Computational Materials Science 39 (2007) 541–551 www.elsevier.com/locate/commatsci A potential for simulating the atomic assembly of cubic AB compounds X.W. Zhou b a,* , H.N.G. Wadley b a Department of Materials Mechanics, 7011 East Avenue, Sandia National Laboratories, Livermore, California 94551-0969, United States Department of Materials Science and Engineering, 116 Engineer’s Way, University of Virginia, Charlottesville, VA 22904-4745, United States Received 23 June 2006; received in revised form 1 August 2006; accepted 2 August 2006 Abstract Stillinger–Weber interatomic potentials can be used to study the crystal growth of AB compounds with the zinc-blende (B3) structure, but have been unable to be used for other cubic structured compounds. Here we extend a recently modified Stillinger–Weber potential for cubic elements so that it is suited for studying the growth of cubic compounds with the B1 and B2 structures. We also parameterize the potential for the Mg–O system. The potential is shown to accurately model the lattice constants and the cohesive energies of the fcc Mg, fcc O, and the B1 MgO structures. It also correctly ensures that the equilibrium phase of each of these materials possesses the lowest cohesive energy with respect to all their other phases. The potential correctly predicts crystalline growth during molecular dynamics simulations of the vapor deposition of fcc Mg and B1 MgO thin films. The results also reveal the formation of various defects in the films, including islands and twins in Mg, interstitials and disrupted regions on the MgO growth surface, and local un-oxidized regions at the MgO/Mg interface during the oxidation of Mg. The simulation approach enables the study of atomic assembly processes controlling the formation of these defects. 2006 Elsevier B.V. All rights reserved. Keywords: Molecular dynamics simulations; Interatomic potential; Vapor deposition; Thin films 1. Introduction Large tunneling magnetoresistance ratios at ambient temperature [1,2] have been measured for some magnetic tunnel junction (MTJ) multilayers that utilize thin dielectric tunnel barrier layers to separate pairs of thin ferromagnetic metal layers [3,4]. Various metal oxides have been proposed for the tunnel barrier layer [3–6]. Aluminum oxide has been widely used [3,4], in part because thin, continuous, amorphous aluminum oxide films can be relatively easily synthesized by first depositing a thin Al layer on a ferromagnetic metal substrate and then oxidizing the surface. The ambient temperature tunneling magnetoresistance ratio achieved using these amorphous barriers has been reported to be as high as 70% [1]. Recent experiments indicate that crystalline, B1 structure MgO barriers can be * Corresponding author. Tel.: +1 925 294 2851; fax: +1 925 294 3410. E-mail address: [email protected] (X.W. Zhou). 0927-0256/$ - see front matter 2006 Elsevier B.V. All rights reserved. doi:10.1016/j.commatsci.2006.08.005 grown on ferromagnetic metals, resulting in tunneling magnetoresistance ratios as high as 230% [7]. The tunneling magnetoresistance is believed to be sensitive to the atomic scale structure of the tunneling barrier at the barrier/metal interface [8]. This is affected by the growth conditions used to fabricate the tunneling barriers [9]. Atomistic simulations of growth using molecular dynamics are beginning to allow visualization of the atomic assembly mechanisms and the evolution of atomic scale structures as atoms are added to a surface [9,10]. These simulations require an interatomic potential that satisfactorily defines the interatomic forces between the atoms in the system of interest. For systems such as aluminum oxide, ionic (Coulomb) interactions between the metal and oxygen ions can become important. Modified charge transfer, embedded atom method potentials have been used to simultaneously address metallic bonding in metal regions and the variable ionic bonding associated with a continuous variation of ion charge across the 542 X.W. Zhou, H.N.G. Wadley / Computational Materials Science 39 (2007) 541–551 metal/metal oxide interfaces [11,12]. However, these potentials are unsuitable for studying the crystalline growth of MgO barrier layers because they are based on the embedded atom method approach which lacks the angular dependence needed to simulate the lowest cohesive energy, (equilibrium) B1 structure of MgO crystals. Ideally, an integrated charge transfer, angular dependent potential needs to be used for these material systems. As a first step, we develop a suitable angular dependent potential while ignoring the charge transfer effects. Because the variable charge across interfaces cannot be addressed, such a potential can be best utilized for uniform MgO compound. Numerous angular dependent potentials have been proposed for the study of atomic systems with strong angular dependence. They include Stillinger–Weber (SW) [13], Tersoff [14–17], and bond-order potentials [18–22]. To correctly simulate the assembly of MgO crystals whose equilibrium phase has a B1 structure, it is necessary that the interatomic potential correctly predict the lowest (most negative) cohesive energy for the B1 crystal [23,24]. Tersoff and other related bond