Effect of gas transport inside a micrometer-scale gap jig on the growth of graphene on copper foil

Gas transport controlled graphene synthesis via jig gap:
Nucleation and growth study
Seong-Yong Cho, Ki-Ju Kim, Hyun-Mi Kim, Do-Joong Lee, Min-Hyun Lee
and Ki-Bum Kim
Department of Materials Science and Engineering
Seoul National University
Polycrystalline nature of graphene growth
Random nucleation in graphene CVD
nucleation
Grain boundaries
C. Mattevi, et al., J. Mater. Chem. 21, 3324 (2011)
Electrical properties in polycrystalline graphene
Q. Yu et al., Nature Mater. 10, 443 (2011)
Understanding on growth mechanism and controlling method is required
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Jig concept for gas transport study
โ€ข
โ€ข
Graphene CVD appears relatively simple, but obtaining a high quality graphene is another issue.
Both the kinetics on nucleation and growth should be well understood and controlled.
Jig is an excellent tool to observe gas transport effect in graphene growth by controlling boundary layer thickness in
CVD system. Gas conductance control was observed directly.
Jig effect on pre-annealing: Reduction of copper sublimation
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Effect of jig gap on graphene growth
Dendritic to polygon shape evolution
0 mm
5 mm
2 mm
10 mm
20 mm
50 µm
Nucleation and growth behavior in jig gap
Lateral distance from jig entrance (mm)
0
1
2
3
5
7
10
15
20
1 mm
500 µm
Jig gap
200 µm
100 µm
50 µm
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Analysis on nucleation and growth
Areal coverage vs. distance
Normalization
๐‘ช=๐’Œ
๐‘จ
๐‘ณ
โ‰ˆ ๐’Œโ€ฒ
๐‘ซ๐‘ณ
๐‘ซ๐’—
C : gas conductance
A : area
L : length
k/kโ€™ : constant
DL : lateral distance
DV : vertical distance
Gas conductance was successfully controlled by manipulating jig gap. Universal conductance parameter DL/DV
governs graphene coverage.
Grain size variation
Nuclei density variation
โˆ†๐‘ฎโˆ—
๐‘ต = ๐’๐’” ๐’†๐’™๐’‘(โˆ’
)
๐’Œ๐‘ป
โˆ—
N* : equilibrium concentration of critical
nuclei
ns : density of nucleation site
โˆ†๐บ โˆ— : function of degree of supersaturation
k : Boltzmann constant
Variation of gas conductance via jig gap controls grain size of graphene, but nuclei density was independent of gas
transport control.
S. Y. Cho K. J. Kim et al., MRS 2012 Fall
S. Y. Cho K. J. Kim et al., RSD Advances 3, 26376 (2013)
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Summary
โ€ข Reduction of copper surface : static vapor condition limits the sublimation and redeposition of Cu which make Cu surface smoother
โ€ข Morphology of graphene grain : because of carbon source depletion and continuous
etching of hydrogen, graphene grain shape shifted from dendritic to polygon
โ€ข Coverage of graphene : coverage of graphene show general behavior to the
parameter, DL/DV, which is gas conductance
โ€ข Grain size and nuclei density of graphene : grain size of graphene is the function of
gas conductance whereas nuclei density is not. The nuclei density itself considered to
related with the nucleation site, heterogeneous nucleation behavior of graphene.
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