Studies of Positron-Surface Interactions in Semiconductors Using Positron Annihilation Induced Auger Electron Spectroscopy a,b N. G. Fazleev, a J. L. Fry, and A. H. Weiss a a Department of Physics, Box 19059, University of Texas at Arlington, Arlington, Texas 76019-0059, USA b Department of Physics, Kazan State University, Kazan 420008, Russian Federation Abstract. A surface sensitive technique, Positron-Annihilation-Induced Auger-Electron Spectroscopy (PAES), is becoming a powerful tool available for studies of positron surface phenomena and characterization of semiconductor surfaces. In this paper the results of studies of Si(111) and GaAs(100) surfaces using PAES are analyzed by performing quantum mechanical calculations of positron surface states and annihilation characteristics for the reconstructed Si(111)-(7×7) surface and for both As- and Ga-rich (100) surfaces of GaAs with c(2×8), (2×4), and c(4×4) reconstructions. Estimates of the positron binding energy, work function, and annihilation characteristics reveal their sensitivity to surface reconstruction and chemical composition of the topmost layers of semiconductors. Calculations show that the positron is getting trapped at the corner hole sites of the reconstructed Si(111)-(7×7) surface. It is shown that comparison of theoretical positron annihilation probabilities computed for different reconstructed GaAs(100) surfaces with experimental ones estimated from the measured Auger peak intensities permits identification of the chemical composition of the topmost layers of the GaAs(100) surface. quantum mechanical calculations including discretelattice effects of the positron surface states, work functions, and annihilation characteristics. These calculations are performed for both As- and Ga-rich non-reconstructed and reconstructed GaAs(100) surfaces with c(2×8), (2×4), c(4×4) reconstructions, and for the non-reconstructed and reconstructed Si(111)-(7×7) surfaces. Theoretical annihilation probabilities of the surface trapped positrons with relevant core electrons computed for the GaAs(100) and Si(111) surfaces are compared with the ones estimated from experimental Auger peak intensities. Previous calculations of the positron surface and bulk states and annihilation characteristics were performed for the non-reconstructed Si and GaAs surfaces [3,4]. INTRODUCTION Recently the GaAs(100) and Si(111) surfaces have become the subject of experimental studies using positron annihilation induced Auger electron spectroscopy (PAES) [1]. In PAES experiments, most of the low-energy positrons implanted into the sample under study diffuse back to the vacuum-solid interface and are trapped in an image-correlation potential well at the surface [1,2]. A certain fraction of the surface trapped positrons annihilate with neighboring core electrons, creating core-hole excitations and initiating Auger processes. The measured high-resolution PAES spectrum from GaAs(100) displays six As and three Ga Auger peaks corresponding to M4,5VV, M2M4V, M2,3M4,5M4,5 Auger transitions for As and M2,3M4,5M4,5 Auger transition for Ga. The highresolution PAES spectrum from Si(111) displays the Si Auger peak corresponding to the L2,3VV Auger transition. The Auger peak intensities were used to obtain experimental annihilation probabilities for each core level. We analyze PAES data by performing EXPERIMENTAL DETAILS The PAES measurements were made on the high resolution PAES spectrometer at the University of Texas at Arlington. Details of the high resolution PAES system have been reported elsewhere [5]. The CP680, Application of Accelerators in Research and Industry: 17th Int'l. Conference, edited by J. L. Duggan and I. L. Morgan © 2003 American Institute of Physics 0-7354-0149-7/03/$20.00 509 GaAs(100) sample (n-type, Si doping level ~ 1×1018 cm−3) and the Si(111) sample were etched in a 50% solution of hydrofluoric acid (HF) and de-ionized water before mounting in the sample chamber. Both samples were sputtered with 3 keV argon ions. The GaAs(100) and Si(111) samples were annealed respectively to 450°C and 550°C before each data collection cycle. The samples were maintained at a pressure of 2×10-10 – 4×10-10 Torr during data collection. Their cleanliness was monitored using EAES that