order potentials are sufficiently flexible that they can be well fitted to the lattice constants and cohesive energies of many phases including those that are relatively unstable under ambient conditions [23,24]. However, this flexibility also introduces difficulties to the fitting, and an extensive set of trials are usually required to identify a set of parameters that correctly predict the lowest cohesive energy for the equilibrium phase and its structural and mechanical properties [24]. Any potential describing interactions among an atom ensemble can be generally written as a sum of two-body, three-body, . . . , N-body contributions. Two-body (pair) interactions are usually sufficient to describe the binding of atoms with only radial (non-directional) bonding symmetry. However, crystals consisting of atoms with highly directional bonds require at least three-body interactions to be included. If properly chosen, the two-body and three-body interactions can reasonably well describe the bonding of many of these systems and other many-body interactions can be ignored [13]. SW potentials link the cohesive energy, Ec, to a sum of a two- (U) and a three(H) body interactions: Ec = U + H. In SW potentials, the three-body term is set equal to zero when the bond angle equals that encountered in diamond-cubic (dc) or zinc-blende (B3) crystal structures. This allows the two-body term alone to fully describe the cohesive energy, the lattice constant, and the bulk modulus of equilibrium dc or B3 phase. Other phases can have lower energy two-body (U) terms than the equilibrium dc or B3 structure. However, these phases are always associated with different bond angles. The lowest energy can always be retained for the dc or B3 phase as long as the three-body H term is designed to increase sufficiently rapidly as the bond angle deviates from that of dc or B3 structure. As a result, SW potentials can be easily parameterized to ensure that no other phases have a lower cohesive energy than the dc or B3 structure while simultaneously predicting accurate lattice constant and cohesive energy for the dc or B3 structured crystal [13,25]. Like most other potentials, the main drawback of the SW potential is that it can only capture well the most stable solid crystal of a material with little or no ability to predict the cohesive energies of metastable solid phases and stable molecular gases (e.g., O2 dimer). This precludes studies of some problems such as O2 molecule formation and evaporation from any O-rich surfaces. When the simulated structure is not far away from the most stable solid crystalline phase, the SW potential can be successfully applied [25–28]. Unfortunately, the usual form of a SW potential can only be applied for dc elements or B3 compounds. One approach to modify the SW potential for wurtzite GaN compound has been proposed [29]. A similar modification to the SW potential has recently been proposed for elemental cubic crystals including those with either the dc, simple-cubic (sc), body-centered-cubic (bcc), or facecentered-cubic (fcc) structure [30]. Here we investigate the further extension of this potential to binary compound crystals with any of the cubic (B1, B2, or B3) structures. To illustrate its application, we fit the potential for the Mg–O system to the exact ab initio values of the cohesive energies and lattice constants of the equilibrium Mg, O, and MgO solid phases. We then use this Mg–O potential to simulate the growth of Mg and MgO films from atomic Mg and Mg + O vapor fluxes. 2. Structural parameters of compound cubic crystals The B1, B2, and B3 unit cells of AB compound crystals and representative crystal lattices are shown in Fig. 1. These structures can be distinguished by various structural parameters. For example, the ratio of the radius of the ith nearest neighbor shell, ri, to that of the nearest neighbor shell, r1, ni = ri/r1, depends on the structure. An atom of type l can have an ith neighbor shell composed of either identical atoms (ll neighbors) or dissimilar atoms (lm neighbors, l 5 m). The number of neighbors in the ith shell, Zi, and a volume conversion factor F relating the atomic volume V to the nearest neighbor distance r1 through V ¼ F r31 are also dependent on the structure. Values of these parameters up to the first four nearest neighbor shells are listed in Table 1 for the three binary AB compound crystal structures. For all ordered AB compound structures, the nearest neighbors are of a dissimilar atomic type while the next nearest neighbors are of an identical type, Table 1. We denote the bond angle formed between atom i and its two nearest neighbors, j and k, by hjik as shown in Fig. 2. The angle, hjik, can be conveniently represented by its cosine value. All possible cosine values of the nearest neighbor bond angle, hjik, their degeneracies, Njik, and the species of atoms i, j, k, are listed in Table 2 for the three compound cubic crystal structures. X.W. Zhou, H.N.G. Wadley / Computational Materials Science 39 (2007) 541–551 (a) 1.0 B1 structure Representative film crystals Unit cells 0.9 y [010] 0.8 y [111] k gνμκ(cosθ) 0.7 A B x [100] z [110] (b) 543 0.6 θijk j B3 0.5 B1 0.4 0.3 z [001] x [112] i 0.2 B2 0.1 B2 structure 