B.VS.105.1
Unmatched
synergy by
integrating
two pumping
technologies
The NEXTorr pump is not just a combination of two different pumps. The integration of
the getter and the ion elements has been optimized to enhance pumping performance.
Gases released by the ion pump during the operation are intercepted and removed
by the getter element, with a substantial reduction of back-streaming effects. For the
same reasons, increased pumping efficiency for H2 and CH4 are obtained. Fine titanium
particles which may be sputter-emitted by the ion pumps during operation are also
effectively trapped by the getter element, reducing the potential contamination of the
vacuum system.
Pump down results in a chamber
fitted with the NEXTorr D100-5 and
with a 75 l/s sputter ion pump.
A factor 2 improvement in the
base pressure is achieved. Similar
improvements have been achieved
for the other NEXTorr models when
compared with Sputter ion pumps
of similar nominal pumping speed
(H2).
1.E-04
Pressure (Torr)
Pump down
1.E-05
Pressure (Torr)
NEXTorr
1.E-08
SIPs Off: Rate of Rise Test
4.8
5.3
5.8
Time (day)
SAES Getters S.p.A., Capital Stock Euro 12,220,000 f.p., Executive Office: Viale Italia, 77 - 20020 Lainate (Milan), Italy
Registered with the Milan Court Companies Register no. 00774910152
40
20
NEXTorr
0.5
1.0
1.5
2.0
2.5
0
3.0
Rate of rise
SIP
4.3
60
© 2010 SAES Getters. Printed in Italy. All rights reserved. SAES® is a registered trademark of SAES Getters S.p.A., its subsidiaries and affiliates.
SAES Getters reserves the right to change or modify product specifications at any time without notice.
Time (day)
1.E-06
1.E-10
3.8
SIP
1.E-09
System isolated
and TMP Off
1.E-09
100
80
SIP On
1.E-08
1.E-10
0.0
160
120
NEXTorr® Pumps
The SAES Getters Group manufacturing companies are ISO9001 certified, the Asian and Italian companies are
ISO14001 certified also. Full information about certifications for each company of the Group is available on the corporate
website at: www.saesgetters.com
180
140
NEXTorr Acvaon
1.E-04
1.E-07
Pumping & Cooling
1.E-07
1.E-03
1.E-05
SIP degassing
Pumping, baking
(170°C) & NEXTorr
condioning
Temp
1.E-06
SIP
NEXTorr
SIP
Temperature (°C)
NEXTorr
1.E-03
Lainate, Italy - Avezzano, Italy - Bologna, Italy - Weil am Rhein, Germany - Nanjing, P.R. of China - Shanghai, P.R. of China Tokyo, Japan - Seoul, Korea - Jhubei City, Taiwan - Colorado Springs CO, USA - San Luis Obispo CA, USA - Watsonville CA,
USA - New Hartford NY, USA - Bethel CT, USA - Menlo Park CA, USA
6.3
6.8
Comparison between the pressure
increase in a chamber equipped
with the NEXTorr D100-5 and with
a 75 l/s Sputter ion pump when the
electric power is off (Rate of rise test).
The NEXTorr mainly keeps a much
lower pressure value thanks to the
presence of the NEG element. Similar
behaviours have been achieved for
the other NEXTorr models when
compared with Sputter ion pumps of
similar nominal pumping speed (H2).
Applications
 Scanning /transmission electron
microscopes
 Metrological equipment, semiconductor defect and review tools
 Surface science equipment
 Portable analysers and vacuum
instrumentation
 General purpose UHV-XHV research
systems
we support your innovation
 Particle accelerators, synchrotron
radiation sources and related
equipment
 Industrial UHV systems.
SAES Getters Group
www.saesgetters.com
[email protected]
Light,
compact,
large pumping
speed
NEXTorr®
Non Evaporable Getter (NEG) pumps are very compact and light, vibration-free
devices, able to deliver extremely high pumping speed per unit volume with minimal
power requirement. For these reasons they have been extensively used in UHV
applications.
