083 / / (0<P<45kbar). From that derivative ( - aTm lap) and other thermodynamic properties, it was estimated by Sirota34 that the specific volume of GaAs should contract by some 6.4% on melting. That is comparable wtih the contraction of germanium 66 (of the same lattice constant in solid crystal form) when that element melts to a liquid phase of higher coordination number. 67.6R 1400 ~ K 64 J ayaraman et al. 65 showed that hydrostatic pressure depresses the melting point of GaAs, with 1500 0.7 i 1400 t 1300 1 I I 1 I II 00 w a:: <t:1 °1 1000 - t?1 I I I I I I ~ ....W 0.9 .... o " o (1)/ ::::> 900 10- 3 2 5 10- 2 2 5 ARSENIC FRACTION, R130 J. Appl. Phys. Vol. 53, No.1 0, October 1982 10- 1 X AS I ~ 1 1200 ~ a:: w a. O.S o 1.0 1.1 FIG. 10. Liquidus curve for the Ga-As binary system, using a logarithmic abscissa scale for the arsenic fraction x A, . The identification of data points is the same as for Fig. 9. 1 1.2 2 5 • ---l~ J. S. Blakemore R130 Downloaded 21 Sep 2011 to 210.32.148.91. Redistribution subject to AIP license or copyright; see http://jap.aip.org/about/rights_and_permissions 0 . 1 -I -2 '. /1RICHMAN DATA ~\J. . -3 -4 :2:. I- <J: -5 (L (9 -6 0 -1 -7 -8 -9 -10 0.7 0.8 0.9 (IOOOIT) 1.0 1.1 (K- I ) -II 0.7 FIG. II. Equilibrium vapor pressures of monatomic Ga and As, and of As, and As., along the binary liquidus curve of the Ga-As system, from the work of Arthur. 7' The vapor pressures of AS 2 and As. over pure arsenic are also shown. (Note the changes in the latter curves at the melting point of arsenic, \090 K.) early Boomgaard and Schol work on the GaAs phase diagram 32 included P-x As and P- T projections, from the normal T m down to about 1050 K. (Subsequent work all shows that the vapor pressure falls more rapidly on cooling than this early study had indicated.) Measurements by Drowart and Goldfinger,77 Gutbier,78 Lyons and Silvestri,79 and Richman 63 for various temperature ranges were all reviewed in terms of the multi phase thermodynamics by Thurmond,69 who modeled the temperature dependences of the partial pressure for the various species present (dominated by AS 4 and As 2), and for the resulting total pressure. Further measurements by Arthur 71 in the 900-1200 K range enabled the latter to refine Thurmond's analysis. Figure 11 shows Arthur's result for the variation of equilibrium vapor pressures for Ga, As, As 2, and AS 4 along the binary liquidus of Ga-As, plotted versus reciprocal temperature. For AS 2 and As 4 , the figure also indicates the pressure over pure arsenic (which is solid below 1090 K, and liquid above that temperature). Except in a situation when free As is present, the vapor pressure above GaAs is controlled by the lower portions of the AS 2 and AS4 curves. Thus Fig. 12 reproduces Arthur's display of equilibrium pressures for Ga, AS 2 and AS4 over GaAs itself, with data points from Richman's total pressure measurements 63 as well as from Arthur's mass spectrometry.7I Arthur deduced an equilibrium atmosphere over stoichiometric GaAs at its normal melting point of 0.976 atmospheresP As, = 0.328 atm, andP As. = 0.648 atm. Thecontributions of both monatomic species, Ga and As, to the total pressure are trivial for those circumstances. B. Thermal expansion The cubic nature of the sphalerite structures endows GaAs with an isotropic expansivity. There the simplicity R131 J. Appl. Phys. Vol. 53, No.1 0, October 1982 0.8 0.9 1.0 1.1 FIG. 12. Equilibrium pressure vs reciprocal temperature for Ga, As 2 • and As. vapor constituents over GaAs. From Arthur," with his data points obtained for the three species in the temperature range 900-1200 K by mass spectrometry. The higher temperature total pressure data of Richman" is also shown. ends, for the volume expansion coefficient /3 = (l/V)(aV laT)p, and the linear expansion coefficient a = (j3 13) = (l/L )(aL laT)p vary in sign and magnitude with temperature in a complicated way. The physics of why and how this happens has been reviewed by Novikova,80 and brief comments should suffice here. The sign of the expansivityislinkedtothatof(dyldT), wherey = - (d In Id In V) is the Griineisen parameter, influenced by anharmonicity terms in lattice energy. Thus a (or, equivalently, /3 = 3a) decreases from its high temperature positive value on cooling, passing through zero for T~56 K as measured by Novikova. 81 Figure 13 shows Novikova's raw data for aT' covering the temperature range 28-348 K. Those negative values of a T for T < 56 K were consistent with Blackman's modeling 82 of the rela- e 7 -, ~ .. 5 :.:: ., '"0 3 : 1 0 -I \ . . .. '\ . ~O , 80 120 f50 200 TEMPERATURE 2~0 680 .JZO 350 T (K) FIG. 13. Raw data for the linear expansion coefficient of gallium arsenide vs temperature in the range 28-348 K, as reported I;y Novikova.", The second entry in Table VII indicates a smoothed representation of these data for T> 120K. J. S. Blakemore R131 Downloaded 21 Sep 2011 to 210.32.148.91. Redistribution subject to AIP license or copyright; see http://jap.aip.org/about/rights_and_permissions 20r-----------,------------n----------~~ I I z o (LO=826Cm)~1 15 (/) Z <1- c..o« 10 X W.-J / a::<J / / « z The negative character of a is not maintained to the lowest temperatures, however. The third law of thermodynamics requires zero expansivity for T = 0, and Daniels R3 observed that the pressure dependencies of elastic moduli for diamond-type lattices should be consistent with a positive expansivity, aT a:. + T\ for T </)D' This has been confirmed for GaAs by high-senSitivity measurements of thermal expansion and contraction at low temperatures. Sparks and Swenson R4 used magnetic induction of a variable transformer to detect length changes of a GaAs rod, with 5 X 10 - 10 em resolution. Smith and WhiteR, obtained similar sensitivity with capacitance dilatometry. Those two investigations gave modestly different values for the low temperature expansivity, a matter of concern for the specialized topic of calculationg how the Griineisen parameter y varies with temperature. [A curve for y(T) is provided by Smith and White. H5 ] For less exotic and demanding purposes, the agreement between these two investigations R4 •R5 in a difficult type of experiment is admirable. As a consequence of the two reversals of expansivity with temperature, the quantities a and fJ are zero for three temperatures: T = 0, 12, and 56 K. Similarly, the length for T = 0 is regained at both 15 and 68 K. Figure 14 illustrates the low temperature behavior as determined experimentally, with the lowest temperature positive expansion data of Sparks and Swenson R4 in Fig. 14(a), and a comparison of the aT data from Refs. 84 and 85 in Fig. 14(b). The linear thermal expansion behavior for the temperature range including room temperature and upwards has been measured in a number of investigations, of which some are tabulated in Table VII. The approximate magnitude of a 300 has been known since the early citation by Welker and Weiss,xo which was remarkably close to the "consensus" value implicit in Eq. (8) to be quoted below. ! t:.L ~ 2.2 x 10- 12 T4 LO I I I \ w I SPARKS e. 5 SWENSON .-J (0 ) OL-----~~~L_ o _ _ _ _ _ _ _ _ _ _L__ _ _ _ _ _ _ _ ~~ 10 5 TEMPERATURE 15 T( K) o W U u. u. w 0_ \./SMITH -5 u-;- \, z::<: -, WHITE SPARKS e. SWENSON \ Ocv e. ( ~ ~ -10 \\ <1- ~ ., W -15 a:: <I (b) W Z _20L-__ ~ o ____L-__- L____L __ _ 10 20 TEMPERATURE ~ _ _ _ _L __ __ L_ _ 30 ~ 40 T(K) FI G. 14. Low tern perature linear expansion/contraction behavior of GaAs, as deduced in experiments of Sparks and Swenson,"4 and of Smith and White"Sla) The (positive) linear expansion for T < 15 K. (b) Behavior of aT' with emphasis on the region of T> 12 K for which this derivative is negative. tion between vibrational energy and lattice volume for the sphalerite structure. TABLE VII. Investigations of GaAs linear expansion coefficient that extend to 300 K and above. Reported by, and year Footnote citation Temperature range, and method used (K- I ) Welker and Weiss (1956) 86 unspecified 5.7 X 10- 0 Novikova /1961) 81 28-348 K Quartz dilatometer 5.87x 10 Bernstein and Beals (1961) 89 298-965 K Interference dilatometer 4.84 X 10- 0 Amick (1963) 87 300--875 K X-ray a", =5.93 X 10- 0 average over range Nan and Yi-huan 11965) 88 296-1008 K X-ray a"v=6.4X 10 " as average of all data Straumanis and Kim (1965) 29 280--340 K X-ray 6_0 X 10- 0 Pierron et at. (1966) 30 211-473K X-ray 6.9 X 10'" Feder and Light 11968) 90 307-610 K Interference dilatometer 5.53 X 10-- 1, R132 J. Appl. Phys. Vol. 53, No.1 0, October 1982 at IK ') lifnot synonymous with a",,) a.wo n =- ar 1.12X 10 -n Ivalid above 120 K) at at = T 2.9X 10-'" + 4_1 X 10 + 7.0x 10 = + 2.9):" 10- b+ 1.1/10 'T-5.9X1O- I' T' "T - 1.8 X 10 "T' 'T -- 7.5X 10 "T' J. S. Blakemore R132 Downloaded 21 Sep 2011 to 210.32.148.91. Redistribution subject to AIP license or copyright; see http://jap.aip.org/about/rights_and_permissions Of the entries in Table VII, the x-ray measurements of lattice constant by Straumanis and Kim,29 and by Pierron et al. 30 were noted in Sec. II. Other x-ray measurements by Amick,87 and by Nan and Yi-huan,88 extended to quite high temperatures; but the former quoted only an average value for a, while the results of the latter lacked the precision necessary to be informative about variation of a with T. That variation had, of course, been amply demonstrated by Novikova's results 81 as shown in Fig. 13, and was further evidenced by optical dilatometry work of Bernstein and Beals,89 and of Feder and Light.90 A polynomial representation of the form aT = (A + BT - CT2) obviously cannot be correct for the entire high temperature domain, since the physics of the situation requires that a level off for I)AJ D • Nonetheless, that simple polynomial form provides a useful framework for simulation of a T over reasonably wide temperature ranges, and the nonlinearity of thermal expansion is expressed in that form for three of the entries in Table VII. Several of the investigations noted in Table VII were taken into account in a 1976 volume concerning thermal expansion of various solids,91 in the recommendation of a "consensus" polynomial form for the temperature variation oflength [and thus of aT = (l/L )(oL loT)p] well above the tricky region of negative expansion. The recommended consensus expression for length, when slightly adjusted to make the balance point occur at 300 K rather than at 293 K as elected by Touloukian and Buyco,91 is LT = L 300 (0.99849 + 4.24X 10- 0 T + 2.91 X 10- 9 T" - 9.40 X 10- 13 T 3 ) (200 < T < 1000 K). (7) Accordingly, the "consensus" value for the linear expansion coefficient in the same temperature range, 200-1000 K, is aT = 4.24x 10- 6 + 5.82X 10- 9 T (8) This gives a room temperature value a 300 = 5.73x 10- 6 K - I which is a remarkable reaffirmation of the value quoted in 1956 by Welker and Weiss. 86 For a temperature regime that extends rather below that of Eqs. (7) and (8), the form 1.12 X 10- 6 + 4.1 X 10- 8 T -5.9XIO- 11 T 2 K- I aT~ - (120 < T < 350 K), (9) noted in Table VII as modeling the results of Novikova,81 does a better job of portraying the steep falloff of a T as one cools towards the cryogenic range. c. Specific heat and thermal Oebye temperature The "classical" specific heat at constant volume for N atoms of a solids ( = ! N molecules for diatomic GaAs) is Cel = 3kN. Expressed per unit mass of solid, this amounts for GaAs to Cel = 0.345 Jig K, in view of the molecular weight and atomic density listed in Table I. Of course, the specific heat which is actually measured for a solid is Cp rather than C v ' but one can reasonably expect Cp to approximate Cel for temperatures comparable with or a little higher R133 J. Appl. Phys. Vol. 53, No.1 0, October 1982 5 Z > ..J 2 W ~ 10') ::!E <l a:: l? "W ..J :::;) 0 5 2 J a. 10- 2 U W a:: I 5 :::;) if) if) I w a:: I 0.. I I I I I I I I I~( 47T4 C el /5 e~)T3 / for 8 0 = 345 K I I I f<l W I I I I I I 10'· I U LL 5 U W 0.. if) 20 50 100 TEMPERATURE T( K) FIG. IS. Specific heat Cp(T), using Cetas etal. data" up to 30 K, those of Piesbergen"2 for the range 35-273 K, and of Lichter and SommeletM from 300 K to the melting point. than the thermal Debye temperature eD' Figure 15 shows that this approximate equality is achieved for temperatures in the range 300-500 K. The curve of Fig. 15 is derived from three experimental calorimetric investigations: that of Cetas et al. 53 which covered the range 1-34 K, by Pies bergen92 for the range 12273 K, and by Lichter and Sommelet64 from 300 K into the molten range above 1513 K. Piesbergen's low temperature data does not mesh perfectly with that of the subsequent highly organized thermometric study by Cetas et al., and an extrapolation of Pies bergen's (dCpldT) upwards would miss the Cp (300) data point of Lichter and Sommelet by some 2%; thus some liberties have been taken in the overlap and bridging temperature regions in the construction of the curve in Fig. 15 and in the accompanying Table VIII. (Interpolation between entries of Table VIII will be of assistance for those who need to actually use specific heat information.) It can be expected that the measurable specific heat Cp will exceed Cel for a temperature well above the Debye eD' since Cp > C v due to thermal expansion. Piesbergen93 remarks that one can expect J. S. Blakemore R133 Downloaded 21 Sep 2011 to 210.32.148.91. Redistribution subject to AIP license or copyright; see http://jap.aip.org/about/rights_and_permissions TABLE VIII. Specific heat Cp : a consensus of values from colorimetric studies." T Cp T Cp T Cp (K) (mJ/g K) (K) (mJ/g K) (K) (mJ/gK) 4 6 8 10 12 14 16 18 20 22 24 26 28 0.043 0.156 0.422 1.00 2.12 3.96 6.62 10.07 14.2 18.8 23.7 28.9 34.1 30 35 40 45 50 60 70 80 90 100 110 120 130 39.4 52.4 65.4 78.1 90.4 114 138 160 181 199 216 230 243 140 150 160 170 180 190 200 210 220 240 260 273 280 254 264 272 279 285 292 298 304 308 315 320 323 325 T (K) Cp (mJ/g K) 300 400 500 600 700 800 900 1000 1100 1200 1300 1400 1500 327 335 343 351 359 367 375 383 391 400 408 416 424 "Values for T(30 K from Cetas el al. (Ref. 54). Values for 1'",300 K from Lichter and Sommelet (Ref. 64). Values from Piesbergen (Ref. 92) between 35-200 K, and adjusted very slightly higher between 200-300 K so as to mesh with Ref. 64 data for the upper range. Cp Cv~9a2B, VT, - (10) = 345 ± 3 K, and the good agreement with the calorimetric limit e zal was remarked in Sec. III A. The Debye model for lattice vibrational energy results in the statement 3 where Vis the specific volume (i.e., 0.188 cm /g for GaAs), the bulk modulus B, ~ 7.5 X 1011 dyn/cm2 from Table IV, and a=6.5 X 10- 6 K - I for T~! T m' Equation (10) would thus lead one to expect (dCpldT)=5 J1J/g K2, an order of magnitude smaller than the rate at which the upper temperature entries increase in Table VIII. The specific heat of intrinsically generated electron-hole pairs for high temperatures is far too small to account for the discrepancy; thus the data concerning n i developed in Sec. VI would indicate a total free carrier specific heat smaller than 20 J1J/g K at the melting point. Thus the steady rise of Cp deduced by Lichter and Sommelet 64 for high temperatures is open to question. The Bose statistics of phonons dictate that Cp fall progressively below Cel when the temperature is lowered below the range of the Debye parameter eD' The zero-temperature limit of the "elastic constant" Debye temperature was encountered by means of Eq. (2), as evaluated at e~I :>c:: (11 ) Cp=C" = Cel F(eDIT), where the function l y 3x4exdx ( 12) F(y)= o y :I(ex - 1.)2 has been tabulated 94 to cover from the high temperature limit F(O) = 1 to the low temperature regime F( y)=(41T4/5y 3) for y> 20, so that Cp~(41T4Ccl/5)(T le}))3 } T<e D !20. = 26.9(T le D)3 Jig (13) K The curve in Fig. 15 shows that for GaAs (as for many other solids), Cp faUs/aster than aT 3 manner below about 20 - - - - 8ocal = 345 K 340 O~ ero 1-0 wQ) :2w 320 FIG. 16. Temperature dependence of the effective calorimetric Debye variable (J'al. This is generated by inversion of Eq. (II), based on Cel = 0.345 Jig K, and with Cp taken from Table VIII and Fig. IS. (For the region above 70 K, where the data of Piesbergen Q2 are used, the very small differences between Cp and C" values were taken into account.) The zero-temperature asymptotic limit (J~al = 345 K is as deduced by Holste." -er er::J 01- -1<1 <1er 300 Ow we.. >:2 -w t;1- 280 Ww LL>LLcn Ww a 260 240 L-~_-L_l--J_-L o 20 40 __~~_-L__~_L--k_~_L-~__-k~ 60 80 TEMPERATURE R134 J. Appl. Phys. Vol. 53, No.1 0, October 1982 100 120 140 160 T(K) J. S. Blakemore R134 Downloaded 21 Sep 2011 to 210.32.148.91. Redistribution subject to AIP license or copyright; see http://jap.aip.org/about/rights_and_permissions K, indicative of a Debye parameter which is then rising as T falls. Figure 16 plots the temperature dependence ofthe effective calorimetric Debye variable (jCal which results from inverting Eq. (11), with the Cp values of Table VIII and Fig. 15 as raw material. As previously remarked in Sec. III A, Holste 55 has determined the zero-temperature limit of that variable to be e ~al = 344.6 ± 2 K, from a detailed reanalysis of the data of Cetas et al. 54 That agrees admirably with expectations from the elastic moduli. Above the temperature range covered in Fig. 16, Piesbergen's data92 .93 indicate that (jCal continues within ± 2% of 360 K. It accordingly seems appropriate to use eD =360 K for the many phenomena that occur in GaAs near and above room temperature, for which the phonon population plays a role. It should come as no surprise that eD =360 K is equivalent to (keD/h )= 7.9 X 10 12 Hz. That approximates the long wave TO mode frequency, and is near the highest peaks of the g(v) curve in Fig. 8. 1.0 :.:: :!: HOLLAND "PURE" SAMPLE 3 "0'" 7.10 15 CM- o.s u ..... ~ 0.6 ..J ~ >- I- > 0.4 IU => 0 z 0 u -.J « :!: a:: w r 0.2 AMITH et cL SAMPLES I- 16 o ~ o n o ",5xI0 CM·3 no'" 4.10 17 CM·3 no"'SxI0 18 CM- 3 « [:, Po'" 6. 10 19 CM- 3 w u 'V I-.J D. Thermal conduction Since GaAs has a cubic lattice, thermal conduction can ordinarily be expected to be isotropic: whether by transport primarily of phonons, of photons, or of electrons and/or holes. Marucha et al. 95 were able to observe heat flow anisotropy in an inhomogeneously doped GaAs crystal, but this was rather different from the conduction of bulk, homogeneous material. However, low temperature ballistic phonon motion in GaAs,56.57 as excited by a heat pulse or hot electron pulse, is affected by focussing effects which are consequences 96 of the elastic moduli anisotropy. This can make phonon ballistic propagation strongly dependent on direction and polarization. As with other solids (such as germanium) with a comparable elastic tensor, the consequences can include magnification. 97 The intent of this review was stated at the outset as a concentration on properties of the GaAs lattice itself rather than on effects of specific defect and impurity species. However, it is perhaps worthy of note that phonon transportation can facilitate study of obstacles created in the GaAs lattice. Vuillermoz et al. have used low temperature thermal conduction to monitor phonon scattering by defect clusters98 or dislocations 99 that they created by heat treatment of GaAs. Challis et al. lOO .101 have used low temperature phonon scattering to assist them in finding out how many Cr impurities were on various types of site, and in what states of charge. Drabble and Goldsmid's classic book on thermal conduction in semiconductors lO2 appeared too early in the development phase of III-V family to be a complete source of information on that phenomenon in GaAs. A few years later, Holland 103,104 and Carlson et al. 105 published major experimental studies of the lattice thermal conductivity KL (T) for GaAs, from 300 K to the liquid helium range, and from "high purity" to moderately strong doping on both N- and Ptype sides. Almost contemporaneously with those studies, Amith et al. 106 described thermal conduction measurements in GaAs for the 300-900 K range, Thus, the new material could be incorporated in a 1966 review by Holland, 107 which commented on the development of phonon transport theory R135 J. Appl. Phys. Vol. 53, No.1 0, October 1982 0.1 200 T (K) FIG. 17. Lattice conductivity K L (T) in the range 340-950 K, as measured by Amith et al. 106 for three N- and one P-type GaAs monocrystal sample. Also, at upper left, the higher temperature portion of KL (T) as measured by HoIland 104 for a lightly doped sample. in a nonmetal, from Peierls' distinction of three-phonon Nand U-processes, to the cOLtributions of Casimir, Berman, Klemens, Callaway, and others. The general framework of understanding of thermal conduction processes in a nonmetal is presented much more fully in the book by Berman, 108 while the physics of what goes on especially at temperatures comparable to or higher than D has recently been thoroughly reviewed for the sphalerite and several other crystal structures by Slack. 109 Figure 17 displays the high temperature lattice thermal conductivity K L for four variously doped GaAs monocrystal samples, as deduced by Amith et al. 106 From the measured values of total thermal conductance (obtained as ac thermal diffusivity), KL was obtained by Amith et al. by subtraction of the expected electronic thermal conduction terms (not a major correction even for the more strongly doped of these samples). The following points may be made concerning the resulting curves: (i) The curves of K L vs T for the two moderately doped N-type samples show an enhancement for a temperature range centered on about 800 K. Amith et al. attributed this to the net flow of blackbody radiation (photons). That mechanism had been proposed earlier by Genzel llO as observable for a semiconductor when phonon conduction is weak, and so also is free carrier absorption for the blackbody peak. (Ap =4,um for T~800 K.) Thus the photon transport effect is inhibited by long wavelength opacity for lower temperatures, and by free carrier absorption for heavy doping and/or higher temperatures. (ii) The downwards path of K L (T) is depressed by heavy doping: a common occurrence in a semiconductor, associat- e J. S. Blakemore R135 Downloaded 21 Sep 2011 to 210.32.148.91. Redistribution subject to AIP license or copyright; see http://jap.aip.org/about/rights_and_permissions 50 :.c PHONON FREE PATH ~ U Ap:O.OICM "- 20 ~ ..J 10 ~ >- -f> 5 fU => a 2 2 0 u CARLSON etal. -l N - TYPE SAMPLES no'" 10 16 CM-3 <{ • ~ c:: W :r: f- W U f= f- 'V no: 1.4 x 10 16 CM- 3 [Tel: 9 x 10 17 CM- 3 0 [Se): 1.2 x 1018CM- 3 • 0.5 KL P- TYPE SAMPLES o [Zn] : 3 x 10 18 CM- 3 0.2 <{ " -l [Zn]: 1.2 x 1019 CM -3 0.1 3 10 30 TEMPERATURE 100 300 T (K) FIG. 18. Lattice conductivity K LIT) from 300 K down, as measured by Carlson et al. "" for single-crystal GaAs samples doped as indicated. The dashed line indicates K LIT) as appropriate for a phonon free path of 0.0 I em. ed with scattering of phonons by free carriers. III (iii) The temperature dependence of KL for the various samples (once the photon contribution has been subtracted) is appreciably steeper than the T - I dependence expected from an Umklapp three-acoustic-phonon process above Umklapp temperature 0U=WD' The temperature dependence, resembling T -5/4, co~ld nominally be explained by higher-order processes such as four phonon ones, 112 including those assisted by long wavelength longitudinal phonons; 113 but it seems more likely that three-phonon processes involving both acoustic and optical phonons are involved, 114 as discussed by Berman 108 and Slack. I ()9 Figure 18 shows how K L (T) can be expected to vary for the range from room temperature downwards, as measured in this case by Carlson et al. 105 for N- and P-doped single crystal samples. These data agree well with those obtained by Holland 103,104. 107 for doped monocrystal samples in a similar temperature range. The data at upper left in Fig. 17 (which appear consistent with Amith et al. 's higher temperature data) are the highest temperature points Holland reported 104 for his "purest" N-type sample, As discussed by Berman,108 the lattice conductivity is controlled primarily by resistive phonon scattering processes, of probability r Ii I, though Callaway showed 115 that "normal" three-phonon processes have an indirect effect. The resistive scattering probability should be assessed from (14) averaged over the phonon energy spectrum. Here, r b- I refers to scattering at boundaries (of the sample itself, or at grain boundaries for a polycrystalline sample), as described by CaR136 J. Appl. Phys. Vol. 53, No. 10, October 1982 simir. 116 The term r;- I accounts for isotope scattering, nontrivial for a pure sample at low temperatures. 103 The rate r d- I associated with impurities, point and line defects, etc., is the principal one for impure GaAs at low temperatures; and r;;' I signifies the Umklapp scattering rate: a quantity which decreases drastically as temperature falls below Ou ~40D' and phonons of /q/ > 0.5 becomes unavailable. The Debye model treatment of the phonon supply is usually adopted 108, liS for T < 0 D; and some additional rigor is imparted if the contributions of LA and T A phonons to Tu 1 are assessed separately, as attempted by Tiwari et al.I 17 for KdT) in fairly pure GaAs up to room temperature. The summation over resistive process probabilities can be used, at the lowest level of sophistication, to define a phonon mean free path Ap (T). In simple kinetic theory language, this is related to the lattice conductivity by =~pC vA P' 3 P (15) where p is the density, and v = (kODlh) (41TV 13N)I/3 is a mean of the speeds for the various participating phonons. Thus for each of the curves in Fig. 18, the rise of KL on cooling is a response to the decrease of Umklapp scattering as a limitation on r R and A p , The subsequent steep fall of K L for lower temperatures is required by the decrease of Cp once Ap has become controlled by static entities. For material pure enough so that r;;- I controls Eq. (14) down to low temperatures, Peierls noted that 118 one should expect KL to vary as exp(Ou IT), for T < Ou ~~OD' In sympathy with this trend, the weakly doped sample of highest conductivity in Fig. 18 hasK L =0.5 exp (160IT) W Icm K in the range 50<1<; 150 K. As a more complete examination of what controls phonon scattering in that sample for various temperatures, Fig. 19 shows a curve of Ap = (3KL / pCp v) for the complete range 3-300 K using the lattice conductivity data of Fig. 18, and thermal data from Sec. IV C. The dashed curve in Fig. 18 represents the upward trend of KdT) from Eq. (15), with a phonon free path Ap = 0.01 cm. That curve is very slightly perturbed from a T) slope by the temperature dependence of the calorimetric Debye variable (J"al (see Fig. 16) as influencing both Cp and v. Thus it can be seen from Figs. 18 and 19 that all five of the samples of Fig, 18 have A p ~ 300 A at room temperature, and that this rises to a low temperature maximum of some 10- 3 cm for the P-type samples, and to 0.05 cm or more for each of the N-type samples. 119 The investigations of Carlson et al. 105 and of Holland 1()4 both showed that acceptor impurities such as Zn and Cd are much more effective than shallow donors in holding down Ap for low temperatures (as is also true in other Group IV and 111- V semiconductors). Holland 104 also reported the more complex behavior of K L (T) for GaAs doped with manganese, associated with phonon coupling to carriers in the Mn acceptor ground state. Chaudhuri et ai, 120 measured the resonance scattering of phonons (as affecting K L ) for Crdoped GaAs, an impurity for which the measurements of Challis et al. 100,]() I on phonon scattering were noted earlier in this section. Thus there are several extrinsic considerations which can affect the thermal conductivity KL (or, equivalentJ. S. Blakemore R136 Downloaded 21 Sep 2011 to 210.32.148.91. Redistribution subject to AIP license or copyright; see http://jap.aip.org/about/rights_and_permissions knowledge from them may have influenced our current understanding of the topic on which this Section focusses. That topic is the behavior of the complex dielectric constant, from the far IR to the vacuum UV. Several terminologies are in concurrent usage for dielectric and optical response function. That used in this Section is sketched here. Let E* (v) be the complex permittivity for frequency v. Then the (dimensionless) complex dielectric constant is written 10- 1 ~ U 0.10- 2 < :z: ~ <t a.. 10- 3 E*/Eo==-K* W W = KI - iK 2. (16) The real and imaginary components, K I and K 2' can each be a function of frequency. The complex refractive index is a:: u... z 4 <t 10- (17) W ~ Z 0 Z 0 with the real refractive index n and the extinction coefficient k as its components, From Eqs. (16) and (17), it follows that 10- 5 KI :z: a.. = n2 - k 2 , (18) K2 = 2nk, and also that 10- 6 3 10 30 TEMPERATURE 100 300 T (K) FIG. 19. Temperature variation of the phonon mean free pat~ Ap = (3KLI pCp v). for the N-type GaAs sample of highest lattice conduct1Vlty and weakest doping in Fig. 18. (no"'" \016 cm- 3 .) ly, the thermal diffusivity D = KL / pCp, which is often the quantity experimentally measured) for a low temperature situation. From room temperature upwards, however, the effects of impurity doping on the total thermal conductivity are of a different character: a slight decrease of the phonon transport itself, a tendency offree carriers to suppress any blackbody transport, and the conduction (not remarkably strong) of free carriers themselves. Unlike semiconductors of smaller energy gap (such as Ge or Si 121), the intrinsic carrier pair density in GaAs is never large enough to permit the bipolar transport K bp of electron-hole pairs 102 [with energy E bp "'(E; + 3kT)] to become a sizeable fraction of the entire thermal conduction. The intrinsic carrier pair density for GaAs has recently been reviewed elsewhere,122 and will be discussed further in Sec. VI. V_ DIELECTRIC AND OPTICAL PROPERTIES Much work has been done concerning optical properties ofGaAs, as reported in numerous research papers and in an extensive review literature. The optical properties for hV':::::f.E; have naturally interested the authors of books on GaAs lasers. 