DMT243/3 Electronic Packaging UNIVERSITI MALAYSIA PERLIS LABORATORY MANUAL DMT 243/3 ELECTRONIC PACKAGING LECTURER: MOHAMMAD NUZAIHAN MD NOR 1 DMT243/3 Electronic Packaging UNIVERSITI MALAYSIA PERLIS LABORATORY MANUAL DMT 243/3 ELECTRONIC PACKAGING PREPARED BY: MOHD KHAIRUDDIN MD ARSHAD MOHAMMAD NUZAIHAN MD NOOR NURHAMIDAH ABDUL HALIM MOHD SALLEHUDIN SAAD Supervised By Checked By Approved By 2 DMT243/3 Electronic Packaging EXPERIMENT 3: WIREBONDING 1.0 Objectives The objectives of this experiment are: 1. To expose students to wirebonding process and technique. 2. To examine the wirebonding sample under the optical microscope. 2.0 Introduction Wirebonding is an electrical interconnection technique using thin wire and a combination of heat, pressure and/or ultrasonic energy. Wirebonding is a solid phase welding process, where the two metallic materials (wire and pad surface) are brought into intimate contact. Once the surfaces are in intimate contact, electron sharing or interdiffusion of atoms takes place, resulting in the formation of wirebond. In wirebonding process, bonding force can lead to material deformation, breaking up contamination layer and smoothing out surface asperity, which can be enhanced by the application of ultrasonic energy. Heat can accelerate Interatomic diffusion, thus the bond formation. Wirebonding process begins by firmly attaching the backside of a chip to a chip carrier using either an organic conductive adhesive or a solder (Die Attach). The wires then are welded using a special bonding tool (capillary or wedge). Depending on bonding agent (heat and ultrasonic energy), the bonding process can be defined to three major processes: thermocompression bonding (T/C), ultrasonic bonding (U/S), and thermosonic bonding (T/S), as shown in Table 1. Wirebonding Pressure Temperature Thermocompression High 300-500 oC Ultrasonic Low Thermosonic Low Ultrasonic energy Wire Pad No Au, Al, Au 25 oC Yes Au, Al Al, Au 100-150 oC Yes Au Al, Au Table 1: Three wirebonding processes. 3.0 Apparatus 1. K&S Model 4524AD (Wirebonder). 2. Gold wire 3. Capillaries 4. Tweezers 4.0 Multi Process Auto Stepback Ball Bonder Sample 1. Bond Pad Tester 3 DMT243/3 5.0 Electronic Packaging Procedures Loading the wire and setting the bonding parameters: Recommended Machine Adjustments Parameter Wire clamp gap (μm) Wire clamp force (gm) Drag clamp gap (μm) Drag clamp force (gm) N.E.F.O. Wand distance from capillary at Reset (μm) N.E.F.O. ball size Tail Initial Bond Parameter Settings 1st POWER 1st TIME 1st FORCE 1st FORCE (gm) Setting (gold wire size : 25 μm ) 80 100 250 6 500 1.5 – 2.5 4–5 LOOP 1–2 5 1–2 40 4 Second Bond Parameter Settings Second POWER Second TIME Second FORCE 2nd FORCE (gm) STEP REVERSE KINK Y SPEED 2–3 5–7 4–6 80 2–3 3 2 2 Creating a Ball (manually) To create a ball: 1.0 Power on the N.E.F.O. unit and set the BALL parameter to the recommended setting. 2.0 Press the CLAMP control button to open the wire clamp. The green LED lights. 3.0 Pull some wire from the capillary tip and bend the wire upwards. 4.0 Press the CLAMP control button again to close the wire clamp. The LED turns off. 5.0 Push and hold the N.E.F.O. solenoid, moving the wand to a position under the wire. 6.0 Press the MANUAL SPARK control button. 7.0 Verify that a spark was generated and a ball created (in case a ball was not created, repeat steps 1-6). 4 DMT243/3 Electronic Packaging Operation Standard Mode Ball Bonding The 4524AD performs standard mode ball bonding using Manual Z, Semi Auto or automatic operation. To perform Standard Mode Semi Auto ball bonding: 1.0 2.0 3.0 4.0 5.0 Ensure that the bonding head is in the Reset position and that the Mode is set to STANDARD. Position the workholder so that the bonding pad is under the capillary. Ensure that the ball is ready and that the drag and wire clamps are closed. Press and hold the Semi Auto Pushbutton. The wire clamp opens and the kicker pulls out wire slack from the wire spool. The bonding head descends to the first Search height and stops. The drag clamp pulls the wire so that the ball is seated