j. . . . . . . . ELSEVIER CRYSTAL GROWTH Journal of Crystal Growth 172 (1997) 323-336 Eddy current determination of the electrical conductivity-temperature relation of Cdl_xZn xTe alloys Haydn N.G. Wadley *, Bill W. Choi Intelligent Processing of Materials Laboratory, School o["Engineering and Applied Science, Unicersity of Virginia, Charlottesville, Virginia 22903, USA Received 21 August 1995; accepted 17 April 1996 Abstract A multifrequency eddy current sensor has been installed in a vertical Bridgman furnace and used to measure the electrical conductivity of Cd l_XZn,Te alloys (for x = 0, 0.045 and 0.08) as a function of temperature during heating and cooling through the melting transition. The conductivity of the x = 0.0 and 0.08 samples increased exponentially with temperature up to the melting point. A 4 - 6 fold increase of conductivity accompanied melting, sufficient for the proposed eddy current sensing of liquid-solid interfaces in this materials system. Above the melting point, the liquid phase conductivity again exponentially increased with temperature. The x = 0.045 sample exhibited similar behavior except in a ~ 30°C interval immediately below the melting/solidification transition on heating and cooling. In this temperature interval, an "anomalous" decrease in conductivity with an increase in temperature was repeatedly observed. Zn has been found to depress the liquid conductivity while that of the solid (near its melting point) exhibited a weak maximum in conductivity at x = 0.045. These observations raise the possibility of eddy current monitoring of melt composition and segregation/homogenization behaviors during post-solidification annealing. 1. Introduction Single crystal Cd 1_ ,Zn~Te ( x = 0.045) solid solution alloys are used as substrates for the epitaxial growth of Hg I - ~Cd ~Te thin film infrared focal plane array (IRFPA) detectors [ 1]. As detector manufacturers seek to increase the size and number of IRFPAs per substrate, a demand has been created for large area substrates with low defect densities, uniform distributions of Zn and high infrared transmission coefficients. Either a vertical or horizontal variant of the Bridgman method can be used for the growth of this substrate quality material [1-3]. Unfortunately, * Corresponding author. both the seeded and unseeded growth of vertical Bridgman grown material is usually multigrained with significant Zn segregation (0.02 < x < 0.07), Te precipitation and a sometimes high density of dislocations [3,4]. In spite of many experimental efforts to investigate the relationships between material purity, the controllable growth parameters and the resulting m a t e r i a l c h a r a c t e r i s t i c s [5,6], the y i e l d o f C d l _ ~ Z n , Te of a quality suitable for large area substrates remains disappointingly low ( < 10%). Since much of the poor yield is directly associated with the growth process (e.g. melt stoichiometry, solidification velocity, interface shape, temperature gradients, cooling rate, etc.), intensive efforts are under way to improve this technology. 0022-0248/97/$17.00 Copyright © 1997 Elsevier Science B.V. All rights reserved PII S0022-0248(96)00497-6 324 H.N.G. Wadley, B.W. Choi / Journal qf CP3'stal Growth 172 (1997) 323-336 One approach involves the in situ monitoring of the growth process with multifrequency eddy current sensors [7-13]. The potentially large difference in electrical conductivity of many solid and liquid semiconductors [7,14,15] has led to the proposed use of eddy current sensors for monitoring the liquidsolid interface during crystal growth [7,8,12]. The relationships between an eddy current sensor's frequency response, the electrical conductivities of the solid/liquid and the position/curvature of the liquid-solid interface are complex. Recent electromagnetic finite element modelling has identified several concepts to recover the interface shape during vertical Bridgman growth [8,12], and a companion paper [16] explores their application to Cd0.%Zn0.0aTe. The companion study has also revealed potential applications of eddy current sensors for monitoring the composition of the liquid prior to solidification and observing segregation related phenomena in the solid during post-growth annealing. In order to realize the potential of eddy current sensing, reliable electrical conductivity data as a function of temperature and Zn concentration are needed for both the solid and liquid phases of Cdl_,Zn.,Te alloys over the range of Zn concentrations and temperatures likely to be encountered during vertical Bridgman growth. Comparatively little data relating the electrical conductivity of CdTe to temperature exist for the elevated temperatures encountered in crystal growth, and no data have been published concerning the role of Zn upon the conductivity