6 •7 The third volume of the "Semiconductors and Semimetals" series was devoted to III-V compound optical properties,123 while other relevant chapters occur in Volumes 8, 9,12, and 14 of that series. 10 With that wealth of original and review material readily available, it did not seem useful for this Section to attempt an encyclopaedic recapitulation of all that has been deduced and published previously. Thus many more specialized optical phenomena are not recounted here in detail, even though R137 J. Appl. Phys. Vol. 53, No.1 0, October 1982 n=(l/V'L)[(Ki +~)1/2+Kdl/2, k = (1V'L) [(Ki + ~ )1/2 - Kd 1/2. (19) Thus the dielectric/optical response behavior can be described equally readily in terms of K I and K 2 , or in terms of n andk. The absorption which occurs whenever K2 (and thus k ) is nonzero can be characterized by the "extinction length" (c/41TVk), the distance in which the energy transmitted decays by a factor of "e." More conveniently and commonly, absorption is expressed in terms of the reciprocal of the extinction length: the absorption coefficient a = 41TVk /e. (20) Absorption coefficient data in this Section are expressed in cm- I . The normal incidence reflectance of a solid:vacuum (or solid:air) interface is R = n* - 112 In* + 1 = (n - If + k (n + 1)2 + k 2 (21) 2 • This applies both entering and leaving the dense medium. The reflectance simplifies to R ':::::f.[(n - 1)I(n + 1 when k <1: tantamount to a requirement that a <105 cm - I for the near infrared. For GaAs at photon energies just below the intrinsic absorption edge, n':::::f.3.3 results thus in R':::::f.0.29. However, when k becomes large for hv> E;, the reflectance can be very informative about both the absorptive and dispersive aspects of n* and K*. Figure 20 provides a rough sketch of how the components KI and K2 of K*(V) vary through the spectral range 10 meV to 10 eV. The real part of the dielectric constant asymptotically approaches the "static" or "low frequency" dielectric constant (K I-.Ko) below the reststrah1en range; the imaginary part K2 becomes negligibly small, and stays that way for all lower frequencies in nonconducting GaAs. The strong dispersion/absorption/reflection properties of GaAs in the reststrahlen region are indicated crudely in Fig. 20, for hv"'35 meV. In that region, photons can be annihilated by excitation of long wavelength optical mode W J. S. Blakemore R137 Downloaded 21 Sep 2011 to 210.32.148.91. Redistribution subject to AIP license or copyright; see http://jap.aip.org/about/rights_and_permissions . I KO ---~", o I I + I ---------- K I ---K2 /l ! ",' . , ....-_ .... _------_ .. _----------_ .. --'''''' z ,/ I\V ~A ~' \ I « ! /' ':i: I: !J I~ ~ II i .,--- II I IJ I \.'/i !. I! OL--- I 0.01 K 00 ' I 0.03 : I :: • I " 0' I I 0.1 0.3 hv oj I 3 10 (eV) FIG. 20. Symbolic representation ofthe real part (K ,) and imaginary part (K 2) of the complex dielectric constant for GaAs, from the "low frequency" regime ofK ,->Ko well below the reststrahlen region of the infrared, through to the highly absorbing visible and ultraviolet regions of interband transitions. Artistic license has been used in drawing the dispersion (K,) and absorption (K 2) curves in the reststrahlen range ten times wider (and with peaks and valleys ten times reduced) than reality. phonons. The curves of K I and K2 in Fig. 20 for that reststrahlen region have been drawn ten times broader than in reality, and with the amplitudes of excursion correspondingly reduced, in order that the S shape of dispersion of K I and the inverted V shape of absorption of K2 should be visible. Weak phonon overtone and combination absorption bands occur for GaAs in the range 35-105 meV. These are far too weak to produce any notable departure of K2 from zero in that spectral range, or to modify K I from the "high frequency" or "infrared" value K r--....K = (n )2 that it enjoys for the middle to near infrared. Appropriately doped GaAs samples also show free carrier absorption in the infrared, also a process of relatively low efficiency. All of the above are discussed in the ensuing subsections. For room temperature, the direct intrinsic absorption edge occurs when hVj -1.4 eV (A -0.9 ,um). Various opportunities for direct electron-hole pair creation ensure that dispersion and absorption are strong (and the reflectance high) throughout the visible, and well into the ultraviolet. Measurements of the optical properties of GaAs have, as for many other semiconductors, often entailed techniques far beyond the (apparent) simplicity of refraction, absorption, and reflection. The restriction of intentions for this Section means that just about all of the more specialized optically related topics are omitted, though citations are given to representative papers on many ofthem. A reader interested in one of these more specialized topics might usefully check a citation given in this Section against recent editions of Science Citation Index. That procedure could well give pointers towards more recent relevant experiments involving GaAs. Among the various optically related topics that are not provided with specific coverage in this Section are Raman and Brillouin scattering. The literature on Raman scattering . resonant Ra. GaAs 124-128'mc1u d es a1so papers concernmg m man scattering,129.130 and on how Raman phenomena are 00 R138 00 J. Appl. Phys. Vol. 53, No.1 0, October 1982 influenced by hydrostatic pressure 128 • 130 or by uniaxial stress. 127 The scattering of photons by polaritons involving acoustic phonons, in resonant Brillouin scattering, has also been reported for GaAs.131.132 Many optical phenomena can be observed and measured with enhanced precision by modulation and derivative methods. Cardona 133 discussed the status, as of about 1968, of how one may usefully modulate wavelength, temperature, stress, and/or electric field, in order to enrich the studies of optical phenomena in semiconductors. Volume 9 of Reference 10,134 published some three years later, comprised six detailed review chapters on aspects of modulated optical phenomena. Among the modulation-type optical experiments carried out for GaAs, one can note: wavelength modulated reflectance,135 piezoabsorption 136 and piezoreflectance, 137.138 thermo reflectance, 139 electroabsorption,140.141 electroreflectance, 142-152 and piezoelectroreflectance. 153 The application of a modulated electric field and/or uniaxial stress, for the spectral range hV>t;, has been of great value in elucidating the orderings of and spacing of the GaAs valence and conduction band systems. 154 That information is drawn upon in Secs. VI and VII, in connection with the thermal distribution of conduction electrons, and with the transport of those groups of electrons. The spectral range hv < t; is not lacking in significance either, for the effects of stress upon the optical properties. However, these also get no more than a mention here. Weinstein and Cardona 155 measured the effect of uniaxial stress of the optical response of GaAs in the reststrahlen spectral region. Recently, Feldman and Waxler/ 56 have used uniaxial stress to make GaAs piezobirefringent in the infrared. From this experiment, they were able to deduce the components of the photoelastic and piezo-optic tensors. Just as the various stress-dependent optical properties are noted here by literature citations, but not reported in detail, a similar omission of detailed coverage must now be admitted for the many and fascinating optical phenomena that are created by a large applied magnetic field.157.158 Among these specialized magneto-optic effects, one can note Faraday rotation,159-162 interband and intraband magnetoabsorption, 163-165 and magnetoreflectance. '66-'67 An additional complication of the latter experiment can be piezomagnetoreflectance, with a modulating stress superimposed. 158,166 Having furnished a long list of topics that will not receive detailed coverage in this Section, it is necessary to get down to the declared business at hand: the spectral dependence of the complex dielectric response function. The first topic to be examined is that of the low frequency or "static" dielectric constant Ko. One might reasonably expect this to be straightforward to the point of dullness. For GaAs, this has not been the case at all. A. The low frequency dielectric constant The parameter Ko can nominally be measured anywhere from dc to 10" Hz in the millimeter wave region. Reported measurements included conventional capacitance ones at frequencies from a few kHz to tens of MHz (with due regard J. S, Blakemore R138 Downloaded 21 Sep 2011 to 210.32.148.91. Redistribution subject to AIP license or copyright; see http://jap.aip.org/about/rights_and_permissions for fringing effects), and microwave methods using a microstrip or a cavity. As an alternative to citation of the entire published literature, the reader is referred to an excellent 1977 review by Stillman et al. 168 This summarized the results of a dozen room temperature determinations of Ko. It is probably wise to not take into account two anomalously low Ko values Stillman et al. report (obtained by microstrip methods). The remaining values Stillman et al. review all lie in the range Ko (300)~11.6 to 13.3. The breadth of that range is quite discouraging, particularly in view of the fairly narrow error bars that several of the original investigators had placed on their Ko values as included in that survey. It becomes clear that measurement of Ko (even for the simplicity of room temperature) is not all that easy! After examining the evidence, Stillman et al. 168 ended up with a recommended choice of Ko (300) = 12.9. A combination of dielectric and optical arguments was used by Rode l69 in arriving at the very similar choice Ko (300) = 12.91. It is worth noting that both of these choices are substantially larger than the value Ko (300) = 12.5, which Hambleton et al. 170 had deduced in 1961, from 1 MHz capacitance measurements. This comment is made since the value from Ref. 170 has been widely, and sometimes uncritically, used in the past two decades. In good support of the higher Ko (300) conclusions reached by Stillman et al., 168 and by Rode, 169 it is a pleasure to report on recent room temperature microwave measurements made by Neidert. 171 For these measurements, a semiinsulating GaAs sample, in the form of a rectangular parallelepiped, was completely metallized to form a resonator, excepting only small areas at two opposite corners as input! output ports. Using this techniques, Neidert found that Ko (300) = 12.9 ± 0.07, over the frequency range 4-18 GHz. Neidert concluded that this should be valid for all lower frequencies also. As may be seen from the summary in Table IX, of infrared and static dielectric response parameters, the present reviewer is able to deduce a Ko (300) value which is slightly smaller than Neidert's value as noted above-but to an extent ofless than one standard deviation in Neidert's conclusion. TheKo(T) expression in Table IX, with its consequences for 300 K, and also for temperatures appreciably lower and higher, was in fact obtained without using any of the direct Ko determinations as primary data. This reviewer actually en- joyed the singular pleasure of coming across Neidert's short paper 171 some time after having made the analysis that produced Table IX. The temperature-linearized expression for Ko (T) in Table IX was obtained by use of the Lyddane-Sachs-Teller (LST)61 relation KO =K"" (vLO/vTOf (22) It thus depends on the precision of available optical measuremen ts, of the infrared refraction index n 00 = vIK:, and of the long-wavelength optical mode phonon frequencies VTO and V LO ' The temperature-linearized expressions for the reststrahlen parameters, as shown in Table IX, are discussed further in Sec. V B. The primary data for the infrared refractive index is reproduced in Sec. V E. It was shown in Sec. IV B that the thermal expansion of GaAs is nonlinear with respect to temperature. Accordingly it is not likely that quantities such as K o, K and n are truly linearly dependent on temperature over any very wide range. Despite this, the convenience of a linearized approximation is considerable. Since the deduced temperature cofficients of the various quantities are all small, it is not probable that serious error could be incurred by the use of linearized approximations for low temperatures (where n data extends down to 100 K, while VTO and VLO values exist down to 4 K), or for temperatures above ambient up to (say) 600 K. It happens that two direct explorations of Ko(T) have been reported in the literature, as providing an apparently linear temperature dependence. In one of these, Champlin and coworkers 172.173 used microwave methods, for the ranges 100-300 K and 300-600 K. Subsequently, Strzalkowski et al. 174 used capacitance methods, for v<; 1 MHz, and for l00<;T<;300 K. Figure 21 shows the data of these two investigations, and displays a dramatic difference in the two assessments of temperature dependence. Figure 21 also shows the room temperature result of Neidert,171 and a dashed line obeying 00 , 00 00 Ko(T) = 12.40(1 + 1.2X 1O- 4 T). (23) That is the conclusion of the present reviewer, based on Eq. (22), and on the various linearized expressions summarized in Table IX. The value of Ko (adjusted appropriately for temperature) is needed for modeling the ionization energy, Bohr radius, TABLE IX. Summary of GaAs dielectric response parameters for hv < E j • 300 K value Linearized Form Parameter Static dielectric constant KO = 12.40(1 High frequency dielectric constant K~ Infrared refractive index (K~ )'/2 Long-wave TO phonon energy hVTO = 33.81(1 - 5.5 X IO-'T) meV 33.25 meV Long-wave LO phonon energy hVLO = 36.57(1 - 4.0X IO-'T) meV 36.13 meV Ratio (KoIK~) = 1.170(1 R139 + 1.20 X 1O- 4T) 12.85 + 9.0X IO-'T) 10.88 = 10.60(1 = n~ = 3.255(1 + 4.5x IO-'T) J. Appl. Phys. Vol. 53, NO.1 0, October 1982 + 3.0X IO-'T) 3.299 1.181 J. S. Blakemore R139 Downloaded 21 Sep 2011 to 210.32.148.91. Redistribution subject to AIP license or copyright; see http://jap.aip.org/about/rights_and_permissions 13.6 r------,---,----.---,-------,--~ o ~ f- z e oe CHAMPLIN et 01. b. STRZALKOWSKI et 01. c NEIDERT 13.4 <{ f- en sions of frequency. The relative narrowness of the absorption/dispersion region is scaled by the factor (vTO/yp). The LST relation, Eq. (22), builds the value of VLO = VTO yI(Ko/Koo) into this model, whereby Z o u u a:: f- u w 132 - K*(V) = (n - ik)2 = (KI - iK2) = Koo) Vro(Ko - + Vro - Y +iypv (24) 13.0 ..J W o 12.8 >- u z w 12.6 ::J o w a:: u.. ~ o ..J Koo 12.2 ~_----L _ o 100 _-'---_ _-'---_----i_ _---'-_--.J 200 300 400 TEMPERATURE T 500 600 (K) FIG. 21. Temperature dependence of the static (low frequency) dielectric constant. The upper line shows the microwave data of Champlin and Glover 172 for the range 100-300 K; and as extended by that group 173 to the range 300-600 K. The much steeper line is that recommended by Strzalkowski el al. 174 from low-frequency capacitance data. The room temperature point of Neidert 171 is also shown. Error bars are shown as proposed by these various authors. The dashed line shows the course ofEq. (23). as recommended in the present review. etc., for a shallow impurity in GaAs; and was so used by Stillman et at. 168 in discussing the spectroscopy of and photoconductivity associated with shallow donors. For use of Ko, the criterion is that the Bohr orbital frequency be small compared with V TO . The high frequency dielectric consant Kocis needed, however, in modeling the small radius, high orbital frequency, motion of a carrier trapped at a deep-level impurity. B. The reststrahlen region When Waugh and Dolling carried out inelastic neutron scattering studies of GaAs,58 these provided among other information the energies for long-wavelength (q = 0) optical mode phonons: hVTO = 33.2 ± 0.3 meV, and hVLO = 35.4 ± 0.7 meV. (See Table VI for the equivalent frequencies.) Just prior to that work, a value hVLO ~35 meV had been deduced by Hall and Racette 175 from electron tunneling experiments. However, the reststrahlen parameters can be provided more directly and accurately from several kinds of optical experiment. Reststrahlen absorption (with concomitant dispersion and reflection) cons it utes an oscillation ofGa and As cations and anions in responses to the transverse E-field of an electromagnetic wave, with a natural oscillation frequency V TO ' For over a century (cf. Helmholtz, 1874) it has been conventional to use a "single oscillator" model to simulate such absorption/dispersion behavior. Such a model requires four parameters: the low frequency dielectric constant Ko, the high frequency (optical) dielectric constant I( the resonant frequency VTO ' and a damping coefficient yp with dimen00 , R140 J. Appl. Phys. Vol. 53, No.1 0, October 1982 Here n, k, 1(1' andK2 are interrelated as described by Eqs. (16) to (19). Information about the parameters controlling Eq. (24) can be gained from measurements of absorption, refraction index dispersion, reflection at normal and oblique incidence, and additionally from Raman scattering, plasmon-phonon coupling, and other more complicated phenomena. It is not wise to expect that the fit of experimental data to Eq. (24) should be perfect, since this equation necessarily simplifies the actual GaAs lattice response for that spectral region. One complication over and above the provisions ofEq. (24) that occurs even for an ideally pure GaAs lattice is the ability of IR photons (some not much more energetic than hVLOJ to be absorbed in the creation of phonon combinations. Cochran et al. 176 made some quite early observations of the GaAs overtone and combination phonon absorption bands, reported in the next subsection. The response to electromagnetic radiation in the far- to mid-IR is further complicated for a GaAs sample with a conduction electron density no large enough to move the electron plasma frequency 2 vp = (nO e2 /4rre m t-'" ty' w (25) )il2 into or above the reststrahlen range. The usual procedure for modifying K*(V) is by subtraction of a term from what Eq. (24) had provided: K*(V) = K oc V~O(K() - K",) + - 2 - - - 2 - - 'V TO - V + lYp V V(V + iYe) (26) Here, the parameter Ye is proportional to the free electron damping coefficient. 177 Kukharskii 178,179 showed that Eq. (26) oversimplifies the coupling of plasmons and phonons, and can lead principally to errors in deducing the damping coefficients YP and Ye' However, Eq. (26) has been used as the basis for sorting out plasmon-phonon effects, in a number of GaAs investigations. 125.145.180-184 An example of what a large vp does to the reflectance spectrum will be provided shortly, in part (b) of Fig. 26. It is prudent to deal first with reststrahlen absorption for GaAs of small carrier density, uncomplicated by plasmon effects. Figure 22 shows the spectral variation of the real refractive index n, and the extinction coefficient k (both of these on a logarithmic ordinate scale), for a numerical modeling of the consequences of Eq. (24) intended to portray GaAs at room temperature. The size of the dispersive oscillation for n, and of the peak in k, permits an elucidation of the parameters through measurements of optical dispersion, optical transmission (at normal and/or oblique incidence), and reflectance (also at normal and/or oblique incidence). The imaginary part K2 ofthe dielectric constant reaches for frequency 1'TO, a maximum value (VTO/yp) (Ko - I( 00 ) J. S. Blakemore R140 Downloaded 21 Sep 2011 to 210.32.148.91. Redistribution subject to AIP license or copyright; see http://jap.aip.org/about/rights_and_permissions 20 10 n .>C S cIZ XW wo~ 2 z~ -~ -- "00 -.filO n WW >0 _u I- z ~o 0.5 0::;::::: ~u Wz I- 0::- 0.2 ~x <lw 0.1 W k 0::"C c: 0 0.05 0.02 28 30 hJ hJ 32 36 34 k 38 40 hv (meV) FIG. 22. Spectral variation of the real refractive index and the extinction coefficient for GaAs at room temperature, modeled by Eq. (24) with values consistent with Table IX; hVTO = O.920hvLO = 33.25 meV, Ko = 12.85, and (n ~ )2 = K ~ = 10.88. The additionally required parameter is the damping coefficient, hyp = 0.25 meV for these curves. and drops to half of that peak value for frequencies (vTO ± !Yp). The frequency domain just above VTO is one in which KI is driven strongly negative, which depresses n to values well below unity. The curves of nand k cross again at the frequency vw, when n=k=[YpKoK",/2vw(Ko - K 1/2 and K 1 = 0, on its way back to positive behavior. Only a little higher in frequency is the value 00 ) ) VR = VTO[(Ko -l)/(Koo - lW /2 (27) for which n = 1, to produce a mlOlmum R min = (1 + 11k 2)-1 in the normal reflectance that is close to zero. As frequency rises beyond that point, n-+n and the absorp00 , tion related quantities K 2 , k, and a, drop towards insignificance. The parameters used for the curves modeled in Fig. 22 were arrived at from a comparison of numbers reported in published accounts based on various optical experiments. Values of hVTO and hvw reported in six such investigations are summarized in Table X. The early reflectivity measurements of Hass and Henvis l85 already provided higher accuracy than feasible with non optical techniques such as electron tunneling 175 or neutron scattering,58 and several subsequent optical investigations have improved on that accuracy. Cochran et al. 176 had attempted optical transmission of thin samples through the reststrahlen range, but with results for that specific spectral range that are no longer considered viable. However, Iwasa et al. 186 obtained data, some at room temperature and some for lower temperatures, using transmission on thin samples at normal and at oblique incidence. They also obtained reflectance information, and interferometric data concerning the refractive index dispersion. Figure 23 reproduces some of the normal incidence transmission curves Iwasa et al. obtained for very thin GaAs platelets at room temperature. On the short-wave side of (c/vTO )' the fractional transmission 1110 = (1 - R )2e - at (1 - R 2e - 2U1) - 1 (28) was inhibited both by the large absorption coefficient a, and by the high reflectivity associated with that condition. Of the remaining entries in Table X, Mooradian and Wrightl24 deduced V TO and vLa from Raman effect, while Kukharskii, 179 Holm et al.18~ and Chandrasekhar and Ramdas 184 all analyzed reflectance, including deconvolution of coupled plasmon-phonon modes for N-type GaAs with vp >VTO. As may be seen among the entries of Table X, determinations by two sets of investigators often differ by more than the sums of their estimated error limits; but a consensus can be arrived at with reasonable confidence. Moreover, the trend of the results with temperature in Table X is accepta- TABLE X. Long-wavelength optical phonon energies as deduced in some optical investigations. T(K) 4.2 Reported by, and year Footnote citation VTO (meV) VLO Hass and Henvis (1962). Iwasa et al. (1964) Mooradian and Wright (1966) 185 33.9 ± 0.2 36.9 ± 0.2 1.183 186 33.77 ± 0.06 36.48 ± 0.06 1.166 124 33.86 ± 0.04 36.75 ± 0.04 1.178 (meV) (vLOlvTO )0 77 Iwasa et al. (1964) 186 33.71 ± 0.06 36.44 ± 0.06 1.168 300 Iwasa et at. (1964) Mooradian and Wright (1966) Kukharskii (1973) Holmetal. (1977) Chandrasekhar and Ramdas (1980) 186 33.25 ± 0.06 36.08 ± 0.06 1.177 124 33.30 ± 0.04 36.19 ± 0.04 1.181 179 33.41 ± 0.20 36.14 ± 0.15 1.170 183 33.25 ± 0.07 36.14 ± 0.07 1.181 184 33.19 ± 0.06 36.16 ± 0.06 1.187 R141 J. Appl. Phys. Vol. 53, No.1 0, October 1982 J. S. Blakemore R141 Downloaded 21 Sep 2011 to 210.32.148.91. Redistribution subject to AIP license or copyright; see http://jap.aip.org/about/rights_and_permissions ~ 5r-'---'---~----'----'----'----' IZ U 4 c:: -, W Q.. 2 :::!: ~ 3 z o ~ 5 T=300K w 10 4 tI 1.9f-Lm 2 21 :::!: en z « Z w u c:: I- OL-~~~~~~~~~~~~L-____L-__~ 36 37 38 39 40 10 0 3 'J Z ]"O<TA 5 :::> A (fLm) Lo 2 lJ... lJ... W 21f-Lm WAVELENGTH 5 I- 5.3f-Lm 10.4f-Lm I- ''\, ro.TA Q.. FIG. 23. Optical transmission at room temperature through thin platelets of GaAs, as measured at normal incidence by Iwasa et at. IX6 through the reststrahlen spectral region. (Ordinate scale values have been reduced by a factor of 10 with respect to the original figure ofIwasaet aI., so as to produce conformity with the numbers they quote in their text.) 0:: 0 2 ~ 100 en B.. _ '\. 30 32 34 hI! bly consistent with descriptions of V TO and VLO as linearized functions of temperature. It is accordingly suggested that hVTO = hVLO = K(/K= 33.81(1 - 5.5X 1O- 5 T) 5 36.57(1 - 4.0X 1O- T) = (vLOlvTO)2 = 1.170(1 meV, meV, + 3.0X 1O- (29) 5 T), serve as such consensus expressions, as already listed in Table IX. In addition to the four parameters K o, K V TO , and VLO [of which only three are independent, in view ofEq. (22)], the damping coefficient YP must also be specified for Eq. (24), in order to trace the routes ofn and k (as in Fig. 22), or ofK] and K 2 , through the reststrahlen range. The quantity y can nom• p mally be deduced either from transmission or reflectance data. Kukharski's analysis of reflectance 179 led him to indicate hyp ~O.S meV, but three other investigations yield numbers only one half as large. (hyp = 0.29 meV as deduced by Holm et al. IR2 ,IR3 and hyp = 0.23 meV in both the studies ofIwasa of et al., IR6 and ofChandrasekhar and Ramdas. IR4 ) The mean of the three provides hyp = 0.25 meV, which has been used here in the calculation of the curves for Figs. 22, 24, and 25. Figure 24 shows the spectral dependence of the optical absorption coefficient a = (41TVk Ie), in cm - I , with the damping constant chosen as indicated above. The maximum of the absorption coefficient is some 4 X 104 cm - I. Values of a as deduced from applying Eq. (28) to the transmission of samples with thickness of from 0.04 to 0.11 mm are shown on the shoulders of the absorption maximum. These are affected by multi phonon absorption processes 176 on the high energy side. As one progresses further from the central absorption peak, the transmission of a thin sample becomes large enough so that spectrometer slits can be narrowed, and interference modifications of Eq. (28) observed. Figure 25 shows curves of n vs hv for these more transparent wings of the reststrahlen region (using the same parameters as for Fig. 22), with refractive index data superimposed from the interference measurements of Iwasa et aI. 186 Figure 26 shows room temperature reflectance data for GaAs samples, as measured at normal incidence by Holm et I ( - \ 'j 36 38 40 42 (meV) FIG. 24. Optical absorption coefficient a = (41TV/C) through the reststrahlen absorption peak, modeled (solid curve) for the room temperature parameters listed in the caption of Fig. 22. The dashed curve shows the added absorption of the first few multiphonon combination bands, as measured by Cochran et at. 176 Data points correspond with the results of transmission measurements by Iwasa et al. 1K6 (Note: the values for a reported in Fig. 2 of Ref. 186 have all been lowered by a factor of 10, to achieve consistency with the statements in the text of that paper.) 00 , R142 J. Appl. Phys. Vol. 53, No.1 0, October 1982 aI. 183 Part (a) of the figure shows their reststrahlen reflectance data for a semi-insulating sample, compared with a curve calculated on the basis of the single oscillator model [Eq. (24)] and the reflectance expression Eq. (21). As can be seen, the fit of the model to experiment is quite satisfactory in this case. Holm et al. 182,183 showed how the reflectance spectrum could be distorted by an inappropriate surface pre para- (meV) 22 28 30 32 6,--'--r--r~r--,-;~.