INSTITUTE OF PHYSICS PUBLISHING NANOTECHNOLOGY Nanotechnology 17 (2006) 1375–1379 doi:10.1088/0957-4484/17/5/035 Controlled direct patterning of V2O5 nanowires onto SiO2 substrates by a microcontact printing technique Yong-Kwan Kim1 , Sung Joon Park1 , Jae Pil Koo1 , Dong-Jin Oh2 , Gyu Tae Kim2 , Seunghun Hong3 and Jeong Sook Ha1,4 1 Department of Chemical and Biological Engineering, Korea University, Seoul 136-701, Korea 2 Department of Electrical Engineering, Korea University, Seoul 136-701, Korea 3 Physics and Nano-Systems Institute, Seoul National University, NS50, Seoul 151-742, Korea E-mail: [email protected] Received 12 November 2005, in final form 12 January 2006 Published 10 February 2006 Online at stacks.iop.org/Nano/17/1375 Abstract Vanadium pentoxide (V2 O5 ) nanowires were directly transferred to desired patterns on SiO2 substrates using the microcontact printing (MCP) technique. The hydrophilicity of the poly(dimethylsiloxane) (PDMS) stamp exerted a strong influence on the mechanism of transfer of polar V2 O5 nanowires onto the substrate. The V2 O5 nanowires were transferred from the relief side of the hydrophilic stamp, whereas they were transferred from the recess edges of the hydrophobic one forming agglomerated nanowire patterns on the substrate. When the hydrophobic stamp was used, the width of the agglomerated nanowire patterns could be controlled by the concentration of the nanowire solution as well as by the width of the recess area of the PDMS stamp. This method allows us to generate nanowire patterns with a submicrometre line width, which is much smaller than a the few-micrometre sizes of PDMS stamp patterns. When the hydrophilic stamp with a small-sized ( the average length of V2 O5 nanowires) pattern was used, alignment of individual nanowires in the direction of the boundary of the line pattern was obtained. These results suggest that the transfer mechanism in the MCP process strongly depends on the wetting interaction between the stamp and the nanowire ink. (Some figures in this article are in colour only in the electronic version) 1. Introduction Extensive attention has been paid to the field of nanofabrication due to its huge number of potential applications in future nanodevice technology. Two major concerns which need to be addressed for practical applications are the synthesis of useful nanomaterials and the assembly of the synthesized nanostructures at desired locations on the substrate with precise orientations. One-dimensional nanowires have attracted scientific and technological interest owing to their novel structures and their 4 Author to whom any correspondence should be addressed. 0957-4484/06/051375+05$30.00 potential applications as future nanoelectronic components. Field-effect transistors [1, 2], crossed junctions [3] and rotational actuators [4] have been demonstrated. In particular, V2 O5 nanowires have many intrinsic merits, such as a uniform geometric cross-section of 1.5 nm × 10 nm [5–9], which might be important in nanofunctional materials. A heterojunction of V2 O5 nanowires with carbon nanotubes, field-effect transistors and actuators as artificial muscles have been demonstrated as feasible electronic components [8, 9]. A number of new lithographic techniques such as soft lithography [10, 11], dip-pen lithography [12] and nanoimprinting [13] have been developed in the last © 2006 IOP Publishing Ltd Printed in the UK 1375 Y-K Kim et al few decades. Among those techniques, microcontact printing (MCP) using polymer stamps has been widely applied to immobilize molecules [11], nanomaterials and biomaterials [14–16] on desired sites over large areas of various substrates. In common MCP processes, the relief sides of the patterned poly(dimethylsiloxane) (PDMS) stamp transfer non-polar inks such as alkanethiols and alkyltrichlorosilanes to the substrate. However, polar materials cannot be transferred nicely using the conventional MCP technique since polar inks do not wet the common stamp surfaces, which are usually hydrophobic. Many researchers have tried to modify the hydrophobic stamp surface to be more hydrophilic by treating it with oxygen plasma [17, 18] or ultraviolet in ozone (UVO) [19, 20], making it possible to pattern polar materials such as PD+ 2 complex [17]. In this work we have used hydrophobic and hydrophilic stamps