showed no measurable carbon or oxygen contamination of the surface over the period of time required for data acquisition in each cycle. By controlling the sputtering time and annealing temperature, the surface structure and composition were kept consistent for each data collection cycle. EAES was also used to monitor the As M45VV / Ga M23M45M45 peak-to-peak ratio to determine the stoichiometry of the first few layers of atoms of the GaAs(100) sample. A 20-minute sputtering and 10minute annealing cycle was found to result in an As/Ga EAES peak to peak ratio of 1.6 + 0.2, which remained consistent over the total period of PAES data collection. 0.8 (E) As M23M45V (A) As M45VV arbitrary units 0.6 (B) As M23M45M45 (D) Ga M23M45V (C) Ga M23M45M45 0.4 0.2 As Ga As As 0 0 10 20 30 40 50 60 70 80 90 100 110 Electron Energy (eV) FIGURE 1. PAES spectrum from the GaAs(100) surface with the dark count, gamma-ray induced, and low energy tail backgrounds removed. The secondary electron cutoff is at Ek = 10 eV, the positron beam energy. The sample bias was +1.5 V. 0.03 RESULTS AND DISCUSSION Experiment. The background of the PAES data (due to detector dark counts and gamma ray induced counts) was measured and subtracted from the raw data. Backgrounds due to Auger electrons that have lost energy as they exit the surface have also been subtracted. The Auger spectra were obtained with the 10 eV positron beam with a sample bias of Vs = 1.5 V and are shown in Figs. 1 and 2. The GaAs(100) Auger spectrum displays six As peaks and three Ga peaks below 110eV corresponding to M4,5VV, M2M4V, M2,3M45M45 Auger transitions for As and M2,3M4,5M4,5 Auger transition for Ga. Several Auger peaks from each element of GaAs result from annihilation of the same core level. The primary Si(111) Auger peak at 90 eV corresponds to the Si L2,3VV Auger transition. The measured peak intensities of Auger transitions are used to calculate experimental annihilation probabilities of relevant core electrons, pn,l, by considering the ratio of the integrated intensities of the peaks resulting from Auger transitions involving the selected core level to the secondary electron yield obtained on the same apparatus at the same time. counts / second 0.02 0.01 0 -0.01 0 10 20 30 40 50 60 70 80 90 100 110 120 Electron Energy (eV) FIGURE 2. PAES spectrum from the Si(111) surface with the dark count, gamma-ray induced, and low energy tail backgrounds removed.. The secondary electron cutoff is at Ek = 10 eV, the positron beam energy. The sample bias was +1.5 V. The integrated intensities were obtained by summing the counts under each peak in the background subtracted data and dividing by the average energy of the peak to take into account the energy dependence of the cylindrical mirror analyzer (CMA). Also considered in the calculations are the relative solid 510 angle of acceptance and transmission efficiency of the spectrometer and the positronium fraction, i. e., the number of trapped positrons that form positronium and are thus unavailable to annihilate with core electrons [6]. Estimates of the experimental pn,l for the As 3d, 3p, and Ga 3p core level electrons are given in Tables I and II. Estimates of the sum of experimental pn,l for the Si 2s and 2p core level electrons give 0.80 %. Theory. Positron surface states and annihilation characteristics for GaAs(100) were calculated for the ideally terminated nonreconstructed (100) surface consisting of a single element in the topmost layer, As and Ga, respectively, and for both As- and Ga-rich c(2×8), (2×4), and c(4×4) surface reconstructions of the GaAs(100) surface. Calculations for the Si(111) surface were performed for the non-reconstructed surface and the 7×7 reconstruction. Discrete-lattice effects were taken into account within a modified superimposed-atom method [7]. Atomic calculations were performed self consistently within the local-spin-density approximation [8] using the exchange-correlation functional from Ceperley and Alder [9]. To account for effects of the charge redistribution at the surface, we used the method of Weinert and Watson [10]. Following this method we placed Ga, As, and Si atoms in a "compensating" potential well of 0.27, – 0.27, and –0.15 Ry, respectively, extending from the atom