Copyright © 2003 American Institute of Physics.
All rights reserved.
Published by the American Institute of Physics (AIP).
This CD-ROM is protected by the United States copyright
law, other copyright laws, and international treaties.
Making copies of the CD-ROM for any reason is prohibited.
Individual articles may be downloaded for personal use; single
printed copies may be made for use in research and teaching.
Redistribution or resale of any material on the CD-ROM in
machine-readable or any other form is prohibited. Reproduction
of articles, beyond that permitted by copyright law, requires
payment of $20 per article per copy. Payment is made to the
Copyright Clearance Center (CCC), 222 Rosewood Drive,
Danvers, MA 01923 USA. For classroom use fees contact
CCC’s Academic Permissions Service. Permission is granted to
quote
from
the
proceedings
with
the
customary
acknowledgment of the source. To reprint a figure, table, or
other excerpt requires in addition the consent of one of the
authors and notification to AIP. Reproduction for advertising or
promotional purposes requires licensing from AIP.
Inquiries should be addressed to: Office of Rights and
Permissions, American Institute of Physics, Suite 1NO1,
2 Huntington Quadrangle, Melville, NY 11747-4502 USA.
Telephone: 516-576-2268; Fax: 516-576-2450;
E-mail: [email protected].
ISBN 0-7354-0152-7
Editors:
David G.Seiler, Chief
Semiconductor Electronics Division
National Institute of Standards and Technology
Mailstop8120
Gaithersburg, MD 20899-8120
E-mail: [email protected]
Alain C. Diebold
International SEMATECH
2706 Montopolis Drive
Austin, TX 78741
E-mail: [email protected]
Thomas J. Shaffner
Semiconductor Electronics Division
National Institute of Standards and Technology
Mailstop8120
Gaithersburg, MD 20899-8120
E-mail: [email protected]
StefanZollner
Motorola
MDEL622
2100 E.Elliot Road
Tempe,AZ 85284
E-mail: [email protected]
Rajinder P. Khosla
National Science Foundation
Elect. And Comm. Systems Div.
Electronics, Photonics, & Device Technologies
Arlington, VA 22230
E-mail: [email protected]
Erik M. Secula
Semiconductor Electronics Division
National Institute of Standards and Technology
Mailstop8120
Gaithersburg, MD 20899-8120
E-mail: [email protected]
Robert McDonald
Metara, Inc.
15270 Elm Park Court
Monte Sereno, CA 95030
E-mail: [email protected]
The articles on pp. 97-104,181-185,195-199,200-204, 238-242, 313-317, 326-330, 331-336, 348-352, 353-356,
396-399,400-408,409-412,421-428,444-447,448-452,567-571,576-580,634-645,748-752, and 771-781 were
authored by U. S. Government employees and are not covered by the below mentioned copyright.
Cover: Detector image from transmission Small Angle X-ray Scattering from a dense array of via-pads etched into silicon
dioxide on a SEMI-standard silicon wafer. The via-pad structure is rectangular, resulting in diffraction peaks along two
axes. The spacing of diffraction peaks yields information on the average distance between pads, while the peak intensities
provide the average pad dimensions. The image was recorded by Ronald L. Jones, Tengjiao Hu, Wen-li Wu, and Eric K.
Lin as part of the ongoing program in electronic materials characterization in the Polymers Division of the Materials Science
and Engineering Laboratory at the National Institute of Standards and Technology. Image data were collected at the
ID-9 Beamline of the Advanced Photon Source, part of Argonne National Laboratory (Argonne, IL).
Authorization to photocopy items for internal or personal use, beyond the free copying permitted under the 1978 U.S.
Copyright Law (see statement below), is granted by the American Institute of Physics for users registered with the
Copyright Clearance Center (CCC) Transactional Reporting Service, provided that the base fee of $20.00 per copy is paid
directly to CCC, 222 Rosewood Drive, Danvers, MA 01923. For those organizations that have been granted a photocopy
license by CCC, a separate system of payment has been arranged. The fee code for users of the Transactional Reporting
Service is: 0-7354-0152-7/03/$20.00.
© 2003 American Institute of Physics
Individual readers of this volume and nonprofit libraries, acting for them, are permitted to make fair use of the material in it, such
as copying an article for use in teaching or research. Permission is granted to quote from this volume in scientific work with
thecustomary acknowledgment of thesource.Toreprintafigure, table, or other excerpt requires theconsent of one of the original
authors and notification to Al P. Republication or systematic or multiple reproduction of any material in this volume is permitted
only under license from AIP. Address inquiries to Office of Rights and Permissions, Suite 1NO1,2 Huntington Quadrangle,
Melville, NY 11747-4502; phone: 516-576-2268; fax: 516-576-2450; e-mail: rights @ aip.org.
L.C. Catalog Card No. 2003111108
ISBN 0-7354-0152-7
ISSN 0094-243X
Printed in the United States of America