The NEXTorr concept combines in a suitable design NEG and ion pumping technology.
In the NEXTorr design a NEG pump is integrated with a comparatively small size ion
pump. The getter element provides very large pumping speed and capacity and acts
as the main pump for the active gases, leaving to the ion pump the task of removing
noble gases and methane which are not pumped by the NEG. Being methane and
rare gases a very small percentage of the gas composition of UHV-XHV systems,
generally dominated by hydrogen and oxygenated gases, just a small pumping speed
is required for the ion pump. The ion pump also provides a pressure reading, which
can be used for vacuum and process monitoring. This approach radically removes the
main limitations of NEG pumps, providing in a very compact design a superior product
in terms of pumping speed, capacity, power consumption, reliability.
Presently available NEG pumps
can save a significant amount
of weight and space in UHV
systems providing state of the
art performance.
Equipment
like
scanning
and transmission electron
microscopes,
portable
analyzers, systems for surface
science characterization or
materials preparation can
greatly benefit from reducing
their weight and footprint. Even
in very large research vacuum
systems, like accelerators and
synchrotrons, the presence of
magnets, diagnostic tools and
diversified instrumentations
greatly limits the space available
for vacuum pumps. This poses
big challenges to the design of
pumping groups both in term
space, weight and achievable
performance.
Weight and volume of typical ion and NEG
pumps versus pumping speed (N2).
140
120
100
Weight (kg)
The quick answer
is NEXTorr.
NEXTorr: great performance in a small package
80
Small weight
60
The weight of the NEXTorr is ≈ 10-50
times lighter than an ion pump of
comparable (H2) performance. This
allows reducing the total weight
of the vacuum system, particularly
important in portable systems
or in analytical equipment, like
scanning electron microscopes or
semiconductor review tools.
SIP
NEG
40
20
0
0
200
400
600
Pumping speed N2 (l/s)
80
70
60
Volume (I)
Is there a solution
for compact,
light and high
performing UHV
pumps?
NEXTorr: the next step in pumping technology
Small size
50
40
30
20
10
SIP
NEG
Leveraging on its multi0
decade experience in getter
0
200
400
600
and UHV-XHV technology,
Pumping speed N2 (l/s)
SAES® Getters has now
made a further step forward
in pumping technique, introducing a novel product family, the NEXTorr, which
fully addresses the challenges of miniaturization and extreme performance.
The size of the NEXTorr is ≈ 10-50 times
smaller than an ion pump of comparable
(H2) performance. The NEXTorr can
easily fit in a small space delivering large
pumping speed and freeing space in
instrumentation-packed systems. Thanks to
the compact design, magnetic field is also
greatly reduced.
Best in class perfomance
 Very low ultimate pressure
 Shorter bake-out time  Size vs. performance
 Vacuum preserved in absence of electric power
 Pressure reading down to 10-10 mbar
 Reduced magnetic effects.
Light,
compact,
large pumping
speed
NEXTorr®
Non Evaporable Getter (NEG) pumps are very compact and light, vibration-free
devices, able to deliver extremely high pumping speed per unit volume with minimal
power requirement. For these reasons they have been extensively used in UHV
applications.
The NEXTorr concept combines in a suitable design NEG and ion pumping technology.
In the NEXTorr design a NEG pump is integrated with a comparatively small size ion
pump. The getter element provides very large pumping speed and capacity and acts
as the main pump for the active gases, leaving to the ion pump the task of removing
noble gases and methane which are not pumped by the NEG. Being methane and
rare gases a very small percentage of the gas composition of UHV-XHV systems,
generally dominated by hydrogen and oxygenated gases, just a small pumping speed
is required for the ion pump. The ion pump also provides a pressure reading, which
can be used for vacuum and process monitoring. This approach radically removes the
main limitations of NEG pumps, providing in a very compact design a superior product
in terms of pumping speed, capacity, power consumption, reliability.
Presently available NEG pumps
can save a significant amount
of weight and space in UHV
systems providing state of the
art performance.