center out to one Wigner-Seitz radius and then linearly ramping to a value of 0.00 Ry at twice the Wigner-Seitz radius and beyond. Atomic wave functions then provided the overlapping electron densities and corresponding electron-positron potential at the semiconductor surface via Poisson's equation. Electron-positron correlation was included by using a corrugated image potential in the vacuum and a local density approximation inside the surface [4,7]. With these approximations it is possible to treat both perfect and reconstructed surfaces. Positron surface states were obtained by solving Schrödinger’s equation numerically with the boundary condition that the positron wave function vanishes sufficiently far into the bulk or the vacuum. The positron work function, Φp, was calculated for the GaAs(100) surfaces with the positron potential used in surface state calculations by imposing periodic boundary conditions deep inside the surface and assuming k=0 to be the lowest Bloch state. The computed binding energies for a positron trapped at the As- and Ga-rich GaAs(100) surfaces, Eb, and positron work functions, Φp, are given in Tables I and II, respectively. TABLE I. Theoretical positron binding energy, Eb, positron work function, Φp, and annihilation probability of the surface trapped positron with core electrons for the As-rich GaAs(100) surface. System Eb (eV) (theory) Φp (eV) (theory) GaAs(100) non-reconstructed GaAs(100)-c(2×8) reconstructed GaAs(100)-(2×4) reconstructed GaAs(100)-c(4×4) reconstructed GaAs(100)-Experiment 2.63 2.55 2.58 2.59 -0.69 -1.17 -0.95 -0.68 -0.603 Annihilation probability (%) Core level As 3p As 3d Ga 3p 0.50 1.63 0.08 0.43 1.30 0.18 0.36 1.15 0.16 0.66 2.06 0.04 0.51 0.92 0.33 Ga 3d 0.37 0.76 0.71 0.16 TABLE II. Theoretical positron binding energy, Eb, positron work function, Φp, and annihilation probability of the surface-trapped positron with core electrons for the Ga-rich GaAs(100) surface. System Eb (eV) (theory) Φp (eV) (theory) GaAs(100) non-reconstructed GaAs(100)-c(2×8) reconstructed GaAs(100)-(2×4) reconstructed GaAs(100)-c(4×4) reconstructed GaAs(100)-Experiment 1.76 1.76 1.80 1.39 -0.69 -0.66 -0.17 -0.74 -0.603 511 Annihilation probability (%) Core level As 3p As 3d Ga 3p 0.06 0.18 0.53 0.39 1.18 0.15 0.33 1.06 0.14 0.02 0.07 0.50 0.51 0.92 0.33 Ga 3d 2.27 0.62 0.61 2.22 TABLE III. Theoretical and experimental positron binding energies, Eb, and positron surface-state and bulk lifetimes, τ . System Eb (eV) (theory) Eb (eV) (experiment) Si(111) non-reconstructed Si(111)-(7×7) reconstructed Cu(111) 2.54 2.70 2.797 2.69(7)2 2.69(7)2 2.80(5)7 τ (ps) surface-state (theory) 650 486 5027 τ (ps) bulk-state (theory) 219 219 1097 TABLE IV. Theoretical and experimental positron annihilation probabilities with relevant Si core electrons, pn,l at the non-reconstructed and reconstructed Si(111) -(7×7) surfaces. System Level non-reconstructed Si(111) reconstructed Si(111)-(7×7) Si 2s 0.55 0.15 pn,l (%) (theory with γLDA) Si 2p 1.62 0.45 These values are comparable to Eb computed for the (100) surfaces of Si and Ge [4,11]. As it follows from Tables I and II the computed values of the binding energy Eb of the surface-trapped positrons show sensitivity to the surface structure and chemical composition of the topmost layers of the reconstructed GaAs(100) surface. pn,l (%) (experiment) Si 2s+2p 0.80 0.80 Si 2s+2p 2.17 0.60 surfaces. As it follows from Fig. 4 the (7×7) reconstruction of the Si(111) surface changes significantly the behavior of the positron at the surface: the positron is found to be localized in the XY plane in the corner holes of the reconstructed Si(111)-(7×7) surface. -21.70 -17.47 -9.98 -13.23 -5.14 -9.00 -0.30 -4.76 -0.53 4.54 3.70 9.38 7.94 14.21 12.17 16.41 20.64 Z (a.u.) FIGURE 3. Contour plot of the calculated positron surface state wave function at the non-reconstructed Si(111) surface in the X-Z plane for Y=0. Vacuum is at the left. Contours are separated by 0.002 atomic units. 