-~~~~ T = 300 K c x ~ 5 Z w > I- U 4 « 0:: ---- lJ...- ~ -.J « noo 1-<0 3 w 0:: 42 44 hI! (meV) 46 48 FIG. 25. Room temperature refractive index data of Iwasa et aI., IX6 for the outer skirts of the GaAs reststrah1en region. These were measured from interference modulations of the transmittance for a O.09-mm-thick sample. They are here compared with curves of n vs hv calculated from Eq. (24) using the same set of parameters as with Fig. 22. J. S. Blakemore R142 Downloaded 21 Sep 2011 to 210.32.148.91. Redistribution subject to AIP license or copyright; see http://jap.aip.org/about/rights_and_permissions 4~0________~3~8________~3T6~_________3,4__________--,32 1.0 0.8 0: w U Z <l: I- 0.6 U w 0.4 ....J ll... W 0: 0.2 (0) 0.0 L..-_ _-L-_ _---I._ _ _l....-_ _---I._ _--'-_-=-_-'--_ _"'""'--:---' 31 32 33 34 35 PHOTON ENERGY hll 36 37 (meV) FIG. 26. Normal incidence room temperature reflectance spectra for GaAs samples measured by Holm et al. ' " (a) The reststrahlen region for a semi-insulating sample. The authors' curve was fitted for hVTO = O.920hv LO = 33.25 meV, hyp =O.29meV,andK~ = 11.1. (Note that the latter is some 2 % larger than the consensus value proposed in Table IX.) (b) Reflectance for an N-type tellurium-doped sample with n()~2.7X 10" cm--', to produce a plasma edge at hvp ~67 meV. 1.0 0: w U Z <l: IU 0.8 0.6 w 0.4 ....J ll... w 0.2 0: 0.0 (b) 30 40 50 60 70 PHOTON ENERGY hll (meV) --+ tion. Part (b) of Fig. 26 shows a reflectance spectrum by Holm et al. for an N-type doped sample, with the plasma edge hvp moved above the optical phonon energies. Comparable reflectance spectra for the plasmon-phonon coupled modes when hvp is comparable with or larger than hVTO have been illustrated in a number of other published reports, 145.179-181,184 and the crossover characteristics discussed. Chandrasekhar and Ramdas 184 have shown that this is affected by the nonparabolicity of the GaAs lowest conduction band, a band structure complication discussed in Sec. VI. C. Multiphonon lattice absorption The high energy end of the optical absorption data in Fig. 24 showed the first two of the numerous multiphonon combination and overtone absorption bands. Cochran et al. 176 reported on the spectrum of these weak absorption bands from 38 to 100 meV. The three parts of Fig. 27 are based on their curves of a(hv) for this spectral range. Spitzer 187 reviewed the physics of multiphonon absorption in semiconductors with diamond and sphalerite lattices, including GaAs. The annihilation of a photon in the creation R143 J. Appl. Phys. Vol. 53, No.1 0, October 1982 of two or more phonons (with ~ q = 0) requires an interaction mechanism; and for GaAs this arises in part from anharmonicity in the crystal potential, 188 and in part from secondorder (or higher-order) multipole electric moments of atomic displacements. 189 Two-phonon absorption is a continuum process, subject to selection rules, 190 and with a maximum for an allowed transition corresponding to a peak in the combined density of phonon states. A Van Hove singularity,191 Vq v-+O, is required for at least one of the phonons created. Thus absorption peaks in Fig. 27 are related to the phonon energies for high symmetry zone locations (such as those listed in Table VI); and it is not surprising that hv for the strongest band in Fig. 27 is the sum of the phonon energies for prominent g(v) peaks in Fig. 8. Note the widely differing ordinate scales for the three parts of Fig. 27. Multiphonon absorption strength in GaAs falls off rapidly with increased hv. (That feature is also the case for Ge, 192 and is much less so for Si 193 or GaP. 194) The most energetic photon that GaAs can absorb in a two-photon overtone or combination process is hv= 71 me V, for creation of a pair of zone-center LO phonons. Figure 27(c) J. S. Blakemore R143 Downloaded 21 Sep 2011 to 210.32.148.91. Redistribution subject to AIP license or copyright; see http://jap.aip.org/about/rights_and_permissions 300 - TABLE XI. Prominent two-phonon absorption peaks in GaAs: and a set of possible assignments. b (a) 200 hv(meV) Assignment 38 40 41 44 49 51 55 57 62 64 66 71 LO+TA TO+TA TO+TA TO+TA LO+LA LO+LA TO+LA TO+LA TO+LO 2TO 2TO 2LO ~ ~ t:J 100 0 38 40 hv 42 (meV) 50 44 46 (b) 40 ~ U 30 20 10 0 X,W X K W K W K W L,X X r,L r Absorption peaks as illustrated in Fig. 27. Assigned in conformity with selection rules of Birman (Ref. 190), and in accordance with the critical phonon energies listed in Table VI. a b t:J Brillouin zone locations(5) D. Free carrier absorption 45 hv (meV) 1.5 (e) For GaAs, as with any other semiconductor, free carriers of finite mobility provide an ac conductivity aac that impacts on the dielectric and optical response as an absorption coefficient (30) 1.0 ~ U t:J 0.5 293K / 17K 00 70 80 110 hll FIG. 27. GaAs optical absorption in the mid-IR, showing phonon combination and overtone bands, as measured by Cochran et al. "" Measurements were made on high resistivity GaAs, so as to preclude free carrier absorption competition. shows that this process is not very efficient. All threephonon processes involving hv> 70 me V are even less efficient. Cochran et al. 176 suggested phonon combination/overtone assignments for the various absorption maxima they saw. Other assignment proposals have been made for GaAs by Spitzer l95 and by Johnson. 196 Yet another assignment list is offered here, in Table XI, based on critical phonon energies (see Table VI), and on Birman's selection rules for this structure. 1'10 The assignments in Table XI agree mostly, but not totally, with those that Cochran et al. had postulated before the phonon dispersion curves of this solid were known. The strongest multiphonon band is at 39 meV, with a max =200 cm - lover and above the coexisting reststrahlen absorption tail (see Fig. 24). All parties agree that this is an LO + T A combination, benefitting from Van Hove singularities of both phonon branches near the location X, U and Won the Brillouin zone boundary (see Fig. 4). R144 J. Appl. Phys. Vol. 53, NO.1 0, October 1982 (Here n denotes refractive index, not electron density.) It is also possible for a photon with hv < tj to assist an intraband transition of an electron in the conduction band system, or hole in the valence band system. It happens that such intravalence band transitions dominate over any "free hole absorption" for P-type GaAs. That was shown in the infrared absorption of Braunstein and Kane, 197 as exemplified in Fig. 28 by their curves of a(hv) for a P-type sample at various temperatures. Those data can be accounted for by hole transitions between the light-hole and heavy-hole bands for hv < 0.34 eV. These are supplemented by transitions into the splitoff valence band (see Sec. VI B) for hv;;;.L1,o = 0.34 eV. Absorption over the range 1-30/-fm for N-doped GaAs samples was measured by Spitzer and Whelan. 198 Figure 29 <10° 1 -, 200 - -;- ::;!; U r 1 ----r---1 i'\ R\ \~ -, I '\ 100 l- , _ f 84 K 80 - 197 " 295 K GO ~ 370 K t:J 40 [ I ~ ~: I 0.05 0.1 0.15 0.20 0.25 0.30 0.35 00400.45 0.50 0.55 0.60 hv (eV) FIG. 28. Infrared optical absorption for P-type GaAs (Zn-doped, with Po = 2.7 X 10" em -'I, showing absorption caused by holes in intra-valence- band transitions, after Braunstein and Kane. 197 J. S. Blakemore R144 Downloaded 21 Sep 2011 to 210.32.148.91. Redistribution subject to AIP license or copyright; see http://jap.aip.org/about/rights_and_permissions 1000 40rr,--------,----,--.--,-.-ro-.. I I v SYMBOL SAMPLE NO. 1 0 6 400 v x 2 3 • 4 0 5 6 v 200 v v •• v v ~ .. • v v v v 100- )( w U LL LL W o U 4 VV 'i)VVV 2 20 • x 10 t- - o z e 0.... 0:: 4 CD 2 10 (no = 4.9 X 10 17 cm-') in the work of Spitzer and Whelan, I n for temperatures of 100 K (0), 297 K (LJ, and 443 K (e). "X ! 6 "" It- - I>. 6 A 661>."" o E " I>. "Au/i 0.4 I 2 4 10 20 A (fLm) FIG. 29. Optical absorption at 296 K for N-type GaAs samples, as measured by Spitzer and Whelan. 19x Weakly doped sample no. I shows no absorption beyond the intrinsic edge, but samples 2-6 show (i) optically assisted intra-CB transitions for A < 3.5 /-lm, and (ii) free carrier absorption for longer wavelengths. Conduction electron concentrations (in units of 10 17 cm -- ') are: 1.3, 4.9, 10.9, 11.2, and 54, for samples 2-6, respectively. shows their room temperature results for six samples ofvarious conduction electron densities no. Other subsequent investigationsl99.2oo have confirmed the essence of what this figure shows, that free electron absorption controlled by Eq. (30) is present and dominant for long wavelengths, while opticallyassisted transitions toward upper conduction minima dominate the absorption for A < 4 /-lm (i.e., hv> 0.3 eV). Fan 20J has reviewed the physics of sub-band-gap free carrier absorption processes in Group IV and III-V semiconductors, while Jordon 202 has recently discussed the specific case ofGaAs in some detail. Jordan's account is recommended to the interested reader for details of analytic and numerical fitting of the various absorption mechanisms. Since free carR145 8 FIG. 30. Free' carrier absorption vs wavelength for sample no. 3 J.. o(f) « 6 6 o ~ 6 v .V Z 8 • VV v -, •• VV 40 10 • • v v v v v v v ~ • •• v U 20 • • v v v v J. Appl. Phys. Vol. 53, No.1 0, October 1982 rier absorption depends on electron scattering processes, the contributions by acoustic and optical phonons, and by ionized and neutral impurities, all need to be taken into account. The result in Eq. (30) thus depends on temperature and on compensation, as well as on no and A. Of the six samples illustrated by Fig. 29, weakly doped Sample No.1 evidently showed negligible absorption related to free electrons. Those kinds of absorption had some different characteristics for the most strongly doped sample (No. 6); but Samples 2-5, with no roughly from 10 17 to 10 18 cm- 3 showed a consistent pattern. For these samples, the longer wave absorption varied approximately as a=7.5XIO- 2 °n o A 3 cm- I (A>4/-lm) (31) (for no in cm - 3 and A in /-lm). A more exact rendition would require an accounting of impurity compensation, and of the various electron scattering machanisms, as done by Jordan. 202 Figure 30 compares absorption spectra at three temperatures for Sample No.3. It can be seen that the longer wavelength part of the spectrum is relatively temperature insensitive. For A < 4/-lm, when the absorption ofEq. (31) weakens, the actual absorption of N-type samples starts to rise again, because of optically assisted transitions away from the lowest (T6) conduction minimum. The curves of Figs. 29 and 30 show that this has a spectral form dependent on both no and T. For A~2 /-lm (hv=0.6 eV), this has a room temperature strength a ",-,6 X 10- 18 no cm -I. (32) This appears to hold even up to the doping level (no = 5.4 X 10 '8 cm -3) of Spitzer and Whelan's degenerate Sample No.6. J. S. Blakemore R145 Downloaded 21 Sep 2011 to 210.32.148.91. Redistribution subject to AIP license or copyright; see http://jap.aip.org/about/rights_and_permissions E. Near band-gap dispersion There have been a number of determinations of the GaAs refractive index for frequencies well above the reststrahlen range, yet well below the intrinsic band-gap edge. That index is the quantity V K ~ n oc , for which the numerical magnitude recommended in the present subsection: K" X W 35 0 s = 10.60(1 + 9.0X lO- T), n oc. =3.255(1 c z +4.5XlO- s T), (33) was given advance mention in Table IX. Experimental data to be borne in mind in the elucidation of n include prism refraction measurements by Hambleton et al. 170 and by Marple,203 combined transmission/reflection by Oswald and Schade,204 polarized light oblique reflectance Barcus et al. 205 and others. The various results were discussed in the 1977 review by Stillman et al. loH Seraphin and Bennett206 reported the primary literature for infrared measurements of n(4 ), and also provided tables of optical "constants" for various temperatures. These included: (i) the real and imaginary parts of n* = (n - ik) at 300 K for 0.05 <4 < 25 ,um; (ii) the normal incidence reflectivity R at 300 K for the range 0.05 <4 < 40 ,um; and (iii) values of nand k near the band edge for T = 21, 90, 103, and 185 K. Seraph in and Bennett elected to quote data on a "point by point" basis (with identification of the primary author for each point), rather than any attempt at an averaging or weighting process. That does give all the data, but can be confusing to read! Sell et al. 207 used high precision double beam reflectance measurements in order to deduce the dispersion of n for the spectral range 1.2-1.8 eV. These room temperature (T = 297 K) measurements thus extended the direct measurements of n through the intrinsic edge. Figure 31 reproduces the result derived by Sell et al. from mesurements on a high purity sample at 297 K. The portion of their curve for hv < ti agreed well with the much earlier refraction measurements of Marple,203 and also confirmed the features elecidated by Eden 20H from a Kramers-Kronig analysis 209 of the reflectance data of Philipp and Ehrenreich. 210 00 w > f r 300 K.", , f-U <t 0: I.J... 34 w 0: 3_3L---~--~-- __~__~____L -__-L__~____~ 14 hv (eV) FIG. 32. Infrared dispersion of the refractive index of GaAs (measured by prism refraction) for three temperatures. From the work of Marple. 2<" The curve of Fig. 31 shows a small but sharp and distinctive peak at the band-gap energy (ti = 1.424 eV at 297 K), since these data were for a high purity sample, with no < 10 14 cm -4. Sell et aI. 19R also measured reflectance, in order to derive the refractive index behavior, for N- and Ptype doped samples; and their sets of curves showed that this peak becomes smeared out for doping of either type exceeding 10 16 cm- 3 • Figures 32 and 33 show refractive index data for the .'"'" ..,. 3.6 '" Marple o c L:.. Komblelon et 01 • De Mels ! X w I I i---,--r----,--- AS-~EASUR~D I ------1---·--o 0 c/. Z -J_jj .: CORRECTED a a a d W > - f- '" u <l: 0:: ':; 3.5 ~ 3.61-----1 '". . .Q••'" 3.4 W 0:: f- u <l 0: LL w 3.5- 0: T = 297 K 1.2 1.3 1.4 1.5 1.6 1.7 1.8 ENERGY, hv leV) FIG. 31. Refractive index n for a high-purity GaAs sample (weakly N-type, no=S X 1013 cm -3), as deduced by Sell et al. 207 from two-beam reflectance measurements at 297 K. Data obtained by Marple 203 from refraction measurements are shown for comparison. Shown also are points calculated by Eden,20" from Kramers-Kronig analysis. R146 J. Appl. Phys. Vol. 53, NO.1 0, October 1982 300 K ifiJ 3.3 3.4~~LUL--L__~~__~~__~_Jt__~I_ ~r • 0 1.0 0.5 hll 1_5 (eV) FIG. 33. A comparison assembled by Stillman et al. loX of three room temperature investigations of dispersion in the infrared refractive index for GaAs. The data of Marple203 are the same as in Fig. 32. Data of Hambleton et al. 170 and of DeMeis 211 extend to lower photon energy. J. S. Blakemore R146 Downloaded 21 Sep 2011 to 210.32.148.91. Redistribution subject to AIP license or copyright; see http://jap.aip.org/about/rights_and_permissions range hv < E; . The prism refraction data of Marple 203 for three temperatures is shown in Fig. 32, while Fig. 33 is taken from the 1977 review of Stillman et al., 168 as a comparison of three sets of room temperature data. The room temperature results from the various investigations do not agree perfectly. However, all the data in Fig. 33 (which incorporates the 300 K curve from Fig. 32) are reasonably consistent with a first-order Sellmeier type of equation (n 2 -A) = (n: -A )I[I-B(hvf], (34) constrained by the three parameters A, B, and n"" . For hv expressed in electron volts, the necessary 300 K parameters are A = 7.10, B = 0.18 K"" = (eV)-2, n: = 10.88. (35) Those values correspond to a 300 K dispersion of the refractive index: n = VK = {7.1O + 3.78/[ 1 - 0.18(hv)2]}I!2 (T= 300 K). (36) The long wave limit of Eq. (36), [K"" = 10.88, n "" = 3.299] has already been quoted in Table IX, and its temperature dependence in Eq. (33). That information was used in tracing a path back towards the static dielectric constant K o' Equation (36) is intended principally to be a reliable guide for n at photon energies well below E;. However, it is interesting to find that Eq. (36) tracks the behavior of n fairly well all the way to the intrinsic threshold. [Thus, Eq. (36) gives n = 3.60 for hv = 1.40 eV, compared with an experimental value n = 3.61 for this energy according to Sell et a/. 207] Of course, Eq. (36) is not applicable for hv > E, . The Marple 203 dispersion curves for three temperatures, shown in Fig. 32, are consistent with a linear progression of n"" with temperature, at a rate (lin"" )(dn"" 1dT) = + 4.5 X 10- 5 . That was incorporated into Eq. (33), as also reproduced in Table IX. Yu and Cardona 212 have attempted to calculate the temperature coefficient of n for semiconductors with the diamond and sphalerite lattices, using the "Penn gap" model 213 for the electronic contribution to the dielectric constant. For GaAs, they used a Penn gap of 4.9 eV (which they associated with the direct gap at the X point), and thereby estimated (lin"" )(dn"" IdT) ~ + 5.4x 10- 5 • In view of the simplifications inherent in such a model, the agreement with experiment appears quite satisfactory. Among the reasons for needing to understand, and to be able to model, the optical properties of GaAs, diode lasers and LEDs are prominent. Thus the optical properties for hV-E; are of particular interest to the optoelectronics community. That motivated the measurements of Sell et al.,207 and led to much collateral material that was reviewed in the subsequent book by Casey and Panish. 7 Mendoza-Alvarez et al. 214 have recently attempted to model the effects of injected free carriers on the refractive index ofGaAs, for the spectral range 1.34-1.44 eV. That work indicates that n should increase very slightly (by less than 0.1 %) for an injected carrier 00 R147 J. Appl. Phys. Vol. 53, No.1 0, October 1982 pair density of up to t1.p- 3 X 10 17 cm -3. Making t1.p larger than this causes n to decrease below its equilibrium value. F.lntrinsic absorption edge The refractive index dispersion for hV-E; that has just been discussed, is on a modest scale compared with the steep rise of intrinsic absorption for the same spectral range. This optical absorption has characteristics that are influenced by a number of interesting topics in semiconductor physics. Thus, Oswald and Schade204 made some of the earliest (-1954) measurements of intrinsic absorption for GaAs. These measurements extended only to a -100 cm - I , yet showed strong signs that GaAs is a direct gap semiconductor, with a fundamental transition that is allowed for hV>E;. The simplest model for allowed transitions in a direct gap semiconductor provides a spectral dependence of the intrinsic absorption coefficient: ao(hv) = (5 Ihv)v(hv - E;), hV>E;. (37) aside from the additional small contributions of multiphonon absorption, free carrier absorption and intraband transitions, etc. The coefficient 5 in Eq. (37) is controlled by the effective masses mv and me of the valence and conduction bands, and by the interband matrix element. However, Eq. (37) is not adequate for GaAs. Even for the absorption edge of pure, unstrained GaAs, one nontrivial complication that affects ao(hv) is nonparabolicity of the bands: notably the lowest IF~) conduction band, and the light-hole band. Those features are described in a number of band models: for example, in the k.p model that Kane 215 developed, as discussed further in Sec. VI. Equation (37) is more seriously deficient than that, in its neglect of the Coulombic attraction between the electron and hole created in each act of intrinsic absorption. The absorption for hV>E; is profoundly affected by that electronl hole interaction. 216.2 17 Moreover, a set of exciton absorption lines is then expected to make an appearance for hv very slightly smaller than E;. For a direct gap semiconductor with ideally simple bands, an exciton of the large radius (Wannier,218 or "effective mass") type has a ground state Rydberg energy Rxl = e4 /8h 2K 2 Ca (m v- 1+ m e- I). (38) Thus the set of photon energies that correspond to the creation of a free exciton,219 in the ground state (r = 1), or an excited state (r = 2,3,4, ... ) is (39) The true complexities of the GaAs valence band system vitiate the simplicity ofEqs. (38) and (39). However, the large values of K and of m e- I ensure that Rxl <E;. Abe 220 used a variational technique in calculating R x I = 4.4 meV for GaAs. A perturbation calculation by Baldareschi and Lipari221 used the GaAs band parameters ofVrehen l65 in deducing that Rx I = 4.1 meV. Those calculated values compare quite well with Rx I numbers deduced from experimental data. Sturge222 deduced Rx 1=3.4 meV from his 1962 measurements of the intrinsic absorption edge, and somewhat larger values were derived from subsequent work. Thus, Gilleo et al. 223 deduced Rx I = 4.4 meV from photoluJ. S. Blakemore R147 Downloaded 21 Sep 2011 to 210.32.148.91. Redistribution subject to AIP license or copyright; see http://jap.aip.org/about/rights_and_permissions minescence measurements at liquid helium temperatures, while SeIf24 reported Rx I = 4.2 ± 0.2 meV from absorption measurements made in 1972 using high purity VPE GaAs layers. With this in mind, let us return to Elliott's modef I6 .217 for intrinsic absorption when hV>Ei , and the electron/hole attraction is included. An expression such as ao(hv) of Eq. (37) then needs to be modified to ae T ~ 294 K ::; u 8 90 K '21 K 6 1.44 146 1.48 hv 150 152 154 \.56 leV) FIG. 34. Upper portion of the GaAs intrinsic absorption edge, as observed by Sturge m by transmission through a 6.5-jlm-thick semi-insulating polished slice. The bound exciton peak at hv = (~i - ~<.) is clearly apparent for the three lowest temperatures, and vestigially so for the room temperature data. These curves have been shifted upwards in energy by ~ 2 meV, as a correction for the internal strains in this thin, freely supported sample. R148 10' u I0. IX: 10 2 (41) Equation (40) provides that band to band absorption should drop from a(E;) to zero, precipitately, as soon as hv falls below E j • The foregoing might lead us to expect that the combination of band to band absorption, and exciton absorption, for GaAs which is pure, and free from internal strain, would show a step function rise to strong absorption for hV~(E, - Rx I)' with the absorption rising at a much less drastic rate above that threshold. Exciton peaks for r = 1 (and possibly for r> 1) should be resolvable at a low temperature. Figure 34 shows that Sturge222 was able to resolve an exciton peak for temperatures almost up to 200 K. SeW 24 was able to resolve both the r = 1 and r = 2 exciton absorption maxima for T~2 K. The residual effects of the r = 1 excitonic transition are detectable in the room temperature refractive index curves {see Fig. 31) by Selletal.,207 and in the 2S absorption characteristic measured by Casey et for a 142 ....4:w 0 0 [Rxi /(hv - E,W12· 185 K w G '"ro (42) "'o 10 4 <t Thus for a photon energy far enough above Eo Yx <1, which makes a asymptotically approach a o. Of course, for GaAs one must still elaborate a o from the (hv - E, ) I/2 dependence of Eq. (37), in order to take band nonparabolicity into account. The striking feature of Eq. (40) is, however, that as hV-Ei from above, the absorption coefficient a remains large. At the threshold energy hv = Ei itself, a "cliff-top" value is sustained of 10 " 1-' Z 9 (40) where the dimensionless quantity = E u z 21TYx a o(hv) a(hv) = , 1 - exp( - 21TYx) Yx 10 5 J. AppL Phys. Vol. 53. No.1 O. October 1982 hv (eV) E u " tZ W <) 5o 103~----~---x~H~---------r u z o :;: 10 2 ~-=--.(/ a: o '" (ll <t 15 IA hv 1.6 leV) FIG. 35. Intrinsic absorption edge at 297 K, as reported by Casey et a/. ns for highly and deliberately doped GaAs. (a) Four stages of N-type doping, compared with a high-purity sample of no~5X WI) cm -] (b) The same pure sample, with six stages of P·type doping. For both parts of the figure, a was deduced up to 1000 cm - 1 from transmission measurements. and by Kramers-Kronig reflectance analysis 209 for a > 1000 cm - '. high purity sample. The absorption spectrum for this high purity sample is identified in both parts of Fig. 35. That figure also shows the changes in a{hv) near the intrinsic threshold as produced by doping of GaAs. Before one proceeds with the effects of doping, there are some aspects of the absorption edge for "pure" GaAs that deserve some further comment. It can be seen from the "high purity" curve in parts (a) and (b) of Fig. 35 that the intrinsic edge is not, in fact, precipitously steep at room temperature. From the top of the steeply sloping region, at a~8000 cm- I and hv~ 1.42 eV, photon energy must be decreased by some 0.05 eV in order to bring a down to -10 cm- I. This phenomenon, even for nominally pure GaAs, had been observed long before the work of Casey et aI., in GaAs absorption edge studies by Moss and Hawkins,226 Kudman and Seidel,227 Sturge,222 Hill,228 Vrehen,16s and others. For GaAs and other direct gap semiconductors, the edge gets blunted. Urbach commented some 30 years ago 229 that many nonmetallic solids tend to have an exponentially sloping edge: a~exp[A (hv - B)) (43) for the major steep region, which would appear linear on the J. S. Blakemore R148 Downloaded 21 Sep 2011 to 210.32.148.91. Redistribution subject to AIP license or copyright; see http://jap.aip.org/about/rights_and_permissions ~ 10 3 Z W o u. u. ~ o 10 2 Z o ~ ll. a: oIf) 10 CD <[ 1.38 1.40 1.44 h If 1.52 (eV) FIG. 36. Curves ofSturge 222 for the intrinsic absorption edge in semi-insulating GaAs at five temperatures, of which the curves for \0 and 21 K are indistinguishable on this scale. The upper parts of these curves were shown (with a linear ordinate scale) in Fig. 34. The dashed portions here show Sturge's estimate of the effect of subtracting impurity related absorption. semi log coordinate systems of Figs. 35 and 36. In the case of "pure" GaAs, however, it can be seen in Fig. 35 that the exponential steepness of a increases as one proceeds towards the top of the edge. The curves of Fig. 36 shows that this characteristic becomes more prominent for low temperatures. What causes the exponential slope of an "Urbach edge" rather than the precipice of Elliott's model: for GaAs among other direct gap solids, and without the additional physics that one could invoke from the presence of impurity doping?230 Redfield 231 has proposed that the intrinsic slope degradatiaon in a direct gap solid arises from the Franz-Keldysh effect.232.233 That is to say, the optical threshold energy is a microscopic function oflocation within a sample, affected by microscopic electric fields that arise both from doping inhomogeneities (if any), and from internal strains. If microscopic internal strains in a GaAs crystal cause a pattern oflocalized electric fields, and a smeared out absorption edge, what is the effects of a large, uniform, applied electric field? It was argued by Callaway234 that absorption should rise in a series of steps, each the consequence of a Wannier level. Measurements by Koss and Lambert,235 with a field of up to 1.6x 105 Vfcm applied to semi-insulating GaAs, show some evidence of these Wannier levels at T~24 K. The evidence is less clearcut than one would prefer, since the measured absorption is a superposition of two Wannier staircases, in view of light-hole and heavy-hole processes. The absorption curves in Fig. 35 for doped GaAs now require attention. Figure 35(a) shows that N-type doping, by shallow donors, moves the room temperature threshold progressively towards larger hv. The doping also makes the absorption edge less steep. These features had previously been observed in work by Hill,228 Turner and Reese,236 Pankove,237 and others. The shift towards larger hv is as one would expect from the Burstein-Moss effect,238.239 the consequence of degenerate conditions in the lowest conduction band (a band with a small density of states). R149 J. Appl. Phys. Vol. 53, No.1 0, October 1982 The effect of a sharply defined CF higher than cc' for a low temperature degenerate conduction band condition, should make the Burstein-Moss shift of the intrinsic edge to (Ei - Ev) > Ej clear cut, and easy to recognize. This was the case for data taken at 77 K by Hill,228 and for 5 K data of Pankove. 