Welcome to the ParadiseWorld ■Dataset editor DSEDIT ParadiseWorld-2 is high-speed and high-accurate simulator of LSI structure with graphical user interface. DSEDIT handles each dataset as a whole. A dataset is a categorized data gathering in a parameter file. It gives a user a great convenience for parameter file handling. ■Simulation area divider (for 3D) DIVAREA DIVAREA divides a simulation region of a layout pattern into subregions to save the memory resource. The subregions are simulated seperately and the results area integrated. ■Capable to handle ULSI with ultra high-speed pattern layout viewer ■Stable simulation even for the complex profile ■Interactive and graphical interface ■Framework PW ■Keeping up with the change of process, mask pattern and initial profile PW is the top module. The other modules area executed as its child processes. ■Graphical display of simulation process ■Layout pattern viewer PALM PALM can display, rotate, expand and reduce LSI layout pattern very fast. It can also specify each layer by selectively displaying them or changing their colors. Is has simple editor of layout pattern. ■Mask layout structure viewer LION LION displays vertical layer structure (mask pattern) of layout patterns along the cut-line. If a user specifies a new cut-line in PALM, the structure display changes with it. A user can also modify this mask patttern independently from the layout pattern. ■Capacitance/resistance Simulator CARP CARP simulates capacitances, electric potential distribution among wires and resistances of wires according to a cross-section profile of TIGER as a 2D structure. ■Parameter editor PENGUIN PENGUIN edits various data by PALM, LION, TIGER and CARP. It can control process step by step and edit data at each step so a user can modify process conditions and model parameters and check the result on the fly. ■Cross-section profile simulator TIGER ■3D Viewer THRUSH TIGER simulates and displays corss-section profile of LSI along the userspecified cut-line in the layout pattern of PALM, according to the userdefined process table which specifies process conditions and model paramters in etching, depositioning, etc. THRUSH is a easy-to-use viewer for 3D structure simulated by TIGER-3D. ■3D Structure Simulator TIGER-3D ■Capacitance simulator (for 3D) CAT3D CAT3D simulates capacitances and potential distoribution among wires according to the 3D structure simulated by TIGER-3D. TIGER-3D simulates 3D structure of a user-specified region of a layout pattern. It is an add-on option of TIGER (2D cross-sectional profile simulator)
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