24.88 Z(a.u.) FIGURE 4. Contour plot of the positron surface state wave function at the reconstructed Si(111)-(7×7) surface in the XZ plane for Y=0. Vacuum is at the left. Contours are separated by 0.004 atomic units. It follows from Fig. 3 that for the nonreconstructed Si(111) surface the computed positron surface state wave function extends in the XY plane of the semiconductor surface and is localized in the Z direction mostly on the vacuum side of the topmost layer of Si atoms, as in the case of transition metal The computed binding energies Eb for a positron trapped at Si(111) surfaces are given in Table III. 512 These values are comparable to Eb computed for the surfaces of Cu [7]. Probability of annihilation of surface trapped positrons with an electron in a specific core level pn,l characterized by the quantum numbers n and l, is obtained by dividing the positron annihilation rate λn,l, by the total positron annihilation rate λ calculated using the Local Density Approximation (LDA): pn,l=λn,l/λ [4]. Theoretical pn,l are given in Tables I, II, and IV. As it follows from Tables I and II, the computed annihilation probabilities of the As 3d, 3p and Ga 3d, 3p core electrons are found to be sensitive to reconstruction and chemical composition of the top layers of the GaAs(100) surface. Experimental Φp and pn,l for the As 3d, 3p, and Ga 3p core electrons estimated from the labeled peak intensities in Fig. 1 are equal to -0.60 eV, 0.51%, 0.92%, and 0.33%, respectively. It follows from Tables I and II that the experimental results agree best with Φp and pn,l for the As 3d, 3p, and Ga 3p core electrons computed for the Ga-rich reconstructed GaAs(100)-c(2×8) surface: -0.66 eV, 0.39%, 1.18%, and 0.15%, respectively. A comparison of theoretical and experimental values for pn,l from Table IV suggests that theoretical pn,l are also quite sensitive to the reconstruction of the Si(111) surface due to the different behavior of the positron surface state wave function. It also follows from Table IV that the sum of theoretical pn,l for the Si 2s and 2p core electrons calculated with the enhancement factor γ within LDA, 0.60%, agrees with the sum of annihilation probabilities for the Si 2s and 2p core electrons, 0.80%, estimated from the PAES intensity. positron surface states and annihilation characteristics have been presented and compared to experimental results. The computed binding energy of the surfacetrapped positron, positron work function, and positron annihilation probabilities with the As 3d and 3p and Ga 3d and 3p core electrons have been found to be sensitive to the reconstruction and composition of the topmost layers of GaAs(100). Thus, a comparison of annihilation probabilities of surface-trapped positrons with relevant core electrons computed for different reconstructed As- and Ga-rich surfaces with the ones estimated from the labeled peak intensities of Auger transitions helps to identify the chemical composition of the top layers of the GaAs(100) surface. The computed binding energy of the surface trapped positrons and annihilation probabilities of the Si 2s and 2p core electrons have been also found to be sensitive to the reconstruction of the Si(111) surface, reflecting differences in the localization and extent of the positron surface state wave function at semiconductor surfaces with different structure of the topmost layers. Theoretical annihilation probabilities of the Si 2s and 2p core electrons calculated for the reconstructed Si(111)-(7×7) surface have been found to agree with the estimates of probabilities obtained from the experimental PAES spectrum. ACKNOWLEDGMENTS This work was supported in part by The National Science Foundation and The Robert A. Welch Foundation. REFERENCES 1. 2. CONCLUSIONS 3. The high-resolution PAES spectrum from a compound semiconductor, GaAs(100) displays six As and three Ga Auger peaks below 110eV. The Auger spectrum from the Si(111) surface displays an Auger signal corresponding to the LVV Auger transition for Si. Annihilation probabilities have been estimated for the As 3d, 3p, Ga 3p, and Si 2s and 2p core electrons from the measured Auger peak intensities. PAES data have been analyzed by performing first-principles calculations of positron surface states and annihilation characteristics for the non-reconstructed and reconstructed Si(111)-(7×7) surface and for both Asand Ga-rich non-reconstructed and reconstructed (100) surfaces of GaAs with c(2×8), (2×4), and c(4×4) reconstructions. 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