Novel and Diverse Applications of
Silicon Nanosensors and Imagers
Blake Jacquot, Ph.D.
Member of Technical Staff
Jet Propulsion Laboratories
April 28, 2009
National Aeronautics and Space Administration
Jet Propulsion Laboratory
California Institute of Technology
Pasadena, California
www.nasa.gov
Advanced Detector Arrays and Nanoscience Group
Cylindrically
curved CCD
End-to-end Processing
Back illuminated Si
UV/Vis/NIR Imagers
-- -+
+
+
+
+
+
+
+
+
+
+
Particle Detectors
-
Trapping of photogenerated charge
Delta-doped n-channel CCD
Delta-doped
p-channel 2k x 4k CCD
χ
Quantum Efficiency (%)
100
Ec
AR-coated
δ-doped CCD
80
p-AlGaN
Ev
Sn QDs
60
δ-doped CCD
d
40
Je
Unmodified
CCD
20
100
300
500
Wavelength (nm)
φBl
φB
φB
V
WF/PCII
0
d
Je
1
V
K. K. Likharev, Appl. Phys. Lett. 73, 2137 (1998)
700
2
3
φBh
V
V
CνMOS: Charge-based sensors
CMOS-Based Biosensors
Real-Time Detection
Calibration Curves
Measurement of Protein Binding
Impedance Model
Low drift
`
Small-Signal Model
Expected Response
Detected thickness
extracted with
large-signal model
•Detection limit: 25 ng/cm2 or 2Å
•1.5μm technology scaled down
•Different materials to block mobile ions
Jacquot, B.C., et al., Biosens. Bioelectron. (2008)