CP620, Shock Compression of Condensed Matter - 2001 edited by M. D. Furnish, N. N. Thadhani, and Y. Horie © 2002 American Institute of Physics 0-7354-0068-7/02/$ 19.00 SHOCK-INDUCED CUBIC SILICON NITRIDE AND ITS PROPERTIES Toshimori Sekine Advanced Materials Laboratory, National Institute for Materials Science, Namlki 1-1, Tsukuba 305-0044, Japan Abstract. The shock-induced phase transition of Si3N4 has been investigated through recovery technique and Hugoniot measurements. Recovered samples indicates the formation of a cubic spinel (cSi3N4) and the yield of c-Si3N4 increases with increasing the shock pressure and reaches 100% at 63 GPa. Hugoniot measurements have revealed a phase transition above 36 GPa and the associated volume change of about 25%. The shock synthesized c-Si3N4 is nano crystalline and displays a hightemperature metastability up to about 1620 K, c-Si3N4 is one of hard materials based on the measured equation of state. Shock-synthesized c-Si3N4 has been characterized by electron microscopy and 29Si magic angle spinning NMR spectroscopy. INTRODUCTION Silicon nitride ceramics exhibit high strength at high temperature, good thermal stress resistance and good resistance to oxidation. Previous studies [1-4] on shock-loaded Si3N4 have centered on processing techniques, Hugoniot measurements on sintered Si3N4 with considerable amounts of additives have been carried out and they indicated no phase transition up to about 40 GPa [5, 6], It has recently found that the low-pressure phases transform into a high-pressure phase of Si3N4, c-Si3N4 [7], There are three methods for high-pressure synthesis of cSi3N4. The first one is a reaction of Si and N2 fluid at 15-30 GPa and 2000 K in diamond anvil cells coupled with laser heating [7], The second one is a shock transformation from the low-pressure phases, a-Si3N4 and p-Si3N4? above 20 GPa [8], The third one is a solid-solid transformation from the low-pressure phases, at pressures of 18-20 GPa in multi-anvil high-pressure 'cells [9], c-Si3N4 is the first known nitride spinel in which one third and two thirds of the Si atoms are tetrahedrally and octahedrally coordinated to nitrogens, respectively. It has been generally accepted that high-pressure phases display better performances in strength and resistance, because the chemical bond is stronger in the high-pressure phases than in the low-pressure ones. Therefore we need to know properties of cSi3N4 for industrial applications. We have already announced a massive production method of c-Si3N4 from p-Si3N4 [8], In this paper, shock synthesis of c-Si3N4 is reviewed as well as a method for purifying and separating cSi3N4, Some properties of shock synthesized cSi3N4 powders and the Hugoniot of sintered P~Si3N4 with less amount of additive are summarized. The shock-induced transformation of p-sialon to a cubic spinel also is investigated in recovery experiments. The results indicate that the oxynitride spinel makes a solid solution with c-Si3N4. EXPERIMENTAL METHODS For the shock synthesis, we used a propellant gun to generate shock wave by hypervelocity impact. A projectile with a flyer metal plate is accelerated up to a velocity of - 2 km/sec and impacts a container target. Samples are stored in copper containers to protect them from the destruction by the rarefaction wave after the shock compression. A detailed description has been 1113 in the heated and quenched samples were identified by the XRD method. 29Si magic angle spinning NMR spectroscopy was investigated to characterize the local structures around Si atoms in c-Si3N4. published elsewhere [10]. Preliminary shock recovery experiments [11] indicated the chemical reactions between the steel containers and the silicon nitride powder. Flyers are copper and tungsten, dependent on the required pressure. Pressure is estimated by the impedance match method and temperature is calculated on the thermodynamic ground. After successful recovery of the container, a sample was taken out from the container and immersed into a nitric acid solution to remove copper pressure media. Thus obtained powders were investigated by X-ray diffraction (XRD), electron microscopy, thermal analysis, and NMR spectroscopy. For Hugoniot measurements, we used a twostage light-gas gun to increase the impact velocity up to about 6 km/sec. Inclined mirror method coupled with an electrical streak camera has been employed to measure shock velocity and particle velocity simultaneously. The details of the techniques have been reported elsewhere [12]. Pressure and density at the compressed state have been calculated with aid of the Rankine-Hugoniot equations. Two kinds of Si3N4 starting powders were used for recovery experiments: a pure p-Si3N4 and a mixture of 96% a-Si3N4 and 4% p-Si3N4 powders. The powders contain 0.5 wt% and 1.3 wt% oxygen, respectively. These Si3N4 powders were mixed with a large amount of copper powders (9 times by weight) to increase the shock pressure and temperature. Two kinds of sintered p-Si3N4 were used for the Hugoniot measurements. One is black and has about 2wt% Nd2O3 and Y2O3 as additions and the other contains no additive and