NF3
Nitrogen Trifluoride
Transportation
Information
(M)SDS Reference
P-4854
UN Number: 2451
Shipping Name
Hazard Class
Label
United States of America
Canada
Mexico
NitrogenNitrogenNitrogen
Trifluoride
Trifluoride
Trifluoride
2.2 (5.1)
2.2 (5.1)
2.2
Nonflammable Nonflammable
Nonflammable
Gas, Oxidizer
Gas, Oxidizer
Gas, Oxidizer
CAS Number
7783 - 54 - 2
General Description
Colorless, odorless, nonflammable,
corrosive, toxic gas.
Product/Grade
Purity Part
CylinderO2H2ON2CO2N2OCF4SF6
COCH4 Acidity
Number
Semiconductor, 4.0
99.99%
NF 4.0SP
K
5
15
3340
5111
Concentrations given are ppm by volume unless otherwise specified.
Maximum ppm unless otherwise noted.
Cylinders
Section B – Pure Gases
Cylinder
Type
K
Style
High Pressure Steel
Size
in (cm)
51 x 9 (129.5 x 22.9)
Connection
CGA/DISS
330/640 Pressure psig (bar)
1450 (145)
Volume
lb (kg)
44 (20)
Gross Weight
lb (kg)
179 (81)
Equipment Recommendations
i
See Section D for additional information
on Praxair’s Semiconductor product
line (pages D•143 - D•148).
See our complete line of gas delivery
systems in Section E, including
gas cabinets, process panels, and
controllers.
UltraPurge™ 400 Gas Cabinet Series
(see page E•306)
B•68
1-877-PRAXAIR
www.praxairdirect.com