237 However, at any temperature, strong doping is apt to accentuate the possibilities for microscopic compositional and potential fluctuations that can lead to band tailing.19.237.240-242 Those fluctuations will also, through the mechanism ofthe Franz-Keldysh effect, contribute to a lessening of the "Urbach effect" slope for the intrinsic absorption edge. And part (a) of Fig. 35 does show a continuous decrease in edge steepness with increasing N-type doping. Part (b) of Fig. 35 shows that P-type doping moves the intrinsic absorption edge inexorably towards smaller hv: at least, it does for room temperature, and for the range of Po displayed there. Casey and Stern 19 modeled these data in terms of band tailing. 240.24 I Those shifts in the location and steepness of the edge with P-type doping had been reported in a number of earlier investigations; and the curves of Fig. 35(b) had forerunners in the 300 K results of Kudman and Seidel,227 and in Hill's data 228 for both 300 and 77 K. Pankove 237 measured the intrinsic edge for P-type samples at 5 K, and up to very large doping (po~ 1020 cm -3). He found that the edge moves back towards larger hv again for Po> 10 19 cm - 3. This appears to be the Burstein-Moss effecf38.239 again. It occurs much less readily in P-type GaAs, because of the relatively large (heavy-hole) valence band effective mass. G. Optical properties above the intrinsic edge The optical absorption coefficient increases less rapidly once it has climbed to a~8000 cm - I at the top of the steep edge; but it still has an additional factor of more than 100 to climb before it finally peaks near hv,::::::5 eV. Transmission measurements with extremely thin samples can penetrate only the first part of that spectral region, and reliance on reflectivity is essential for an evaluation of K I and K 2 , or equivalently of n, k, and a = (41TVk Ie), throughout the visibleand UV. Figure 37 illustrates results for a(hv) obtained by analysis of the transmission through very thin GaAs monocrystal layers. Sturge's measurements 222 were made with polished specimens 1.4 and 0.67 11m thick, supported on a glass backing, and cooled to 21 K. This experimental arrangement inevitably strained the specimens, and the dashed curve of Fig. 37 incorporates Sturge's estimate of the horizontal shift needed to correct for strain. Sturge's 21 K data for these specimens did extend all the way down to threshold, but merges for all practical purposes with the 2 K curve of the results Sell and Casey243 obtained eleven years later, and shown as a solid line in Fig. 37. Those results of Sell and Casey shown in Fig. 37 for both 2 and 298 K were obtained with a 1.2-l1m-thick epitaxial GaAs layer sandwiched between layers of Alx Gal _ x As. That sandwich structure permitted measurements of the GaAs optical density, up to the threshold (hv,::::::2.2 eV) for direct transitions in the Al x Ga I _ x As cladding layers. It J. S. Blakemore R149 Downloaded 21 Sep 2011 to 210.32.148.91. Redistribution subject to AIP license or copyright; see http://jap.aip.org/about/rights_and_permissions =-::;:, 14 ..2 12 u 0.6 " 10 05 f-Z w 8 u u.. u.. w 6 0 u z 2 4 a:: w u 04 Z c:( 298 K", f-U w 03 f-0- 0:: 0 V) .J lJ.. 2 W 0:: <Il 0.2 c:( 0 14 18 2.0 h~ 2.2 2.4 2.6 2 8 (eV) 0.1 FIG. 37. Intrinsic absorption of GaAs, measured by optical transmission, through the visible part of the spectrum. The solid curves, for 2 and 298 K, are from the work of Sell and Casey. 24> The dashed curve shows 21 K data of Sturge. 222 Since 10; changes by only I meV between 2 and 21 K, the two low temperature curves are essentially the same, apart from differences in estimates of strain corrections. should also have permitted something much closer to a strain-free situation for the GaAs. The low temperature data in Fig. 37, both ofSturge,z22 and of Sell and Casey,243 show clearly the onset of transitions to the split-off valence band. This has a low temperature threshold (E; + LiSD )~ 1.86 eV. The room temperature curve of Sell and Casey also shows that threshold, albeit less clearly delineated, for hv~ 1. 76 eV. The optical properties of GaAs in the ultraviolet part of the spectrum are preeminently the domain of reflectance analysis, including various techniques of derivative reflectance measurements. For the experimentally more easily accessible region up to 6 eV, measurements have been reported as assisted by modulation of wavelength, 135 temperature,139 strain,137.138 and electric field; the last-named form offield modulation (electro reflectance) impressed by means of a Schottky barrier contact, 149 an electrolyte, 148 or transverse electrodes. 144 These various ingenious modulation experiments have provided interesting maxima and minima of the various derivatives; and these, in turn, have fueled various theories for the energy band structure ofGaAs, as relevant to the material of Sec. VI. However, there seems little value in a review paper of this type to present such derivative spectra as figures, since the actual curve shapes-and even the exact photon energies of maxima and minima-are as much artifacts of the way the experiment is carried out as they are of the actual properties of GaAs. It is thus the plan in this section to concentrate on the available data for K 1 and K2 as functions of hv, and on the related data of the normal incidence reflectance R, and of absorption coefficient a = (4m·k Ie), through the visible and UV. It happens that important measurements of normal incidence reflectance for GaAs (and other III-V solids) were made by Philipp and Ehrenreich 210 in the early 1960s. Those data, extending as far as 25 eV, still stand as the primary source of such information to date. Figure 38 shows the R150 J. Appl. Phys. Vol. 53, No.1 0, October 1982 00 0 5 10 hll 15 (eV) FIG. 38. Normal incidence reflectivity of GaAs, after Philipp and Ehrenreich,"o showing the features in the UV. GaAs reflectance curve of Philipp and Ehrenreich, plotted here as far as 15 eV. Figure 39 shows the curves Philipp and Ehrenreich ded uced for the real and imaginary parts of the GaAs dielectric constant, K 1and K 2' also plotted as far as 15 eV. These curves were calculated from a Kramers-Kronig analysis 209 of the normal reflectance data, the latter being used over the full range from threshold to 25 eV.244 Philipp and Ehrenreich 210 commented on the two contrasting spectral regions in Figs. 38 and 39. Since we all know 25,----------,-----------,----------, 20 15 N lC 10 Cl Z <! lC 5 0 /(1 -5 -10 0 10 5 15 hv (eV) FIG. 39. Real and imaginary parts K I and K, of the GaAs complex dielectric constant, as deduced by Philipp and Ehrenreich'lO from Kramers-Kronig analysis of reflectance data from the infrared to the far ultraviolet. J. S. Blakemore R150 Downloaded 21 Sep 2011 to 210.32.148.91. Redistribution subject to AIP license or copyright; see http://jap.aip.org/about/rights_and_permissions a great deal more about the band structure of GaAs now than when their remarks were made, their comments are perhaps even more valuable now as insights into what things one-electron band theory does well, and where it is less apt. Thus, Philipp and Ehrenreich noted the sharp structures for hv up to some 8 eV, as associated with valence to conduction band vertical transitions in various parts of the Brillouin zone. Comparable information has been obtained from photoemission experiments in the same photon energy range,245.246 though here, as in the deliberate exaggeration techniques of electroreflectance,144-149 the actual response curve depends on the details of the measurement technique. 247 Note in Fig. 39 that KI is most strongly negative for hv=5 eV, and is reapproaching positive status by hv=8 eV. For the higher energy range above 8 eV, KI appears to progress monotonically towards its eventual destiny at a + 1 value. Meanwhile, K2 and R both decline in a comparably featureless fashion. Philipp and Ehrenreich remarked that this resembles the behavior of a plasma oscillation model, for the response of quasi-unbound electrons (in, presumably, what one normally thinks of as being the valence bands). Thus these data suggest that, for this range of hv at any rate, one-electron band ideas may be less appropriate than collective response concepts. Disturbances do occur of the monotonic trends of K I' K 2' and R in the spectral range from 8 to 20 eV, as has been shown in that range with the higher sensitivity of electroreflectance. 15o However, these featuares are too small to be visible on the scales of Figs. 38 and 39. The optical properties of GaAs acquire a new set of features for hv> 20 eV. Transitions then become possible to the conduction bands from the gallium 3d core states, which lie some 10 eV below the lowest valence band. Philipp and Ehrenreich 210 had noted a small reflectance maximum (Rmax -0.016) for hv=21 eV, and this and related features have been studied in more detail in reflectivity investigations of more recent years.248.249 In one of these, Skibowski et al. 249 used reflectivity derivative spectroscopy, plotting (d 2R / dv 2 ) vs hv, in demonstrating six features between 19.5 and 21.5 eV. The same spectral region has also been studied actively by means of electroreflectancel50-152 and photoemission.25O-253 All of these sources of information, and others, were used by Aspnes 152 in determining the ordering of the GaAs conduction bands-a subject taken up in Sec. VI. As a complement to the curves of R in Fig. 38, and of K 1 and K2 in Fig. 39, a curve is provided in Fig. 40 of the optical absorption coefficient, a = (41TVk / c). This is shown from the intrinsic threshold to hv = 25 e V, and is taken from the work of Casey et al. 225 The curve is based on transmission measurements of those authors for the intrinsic edge region, combined with a Kramers-Kronig analysis 209 of reflectance data. For the latter, reflectance data from Sell et al. 207 was used in the spectral range 1.2-1.8 eV, and the traditional Philipp and Ehrenreich data 210 was utilized for the range 1.8-25 eV. The peaks of a in Fig. 40 for hv near 3, 5, and 6.5 eV, can easily be recognized as having counterparts in K2 of Fig. 39. R151 J. Appl. Phys. Vol. 53, No.1 0, October 1982 6 10 "7 ~ 2 u ...... 105 .>£ ;:,. t:: v " 1:1 104 2 4 hv 6 8 10 20 30 (eV) FIG. 40. Log-log plot of the absorption coefficient a(hv) from the intrinsic edge to 25 eV, after Casey et al. 225 Aside from transmission data in the edge region, this is based on Kramers-Kronig reflectance analysis, using data of Sell et al.207 for the range 1.2-1.8 eV, and that of Philipp and Ehrenreich 210 for all larger photon energies. Figure 40 shows graphically what was expressed in words in the first sentence of this subsection: the absorption coefficient of GaAs approximates 106 cm - 1throughout the ultraviolet part of the spectrum. VI. ENERGY BANDS AND GAPS A historical curiosity ofGaAs and the other 111-V compounds is that their sphalerite crystal structure was known in the 1920s,28 yet a demonstration of their semiconducting character had to await Welker's work l a quarter century later. In the last several years of that inverval, the semiconducting properties of Ge and Si had been vigorously explored, and the stage was set for for the unveiling, by Herman,254 of calculated band structures for these (indirect gap) Group IV semiconducting elements. It did not escape notice that GaAs is isoelectronic with Ge. Welker's appraisal 255 of such a situation was that he expected the III-V binary to have a wider gap and higher melting point than the element, because of the partly ionic binding. Initially, Welker also surmised that the admixture of homopolar (covalent) and heteropolar (ionic) binding might even lead to larger carrier mobilities. The mobilities to be reported in Sec. VII do not support that additional conjecture. 256 A. Bond character and valence charge distribution In order to report the status of models for bonding and the energy bands of GaAs, one would prefer to avoid excessive entanglement in the large literature concerning bonding in tetrahedrally coordinated solids. Some mention of this is unavoidable, and there have been expressed differences of opinion concerning the ionic:covalent balance in solids such as GaAs. J. S. Blakemore R151 Downloaded 21 Sep 2011 to 210.32.148.91. Redistribution subject to AIP license or copyright; see http://jap.aip.org/about/rights_and_permissions FIG. 4J. Total electron density distribution in the (\10) plane of GaAs, as deduced by Sirota and Olekhnovich"" from x-ray structure analysis. Nearest-neighbor bonds extend in this figure from the three Ga atoms forming the bottom row to the two As atoms one quarter of the way up. FIG. 42. A comparison, after Chelikowsky and Cohen";" of the valence electron density distributions ofGe and GaAs, projected on the (110) plane. For these Isoelectronrc solids, there are in each case eight valence electrons per primitive basis, for four valence bands. These data are consequences of Chehkowsky and Cohen's nonloeal pseudo potential band model. A partly ionic bond can be considered to resonate between covalent and ionic charge distributions_ As Welker noted, this gives a stronger bond than a strictly covaient one_ In principle, the ionicity fraction}; represented in the energy-minimized wavefunction can be calculated by a variational method, provided the wavefunctions for covalent and ionic limits can be simulated properly. One approach to this uses atomic orbitals, as in tight binding, and Coulson et at. 257 deduced a charge transfer of OA6e from Ga to As in solid GaAs by this linear combination of atomic orbitals (LCAO) method. Sirota 34 inferred that the charge transfer from Ga to As would have to be >036e; the excess depending on how the valence electron charge distribution was to be interpreted. What does the electronic distribution look like in practice? Sirota and Olekhnovich 258 used x-ray structure analysis in order to deduce the spatial distribution for the totality of extra-nuclear electrons in GaAs. Figure 41 shows contour lines they deduced for the (110) plane. Four nearest neighbor Ga-As bonds lie in the lower quarter of this figure. (Compare with Fig. 2.) Of course, regions near the nuclei are dominated by the large electron densities associated with As and Ga cores of closed K, L, and M shells_ However, Fig. 41 does show contours for smaller electron density further from the nuclei, indicative of nearest-neighbor "bridging bond" regions. These have some asymmetry, as to be expected. The 4s and 4p subshelJs contribute eight electrons per GaAs primitive basis, three from Ga and five from As. A totally covalent bond, with the eight equally shared, would thus be Ga - As -+- , with one electron transferred to Ga. The ionic Ga -+- 3 As - 3 is the opposite extreme, and the truth lies in between. As just noted, Coulson et al. 2)7 and Sirota J4 both expected a small (electronic) charge transferrence from Ga to As, resulting in Ga -+- x As - x with x~O.4. Related experimental evidence is puzzling and inconclusive. X-ray reflec260 tion analyses by DeMarco and Weiss 259 and by Colella both indicated a bond slightly more ionic than the "neutral" GaOAso situation, with x > O. However, x < 0 was indicated by x-ray work of Attard et al. 261 and by piezoelectric studies of Arlt and Quadfleig. 262 Polarization in GaAs has more recently been reexamined by Martin and Kunc.26~ Figure 42 pictures the spatial charge distribution for the eight valence electrons per primitive basis of the isoelectronic solids Ge and GaAs, projected (as in the case of Fig. 41) onto the (110) plane. The contours of Fig. 42 are not experimental: they are calculated from the nonlocal empirical pseudopotential model (EPM) for band calculation, as employed by Chelikowsky and Cohen. 264 The curves of Fig, 42 are based on experiment, to the extent that known (or surmised) energy gaps were used in the development of pseudopotential form factors. However, such curves are less tangibly connected to experiment than are the Fourier-transformed x-ray data of Fig. 41. The two parts of Fig. 42 assist in visualizing the polarization foreseen by an empirical pseudopotential method (EPM) calculatioil for a Ga-As bond, compared (contrasted is too harsh a word) with a Ge-Ge bond. The contour lines of Fig. 42, from Chelikowsky and Cohen, provide some updating of valence charge contours that Walter and Cohen 26s had worked out some years earlier. The earlier work may be of interest to a reader who wishes to dig deeper, in that this also gave contour plots for each of the four GaAs valence bands separately (each filled by two electrons per primitive basis), as well as one for the complete valence ensemble. The interested reader may also wish to compare Fig. 42 with GaAs valence charge contours subsequently calculated by Ihm and Joannopoulos 266 from a self-consistent pseudopotential method, or by Wang and Klein 267 using a self-consistent linear combination of Gaussian orbitals (LCGO) method. Before the work of Walter and Cohen 265 is left too far behind by these more recent calculations, it may be noted that this arrived at an ionicity fraction}; = 0.31 for GaAs. This can be compared with the results of other procedures R152 J. Appl. Phys. Vol. 53, No.1 0, October 1982 J. S. Blakemore R152 Downloaded 21 Sep 2011 to 210.32.148.91. Redistribution subject to AIP license or copyright; see http://jap.aip.org/about/rights_and_permissions for arriving at this quantity. Thus, a heat of formation approach was used by Linus Pauling 268 in the development of his well-known empirical scales of atomic electronegativity. The electronegativity difference (x A - x B ) between atoms A and B then determines/; for an isolated A-B bonding situation. The eventual value of/; in a solid is further affected by the valence (Z = 3 for GaAs), and by the coordination number (N = 4 for the sphalerite lattice). The Pauling procedure accordingly resulted in/; = 0.28 for crystalline GaAs. In the course of an extensive discussion of bonding in semiconductors, Phillips35 deduced an ionicity fraction /; = 0.31 for GaAs. Rather different criteria had been used by Walter and Cohen265 in obtaining the same value. Phillips' approach to mixed covalent/ionic bonding, as also discussed elsewhere by Phillips and Van Vechten,269 has been based on the difference in directionality (and hence in eigenvalue) between bonding and antibonding orbitals. This approach has led Phillips to the formalism of a complex energy gap, with homopolar and heteropolar contributions. The result has been an electronegativity scale differing from Pauling's one. For GaAs, the differences are unremarkable: (x As - x Ga ) = 0.4 according to Pauling, and 0.44 from Phillips' scale. B. Energy band calculations and pertinent experimental results One of the earliest band calculations for GaAs was made by Herman,270 using the orthogonalized plane wave (OPW) method he had employed so successfully for silicon and germanium. 254 Herman's approach benefited from the gross similarities of the valence and conduction band systems for the diamond structure Group IV elements and the sphalerite structure 111-V compounds in general, and of isoelectronic Ge and GaAs in particular. These features in common are certainly worth emphasizing, for in all of these solids, the three upper valence bands have maxima at the zone center, r (000): the two uppermost bands (heavy-hole and light-hole) with a degenerate maximum, and the third separated by the spin orbit splitting energy Ll so . For GaAs, that splitting Llso = 341 meV, only 18% larger than in germanium. Moreover, the various solids provide an interesting competition as to whether the lowest conduction minimum will be a single one at the zone center, or a multiple set along [l00] or [Ill] directions in the zone. Experiment and theory during 1953-54 had shown that the lowest Si conduction minima are a set of six ellipsoids along [100], while for Ge the four L (m) minima are (slightly) lower than the one at the center of the zone. Thus both Si and Ge are indirect gap solids. In contrast, a direct gap status was indicated quite early on for GaAs, from the intrinsic absorption 204 and reflectance 205 behavior. Moreover, a single minimum at the zone center would be consistent with the observed isotropy of piezoresistance27I and magnetoresistance 272 for N-type GaAs. Gross similarities of the band structures, especially for an isoelectronic pair of solids such as Ge and GaAs, continued to influence band calculations for GaAs in the 1950s and 1960s,273-279 and still does so. Two well-represented schools of thought in work of the 1970s have been the EPM apR153 J. Appl. Phys. Vol. 53, No. 10, October 1982 4 .. > >a:: w z C> w GaAs -8 -10 -12 l A r A x U,K REDUCED WAVE VECTOR L r q FIG. 43. Electron energy vs reduced wave vector, for the four GaAs valence bands, and the first several conduction bands, as calculated by Chelikowsky and Cohen"'" from a nonlocal EPM approach. The top of the valence bands € v is zero on this scale. Generally similar forms for the €-k curves have been calculated by local EPM,277 k.p,278 OPW,279 and LCGQ267 methods. proach (elaborated from locaf 77 ,280 to nonlocaI264.28I,282 forms of pseudopotential), and the "bond orbital" approach espoused by Harrison and coworkers.283-285 The latter is a descendant of the LCAO method, and is useful mostly for filled bands. Its validity even for that has been debated vigorously by Phillips and Harrison,286 a test it seems to have withstood. Shevchik et al. 253 used a comparable approach in analyzing gallium arsenide photoemission data. Figure 43 shows the general features of the E-k curves along high symmetry directions in the zone, for the four valence bands and the first several conduction bands. These curves are as deduced by Chelikowsky and Cohen 264 from the nonlocal EPM approach. They provide more detail, and cover a larger energy range, than in Cohen and Bergstresser's earlier EPM work. 277 The broad features of this figure are comparable to those found in the k.p calculation of Pollak et al.,278 the OPW calculation of Herman et al.,279 or the self-consistent linear combination of Gaussian orbitals (LCGO) calculation of Wang and Klein. 267 Despite some differences on the smaller scale of energies (some of which are important!), several kinds of band calculation-some nearer to a "first principles" basis than others--encourage an acceptance of the broad features of Fig. 43. An energy band calculation that yields a set of E-k dispersion curves can, if asked, provide several other kinds of related information. The valence charge density contours of Fig. 42 are one example of an additional output from Chelikowsky and Cohen's calculation; one also provided in some subsequent band calculations266.267 with different starting criteria. Figure 44 exemplifies a further product of a band calculation, by plotting g(E), the density of electron states with respect to energy. The solid line isg(E) as calculated by CheliJ. S. Blakemore R153 Downloaded 21 Sep 2011 to 210.32.148.91. Redistribution subject to AIP license or copyright; see http://jap.aip.org/about/rights_and_permissions T= 300 K 3 , g 1.0 o o > , c: 2 L6 > ~ ~ _ 0.5 Iv -12 -9 -6 -3 (E-E v ) (eV) 3 6 I ~ ~O >- <.!) FIG. 44. Density of states with respect to energy glE) for the lower part of the conduction band system, and for the four valence bands. Solid curve, as calculated by Chelikowsky and Cohen. 264 Dashed curve, experimental result of Ley et al.'" for the valence bands, obtained by x-ray photoelectron spectroscopy. 0:: W 2 W_I .---1 permitted them to detect GaAs core states. The Ga 3d core states were seen as a narrow band of 1 eV FWHM width at (C" - 19.5 eV), some 7 eV below the lowest valence band. The As 3d band was of similar width, centered on (£v - 40.5 eV). Figures 43 and 44 report on calculated band features over a 20 eV span of energy. However, some aspects of the band structure are confined to a small fraction of an eV-yet can be very important! One such for GaAs is the detailed form of £-k at the Brillouin zone center, near energy £v' Only dimly apparent from Fig. 43 is that two of the four valence bands reach a common maximum here: this is the (nominal) extremum for both the heavy-hole (VI) and light-hole (V2) bands. That degenerate extremum of VI and V2 is shown in a little more detail in Fig. 45. There are further aspects of this complicated extremal behavior too small to show even on the scale of Fig. 45, caused by the absence of inversion symmetry,287 and these are reviewed in Sec. VI D. R154 J. Appl. Phys. Vol. 53, No. 10, October 1982 X6 6 r, ,I _____ '42 ' ~~___J'v (v I) Heavy hale s 0.34 eV Light holes (V2) Split-off band (V3) A kowsky and Cohen, for the first 4.5 eV of the conduction band system, and for the full span of the valence bands. Chelikowsky and Cohen draw that valence band total range as 12.5 eV, which can be compared with the 12.9 eV range reported in the experiments of Grobman and Eastman. 25o A g(c) curve was also provided from Wang and Klein's band calculation. 267 This is similar to the solid line in Fig. 44 for the valence bands-and extends an extra 2 eV in the conduction range. The dashed line in Fig. 44 shows an experimentally obtained g(£) for the valence bands: x-ray photoemission spectroscopy data of Ley et al. 252 These authors estimated their resolution as being 0.55 eV full width half maximum (FWHM). The substantial areas of agreement between the dashed and solid curves of Fig. 44 are pleasing, bearing in mind the smoothing effect of the experimental resolution. Other experimental curves for g(£) in GaAs have been obtained by methods such as photoemission. Early experiments 246 could obtain g(£) data for the upper part of the valence bands, and later measurements 25 0- 25 .1 with more energetic photons secured the entire curve. Incidentally, the 1487 eV photons used by Ley et al. m Tr-- OAO eV nOOO) /::; REDUCED WAVE VECTOR X(IOO) q FIG. 45. Variation of energy with wave vector for the uppermost part of the valence band system, and for the lowest sets of conduction band minima. Energy gaps are shown as appropriate for room temperature. A second "fine detail" of the GaAs bands-of large importance-concerns the order of eigen energies of three types of Brillouin zone location where the lowest conduction band dips to a minimum. Over the years, some band calculations have found for T 6-X6-L6 as the order of increasing energy.27K,279 Others have indicated the alternative T6-L6-X6 order.264.273.277.282 Thus a definitive experimental decision was long overdue when T-L-X was demonstrated by the 1976 electro reflectance experiments of Aspnes et al. 151 Prior to 1976, many GaAs studies had been based on an assumption that the conduction band order was T-X-L. That widely held presumption drew upon the successes of Ehrenreich's skillful 1960 analysis 288 of many observed GaAs properties. Ehrenreich assumed a single zone-center lowest conduction minimum, modeled by an adaptation of the k.p model Kane 215 had used for InSb. However, Ehrenreich took note also of the spectral character of free electron absorption in N-type GaAs,l98 and of high temperature Hall effect anomalies in N-type GaAs. 2R9 These led him to predict a set of secondary conduction minima only some 0.36 eV higher than the first single minimum. Callaway'S band calculations 273 had previously predicted [111] symmetry for the second lowest conduction band. However, Ehrenreich's remarks suggest that he was more influenced by trends of pressure coefficient data. In any event, he ended up by suggesting [100] symmetry for the second-lowest conduction minima. He was not emphatic about that assignment, to the point ofplacing a sign (?) alongside it. Nevertheless, Ehrenreich's postulated assignment was accepted in the interpretation of almost all GaAs experimental work of the ensuing 16 years. As one example, predictions of and modeling of the "Gunn effect" in GaAs290-293 during the 1960s were always constrained by a presumption of a T-X-L band sequence. 