Equipment
like
scanning
and transmission electron
microscopes,
portable
analyzers, systems for surface
science characterization or
materials preparation can
greatly benefit from reducing
their weight and footprint. Even
in very large research vacuum
systems, like accelerators and
synchrotrons, the presence of
magnets, diagnostic tools and
diversified instrumentations
greatly limits the space available
for vacuum pumps. This poses
big challenges to the design of
pumping groups both in term
space, weight and achievable
performance.
Weight and volume of typical ion and NEG
pumps versus pumping speed (N2).
140
120
100
Weight (kg)
The quick answer
is NEXTorr.
NEXTorr: great performance in a small package
80
Small weight
60
The weight of the NEXTorr is ≈ 10-50
times lighter than an ion pump of
comparable (H2) performance. This
allows reducing the total weight
of the vacuum system, particularly
important in portable systems
or in analytical equipment, like
scanning electron microscopes or
semiconductor review tools.
SIP
NEG
40
20
0
0
200
400
600
Pumping speed N2 (l/s)
80
70
60
Volume (I)
Is there a solution
for compact,
light and high
performing UHV
pumps?
NEXTorr: the next step in pumping technology
Small size
50
40
30
20
10
SIP
NEG
Leveraging on its multi0
decade experience in getter
0
200
400
600
and UHV-XHV technology,
Pumping speed N2 (l/s)
SAES® Getters has now
made a further step forward
in pumping technique, introducing a novel product family, the NEXTorr, which
fully addresses the challenges of miniaturization and extreme performance.
The size of the NEXTorr is ≈ 10-50 times
smaller than an ion pump of comparable
(H2) performance. The NEXTorr can
easily fit in a small space delivering large
pumping speed and freeing space in
instrumentation-packed systems. Thanks to
the compact design, magnetic field is also
greatly reduced.
Best in class perfomance
 Very low ultimate pressure
 Shorter bake-out time  Size vs. performance
 Vacuum preserved in absence of electric power
 Pressure reading down to 10-10 mbar
 Reduced magnetic effects.
B.VS.105.1
Unmatched
synergy by
integrating
two pumping
technologies
The NEXTorr pump is not just a combination of two different pumps. The integration of
the getter and the ion elements has been optimized to enhance pumping performance.
Gases released by the ion pump during the operation are intercepted and removed
by the getter element, with a substantial reduction of back-streaming effects. For the
same reasons, increased pumping efficiency for H2 and CH4 are obtained. Fine titanium
particles which may be sputter-emitted by the ion pumps during operation are also
effectively trapped by the getter element, reducing the potential contamination of the
vacuum system.
Pump down results in a chamber
fitted with the NEXTorr D100-5 and
with a 75 l/s sputter ion pump.
A factor 2 improvement in the
base pressure is achieved. Similar
improvements have been achieved
for the other NEXTorr models when
compared with Sputter ion pumps
of similar nominal pumping speed
(H2).
1.E-04
Pressure (Torr)
Pump down
1.E-05
Pressure (Torr)
NEXTorr
1.E-08
SIPs Off: Rate of Rise Test
4.8
5.3
5.8
Time (day)
SAES Getters S.p.A., Capital Stock Euro 12,220,000 f.p., Executive Office: Viale Italia, 77 - 20020 Lainate (Milan), Italy
Registered with the Milan Court Companies Register no. 00774910152
40
20
NEXTorr
0.5
1.0
1.5
2.0
2.5
0
3.0
Rate of rise
SIP
4.3
60
© 2010 SAES Getters. Printed in Italy. All rights reserved. SAES® is a registered trademark of SAES Getters S.p.A., its subsidiaries and affiliates.
SAES Getters reserves the right to change or modify product specifications at any time without notice.