0.0 -1.0 -0.8 -0.6 -0.4 -0.2 y [110] y [010] 0.0 0.2 0.4 0.6 0.8 1.0 cosθ A Fig. 2. gmlj functions for mlj = BAB or ABA in B1, B2, and B3 crystals. B x [100] x [001] z [110] Table 2 Cosine values of the bond angle, hjik, their degeneracy, Njik, and the species of i, j, and k for B1, B2, and B3 crystal structures z [001] Compound structures (c) B3 structure y [100] y [010] cos hjik Number of bond angles Njik Species jik (l, m = A, B, l 5 m) B1 1 0 3 12 mlm mlm B2 1 1/3 1/3 4 12 12 mlm mlm mlm B3 1/3 6 mlm A B x [100] z [001] x [011] z [011] Fig. 1. (a) B1 (such as NaCl and MgO); (b) B2 (such as CsCl); and (c) B3 (such as GaAs) structures. energy between atoms i and j separated by a distance rij, ulm(rij) is a positive pair function used in the angular interaction, and gmlj(cos hjik) is a function of the cosine of the bond angle cos hjik. All the functions /lm(rij), ulm(r), and gmlj(cos hjik) depend on the types of interacting atoms, with the subscripts l, m, and j corresponding to the species of atoms i, j, and k, respectively. We seek an interatomic potential for ordered binary compound cubic crystals with an equilibrium B1, B2, or B3 crystal structure. We assume that the elemental potentials are already known or can be determined using the procedures described previously [30]. Since atomic interactions decay quickly as the distance between atoms increases, only closely separated atoms need to be considered during calculations. This can be efficiently achieved by designing a potential that smoothly decays to zero at 3. Modified Stillinger–Weber potential The cohesive energy of an ensemble of atoms predicted by a SW potential [30] can be expressed in the form Ec ¼ iN iN X iN N X N X 1 X 1 X /lm ðrij Þ þ ulm ðrij Þ 2N i¼1 j¼i1 2N i¼1 j¼i1 k¼i 1 k6¼j ulj ðrik Þ gmlj ðcos hjik Þ ð1Þ where Ec is the cohesive energy (eV/atom) for the computational system, N denotes the total number of atoms in the system, i1, i2, . . . , iN are all the neighbors of atom i (including image atoms), /lm(rij) is the pair interaction Table 1 Structural parameters for B1, B2, and B3 crystal structures Compound structures Relative atom spacing ni = ri/r1 i=1 B1 1 B2 1 B3 1 Neighbor species (l, m = A, B, l 5 m) i=2 pffiffiffi q2ffiffi i=3 pffiffiffi q3ffiffi 2 ffiffiffiffi q qffiffi qffiffiffiffi qffiffiffiffi 4 3 8 3 8 3 11 3 i=4 i=1 i=2 i=3 Coordination Zi i=4 i=1 i=2 F-factor i=3 i=4 lm ll lm ll 6 12 8 6 11 3 lm ll ll lm 8 6 12 24 p4ffiffiffiffi 27 1 16 3 lm ll lm ll 4 12 12 6 p8ffiffiffiffi 27 544 X.W. Zhou, H.N.G. Wadley / Computational Materials Science 39 (2007) 541–551 a designated cutoff distance between atoms. The pairwise (two-body) and the angular (three-body) terms may be assigned different cutoff distances. Because the structural stability is mostly determined by the angular dependent short range interactions, and the calculation cost associated with angular dependent terms in a potential is significantly increased when the number of neighbors increases, we focus attention upon a short-range angular term between the dissimilar species in an AB compound that involves only the nearest neighbor interactions. For the pairwise term between dissimilar species, the cutoff distance is allowed to go beyond the second nearest neighbor distance. The interaction ranges between identical species are fully defined by the elemental potentials. The cutoff distances of elemental potentials have been chosen to include only the nearest neighbors in the dc, sc, and fcc structures but have been extended to include the second nearest neighbors for the bcc structure [30]. The distance between neighbors scales with the lattice constant. When the elemental structure is bcc, or when the lattice constant of the elements is significantly larger than that of the compound, the interaction between identical species AA and BB may occur beyond the nearest neighbors in the equilibrium AB compound structure. To account for the considerations described in the above, the interaction range (and hence the neighbor list i1, i2, . . . , iN) used in Eq. (1) is viewed to extend to the nth nearest neighbor shell of the AB compound, where n could be larger than unity and is dependent on the pre-determined elemental potentials. The radially dependent functions between a pair of atoms with species l and m, /lm(r) and ulm(r), are given by r 4 rlm rlm lm /lm ðrÞ ¼ Alm S lm exp Alm exp r r rc;lm r rc;lm ð2Þ and clm ulm ðrÞ ¼ C lm exp r ruc;lm ð3Þ where Alm, Slm, Clm, rlm, clm, rc,lm and ruc,lm are seven fitting parameters for each of the three types of atom pairs lm = AA, BB, and AB (or BA). Efficient simulations can be achieved by truncating the potentials at selected cutoff distances and the parameters rc,lm and ruc,lm represent these cutoff distances for the two functions respectively. Note that because the elemental potentials are assumed to be known, only seven free parameters between dissimilar species, AAB, SAB, CAB, rAB, cAB, rc,AB and ruc,AB, need to be determined. The angularly dependent function, gmlj(h), can be expressed using quadratic splines gmlj ðcos hÞ ¼ go;n;mlj þ vn;mlj ðcos h cos hn;mlj Þ2 ; xmin;n;mlj 6 cos h < xmax;n;mlj ; n ¼ 1; 2; . . . ; M mlj ð4Þ where go,n,mlj, vn,mlj, cos hn,mlj, xmin,n,mlj, xmax,n,mlj