of Cd~_ ~Zn,Te alloys at high temperature. This has arisen because of the difficulty of making ohmic contacts with semiconductors containing volatile elements like Cd. The temperature and composition dependence of the electrical conductivity of equiatomic CdTe has been investigated by Glazov and coworkers using an electrodeless induction method [ 14,15]. Glazov et al. observed the electrical conductivity of the solid to gradually increase with temperature up to a value of a few hundred S / m in the 10001040°C temperature range. An abrupt rise in conductivity commenced at about 1045°C. During this transition, the conductivity increased by about one order of magnitude and was then followed by a non-linear variation of conductivity with temperature between 1045 and l l00°C. In other semiconductors [15], the abrupt rise in conductivity normally accompanied melting, but in the Glazov et al. experiment it occurred more than 40°C below the accepted melting point of 1092 _+ I°C for equiatomic CdTe [16,17]. Several factors may have contributed to the anomalously low temperature where the conductivity discontinuity was observed. Glazov et al.'s thermometry may have been inaccurate because of the small sample size and the potentially large errors associated with contact thermocouple measurements. A second possibility is that the composition tested may not have been that of equiatomic CdTe due to the high vapor pressure of Cd near the melting point and the significant free volume present in their ampoules [18]. It is also unclear if the trends in conductivity reported by Glazov et al. [14,15] on heating would also occur during cooling. In this study, the electrical conductivities for both solid and liquid CdTe, Cd095sZn004sTe and Cd092Zn00sTe contained in quartz ampoules with very small free volumes have been deduced from multifrequency eddy current sensor data collected in a multi-zone furnace assembly. The temperature and Zn concentration dependence of the electrical conductivity has been obtained for the solid and liquid phases between ~ 650 and 1150°C. 2. Experimental procedures 2.1. Eddy current measurement technique Eddy current testing has become a widely used method for non-destructive materials evaluation and inspection [19-21]. |t enables quantitative measurements of material properties such as electrical conductivity or magnetic permeability, the dimensions of conducting samples via lift-off effects, as well as the detection of crack-like discontinuities in metals. The principle underlying the eddy current method is electromagnetic induction [20,21]. Fluctuating electromagnetic fields are created within the test object by passing an alternating current through a nearby primary (driving) coil. These fluctuating electromagnetic fields are used to induce eddy currents in the test object. The eddy currents in turn create a secondary electromagnetic field which perturbs that of the primary coil. This can be sensed either as a change in the impedance of the primary coil (the H.N.G. Wadley. B. W. Choi / Journal qf Co'stal Growth 172 (1997) 323-336 1.0 '~\ E (3) "'%,(s = 1.2MHz ,, 0.9 - ......-t(~. ~ ~.7 ! - ,, E o \ (..) N \\ , 0.8-- -- ~r'a'fL = " 2 M H z IE 0.7- - ~' 325 where X(c~) is a reference number that has been published in tabulated form [19,20]. Best precision is obtained for intermediate values of o~ (19°_< a_< 770), where the electromagnetic skin depth is about half the sample radius. Values of X(o~) for an infinite cylindrical sample contained in the uniform field of a long solenoid are also well fitted by a polynomial expression: X(oe) = 12.083 - 0.5944c~ + 1.460 × 10 2oe2 / N o z - 1.686 × 10 40~3 q- 7.193 × 10-70~ 4. / / 0.6- (2) / // - .... 0.5 0.0 Liquid (~t = 5,873S/m) Solid (~, = 1,377S/m) I 0.1 0.2 0.3 N o r m a l i z e d Real Z C o m p o n e n t Fig. 1. Typical normalized impedance diagram for an eddy current sensor containing a solid or liquid semiconducting cylinder whose conductivity increases upon melting. If the angle o~ is measured at a specific frequency, f, then provided the sample radius, a~ and magnetic permeability, #, are known, the electrical conductivity, o-, can be obtained using precalculated values of X(o~). basis of single coil test methods, e.g. Ref. [13]) or by monitoring the emf induced in a nearby secondary coil (the two coil method analyzed in Ref. [8]). The eddy current magnitude is directly affected by the test material's electrical conductivity, its magnetic permeability, and the test frequency. The non-contact measurement of impedance of the eddy current test coil at frequencies where the electromagnetic skin depth is about one-half the sample's radius then enables the sample's electrical conductivity or magnetic permeability to be deduced with relatively good accuracy [20,21 ]. Work by Libby [20] and Forster [21] showed that if a long cylindrical sample is contained in a long solenoid (i.e. in an axially uniform field), an impedance curve of the type shown in Fig. 1 is obtained. The sample's electrical conductivity, o', its magnetic permeability, #, the sample radius, a, and the angular test frequency, o), are related to a frequency dependent angle, c~, through To compute a precise conductivity using Eqs. (1) and (2) requires the measurement of the angle, c~, at known frequencies, together with knowledge of the sample radius, a, and its magnetic permeability, p,. For non-magnetic semiconductors, the free space permeability (4~-x 10 7 H / m ) can be used for ~, and a can be obtained by a combination of an ambient temperature physical measurement coupled with a calculation of thermal expansion. In the solid state, the sample's diameter will be governed by the thermal expansion of the Cd I ~Zn, Te sample. However, in the liquid state the diameter will be defined by the internal diameter of the quartz ampoule used to contain the charge. Coefficients of thermal expansion for both materials are reasonably well established [22]: ~CT = 4.865 + 1.85537 × 10 3T, (3) sCo = 0.403 + 5.466 × 10-4T - 4.623 X 10 7 T 2 , (4) where ~CT and ~Q are the thermal expansion coefficients (in units of 10 6 K - l ) for CdTe and quartz respectively and T is the absolute temperature. The sample diameter can also be obtained from high frequency eddy current measurements provided the measurement system can attain skin depths that are small in comparison with the sample radius, a [16]; but this is unlikely for poorly conducting solid Cd t ,Zn ,.Te alloys. The CdTe sample's diameter for the data shown in Fig. 1 was 28.5 mm and so the deduced conductivity of the solid was o-~ = 1377 S / m , while that of the liquid was o-/= 5873 S/re. 326 H.N.G. Wadley, B. W. Choi / Journal of Co'sml Growth 172 (1997) 323-336 phase (g,4~) remeasured. The real and imaginary components of the normalized impedance, Z, are then given by g R e ( Z ) = - - s i n ( 4~ - d~0), go g I m ( Z ) = - - c o s ( ~ b - ~b0). go (5) (6) 2.3. Sensor design for L,ertical Bridgman growth ~ Sample Electrical conductivity, c Magnetic permeability, I.,t Fig. 2. A schematic circuit diagram of the two coil impedance measurement system. 2.2. Sensor approach A two coil sensor technique, Fig. 2, has been used to obtain impedance curves suitable for determining the electrical conductivity of Cdl_~ZnxTe alloys. A primary coil excited by a sinusoidally varying current was used to induce a reasonably uniform electromagnetic field of variable frequency in the sample. A secondary pick-up coil then sensed the perturbations to this field created by the sample. The main advantage of the two coil eddy current sensor approach is that effects of temperature induced resistance changes to the coils can be minimized by using a high impedance measurement of the induced secondary coil voltage, ~ , whilst simultaneously monitoring the current flow, 1t,, in the primary coil [16,19]. The gain ( g ) and the phase (4~) of the two coil system can be conveniently measured with a multifrequency impedance/gain-phase analyzer by monitoring V~ on the analyzer's test channel and I v (via the voltage drop, VR, across a precision resistor connected in series with the primary coil) on the analyzer's reference channel as shown in Fig. 2. To obtain a normalized impedance curve suitable for deducing the conductivity via Eq. (1), the gain and phase difference of these two voltages is obtained for the empty coil condition, (go and d~0) at each test frequency for each of the test temperatures. The test object is then placed in the sensor and the gain and A schematic design of the encircling two coil eddy current sensor is shown in Fig. 3 along with a detail of the furnace geometry in which it was installed. The sensor windings were wound on a high machinable alumina ceramic mandrel. Grooves were machined on this mandrel with the same dimensions (depth and width) as the winding wires in order to limit movement of individual coil turns during heating/cooling. 1.02 mm diameter platinum wire was used for the eight-turn, 50.8 mm long (i.e. four turns per 25.4 ram) primary coil. 0.25 mm diameter platinum wire was used to wind a four-turn 12.5 mm long secondary coil. To maximize the potential fill factor (i.e. the ratio of the sample and secondary coil areas), the grooves for the secondary coil were machined on the inner surface of the primary coil mandrel, Fig. 3b. Approximately 0.6 m long Nextel sleeved platinum lead wires were used to connect the sensor to two pairs of terminals located at the bottom of the furnace. Connections to an impedance analyzer were made with a pair of 1.2 m long 50 coaxial cables. Multifrequency impedance measurements were performed using a Hewlett