Proceedings of ICNMM2006 Proceedings of ICNMM2006 Fourth International Conference on Nanochannels, Microchannels and Minichannels Fourth International Conference on Nanochannels, Microchannels and Minichannels June 19-21, 2006, Limerick, Ireland June 19-21, 2006, Limerick, Ireland ICNMM2006-96248 ICNMM2006-96248 INVESTIGATION OF FOULING IN MICROCHANNELS Jeffrey L. Perry, [email protected] Microsystems Engineering Rochester Institute of Technology Rochester, NY 14623 ABSTRACT Particulate fouling in microchannels is a subject that is largely unexplored. It does, however, have significant implications for all microchannel flows since the hydraulic diameters are very small and consequently are susceptible to excessively large pressure drops. The significant forces for dilute solutions of silica particles ranging from 3 to 10 µm are studied in rectangular microchannels made in silicon with a hydraulic diameter of 106 µm. The effects of zeta potential which is pH driven, lift force on the particulates and their fouling characteristics are evaluated by measuring the pressure drop across the microchannel test section. INTRODUCTION Microfluidics is an increasingly studied field because of its use in practical applications in both biology and microelectronics. In recent years, the proliferation of MEMS has resulted in the use of microchannels for many applications. In particular, with microchannels there has been a great emphasis on semiconductor chip cooling. Since large pressure drops are inherent with the use of microchannels it is desired to minimize further increases in pressure drop that can arise due to fouling which can severely limit the efficiency of a microchannel heat exchanger. The smallest hydraulic diameters, Dh, that have been previously used in fouling studies that the authors are aware of were by Yiantsios et al. (1995, 1998, 2003) and Niida et al. (1989). Yiantsios et al. studied fouling in channels with Dh = 952 µm. Their test section consisted of two glass plates separated by Teflon spacer strips to create a channel that was 10 mm by 0.5 mm. Similarity, Niida et al. used an observation cell, made of borosilicate glass with a cross-section of 4 mm by 0.4 mm to provide a Dh of 727 µm. Based on the definitions provided by both Kandlikar & Grande (2002) and Kandlikar & Kuan (2006) these are categorized as minichannels. In the Satish G. Kandlikar, [email protected] Department of Mechanical Engineering Rochester Institute of Technology Rochester, NY 14623 present fouling studies microchannels are being used which have dimensions of 70 µm x 220 µm (Dh = 106 µm). In general particulate fouling may be considered a two-step process. It consists of a transport step, in which particles are transferred to the channel wall, and a subsequent adhesion step, which is dominated by the interaction forces between particles and the wall. An important parameter in both steps is the particle size. Particles in the colloidal size range (< 1 µm) tend to be strongly controlled by Brownian diffusivity. However, particles which are several microns in size are less likely to experience random displacement caused by Brownian motion. Table 1 illustrates this by providing the mean displacement, in one direction for particles ranging from 10 nm to 10 µm. Consequently, particles in the size range used in this work (3 – 10 µm diameter) will not be affected by random displacements due to Brownian motion; and therefore fouling as it relates to this phenomenon may be neglected. Moreover, it needs to be stated that particle size is a critical parameter in determining their attachment efficiency. It affects the magnitude of physicochemical interactions between particles and channel wall as well as the hydrodynamic forces that tend to cause particles to detach or prevent them from adhering. Table 1: Diffusion coefficients and Brownian displacements calculated for uncharged spheres in water at 25oC. 1 Diameter Diffusivity at 25oC (m2/s) 10 nm 100 nm 3 µm 5 µm 10 µm 4.9x10-11 4.9x10-12 1.6x10-13 9.8x10-14 4.9x10-14 Average displacement after 1 hour (µm) 590 190 34 26 19 Copyright © 2006 by ASME THEORECTICAL APPROACH A. Forces on a particle When a particle is in contact or near contact with a horizontal channel wall, many forces around the particle are involved in determining whether or not adhesion will occur. In this study the forces are categorized into two main groups. The first group is the adhesive forces which are due to van der Waals forces, Fvdw, and gravity, Fg. The second