against the capillary tip. While still holding the Semi Auto Pushbutton, move the Multi Mouse to position the first bonding pad precisely under the capillary. Release the Semi Auto Pushbutton. The bonding head descends to the first bonding pad. The first bonding force and ultrasonic energy (set by the FORCE and POWER parameters) are applied for the time set by the TIME parameter. The first bond is performed, the drag clamp opens and the kicker is released. The bonding head rises automatically to the Kink height position and travels in a reverse motion to form the Loop shape. The bonding head then automatically performs Loop height and the table steps forward to the second bond position. 6.0 7.0 While still pressing the Semi Auto Pushbutton, move the Multi Mouse to position the second bonding pad precisely under the capillary. Release the Semi Auto Pushbutton. The bonding head descends to the second bond pad. The second bond force and ultrasonic energy (set by the second bond schedule FORCE and POWER parameters respectively) are applied for the time set by the second bond schedule TIME parameter. The bonding head rises automatically to the Reset position. The wire clamp closes, after which the wire is snapped and creating a tail for a new ball. The bonding head remains in the Reset position. The N.E.F.O. wand approaches the tail and fires. A new ball is created for the next bonding cycle. To perform Standard Mode Manual Z ball bonding: 1.0 2.0 3.0 Press the MANUAL key on the Keypad. Use the Manual Z Control Button of the Multi Mouse to lower the bonding head as close as you want to the bonding pad. Move the Multi Mouse to maneuver the first bonding pad precisely under the capillary. Continue pressing the Manual Z Control Button to drop the bonding head to the bonding pad and perform the bond as in the Semi Auto mode. 5 DMT243/3 4.0 5.0 6.0 7.0 Electronic Packaging Release the Manual Z Control Button slowly to raise the bonding head to the Loop height. Move the Multi Mouse to position the second bonding pad directly under the capillary. To perform the second bond, repeat steps 2 and 3. The bonding head rises to the Reset position automatically. The N.E.F.O. then fires to create a ball for the next bonding cycle. Release the Manual Z Control Button to start the next cycle. To perform Standard Mode Automatic Ball Bonding: 1.0 2.0 3.0 4.0 5.0 Ensure that the bonding head is in the Reset position, that the green LED next to the MANUAL control button is Off and that the Auto setting in the Modes Screen is set to On. Position the workholder so that the bonding pad is under the capillary. Press and hold the Semi Auto Pushbutton. The wire clamp opens and the kicker pulls out wire slack from the wire spool. The bonding head descends to the first Search height and stops. The drag clamp pulls the wire so that the ball is seated against the capillary tip. While still holding the Semi Auto Pushbutton, move the Multi Mouse to position the first bonding pad precisely under the capillary. Release the Semi Auto Pushbutton on the Multi Mouse. The bonding head performs the first bond, the loop and the second bond, then rises to the Reset height and returns to the position of the first bond. Note: If any additional two-wire bonds are defined, instead of returning to the first bond position, the bonding head goes to the Reset height. From there it must be moved manually using the Multi Mouse to the next bond position. 6.0 Discussion questions a) b) c) d) e) f) What is actually being tested using the wirebonding machine? What is an advantage of using Ball/Wedge technique over Wedge/Wedge technique in the wirebonding process? Explain about thermocompression, thermosonic and ultrasonic bonding process. What is the different between ALL 3 technique automatic, semi-automatic and manual z in wirebonding process? Take photos/sketch the location of wirebonding process using ALL 3 technique : i. Automatic ii. Semi-automatic iii. Manual Z What are the factors that can be affected a wirebonding process? 6
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