Packard 4194A impedance/gain-phase analyzer. A RF power amplifier was used to increase the primary current Ip and thus to enhance the voltage signal monitored across a 1 f~ precision resistance in the primary test circuit. An attenuator was used in the line to the test channel to prevent overloading of the secondary coil signal. The multifrequency measurement was automated using a basic program on a personal computer in conjunction with a program installed in the impedance analyzer. The program on the analyzer recorded test and reference channel voltages for 101 logarithmically spaced frequencies between 50 kHz 327 H.N.G. Wadley, B.W. Choi / Journal of Crystal Growth 172 (1997) 323 336 a) Furnace Geometry b) Sensor~SampleConfiguration 0 127mm ~-~ ~ 36mm----~ 30mm "~1 pie Secondary furnace Main furnace AluIT Jary p) coil ¢ , coil a eddy :sensor Fig. 3. (a) A schematicdiagram of the verticalBridgmanfurnace; (b) detail showingthe sensor configuration. and 5 MHz. It then calculated the gain and phase angle difference and the normalized impedance components at each frequency. The basic program activated the m e a s u r e m e n t periodically during heating/cooling of the sample and stored the impedance data together with the parametric temperatures. An error analysis methodology for this measurement approach is developed in Ref. [11]. 2.4. Calibration procedure To ensure conductivity values obtained with this approach are accurate, it is necessary to use values of obtained near the " k n e e " of the impedance curve, i.e. 2 0 ° < a < 60 °, where the skin depth is about a half the sample radius. For low conductivity materials like solid CdTe, this could require the use of high test frequencies extending to 10 MHz or above. However, this can introduce other "test circuit" contributions to the measured impedance and result in erroneous conductivity values. The finite lengths of both the sample and the sensor can also perturb the axial uniformity of the excitation field assumed for the calculation of X ( a ) . The field can also be perturbed by conducting components of the furnace used for high temperature measurements. It is thus advisable to calibrate the measurement methodology using standard reference samples of known conductivities spanning the range of values expected for the test material. Since the electrical conductivity of solid ( ~ 1000 S / m ) and liquid ( ~ 8000 S / m ) CdTe at the melting point are relatively low [ 14,15], three ( 111 ) oriented doped silicon bars with known conductivities (measured by a four-point probe technique) similar to those of solid and liquid CdTe were used for the calibrations. The three reference samples (designated MNl-1861, MPO-5792, JME-31844) consisted of 152 mm long, 28.5 mm diameter mirror grade silicon cylinders provided by Lattice Materials Co. The conductivities of these reference samples were then calculated using the eddy current methodology above, and compared with the four-point probe measurements. The reference samples were also used to H.N. G. Wadley. B. W. Choi / Journal o[" Crystal Growth 172 (I 997) 323 336 328 check the test setup in this way before and after each 2.6. Preparation and precompounding of samples run. 2.5. Temperature profile in furnace A two-zone 75 mm diameter furnace was used for the experiments, Fig. 3. The furnace was equipped with temperature controllers that were able to maintain the temperature set points to better than 0.5°C. The axial temperature profile of the main furnace assembly was measured from the tip of an empty quartz ampoule (of identical diameter to that used later to contain Cd~ xZn~Te specimens) to the top of the furnace using a single probe R-type thermocouple as shown in Fig. 4. Temperature profile data as a function of distance from the ampoule tip were obtained over the complete range of furnace set point temperatures used in subsequent experiments. The maximum axial temperature variation of the region interrogated by the sensor was + I°C, The Cd~ ,Zn~Te samples were contained in 33 mm ID quartz ampoules. When Cd containing compounds are in contact with quartz for extended periods of time at high temperature, cadmium meta silicate (CdSiO~) can form [23]. This can create defects in the quartz walls and breakage of the ampoules. To avoid this problem, a thin glassy carbon layer was deposited on the inner surface of the quartz ampoule. The quartz ampoule was first cleaned with a 20% HF solution for 10 rain and then etched in a 70% HCI and 30% H N Q solution for 1 h. It was rinsed with distilled water, evacuated to below 10 - 4 TOIT and held at 900°C for 4 b. The outside of the ampoule was subsequently heated with H z/argon torches and 2-propanol vapor injected into the ampoule until an opaque carbon deposit had formed on the inner surface. This was finally followed by a high temperature anneal to vitrify the carbon coating. 