group is the removal forces which include the hydrodynamic lift force, FL, and electro static forces, Fel. The electrostatic forces in actuality may be attractive or repulsive in nature. However, in these experiments the conditions were adjusted such that they were always repulsive by proper pH adjustment. A schematic showing of all these forces is given in Figure 1. The total force, FT, on a particle is the sum of the adhesive and removal forces which is expressed as (1) F = F +F −F −F T vdw g el L The more negative FT is, the greater the chance that the rate of fouling will be less. This translates into smaller pressure drops across a microchannel test section. However, because Eq. 1 can be somewhat awkward to represent graphically, the ratio of the removal forces to adhesive forces is used. This ratio is defined as RM with RM = FL + Fel Fg + Fvdw (2) B. Van der Waals force particle/wall The van der Waals or London dispersion force is an attractive force between two atoms or non polar molecules that arises due to fluctuating dipole moments. In this phenomenon a fluctuating dipole moment in one molecule induces a dipole moment in the other which results in a net attraction between them. The van der Waals force between a sphere and a plate which takes into account retardation effects is given by Gregory (1981). Fvdw d A132 d p 1 1− , h << p = 2 12h 1 + λ 2 5.32h (3) A132 is the Hamaker constant of particle 1 on wall 2 in medium 3 [A132 = 1.3x10-20 J for a silica (SiO2) particle near a silicon channel wall in water, Holmberg (2001); Kern (1993)], dp is the particle diameter, h the minimum separation between the particle and the wall, and λ is the characteristic wavelength of interaction which is taken as ≈ 100 nm for most materials Gregory (1981). C. Gravity Gravity in the context of this paper is considered an adhesive force because on a horizontal surface it can drive a particle to be in contact with it. The force of gravity of a particle in water is given as where for larger values of RM the likelihood of fouling is decreased. Fg = πd 3p ( ρ p − ρ f ) g 6 (4) where ρp is the density of the particle, ρf is the density of the fluid and g is the acceleration due to gravity. The gravitation force, is however often negligible for micron sized particles in comparison to the surface forces that are present. Figure 1: Schematic showing the forces on a particle in near contact with a horizontal channel wall. The drag force on the particle is not considered because it only works in the horizontal direction and therefore cannot prevent a particle from coming into contact with the wall. D. Electrostatic force particle/wall Most materials immersed in an aqueous environment acquire a surface charge due to preferential adsorption of ions present in the liquid phase or due to dissociation of surface groups. The surface charge is balanced by a counter-charge of ions of opposite sign in order to make the system electrostatically neutral. In this case a so-called double layer is established. This sets up a potential difference between the solid surface and a diffuse layer of oppositely charged ions in solution. The potential most used in colloidal science for calculating the forces of repulsion between two surfaces is the zeta potential (ζ). This is the potential adjacent to a solid interface referred to as the surface of shear which is used to approximate the surface potential at the Stern plane. In actuality the zeta potential is somewhat smaller than the Stern potential (ψd) but errors associated with making this approximation are usually small, Shaw (1992). This is depicted in Figure 2. The zeta potential is easily changed by adjusting the pH. ζ for most 2 Copyright © 2006 by ASME materials becomes more negative at higher pH and more positive at lower pH values due to the interaction of the potentially determining ions in solution (H+ and OH-) that can effect chemical equilibriums at the surface. Important is the fact that interpenetration of double layers of like sign (like zeta potentials) will lead to repulsion. Fel = 4πd p nkTe −κh Y+2 Y−2 − 1 + e −κh 1 − e −κh κ ys1 + ys 2 y − ys 2 , Y− = s1 2 2 ze ze ys1 = ψ s1 , ys 2 = ψ s 2 kT kT Y+ = κ= e2 ε rε o kT (5) ∑n z 2 i i where n is the electrolyte concentration, k is the Boltzmann constant, T is the absolute temperature, z is the electrolyte valance charge, e is the elementary electric charge, κ is the Debye-Huckel parameter of the electrolyte solution (where 1/κ is known as the Debye length or diffuse layer