Time (day)
1.E-06
1.E-10
3.8
SIP
1.E-09
System isolated
and TMP Off
1.E-09
100
80
SIP On
1.E-08
1.E-10
0.0
160
120
NEXTorr® Pumps
The SAES Getters Group manufacturing companies are ISO9001 certified, the Asian and Italian companies are
ISO14001 certified also. Full information about certifications for each company of the Group is available on the corporate
website at: www.saesgetters.com
180
140
NEXTorr Acvaon
1.E-04
1.E-07
Pumping & Cooling
1.E-07
1.E-03
1.E-05
SIP degassing
Pumping, baking
(170°C) & NEXTorr
condioning
Temp
1.E-06
SIP
NEXTorr
SIP
Temperature (°C)
NEXTorr
1.E-03
Lainate, Italy - Avezzano, Italy - Bologna, Italy - Weil am Rhein, Germany - Nanjing, P.R. of China - Shanghai, P.R. of China Tokyo, Japan - Seoul, Korea - Jhubei City, Taiwan - Colorado Springs CO, USA - San Luis Obispo CA, USA - Watsonville CA,
USA - New Hartford NY, USA - Bethel CT, USA - Menlo Park CA, USA
6.3
6.8
Comparison between the pressure
increase in a chamber equipped
with the NEXTorr D100-5 and with
a 75 l/s Sputter ion pump when the
electric power is off (Rate of rise test).
The NEXTorr mainly keeps a much
lower pressure value thanks to the
presence of the NEG element. Similar
behaviours have been achieved for
the other NEXTorr models when
compared with Sputter ion pumps of
similar nominal pumping speed (H2).
Applications
 Scanning /transmission electron
microscopes
 Metrological equipment, semiconductor defect and review tools
 Surface science equipment
 Portable analysers and vacuum
instrumentation
 General purpose UHV-XHV research
systems
we support your innovation
 Particle accelerators, synchrotron
radiation sources and related
equipment
 Industrial UHV systems.
SAES Getters Group
www.saesgetters.com
[email protected]
B.VS.105.1
Unmatched
synergy by
integrating
two pumping
technologies
The NEXTorr pump is not just a combination of two different pumps. The integration of
the getter and the ion elements has been optimized to enhance pumping performance.
Gases released by the ion pump during the operation are intercepted and removed
by the getter element, with a substantial reduction of back-streaming effects. For the
same reasons, increased pumping efficiency for H2 and CH4 are obtained. Fine titanium
particles which may be sputter-emitted by the ion pumps during operation are also
effectively trapped by the getter element, reducing the potential contamination of the
vacuum system.
Pump down results in a chamber
fitted with the NEXTorr D100-5 and
with a 75 l/s sputter ion pump.
A factor 2 improvement in the
base pressure is achieved. Similar
improvements have been achieved
for the other NEXTorr models when
compared with Sputter ion pumps
of similar nominal pumping speed
(H2).
1.E-04
Pressure (Torr)
Pump down
1.E-05
Pressure (Torr)
NEXTorr
1.E-08
SIPs Off: Rate of Rise Test
4.8
5.3
5.8
Time (day)
SAES Getters S.p.A., Capital Stock Euro 12,220,000 f.p., Executive Office: Viale Italia, 77 - 20020 Lainate (Milan), Italy
Registered with the Milan Court Companies Register no. 00774910152
40
20
NEXTorr
0.5
1.0
1.5
2.0
2.5
0
3.0
Rate of rise
SIP
4.3
60
© 2010 SAES Getters. Printed in Italy. All rights reserved. SAES® is a registered trademark of SAES Getters S.p.A., its subsidiaries and affiliates.
SAES Getters reserves the right to change or modify product specifications at any time without notice.