200 175 150 E e',, 125 Eddy current sensor O E 100 E ~ 75 e.-. Q 50 R type thermocouple 25 Fig. 4. The axial temperature profile within a quartz ampoule near the eddy current sensor location. H.N.G. Wadley, B.W. Choi/Journal o/Crystal Growth 172 (1997) 323 336 The equiatomic CdTe source material consisted of a precompounded polycrystal cast ingot grown by Johnson Matthey Electronics. This was broken into pieces small enough to fit into the quartz ampoule. These material pieces were cleaned by sandblasting (to remove gross surface contamination) followed by immersion in a solution of 5% bromine in methanol for 2 rain and then five consecutive rinses in methanol baths. A total of 600 g of CdTe were loaded into the carbon coated quartz ampoule and sealed under 10 6 Tort with a very small free volume to reduce the evaporation of Cd during subsequent high temperature experiments. The Cd0.955Zn0.45Te sample was prepared from a precompounded polycrystalline ingot using similar procedures to the equiatomic CdTe sample. The Cd0.92Zn00sTe sample was synthesized by recycling the equiatomic CdTe sample to which was added sufficient 99.99995% purity Zn and Te to reach the target composition. 2.7. Test methodology The eddy current sensor was installed in a multizone vertical furnace, Fig. 3a. The sensor and test sample were placed on top of a cylindrical mullite insulator support assembly. The sample temperature was measured with two type R thermocouples; one was located in the annular gap between the quartz ampoule wall and the inner ceramic preform of the sensor (thereby shielding it from the direct heat source); the other was located at the top of the ampoule. In both cases, the thermocouple was in physical contact with the outer surface of the ampoule. The data from the lower thermocouple could be also used to monitor solidification through its latent heat release. The electrical conductivity-temperature relationships for the samples described above were measured by first preheating the samples beyond their melting point to form a single cylindrical sample. The charged ampoule was then raised to 1122°C, held at this temperature for 1000 rain to homogenize the melt, cooled down to 600°C at a rate of approximately 0.7°C/rain, and finally furnace-cooled to reach room temperature. Gain and phase measurements were subsequently made during reheating from room temperature to 1150°C and then back to ambient temperature. At low temperatures, the conductiv- 329 ity was only a weak function of temperature, and so the conductivity was measured every 10°C. However, close to and above the melting point, the conductivity was measured at I°C intervals. Great care was taken to ensure that thermal equilibrium was reached (and maintained) at each measurement temperature. The ingot was maintained at each test temperature until the eddy current sensor indicated a quiescent impedance response. This sometimes involved holding the temperature for up to 10 h (usually during the melting/freezing transition). 3. Results 3.1. Calibration experiments Since the measured impedance (and therefore the deduced conductivity) can be affected by the sensor's interaction with conducting components of the furnace and by impedance contributions from test circuit components, a series of calibration tests were conducted. Fig. 5 shows measured impedance data at ambient temperature for the JME-31844 (high conductivity) silicon calibration sample. Two sets of impedance curves are shown; one corresponded to a measurement made with considerably shorter cables 1.0 ¢-. (V ¢O CL =~,~OikHz 50 kHz ~ 1 2 5 0.9 % I n 200 kHz % 315 kHz E o I kHz o N 0.8 c 0.7 Q I 92 kHz ~,~" E 500 kHz 1.25 MHz 2 MHz (~ .N 0.6 o Z 0.5 0.4 0.0 JME -31844 sample ~-~"-! 3,15 MHz % \ ""-o 5 MHz ~ e Measured outside furnace ~ Measured inside furnace I i i i 0.1 0.2 0.3 0.4 0.5 Normalized real Z component Fig. 5. A c o m p a r i s o n of the impedance curves for the J M E - 3 1 8 4 4 sample m e a s u r e d outside and inside the furnace. H.N.G. Wadley, B.W. Choi / Journal q# Co'stal Growth 172 (1997) 323-336 330 Table l Uncertainties in the impedance components for calibration sample JME-31844 Frequency (kHz) Nominal Re(Z) Probable error in Re(Z) Nominal Ira(Z) Probable error in Im(Z) 50.0 125.6 315.5 500.0 792.4 1990.5 5000.0 0.04882 0.10798 0.16781 0.16169 0.13173 0.06998 0.10406 0.00010 0.00077 0.00039 0.00056 0.00084 0.00156 0.63928 0.99215 0.95683 0.84679 0.77378 0.72250 0.64747 0.50547 0.00033 0.00065 0.00210 0.00313 0.00372 0.03256 5.75525 whilst the sensor was located outside the furnace. The second corresponded to the situation used for the high temperature tests with the sensor positioned in the furnace and connected to the test equipment with 1.2 m coaxial connecting