294 J. S. Blakemore R154 Downloaded 21 Sep 2011 to 210.32.148.91. Redistribution subject to AIP license or copyright; see http://jap.aip.org/about/rights_and_permissions Aspnes and Cardona 295 subsequently wryly remarked that Ehrenreich's F-X proposal had been argued so well, that it tended to discourage serious attention to any contrary indications, from either calculation or experiment. Not until the 1976 measuremens of UV Schottky barrier electroreflectance by Aspnes et af. 151 did the true (one hopes) F-L-X ordering receive an unequivocal demonstration. The literature on GaAs in subsequent years has made a rapid adjustment to the abruptly altered perception of the conduction bands. Figure 45 shows the F 6 , L 6 , and X6 minima in that sequence, with the energy gaps above the top of the valence bands shown as appropriate for room temperature and ordinary pressures. The band characteristics within the 5 eV total range of Fig. 45 are the ones of most importance for most of the topics reviewed in the remainder of this section, and also for the various transport phenomena topics of Sec. VII. The present section continues now, focussed on the features of Fig. 45, in discussing first the valence to conduction energy gaps, followed by material concerning the characteristics (effective masses, densities of states, etc.) for the various band extrema within the range of that figure. c. The direct and indirect intrinsic gaps 1. The smallest (direct) intrinsic gap A variety of optical experiments has provided information concerning the direct intrinsic gap and its temperature dependence. The relevant measurements include: room temperature reftectance207 and absorption,225 absorption extended from room temperature upwards as far as 973 K,296 absorption222.297 and refiectance 29R extended from room temperature downwards towards the liquid hydrogen and liquid helium ranges, and several methods used at pumped helium temperatures. The latter include exciton line absorption,224 reflectance,299 and photoluminescence. 223 ,229,300 As with many other semiconductors, a linearized form €j=(€.o - aT) provides an inadequate representation of the temperature dependence, especially if it is desired to model €j(T) to well below room temperature. An empirical equation, requiring the choice of three parameters, was proposed by Varshni 301 as an improvement over a linearized form. Varhsi's expression was (44) and this has a quadratic dependence on temperature for small T, changing smoothly towards a linear dependence for 1'>/3. Varshni speculated that the parameter /3 should be comparable to the Debye temperature of the solid; but this is an imperfect guide, with GaAs as with other semiconductors. Pan ish and Casey296 fitted their own absorption edge data (for 300 < T < 973 K), and lower temperature data from other sources, to Eq. (44), and deduced thereby values for €j 0' a, and /3. Their values were subjected to further refinement in an analysis reported by Thurmond,302 which took additional experimental results into account. Thurmond accordingly arrived at the parameter set €jO = 1.519 eV, a = 5,405x 10- 4 eV/K, and/3 = 204 K, for use in Eq. (44) R155 J. Appl. Phys. Vol. 53, No.1 O. October 1982 in the temperature range 0 < T < 1000 K. He thus suggested the numerical form €j(T) = 1.519 - 5.405 X 1O- 4 T 2/(T + 204) eV (45) for GaAs, and estimated a standard deviation of some 3 me V over the above cited range. It may well be necessary to expect deviations of that size for the highest temperatures, but Eq. (45) does even better for both room temperature and the cryogenic extreme. Thus Eq. (45) is in perfect accordance with the result of Sell et al. 299 that the r = 1 exciton line emission at T = 2 K occurs at a transition energy Rxl = 1.515 eV; for the r = 1 exciton Rydberg energy Rxl = 0.004 eV must be added to reach €j = (€xl + Rxl ) = 1.519 eV. Equation (45) also agrees with the value €j(297) = 1.424 eV that was found by Sell et al. 207 Subsequent experimental work (of which more diverse data taken well above room temperature would be desirable) may eventually lead to some small further refinement of the parameters in Eq. (45). It seems unlikely that any error in that expression could be a major one. The lattice constant of GaAs decreases when a large hydrostatic pressure is applied, as was seen in connection with Fig. 6. Not surprisingly, this enforced contraction increases the width of the direct gap. A large effect of this type was seen by Welber et al. 303 These workers applied pressure up to 180 kbar at room temperature, while monitoring the intrinsic edge by optical transmission. Their result for the direct gap (at the zone center) was reported as €r=1.45 + 0.0126P - 3.77X 1O- 5 p 2 eV (46) for P in kilobars. Thus the initial derivative (J€r/JP) = + 0.0126 eV/kbar, while Welber et al. noted that €r had reached 2.5 eV by their high pressure limit of 180 kbar. Those workers seemed concerned by the observation that €r seemed to be (approximately) linearly dependent on lattice constant; but was a nonlinear function of pressure-as indicated by Eq. (46). Tsay and Bendow 304 further analyzed and modeled that nonlinear pressure dependence. However, since the GaAs bulk modulus increases with pressure (as shown by the curve of Fig. 6), thepresenceofaP 2 term in Eq. (46)-with sign opposite to the linear term-should not be a surprise. The dependent variable in Eq. (46) is described as €r rather than €j' since GaAs becomes an indirect gap semiconductor for P> 35 kbar, as shown by high pressure transport data of Pitt and Lees. 305 Interestingly, the zone-center minimum is not supplanted by the L6 set of minima that are the second-lowest at normal pressure, for these also rise with pressure. Aspnes 152 suggests (a€ L I JP);::::: 0.0055 eVIkbar, so these minima are still -0.2 eV above the F6 one for P;:::::35 kbar. However, the [100] oriented ellipsoids, marked as X6 (or ..1 5)306 in Fig. 44, are brought slightly downwards by pressure: (J€xIJP);::::: - 0.0015 eV Ikbar, and itis these ellipsoids that form the high pressure conduction band. Welber et al. 303 were able to detect both the indirect and direct absorption thresholds for P> 35 kbar. The thermodynamic significance of €j (T), as described by Eq. (45), is worth some emphasis. As the smallest photon energy for creation of a valence band hole and a conduction J. S. Blakemore R155 Downloaded 21 Sep 2011 to 210.32.148.91. Redistribution subject to AIP license or copyright; see http://jap.aip.org/about/rights_and_permissions 1.60,-----,---.----,--,-_---, >19 a: 2. The three smallest indirect intrinsic gaps Many conduction minima can be seen in the various conduction bands of Fig. 43. Consideration was reduced to the four lowest in drawing Fig. 45. Of these, three represent indirect intrinsic gaps, for which phonon absorption or emision is necessary in making an optical transition from the top of the valence band. Aspnes l52 has presented arguments in considerable detail as to the relative positions of the L 6 , X 6 , and X 7 sets of minima. The interested reader is recommended to read his account for the variety of detailed considerations that led to his proposals. The analysis by Aspnes was based in part on UV electroreflectance measurements in which he was involved,149-151 but also took account of other measurements of optical properties under modulated conditions, 135-148 photoemission,245-247,250-253 intraconduction band absorption,308,309 high pressure transport,305 and high temperature transport. 289 ,310 1.50 W Z w IA5 Z o f- en lAO Z <l a: f- 1.35 1300:----1-'0...,.0--2...L0-0--30LO--4....L0-0----.J500 TEMPERATURE T(K) FIG. 46. Variation with temperature of the direct intrinsic gap EdT), from Eq. (45), and the enthalpy of that transition, JH (T) ofEq. (49). The dashed lines show that a tangent to E, (T) at any temperature extrapolates back to JH (T) on the ordinate scale, and that for GaAs this is invariably larger than E, for any real temperature. electron, the energy E; must create each with zero kinetic energy. As pointed out by Thurmond,302 this is the Gibbs free energy of the transition. Also associated with this transition are an enthalpy.t1H (T), and an entropy .t1S (T). The three quantities are related by E; =.t1H - T.t1S. (47) The entropy can be obtained by differentiation of Eq. (44), for the numerical specifics ofEq. (45): .t1S (T) = ( - dE;ldT) = aT(T + 2/3 )/(T + /3 f, = 5.405 X 1O- 4 T(T + 408)1(T + 204)2 eVIK. (48) Similarly, the enthalpy of the intrinsic transition for GaAs satisfies + T.t1S) = E;o + a/3T 2 /(T + /3 f 1.519 + 0.1103T 2 /(T + 204f eV. .t1H(T) = (E; = (49) Thus the enthalpy of the transition for any finite temperature is larger than E;o' Figure 46 illustrates the variation with temperature of E; from Eq. (45), and of.t1H = (E; + T.t1S) from Eq. (49), for the range 0.;;;1.;;;500 K. The dashed lines illustrate that a tangent to the E;(T) curve, extended back to the ordinate scale, crosses this at the value of the enthalpy. For room temperature, as illustrated, the difference between the two curves is T.t1S~0.14 eV. Thus it makes a great deal of difference, when analyzing data for their information about the gap width (in GaAs or any other semiconductor), to make a clear distinction between .t1H and E;. Otherwise, an erroneously large E; can be deduced from intrinsic carrier population data, subjected to an Arrhenius plot. In that way, Whelan and Wheatley307 arrived at a supposition that E; ~ 1. 58 eV from high temperature Hall data Oust the value of.t1H for T=600 K) in their important early study of transport in GaAs. Thus it is necessary to identify and separate the various parts of .t1H in unraveling ambipolar conduction data. 122 R156 J. Appl. Phys. Vol. 53, No.1 0, October 1982 It was assumed by Aspnes that the temperature dependence of the three smallest indirect gaps [from the valence bands at r (000) to the L 6 , X 6 , and X 7 minima, respectively] could be modeled with reasonable accuracy by three-parameter expressions analogous to Eq. (44). For the lack of better and more specific information, he also assumed that Thurmond's choice 302 of /3 = 204 K for the direct gap would also serve adequately for the three indirect gap expressions. Of the three sets of conduction minima under consideration here, the L6 set is the most important for electron occupancy in thermal equilibrium at high temperatures. Aspnes suggested that this smallest indirect gap be modeled by EL = (E; + .t1 n ) = 1.815 - 6.05X 1O- 4 T 2/(T + 204) eV . (50) In view ofEq. (45) for E, itself, this means that the elevation of the L6 minima with respect to the zone-center F6 minimum, denoted .t1 n, decreases fairly slowly with rising temperature: .t1 n =O.296-6.45XI0- 5 T 2 /(T+204) eV. (51) For the second-smallest indirect gap, that between the valence bands and the X6 minima, Aspnes proposed Ex =(€; +.t1 rx ) = 1.981-4.60XlO- 4 T 2 /(T+204) eV. (52) And so the excess elevation of this conduction band with respect to the lowest is .t1 rx =0.462+8.05XlO- 5 T 2 /(T+204) eV, (53) which gradually increases with rising temperature. As a consequence of the differing temperature dependences of.t1 nand.d rx indicated by Eqs. (51) and (53), everything is favorable for the L6 conduction band to acquire the lion's share of the conduction electron popUlation at high temperatures-approaching 80% of the total by the melting point, as discussed in Sec. VI E. Things are much less favorable for thermal elevation of electrons to the X6 conduction band, a situation aggravated by the increase of .t1 rx with temperature. Of the X 7 conduction band, electroreflectance measurements 149 appear to have improved on the accuracy of earlier J. S. Blakemore R156 Downloaded 21 Sep 2011 to 210.32.148.91. Redistribution subject to AIP license or copyright; see http://jap.aip.org/about/rights_and_permissions absorption ones,30B in placing these minima 0.40 ± 0.01 eV higher than the X6 ones (for low temperatures and ordinary pressures). Such a placement for the X 7 band minimum is high enough to assure that this band will never contain more than an insignficant fraction of the total conduction electron population, for any combination of temperature, pressure, and/or electric field. The X 7 band is not considered further in this section or in Sec. VII. D. Characterization of the zone-center band extrema Further comments are made in this subsection concerning approximation of the forms of c-k dependence to be expected near the major band maxima and minima of GaAs, and how these relate to "effective mass" concepts. For an ideal semiconductor, the latter task reduces simply to definition of a valence band mv and a conduction band me' That is inadequate for GaAs, because of: (i) A degenerate maximum, at the center of the zone and for energy c v' of two valence bands: the VI "heavy-hole" band, and the V2 "light-hole" band; (ii) Warping and nonparabolicity complications for this pair of bands; (iii) The presence also of the V3 "splitoff" band, with its maximum at energy (cv - .1 so ), some 0.34 eV below Cv ; (iv) Nonparabolicity (and slight anisotropy) for the r6 minimum of the lowest conduction band, denoted as Cl in Fig. 47; (v) The presence also of sets of conduction minima also at L6 and at X6 (or .1 5 ), each requiring longitudinal and transverse mass components for its specification. Even with the last of these complications deferred until later in this section, the first four of the above enumerated items offer ample complexity. Figure 47 shows some of their attributes, a figure which plots energy versus k 2, out from the zone center in [100] and [111] directions. This coordinate system is used in Fig. 47, since a parabolic band (one that can >III 0 >., -0.2 > , \0 \0 -0.4 - O. 6 ~---'-_-"----L-'--_'-------'-'>'---"--_-'-----' 2 0 -[III] k 2 (10 14 em- 2 ) 2 [100]- FIG. 47. An approximation for energy vs k 2 around the zone center for the lowest conduction minimum (el) and the three highest valence bands (VIV3). [100] and [III] directions are visualized. The range covered here is equivalent to l.Jkl to about one tenth of the Brillouin zone radius. R157 J. Appl. Phys. Vol. 53, No.1 0, October 1982 be described by an effective mass tensor with energy-independent elements), would appear as straight lines, sloping away from the external location. The figure shows several departures from that! Some complications of band extrema for solids (such as GaAs) with the sphalerite structure, are also present for the Group IV elements with the diamond lattice. Elliott 311 showed the significance of the relativistic spin-orbit interaction, in depressing maximum energy for band V3 by an amount L1so compared with the common maximum of VI and V2. That remaining V 1 and V2 extremal degeneracy does not permit either of these bands to escape warping of their constant energy surfaces from spherical form, as a consequence of interactions among the bands. Dresselhaus et al. 312 derived an expression c(k)"'-'c v - (/i 2/ 2m oHAk 2 ± [B 2k 4 + C 2 (k ~k ~ +k~k;+k~k;)]'/2J (54) to characterize the warped heavy-hole and light-hole constant energy surfaces near Cv in Ge or Si. (The positive choice corresponds to the light-hole band V2, and the negative choice to VI.) This warping was measured for the Group IV elements by such experiments as cyclotron resonance, in work of the 1950s312-314 and thereafter.315-318 Warping of the GaAs valence bands has also been detectable in cyclotron resonance measurements, 319.320 for comparison with estimates of valence band anisotropy from other kinds of experiment.136.165.321-323 The absence of inversion symmetry in the sphalerite structure means that III-V and II-VI compounds with this structure have additional possibilities for complexity of their band structures, as compared with the Group IV elements of the diamond structure. Dresselhaus 287 pointed out that, with inversion symmetry absent, a twofold Kramers degeneracy of eigenvalues throughout the Brillouin zone is not required. Thus terms linear in wave vector are not automatically of zero coefficient when the c-k behavior is expressed as a polynomial expansion in powers of k around the valence maximum. It is thus possible that the heavy-hole VI valence band ofGaAs might have four "mini-maxima"; each close to the zone center, but slightly removed from r (000) by a small vector of [111] symmetry. One of these four hypothetical mini-maxima 324 is visualized (on a probably exaggerated scale) in the left half of Fig. 47, showing an energy just slightly higher than Cu for the actual zone center. Vrehen's interband magnetoabsorption data '65 included some small anomalies, on a scale of 1-2 meV, which he speCUlated could have been associated with transitions from VI valence states just above c". However, Gilleo and Bailey325 estimated that any energy elevation of such minimaxima in GaAs could not be more than _10- 4 eV, and most assessments of data on this subject for other III -V compounds also tend to show 32 f> that linear k terms will be minor for GaAs. 327 Nonetheless, it is interesting that cyclotron resonance experiments 320 with P-type GaAs reveal a heavyhole mass tensor that has a [111] component 25% larger than along [100). The existence of shallow mini-maxima along [111] directions would tend to assist in, rather than detract from, that observed anisotropy. J. S. Blakemore R157 Downloaded 21 Sep 2011 to 210.32.148.91. Redistribution subject to AIP license or copyright; see http://jap.aip.org/about/rights_and_permissions In addition to its illustration of this slightly bizarre possible complication of the maxima for the VI heavy hole band, Fig. 37 also illustrates nonparabolicity of c-k for the Cl, V2, and V3 extrema. Unlike Cl and V2, for which "effective mass" increases steadily with k, the initial tendency in the splitoffband is for mso to decrease with k, according to a k.p model. That trend is reversed as k becomes larger. The term "light-hole band" is something of a misnomer (for GaAs and for various other semiconductors) except for energies only slightly below cu' For dispersion curves of the V2 band along directions including [100] and [111] follow paths generally parallel to those of the V 1 band, after quite short initial sections of steeper slope. That behavior was, of course, indicated in the curves of Fig. 45 for the upper 1.5 eV of the valence bands, and in the curves of Fig. 43 for a coarser energy scale still. As Fig. 43 shows, it is for [110] and nearby directions that the c-k curves for bands VI and V2 are substantially divergent well out into the Brillouin zone. Nonparabolicity of the light-hole band is thus a feature that has to be taken into account, in describing the statistical weight of the V 1-V2 combination for free holes, especially when the hole density is large and/or the temperature rather high. The need for that complication of V2 is mitigated, to some extent, by the larger density of states (some 14 times larger) of the VI band for energies slightly below cu' For the lowest conduction band, nonparabolicity cannot be ignored in evaluating the statistical weight for free electrons. The nonparabolicity for Cl (and also for V2 and V3) can be treated in a useful approximate manner by the k.p perturbation method, outlined below. 1. k.p modeling of GaAs at the zone center A k.p perturbation approach towards making c-k expansions about high symmetry locations in the reduced zone was taken by Dresselhaus,287 Parmenter/ 28 Kane,215 and Pollak et al. 278 The Kane approach for describing InSb also serves well for GaAs (as used by Ehrenreich 288 ), once approximations relevant to Cj > .1'0 (rather than the reverse) are taken. A k.p model can be made considerably more complicated than Kane's version, by allowing for the additional perturbations caused by other lower and higher bands.278.329-333 However, the "three level" Kane model, with c and.1 as the only two gaps taken into account, is able to des~;ibe features of the zone-center extrema for bands C I, V2, and V3 with respectable accuracy. This model describes the interactions among the four bands of Fig. 47 in terms of a momentum matrix element P, with dimensions of eV cm. Those interactions can equivalently be parametrized by a quantity I x=2moP 2/3fz2 (55) with dimensions of energy.332 Kane showed that the secular determinant has a solution for three of the bands (Cl, V2, and V3) in the form of a cubic equation 334 The energy variable in Eq. (56) is c' = C - Cc - fz 1k 2/2mO' (57) where mo denotes the "free space" ordinary electronic mass. Since the conduction band effective mass is much smaller than m o, the variable c' is just a few percent smaller than the kinetic energy of a conduction electron in a state of energy c. The three solutions ofEq. (56) can be identified with the bands Cl, V2, or V3, respectively. Each solution reduces towards parabolic form (energy varying as k 2) as a small-k asymptotic limit. These asymptotic forms are: e:::",.cc + (fz2 k 2/2mo) XP+X[(2/ci)+(Cj+.1,o)~I]] C~C" - Wk 212mo)[(2X/cj) - C~Cu .1'0 - 1] (Cl Band), (58) (V2 Band), (59) and - Wk 2/2m O)[X/(Cj + J so ) - 1] (V3 Band). (60) However, note that there is no single value for the quantity = (2moP 2/3fz2) that can produce the correct band edge curvature effective mass X m* = Lim k.o fz2 I (d 2e1dk 2) I (61) for more than anyone of the three bands modeled by Eqs. Instead, experimentally measured effective mass parameters must be used to quote individual values of X for each of the three bands separately. These are so listed in Table XII, based on the low temperature band-edge mass values. The parabolic dispersion of Eqs. (58)-(60) ceases to be an acceptable approximation when Ikl is more than a small fraction of a reciprocal lattice vector. That feature is demonstrated by the curves of Fig. 47, which depart markedly from the dashed straight lines of the above mentioned equations. Several stages of generalization of the k.p model were discussed by Kane 215 in a format appropriate for InSb. A variety of expressions suitable for the direct gap members of the III-V compound family were recapitulated by Madelung.3 Both nonparabolicity and anisotropy can then be incorporated into the formalism, as desired. The review will continue to comment on the presence of anisotropy for the various zone-center extrema, though usually without overt attempts at analytic description of these complex phenomena. Nonparabolicity is another matter, which must be considered in detail. Thus, the lowest (Cl) conduction minimum at r 6 has a small anisotropy (demonstrated by the calculated curves of Fig. 48), but a pronounced nonparabolicity. If Eq. (58) is construed as being the statement (58)~(60). C~Cc + (fz2k 212meo) (k~), (62) in defining meo to be the conduction band-edge effective mass, then this is related to Xc for that band by (63) c'(c' + Cj)(c' + Cj + .1 so ) = k 2p 2 (c' + Cj + 2.150/3). (56) R158 J. Appl. Phys. Vol. 53, No.1 0, October 1982 Table XII includes the low temperature consensus value J. S. Blakemore R158 Downloaded 21 Sep 2011 to 210.32.148.91. Redistribution subject to AIP license or copyright; see http://jap.aip.org/about/rights_and_permissions TABLE XII. Directionally averaged (density of states) band-edge curvature effective masses and related parameters, for the zone center extrema of band C I, and bands VI through V3. Band extremum Conduction band CI Heavy-hole band VI Light-hole band V2 Splitoff band V3 Band-edge density of states effective mass, for T-.o k.p model matrix element, expressed as X = (2m"p2/31i2) k.p model k.pmodel Nonparabolicity parameter equation for m*(T) Band-edge density of states effective mass, for T = 300 K meo = 0. 067m o Xc = 7.51 eV a = - 0.824 Eq. (63) mco = 0.063m" m l =0.082mo XI = 1O.0eV {3= - 3.80 Eq. (68) m", = 0.154mo X", = 13.geV Y= + 10.8 Eq. (72) m. =0.5Im o meo = 0.067mo that this review recommends for use as the band-edge effective mass as T-0. (That value is based on experimental results noted in Section VI E. Table XII also showsXe = 7.51 eV as required for consistency with Eq. (63) at low temperatures. As Trises, €; decreases, and accordingly so does meo' Table XII shows how much Eq. (63) predicts meo to have decreased by 300 OK. When Ik I is allowed to become a little larger, nonparabolicity must be allowed for, most innocuously through a k 4 term. This involves examination ofEq. (56) as a quadratic for €' (dropping the term in €'3), and expanding the solution in powers of k 2 as far as the k 4 terms. One can thereby write e::::!.€e + (1i2k 2/2m eo ) + (a/€;)(1i2k2/2meo)2, (64) where the nonparabolicity coefficient a turns out to be negative: a= (1 - m eo /m o)2(3E7 + 4€;..::1so + 2..::1 ~o) (€; + . ::1 so )(3€; + 2..::1 so ) [l - €Aso/(3€; + 2..::1 so )(€; + . ::1 so )] (65) [l +€;(€; +..::1 so )/xe(3€; + 2..::1 so )] 2 The low temperature value a = - 0.824 is also shown in Table XII. Since a < 0, energy rises less rapidly with k than would have been the case for a perfectly parabolic conduction band of energy-independent mass meo' That situation is commonly viewed as an increase of effective mass me with energy. The curves of energy versus k 2 in Fig. 47 for the conduction band illustrate that characteristic of nonparabolicity with a<O. The dimensionless quantity a is not quite temperature independent for GaAs, in view of the €;(T) behavior modeled by Eq. (45). However, a is much less dependent on temperature than meo' The linearized approximate form a':::::!. - (0.824 + 2.0X 1O- 5 T) J. Appl. Phys. Vol. 53, No.1 0, October 1982 E':::::!.€v - Wk 2/2m/) -1j3/E;)(1i2k 2/2mIl 2 (67) for the light hole (V2) valence band. Conformity with Eq. (59) means that the density of states effective mass for the 0.5 r-----------------,---, GALLIUM - - EXACT TWO- BAND INCLUDING HIGHER BANDS - - - EXACT TWO-BAND •••••• APPROX. TWO-BAND _. PARABOLIC BAND 0.4 > 0.3 >(!) a:: ~ 0.2 ~ ARSENIDE UJ 0.1 (66) is quite faithful to Eq. (65) over a wide temperature range. Thus a has progressed as far as - 0.854 by the melting point, and the room temperature value is a':::::!. - 0.83, as remarked by Vrehen. 165 It must be emphasized that the k.p model is a perturbation approximation, and should not be expected to be reliable except quite close to an extremum. Thus Eq. (64), with the nonparabolicity coefficient of Eqs. (65) and (66), will still R159 be inadequate for anyone who wishes to know about the Cl conduction band more than (say) 0.1 eV above the F6 minimum. Fortunately, that possible 0.1 eV range of validity for Eq. (64) is enough to describe the contribution oftheF6 minimum towards the statistical weight of the entire conduction band system, for any temperature of solid GaAs. For those who are interested in how the nonparabolicity and the small anisotropy of the C 1 band appear up to €':::::!.