thickness), ψs1 and ψs2 are the respective surface potentials involved, εr is the dielectric constant of the medium, and εo is the dielectric permittivity of a vacuum. E. Hydrodynamic lift force particle/substrate The hydrodynamic lift force for a spherical particle in the vicinity of the deposition surface is given by Leighton and Acrivos (1985) who extended the analysis of O’Neill (1968) by taking into account weak inertial effects. They found that the lift force on a spherical particle in contact with a fixed plane wall, in a slow linear shear flow is τ FL = 0.58ρ f w µ f Figure 2: Schematic representation of the structure of the electric double layer on a flat surface. The DLVO theory developed by Derjaguin and Landau (1941), Verwey and Overbeek (1948), independently describes the interaction that takes place when two of these double layers interpenetrate. Hog et al. (1966) were amongst others that extended the DLVO theory to the interaction of dissimilar plates and dissimilar spheres at constant surface potential. Their simplified formulas are however only good for surface potentials up to ≈ 25 mV. Ohshima et al. (1982), came up with analytical expressions that can be applied to higher surface potentials, as is the case here. The analytical expressions developed by Oshima et al. (1982) which describe the force between a sphere and a plate are quite lengthy. Therefore, only the first part of the expression is given. The comprehensive results can be obtained by differentiating Eqs. 49-51 from Oshima et al. with respect to h and taking the limit as one of the radii goes to infinity (Fel = dU/dh, where U is the interaction energy). The force for a symmetrical electrolyte is 2 4 dp (6) where µf is the viscosity of the fluid and τw is the shear stress at the wall. This expression is valid for sufficiently small particle Reynolds numbers such that the inertial terms in the NavierStokes equations can be neglected. The wall shear stress is calculated as τw = 1 fρ f V 2 2 (7) where f is the Fanning friction factor and V is the mean velocity. The friction factor is calculated from the Poiseuille number which is a function of the aspect ratio for a rectangular channel. It can be determined using Eq. 8 from Shah and London (1978). 1 − 1.3553α c + 1.9467α c2 f Re = 24 − 1.7012α c3 + 0.9564α c4 − 0.2537α c5 (8) where αc is the channel aspect ratio. One constraint for this equation is that the aspect ratio must be less than one. If the 3 Copyright © 2006 by ASME channel aspect ratio is greater than unity, the inverse is taken for use in Eq. 8. EXPERIMENTAL * D50 and D90 values refer to the 50 percentile and 90 percentile of the particle diameters respectively. Silica Silicon 20.0 0.0 0.0 Zeta Potential (mV) A. Materials and Methods Particulate fouling was studied using the flow loop shown in Figure 3. A peristaltic pump (Cole-Parmer Masterflex L/S) was used to drive the fluid which has a rated speed control of ± 0.25%. The peristaltic pump was selected because it is capable of pumping fluids with a high solids content and can be run dry to flush the system between runs. The 3 µm diameter silica particles were obtained from Nanostructured & Amorphous Materials, Inc., while the 10 µm diameter particles were from U.S. Silica. The physical properties of the silica are given in Table 2 while statistical information on their distribution is listed in Table 3. Using these silica particles dilute suspensions of up to 0.015 wt % were formulated. Deionized water was used in all experiments which had a pH of 5.5. The pH was then adjusted as needed to higher values by the addition of KOH. The zeta potential values for silica were taken from Holmberg (2001) and those for silicon came from Binner (2001). The zeta potential vs. pH curves are given in Figure 4. The mean temperature of the fluid was kept at ambient conditions (27 ± 2 oC) and the flow rate was 10.49 ml/min for all trials. This gave a flow rate 0.144 ml/min and a Reynolds number of 18.4 in the microchannels. After each run the silicon chip was removed from its test section and cleaned by spraying it down with deionized water. This was done to ensure that there was no build up of particles in the channels that could adversely affect subsequent experiments. Table 3: Statistical distribution of silica particles Particle diameter 3 µm 10 µm D50* (µm) 2.8 3.6 D90* (µm) 6 7.8 2.0 4.0 6.0 8.0 10.0 12.0 -20.0 -40.0 -60.0 -80.0 -100.0 pH Figure 4: General zeta potential vs. pH curves for silica and silicon. Figure 3: Experimental