NIST
s em r
[MIRISI
THE U N I V E R S I T Y OF
DGM
TEXAS
Deutsche Gesellschaft
fur Materialkunde
-AT A U S T I N -
CONFERENCE SPONSORS
National Institute of Standards and Technology, Semiconductor Electronics
Division, National Semiconductor Metrology Program, Electronics and Electrical
Engineering Laboratory
International Semiconductor Manufacturing Technology
Semiconductor Equipment and Materials International
National Science Foundation
Electrochemical Society
American Physical Society
Semiconductor Research Corporation
Materials Research Society
American Vacuum Society
University of Texas at Austin
Deutsche Gesellschaft fur Materialkunde e.V.
POSTER SESSION SPONSORS
Intel, International SEMATECH, KLA-Tencor, Solid State Measurements, and
Texas Instruments
EXHIBITORS
Bede Scientific, Inc.; Bruker AXS; Cameca Instruments,
Jobin Yvon, Inc.; Technos International, Inc.; and Thermo VG Scientific
XVlll
Inc.;