Time (day)
1.E-06
1.E-10
3.8
SIP
1.E-09
System isolated
and TMP Off
1.E-09
100
80
SIP On
1.E-08
1.E-10
0.0
160
120
NEXTorr® Pumps
The SAES Getters Group manufacturing companies are ISO9001 certified, the Asian and Italian companies are
ISO14001 certified also. Full information about certifications for each company of the Group is available on the corporate
website at: www.saesgetters.com
180
140
NEXTorr Acvaon
1.E-04
1.E-07
Pumping & Cooling
1.E-07
1.E-03
1.E-05
SIP degassing
Pumping, baking
(170°C) & NEXTorr
condioning
Temp
1.E-06
SIP
NEXTorr
SIP
Temperature (°C)
NEXTorr
1.E-03
Lainate, Italy - Avezzano, Italy - Bologna, Italy - Weil am Rhein, Germany - Nanjing, P.R. of China - Shanghai, P.R. of China Tokyo, Japan - Seoul, Korea - Jhubei City, Taiwan - Colorado Springs CO, USA - San Luis Obispo CA, USA - Watsonville CA,
USA - New Hartford NY, USA - Bethel CT, USA - Menlo Park CA, USA
6.3
6.8
Comparison between the pressure
increase in a chamber equipped
with the NEXTorr D100-5 and with
a 75 l/s Sputter ion pump when the
electric power is off (Rate of rise test).
The NEXTorr mainly keeps a much
lower pressure value thanks to the
presence of the NEG element. Similar
behaviours have been achieved for
the other NEXTorr models when
compared with Sputter ion pumps of
similar nominal pumping speed (H2).
Applications
 Scanning /transmission electron
microscopes
 Metrological equipment, semiconductor defect and review tools
 Surface science equipment
 Portable analysers and vacuum
instrumentation
 General purpose UHV-XHV research
systems
we support your innovation
 Particle accelerators, synchrotron
radiation sources and related
equipment
 Industrial UHV systems.
SAES Getters Group
www.saesgetters.com
[email protected]
NEXTorr D100-5_Layout 1 28/05/2012 12.11 Pagina 1
NEXTorr®
D 100-5
HIGHLIGHTS
General Features
£ High pumping speed for all active
gases
£ Pumping speed for noble
gases and methane
£ Constant pumping speed for
active gases in UHV-XHV
£ No intrinsic pressure limitations
£ Minimal power requirement during
operations
£ Extremely compact and light pump
£ Reduced magnetic interference
The NEXTorr D 100-5 is an extremely compact pump able to sorb gases very effectively
and with large capacity down to the XHV level.
The getter cartridge is made of porous sintered getter disks (St 172) stacked in a highly
efficient gas trapping structure featuring pumping speed in excess of 100 l/s (H2). The
cartridge is integrated into a CF 35 flange containing a heating element for the getter
activation. After the activation is carried out (500°C x 1 h), the pump removes gases at
room temperature without any need for electric power to operate. On the other side of the
same flange, a diode ion pump featuring 6 l/s (Ar) is connected. Gas flows from the
vacuum system to the ion pump through an optimized conductance. The optimized
conductance and the special internal design of the ion pump allow the maximum
exploitation of the ion pump sorption performance.
The configuration of the ion pump with respect of the getter cartridge provides additional
pumping synergies. Gases released by the ion pump during the operation, are intercepted
and removed by the getter element, with a substantial reduction of back-streaming effects.
For the same reasons, increased pumping efficiency for H2 and CH4 are obtained. Fine
titanium particles which are known to be continuously emitted by ion pumps during
operation are also effectively trapped by the getter element, reducing potential
contamination of the vacuum system.
