XMOD Technologies: Hicum toolkit & extraction services Bertrand Ardouin Thomas Zimmer HICUM Workshop, September 2002, Monterey OUTLINE XMOD: Presentation How to choose a compact model ? Measurement, Extraction, Modelling Services and Consulting Hicum “Aperitif toolkit” Simple approach HICUM Workshop, September 2002, Monterey Where ? Laboratoire de Microélectronique IXL XMOD is here HICUM Workshop, September 2002, Monterey What ? A Start-up company in the Bipolar modelling domain : • Offering parameter extraction software • Provide extraction and modelling services (parameter extraction, on wafer measurements, …) • Hicum (SGP and VBIC models also supported) • Single transistor and scaling approach • Custom models for specific applications (HDL-A) Co-operation and support from : • Technical University Dresden • University Bordeaux HICUM Workshop, September 2002, Monterey What ? On wafer measurement capabilities NWA HP 8510C (HF, CV) HP 4155B (DC) C-V meter HP 4284 (C-V) T controler -60 °C up to 200 °C Semi-automatic prober Karl Suss PA200 0.003 45 0.002 meas hicum Ic (A ) 40 35 30 fT (GHz) 0.001 25 m easure hicum 20 0 15 0 10 5 0 0.0001 0.001 0.01 Ic (A) HICUM Workshop, September 2002, Monterey 0.1 1 V ce (V) 2 What ? The “Hicum Aperitif Toolkit” Single transistor methodology “In House” ICCAP tools for complete parameter extraction HICUM Workshop, September 2002, Monterey Simplicity: Time requirement = save money Why ? VBIC Gummel-Poon Mextram Efficiency: ability to model complex technologies HICUM Workshop, September 2002, Monterey Hicum Simplicity: Time requirement = save money Why ? Scalability not taken into account VBIC Gummel-Poon Single transistor strategy Mextram Efficiency: ability to model complex technologies HICUM Workshop, September 2002, Monterey Hicum Why ? There’s a need for companies in this domain: • Help to accelerate the FIRST use of Hicum and help to establish a wide use • Provide complete extraction services for companies having no experience in the bipolar domain (SiGe and III-V HBT’s) • Provide consulting for modelling of very High frequency devices, need of scaling, ... Centralise Bipolar experience HICUM Workshop, September 2002, Monterey Goals of the “Hicum Aperitif Toolkit” ? Gummel-Poon Switch Learn a new model and new tools Scaling approach can be complex New test structures on the wafers HICUM Workshop, September 2002, Monterey Hicum Goals of the “Hicum Aperitif Toolkit” Gummel-Poon Hicum Switch “Hicum Aperitif Toolkit” allows to use the single transistor strategy (SGP like) Simplified approach Decouple Scaling from parameter extraction No specific test structures HICUM Workshop, September 2002, Monterey Goals of the “Hicum Aperitif Toolkit” “Hicum Aperitif Toolkit” allows to: Evaluate the model without too much effort A smooth transition from SGP to Hicum Obtain efficient and physically meaningful parameter sets for Hicum (from direct extraction) Parameters extracted for the single transistor approach will be required for scaling (Transit time) HICUM Workshop, September 2002, Monterey Description of the toolkit Instruments ICCAP measurements toolkit Standard Bipolar Measurement Database Probes ICCAP Gummel-Poon, VBIC, MEXTRAM HICUM Workshop, September 2002, Monterey Hicum “Aperitif” Toolkit TRADICA and BIPAX Description of the toolkit ICCAP HICUM Workshop, September 2002, Monterey « Hicum aperitif Toolkit » New GUI interface Description of the toolkit Main window Import data Simply select directory Import Define Select mdm file + view header HICUM Workshop, September 2002, Monterey Description of the toolkit Define things Temperature Comments on technology HICUM Workshop, September 2002, Monterey Description of the toolkit Extract Extraction steps Status Parameter group Run HICUM Workshop, September 2002, Monterey Edit parameters Description of the toolkit Export Results Export Directory Utilities Create HTML documentation HICUM Workshop, September 2002, Monterey Description of the toolkit Get from plots Optimize Tune HICUM Workshop, September 2002, Monterey Description of the toolkit HICUM Workshop, September 2002, Monterey Description of the toolkit HICUM Workshop, September 2002, Monterey Description of the toolkit HICUM Workshop, September 2002, Monterey Description of the toolkit HICUM Workshop, September 2002, Monterey Description of the toolkit HICUM Workshop, September 2002, Monterey Parameter extraction: Results b (Vce) fT (Ic) 45 40 120 mesures 110 hicum 100 35 90 30 80 f T (GHz) 70 Beta 25 20 50 40 15 30 10 5 0 0.0001 60 20 meas 10 hicum 0 0.001 0.01 0.1 1.E-08 Ic (A) 1.E-06 1.E-04 Ic (A) BiCMOS SiGe 0.35 µm ST Microelectronics fT = 45 GHz HICUM Workshop, September 2002, Monterey 1.E-02 Parameter extraction: Results Ic (Vbe), Ib (Vbe) Ic (Vce) 0.003 0.1 Ic (mesure) Ic (hicum) Ib (mesure) Ib (hicum) 0.01 0.001 0.002 Ic (A) Ic, Ib (A) 0.0001 1E-05 1E-06 0.001 1E-07 mesure hicum 1E-08 1E-09 0 1E-10 0.4 0.5 0.6 0.7 Vbe (V) 0.8 0.9 1 0 1 Vce (V) BiCMOS SiGe 0.35 µm ST Microelectronics fT = 45 GHz HICUM Workshop, September 2002, Monterey 2 Parameter extraction: Results g0 = d IC / dVce 1.E+00 1.E-01 Mesures Hicum g0 (S) 1.E-02 1.E-03 1.E-04 1.E-05 1.E-06 1.E-07 0 0.5 1 1.5 VCE (V) 2 2.5 3 BiCMOS SiGe 0.35 µm ST Microelectronics fT = 45 GHz HICUM Workshop, September 2002, Monterey Parameter extraction: Results fT (Ic) 80 m es ure 70 hicum 60 f T (GHz) 50 40 30 20 10 0 0.0001 0.001 0.01 0.1 Ic (A) BiCMOS SiGe 0.25 µm ST Microelectronics fT = 75 GHz HICUM Workshop, September 2002, Monterey Parameter extraction: Results 140 120 f T (GHz) 100 80 60 40 20 0 1.E-04 1.E-03 1.E-02 1.E-01 IC (A) BiCMOS SiGe 0.25 µm ST Microelectronics fT = 120 GHz HICUM Workshop, September 2002, Monterey Conclusion XMOD provides Software, Consulting and Services for Bipolar Modelling community “Hicum Aperitif Toolkit” is ready for evaluation Simplified approach allows to familiarise with the model and extend its interest Scaling and statistics planed HICUM Workshop, September 2002, Monterey
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