Laser-Enabled Directed
Nanomanufacturing
Costas P. Grigoropoulos
Laser Thermal Laboratory
Department of Mechanical Engineering
University of California, Berkeley
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U.S.-Korea Nanotechnology Forum
October 15, 2013
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Topics
• Laser nano/micromanufacturing
– Laser Chemical Vapor Deposition
– Directed growth of nanomaterials
• Laser-assisted electronic materials processing and
device fabrication
– Flexible electronics
• Laser interactions with biological materials
– Surface patterning for cell growth
– Fibrous material scaffolding
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Nanomachined patterns by femtosecond laser
coupled to apertureless near field scanning
optical microscope (NSOM)
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14 nm
11 nm
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Chimmalgi et al., Appl. Phys. Lett., (2003)
J. Appl. Phys., (2005)
Hwang et al., Appl. Phys. A, (2009)
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Nano-crystallization by apertureless NSOM
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Chimmalgi, Nano Lett. (2005)
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In-situ TEM Imaging and NSOM Processing
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NSOM Probe
Superposed
laser beams
CW + pulsed
Transformation of an a-Si dot
to a single Si nanocrystal on a
non-participating substrate
a-Si pillar
Xiang et al., Nano Lett. (2012) This image cannot currently be display ed.
Alternating Crystal Structure
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(a)
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(b)
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(c)
(d)
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amorphous
Poly-crystal
Poly-crystal
singlecrystal
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Poly-crystal
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(e)
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single
crysta
l
(f)
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Poly-crystal
singlecrystal
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(g)
(h)
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Laser In-situ TEM Diagnostics & Processing
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Libra TEM column
Libra TEM sample holder
Raman probe assy.
Laser exciter & sample assy.
Fiber coupled signal delivery
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Libra TEM
Raman
spectroscope
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Laser-based Selective Nanowire growth
metal nanoparticle catalyzed silicon nanowire growth under VLS mechanism
VLS (Vapor-Liquid-Solid) Si nanowire growth
Laser Illumination
Laser-assisted localized Si nanowire growth setup
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Localized heating of catalysts
& NW growth within laser spot
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SiH4 gas
Au Catalyst
100nm
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Temperature and time dependent growth of GeNWs
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On-demand Vertical GeNW Integration on Si(111)
Location/shape controlled GeNW on a single
Si(111) in vertical integration architecture
Plane wave
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D0 = 65 nm (fixed)
D (varied)
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Ryu et al., ACS Nano (2013)
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Defect Free Epitaxial Growth of GeNWs on Si (111)
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Cross sectional HRTEM images of the vertically oriented GeNW on Si (111)
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Laser hydrothermal Growth of ZnO nanowires This image cannot currently be display ed.
In et al., Small (2013) This image cannot currently be display ed.
Growth visualization and control This image cannot currently be display ed.
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Graphene patterning and transferring
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Yoo et al, Small (2013) This image cannot currently be display ed.
Graphene devices
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Vertically Aligned Carbon Nanotube Transfer on Flexible
Substrates
Laser
Pressure
VACNTs
Si
Glass
PC
Si
Separation
Si
Si
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PC
CNT
200 µm
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In et al., ACS Nano (2012)
Beyond graphene
Laser annealed MoS2 transistors on plastic
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Choi, Kwon et al. IMID (2013)
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Nanopaticle processing for flexible electronics
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Nano Tech
Nanomaterial synthesis
& characterization
- Low melting temperature
- Solution processible
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LIFT
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5nm
Low Temperature
Flexible
Electronics
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Inkjet Printing
Nanoimprinting
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-
Direct patterning (lithography free, maskless)
No vacuum deposition, no etching, low T
Single step process
Solution processible, additive process
Direct patterning
- Resolution enhancement
Laser Tech
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Digital Direct Metal Patterning (DDMP) Process on a Flexible Substrate This image cannot currently be display ed.
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Yeo et al., PLOS ONE, (2012)
Laser Sintering Examples
532nm wavelength, 70mW, CW laser, 4” wafer size, 2 m/s scanning speed
Room temperature, ambient pressure, Non-vacuum process, maskless process
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High resolution metal features
( total processing time: ~ 7 mins)
(down to several microns)
16,000 OFETs on a PI substrate, 3 layered
structures (PI substrate/ gate electrode / PVP / source & drain
electrodes)
( total processing time: ~ 10 mins)
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Laser Enabled Wafer scale ZnO Nanoimprinting on
Flexible Substrates
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Master mold
PDMS stamp
ZnO mesh
ZnO on
polycarbonate
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Fiber scaffold fabrication via 2PP
(two-photon polymerization)
Low N.A. objective
High N.A. objective
Fiber scaffold fabrication
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Jeon et al., Biomed. Microdev. (2011)
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Jeon et al., JACS 133 (2011)
Jeon et al., 2011, submitted
2D pitch gradient pattern
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2D pitch gradient pattern
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3D 2PP nanofabrication examples This image cannot currently be display ed.
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25 layer photonic crystal –
periodicity of 400nm
Multi-scale biomimetic
structure
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LTL
Sanghoon Ahn
Anant Chimmalgi
Taeyul Choi
Hirofumi Hidai
Kuniaki Hiromatsu
Nico Hotz
David J. Hwang
Jung Bin In
Hojeong Jeon
Eunpa Kim
Moosung Kim
Jaden Kwon
Seung-Hwan Ko
Daeho Lee
Ming-Tsang Lee
Julian Marschewski
Nipun Misra
Heng Pan
Jongbok Park
Patrick Rohner
Matt Rogers
Ioanna Sakellari
Bin Xiang
Jae-Hyuck Yoo
Acknowledgment
Funding
DARPA/MTO, DOE, USAF, NSF, NIH,
KAUST, industry
Collaborators
Oscar D. Dubon, Andrew M. Minor,
Kevin E. Healy, Junqiao Wu (UCB)
Dimos Poulikakos (ETH)
Seung-Hwan Ko (KAIST)
Maria Farsari (IESL/FORTH, Greece)
Sunkook Kim (Kyung Hee U.)
Woong Choi (Kookmin U.)
Dieter Bäuerle (JKU, Austria)
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