and Mmlj are six sets of parameters corresponding to six types of three-bodies, mlj = AAA, BBB, BAB, ABA, AAB (equivalent to BAA), and ABB (equivalent to BBA). The parameters for mlj = AAA or BBB are known. There are no AAB/BAA or ABB/BBA three-bodies in the perfect compounds, and their angular functions do not therefore affect the bulk properties of these compounds. As a result, these angular interactions can be ignored and it is possible to then simply set Mmlj = 1, go,1,mlj = 0 and v1,mlj = 0 for mlj = AAB/BAA or ABB/BBA. The remaining parameters that need to be defined for the binary system are then go,n,mlj, vn,mlj, cos hn,mlj, xmin,n,mlj, xmax,n,mlj and Mmlj for mlj = BAB and ABA. Further reductions are achieved from symmetry since the parameters for mlj = BAB are identical to those for mlj = ABA. The first and the second terms on the right-hand side of Eq. (1) represent the two-body (U) and the three-body (H) contributions respectively. The modified SW potential takes the normalized form so that the first term is set equal to the cohesive energy of the equilibrium phase regardless of its (B3, B2 or B1) structure. This normalized potential can predict accurate cohesive energy for the equilibrium phase if the second term vanishes when the bond angles approach those of the equilibrium phase. To ensure the lowest energy for the equilibrium phase, the second term is designed to increase rapidly as the bond angles deviate from those of the equilibrium phase. Eq. (1) shows that the second angularly dependent term in a compound structure is composed of contributions from identical and dissimilar three-body interactions. Since the nearest neighbors in the compound are dissimilar, the angular contribution from the identical three-bodies are zero unless the cutoff distance of the elemental potentials exceeds the second nearest neighbor distance in the compound. This only occurs when the lattice constant of the elements is significantly larger than that of the compound. It should be noted that the pre-determined elemental potentials are also normalized. This means that the identical three-body angular contribution is zero even for large elemental cutoff distance as long as the two sublattices of the equilibrium AB compound structure coincide with the equilibrium lattices of the two elements occupying the two respective sublattices. When the predetermined identical three-body contribution to the angular term is zero, a normalized compound potential can be easily obtained by setting the dissimilar three-body contribution to be zero. This can be achieved when the quadratic spline function, Eq. (4), is used for the dissimilar three-body interactions. The parameters needed for the quadratic spline functions for the three (B1, B2, and B3) crystal structures are shown in Table 3. The gmlj functions defined in Table 3 are plotted in Fig. 2 for the three crystal structures. It can be seen that these functions approach zero when the bond angles become equal to those of the corresponding crystal structures, Table 2. X.W. Zhou, H.N.G. Wadley / Computational Materials Science 39 (2007) 541–551 Table 3 Angular function parameters for the three-body mlj = BAB or ABA in B1, B2, and B3 crystal structures Structures Mmlj n xmin,n,mlj B1 3 1 1.00000 0.75000 1.00000 1.0 2 0.75000 0.25000 0.50000 1.0 3 0.25000 1.00000 0.00000 1.0 0.00000 0.12500 0.00000 B2 5 1 2 3 4 5 1.00000 0.83333 1.00000 1.0 0.83333 0.50000 0.66667 1.0 0.50000 0.16667 0.33333 1.0 0.16667 0.16667 0.00000 1.0 0.16667 1.00000 0.33333 1.0 0.00000 0.05556 0.00000 0.05556 0.00000 B3 1 1 1.00000 xmax,n,mlj cos hn,mlj vn,mlj go,n,mlj 1.00000 0.33333 1.0 0.00000 4. Potential parameterization for Mg–O system At room temperature, MgO and Mg have B1 and hexagonal-close-packed (hcp) crystal structures [31] and O exists as a diatomic gas. Local density function approximation (LDA) calculations using the Vienna Ab-initio Simulation Package (VASP) [32] were first performed to determine the cohesive energies of diamond-cubic (dc), simple-cubic (sc), body-centered-cubic (bcc), face-centered-cubic (fcc) and hcp structures for elemental oxygen and magnesium and B1, B2 and B3 structures for the stoichiometric compound MgO. We found that the fcc O had the lowest cohesive energy of all the solid phases studied. Because fcc and hcp structures have identical nearest neighbor bonding, the fcc and hcp Mg structures were found to have similar cohesive energies that were both lower than those of any other phases. The B1 structure of MgO was found to have the lowest cohesive energy. The predictions that the hcp/fcc phase of Mg and the B1 phase of MgO have the lowest cohesive energies are in good agreement with the observations of these phases under ambient conditions [31]. According to this analysis, we selected fcc O, fcc Mg, and 545 B1 MgO as the model equilibrium phase structures for subsequent potential parameterization. The elemental potentials for O and Mg were determined using the approaches described in the elemental analysis [30]. Once the elemental potentials are determined, the only unknown functions in Eq. (1) are /AB and uAB. Some analytical equations relating these two functions to material properties have been