leads. Fig. 5 shows that when the sensor and sample were located outside the furnace, a conventional impedance curve was obtained. However, when the sensor was connected to the analyzer with 1.2 m coaxial cables, a non-standard impedance curve was obtained. Two primary differences were seen. At high frequencies (above 2 MHz), a " h o o k " appeared on the impedance curve. This originated from the increasing impedance contribution of the test circuit (particularly its 1.2 m long coaxial cables). Thus, the most significant consequence of the long leads necessary for use of the sensor in the furnace is an effective limit to the upper measurement frequency. At 792 kHz and 2.2 MHz small perturbations to the impedance response were also observed. These originated from interactions with conducting components in the furnace. Data collected at these two frequencies were therefore excluded from the subsequent conductivity analysis. The gain and phase measurement accuracies for the empty and sample filled sensor were used in the error analysis developed in Ref. [11 ] to calculate the uncertainties in the computed real and imaginary components. Table 1 shows the calculated uncertainties in the 50 kHz-5 MHz frequency range for the high conductivity silicon sample and indicates that the error rapidly increased above 2 MHz. However, if the operating frequency range is restricted between 50 kHz and 1.2 MHz, the incurred error is approxi- mately 0.41% of the nominal real impedance and 0.24% of the nominal imaginary impedance. These errors in impedance were then used to estimate the uncertainty in the conductivities obtained with the calibration samples in the test furnace. Fig. 6 shows plots of the apparent conductivity versus test frequency (and angle c~). Table 2 shows the conductivities (and standard deviations) deduced from the results shown in Fig. 6. Good agreement between the eddy current and 4point probe conductivities was observed when test data with intermediate a values were used. For each sample, a range of frequencies (values of ol) was always present where the conductivity was independent of frequency. In each case, the eddy current conductivity was within the range of values measured by the 4-point probe method and it was concluded that no corrections to the data were necessary provided data from the region of frequency independent conductivity were used. 3.2. CdTe sample Eddy current measurements with an equiatomic CdTe sample were performed systematically under near thermal equilibrium conditions during heating from room temperature up to 1150°C and then cooling down to 600°C. At low temperatures ( < 700°C), the conductivity of equiatomic CdTe was too low to obtain an impedance curve with the present setup (measurements above 10 MHz would have been needed). However, once the temperature exceeded ~ 700°C, the conductivity increased to the point where usable impedance curves could be measured and, as the temperature was further increased, a more complete impedance curve developed. Fig. 7 shows representative impedance curves measured just below and just above the melting point and at the Table 2 Comparisons of conductivities obtained by an encircling eddy current sensor technique with 4-point probe measurements Ingot # MNl-1861 MPO-5792 JME-31844 Conductivity ( S / m ) Frequency 4-point probe Eddy current range (kHz) 1471-1149 6667-4000 11628-11234 1390_+60 5810 _+ 170 11700_+ 170 800-1200 300-700 120-300 H.N. G. Wadle~' B. W. Choi / Journal of Co'stal Growth 172 (1997) 323-336 highest test temperature of ll50°C. It can be seen that the frequency points abruptly moved clockwise along the impedance during the melting transition consistent with a rapid, significant increase in conductivity. The electrical conductivity was deduced for each test frequency using the procedures described above. Fig. 8a shows the resulting conductivity versus frequency relationship for data collected at 1094°C (just below the point where thermocouple data indicated melting). A significant variation in conductivity was observed at low frequency (between 50 kHz and 600 Angle o~ 10,000 87 ° 86 ° 84 ° 80 ° ~ , ~ ~ ~ (a) MNI 73 ° 331 Angle 66 ° ~ 53 ° 42 ° 79 ° 10,000 ~ (b) - 1861 74 ° MPO 65 ° 54 ° 41 ° 30 ° 20 ~ 14 ° - 5792 80O0 ! 8OOO E E 8000 oooo > = "(3 E O 4000 .~ 4000 Q L) 2000 2000 6 810 s 2 4 6 8106 4 6 8105 2 Frequency (Hz) 4 6 8106 Frequency (Hz) Angle 20,000 68 ° 59 ° 48 ° 36 ° I I I I I (c) JME 25 ° 18 ° 11 ° 8 o - 31844 17,000 E ~v14,000 ._~ > "O E O 11,000 (O 8000 5000 ,, ,11 810 s , 2 i i 4 , ,, 6 LJl 8106 I I 2 Frequency (Hz) Fig. 6. The frequency dependence of the electrical conductivity for calibration samples: (a) MN 1-1861 ; (b) MP0-5792; (c) JME-31844. 