is light gray. These sintered bodies were cut into the pieces of about 10 mm x 12 mm x 2.5 mm. We have developed a method of purifying and separating shock-synthesized c-Si3N4. By applying a heated concentrated hydrofluoric acid only lowpressure Si3N4 phase as well as oxygen-rich, amorphous parts could be dissolved out. c-Si3N4 powder survived for a limited duration. This treatment allowed us to purify and separate as the residual powders of c-Si3N4. Thermal properties were investigated by thermogravimetry and differential thermal analysis up to about 1800 K in Ar flow with a range of heating rates of 5 to 20 K/min. The phases present RESULTS AND DISCUSSION A. Formation of c-Si3N4 from p-Si3N4 and aSi3N4 Figure 1 summarizes a series of XRD patterns of initial P~Si3N4 and post-shock samples quenched at pressures of 33 GPa to 63 GPa. The yield of cSi3N4 increases with increasing peak shock pressure, and it reaches almost 100% at 63 GPa [11]. The shock temperature increases with increasing peak shock pressure when the density of initial mixtures is kept nearly constant. We compare the XRD patterns of post-shock samples quenched from PSi3N4 at 49 GPa and from 96% a-Si3N4 and 4% pSi3N4 at 43 GPa. The shock temperatures were not much different. According to a comparison of the relative yield of c-Si3N4, the starting material of aSi3N4 is preferred in the shock transformation. A theoretical consideration [13] also indicates a lower pressure required for the phase transition from aSi3N4 than p-Si3N4 because p-Si3N4 is slightly denser than a-Si3N4. Shock-synthesized c-Si3N4 powders were subjected to transmission electron microscopy 40 50 20(deg) FIGURE 1. XRD patterns of starting material and its postshock samples, (a) Starting p-Si.iN,*, (b) post-shock sample quenched at 33 GPa and 1770 K, (c) post-shock sample quenched at 49 GPa and 2400 K, and (d) post-shock sample quenched at 63 GPa and 3300 K 1114 about 2.5 km/sec, The shock velocity for the highpressure-induced phase appears above Up =2.5 km/sec. The Us-Up relation for the high-pressure phase can be approximated by a linear equation of Us = 4.59+1.49 Up. The pressure-density relation also indicates a phase transition starting at about 36 GPa. The high-pressure region can be fitted to derive an isentropic compression curve of the high pressure phase through the third-order Birch-Murnaghan equation of state [12]. The results indicate a zeropressure bulk modulus of 300 ± 10 GPa and its pressure derivative of 3.0 ± 0,1, as seen in Fig.3. We assumed that the high-pressure phase is a cubic spinel with a zero-pressure density of 4.01 g/cm3, based on the recovery experimental results. There seems to be a slight difference in the onset pressure for the phase transition between Hugoniot measurements and the recovery experiments. It should be noted that the temperature in the Hugoniot experiments is significantly lower than that in recovery experiments because of the presence of pores in the powder mixtures. The estimated bulk modulus of c-Si3N4 is in good agreement with the estimations by the theoretical calculations [7, 11, 17], and is greater by about 30 % than that of p-Si3N4. Vogelgesang et al. [18] (TEM) observations [8, 14]. The grain sizes range between 7 and 35 nm. The electron diffraction pattern and high-resolution TEM image also were taken and analyzed. They are consistent with a cubic spinel structure. Some small c-Si3N4 grains have been observed to be embedded in the amorphous oxygen-rich phase. The composition of c-Si3N4 has been checked by EELS and EDX analyses during the TEM observations, and indicates no significant change from the initial Si3N4. The electron energy loss near edge spectroscopy method has been applied for structural identification and the measured results have been compared with the pattern predicted by theoretical simulation. The results has been reported separately [15]. B. Hugoniot measurements We have measured Hugoniot of p-Si3N4 up to pressures of 150 GPa [12], It is illustrated in the planes of shock velocity (Us)-particie velocity (Up) (Fig. 2) and pressure-density (Fig. 3). According to the Us-Up relation, elastic and elasto-plastic regions are seen in the low pressure phase. The HEL value is about 16 GPa, which is close to the previous data [5], A phase transition has been detected at about Up=l.l km/sec and last up to - HEL PT 0 1 2 3 4 5 3,5 Up (Km/s) 4.0 4.5 5.0 5,5 6.0 Density (g/cm) FIGURE 2. A relationship between shock velocity (Us, Km/s) and particle velocity (Up, Km/s) of p-Si^, measured by the inclined mirror method, HEL = Hugoniot elastic limit, and PT = phase transition. FIGURE 3. Hugoniot pressure-density relation of p-Si3N4 and a calculated isentrope of c- Si3N4 with a bulk modulus of 300 GPa and its pressure derivative of 3.0, 1115 oxygen-rich amorphous phase in shock-synthesized c-Si3N4 sample. The pressure required for the complete transition to c-Si3N4 is too high to be achieved by conventional explosive methods used in industries. Shock recovered samples subjected to pressures of 30-50 GPa contain c-Si3N4 and lowpressure phases of Si3N4. Therefore it is necessary to develop a