(€e + 0.4 eV), Fig. 48 reproduces curves from the work of Rode, 169 based on unpublished 1969 calculations by Fawcett and Ruch. The uppermost curve in Fig. 48 corresponds to the upper dashed lines of Fig. 47-the meo parabolic assumption. It is a little reassuring to see from Fig. 48 that the so-called "exact two-band including higher bands" model predicts a quite mild degree of anisotropy. As a companion to Eqs. (62)-(65), the k.p model permits one to describe the €-k behavior for a small energy range downwards from Ev by o 2 4 6 8 10 FIG. 48. Energy vs wave vector for the first -0.4 eVofthe F. (el) GaAs conduction band, from Rode. 169 These curves are based on unpublished modeling (- 1969) by Fawcett and Ruch. Note that the uppermost curve is the parabolic dispersion for a room temperature mass moo ~0.063mo. Sophistication in the modeling can provide nonparabolicity and anisotropy. J. S. Blakemore R159 Downloaded 21 Sep 2011 to 210.32.148.91. Redistribution subject to AIP license or copyright; see http://jap.aip.org/about/rights_and_permissions light holes must satisfy (68) m l = E;mol(2XI - E;). Table XII provides the low temperature value of this bandedge mass for the light holes, and shows that this requires a value XI = 10.0 eV that differs sharply from XC' The last term in Eq. (67) can be evaluated, as in the conduction band case, by expanding the appropriate root of Eq. (56) as far as terms in k 4. Again it turns out that the nonparabolicity parameter /3 is a negative quantity. Some manipulation yields the result /3= -(I+EJ2L\so)/(I-Ej2X,)2. (69) As indicated by the entries of Table XII, the low temperature value /3 = - 3.80 is several times larger than the corresponding conduction band nonparabolicity parameter. Thus nonparabolicity takes a similar form for light holes-mass increases as one goes away from the extremum-but the effect is more severe than with conduction electrons. Equation (69) is less Obliging than Eq. (65) in its provisions for a temperature dependence of /3 in a simple linear form useful for all temperatures. However, for a substantial range including room temperature, the behavior of /3 can be approximated by /3~ - (3.87 - T /1000), 200.;;;T.;;;I000 K. (70) The third solution of Eq. (56) is for holes in the splitoff valence band V3. A perturbation expansion to terms in k 4 can be carried out here also. Thus if the E-k relation for the uppermost part of that band is approximated by E~E" - .1'0 - (f?k 2/2m so ) - (y/E;H/fk 2/2mso)2, (71) then conformity with Eq. (60) requires that the band-edge effective mass be described by (72) Table XII shows the low temperature mass m,o perature dependence of y provided by Eq. (73) is not perfectly linear, but the linearized approximation y~ + (11.16 - 0.0043T), 200.;;;T.;;;800 K (74) is adequate within ± 0.02 limits. Thus y~ + 9.87 at room temperature. The large size of this positive quantity y is relatively insensitive to the value of Xso used in Eq. (73); i.e" y is guaranteed to be large for any plausible value of mso. Thus the effects ofnonparabolicity just below the top of this band are marked, and are in the sense of making the curvature effective mass decrease with increasing Ik I. Any underestimate of this tendency, in the experimental analysis by Reine et al., 166 could have led these workers towards an m 50 on the low side-with a consequent error of 1'50 on the high side by use ofEq. (72). These comments on the splitoffband in the k.p perturbation model should conclude with a reminder that this is a perturbation model. As Ikl increases further, the E-k behavior assuredly departs from that approximated by Eq. (71), and the curvature mass certainly increases again. The beginning of that trend is indicated (not quantitatively) in the lowest part of Fig. 47. E. Electron effective masses: Conduction band system statistical weight f. Effective mass for the r6 (ef) lowest conduction band All definitions of effective mass lead to the same numerical value for a band that is both isotropic and parabolic. As already noted, those provisions are inapplicable for the lowest GaAs conduction band, with nonparabolicity more serious than anisotropy. Thus the numbers quoted in this subsection are all intended to be spherically averaged ones. One important definition of effective mass is the band curvature one: = 0.154mo reported by Reine et al. 166 from piezomagneto- (75) reflectance measurements, and also the value Xso = 13.9 eV accordingly required by Eq. (72). That value for 1"0 is nearly twice as large as the value noted for Xc in the same Table. This discrepancy hints that, if there was any error in the experimental mso value of Reine et al. (they had estimated ± 10%), the true m,,, might be larger. Why? For a reason ~xpounded in the paragraph after next. For phenomena such as Faraday rotation, magnetic susceptibility, etc., the important quantity is the "optical" or "slope" effective mass When the root of Eq. (65) appropriate for holes in the splitoffband is developed as a quadratic equation for energy, and the solution is expanded for terms in k 2 and in k 4 (omitting terms of higher powers of k ), then the nonparabolicity parameter y of Eq. (71) is found to be a positive quantity: y= +E,(2E; + .1so)/.1so(E, +.1,o)[l-(E; +.1so)/X,or· (73) Not only is y> 0, it is also quite large. Thus, Table XII includes the value y~ 10.8 for low temperatures. And so the uppermost region of the splitoff valence band is characterized by a curvature effective mass that decreases rather rapidly as one departs from the (Ev - .1 so ) extremum. This is pictorialized by the downwards curvature of the E-k 2 lines just below the upper limit of this band in Fig. 47. The temR160 J. Appl. Phys. Vol. 53, No.1 0, October 1982 (76) Now if E-k for the band can be approximated by Eq. (64), then both me and mOp! converge upon mco for the edge of the band (E-->-Ec,k-D). For energies slightly higher than Ec [but still within the plausible range of applicability for Eq. (64)], then (77) Thus both versions of "effective mass" increase with energy (since a < O), but the curvature mass at a rate three times faster than the optical one. These effects are far from trivial. As an example, consider N-type GaAs at room temperature, doped so that 18 no~2X 10 cm--" so that the Fermi energy EF~(Ec + 78 meV). Then at the Fermi energy, the curvature mass is mc~1.27mco,~0.080mo, while the optical mass at that energy is mop, ~ 1.09mo~0.069mo. That numerical example illustrates how important it is to know which of the various J. S. Blakemore R160 Downloaded 21 Sep 2011 to 210.32.148.91. Redistribution subject to AIP license or copyright; see http://jap.aip.org/about/rights_and_permissions "effective mass" definitions is being used, when conduction electron properties are being discussed. Thus, Cardona, 160 Piller,161 Raymond et al.,333 Ukhanov,335 and others report on experimental data of mass versus energy in this band. The various expressions used or implied need to be interpreted with care. Experimental values for the band-edge mass meo have been deduced from a wide variety of experiments. Stillman et al. 168 give a summary of 18 determinations by various workers. These included the interband magnetoabsorption measurements of Vrehen,165 Faraday rotation results by Moss and Walton, 159 Cardona, 160 Piller, 161 and Ukhanov,335 magnetophonon resonance results of Stradling and Wood,336 and cyclotron resonance measurements by Chamberlain et al.,337 Poehler,338 and others. That summary also noted the quite accurate value meo/mo = 0.0665 ± 0.0005 that Stillman et al. 339 obtained from an analysis of the Zeeman spectroscopy of shallow donor levels at liquid helium temperatures. A consensus of all the work reviewed by Stillman et al. 168 is consistent with adoption of a low temperature, band-edge value meo = 0.067m o, as displayed in Table XII. Indications from various of the experiments noted above were that meo had decreased by several percent on warming to ambient temperatures. The extent of the decrease (or increase) depended on exactly what was being measured. Thus, Chandrasekhar and Ramdas 184 have recently noted a 2% increase of the "optical mass" when doped GaAs (no = 7 X 10 18 cm -3) was warmed from the liquid nitrogen range to room temperature. In contrast, a decrease of the actual band-edge curvature mass meo is indicated by several of the above noted experimental investigations. It is also implicit in the k.p model, through Eq. (63). Figure 49 shows how meo/mo should decrease from its low temperature value when T rises and €j falls. As noted in Table XII, the low temperature combination of knowledge of meo and €j (and Ll so ) determines Xc = 7.51 eV. The behavior of o E "- meo for higher temperatures is affected by a temperature dependence for any of the quantities in the denominator of Eq. (63), but it is assumed here that €j changes, while Xc and Llso do not. (The experiments of Nishino et al. 340 found no reason to modify Llso from its low temperature value of 0.341 eV, at least as far as 300 K.) 2. Effective density of states for the r6 conduction band Had this lowest GaAs conduction band been a parabolic one for which the band-edge mass meo was equally applicable at higher energies, then the dimensionless Fermi energy 7J [(€F-€c)lkT] could have been related to the equilibrium conduction electron concentration no by _ Loo (21Y1T)t 1/2dt (78) N eo iJld7J)· o 1 + exp(t - 7J) Here, iJI/2(7J) is a member of the Fermi-Dirac integral family,341.342 and Neo = 2(21TmeokT /h 2)3/ 2 (79) no - Neo is usually called the "statistical weight," or "effective density of conduction band states" for temperature Tand mass meo' However, the nonparabolicity of the GaAs conduction band makes no> Neo iJI/2(7J) for any finite temperature. This is particularly so for GaAs doped strongly enough N type to be degenerate, but the influence of the nonparabolicity does not disappear when conditions in the conduction band are nondegenerate-as happens in weakly N-type, semi-insulating, intrinsic, or P-type GaAs. This writer has recently discussed the topic apropos intrinsic GaAs.122 What follows emphasizes the aspects that Ref. 122 did not need to pursue. The conduction band €-k behavior ofEq. (64) augments the electron capacity of this band, for a given Tand €F' to the extent no = Neo [iJI/2(7J) - (15akT /4€;)iJ3/2(7J)]. The latter term is actually additive, since Eqs. (64) through (66) show that a < O. One would like to be able to conform with usual semiconductor terminology, in writing the relation between no and Fermi energy in a form o (81) EO 0.065 Then this band minimum can be said to have an effective density of states Q ~ a: 0.060 Nc = 2(21TmeokT /h 211 1 - (15akT /4€j)[iJ3/2(7J)liJld7J)] j = Nco 11 - (15akT /4€j)[iJ3/2(7J)liJld7J)] j. (82) (f) (f) <{ ~ ~ 0.055 o w I o Z ~ 0.050~----L---~L---~----~----~ o 200 400 600 800 1000 TEMPERATURE T(K) FIG. 49. Variation of the conduction band-edge effective mass with temperature, as described by the k.p model of Eq. (63). This assumes ..:l= = 0.341 eV independent of temperature, and that meo = 0.067mo at low temperatures when E j = 1.519 eV, from which Xc = (2moP 2j 2 311 ) = 7.51 eV as the strength of the momentum matrix element, as noted in Table XII. R161 (80) J. Appl. Phys. Vol. 53, No.1 0, October 1982 The multiplying effect of the factor! ..... j depends on T, and also on the relation of € F to €c' For nondegenerate conditions (€F < €c' no < Nco) all members of the Fermi-Dirac integral family reach a common asymptotic form: iJj (7J)-e'1. That minimizes the multiplying factor, but it is still larger than unity for any finite temperature. Let us denote Nc as N; for such nondegenerate conditions, so that N;/Nco = (I - 15akT /4€j). (83) The right side of this equation contains three temperaturedependent quantities: Titself, a ofEqs. (65) and (66), and €j ofEq. (45). It is thus not possible to expressN ;/Neo in simple J. S. Blakemore R161 Downloaded 21 Sep 2011 to 210.32.148.91. Redistribution subject to AIP license or copyright; see http://jap.aip.org/about/rights_and_permissions factor in Eq. (84). The rate of decline is about half of (Nco /T 3/2), and so the augmenting effects of nonparabolicity offset about half of the decline in m~~2. The magnitude and total temperature dependence of N ; is represented quite well by N .... '", 8 ~ '", :::!' 7 U N; ~8.63 X 1OI3T3/2(1 - 1.93 X 1O- 4 T - 4.19 X 1O- 8 T 2 ), ~ 0 6 cm- 3 l.L 0 (100< T < 1200 K). (f) I- 5 z :::> 4 100 300 500 700 900 TEMPERATURE 1100 1300 1500 T (K) FIG. 50. Components of the temperature dependence for the effective density of states associated with the lowest GaAs conduction minimum. The lower curve shows (Nco /T 3/2), where Nco is defined in Eq. (79). The decrease is caused by the falloff of m eo , modeled by Eq. (63) with c, varying as in Eq. (45). The upper curve shows (N ;/T3/2), enlarged by the mUltiplying factor ofEq. (83), modeled numerically by Eq.184). exact analytic form. However, the numerical behavior of this ratio is tracked quite well by (1 - 15akT /4E;) 4 H 2 = N;Nco~[ 1 + 1.73 X 1O- T + 3.80X 1O- T 3 +4.36xlO- " T ] (100.;;1<;1000 K). (84) Thus the multiplying factor for nondegenerate conditions amounts to some 1.056 for room temperature, and to 1.255 by 1000 K. The band-edge mass meo is steadily decreasing with rising temperature, as indicated by the curve of Fig. 49 if one can rely on the k.p model Eq. (63) as a guide towards high temperature behavior. Accordingly, Nco rises with temperature, but less rapidly than its explicit T3/2 factor. The lower curve of Fig. 50 shows the decrease of(Neo/T3/2) with rising .. f rom tee h b h ' 0 f meo 3/2 . temperature, ansmg aVlOr The upper curve of Fig. 50 shows that (N ;/T3/2) also decreases with rising temperature, despite the effect of the (85) This is recommended for use as the statistical weight of the Cl conduction band whenever conditions are nondegenerate. Thus, N;(3OO) = 4.21 X 10 17 cm- 3. N-type GaAs is often doped strongly enough so that the condition no < Nco is grossly violated. One must then contend with a relation between no and E F appropriate for partial or complete degeneracy, as described by Eqs. (81) and (82). Those equations allow the interested reader to compute what value of no is appropriate for any combination of T and 341 or E F , with ;51/2(7]) and i"Y3/2(7]) provided from tabulations from analytic approximations,34 1-343 as required. Rather than attempting a presentation of families of curves for all combinations of T and no, this subsection of the review closes with notes on two important temperature regimes: for 300 K, and for the strong degeneracy limit of no still large as T---'>0. Figure 51 displays the results of Eqs. (81) and (82) for room temperature, T = 300 K. The two abscissa scales show no and the resulting Fermi energy, while the two ordinate scales show the ratio (Ne/Neo ) and the actual value of N c. The ordinate scale at the left ofthe figure demonstrates what has already been noted for room temperature, that Nc = N; for nondegenerate conditions is more than 5% larger than Nco. However, the ratio (Nj Nco) has grown to more than 1.2 when N-type GaAs is made markedly degenerate by imposing no~ 10 19 cm -3 Of course, that has forced EF more than 200 meV above Ec , which has a variety of consequences, inckding a large Burstein-Moss shiff 38 .239 of the intrinsic absorption edge as demonstrated in Fig. 35(a). The rise of the curve in Fig. 50 with increasing no is equivalent to the curves (meV) 4.75 I ::2: N- Type GaAs <.) T = 300 K 1.15 I<) I"- 0 4.50 o u Z ........ 1.10 u ....N Z 4.25 ~ ~-----===~=------1.05 o FIG. 51. Variation of the "effective density of conduction states" with electron density no for GaAs at 300 K. In addition to ordinate scales for N, ofEq.182) and ofIN,/Neo )' an upper abscissa scale is shown oflcF - c,). Since this is for T = 300 K. it may be noted that meo = 0.0632mo to give Nco = 3.99 X 10 17 cm-'. and also that (-15akT/4c,) = 0.05647. C '--' "u I •00 L _ - - - L_ _L:o-_-'--_ _L-_--L:-::---L_ _- L _ - - ' 2 5 10 17 2 5 10 18 2 CONDUCTION ELECTRON CONCENTRATION R162 J. Appl. Phys. Vol. 53, No.1 O. October 1982 5 10 4.00 Z 19 no (CM- 3 ) J. S. Blakemore R162 Downloaded 21 Sep 2011 to 210.32.148.91. Redistribution subject to AIP license or copyright; see http://jap.aip.org/about/rights_and_permissions TABLE XIII. The low temperature degenerate limit for the lowest conduction band: electron density, Fermi energy, and two different definitions of effective mass. (CF - c,.) (meV) Optical mass (cm-') ratio (moor/mo) Curvature mass ratio (mJmo) 5 X 10 16 1 X 10 17 2X 10 17 5 X 10 17 I X 10" 2 X 10" 1 5X 10 " I X 10 19 7.4 11.6 18.4 33.6 52.8 82.5 147 225 0.0675 0.0679 0.0683 0.0694 0.0708 0.0730 0.0770 0.0834 0.0686 0.0695 0.0710 0.0743 0.0785 0.0850 0.0991 0.1162 no of Cardona, 160 Piller, 161 Stillman et al. 16M Raymond et al.,333 etc. for dependence of "effective mass" on no. As a concluding comment on degeneracy in this band, consider N-type GaAs at a very low temperature. Even a relatively modest permanent electron population is then sufficient to produce strongly degenerate conditions. That situation, as first analyzed by Sommerfeld 344 for a metal, permits use of the asymptotic approximation (86) Inserting iYld1]) and iY3/2(1]) in this fashion into Eq. (80), one finds that a finite electron population no at a near-zero temperature will result in a Fermi energy EF such that no~(81T/3)[2meo(EF - Ee)/h 2]3/2[ 1- (3a/2Ei)(EF - Ee)]. (87) For N-type GaAs with T---+0, so that meo = 0.0670m o, Ei = I.S19 eV, and a = - 0.824, this amounts numerically to no~2.S0X IOI5(E F - Eef/2[ 1+ 8.2X IO- 4 (E F - Ee )]Cm- 3 (88) for (EF - Ee) expressed in meV. Table XIII provides a short tabulation of degenerate Fermi energies corresponding to a range of low temperature no values, in accordance with Eq. (88). The same table also shows the corresponding values of the "optical" or "slope" mass m opt and of the "curvature" mass me at these Fermi energies, both of the latter as defined by Eq. (77). All of this emphasizes again how important it is to know which definition of "mass" is applicable in a given situation. 3. Mass parameters for the L6 and X6 upper conduction valleys r6 Conduction minima higher than the (CI) one have been of interest for many years, ever since the free electron infrared absorption experiments of Spitzer and Whelan 198 and the high temperature Hall data of Aukerman and Willardson 289 at the close of the 19S0s. These experimental resuits indicative of conduction valleys above the first were, naturally, compared with Callaway'S band model,272 and were incorporated into Ehrenreich's model 288 of 1960. The presumption in the latter that minima at or near X(I00) would be the important second-lowest conduction band, was remarked in Sec. VI B, as was the revelation by Aspnes et R163 J. Appl. Phys. Vol. 53, No.1 0, October 1982 al. ISI that many otherwise puzzling and nonconforming pieces of data fitted into place with a r-L-X conduction band order instead. The following remarks are admittedly influenced by the intensive analysis that Aspnes 152 made of data concerning these two sets of upper minima, at L6 and at X6 (or perhaps a little inside the zone boundary, at ..1 5 ), In the apparent absence of direct experimental evidence for the longitudinal and transverse mass components, m{ and m r , associated with the four-ellipsoid band having minima at L (!H), Aspnes made a scaling transformation from the Ge conduction band to estimate m {~ 1. 9m o. He also used electroreflectance data l49 concerning interband reduced mass to infer mr ~0.07S mo. Thus his summary estimate for this band, including the density-of-states mass for all four ellipsoids combined was ml~1.9m()} mr~0.075mo mL L6 Band, T---+O. (89) = (16m{m~)1/3~0.S6mo The latter of these can be compared with the low temperature density-of-states conduction band mass me = 0.5Smo for germanium, as derivable34I from cyclotron resonance measurements 345 of the longitudinal and transverse components for that four-ellipsoid band. It was Aspnes' expectation that the decreases of Ei and EL with rising temperature [as modeled by Eqs. (4S) and (SO)] would be reflected by a modest decrease of m L also: to -0.5Smo by room temperature, and to -0.52mo by 650 K. That will be borne in mind quite shortly, in an assessment of the large effect the L6 minima have on the total statistical weight of the conduction band system for high temperatures. Whereas it is natural to compare the L6 conduction minima of GaAs with the lowest conduction band of its isoelectronic analog germanium, it is a somewhat larger extrapolation to model details of the GaAs minima at or near X6 upon the six-ellipsoid conduction bands of silicon or GaP. Nevertheless, such arguments, along with interpolations among the k.p model results for various solids by Pollak et al.,278 were used by Conwell and VasselJ292 to surmise longitudinal and transverse mass components m{ ~1.3mo and mr ~0.23mo· Hence, a density-of-states mass mx = (9m{m;)1/3 ~0.8Smo on the basis of three ellipsoids: i.e., the minima actually on the zone boundary at X (100). That density-of-states mass was about one third smaller than the one Ehrenreich 288 had postulated (with generous error limits) nearly ten years earlier in modeling high temperature Hall behavior of N-type GaAs. Thus, Gaylord and Rabson 346 pointed out that a six-ellipsoid band (minima inside the zone boundary, as with Si) having m{ and mr as noted above would give a density-of-states m x in line with Ehrenreich's expectation. That line of reasoning was, of course, based on the premise (which we now known to be incorrect) that the anomalies of the high temperature Hall effect in N-type materialZ89.31O.347 were attributable to the X6 rather than to the L6 set of minima. The three-ellipsoid model was urged by Pitt and Lees,305 on the basis of their high pressure Hall effect measurements, under conditions which made the X6 the lowest conduction band. By extrapolation back to zero pressure, J. S. Blakemore R163 Downloaded 21 Sep 2011 to 210.32.148.91. Redistribution subject to AIP license or copyright; see http://jap.aip.org/about/rights_and_permissions they deduced that the set of X6 minima have a density of states 45 times larger than that of the r6 (Cl) band, for mx ::::::::O.Smo. That appeared to put things back the way Conwell and Vassell had conjectured. Aspnes 152 seemed to accept the arguments of Pitt and Lees. In one of his analyses of the GaAs conduction band system, Aspnes 34S suggested parameters for a three ellipsoid situation: m l ::::::::1.9m o} mt~0.19mo X6 Band, (90) mx = (9mlm;)113~O.8Smo which he surmised would not be particularly sensitive to temperature. The next subsection uses that density of states mass m x = 0.S5mo for the purpose of assessing the impact of the X6 minima on the total statistical weight for the conduction band system. Since this band has considerably smaller influence than the L6 band for high temperatures, some uncertainty in m x is tolerable. That remark is made in view of the experimental results of Pinczuk et al. 128 that indicated m, ::::::::O.27m Q , some 50% higher than the value quoted in Eq. (90). Their result was deduced from Raman measurements as a function of hydrostatic pressure. As already noted,306 Pinczuk et at. went on to assert that there are six minima (i.e., of .:::15 symmetry) rather than three, lying some 10% inside the zone boundary. They argued for m x ~ l. 2m o, and remarked that the data of Pitt and Lees could be reconciled with that value. Despite that interesting and provocative new twist, a value m x = 0.S5mo will be used in what follows, as has been used recently in the extensive high temperature transport study by Nichols et aJ.3 47 4. Conduction electron thermal distribution among the three lowest bands Since.:::1 n ofEq. (51) is only a few kT for high temperatures, and m L ::::::::0. 52m o for such temperatures is an order of magnitude larger than m"" of the zone-center minimum, one can expect that a major fraction of the thermal conduction electron population will make the r -+L transition as temperature rises. While m x is even larger than m L (even taking the conservative estimate of Pitt and Lees, and of Aspnes), the activation energy .:::1 rx of Eq. (53) represents a more formidable barrier, and one which, moreover, increases with temperature. Thus one can expect thermal population of the X6 minima at high temperatures, but to a lesser degree. The effects of this thermal redistribution of conduction electrons were seen early on in the study ofGaAs, in the 1955 Hall effect measurements of Folberth and Weiss. 349 These phenomena were incorporated into Ehrenreich's band model,288 albeit with an X6 attribution. More complete and precise measurements of high temperature transport that are affected by electron transfer to the L6 and X6 minima have been reported by Blood,310 and by Nichols et al. 347 The total conduction electron population no should thus be written as a sum of three thermal contributions no = nx + n + nr . L (91) It should be safe to assume that for almost any degree of NR164 J Appl. Phys. Vol. 53. NO.10, October 1982 type doping of GaAs, EF will remain low enough to permit an essentially Boltzmann distribution in the upper two bands. Then at any temperature T, the three terms on the right of Eq. (91) should be: nx nL = 2(21Tm x kT /h 2flZ exp(,., = 2(21TmLkT /h 2)312 exp(,., - .:::1 rX /kT),} .:::1 n /kT), (92) nr = Nco [fr Il 2("') - (ISakT /4E;)fr313(1J)]' The last of the three expressions in Eq. (92) re-expresses Eq. (80\, and NN is as defined in Eq. (79\. The ratio nx:n L :n r has to be expressed as a function of both temperature and of degeneracy, when the N-type doping of GaAs is so strong that 1J==[(EF - Ec)/kT] >0 even for the higher temperatures at which first n L and then nx come into play. For a simplified view of the thermal distribution among the bands at high temperatures, let us suppose that no < Nc ofEq. (Sl). That connotes a more modest N-type doping, consistent with a Maxwell-Boltzmann distribution in all three of the bands. When that condition is satisfied, then nr-+N: exp(1J/kT), where the effective density of states for the lowest band is N; = n co (1 - lSakT /4E;), as expressed numerically by Eq. (S5). In conjunction with that numerical expression, assume (for simplicity) that m L ::::::::0. 52mo for all high temperatures, and that mx=0.8Smo as in Eq. (90). Then the three quantities on the right of Eq. (91), add up to no in a way we can describe as no=N~exp[(EF-Ec)lkT], no<N~, (93) where the total statistical weight of the conduction band system (for nondegenerate conditions) is N* =c 8.63 X lOlJT JI2[{l _ 1.93 X 10 -4T - 4.19 X lO-RT 2 \ + 21 exp( - .:::1 n /kT) + 44 exp( - .:::1 rx lkT)] cm- 3. (94) The magnitude of N ~ for temperatures from ambient upwards has been used in Fig. 52, in plotting (N: IT 312) vs T 4 ....N '? ::.:: .., 3 ~ u ! 0 2 N .... .... r- ...... >leU I Z oL-__ 300 ~ ____ 500 ~ ____L -__ 700 900 TEMPERATURE ~ ____-L__ 1100 ~ 1300 1500 T (K 1 FIG. 52. Temperature dependence of IN~ IT3/2), where N ~ i~ (for nondegenerate conditions) the total statistical weight of the three lowest conduction bands combined, as expressed by Eq. (94). J. S. Blakemore R164 Downloaded 21 Sep 2011 to 210.32.148.91. Redistribution subject to AIP license or copyright; see http://jap.aip.org/about/rights_and_permissions 1.0 0.8 0.6 0.4 0 c ...J <t 0.2 t- O t- LL 0 z 0.1 0.08 0 0.06 t- u <t 0.04 (nx/no) 0:: LL 0.02 500 700 900 TEMPERATURE II 00 1300 1500 T (K) FIG. 53. Temperature dependence of the three-way split of conduction electronsamong the T6 (el), L b , andXb bands. It is assumed here, as in Eqs. (93) and (94), that no < N;, so that conditions are nondegenerate in the lowest of these three bands, as well as in the higher ones. up to the melting point. This curve may be compared with that for (N ;/T3/2) in Fig. 50. The two quantities are the same (to within 0.05%) for room temperature, but the influence particularly of the L6 band starts to pull (N ~ /T 3/2) noticeably upwards above 500 K. Figure 53 displays the fractional contributions of nr,n L , and nx towards the total no for the same temperature range, and with the same supposition of non degenerate conditions even in the r 6 band. This figure shows that more than half of all conduction electrons are thermally in the L6 band for 1> 900 K, and that the proportion of electrons remaining in the r 6 (C 1) conduction band has declined to less than 12% by the melting point. The phenomena illustrated by Figs. 52 and 53-the influences of the upper conduction bands on the total statistical weight of the conduction band system--obviously affect the properties of N-doped GaAs at high temperatures. They are also on a large enough scale to affect the high temperature intrinsic pair concentration 122 and Fermi level. This is briefly reviewed in Sec. VI G. First, however, the density of states presented by the valence bands is considered. F. Hole effective masses: Valence band system statistical weight I. Masses for the heavy-hole (VI) and light-hole (V2) bands Many observable properties of holes in GaAs can be interpreted fairly well in terms of scalar (spherical equivalent) effective masses m h and m/ for bands VI and V2, respectively. (This despite the various complications of the E-k relations for these two bands, as recounted in Sec. VI D.) A density-of-states hole mass, (95) R165 J. Appl. Phys. Vol. 53, NO.1 O. October 1982 is then what one would like to be able to use in describing the statistical weight for the valence band system. That is the specific topic of the next subsection, and requires additional considerations. The quantities that contribute towards mu have been measured in many ways, from the 1950s onwards. As a forerunner of the intra-valence-band absorption experiments 197 that were illustrated in Fig. 28, some early measurements of Braunstein350 indicated that m h =.5.7m/. Among the subsequent measurements having a bearing on m/ and/or m h , we may note: (i) Interband magnetoabsorption measurements by Vrehen, 165 at 2,77, and 300 K. Vrehen concluded that his results were consistent with isotropy of both the light-hole and heavy-hole bands, with masses (m//mo) = 0.082 ± 0.006 and (mh/mO) = 0.45 ± 0.05 for both the low temperatures, and slightly smaller values for room temperature. These values have been adopted for many analyses of P-type GaAs. (ii) Piezoabsorption over the 4-100 K range by Balslev. 136 This work indicated a strongly anisotropic heavy-hole band, with the component of the m h tensor some 50% larger along [111] than along [100). (iii) A much more modest heavy-hole anisotropy (about 10%), as indicated by the magneto-optical measurements of Seisyan et aI.322 (iv) Directionally averaged values for m/ and m h as provided from the Faraday rotation experiments of Walton and Mishra,35I and from the oscillatory photoconductivity work ofShaw. 352 (v) Components of the two masses as functions of orientation, obtained by Eaves et al. 323 from magnetophonon resonance experiments. (vi) Mass components versus direction obtained in the cyclotron resonance work of Stradling and coworkers. 