Wet Scrubber
• Especially for all acidic and/or alkaline
water soluble gaseous emissions . Which
is characterized by low operating costs,
larger handling capacity.
Abatement Type
WS-1000B
Scrubber Type
Wet
Dimens ions (mm)
2650W x 1850D x 2785H
Weight
930Kg
Total Flow rate
2500LPM
Temperature
(For Processing Gas)
Room Temp
Max. No. of Inlet ports
Up to 4
Inlet Port Type option
4 x NW50
Outlet Port Type
4”PP
Wet Scrubber
Application & DRE：
HCl > 99%, Cl2>99%(+NaOH), HBr>99%, NH3>99%, BCL3>99%, SiH4>99%,
SiF4, HF, COF2, ClF3, HF, F2, SiHCl3, SiH2Cl2, SiCl4, POCl3
Process：
Solar, Thin Film, Etching.
EPI (High Flow/Solar applications).
PV Processes
Dedicated NH3 treatment for house separation
Purification Processes
Gas Cabinet Vent
Chemical Manufacturing
All water soluble process gasses
Abatement of halogen gases,ammonia, and other gases used in processes
such as Silicon Epitaxial, Metal Etch, Poly Etch dry-etch and CVD water
soluble gases such as HCl, HF, HBr, NH3, F2, BCl3, Chlorosilanes (SiHCl3,
SiH2Cl2, SiCl4) and Flourosilanes (SiF4).
Wet Scrubber
Advantage:
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Cost effective
Approved by SEMI S2
Burn box function
SiH4 ionization
Longer maintains cycle time
Ventrui’s tube design,4-step water cleaning function
High efficiency small scrubber type gas abatement system. Equipped
with two units of scrubbers, can handle water-soluble and hydrolysable
gas efficiently
High performance and high efficient abatement. It realizes high
performance and high efficient abatement by using a special
combination of non-clogging gas inlet device, high flow spray chambers,
and a unique packed column design.
Wet Scrubber
Advantage:
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Safe for flammable gas incorporation.It is safe during unexpected flammable gas
incorporation to our high specifcations related to explosive gases.
Compact design.It is very compact because of our scrubber designs. It is possible to
install in minimal space.
Excellent economic efficiency Due to original design, it efficiently contacts gasliquid and uses less water and electricity. It realizes low-running cost.
Lowest fresh water consumption in the industry - up to 50% less.
No foaming and no sediment.
Programmable logic scrubber control box automates gas inlet plunger to reactor
functions and reports scrubber status.
High efficiency small scrubber type gas abatement system. Equipped with two units
of scrubbers, can handle water-soluble and hydrolysable gas efficiently
High performance and high efficient abatement.It realizes high performance and
high efficient abatement by a combination of special sprays and fillers.
Wet Scrubber
Advantage:
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Safe for flammable gas incorporation.It is safe during unexpected flammable gas
incorporation to our high specifcations related to explosive gases.
Compact design.It is very compact because of our scrubber designs. It is possible to
install in minimal space.
Excellent economic efficiency Due to original design, it efficiently contacts gasliquid and uses less water and electricity. It realizes low-running cost.
Cleaning efficiency up to 99.99%
Dust reduction up to 99%, without troublesome dry dust disposal
Very low cost of ownership
Fully automated
Highest uptime > 99%
Integrated process and system monitoring
Up to four process inlets can be operated simultaneously
Bypass valving (option)
Wet Scrubber
Advantage:
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Waste gas flow up to 3,000LPM, with three different washing tower sizes available
CMS ( Center Monitor System )
By-Pass to backup scrubber for supporting
APC (Auto Pressure Control)
Remote Monitor System
Burn Box for mass powder process
Flash Arrester for anti back fire
Gas Detector for individual process gases
PH Sensor / Controller
Cabinet exhaust pressure alarm
Inlet pressure alarm