to directly transfer polar V2 O5 nanowires onto SiO2 substrates via different transfer mechanisms depending on the hydrophilicity of the stamp surfaces. In the case of hydrophobic stamps, the aqueous solutions of negatively charged [21] V2 O5 nanowires (polar nanowire inks) do not wet the relief sides but are stored in the recess region of the stamp. Thus, V2 O5 nanowires were transferred to the substrate along the edge of the stamp patterns with a line width of a few hundred nanometres, which is much smaller than the few-micrometre width of the stamp patterns (edge transfer mechanism). Up to now, overpressure printing [22] and discontinuous dewetting [23] methods have been reported to use the edge transfer mechanism. In addition, we also transferred V2 O5 nanowires to the SiO2 substrate through the relief side of the stamp using the relatively hydrophilic stamps treated with hydrochloric acid (HCl). These results suggest that the pattern transfer of V2 O5 nanowires on SiO2 substrate can be controlled by the hydrophilicity of the stamp. 2. Experimental details The PDMS used as the stamp material in this experiment was purchased from Dow Corning. Patterned PDMS stamps were fabricated by a previously reported method [24]. In addition, unpatterned PDMS stamps were used to check the hydrophilicity of the stamp surfaces by measuring the advanced contact angle. Hydrophilic stamps can be prepared by immersing PDMS stamps in 1 N aqueous solution of HCl for 1 day. This treatment caused the hydrophobic stamp surfaces to become more hydrophilic without any damage [25]. After this treatment, the advanced contact angles were changed from 115◦ to 80◦ . All stamps were cleaned by an ultrasonic cleaner in isopropyl alcohol, ethanol and deionized water before inking. This step removes any dust particles which can non-uniformly trap the nanowire ink on the relief area of the PDMS stamp. V2 O5 sols were prepared following a previously reported recipe [26]. On average, 2 µm long nanowires could be obtained after 2–2.5 months in sol solution [26]. In acidic solution, V2 O5 nanowires are known to be covered with negatively charged hydroxyl (−OH) groups [21]. The synthesized V2 O5 sols were diluted with deionized water to use as inks. SiO2 films were grown by immersing p-type Si(100) substrates in piranar solution (H2 O2 :H2 SO4 = 3:1) at 90 ◦ C 1376 Figure 1. Schematic diagram depicting the MCP procedure using a V2 O5 nanowire solution as ink. The PDMS stamp is (a) hydrophobic as fabricated and becomes (b) hydrophilic after the treatment with HCl. for 15 min [27]. After this process, a Si surface is covered with hydroxyl functional group (−OH). To promote the attractive forces between OH-covered V2 O5 nanowires and the substrate, the SiO2 substrate was immersed in 20 mM aqueous solution of 3-aminopropyl amine (APS) for 4 h. After this treatment, the SiO2 substrate becomes positively charged with −NH2 groups. Advanced contact angles were measured on the substrates and the stamps in each step by using a FACE CA-DT contact angle meter (FACE, Japan). All atomic force microscope (AFM) images were obtained with an XE-100 AFM (PSIA, Korea) in a non-contact mode under ambient conditions. The tips, with a force constant of 49 N m−1 and a resonance frequency of 190 Hz, were purchased from NanoWorld (model #NCHR). All the images were analysed by XEI 1.5 software (PSIA). 3. Results and discussion Figure 1 shows the different MCP procedures depending on the hydrophilicity of the PDMS stamp surfaces. The hydrophilic stamp can be coated with nanowire ink by common inking methods including immersion in ink solution for 30 min and blowing with N2 gas, whereas the hydrophobic stamp was treated to trap the V2 O5 nanowire solution only in the recess region of the stamp. The aqueous solution of V2 O5 nanowires was prepared so that the solution did not wet the relief surface of the hydrophobic stamp and is trapped only in the recess space, like discontinuous dewetting [28]. In addition, we immersed the stamp in the nanowire solution vertically and pulled it out slowly to prevent the additional deposition of nanowires due to gravitational force as well as the formation of nanowire drops on the stamp. By evacuating with a rotary Controlled direct patterning of V2 O5 nanowires onto SiO2 substrates by a microcontact printing