319.320 The latter work described two corrections that were made to mass components, in order to obtain their "bare" values for the band edge. Thus, a nonparabolicity correction was made, in order to express the curvature for the band ~dge itself. A polaron correction,53 was additionally made, In order to subtract the effect of optical phonons on the apparent masses for this partly ionic solid. Skolnick et al.320 concluded that the light holes are essentially isotropic, but not the heavy holes. Their estimate of the m h tensor was that the component along [111] is 25% larger than along [100]. These directionally differentiated effective mass data can be converted, for example by the computational method of Lax and Mavroides, 3~4 into a scalar density-of-states value for each band. As a consensus of the various experiments, but weighted by the results of Skolnick et al.,320 low temperature values, (m//mo) = 0.082 + 0.004} (mhlmo) = 0.51 ;0.02 (T < 100 K), (96) are suggested here, as listed in Table XII. It can be noted that the light-hole mass is exactly as reported both by Vrehenl6~ and by Skolnick et al. 320 The heavy-hole mass of Eq. (96) is 13% larger than the (isotropic) value Vrehen had elucidated, but has error limits that overlap with those he quoted. More J. S. Blakemore R165 Downloaded 21 Sep 2011 to 210.32.148.91. Redistribution subject to AIP license or copyright; see http://jap.aip.org/about/rights_and_permissions to the point, m h ofEq. (96) is 13% larger than Skolnick et al. reported for the [100] direction band-edge "bare" mass, and 11 % smaller than their [111] direction mass component. For the two values in Eq. (96), m h ~6.2 m{, not very far from the ratio Braunstein 350 deduced in his early work. The two numbers of Eq. (96) give a density-of-states mass m" = (mhl2 + mV2f/3 = 0.53mo (T < 100 K) (97) for the V 1-V2 combination of bands at low temperatures. Now, m" is a quantity of interest in connection with the effective density of valence band states (Nv of the next subsection). In order to cope with N v ' however, one needs to deal with m h and m{ (the latter particularly) as functions oftemperature, and also with the nonparabolicity of the latter. The value of m h must certainly depend to some extent on temperature, but this can be expected to be much less drastic than the temperature sensitivity of the conduction band meo [modeled in the kp approximation by Eq. (63)], or of the light-hole band m{ [described in that same model by Eq. (68)]. Auvergne et al. 355 described results of piezoreflectance measurements that supported their expectation from theory that a solid such as GaAs should have a valence band structure which is rigidly preserved on heating. Such an expectation, carried to extreme, would require that mv not depend at all on temperature. However, Auvergne et al. were considering temperature independence on the gross eigenvalue scale of the valence band system as a whole. That does not automatically preclude changes of (d 2Eldk 2) with temperature right around the energy E v that is of especial importance for thermal holes. And from an experimental standpoint, Vrehen's data 165 did point towards a slight decrease of both m h and m 1 on warming to room temperature. Accordingly, Table XII does show a 300 K value m h = 0.50m o, the reduction from the low temperature value restrained to a token 2% in recognition of the arguments of Auvergne et al. 355 However, m 1 decreases to a much more drastic degree, if Eq. (68) of the k.p model is a reasonable guide. The low temperature value m l = O.082mo requires XI = 10.0 eV, as also listed in Table XII; and the operation of Eq. (68) then mandates that m{ decreases as the temperature rises and the intrinsic gap narrows. The final column of Table XII includes the 300 K value m{ = 0.076mo required by Eq. (68). Further application of tht equation to higher temperatures would yield a curve for (m{/mo) vs T looking generally similar to the (meo /mo) curve of Fig. 49. Equation (68) thus predicts that the band-edge value of m{ declines to only 0.056 mo by 1000 K. This does not mean, however, that light holes dwindle to an insignificant minority at high temperatures. 2. Effective density of states for the VI- V2 combination As a companion to Eq. (81), one would like to express the relation between free hole density Po and Fermi energy E F in a form (98) where 5 == [(Ev - EF)lkT] is the dimensionless expression of EF relative to E,,, and N v is the effective density of states R166 J. Appl. Phys. Vol. 53. No. 10, October 1982 provided by the heavy-hole (VI) and light-hole (V2) bands combined. How does the quantity N v have to be represented? If either or both of V 1 and V2 were anisotropic, yet both could be adequately approximated by parabolic E-k relations (i.e., by energy-independent effective masses), then the quantity m" of Eg. (95) would produce N v = 2(2rrm"kT /h 2)3/2. Yet this does not suffice in practice, because of the appreciable nonparabolicity of the light-hole band. Because of the absence of inversion symmetry, it will be clear that E-k is not parabolic for the heavy-hole band, viewed on a scale of things quite close to the extremum. However, it appears likely that m h as quoted in Eq. (96) for low temperatures, and as speculatively extrapolated to 300 K in Table XII, might serve to characterize the directionally averaged curvature over the first 100 meV or so of that band. That is manifestly not so for light holes, in view of Eqs. (67)-(70) as a portrayal ofnonparabolicity that enhances the statistical weight of this band, to an extent that depends on both temperature and degeneracy. The same kinds of argument that led to Eq. (80) for the conduction band now lead to Nu = 2(2rrkT /h X \ m~/2 2f/2 + mt /2 [ 1 - (15{JkT /4E i HY3/2(s )/15In\t) 1J. (99) l2 We already know that mi decreases as temperature rises. However, the factor [..... ] multiplying mi!2 increases with temperature, since Eq. (69) shows that (J < O. The contribution of that factor [....1also depends on whether the free hole density Po is larger or smaller than N v , since 153/2(5 )> 15 1 nls ) for a degenerate P-type situation of Po> N v ,5 > O. Situations of strong P-type doping, and attendent degeneracy of the free hole population, certainly do occur in GaAs. However, since N v (300) _10 19 cm -3 (about 25 times degeneracy at room temperature and above larger than N is less commonly a complication for P-type GaAs than for Ntype materiaL Accordingly, we examine here the consequences of Ptype doping which are weak enough to avoid degeneracy. In that event, n Po=N~ exp[(Ev -EF)lkT], Po<N~, (100) where the effective density of valence states for these nondegenerate conditions is N~ =2(21TkT/h2)3/2[m~l2+mt!2(1-l5{JkT/4Ei)] = 2(21T'kT /h 2f12[ml12 + (m;f /2 1. (101) The quantity defined therein as m; thus incorporates both the temperature dependence of m{ itself, and of the (1 - 15{JkT /4£;) factor. By a happy chance, these opposing tendencies cancel each other over a quite large temperature range, and for the purpose of describing the statistical weight of the light-hole band, one may use (102) If it is supposed that the density-of-states value m h =O.05mo is valid for a major part of that temperature range, then light holes constitute about 7% of the total hole population shared between these two bands, for room temperature and above. A combination of m h = 0.05mo and m; = 0.088mo makes the effective density of valence states, J. S. Blakemore R166 Downloaded 21 Sep 2011 to 210.32.148.91. Redistribution subject to AIP license or copyright; see http://jap.aip.org/about/rights_and_permissions N~~1.83X 10 15 T3/2 cm- 3 , to an adequate accuracy for virtually any temperature. Thus while Eq. (103) is designed specifically to model the situation for 1>200 K, it falls only some 2% below No ofEq. (99) for the lowest temperaures. 3. The splitoff valence band As will be seen below, thermal hole occupancy of the splitoff (V3) valence band is negligibly small all the way up to the melting point. However, optical transitions to this band show up in a wide variety of experimental results. A zonecenter spin-orbit splitting Llso~0.33 eV was deduced by Braunstein350 from the infrared limit of intravalence band transitions. In subsequent work, the electroreflectance analysis of Aspnes and Studna 149 and the reflectance measurements of Sell et al. 299 indicated a low temperature splitting: Llso = 0.341 ± 0.002 eV (T""'O). (104) How will Llso respond to rising temperature? No change is predicted by the "rigid valence band" view of Auvergne et al. 355 As experimental confirmation, Nishino et al. 340 saw no change in Llso over the range 25-300 K. As with other properties of GaAs, data for T> 300 K are apparently unavailable. A low temperature mass mso = 0.154m o was deduced by Reine et al. 166 from stress modulated magneto reflectance. That value was given in Table XII, as also was the momentum matrix element Xso = 13.9 eV thereby required by Eqs. (60) and (72). Lawaetz 330 also concluded that mso ~0.15mo in GaAs, from a five level k.p model applied to solids with the diamond and sphalerite structures. It was remarked in Sec. VI D 1 that any underestimate of mso in the Reine et al. work (because of the strong nonparabolicity) would have contributed to the large size ofXso compared withXe and Xl' However, there does not appear to be any other experimental evidence concerning mso that might validate such a conjecture. In any event, the statistical weight of the splitoff band does not increase as fast as T 312 , for two reasons: (a) The decrease of mso as the band-edge curvature mass, as T rises. (b) As a consequence of a nonparabolicity parameter y> 0 for the initial stages of departure from this band extremum. In accordance with Eqs. (71) and (73), this makes the effective mass in the band decrease with increasing wave vector. As previously noted in Sec. VI D 1, the initial effects of that positive nonparabolicity parameter yare reversed by a mass enlargement further from the extremum. Thus it would be unrealistic to attempt any representation of the statistical weight of the splitoff band in terms of a quantity m:~2(1 - 15ykT /4.:;). For the numerical value of y [from Eq. (74)] is large enough to force (1 - 15ykT /4.: i ) negative for all T> 500 K, a clearly nonphysical result so far as this band's statistical weight is concerned. Even with total neglect of the nonparabolicity effects, the ability of the splitoff band to attract holes in thermal equilibrium is miserably small, even up to the GaAs melting point. With the factor (1 - 15ykT /4.:i ) laid aside as unnecessary overkill, then the ratio of holes in the splitoff band (V3) to those in the VI-V2 combination is R167 J. Appl. Phys. Vol. 53, No. 10, October 1982 _=-P:::so_"", m:~2 exp( - Llso/kT) Po - Pso mhl2 + (m;)3/2 (103) (105) Thus with m h and m; as noted in connection with Eq. (103), Llso = 0.341 eV, and mso in accordance with Eq. (72), (Pso/Po)~0.0004 for a temperature of 1000 K, and barely reaches 0.5% by 1500 K. For ordinary circumstances, the impact of the splitoff band on the statistical weight of the valence band system can be ignored. Thus the interesting propensity of the splitoffband is for provision of electrons to higher lying bands (and impurity states356 ) under optical stimulation. G. Intrinsic conditions in GaAs This specific aspect of GaAs has recently been reviewed by the present writer,122 and the comments here are brief. With the splitoff valence band dismissed, the statistical weight of the valence bands for intrinsic gallium arsenide is fully represented by N ~ ofEq. (103). Similarly, the statistical weight of the conduction band system is fully represented by ofEq. (94), which in turn involves Eqs. (51) and (53) for Ll rL and Ll rx' All of these contribute towards the intrinsic carrier pair density n i through the form N: n;(T) = (N:N~)1/2 exp( - .:J2kT). (106) Here, .:; (T) can be modeled by Eq. (45). The result for n; (T) is displayed in Table XIV, for a series of temperatures from 250 to 1500 K. (The latter only a few degrees short of the melting point.) As a homily, it must be remarked that these values tend to be a few percent larger than those suggested by this writer elsewhere, 122 the consequence of a reevaluation of the heavy-hole mass. One may expect such minor readjustments to continue, as': i (T) and the various mass components are pinned down with even higher precision. Included also in Table XIV are values for the intrinsic Fermi energy if;. Of possible interest to various readers are the locations of this quantity with respect to the valence band, the conduction band, and the actual midgap energy. Thus. if; = ':0 + kTIn(N ~/ni) =':e =':v kTIn(N~/n;) + !.:; + !kTIn(N~/N~). (107) The last of these three definitions of if; is the most interesting: the displacement from a midgap location as a consequence of the imbalance of N~ and N~. As can be observed in the entries of Table XIV, the elevation of if; above the midpoint of the gap increases proportionately with temperature at first: a consequence of the ratio (mh/mco)' That trend is arrested and finally reversed as temperature continues to rise, as a result of the massive effect theL6 conduction band (with minor assistance from the X6 conduction band) has in accelerating the increase of N~ for high temperatures. Less dramatically, both of the quantities (if; - ':v) and (':e - if;) decrease with increasing temperature, as natural consequences of the decrease in total intrinsic gap width. J. S. Blakemore R167 Downloaded 21 Sep 2011 to 210.32.148.91. Redistribution subject to AIP license or copyright; see http://jap.aip.org/about/rights_and_permissions TABLE XIV. Intrinsic carrier pair density nj • and consequent intrinsic Fermi energy tf;. for gallium arsenide" T (K) 250 300 350 400 450 500 600 700 800 900 1050 1200 1350 1500 N~ to, (meV) .d n (meV) .d rx (meV) (cm- 3 ) N; (cm- 3 ) (cm- 3 ) (tf;-E,) (meV) (tOe - tf;) (meV) (tf; - IOu - !to,) (meV) 1446.7 1422.5 1399.5 1375.8 1351.6 1327.1 1277.0 1226.0 1174.5 1122.2 1043.8 964.6 885.1 805.3 287.1 284.5 281.7 278.9 276.0 273.1 267.1 261.0 254.9 248.7 239.3 229.8 220.4 210.8 473.1 476.1 479.8 483.3 486.9 490.6 498.0 505.6 513.3 521.1 532.8 544.6 556.4 568.3 3.238 E17 4.209 E17 5.251 E17 6.369 EI7 7.594 EI7 8.979 EI7 1.258 E18 1.809 E18 2.665 E18 3.951 El8 6.943 El8 1.152E19 1.793 E19 2.642 EI9 7.234 E18 9.509 E18 1.198 EI9 1.464EI9 1.747 E19 2.046 EI9 2.690 E19 3.389 E19 4.141 EI9 4.941 E19 6.226 E19 7.607 El9 9.077 EI9 1.063 E20 4.20 E3 2.25 E6 2.10E8 6.57 E9 9.83 EIO 8.78 Ell 2.52 El3 3.02 El4 2.IOE15 1.01 E16 6.50 E16 2.79 El7 8.99 E17 2.35 E18 756 752 747 742 737 731 718 701 682 659 621 580 537 493 689 671 653 634 615 596 559 525 493 463 423 385 348 313 34 40 47 54 61 67 79 88 95 98 99 98 94 90 "Using 10, from Eq (45);.d n ofEq. (51) • .d rx ofEq. (53) contributing towards n, N~ ofEq. (94); and N: ofEq. (103). (110) VII. ELECTRON AND HOLE TRANSPORT A great deal has been written and published concerning transport in GaAs and other 111-V compounds. From the first work of Welker and his associates,86 the accounts have included the books by Hilsum and Rose-Innes 2 and Madelung 3 ; and review papers such as those of Hilsum, 8 Stillman et al., 168 Rode, 169 and Wiley. 357 Accordingly, this section is kept brief, with the intention of pinpointing a few aspects of carrier transport that the experimentalist commonly uses in the analysis of raw data. A. Hole mobility The mobility of holes in GaAs was studied as part of the Siemens laboratories work of the 1950's.86 Rosi et al. 358 reviewed data accumulated to the end of that decade. The 1975 review by Wiley 357 deals with hole transport in III-V compounds in considerable detail, including citations of a dozen or more P-type GaAs transport papers that appeared subsequent to Rosi et al.'s review. Thus Wiley's account supercedes quite thoroughly the exposition of hole transport in Madelung's 1964 book. 3 Two figures from Wiley's review are used in this subsection. It will be supposed here, based on the discussion in Sec. VI F, that heavy holes in the VI valence band have an effective mass mh = 0.50mo, averaged over all directions, and for temperatures around and above ambient. Thus the rms thermal speed of these heavy holes is Vh (rms) = (3kT Imh )1/2 = 1.65 X 107(T 1300)1/2 cm/sec. (108) For holes in the noticeably nonparabolic light-hole band, the speed corresponding to three classical degrees of freedom (KE = 3kT /2) is v/(rms) = (3kT Im/)1/2[ 1 + (3/3kT IE;)] . (109) The factor (....] in Eq. (109) lowers the rms speed of light holes, since/3ofEqs. (69) and (70) is a negative quantity. As a result, v/(rms) does not conform particularly well to a TI/2 temperature dependence, though R16S J. Appl. Phys. Vol. 53. No.1 O. October 1982 should be serviceable enough close to the ambient range. In view of the remarks made in connection with Eqs. (101) and (102), one can thus think of mobile holes in (nondegenerate) P-type GaAs as being 93.1 % heavy holes with the rms speed of Eq. (108), and 6.9% light holes with an rms speed approximated by Eq. (110). That is equivalent to a speed (vp)(rms) = 1.77 X 107(T 1300)1/2 cmlsec (Ill) for the light and heavy holes combined. Even for the heavy-hole component, the thermal speed is apt to exceed the various speeds of sound (Table IV) by more than a factor of ten, for temperatures from the liquid nitrogen range upwards. Light holes can easily have a thermal speed 100 times faster than any of the speeds of sound. Data reported in the literature for the mobility of holes in P-type GaAs usually concerns the Hall mobility; derived from a combination of measurements, of conductivity a p = e/-l p Po, and of Hall coefficient RH = rHlepo' This combination of measurements yields the Hall mobility /-lH = aR H = rH/-l p (112) . Since for holes in P-type GaAs we have a two band (light holes, heavy holes) situation, with band warping, etc., it is not easy to say a priori when the Hall factor r H = (/-lHI/-l p ) might be larger than, or smaller than, unity. The same problem has beset the analysis of hole transport in the Group IV semiconducting elements. 359 Thus for hole transport in GaAs, as in Si and Ge, r H is a complicated function of magnetic induction strength, temperature, doping (and doping compensation). The latter pair enter the problem through the ratio oflattice scattering to ionized impurity scattering. As one relevant experimental contribution towards this complicated situation, Mears and Stradling 319 made Hall coefficient measurements for a "high-purity" P-type GaAs sample. This rather interesting sample seemed to have two acceptor species present, adding up toNa _10 15 em -.3; and a compensating donor density Nd -5 X 10 14 cm- 3 . Even that J. S. Blakemore R168 Downloaded 21 Sep 2011 to 210.32.148.91. Redistribution subject to AIP license or copyright; see http://jap.aip.org/about/rights_and_permissions 4 g::::-o ___ 1.0 "0.... 0.9 ........... "0 ...... " ' - 293K 'Q 0 0.8 a> "<>, " ',..... :I: "'- 000 > ......-""'0 ....... 0 ---0 'o!.87 K a: "- 'lJ ~~ .' 0.7 al ~o . a: 0.6 b 0 ". 4 J: 0.5 0 :l.. ° 0 04 1 2 5 10 20 ~ 50 (Il o ~ FIG. 54. Magnetic induction dependence of the Hall coefficients RH(B), normalized by the weak-field limiting value RHo for each temperature, as measured for a "high-purity" P-type GaAs sample by Mears and Stradling.·lIO combination should have made impurity scattering rather weak compared with the vast majority of P-doped GaAs samples! Hall measurements were made over the temperature range 50<T<293 K, and the magnetic induction range I <B<40 kG. Figure 54 shows their results for the field dependence of the ratio RH(B )/RHo for six temperatures. Here, RHo signifies the Hall coefficient extrapolated to the weak-field extreme. Magnetotransport theory359 indicates that rH~1.00 for B~ 00, for any superposition of bands. Thus the uppermost curve in Fig. 54 indicates that rH ~ 1.25 for zero field at room temperature. The various lower curves in Fig. 54 indicate that the weak-field value of rH is even larger for the lower temperatures, in weakly doped P-type GaAs. Incidentally, the two solid curves in Fig. 54 give the result of calculations by Mears and Stradling319 for a simplified model of two isotropic bands, with scattering times (7h) = 1.5 (7/ ). Thus it appears that this model provides for a 50 K result of rH~2.0 at zero field. All of this has a non-negligible impact when the Hall mobility f-l H = oR H is experimentally deduced and plotted as a function of temperature. Figure 55 shows three examples, all of purportedly "high-purity" P-type GaAs. One is the Mears and Stradling sample. 319 Another, for which f-lp continues to move gloriously upwards on cooling to 20 K, is from the work of Zschauer36o ; and a third sample from the work of Hill 361 appears to be rather more affected by impurity scattering for the lower temperatures. Just what magnetic field strength has been used to make Hall measurements is often glossed over in reporting curves of mobility versus temperature; however, one may reasonably suppose that magnetic inductions in the range 1-5 kG were employed for the data of Fig. 55. And so the conditions could well have been approaching the high field end of the range for the lowest temperatures, but would have been close to the weak-field RHo situation for the highest temperatures. Wiley357 suggests that a consensus among the higher temperature portions of these data might be (113) J. Appl. Phys. Vol. 53, No.1 0, October 1982 2 .0 --1 B (KILOGAUSS) R169 - 0;'0 J: :I: a: - HIGH-PURITY P-TYPE GoAs CD o ....... ...... "<l..., I .0 . • 3 10 - --1 --1 •ra <[ I - .0 400 200 10 • I 20 50 100 TEMPERATURE 200 500 (K) FIG. 55. Temperature dependence of Hall mobility for three high-purity Ptype GaAs VPE samples, after Wiley. m These samples re~::s.en~ the work of. Hill,'61 0 Mears and Stradling,Jl9 and 0 Zschauer, In increasing order of low temperature mobility. That probably means a room temperature conductivity mobility (a/epa) = f-lp (300) c::::: 320 cm 2/V s, in view of the apparent (RHo/RHoo) = 1.25 for temperatures near the ambient range. Wiley's review 357 goes into some detail on scattering mechanisms for holes. He points out that acoustic phonon and nonpolar optical mode scattering processes are of comparable importance for T> 100 K, with polar mode scattering probably less important. Ionized impurity scattering almost inevitably dominates for low temperatures, as seen to a small extent in the roll off of mobility below 40 K for Hill's sample in Fig. 55. Ionized impurity scattering takes a much greater toll of f-lp for strongly doped material, especially if also heavily compensated. This scattering mechanism can assume control of f-l at room temperature when the doping is strong enough, ~s exemplified by the curve and data points of Fig. 56. This figure, taken from Wiley's review, shows the weakfield 300 K Hall mobility f-lHO as a function of the apparent 362 PO· The strength of ionized impurity scattering is commonly handled by an expression of the type f-l[c:::::(A /N[)(T /300)3/2 (114) as provided by Conwell-Weisskopf or Brooks-HerringDingle treatments of this scattering. 363 Here, N[ is the concentration of immobile charged scattering centers. One may expect that N[ ""Po for weakly compensated material. Substantial compensation results in N[ > Po, and the mobility is then smaller for a given T and Po. The data of Fig. 56 came from experiments of Rosi et al.,358 Hill,228.361 Vilms and Garrett,364 Rosztoczy et al. 365 J. S. Blakemore R169 Downloaded 21 Sep 2011 to 210.32.148.91. Redistribution subject to AIP license or copyright; see http://jap.aip.org/about/rights_and_permissions -;;; > B. Electron velocity and mobility 500 "- At first sight, a discussion of the motion of, and transport by, conduction electrons ought to be simpler than that of valence band holes. For there is, nominally, a single reasonably isotropic minimum at the zone center, albeit with some nonparabolicity. The rms speed of these conduction electrons for a ~kT kinetic energy is N ::!: .s T = 300 K 400 + r b 0 ~p~ a::: {; 300 • >- 0 "0" ::1.. ~ . • C> r 200 " a 0 -l iii 0 vc(rms) . 100 , ::!: -l -l « :r 10 15 101 6 10 17 10 18 FREE HOLE DENSITY Po 0 10 0 0 a 19 10 20 (CM- 3 ) FIG. 56. Variation of 300 K Hall mobility with hole concentration, after Wiley.357 The data points represent the work of 6, Rosi et al., m 0 Hill,22K. Hill, '" I X Vilms and Garrett,'64 + Rosztoczy et al., '.50 Emel'yanenko et al.,'66 and 'i1 Gasanli etal.'"? Emel'yanenko et al.,366 and Gasanli et al. 367 Wiley commented that the curve in this figure was a calculated one, using a combination of lattice scattering (set for f1L = 400 cm 2/V s), and Brooks-Herring-type ionized impurity scattering. Now the crudest and simplest way to combine scattering contributions would be by an additive approach: f1HO = [(lIf1L) + (1If11)] -\ , (115) withf11 as given by Eq. (114), using an appropriate value for A. However, no single value for A can generate the entire curve in Fig. 56 with much fidelity, though a compromise value A =2.5 X 1020 cm -\ V- \ S - \ does a tolerable job. Thus for temperatures/aMy close to room temperature, it might be reasonable to expect that f1HO= [2.5 X 1O- 3(T 1300)23 + 4x 1O- 2I N / (300IT)LS] -I cm 2 /V s (116) could serve as a reasonable expectation for the Hall mobility measured under weak field conditions. In order to do much better, it would be necessary for a start to replace Eq. (114) with a more complete expression including a screening adjustment term, as provided in different ways by the Conwell-Weisskopf and Brooks-Herring formulations of impurity scattering. One should then also generalize Eq. (115) to an integral solution of the Boltzmann transport equation for the combination of scattering probabilities, performed for the light-hole and heavy-hole bands, and considering intraband scattering, and so on. Before getting too enthusiastic over these possibilities, it should be cautioned that the value A=2.5 X 1020 cm -\ V - I S - I (which does make f1 H start to drop rapidly for about the right range of Po in Fig. 56) seems to be about three or four times too large for the usual expressions363 of Conwell-Weisskopf or Brooks-Herring scattering by heavy holes of mh ~0.5mo. Thus our ability to describe scattering of holes by this combination of processes does not seem to extend beyond an empirical level. R170 (117) ID ...... 0 10 14 . = (3kT Imco)I12[ 1 + 3akT lEi] =4.4 X 107 (T /300)112 cmlsec, J. Appl. Phys. Vol. 53, No.1 0, October 1982 the latter numerical approximation being suitable for temperatures fairly close to the ambient range. Electrons in that small mass band minimum can enjoy a fairly high mobility, and therein lies much of the attraction of GaAs for device purposes. However, the nonthermal redistribution of conduction electrons in a substantial electric field is an important subject that requires at least some mention here. As predicted by Ridley and Watkins,290 and by Hilsum,291 field-heated electrons can transfer from the central valley to the large mass, low mobility upper conduction valleys (ofGaAs, and of other binary, ternary, and quaternary solids of comparable band structure). The consequences as first seen in GaAs, and commonly known as the Gunn effect,368 were at first (quite naturally) interpreted in terms of transitions to the X6 minima as the first available band. 292,293 It was not surprising that such calculations agreed qualitatively-but not fully quantitatively-with experimentally measured drift velocity versus field data. 369 Since the promulgation of r-L-X conduction band order, lSI Monte Carlo simulations of the velocity:field characteristic to be thus expected have followed in short order.37°-372 A current pulse in N-type GaAs propagates at a speed usually called the electron drift velocity vd • That name combines several physical phenomena, depending on the range of the applied field E. For a small field, Vd = f1nE, where f1n denotes the drift or conductivity mobility, f1n = (a/eno)' As discussed in more detail later in this subsection, f1n (300)=8000 cm 2IV s in lightly doped N-type GaAs. The low field region at the left of Fig. 57 shows Vd rising with E at that slope. As the field increases, and electrons in the reo minimum start to warm up, the slope decreases-as it does for any situation of lattice-scattering limited mobility in a semiconductor. However, the historically significant difference with electrons in GaAs is the retrograde behavior of vd beyond a threshold [E'h ,vd(max)] at which electron transfer to lower mobility conduction minima becomes likely. The solid curve in Fig. 57 shows Vd vs E as calculated by Pozela and Reklaitis 372 on an assumption of r-L-Xband ordering (so that electron transfer to the X6 minima would come into play only well above the field range of this figure), and the figure shows a comparison with four experimental investigations. 