derived and are given as Eqs. (A.1)– (A.3) in Appendix A and as Eq. (B.1) in Appendix B. Eqs. (A.1)–(A.3) enable the parameterization of the /AB term so that the potential predicts exactly ‘‘target values’’ for the lattice constant, a, the cohesive energy, Ec, and the bulk modulus, B, of the equilibrium compound crystal structure. Eq. (B.1) enables the parameterization of the uAB term in such a way that the potential well predicts the shear moduli, C11 and C44, of the equilibrium compound phase. However, these equations do not enable the fitting of other metastable phases and they cannot ensure that the equilibrium phase has the lowest cohesive energy. To correctly simulate the crystalline growth of the equilibrium crystal phase, it is essential that the potential predicts the lowest cohesive energy for the equilibrium phase and yields physical cohesive energy vs. atomic volume curves for all the phases. This was achieved by adjusting the target values of the bulk modulus (B) and elastic moduli (C11 and C44) during parameterization using Eqs. (A.1)–(A.3) and (B.1). Such a fitting procedure does not yield a highly accurate prediction of these elastic constants, but results in a potential that adequately describes these and other properties. A complete set of potential parameters determined using this procedure are listed in Table 4. The cohesive energy, lattice constant, and elastic moduli predicted by the potentials for the equilibrium crystal phases are compared with the results of the LDA calculations in Table 5. Table 5 shows that the potentials predict exactly the target values of cohesive energy and lattice constant for Table 4 Parameters for the Stillinger–Weber potentials for Mg–O system Pair lm Alm (eV) Slm Clm (eV1/2) rlm (Å) clm (Å) rc,lm (Å) ruc,lm (Å) MgMg OO MgO 2.936977 2.264679 2.842769 1.836933 1.030683 123.5643000 0.000000 0.000000 1.583780 2.322254 2.140179 0.418141 0.000000 0.000000 0.350756 4.511678 3.530965 2.979658 0.000000 0.000000 2.979658 Table 5 Cohesive energy, Ec, lattice constant, a, bulk modulus, B, elastic constants, C11, C12, and C44, for Mg (fcc), O (fcc), and MgO (B1) Elastic constants (eV/Å3) Materials Data type Cohesive energy Ec (eV/atom) Lattice constant a (Å) B C11 C12 C44 fcc Mg Potential LDA 1.472 1.472 4.513 4.513 0.426 0.213 0.639 0.292 0.320 0.174 0.320 0.154 fcc O Potential LDA 0.761 0.761 3.532 3.532 0.570 0.380 0.855 0.581 0.428 0.280 0.428 0.194 B1 MgO Potential LDA 4.997 4.997 4.234 4.234 0.930 0.930 2.034 1.666 0.378 0.562 1.316 0.916 eV/Å3 = 160 GPa. 546 X.W. Zhou, H.N.G. Wadley / Computational Materials Science 39 (2007) 541–551 Table 6 Cohesive energy Ec (eV/atom) of various phases for Mg, O, and MgO Material Mg O MgO (a) (b) Mg, T = 300 K y [111] Structure dc/B3 sc/B1 bcc/B2 fcc 0.491 0.254 2.853 0.736 0.380 4.997 1.470 0.734 4.458 1.472 0.761 – MgO, T = 650 K y [111] Mg disrupted region O Mg interstitial Table 7 Lattice constant a (Å) of various phases for Mg, O, and MgO Material Structure dc/B3 sc/B1 bcc/B2 fcc Mg O MgO 7.378 5.768 4.695 3.190 2.498 4.233 3.501 2.752 2.677 4.512 3.532 – the three equilibrium crystal phases. The prediction of the elastic constants for the B1 MgO structure is also very good. However, the elastic constants for the closely packed fcc Mg and fcc O cannot be well captured by the pair function format used in the current version of the SW potential. This is consistent with earlier findings [30]. Calculations were carried out to determine the cohesive energies for other Mg, O and MgO phases. The results for the cohesive energy and the lattice constant are summarized in Tables 6 and 7 respectively. Table 6 confirms that the model equilibrium (fcc) Mg, (fcc) O, and (B1) MgO phases all have the lowest cohesive energies compared with their other structures. 5. Molecular dynamics simulations Both Tersoff and bond order potentials have superior formats to SW potentials that can be justified from firstprinciples [22]. However, few analytical bond order potentials are currently available and we find that most published Tersoff potentials predict anomalous amorphous structures when used for molecular dynamics simulations of crystal growth [23]. To correctly capture the crystalline growth, a potential must predict the lowest energy for the equilibrium phase against any of the other configurations, reproduce well the defect energies, satisfy the mechanical stability conditions, and have reasonably long cutoff distance to sample the atomic interactions on a surface. We find that most published Tersoff potentials fail at least one of these requirements. In general, molecular dynamics simulation of vapor deposition is a sensitive test of the performance of a potential. They are therefore used to test the modified SW potential for AB compounds. 