technique (a) (b) (a) (b) (c) (d) (c) (d) (e) (f) Figure 2. Non-contact mode AFM topography images taken from V2 O5 nanowire patterns transferred via the edge transfer mechanism using a hydrophobic PDMS stamp. The index ‘a/b’on the top-right corners of the AFM images represents the (side length)/(separation) for square patterns and the (line width)/(separation) for line patterns on the stamps, respectively. For example, ‘1/1.2’ in (a) represents the square-shaped recess area of 1 µm × 1 µm, which is separated by 1.2 µm, whereas ‘1/1’ in (c) represents the 1 µm wide relief lines separated by 1 µm. (a) and (b) are square patterns as shown in the insets. The bottom-left corners of the AFM images (a) and (b) represent the square patterns of the stamp, where white shows the recessed area. (c) and (d) are line patterns of nanowires. The insets in (c) and (d) show the cross section of the stamps with a channel width of 1 and 0.5 µm and a depth of 0.35 and 0.3 µm, respectively. (e) and (f) are the line profiles of AFM images in (c) and (d), respectively. pump for 5 min and preserving in air for 20–30 min, a considerable amount of the solvent was removed from the recess region. As a result, the solution became concentrated and receded to the edge of the recess region, as in the recent report where polar [Mo3 Se− 3 ]∞ molecular wires were selforganized to the corners of the PDMS microchannels [29]. Figure 2 shows the AFM images of V2 O5 nanowire patterns which were generated on the aminopropyl triethoxysilane (APS)-treated SiO2 surfaces using a hydrophobic stamp. All the AFM images show that V2 O5 nanowires were successfully transferred, regardless of the shapes and the sizes of the patterns on the PDMS stamp. The transferred lines were not composed of separate individual nanowires but of agglomerated wires with an average height of 4–6 nm. The line width ranges from 100 to 300 nm depending upon the width of the recess area in the PDMS stamp, but it was much smaller than the pattern size of the stamp. This implies that the nanowires were not deposited Figure 3. (a)–(c) AFM topography images taken in non-contact mode from V2 O5 nanowire patterns transferred using a hydrophobic PDMS stamp with various concentrations of V2 O5 nanowire solution. All scales are identical. The original V2 O5 nanowire sols were diluted with deionized water to have relative concentrations of (a) 0.13, (b) 0.25 and (c) 0.33. (d) Shows the change of the transferred line shape versus the concentration of the V2 O5 nanowire inks. The filled circles and the open squares represent the width (left y -axis) and height (right y -axis) of the nanowire patterns, respectively. Here, the PDMS stamp with a line pattern of 0.5/0.5 was used. from the relief side of the stamp but from the recess edge of the stamp. Figures 2(e) and (f) show the line profiles of the patterns of figures 2(c) and (d), respectively. We found that the wider recess area produces wider V2 O5 nanowire patterns with the same concentration of nanowire solution. Figure 3 shows the AFM images of the V2 O5 line patterns which were generated on APS-treated SiO2 substrates using various concentrations of V2 O5 solution. The relative concentration was measured with respect to the original V2 O5 sol solution. The stamp with a 0.5 µm wide line pattern separated by 0.5 µm was used. With dilution of V2 O5 solution, the transferred pattern became narrower, as shown in figures 3(a)–(c). Figure 3(d) summarizes the dependence of the line width and the height on the concentration of the nanowire solution. The results show that the height as well as the width of the pattern increases with increasing concentration. Presumably, a larger amount of V2 O5 nanowire ink is held in the recess area of the stamp at the higher concentration of V2 O5 solution. However, the line width was always much smaller than that of the pattern on the stamp. Figures 4(a)–(d) show the AFM images of the V2 O5 nanowire patterns transferred onto APS-treated SiO2 substrates using a hydrophilic PDMS stamp. The hydrophobic PDMS stamp was treated with HCl to change its surfaces to be more hydrophilic. It should be noted that the transferred nanowire patterns are distinctively different from those shown in figures 2 and 3 where agglomerated V2 O5 nanowire patterns were formed from the recess region of