332 H.N.G. Wadlev B. W. Choi / Journal qf Crystal Growth 172 (1997) 323-336 kHz). However, in this frequency region the angle, oz, exceeded 77 ° and Eq. (1) was no longer valid because the electromagnetic skin depth exceeded the sample radius. As the frequency approached 800 kHz, the conductivity converged to a frequency independent value of 1320 _+ 60 S / m that could be used to characterize the sample. Increasing the sample temperature by I°C to 1095°C (and holding for 8 b) resulted in melting of 1.0 Hz the sample. Using Eq. (2) and assuming the liquid sample radius, a, was now governed by the thermal expansion of the quartz ampoule, the conductivity versus frequency relation was obtained and is plotted in Fig. 8b. Once again, low frequency data are invalid because of too large a skin depth, whilst data above 1.5 MHz were adversely affected by the onset of a test circuit resonance. This resonance occurred at a lower frequency than before because of the 1.o I E E O t-~ 0.9 O o tO O.. °°,2 MHz o o% E ° o N • 3.15 MHz ~ 15 kHz X e3 ._~ 500 kHz 0.8 792 kHz b ._c 0.7 g 0.7 ] .25 MHz E E -o o ._N 0.9 E 0.8 a kHz i 1 25 MHz ,m 0.6 -~ 0.5 E ~ O.5 o o o~ 0.6 MHz o 3.15 MHz o Z z (a) 0.4 0.0 CdTe (b) Heating 1094°C i I I I 0.1 0.2 0.3 0.4 0.4 0.0 0.5 CdTe I I J 0.1 0.2 0.3 0.4 Normalized real Z component Normalized real Z component 1.0 t- E O O. 180 kHz I 50 kHz " ~ = ~ 2 5 kHz - % , 00 kHz 0.9 ~ 315 kHz E O o 8 0.8 ~ U c:: 0.7 500 kHz 792 kHz E "O Heating 1095°C I ~ 1 . 2 5 MHz 0.6 ° ~o~2° MHz N ~P3.15 MHz o Z 0.5 (c) 0.4 0.0 CdTe i 0.1 Heating 1150°C i 0.2 i 0.3 i 0.4 0.5 Normalized real Z component Fig. 7. Normalized impedance diagrams for CdTe at different temperatures of: (a) 1094°C; (b) 1095°C; (c) 1150°C. 0.5 333 H.N.G. Wadley, B.W. Choi / Journal of Crystal Growth 172 (1997) 323-336 higher inductance of the more conductive test material. Nevertheless, for intermediate frequencies between 200 kHz and ~ 1 MHz, frequency independent conductivities were observed. The average conductivity measured in this region was 4830_+ 80 S/re. As the temperature of the liquid was gradually increased to l l50°C, each frequency point on the impedance plane diagram moved further clockwise around the impedance curve consistent with a continued rise in conductivity. The variation of conductivity with frequency at 1150°C is shown in Fig. 8c. Angle Angle 10,000 89 ° 86 ° 84 ° 82 ° 79 ° 72 ° 65 ° 52 ° 39 ° ~ , , , , ~ , , , 35 ° 83 ° ~ 10,000 (b) (a) CdTeHeating 1094°C 74 ° ~ 66 ° , 55 ° , 42 ° , 30 ° , 19 ° ~ 12 ° Heating 1095°C CdTe 8OOO 8O0O / E E 6000 8000 O 79 ° , O 4000 4000 0 0 0 0 2000 2000 ,, ,,1 , 8105 2 , , 4 , ,, ,,] , 6 8106 2 ,, ,,I , elO 5 2 (Hz) Frequency , , 4 Frequency , , , 6 ,,I , 8106 2 (Hz) Angle cc 15,000 77 ° 71 ° 62 ° 51 ° 39 ° 28 ° 20 ° 13 ° 9o I I I I I L I I [ (c) CdTe Heating 1150°C 13,000 E ~,~ 11,000 :i / i¢ "0 # 9O0O C 0 0 7000 I 5000 .... i 8105 6 h 2 , , 4 , , 6 , , ,I 8 106 I I 2 4 Frequency (Hz) Fig. 8. The frequency dependence of the electrical conductivity of CdTe at temperatures of: (a) 1094°C; (b) 1095°C; (c) 1150°C. 334 H.N.G. Wadlev B.W. Choi/Journal of Co'stal Growth 172 (1997) 323-336 Again low frequency data had a frequency dependent conductivity while the high frequency data were affected by the test circuit's resonance. This latter effect manifested itself at even lower frequency than before because the test material's inductance had further increased. The conductivity measured between 126 and 315 kHz was 9010_+55 S / m at 1150°C. Fig. 9a shows the temperature dependence of the electrical conductivity for equiatomic CdTe during both heating and cooling. Repeated heating/cooling cycles resulted in almost identical results. The conductivity increased exponentially with temperature during heating in either the liquid or solid state. This implies semiconducting behavior in both phases. By monitoring the ampoule temperature during heating, melting was observed to initiate at about 1094°C and during further heating appeared complete by 1097°C. Similar observations during cooling indicated that solid nucleated (after a small undercooling) at 1093°C and was complete by 1090°C. These melting/solidification transitions were accompanied by abrupt 10,000 10,000 a)r 8000 o i CdTe i r |i I I r ~ I I I | b) Cd0.955Zno.045Te 8000 Heating &- E Heating o • Cooling / J 1093 ° 1093 ° 6000 6000 ._~" I 1100 ~1096 ° .2 .> 1092 ° , ,1095 ° I "5 4000 4000 cO 0 O 0 1091 ° , 2000 1099' 2000 !1094 ° ol 70O - i I 800 J I I 900 I I I 1000 0 1100 I I 700 I 900 I I 1000 I I 1100 ij Temperature (°C) Temperature (°C) 10,000 I i I I c) Cd0.92Zno.08Te 8O00 I 800 ° Heating • Cooling E 1099 ° '1104~ 6000 > 0 4000 1098 ° 0 c) 1097 °' 2000 10960 1103 ° ~.,J 0 700 I I 800 I I 900 I I 1000 I 1102°I 1100 Temperature (°C) Fig. 9. The temperature dependence of electrical conductivity for: (a) CdTe; (b) Cdo.955Znoo45Te;(c) Cdo 92Zno.osTe. H.N.G. Wadley, B.W. Choi / Journal q[ Co'stal Growth 172 (1997) 323-336 changes in conductivity. The solid just prior to melting or immediately after solidification had a conductivity of ~ 1050 s / m while the liquid conductivity was ~ 6200 S / m . With the exception of a small ( ~ 3°C) temperature hysteresis during the melting/solidification region, the electrical conductivity at each measurement temperature was the same during heating and cooling. 