5.1. Thin film deposition The Mg–O potential parameterized above was tested by using it to simulate the growth of Mg and MgO films from the vapor and the oxidation of an Mg film to create an MgO layer on Mg metal. A molecular dynamics approach twin z [110] 5Å x [112] z [110] 5 Å x [112] Fig. 3. Atomic configurations for the films deposited using an adatom incident energy of 1.0 eV, an adatom incident direction normal to the surface, and a growth rate of 0.5 nm/ns. (a) Mg, T = 300 K; and (b) MgO, T = 650 K. The substrate regions prior to deposition are shaded. [9,10] was first used to simulate the growth of the fcc Mg and B1 MgO crystals on their close-packed (1 1 1) crystal surfaces. The simulations utilized an adatom energy of 1.0 eV, an adatom incident direction normal to the surface, and a growth rate of 0.5 nm/ns. The Mg film was grown at a temperature of 300 K while the MgO film was grown at a temperature of 650 K. An equiatomic Mg–O vapor flux was used for the MgO growth. The atomic configurations of the films obtained after 2000 ps of deposition are displayed in Fig. 3(a) and (b), where the shaded region represents the substrate prior to deposition. It can be seen from Fig. 3(a) that the simulation of Mg deposition on an fcc Mg substrate correctly predicted the epitaxial growth of an fcc crystalline Mg layer. An island of several atomic layer thick is seen to have developed at the relatively low growth temperature of 300 K and the extremely high simulated deposition rate. The formation of such islands is commonly seen in simulations of the accelerated growth of fcc materials in the [1 1 1] direction [10,33]. This arises because adatoms condensed on the surface of an island have insufficient time to overcome the Erlich–Schwobel barriers and migrate to the lower energy ledge sites responsible for gradual expansion of the island and reduction in its height. Fig. 3(a) also shows a thin twinned region between the initial substrate and the deposited layer. This arises because fcc Mg is stacked with ABCABC. . . (1 1 1) planes in the [1 1 1] (growth) direction. On a given A plane, adatoms falling on twinned (C) sites are likely to be retained at these sites since their binding energy is almost identical to that of the lattice (B) sites. As a result, twins are nucleated and merge to form structures like that seen in the simulations [34]. Fig. 3(b) shows that MgO deposition resulted in the epitaxial growth of a B1 crystalline MgO film. This is consistent with the low energy electron diffraction (LEED) experiments, which indicate that a fully oxidized MgO layer has good registry with an Mg substrate [35]. Fig. 3(b) also reveals regions of defective structure. These defects include an interstitial near the original substrate X.W. Zhou, H.N.G. Wadley / Computational Materials Science 39 (2007) 541–551 surface and a disrupted region on the surface. Experimentally, the MgO film in the MTJ multilayers with the highest magnetoresistance ratio was grown using a low pressure sputtering process [7]. These low pressure sputtering processes result in a high adatom energy which facilitates flattening of the surface [9], improved crystallinity [26], and reduced defect concentrations [36]. 5.2. Mg surface oxidation The molecular dynamics approach can also be used to simulate the oxidation of a (1 1 1) Mg surface. The initial Mg crystal was generated using the potential predicted lattice constant. Its oxidation was simulated by continuously injecting oxygen atoms perpendicularly to the top (1 1 1) Mg surface using an oxygen flux of 2.24 · 104 atom ps1 Å2, a substrate temperature of 800 K, and an oxygen adatom energy of 1.0 eV. The atomic scale configuration of the initial Mg crystal is shown in Fig. 4(a), and the structure of the surface after 1200 ps of oxidation is shown in Fig. 4(b). To more clearly examine the Mg–O bonds in the MgO oxide layer, the bars used in Fig. 4(a) to connect the Mg atoms are dropped in Fig. 4(b). It can be seen that a crystalline B1 MgO film formed on the (1 1 1) Mg surface. No misfit dislocations were observed in the relatively small system simulated. This is consistent with the relatively small lattice mismatch between Mg and MgO (Table 5). Fig. 4 indicates that the MgO oxide formed under the simulated conditions was non-uniform as the bottom MgO/Mg interface is not flat. The transformation towards a flat MgO/Mg interface requires additional oxygen diffusion to the incompletely oxidized interface regions. In experiments, MgO tunnel barrier layers are normally synthesized by co-depositing Mg and O rather than by the oxidation of a pre-deposited Mg layer. (a) before oxidation y [111] (b) 1200 ps after oxidation The modified MgO SW potential may provide a useful means to explore improved ways to grow more uniform MgO tunnel barrier layers. 6. Conclusions A modified SW potential is proposed for ordered AB compounds with cubic B1, B2, and B3 structures. This modified SW potential is well suited for molecular dynamics simulations of vapor deposition and has been parameterized for the Mg–O system. The parameterized potential reproduces exactly the cohesive energy and lattice constant for the lowest energy crystal phases: fcc Mg, fcc O, and B1 MgO. For the B1 structure of MgO, the modified potentials also predict well the elastic constants obtained from ab initio calculations. As previously identified, the elastic constants for the closely packed fcc Mg and fcc O crystals are not satisfactorily predicted [30]. The potentials do predict crystalline growth of the model equilibrium phases and the formation of the B1 MgO oxide phase during oxidation of a (1 1 1) Mg surface. Preliminary simulations