flow loop used in microchannel fouling studies. ∆P is a differential pressure transducer while T1 and T2 are inlet and outlet temperature thermocouples. B. Data Acquisition A data acquisition (DAQ) system monitors the thermocouples and pressure transducers in the flow loop. The DAQ is based upon the signal conditioning SCXI system from National Instruments. This system conditions all incoming signals and gives the ability to have high channel counts. The DAQ system used is capable of sampling at a rate of 100,000 samples per second. The fast sampling is used to increase the accuracy. The procedure for data collection begins with the sampling rate. The channels are sampled at a rate of 1.0 kHz. The data collected is in a waveform. The channel information contains both amplitude and frequency information. For each experimental data point 500 samples from every channel are collected (pressure, temperature, etc.). The uncertainty in the temperature, flow rate and pressure measurements are given in Table 4. The pressure uncertainty is larger than it might be for a gear type pump. This is because with a peristaltic pump the rollers that move the fluid create pulsations. Even so the uncertainty in the pressure measurement was only 360 Pa. Table 2: Physical properties of silica particles Particle diameter 3 µm 10 µm 3 Average Density (g/cm ) 2.40 2.65 Percent Purity 99.94 99.4 Table 4: Uncertainty in experimental measurements Parameter Uncertainty Temperature 0.05 oC Flow Rate 0.03 ml/min Pressure 360 Pa 4 Copyright © 2006 by ASME Test Section Design The design of the test section used to conduct the experiments is discussed here. The test section is located in the flow loop schematic and provides support for the device. In addition, it is a platform that contains the electrical and fluidic connections necessary for data acquisition. This is shown in Figure 7. The cover piece has the same overall dimensions as the silicon substrate. The thickness of the cover plate is 600 µm. The cover piece is laser drilled with two holes to match with the location of the inlet and outlet headers. The diameter of the plenum holes is 1.5 mm. C. Test Device The geometry of the microchannels that have been fabricated is presented in Table 5. Figure 5 shows the location of the geometric variables used in Table 5 where a is the microchannel width, s is the fin thickness separating the microchannels, b is the depth of the microchannels, L is the total flow length of the microchannels and n is the number of microchannels. The total width and length of the microchannel array is 8 and 10 mm respectively. s a Figure 6: Picture of silicon microchannels. b Figure 5: Schematic of the geometrical parameters of the microchannels. Figure 7: Diagram of silicon microchannels with Pyrex cover plate. Together these form the complete test device. Table 5: Channel geometries of test device b (µm) a (µm) s (µm) pitch (µm) n L (mm) 220 70 40 110 73 10 The microchannels were fabricated in silicon using deep reactive ion etching (DRIE) because very high aspect ratios with straight sidewalls can be achieved with this etching technique. 8-inch wafers were used in the fabrication so the unetched substrates have a thickness of 725 µm. Figure 6 shows an example of the silicon microchannels. There are also inlet and outlet headers formed in the silicon. The back side of the header is rounded to help direct the flow and minimize stagnation regions. Finally, the entrance to each channel is rounded to reduce the pressure drop due to entrance effects. The radius of curvature of the channels is one half the fin thickness, s. The temperature and pressure are measured in the plenums. The plenums were carefully designed to allow for sufficient volume to reduce the fluid velocity. This ensures that only the static pressure is measured since the dynamic pressure component is very small. The silicon chip is sealed with a Pyrex cover to form a fully functional microchannel device. D. Test Section The test section was constructed with black Delrin (DuPont trade name for acetal polyoxymethylene) which is an acetal resin. It is a lightweight polymer that is very stable and is capable of being machined to fairly high tolerances. The test fixture is comprised of the following major parts: a main block, pogo block, bottom retaining plate, device retaining plate and mounting plate. The pogo block is part of the test section where high current pogo probes may be place for electrical connections to the backside of the chip. This