method to separate c-Si3N4 from the samples recovered below the complete transition pressure. We have developed a chemical method to purify and to separate c-Si3N4 from a mixture containing c-Si3N4, low-pressure phase Si3N4 and oxygen-rich amorphous phase. After using this method to purify shock-synthesized c-Si3N4 powders, we have obtained DTA data again and compared with that for c-Si3N4 sample without purification. The results have indicated a greater metastability. XRD data of heated and quenched samples are shown in Figure 5. c-Si3N4 survived partially in a heat treatment up to 1793 K. The DTA result indicate that the transition from c-Si3N4 to p-Si3N4 occurs at about 1670 K with an enthalpy change of 29.2±3.5 kJ/mol. measured the elastic constants of single crystal PSi3N4 using Brillouin scattering. He et al. [12] determined the elastic constants of sintered p-Si3N4 with no additives by the resonance sphere technique. These two data are significantly smaller than that based on the P-V data of p-Si3N4 in DAC by Li et al [19]. C. Metastability of c-Sia^ at high temperature In order to check the metastability of shocksynthesized c-Si3N4 powders, DTA analysis up to 1770 K has been investigated in Ar atmosphere. The DTA curve obtained for c-Si3N4, quenched from 63 GPa indicate a broad, exothermic reaction at temperatures over 1370 K and a relatively sharp exothermic reaction at temperatures 1620 K - 1770 K when temperature increases at a rate of 20 K /mm, XRD patterns for quenched samples from temperatures of 1073 K, 1473 K and 1773 K are shown in Fig. 4. Oxidation starts at about 1470 K and a significant amount of SiO2 cristobalite is identified in the sample quenched from 1773 K. The weigh gain indicate a formation of about 7 wt% SiO2. c-Si3N4 is stable at 1473 K and transforms mostly into P«Si3N4 as well as a small amount of <xSi3N4 at 1773 K. These DTA and XRD data indicate that c-Si3N4 is thermally metastable at least up to 1620 K at one atmosphere. High-resolution TEM image has indicated 1200 1000 (2) A 800 ..J. I -AL.A ^-A 600 (D 1 1*- 400 200 0 10 ^ (b) 10 c(3 1) c<22 30 40 50 60 40 50 60 70 80 FIGURE 5. XRD patterns of c-Si3N4 powders shock-synthesized at about 40 OPa and purified by high-temperature HF solution and its heated samples. (1) sample heated at a rate of 5 K/min and quenched from 1753 K, (2) sample heated at a rate of 5 K/min and quenched from 1793 K. (3) sample heated at a rate of 10 K/min and quenched from 1793 K, (4) sample heated at a rate of 20 K/min and quenched from 1 793 K. a, P, c and SiO2 indicate peaks from phases a-Si3N4, p-Si,iN4, c-SisN,!, and cristabalite, respectively. i,-i.fr in nA^KJ^ 20 30 26 (degree) c(440) «"» 2' IT 20 70 FIGURE 4. XRD patterns of c- Si3N4 powders (a) quenched from 63 GPa and its heated samples at 1073 K (b), 1473 K (c), and 1773 K (d). a and P are Si3N4 polymorphs. SiO2 is cristobalite. 1116 D.29Si MAS NMR data of c-Si3N4 29 Si MAS NMR spectroscopy for c-Si3N4 powders has been performed to characterize the local structure of Si atoms in the spinel. The details have been published elsewhere [20]. The chemical shift has been reported to be -46.1 and -48.2 ppm for a-Si3N4 and -48.8 ppm for p-Si3N4 [21, 22]. The measured values for c-Si3N4 have two sharp peaks of -50.0 ± 0.2 ppm and -225.0 ± 0.2 ppm. These correspond to SfN4 and SiN6 units and an integration of the spectrum of SiN4/SiN6 is about 1/2, that of the spinel structure. The chemical shift for SiN6 is more negative than that for SiOg and provides a useful information to determine the units in oxynitrides. spinel formula A13O3N (A12O3/A1N =1) which is not known yet. 7-Al2O3 exists as a spinel with defects. It is generally considered that Al may prefer the octahedral site to the tetrahedral site in spinel, and it is quite interesting to investigate whether sialon spinel can form like in Si3N4 spinel. We have carried out some recovery experiments using crystalline sialon powders with z = 1.8 and 2.8. XRD data of recovered sialon from 30 to 50 GPa indicate the formation of sialon spinels [23]. However the sample with z =2.8 quenched from 60 GPa becomes amorphous. The amorphization occurs in a wide range of the shock conditions, and a detailed investigation of shock condition reveals that the amorphization is due to a sluggish transformation of P-sialon into spinel but not due to melting. We are carrying out further study to obtain more information. E. Formation of sialon spinel P-sialon, Si6-zAlzOzNg,z (0<z<4.2), is known as oxynitride with a similar structure to p-Si3N4. Compositionally the sialon extends toward a CONCLUDING REMARKS Shock synthesis of c-Si3N4 was summarized from ct-Si3N4 and p-Si3N4 in the presence of copper powders. The yield of c-Si3N4 increases with increasing shock pressure, and a higher yield was indicated from a-Si3N4 than P~Si3N4. The shocksynthesized c-Si3N4 powders are nano crystals and displays a high-temperature metastability up to about 1620 K. c-Si3N4 was characterized by 29Si MAS NMR spectroscopy. The determined equation of state indicates that c-Si3N4 is one of hard materials. 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