369,373-375 What are the values of E'h and vd(max), and how do they vary with temperature? These are obviously important quantities, in terms of the physics of GaAs, and as affecting the design of transferred electron devices. The published liJ. S. Blakemore R170 Downloaded 21 Sep 2011 to 210.32.148.91. Redistribution subject to AIP license or copyright; see http://jap.aip.org/about/rights_and_permissions is arranged to provide the room temperature value 7 Vd (max)=2 X 10 cm/sec shown within ± 10% limits by all the curves in Fig. 57. A comparison with Eq. (117) shows that this "ensemble peak drift velocity" is about one half of the rms thermal speed for 300 K conduction electrons. The retrograde behavior of Vd (E) for fields much larger than E th has attracted several investigations.375.380-382 The largest field range covered was in the room temperature microwave time of flight measurement of Smith et al.,3H2 whose result is shown in Fig. 58. Figure 58 also shows, as a dashed curve, the 300 K data of Houston and Evans,375 extending to some 105 kV/cm. Houston and Evans made measurements at various temperatures in the range 130-400 K, and from - 20 k V/ cm to various high-field limits from 65 to 110 kV/cm. Selecting 50 kV/ cm as a field strength for which all these temperatures were represented, the trend of Vd with temperature can be approximated by 2.0 (f) "- 1.5 ~ u tO --- 1.0 -------.------.-------. '0 > 0.5 Calculated Ruch and Kino Braslau and Houge (bulk) Braslau and Houge (epitaxial) Ashida et 01 Houston and Evans 2 4 FIELD E 6 (kV/CM) 10 8 FIG. 57. Drift velocity of conduction electrons in GaAs at 300 K, for the 010 k V/ cm range, after Pozela and Reklaitis.372 The solid curve was generated by Pozela and Reklaitis in a Monte Carlo calculation, and compared with experimental data of Ruch and Kino,369 Braslau and Hauge,373 Ashida et al,374 and Houston and Evans. 375 vd =(1.28-0.0015T)X107 (E=50 kV/cm). (120) 6 That equation was arranged to provide Vd =8.3 X 10 cm/ sec at 300 K for E = 50 k V/ cm, some 40% of vd (max), Figure 58 shows a monotonic decline of the ensemble Vd throughout the range 20<E <200 kV/cm. The Monte Carlo calculations of Shichijo and Hess 383 imply that vd(300)=6X 106 cm/sec throughout the ensuing field range to 500 kV/cm. Electric fields that large are important for avalanche breakdown, as encountered in a reverse-biased P-N junction, and as so utilized in avalanche photodiodes 384 and in impactavalanche transit time (IMPATT) diodes. 385 Since the ionization coefficient of electrons in GaAs for avalanche multiplication is considerably smaller than that of holes for a given field strength,386 the mean free path of energetic electrons is able to remain tolerably large even in a very high field. The two parts of Fig. 59 show calculated estimates by Shichijo and Hess 383 of how the mean energy (€ - Ec ) and the mean free path An might vary with field with one set of starting assumptions, The electron mobility in GaAs for a small electric field has been discussed by many writers, usually in terms of the Hall mobility, terature does not give an unqualified answer. Thus deductions of E th (T) from the behavior ofGunn diodes 376,377 have suggested that this threshold field decreases slightly on cooling, contrary to the trend Eth"-'(4.7-T/215) cm/sec kV/cm (118) 369 shown by the time-of-flight data ofRuch and Kino. Equation (118) gives the value E th (300) = 3,3 k V/ cm shown for Ruch and Kino's curve in Fig. 57, and these authors 369 comment on the errors that can occur in measurement of E th if there is any doping inhomogeneity in the sample. That sensitivity of a measured threshold condition to any inhomogeneity of doping or of geometry-induced field distribution has also resulted in considerable scatter among the various experimental investigations ofthe peak electron drift velocity vd(max) with temperature. 269,377-379 Thus the Ruch and Kino data conform approximately with v (max)=(3.3 - O.OO4T) X 107 cm/sec (119) d while some other types ofmeasuremene77.378 have indicated a temperature coefficient up to twice as large. Equation (119) 1.0 (f) "- ~ 0.8 u t- 0 GoA. 300 K 0.4 "0 > 0.2 a #1 o #2 LPE I 2.13/-,m o. 0 LPE I 1.20/-,m • #3 LPE 2 3 16/-,m A #4 VPE -.- 4.95/-,m HOUSTON a EVANS ~--:'::--:-:'-~_J----'L----L_~_..l....-_L---J._--.J o 20 40 60 80 100 FIELD E R171 FIG. 58. Electron drift velocity Vd as a function of field for (1 (0) N-type GaAs at 300 K, in the higher field regime of strong electron transfer. After Smith et al.,382 showing data for four of their samples. The dashed curve reproduces the result of Houston and Evans. 375 0.6 120 140 160 180 200 220 (kV/CM) J. Appl. Phys. Vol. 53, NO.1 0, October 1982 J. S. Blakemore R171 Downloaded 21 Sep 2011 to 210.32.148.91. Redistribution subject to AIP license or copyright; see http://jap.aip.org/about/rights_and_permissions 1.0 ;;- 10 0.8 ~ 6 ~ 0.6 <J) > ....... <) '", 0'1 (\J I", 0.2 :2: U 5 10 FIELD E 50 100 500 (kV/CM) 10 5 I ::t. .;;x c: >r-- ( b) 300 -...J OJ -< I ~ « 0- 200 0 100 c::( z 10 :2: W W ...J ...J 0:: "- >- 4 Z I « W :::;; 0 I 5 10 50 100 10 3 500 2 4 10 FIELD E (kV/CM) 20 40 100 200400 1000 TEMPERATURE FIG. 59. Curves from the Monte Carlo simuation of conduction electrons in GaAs at 300 K. by Shichijo and Hess.'"' (a) Average electron energy vs electric field. (b) Electron mean free path An vs field above the Gunn effect threshold. (121) rather than as a conductivity or drift mobility J1n' This means that one would like to know the strength of the magnetic induction used. For, the Hall factor rH = 1 for "strong-field" conditions (BJ1n >1 in the SI system of teslas and m 2 IV s, BJ1n >108 for units of gauss and cm 2 IV s). Yet rH is a function of B, T, doping and compensation for a somewhat weaker magnetic field, not offering much hope of simplification unless "weak-field" (BJ1n <108 ) conditions can be assured. And such an assurance is hard to come by for carriers whose mobility rises from a few thousand cm 2IV s at room temperature and above, to the 104 _10 5 cm 2 /V s range at liquid nitrogen temperatures. The 1975 review by Rode l69 of electron transport in Group IV, III-V, and II-VI materials, includes a useful bibliography of prior work on GaAs, and three figures from that work are reproduced here. The first of these is Fig. 60, which showsJ1H as a function of temperature (using a typical measuring induction of 5 kG), for various samples of "high-purity" N-type GaAs. The solid line in Fig. 60 of "lattice scattering" mobility J1L does rise on cooling, but not in the power law form so beloved of the semiconductor community! There are reasons for this, in terms of the three physical processes contributing to lattice scattering, as further noted below. First, one can continue to observe in Fig. 60 the low temperature falloff ofJ1 H below 40 K for the sample ofWolfe and Stillman 387 ; and the expectation that ionized impurity scattering363 would have similarly affected the sample of Hicks and Manley 388 had their data been pursued to lower temperatures. The dashed line in Fig. 60 shows Rode's calculation of how J1H would fall off as provided by Dingle's formulation of ionized impurity scattering. The slightly better fit is based on the Brooks-Herring formulation. 363 R172 J. Appl. Phys, Vol. 53, No. 10, October 1982 T (K) FIG. 60. Temperature dependence of the electron Hall mobility Il H, as measured for B~5 kG with rather pure N-type GaAs samples. After Rode. 169 Data identifications: 0 Wolfe and Stillman 3.'; • Hicks and Manl ey 3S"; .... Chang (data by private communication); 6. Blood.310 Wolfe and Stillman estimated Nd ~5 X 10 13 cm -3 and (No/Nd)~O.4 for the sample with data plotted down to 4 K. which is the same as sample (A) of Fig. 61. Figure 61 showsJ1 H (T) for three samples, as reported by Stillman et al./ 89 with dashed lines indicating the expected contributions of (a) ionized impurity scattering, (b) deformation potential scattering by acoustic phonons, and (c) polar mode scattering by optical phonons. The first of these evi- ~ I/) > ....... (\J 10 6 DEFORMATION POTENTIAL MOBILITY -> \V 1 '\ :!E I ,,;; ::t.. / /' -d \( / u POLAR MOBILITY \ //1 \ ~'\ / \> ~ '\ \ 5 >r-- 10 -' - CD 0 :!E / I 1 / / \ '\ 1 ~ / / " h /-::i IONIZED IMPURITY MOBILITY ...J ~ c::( 10 4 I 10 100 1000 TEMPERATURE T (K) FIG. 61. Temperature dependence of the electron Hall mobility IlII (for B = 5 kG) for three N-type GaAs samples, after Stillman et al. ,"9 They estimated donor densities of (A) 5 X 10" cm- J , (B) lO'~ cm -" and (e) 5 X 10" cm- 3 for the three samples so identified, with (Na/Nd)~0.3 to 0.4 in each case. Expected contributions of three major processes towards the scattering are shown. J, S, Blakemore R172 Downloaded 21 Sep 2011 to 210.32.148.91. Redistribution subject to AIP license or copyright; see http://jap.aip.org/about/rights_and_permissions dently does an efficient job in controlling and modeling /.l H for low temperatures, while it is the third one (polar optical) that dominates the course of the "lattice" mobility /.l L' The acoustic phonon scattering that controls /.l L for semiconductors such as Ge and Si appears, according to Fig. 61, to provide only - 10% of the lattice scattering for electrons in GaAs at room temperature. A similar conclusion was reached by Pador and Nador.390 Several lesser scattering processes are omitted from the set of dashed curves in Fig. 61, but should at least be mentioned here for completeness. Piezoelectrically active acoustic phonons can be involved in polar scattering, because of the lack of inversion symmetry in the sphalerite lattice. Wolfe et al. 391 deduced that this would be comparable in strength to deformation potential scattering around room temperature, with a /.lpiezo a: T -1/2 behavior. Thus it does not have a major impact onJ-lL for reasonably high temperatures. However, Pador and Nador 390 show that /.lpiezo is the limiting constraint on /.l L below about 50 K (at which point /.lL > 106 cm 2/V s). Figure 61 also does not show the expected strength of neutral impurity scattering, which was estimated by Wolfe et af.391 on the basis of the simple Erginsoy model. 392 As usual, this was determined to contribute only a small fraction of the low temperature scattering. It is all very well to discuss electron scattering in N-type GaAs of fairly high purity and modest compensation. However, electron mobility is assuredly of interest to some readers with fairly heavy doping, perhaps rather large compensation-and maybe not even N-type, for that matter. Walukiewicz et al. 393 have examined the interesting differences between /.In (T) for N- and P-type GaAs-the latter being of concern for injected minority electrons. A significant feature of that regime is the screening by heavy holes, tending to shield electrons from ionized impurity scattering. Whereas the combination of processes noted in connection with Fig. 61 appears to be quite adequate for N-type samples that are relatively pure and modestly compensated, they seem to overestimate the room temperature mobility for highly compensated samples.395-398 This discrepancy appears accountable by some process for which /.In a: T -1/2. Weisberg 395 suggested that this might be space-charge scattering caused by doping inhomogeneity, and Conwell and VasselJ292 confirmed that small P-type islands would give scattering with that temperature dependence. Katado and Sugano,396 and Pador et al.,397 incorporated such a process into their mobility modeling of epitaxial GaAs layers; and Stringfellow and Kiinzel 398 remark that a scattering process with the /.l- T - 1/2 dependence has been invoked for a number of other semiconductors. However, the latter authors go on to argue the thesis that individual carbon atoms (CAs = acceptor), or carbon related point complexes, are responsible for this scattering, rather than multi-acceptor spacecharge regions. It seems to be generally accepted that the Hall factor rH > 1 for medium or weak field measurements with N-type GaAs. Figure 62 shows the calculated estimate of Rode l69 for the weak-field rHO = (/.lHolJ-ln) versus temperature, appropriate for weakly doped material in which impurity scatR173 J. Appl. Phys. Vol. 53, No. 10, October 1982 0 ...J: a:: 0 f- u 1.20 <! lL. ...J ...J <! ::c 0 ...J w 1.10 lL. :.:: <! w ~ 1.00 L_---.L_~---L~_ _.L-_-----.l_-::-L-__L...J 20 40 60 100 200 400 600 1000 TEMPERATURE T (K) FIG. 62. Theoretical weak-field Hall factor rHO = !JiHoifl.) as a function of temperature. as calculated by Rode 10. for modestly doped N-type GaAs. tering plays a minor role above 100 K. Rode comments that the large lobe of rHO> 1 for T> 100 K arises from the dominance of polar mode optical phonon scattering; while acoustic phonon scattering (deformation potential and piezoelectric) and impurity scattering determine the lower temperature course of events. The temperature dependence of rHO is not large enough to make the temperature dependences of the drift mobility /.In and the weak-field Hall mobility appreciably different from each other. As was noted in connection with Fig. 60, a T - n type of dependence is not a good fit for any extensive portion of the temperature range above 100 K, when polar mode scattering is in control. Yet a power law type of expression is very useful, even if not exact. Accordingly it is suggested that f-ln=8000(300/Tf3 } /.lHO =9400(300/T)23 cm 2/V s (122) be used as crude guides to the drift mobility and the weakfield Hall mobility reasonably close to the room temperature range. Mobility as measured at 300 or 77 K (or preferably both) has been suggested as a means for determination of the concentrations of both shallow donors (Nd) and shallow compensating acceptors (Na ) in N-type GaAs. The use in particular of the 77 K mobility for this purpose was urged by Stillman and coworkers,168.399 with curves and a procedure to get from a measured Hall mobility (at a 5 kG magnetic induction) to the value of (Ndl + Nal )=(n o + 2Nal )· The approach of Stillman et al. 168 is predicated on an assumption that/.l H(77)=2.5 X 105 cm 2/V s before any impurity scattering is taken into account. The same assumption concerning the 77 K Hall mobility was made in the analogous modeling of Rode, for which the guiding curves are reproduced in Fig. 63 for both 300 and 77 K. Rode assumed a lattice-limited 300 K drift mobility and Hall mobility as provided above in Eq. (122). With the aid of these curves, one can expect to get a rough idea of the J. S. Blakemore R173 Downloaded 21 Sep 2011 to 210.32.148.91. Redistribution subject to AIP license or copyright; see http://jap.aip.org/about/rights_and_permissions -;n > , T =300 K 10,000 U> > - - DRI FT MOBILITY - - - HALL MOBILITY N ::2: (J 4 10 [', "- [][', N ~ u 5 >- ::l >- I....J £II 0 ::2: iIi a 10 14 10 15 10 16 10 17 10 19 1018 (CM- 3 l ELECTRON DENSITY no ,> 10 5 --- , , , ~ >- , "- "- " "-"-,,- I "- 10 13 10 14 ELECTRON DENSITY no 10 16 compensation ratio (Na/Nd) from 300 K data. If 77 K data is also available, this will permit improved accuracy. None of these procedures can be successful, of course, if the GaAs has spatially inhomogeneQus doping. In the "Semiconductors and Semimetals" series of volumes, 10 articles concerning strange apparent mobility effects caused by doping inhomogeneity have been published by Bate,400 and by Wolfe and Stillman. 401 The latter of these was concerned with the less common of the two directions mobility can go in the presence of inhomogeneity: apparent mobility enhancement through some geometric forms of impurity segregation. When the doping conditions are conducive for such an effect, it will be seen more particularly in liquid nitrogen range measurements than at room temperature, Transport in N-type GaAs up to and including the intrinsic range has been an objective of many investigations over the years, from the 1950s reports of Folberth and Weiss,349 Welker and Weiss, 86 Whelan and Wheatley, 307 and Aukerman and Willardson 289 : all of which showed a temperature region of Hall coefficient "anomaly" above 500 K. This phenomenon, the result of thermal electron transfer out of the r6 minimum (first and most prominently to L 6 , and later on a smaller scale to X 6 ) has been measured with higher precision in the subsequent work ofBlood,31o and of Nichols et al. 347 In the latter of these, Nichols et al. used N-type epitaxial samples from which the substrate had been etched away. J. Appl. Phys. Vol. 53, No.1 0, October 1982 400 600 800 1000 1200 (K) 10 17 (CM- 3 l FIG. 63. Curves modeled by Rode for Pn and PHO (measured at 5 kG) for electrons in N-type GaAs, at 300 and 77 K, vs electron density no and compensation. Supposing shallow impurities, no = (Nd; - N a;), while the scattering ion density is (Nd; + N a;) = (no + 2NuJ By use of these curves, mobility data for either temperature (or both) should permit an estimate of compensation ratio (Na I N d ). R174 aU FIG. 64. Data of Nichols et al.'4? for Hall mobility (at 3.5 kG) vs T for Ntype GaAs epitaxial layers, above room temperature. The solid line shows Rode's expectation 169 for high-purity N-type GaAs. Doping of the three samples here is: 0 N d""4Na",, 1.2X 10" cm-'; 0 Nd",,4Na "" 10 16 cm-'; and 6, Nd ",,3Nu ",,2 X 10" cm-'. -~IO 10 15 [J "- 3 10 10 12 &1 TEMPERATURE iii l(Ndl +Nojl/nol = 08' 3 0 500 "- - - DRIFT MOBILITY - - - HALL MOBILITY ::2: 10 '6 , o 1J o 'b o 'b W 4 0 'b o w "- "- 10 o ....J ::l I..J 'Jt'l o u , ::2: u"b 00 2 z T = 77 K N 0 °Oy, ~ 0: I- --- [', 0 0 -;n [][', 00 , 00 00 0y, 5000 - I..J " [b ::l Figure 64 shows the Hall mobility (URH) they found for these three samples, compared with a solid curve of Rode's expectations l69 for a lattice-scattering Hall mobility. Thus the empirical result of the work by Nichols et a/. supports a conclusion reached by Blood31O in measurements up to 800 K, that the mobility (averaged over all places that electrons choose to spend their time) decreases quite rapidly with rising temperature. Nichols et al. 347 went on to analyze their combination of Hall and conductivity data in an attempt to deduce mobility versus temperature for carriers associated with the various band extrema. They used equations similar to Eqs. (91) and (92) for the thermal distribution of conduction electrons among r, L, and X minima. Figure 65 shows what they deduced from this mUltiband am bipolar analysis of two of the samples of Fig. 64: temperature dependences for fl- r, fl- L' and for the hole mobility fl-p' (And so these estimates of fl-p take over from the upper temperature limit of the hole mobility data in Fig. 55.) The various curves of Fig. 65 thus suggest, among other things, that fl- r decreases at a modest rate as temperature rises. The ensemble (and ambipolar) average represented by the curves of Fig. 64 is thus forced downwards so rapidly by the steep decline offl- L with rising temperature, aided at the higher temperatures by the positive Hall contribution ofminority holes. Both the magnitude and the temperature coefficient of fl- L in Fig. 65 come as a slight surprise, in view of analogies with other semiconductors (notably germanium) with Ltype conduction minima. Using such analogies, Aspnes l52 had anticipated fl- L (300)=900 cm 2IV s for weakly doped GaAs, only one quarter as large as the values the fl-dT) curves of Fig. 65 extrapolate towards. Incidentally, Aspnes also surmised thatfl-x(300)=300 cm 2IV s, based onfl-n in Ntype silicon, GaP, and other analogies. J. S. Blakemore R174 Downloaded 21 Sep 2011 to 210.32.148.91. Redistribution subject to AIP license or copyright; see http://jap.aip.org/about/rights_and_permissions 10 U> C. Electrical conductivity 4 The ambipolar conductivity of a semiconductor can be written as 5 > ...... (123) N ~ u 2 :t 10 >r- 3 ...J lD 500 0 ~ a:: w 200 a:: a:: « 100 u 50 300 400 500 600 700 800 900 TEMPERATURE (K) FIG. 65. Estimates by Nichols et aU" of mobilities in three types of band extremum: the To and Lo conduction minima for electrons, and flp for the combination oflight and heavy holes. As in Fig. 64, the sample dopings are: o Nd~4Na,:::dO'6 cm~3; and 0 Nd~4Na~1.2X 10 17 cm~3. where I1n and I1p denote the drift (i.e., conductivity) mobilities. The 300 K values of these have already been quoted for lightly doped GaAs. Thus, Eq. (122) quotes I1n (300) = 8000 cm 2 /V s, while the comments concerning Eq. (113) indicate that I1p (300) = 320 cm 2 /V s. Both of these numbers are also quoted in the 300 K summary information of Table XV, and are used in Eq. (123) to calculate the a(300) curve of Fig. 66. For GaAs doped predominantly with shallow donors and/or acceptors, the ratio no/po is so far from unity at ordinary temperatures that conduction is unipolar. (Meanwhile, Table XIV shows that nj exceeds 10 16 cm ~3 for 1'>900 K, so high temperature conduction is another matter.) Doping conditions are well known, however, which pin the Fermi level CF near to its intrinsic location t/J, enforcing am bipolar conduction at ordinary temperatures. The room temperature resistivity of such semi-insulating GaAs is in the range 105~1O9 n cm. That weak conduction, strongly activated, was first found as an accident of crystal growth conditions. 307 Achievement of the semi-insulating condition through creation of the so-called EL2 defect402 (tentatively identified at the time of writing as the AS Ga antisite disor- TABLE XV. Some room temperature (300 K) properties of gallium arsenide." (a) Mechanical, thermal, and dielectric properties 3 Crystal density P300 = 5.317 g/cm Bulk modulus (compressibility~ ') B, = 7.55 X 10" dyn/cm2 Shear modulus c' = 3.26 X 1011 dyn/cm2 Linear expansion coefficient a 300 = 5.73 X 1O~6 K~ I Volume expansion coefficient 3a = r = 1.72 X IO~' K ~ I Specific heat Cp = 0.327 Jig K Effective Debye temperature ()300 = 360 K Lattice thermal conductivity KL = 0.55 W Icm K Static dielectric constant KO = 12.85 (See also noo = 3.299 Table IX) Infrared refractive index (b) Energy band separations and derivatives Direct (zone center) intrinsic gap Ei = 1.423 eV Pressure derivative (aE,Iap) = +0.0126eV/kbar Temperature coefficient (aE,IaT) = - 0.000452 eV IK Direct exciton transition energy Ex} = 1.419 eV Spin-orbit splitting energy ..::1,0 = 0.341 eV L6 conduction band gap EL = 1.707 eV Pressure derivative (aELlap) = +0.0055 eV/kbar (aELlaT) = - 0.000506 eV IK Temperature coefficient .d rL = 0.284 eV Energy elevation (E L - E,) = X6 conduction band gap Ex = 1.899 eV Pressure derivative (aExlap) = - 0.0015 eVlkbar Temperature coefficient (aExlaT) = - 0.000385 eV/K Energy elevation (Ex - E,) = .d rx = 0.476 eV X, - X6 band separation ::::O.40eV (c) Intrinsic properties ni = Intrinsic carrier pair density U = Intrinsic electrical conductivity i Urnin = Minimum conductivity (for Po = bno) Intrinsic Fermi energy (I/! - Eo) = R175 2.25 X 106 cm ~3 3.0X 1O~9.a ~I Cm~1 1.15X 1O~9.a ~I Cm~1 0.752 eV J. AppL Phys. Vol. 53. No.1 D, October 1982 (d) Parameters for lowest conduction band Band-edge effective mass moo = Conduction electron rms speed v,(rms) = (Nondegen.) effective state density N; = Drift mobility (weak doping) fln = Hall mobility (weak doping. weak field) flHO = rHO = V-tllolfln) = Weak-field Hall factor 0.0632 mo 4.4 X 10' cm/s 4.21 X 10 17 cm ~} 8000 cm 2/V s 9400 cm 2 /V s 1.175 (e) Parameters for upper conduction bands For L6 conduction band: Density of states effective mass m L =0.55 m" Conductivity mobility flL -2500 cm'/V s Fraction of all conduction electrons -0.0004 For X6 conduction band: Density of states effective mass mx = 0.85 ma Conductivity mobility flx-3OOcm2/Vs < 1O~6 Fraction of all conduction electrons (f) Parameters for valence bands Heavy-hole density of states mass m h = 0.50 mo rms heavy-hole speed Vh (rms) = 1.65 X 10' cm/s Light-hole density of states mass m, = 0.088 mo rms light hole speed v,(rms) = 3.4 X 10' cm/s Light holes as fraction of total 0.069 Combined heavy:light state density N; = 9.51 X 10 18 Cm~3 Drift mobility (weak doping) f-lp = 320 cm 2 /V S Hall mobility (weak doping, weak field) flHO = 400 cm 2/V S Weak-field Hall factor rHO = V-tHolflp) = 1.25 Splitoff band effect mass m,o =0.15 ma < 1O~8 Splitoff holes as fraction of total Note that some properties are quite rapid functions of temperatures. The numbers listed above are specific for 300 K. a J. S. Blakemore R175 Downloaded 21 Sep 2011 to 210.32.148.91. Redistribution subject to AIP license or copyright; see http://jap.aip.org/about/rights_and_permissions 19 10 and XV show that n,(300) = 2.25x 106 cm--', and so T = 300 K , I"l ~ U c 10 17 10 ~ -, - 10 0 Z 0 ~ I 0 0',(300) However, = en, f-lp(1 the + b) = 3.00X 10- 9 conductivity is n -I cm - I . (124) minimized when Po = vbn, = bn o, and then O'rnin =2en,(pnf-lp)I12= [20',I(b+ 1)]vb = 0.3850', = 1.15x 10- 9 n- I cm- I . (125) u 10 U 13 I I l- \ lO" I 0 -' I 10 I I \ I I 10- 5 I 10 -' a:: _ 10- 7 --ni -' 0 U <l 7 W ~ U I I 0 Z <l I IU 0 Z 1 / I W 10- 3 I I I I I I I I / I I I 9 > /1 \ I I a:: lU W Z 6 >- I- I I I I 1 a:: I I Z 1 Z I 10- 1 I if) I (/) Z W 0 .. u 0 ~ 15 (/) W 3 .z a. l- 10 "- ILl 0 " 0 .,. IU W -' W 0 I 10 (Ti- 5 IT"min0 0.2 OA 0.6 0.8 1.0 FERMI ENERGY (CF-c v ) 1.2 10- 9 IA23 (eV) FIG. 66. Variation at T = 300 K of the thermal carrier densities no and Po, and the resulting electrical conductivity, with the Fermi energy location. In conformity with numbers quoted in room temperature Table XV and elsewhere, assumed that n, = 2.25x 10" cm--" and that ftn = 25ftp = 8000 cm 2 /V s, with E, = 1423 meV, and Itb - E,) = 752 meV. der 40 -,), presents an interesting combination of technical opportunities and problems. Chromium doping 404 -408 provides an alternative route to near-intrinsic status for GaAs at room temperature. The semi-insulating condition of GaAs was recognized but not understood in the early 1960s (some might say this is still the case), when Hilsum 9 commented that it was then (as now) fairly easy to make strongly N- or P-type GaAs, but very hard to make weakly doped material reproducibly. Whereas semi-insulating crystals by the "undoped" procedure could then and can now be achieved, it has always been very difficult to produce bulk GaAs with a room temperature no or Po in the range from (say) 10 14 cm -3 down to around 109 cm -- -'. The various branches of epitaxial growth technology have helped, but it is inevitably hard to grow any compound to be both highly pure and free from the various kinds of native disorder. Thus some large ranges of carrier density and conductivity are shown as dashed rather than solid lines in Fig. 66, to show the ranges which are not readily accessible. Figure 66 shows no, Po, and the resulting conductivity of Eq. (123), for T= 300 K: as functions of the Fermi energy (c F - c,.). The intrinsic condition c p = ¢ means that no=po=n,. Since the mobility ratio b=(f-ln/f-lp) = (8000/320) = 25 for modestly doped material-a value considerably larger than unity-the lowest conductivity O'rn," occurs appreciably on the P-type side of ¢. Tables XIV R176 J. Appl. Phys. Vol. 53, No. 10, October 1982 For 300 K, the minimum conductivity situation occurs when cp = [¢-!kTln(b)] =(c v +0.710 ev). That is 0.042 eV lower than ¢ itself. GaAs near the O'rnin condition will have a negative Hall coefficient even though Po> no. Not until Po> bn, > b 2n o does the Hall coefficient become positive. Note that 0' = 0', again for Po = bn" when cp = [¢ - kTln(b )] = (¢ - 0.083 eV) = (c u + 0.669 eV). These principles of ambipolar conduction when f-ln > f-lp are exactly those described 30 years ago for nearintrinsic conditions in germanium.409.410 For the analysis of semi-insulating GaAs, Martin 411 has chosen 400 K rather than 300 K as the temperature for plots of the various quantities versus c p, and the principles noted above still dictate the conditions of the conductivity minimum, Hall reversal, etc. Far away from semi-insulating and intrinsic conditions, the lines of Fig. 66 are curved at their upper ends, as CF approaches a band edge. For Po and no, the data are corrected for band occupancy degeneracy in the usual manner. 341 The conductivity curve is additionally adjusted for the decline of mobility with heavy doping, as indicated by Figs. 56 and 63 for holes and electrons, respectively. However, Fig. 66 could not be drawn conveniently to incorporate the shrinking of the band gap by band tailing when the shallow impurity density is large: as discussed, for example, by Casey and Stern. 19 In this, as for so many other topics, there are further detailed ramifications for which a review such as this cannot provide space. ACKNOWLEDGMENTS Information for this review accumulated in part as a byproduct of semi-insulating GaAs research, supported by the National Science Foundation through Grant DMR 7916454. Additional support from Tektronix, Inc. is also acknowledged. Useful advice and comments is gratefully acknowledged from a number of people, including P. K. Bhattacharya, N. Holonyak, S. G. Johnson, R. Y. Koyama, D. C. Look, J. W. McClure, G. M. Martin, S. Rahimi, B. K. Ridley, G. E. Stillman, G. H. Wannier, and R. K. Willardson. This writer must, however, be held responsible for errors of omission, commission, and misunderstanding. 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