however, was not utilized in the present investigation because a heat flux was not being applied to the microchannel chip. The pogo block is placed in the main block and secured with a bottom retaining plate. A Teflon spacer is placed between the pogo block and silicon chip for added support. Figure 8 shows the pogo probe block with the pogo probes inserted into it. The pogo probe block is inserted into the main block shown in Figure 9. The entire test section assembly can be seen in Figure 10. A critical part of the test fixture assembly is the device retaining plate shown in Figure 11. It provides the clamping force on the microchannel test section and fluidic connections. 5 Copyright © 2006 by ASME This piece is made of Lexan (trade name) which is an optically clear polycarbonate material. The fluid enters the piece and moves into an inlet plenum. The fluid then enters the test device and leaves through the exit plenum. Figure 12 illustrates the stacked layer of materials used between the pogo block and device retaining plate. There are three thin pieces of silicon rubber membrane 200 µm thick which resides between (1) the pogo block and Teflon spacer, (2) the Teflon spacer and silicon chip and, (3) the test device and device retaining plate. The silicon rubber membranes help provided compliance during assembly. With it a good seal is provided and breaking of the test device is prevented. Two miniature thermocouples are placed in the plenums. The thermocouples have a small bead diameter of 0.5 mm in order to minimize their effect on flow disturbance. In addition, they are coated with an epoxy which prevents their corrosion. Figure 10: Test fixture assembly. Pogo probe block Pogo probes Figure 8: Pogo probe block with probes inserted. Figure 11: Device retaining plate. Figure 9: Main block which pogo probe block fits into from underneath to help support microchannel chip. Silicon rubber membrane Pyrex cover Silicon microchannel chip Teflon spacer Pogo probe block Figure 12: Side view of material stack with silicon membrane material to provide a good seal and prevent fracturing of the test device while under compression. 6 Copyright © 2006 by ASME RESULTS AND DISCUSSION The experimental results are given in Figures 13 – 16 while Figures 17 – 19 display the corresponding theoretical curves related to the removal and adhesive forces acting on the particles. The theoretical curves were calculated for a temperature of 25oC which corresponds within the experimental range of the data. Figures 13 and 14 show an expected trend with particulate concentration for the 3 and 10 µm diameter spheres. The fouling rate is seen to increase at greater particle concentrations. A comparison of the figures demonstrates that the larger particles can be present at higher concentrations than smaller sizes particles and still maintain a lower rate of fouling or pressure drop after a given amount of time. Both figures show that the fouling rate is not constant and the pressure drop fluctuations become more erratic at higher particle concentrations. This can easily be observed from the characteristic “saw tooth” curve. This is the result of built up deposits that become dislodged from time to time. There is some visual evidence that this is occurring in the microchannels. Due to the erratic nature of fouling, significant fluctuations in pressure drop are seen. This necessitates a fair number of experimental runs to develop correlations to accurately predict this phenomenon. Figure 15 illustrates that for identical concentrations smaller particles will result in greater fouling. This is primarily because the lift force significantly decreases for smaller particle sizes since it is related to the fourth power of the particle diameter. This is quite evident by comparing Figures 17 and 18. The lift forces for both particle sizes are listed in Table 6. Table 6: Lift force for various particle sizes Particle diameter (µm) Lift Force (N) 3 7.50x10-12 10 9.26x10-10 The effect of pH on fouling is significant. This is observed in Figure 16 for the 3 µm particle diameter. The pressure drop decreases from about 110 to 37 kPa (66 %) after 24 hours of operation. This is because of the increased electrostatic forces between the particles and the wall which provides a greater removal force. The effect of increasing Fel with pH is observable in Figure 19 for the 3 µm particle. This effect is not seen at all separation distances. However, from the experimental data it would appear that it is