3.3. Cdo.955Zno.o45Te sample 335 T: lO,000/ L (a) liquid , , , / 0000~ ~ 8000 ~ 700o O 6000 Fig. 9b shows the temperature dependence of the electrical conductivity for the Cd0.955Zn0045Te sample. At low temperatures, the solid's conductivity again increased slowly with temperature until the temperature reached about 1080°C, whereupon the conductivity started decreasing. This anomalous behavior was repeatedly observed, but did not occur with the equiatomic CdTe sample. During cooling, solidification occurred in the 1092-1093°C range. Further cooling resulted in an initial (anomalous) increase in conductivity, similar to the behavior observed during heating. The conductivity then gradually decreased as the temperature was lowered. 5000 0.00 0.04 0.06 0.08 X 2000 l (b) i ~ , ~ 1oBo,c ~" ._> , , , , i 0.06 i i 0.08 solid 1500 ~ lO7O'(; lo~,c ~ooo.c 1050"C 1ooo 500 o i 0.00 3.4. Cdo.92Zno.o~Te sample The variation of electrical conductivity with temperature for the Cd0.ezZn008Te sample is shown in Fig. 9c as a function of the temperature up to 1150°C. The conductivity variations in the solid and liquid showed trends similar to the equiatomic CdTe experiment. Melting occurred at 1102°C during heating, and solidification began at 1099°C on cooling. There was 6.45-fold increase in conductivity upon melting. This sample also exhibited semiconductorsemiconductor behavior during the melting/solidification transitions. Fig. 10 summarizes the dependence of conductivity on composition and temperature near the melting points for Cdl_xZnxTe alloys. Zn significantly reduces the melt conductivity. However, a weak maximum in conductivity is seen for the solid near the melting point at x = 0.04. For this composition, an anomalous conductivity-temperature behavior was also observed about 30°C below the melting temperature. The origin of this reproducibly observed phenomenon in unclear. 0.02 i i 0.02 ] i 0.04 i X Fig. 10. Summary of the temperature dependence of conductivity for (a) liquid and (b) solid Cd I_.~Zn,Te alloys as a function of zinc concentration. The large electrical conductivity changes upon the melting of CdTe reported by Glazov et al. [14,15] are confirmed and similar changes accompany the solidification of Cd L xZn,Te alloys. The melt is found to be 4 - 6 times more conductive than the solid. Semiconducting behavior (exponential conductivity-temperature relationship) is found in the solid and liquid phases. These solid ( ~ ) and liquid (o-/) conductivities and the relatively high c r / / ~ ratios appear sufficient for implementation of eddy current sensor concepts for monitoring the solidification interface during vertical Bridgman growth of Cd~ xZn,Te alloys as proposed in Ref. [8,11]. The observation of a significant dependence of conductivity upon composition and recently reported ambient temperature resistivity measurements for CdZnTe alloys as function of zinc concentration [24] suggests that eddy current sensing might provide insight into the corn- 336 H.N.G. Wadley, B.W. Choi /Journal of Co'sta I Growth 172 (1997) 323-336 position of the melt prior to solidification and perhaps provide some insight into Zn segregation and its redistribution during post-solidification annealing. 4. Conclusions A multifrequency eddy current methodology has been used to determine the conductivity of Cd 1 ,Zn~Te alloys with x = 0, 0.045 and 0.08 in the 700-1150°C temperature range. The solid and liquid states of these alloys usually exhibited semiconducting behavior with an exponential conductivity-temperature dependence. When the samples were heated through the melting point under quasi-equilibrium conditions (heating/cooling rates of < 0.1°C/min) a large 4 - 6 fold discontinuity in conductivity occurred within a degree or two of the accepted melting point. Zn was shown to depress the melt's electrical conductivity, but that of the solid exhibited a weak maximum conductivity near x = 0.045 near the melting point. The results suggest that the conductivity differences between the melt and solid are sufficient for the use of eddy current sensors to monitor the liquid-solid interface during vertical Bridgman growth. The significant dependence of conductivity upon composition also suggests the potential use of a sensor approach for monitoring melt composition, segregation and solid state composition homogenization phenomena. 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