indicated the formation of islands and twins during Mg growth, the formation of interstitials and disrupted regions during MgO growth, and the formation of a non-uniform MgO/Mg interface due to locally incomplete oxidation of Mg. The MgO potential and the simulation approach will enable the role of synthesis conditions upon the formation of these defects to be explored. Acknowledgements We are grateful to the Defense Advanced Research Projects Agency and Office of Naval Research (C. Schwartz and J. Christodoulou, Program managers) for support of this work through Grant N00014-03-C-0288. Appendix A. Lattice constant, cohesive energy, and bulk modulus y [111] Analytical relations defining lattice constant, cohesive energy (relative energy per atom in a solid with that of an isolated atom), and bulk modulus are derived for the potential. From the considerations discussed above, the angular term for the equilibrium compound phase remains at zero during hydrostatic straining (i.e., bond angles remain constant). The cohesive energy defined by Eq. (1) is then radial dependent only. If the pair potentials include an interaction up to the nth nearest neighbor shell, the cohesive energy can be rewritten in a normalized form as O Mg Mg z [110] 547 5Å x [112] z [110] 5Å x [112] Fig. 4. Atomic configurations of the Mg surface before and after oxidation using the conditions: a substrate temperature of 800 K, an oxygen adatom incident energy of 1.0 eV, an oxygen adatom incident direction normal to the surface, and an oxygen flux of 2.24 · 104 atom ps1 Å2. (a) Before oxidation and (b) 1200 ps after oxidation. Ec ¼ ¼ n n 1X 1X Z j /AlA;j ðrj Þ þ Z j /BmB;j ðrj Þ 4 j¼1 4 j¼1 n n 1 X 1 X Z j /AlA;j ðrj Þ þ Z j /BmB;j ðrj Þ 4 j¼1 4 j¼1 lA;j ¼A mB;j ¼B 548 X.W. Zhou, H.N.G. Wadley / Computational Materials Science 39 (2007) 541–551 þ n n 1 X 1 X Z j /AlA;j ðrj Þ þ Z j /BmB;j ðrj Þ 4 j¼1 4 j¼1 lA;j 6¼A mB;j 6¼B n n 1 X 1 X Z j /AA ðrj Þ þ Z j /BB ðrj Þ ¼ 4 j¼1 4 j¼1 lA;j ¼A AAB þ 2 n X mB;j ¼B " Z j S AB j¼1 lA;j 6¼A rAB r1 ! # 4 4 rAB 1 r1 1 exp r nj nj c;AB r1 ðA:1Þ In Eq. (A.1), j loops from the nearest neighbor (j = 1) to the nth nearest neighbor (j = n), and lm,j represents the species in the jth neighbor shell from an atom of species m. Two subscripts (m and j) are needed in lm,j because the species in the jth nearest neighbor of an atom type m depends on both m and j, Table 1. Note that /AA and /BB are known. Eq. (A.1) therefore defines a relationship between a material property (the lattice cohesive energy) and the free parameter of the potential, AAB, SAB, rAB, and rc,AB. At the equilibrium condition, the radial derivative of the cohesive energy equals zero: E0c ¼ dEc =dr1 ¼ 0. From Eq. (A.1), we can therefore write n 1 X E0c ¼ 0 ¼ Z j nj /0AA ðrj Þ 4 j¼1 lA;j ¼A n X þ 1 4 2 j¼1 lB;j ¼B Z j nj /0BB ðrj Þ þ 4S AB rrAB 1 6 4 exp n AAB rAB X Z j nj 2 2 r1 j¼1 l 6¼A 3 3 2 A;j 4 rc;AB rAB nj r 1 S AB r1 nj þ n5j 7 5 2 r n5j nj c;AB r1 ! rAB r1 r nj c;AB r1 ðA:2Þ Eq. (A.2) gives a second relationship between a material property (the equilibrium nearest atomic spacing r1 that corresponds to lattice constant a) and potential free parameters. The elastic bulk modulus B ¼ V d2 Ec =dV 2 ¼ r21 00 Ec =ð9V Þ is related to the second derivative of the cohesive energy with respect to r1, E00c (V is the atomic volume). Differentiation of Eq. (A.2) yields E00c ¼ Eq. (A.3) provides a third relationship between material property (the bulk modulus) and the free parameters of the potential. Eqs. (A.1)–(A.3) involve three equations with four unknown parameters AAB, SAB, rAB and rc,AB. Once a value for rc,AB is selected, the values of AAB, SAB, and rAB can be solved. If the solutions exist, they then allow an exact prediction of target values for the lattice constant, cohesive energy, and bulk modulus of an equilibrium compound crystal structure. Appendix B. Shear moduli In addition to bulk modulus B, the shear moduli C11 and C44 can be selected as the other two independent elastic constants of a cubic crystal. Analytical equations relating the potential function uAB to C11 and C44 are derived. Using an approach described previously[30], the shear moduli Caa (a = 1, 2, . . . , 6) for a equilibrium compound crystal structure can be written as " 2 iN N X 1 X orij o2 rij 00 C aa ¼ /lm ðrij Þ þ /0lm ðrij Þ 2 2N V i¼1 j¼i1 oea oea 2 # iN X o cos h jik þ ulm ðrij Þulj ðrik Þg00mlj ðcos hjik Þ oea k¼i 1 k6¼j " 2 iN N X 1 X orij o2 rij 00 /AA ðrij Þ þ /0AA ðrij Þ 2 ¼ 2N V i¼1 j¼i1 oea oea l¼A m¼A þ2 iN X k¼i1 k6¼j j¼A 2 # o cos h jik u2AA ðrij Þ oea " 2 iN N X 1 X orij 00 þ /BB ðrij Þ 2N V i¼1 j¼i1 oea l¼B m¼B þ o2 rij /0BB ðrij Þ 2 oea þ2 iN X k¼i1 k6¼j j¼B 9V B r21 rAB n n n 1 X 1 X AAB rAB X r1 2 ¼ Z j n2j /00AA ðrj Þ þ Z j n2j /00BB ðrj Þ þ Z n exp j rc;AB j 4 j¼1 4 j¼1 2 r31 n j r1 j¼1 lA;j ¼A 2 lB;j ¼B u2BB ðrij Þ o cos hjik oea 2 # ! lA;j 6¼A 4 3 4 5 3 r rc;AB 4rc;AB rc;AB 6 rAB 2 rAB rAB rAB 2n6j nj c;AB n þ 2S n 5n þ S n n þ 20S n AB AB AB j j j j j j r1 r1 r1 r1 r1 r1 r1 r1 6 7 4 5 4 r n6j nj c;AB r1 ðA:3Þ X.W. Zhou, H.N.G. Wadley / Computational Materials Science 39 (2007) 541–551 " 2 iN N X 1 X orij o2 rij 00 þ /AB ðrij Þ þ /0AB ðrij Þ 2 2N V i¼1 j¼i1 oea oea m6¼l þ2 iN X k¼i1 k6¼j j6¼l ¼ u2AB ðrij Þ o cos hjik oea where 2 iX N N ðmÞ 1 X orij ; F m;AA ðaÞ ¼ 2N r21 i¼1 j¼i ðmÞ oea 2 # 1 l¼A 2 iX n 6 N N ðmÞ X 1 X orij 6 00 6/AA ðrm Þ 2N V m¼1 4 oea i¼1 j¼i ðmÞ 1 l¼B 1 l¼A m¼A F m;AB ðaÞ ¼ iX N N ðmÞ X o2 rij oe2a i¼1 j¼i ðmÞ þ 2u2AA ðrm Þ 3 2 o cos hjik 7 7 7 oea 5 ðmÞ þ Gm;AB ðaÞ ¼ þ 2u2BB ðrm Þ 2 N X 3 2 o cos hjik 7 7 7 oea 5 ðmÞ iX N ðmÞ i¼1 j¼i1 ðmÞ k¼i1 l¼B m¼B j¼B k6¼j 2 iX n 6 N N ðmÞ X 1 X orij 6 00 þ 6/AB ðrm Þ 2N V m¼1 4 oea i¼1 j¼i ðmÞ i¼1 j¼i1 ðmÞ m6¼l þ 2u2AB ðrm Þ N X iX N ðmÞ 2 o rij oe2a 3 2 o cos hjik 7 7 7 oea 5 ðmÞ iX N ðmÞ i¼1 j¼i1 ðmÞ k¼i1 m6¼l j6¼l k6¼j ¼ n 1 X ½r2 /00 ðrm ÞF m;AA ðaÞ þ r1 /0AA ðrm ÞGm;AA ðaÞ V m¼1 1 AA n 1 X ½r2 /00 ðrm ÞF m;BB ðaÞ þ u2AA ðrm ÞH mm;AA ðaÞ þ V m¼1 1 BB þ r1 /0BB ðrm ÞGm;BB ðaÞ þ u2BB ðrm ÞH mm;BB ðaÞ n 1 X þ ½r2 /00 ðrm ÞF m;AB ðaÞ þ r1 /0AB ðrm ÞGm;AB ðaÞ V m¼1 1 AB þ u2AB ðrm ÞH mm;AB ðaÞ 2 iX iX N N ðmÞ N ðmÞ 1 X o cos hjik H mm;AA ðaÞ ¼ ; N i¼1 j¼i ðmÞ k¼i ðmÞ oea l¼A 1 1 m¼A j¼A k6¼j 2 iX iX N N ðmÞ N ðmÞ 1 X o cos hjik H mm;BB ðaÞ ¼ ; N i¼1 j¼i ðmÞ k¼i ðmÞ oea 1 1 m¼B j¼B k6¼j 2 iX iX N N ðmÞ N ðmÞ 1 X o cos hjik H mm;AB ðaÞ ¼ N i¼1 j¼i ðmÞ k¼i ðmÞ oea 1 þ /0AB ðrm Þ iX N N ðmÞ 1 X o2 rij ; 2N r1 i¼1 j¼i ðmÞ oe2a l¼B m6¼l iX N N ðmÞ X m¼B m6¼l 1 iX N ðmÞ iX N N ðmÞ 1 X o2 rij ; 2N r1 i¼1 j¼i ðmÞ oe2a 1 iX N N ðmÞ X o2 rij oe2a i¼1 j¼i ðmÞ m¼B m¼A 1 m¼B l¼B 1 l¼B 1 /0BB ðrm Þ iX N N ðmÞ 1 X o2 rij ; 2N r1 i¼1 j¼i ðmÞ oe2a l¼A Gm;BB ðaÞ ¼ 2 iX n 6 N N ðmÞ X 1 X orij 6 00 þ 6/BB ðrm Þ 2N V m¼1 4 oea i¼1 j¼i ðmÞ l¼B Gm;AA ðaÞ ¼ iX N ðmÞ i¼1 j¼i1 ðmÞ k¼i1 l¼A m¼A j¼A k6¼j 2 2 iX N N ðmÞ 1 X orij ; 2N r21 i¼1 j¼i ðmÞ oea 1 m¼A iX N N ðmÞ X m¼B m6¼l 1 l¼A m¼A 2 iX N N ðmÞ 1 X orij ; F m;BB ðaÞ ¼ 2 2N r1 i¼1 j¼i ðmÞ oea 2 þ /0AA ðrm Þ 549 ðB:1Þ 1 1 m6¼l j6¼l k6¼j ðB:2Þ In Eqs. (B.1) and (B.2), i sums over atoms in the system, j and k sum over i’s neighbors, m sums over neighbor shells, and the notation i1(m), i2(m), . . . , iN(m) indicates a sub-list of i’s neighbors that are in the mth nearest neighbor shell. Fm,lm, Gm,lm, and Hmm,lm are independent of the lattice constant, and can be viewed as constants for each crystal structure. Selected values of Fm,lm, Gm,lm, and Hmm,lm needed for the C11 and C44 calculations are shown in Tables B1–B3 for the three binary compound crystals. Because only the nearest angular interaction is considered for the dissimilar species AB, the only unknown in Eq. (B.1) is uAB(r1). One way to optimize uAB(r1) is to minimize the square deviation of the predicted C11 and C44 from their target values. This yields 550 X.W. Zhou, H.N.G. Wadley / Computational Materials Science 39 (2007) 541–551 Table B1 Selected values of Fm,lm for B1, B2, and B3 crystals Structures m Fm,AA(1) Fm,AA(4) Fm,BB(1) Fm,BB(4) Fm,AB(1) Fm,AB(4) B1 1 2 3 4 0.00000 1.00000 0.00000 2.00000 0.00000 0.50000 0.00000 0.00000 0.00000 1.00000 0.00000 2.00000 0.00000 0.50000 0.00000 0.00000 1.00000 0.00000 1.33333 0.00000 0.00000 0.00000 1.33333 0.00000 B2 1 2 3 4 0.00000 0.66667 1.33333 0.00000 0.00000 0.00000 0.66667 0.00000 0.00000 0.66667 1.33333 0.00000 0.00000 0.00000 0.66667 0.00000 0.44444 0.00000 0.00000 10.06061 0.44444 0.00000 0.00000 2.30303 B3 1 2 3 4 0.00000 1.33333 0.00000 2.66667 0.00000 0.66667 0.00000 0.00000 0.00000 1.33333 0.00000 2.66667 0.00000 0.66667 0.00000 0.00000 0.22222 0.00000 5.03030 0.00000 0.22222 0.00000 1.15152 0.00000 Table B2 Selected values of Gm,lm for B1, B2, and B3 crystals Structures m Gm,AA(1) Gm,AA(4) Gm,BB(1) Gm,BB(4) Gm,AB(1) Gm,AB(4) B1 1 2 3 4 0.00000 0.70711 0.00000 0.00000 0.00000 0.35355 0.00000 0.50000 0.00000 0.70711 0.00000 0.00000 0.00000 0.35355 0.00000 0.50000 0.00000 0.00000 1.53960 0.00000 0.50000 0.00000 0.38490 0.00000 B2 1 2 3 4 0.00000 0.00000 0.81650 0.00000 0.00000 0.28868 0.40825 0.00000 0.00000 0.00000 0.81650 0.00000 0.00000 0.28868 0.40825 0.00000 0.88889 0.00000 0.00000 2.40544 0.22222 0.00000 0.00000 2.62699 B3 1 2 3 4 0.00000 0.81650 0.00000 0.00000 0.00000 0.40825 0.00000 0.57735 0.00000 0.81650 0.00000 0.00000 0.00000 0.40825 0.00000 0.57735 0.44444 0.00000 1.20272 0.00000 0.11111 0.00000 1.31350 0.00000 Hmm,AB(1) Hmm,AB(4) Table B3 Selected values of Hmm,lm for B1, B2, and B3 crystals Structures m Hmm,AA(1) Hmm,AA(4) Hmm,BB(1) Hmm,BB(4) B1 1 2 0.00000 14.00000 0.00000 6.00000 0.00000 14.00000 0.00000 6.00000 0.00000 0.00000 8.00000 0.00000 B2 1 2 0.00000 0.00000 0.00000 4.00000 0.00000 0.00000 0.00000 4.00000 18.96296 0.00000 3.16049 0.00000 B3 1 2 0.00000 14.00000 0.00000 6.00000 0.00000 14.00000 0.00000 6.00000 4.74074 0.00000 0.79012 0.00000 vffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffi uH u 11;AB ð1Þ V C 11 þ H 11;AB ð4Þ V C 44 ( ) u u Pn r21 ½/00AA ðrm ÞF m;AA ð1Þ þ /00BB ðrm ÞF m;BB ð1Þ þ /00AB ðrm ÞF m;AB ð1Þ u u H 11;AB ð1Þ m¼1 u þr1 ½/0AA ðrm ÞGm;AA ð1Þ þ /0BB ðrm ÞGm;BB ð1Þ þ /0AB ðrm ÞGm;AB ð1Þ u ( ) u u Pn r21 ½/00AA ðrm ÞF m;AA ð4Þ þ /00BB ðrm ÞF m;BB ð4Þ þ /00AB ðrm ÞF m;AB ð4Þ u H 11;AB ð4Þ u m¼1 þr1 ½/0AA ðrm ÞGm;AA ð4Þ þ /0BB ðrm ÞGm;BB ð4Þ þ /0AB ðrm ÞGm;AB ð4Þ u u u H 2 2 2 2 11;AB ð1Þ½uAA ðr2 ÞH 22;AA ð1Þ þ uBB ðr 2 ÞH 22;BB ð1Þ H 11;AB ð4Þ½uAA ðr2 ÞH 22;AA ð4Þ þ uBB ðr2 ÞH 22;BB ð4Þ t uAB ðr1 Þ ¼ H 211;AB ð1Þ þ H 211;AB ð4Þ ðB:3Þ X.W. 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