the value of RM for separation distance under 80 nm which is important. This is most likely because at shorter distances the force of repulsion from Fel is greater. As can be seen from all theoretical curves the effect of gravity was negligible compared to the other forces under consideration. This is because the particles in this study were too small and hence did not possess enough mass for the force of gravity to play a significant role. Figure 13: Test section pressure drop vs. time for different particle concentrations of 3 µm diameter spheres, pH = 5.5. Figure 14: Test section pressure drop vs. time for different particle concentrations of 10 µm diameter spheres, pH = 5.5. Figure 15: Test section pressure drop vs. time for 3 and 10 µm particle sizes with identical particle concentrations of 0.0037 wt%, pH = 5.5. 7 Copyright © 2006 by ASME Figure 16: Test section pressure drop vs. time for 3 µm particle size with a concentration of 0.0037 wt%, for pH values of 5.5, 7.5 and 10.3. Figure 18: Force vs. sphere-plate distance for 10 µm particle with a pH of 5.5. 1400 1200 1000 800 600 RM pH = 5.5 pH = 7.5 pH = 10.3 400 200 0 0 20 40 60 80 100 120 140 160 180 200 -200 -400 Distance (nm) Figure 19: RM vs. sphere-plate distance for 3 µm particle for pH values of 5.5, 7.5 and 10.3. Figure 17: Force vs. sphere-plate distance for 3 µm particle with a pH of 5.5. CONCLUSIONS From the results of this fouling study the two most important factors were found to be the particle size and solution pH. The larger the particle size the larger the lift force available to help repel particles from the channel walls. The effect of pH was significant as well. Fouling was mitigated by using solutions with higher pH values. A 66 % decrease in the pressure drop was observed after 24 hours of operation when the pH was increased from 5.5 to 10.3 for the 3 µm particle size. 8 Copyright © 2006 by ASME ACKNOWLEDGEMENTS The authors are thankful for the support of the Microsystems Engineering program and Thermal Analysis and Microfluidics Laboratory at the Rochester Institute of Technology. The second author acknowledges the IBM Faculty Award in support of this work. NOMENCLATURE a A b D50 D90 Dh dp e f Fel Fg FL FT Fvdw g h k L n Re RM s T U ys z Greek αc δ εo εr κ λ µf ρf ρp τw ψd ψo ζ channel width, m Hamaker constant, J channel depth, m 50 percentile of particle diameter 90 percentile of particle diameter hydraulic diameter, m diameter of particle, m elementary electric charge, c Fanning friction factor electro static force, N gravitational force, N lift force, N total force acting on particle, N van der Waals force, N acceleration of gravity, m/s2 minimum separation between the particle and wall, m Boltzmann constant, J/K·molecule channel length, m electrolyte concentration, ions/m3 Reynolds number ratio of the removal forces to adhesive forces fin thickness, m absolute temperature, K interaction energy, J dimensionless surface potential electrolyte valance charge channel aspect ratio = a/b Stern layer thickness, m dielectric permittivity of a vacuum, F/m2 dielectric constant of the medium Debye-Huckel parameter, 1/m characteristic wavelength of interaction, m viscosity of fluid, kg/m-s density of fluid, kg/m3 density of particle, kg/m3 shear stress at channel wall, N/m2 Stern potential, V surface potential, V zeta potential, V REFERENCES Gregory, J., Approximate expressions for retarded van der Waals interaction, Journal of Colloid and Interface Science, vol. 83, 138-145, 1981. Hogg R., Healy T.W. and Fuerstenau, D.W., Mutual coagulation of colloidal dispersions, Trans. Faraday Soc., 62, 1638-1651, 1966. Holmberg, K., “Handbook of Applied Colloid & Surface Chemistry”, John Wiley & Sons, ch. 9 & 10, 2001. Kandlikar, S.G. and Grande W.J., Evolution of microchannel flow passages-thermohydraulic performance and fabrication technology, ASME Int. Mechanical Eng. Congress and Exposition, 59-71, 2002. Kandlikar, S.G., Kuan W.K., Willistein D.A. and Borrelli, J., Stabilization of flow boiling in microchannels using pressure drop elements and fabricated nucleation sites, Journal of Heat Transfer, vol. 128, 1-8 , 2006. Kern, W., “Handbook of Semiconductor Wafer Cleaning Technology: Science, Technology, and Applications”, Noyes Publications, ch. 4, 1993. Leighton D. and Acrivos A., The lift on a small sphere touching a plane in the presence of a simple shear flow, Journal of applied mathematics and physics (ZAMP), vol. 36, 174-178, 1985. 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