CHARACTERIZATION
AND METROLOGY FOR
ULSI TECHNOLOGY
2003 International Conference on Characterization and
Metrology for ULSI Technology
Austin, Texas
24-28 March 2003
EDITORS
David G. Seiler
NISI Gaithersburg, Maryland
Main C. Diebold
International SEMATECH, Austin, Texas
Thomas J. Shaffner
NISI Gaithersburg, Maryland
Robert McDonald
SPONSORING ORGANIZATIONS
National Institute of Standards and Technology
International Semiconductor Manufacturing Technology
Semiconductor Equipment and Materials International
National Science Foundation
Electrochemical Society
American Physical Society
semiconductor Research Corporation
Materials Research Society
American Vacuum Society
University of Texas at Austin
Deutsche Gesellschaft fur Materialkunde e.V
Metara, Inc., Monte Sereno, California
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Motorola Tempo, Arizona
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National Science Foundation, Arlington, Virginia
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W/5/, ^aitnersourg, Maryland
AMERICAN
INSTITUTE
2EPHYSICS
Melville, New York, 2003
AIP CONFERENCE PROCEEDINGS • VOLUME 683