the stamp with a line width much narrower than those of the carved patterns of the stamp. In the case of hydrophilic stamps, the patterns exactly 1377 Y-K Kim et al (a) (b) (c) (d) (e) (f) Figure 4. (a)–(d) AFM topography images taken in non-contact mode from V2 O5 nanowire patterns transferred using a hydrophilic PDMS stamp. (a), (c) and (d) show the line patterns, and (b) is the square pattern as shown in the inset. The inset of (a) is the high-resolution image showing that the individual V2 O5 nanowires transferred without agglomeration. (e) and (f) are the length distribution of the adsorbed nanowires shown in (c) and (d), respectively. resemble the shapes of the original relief patterns on the stamp. Also, the individual nanowires are observed to have a height of 1.5–3 nm. Attractive interaction between the polar V2 O5 nanowire solution and the hydrophilic stamp surface might hinder the nanowires from becoming entangled. Regardless of the shapes of the stamp patterns, the line width of the transferred nanowire patterns was the same as that of the relief side of the PDMS stamp. Interestingly, we observed that the nanowires remain inside the patterned area even when the line width of the pattern is smaller than the average length of the nanowires. As shown in figures 4(c) and (d), the V2 O5 nanowires do not cross the boundary of the patterns, and they are even aligned in the direction of the boundary of the line patterns without any external force such as an electric field. Figures 4(e) and (f) show the length distribution of the adsorbed nanowires in the images of figures 4(c) and (d), respectively. When the stamp with a relief width of 2.5 µm was used, the average length of the adsorbed V2 O5 nanowires was estimated to be ∼2 µm while it was ∼1 µm with a stamp having a 1.0 µm pattern. The same V2 O5 sols were used in all of the experiments, where the average length of the nanowires was 2 µm with a broad length distribution ranging between 1 and 4 µm [24]. Such interesting results can be explained in terms of the interaction 1378 between the nanowires and the stamp during the inking and blowing steps. Presumably, the relatively long wires from a weak interaction with the stamp can be easily removed from the stamp during the N2 blowing procedure. Therefore, only those wires of length similar to the pattern width would remain on the stamp, and they would be subsequently transferred to the substrate. This phenomenon can be used to precisely position and align nanowires at desired locations on solid substrates. 4. Conclusion We have directly transferred V2 O5 nanowire patterns to chemically functionalized SiO2 substrates by the MCP technique. Controlling the hydrophilicity of the PDMS stamp allows us to produce two different types of pattern. In particular, hydrophobic stamps can be used to transfer agglomerated V2 O5 nanowires via an edge transfer mechanism with a line width narrower than that of the stamp patterns. The line width of the agglomerated V2 O5 nanowires depended on the concentration of the nanowire solution as well as on the recess width of the PDMS stamp. HCl treatment of the PDMS stamp caused the stamp surfaces to become more hydrophilic, and the individual V2 O5 nanowires were transferred from the relief sides of the stamp. These results can be explained in terms of the wetting interactions between the V2 O5 nanowire solution and the PDMS stamp. Acknowledgments This work was supported by the Ministry of Science and Technology (grant no. M10503000187-05M0300-18710), the Basic Research Program of the Korean Science and Engineering Foundation (grant no. R01-2005-000-106480 (2005)) and the Korea Research Foundation (grant no. KRF2004-005-C00068). References [1] Muster J, Kim G T, Krstic V, Park J G, Park Y W, Roth S and Burghard M 2000 Adv. Mater. 12 420 [2] Kim G T, Muster J, Krstic V, Park J G, Park Y W, Roth S and Burghard M 2000 Appl. Phys. Lett. 76 1875 [3] Fuhrer M S et al 2000 Science 288 494 [4] Fennimore A M, Yuzvinsky T D, Han W-Q, Fuhrer M S, Cumings J and Zettl A 2003 Nature 424 408 [5] Tenne R and Zettl A K 2001 Top. Appl. Phys. 80 81 [6] Livage J 1991 Chem. Mater. 3 578 [7] Bullot J, Gallais O, Gauthier M and Livage J 1980 Appl. Phys. Lett. 36 986 [8] Kim G T, Waizmann U and Roth S 2001 Appl. Phys. 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