Technology of Electronic
Devices – a Single Course
Gratiela Isai
Ton Mouthaan
16/04/2004
1
Purpose
In the era of integration
To realise an integrated education
To make ONE Technology course
16/04/2004
2
Outline
•
•
•
•
•
Introduction
Differences between technology courses
Advantages of a single course of technology
Technology course organization
Conclusions
16/04/2004
3
Introduction
• Importance of Technology course
ƒ
fabricate and design various microsystems
ƒ
tools for development of future devices
• Different groups have different courses on
device fabrication
ƒ
70-80% of information is identical
• A single modern course can be beneficial
16/04/2004
4
Why different technology courses?
16/04/2004
Groups
Courses
Transducers Science
and Technology
MEMS based technology
Semiconductor
Components
IC technology
Systems and Materials
for Information Storage
Technology for transducers
5
Why different technology courses?
Different groups use different properties of the materials:
16/04/2004
Groups
Properties
Transducers Science
and Technology
Mechanical properties
Semiconductor
Components
Electrical properties
Systems and Materials
for Information Storage
Magnetical properties
Integrated Optical
MicroSystems
Optical properties
6
Why a single technology course?
• The basic processes are
the same:
ƒ
ƒ
ƒ
ƒ
ƒ
16/04/2004
film deposition/growth
lithography
etching
implantation
packaging
7
Advantages of a single technology
course
• Reducing the number of
courses with similar
material
• Learning how to integrate
various devices on the
same wafer
MEMS fabrication
Burial and
planarization
of surface
CMOS
fabrication
ƒ
ICs and MEMS
ƒ System on a chip
16/04/2004
Release of MEMS
8
Advantages of a single technology
course
• Knowledge and skills broadened
in more areas
• Learn how to make connections
between various areas
• Learn how different technolgies
were created by modifing existing
technologies: useful for future
16/04/2004
9
Technology course content
1.
2.
3.
4.
5.
6.
7.
8.
16/04/2004
Introduction
Substrate selection
Film deposition and growth
Modifying the film structure/properties
Defining patterns
Materials and process characterization
Integration of process steps to build devices
Future (nanotechnology)
10
Technology course organization
• Modern course
ƒ
Animations
ƒ Movies from Clean Room
ƒ Tests
¾
¾
ƒ
for self-learning
decreasing barrier between theory and problems
Task-oriented: How to make a microfluidic device?
¾
16/04/2004
very important for industry
11
Implementation in IPCI model
• Offers students and professionals a few webbased modern courses in electronics
• http://fett1430-1.tu-sofia.bg/ipci/
• Courses: Technology of microelectronic devices
ƒ
Tasks: Build several devices
¾
Tutorials: How do you choose the suitable deposition method
– Chapters: Plasma enhanced CVD, Wet etching
¾
16/04/2004
Tests: multiple choice questions
12
SiO2 deposition
C:\Documents and Settings\BOGDAN\Desktop\Meeting grenoble\SIO2 deposition.html
16/04/2004
13
Interactions particle-surface in a plasma
C:\Documents and Settings\BOGDAN\Desktop\Particle-surface interaction.html
16/04/2004
14
Technology course organization
• Connections with material
science
• Indicate elements that are
common and elements that are
specific for each area
• Comparisons, for choosing the
apropriate technique
16/04/2004
Structure
Properties
Fabrication
15
Nanotechnology
• Gives an image of the future
• Important information for the
present students = future
engineers
• Challenging and inspiring
16/04/2004
16
Conclusions
• Technology of microelectronics contains
fundamental knowledge for students
ƒ
ƒ
ƒ
ƒ
Multitude of possibilities and applications realized with
the same fundamental process steps
Ability to address the fundamental issues in technology
instead of learning only about fabricating a particular
device
Integration of devices
A broader knowledge and flexible expertise
16/04/2004
17