£ Able to measure pressure lower
than 10-9 mbar
Applications
£ Improvement of the ultimate
vacuum in UHV-XHV systems
£ Reduction of the footprint and
weight of vacuum systems
£ Scanning /transmission electron
microscopes
£ Surface science equipments
£ Portable analysers vacuum
instrumentations
£ General purpose UHV systems
£ Particle accelerators, synchrotron
radiation sources and related
equipments
we support your innovation
Dimensions in mm
Total pump weight (magnets included)
2.2 kg
Total pump volume
0.5 litre
Type of ion pump
Diode
Operation Voltage Ion Element
5.0 kVdc
Operation Voltage NEG Element
9.0 Vdc
NEXTorr D100-5_Layout 1 28/05/2012 12.11 Pagina 2
NEXTorr ®
D 10 0-5
Pumping speed curves for various gases
N E X T o rr D 1 0 0 - 5
s orption tes t (ac c ording to A S T M F 798- 97)
Pumping Speed [l/s]
1 00 0
H2
1 00
O2
CO
CH4
10
Sorpon temperature:25 °C
Acvaon: 60' @ 9V (45W)
Sorpon pressure: 3E-6 Torr
1
0 ,0 00 1
0 ,0 01
N2
0 ,0 1
0 ,1
1
10
1 00
Sorbed Quantity [Torr l]
Initial pumping
speed (l/s)
Sorption
capacity (Torr·l)
Gas
NEG activated
NEG saturated
O2
100
4
H2
100
6
CO
N2
CH4
70
5
40
4
15
5
Argon1
6
6
Gas
Single run
capacity2
Total capacity3
5
>500
135
N/A4
0.6
>120
O2
H2
CO
N2
0.3
CH4
NEG section
ION section
1
2
3
4
30
Getter alloy type
The SAES Getters Group
manufacturing companies are
ISO9001 certified, the Asian
and Italian companies are
ISO14001certified also. Full
information about our
certifications for each
company of the Group is
available on our website at:
www.saesgetters.com
D.LS.87.3
>25
50,000 hours at
10-6 Torr
St 172
Alloy composition
ZrVFe
Getter mass (g)
13.5 g
Getter surface (cm2)
114
Voltage applied
DC+5kV
Number of Penning cells
4
Standard bake-out temperature
150 °C
Measured at 3x10-7 Torr.
Capacity values with the NEG element at room temperature, corresponding to a drop of the pumping speed to 10%
of its initial value. A drop to 50% has been considered in the case of CH4.
Total capacity values for each single gas obtained after many reactivations (getter fully consumed). Capacity values for
the various gases are not additive (a getter fully reacted with one gas specie will not sorb another gas).
After the getter element has reached its room temperature H2 capacity (135 Torr·l) it can be “regenerated”. The
regeneration process extracts the H2 stored in the getter. After being regenerated, the pump can start pumping H2
again.
Ordering Information
Product
NEXTorr PUMP
Pump power supply
Power supply cables
Power supply input cable
Output cable ION element
Output cable NEG element
Product description
NEXTorr D 100-5
NEXTorr PS NIOPS-03
NEXTorr KIT OF CABLES-03
NIOPS INPUT CABLE
NIOPS03-OUTPUT CABLE ION-3MT
NIOPS03-OUTPUT CABLE NEG-3MT
Code
5H0169
3B0408
3B0409
3B0398
3B0410
3B0411
© 2010 SAES Getters. Printed in Italy. All rights reserved. SAES® is a registered
trademark of SAES Getters S.p.A., its subsidiaries and affiliates.
SAES Getters reserves the right to change or modify product specifications at any time without notice.
SAES Getters Group
www.saesgetters.com
[email protected]
NEXTorr D 200-5_Layout 1 28/05/2012 11.06 Pagina 1
NEXTorr ®
D 200-5
HIGHLIGHTS
General Features
£ High pumping speed for all active
gases
£ Pumping speed for noble
gases and methane
£ Constant pumping speed for
active gases in UHV-XHV
£ No intrinsic pressure limitations
£ Minimal power requirement during
operations
£ Extremely compact and light pump
The NEXTorr D 200-5 is an extremely compact pump able to sorb gases very effectively and with
large capacity down to the XHV level.
The getter cartridge is made of porous sintered getter disks (St 172) stacked in a highly efficient
gas trapping structure featuring pumping speed in excess of 200 l/s (H2). The cartridge is
integrated into a CF 35 flange containing a heating element for the getter activation. After the
activation is carried out (500 °C x 1 h), the pump removes gases at room temperature without
any need for electric power to operate. On the other side of the same flange, a diode ion pump
featuring 6 l/s (Ar) is connected. Gas flows from the vacuum system to the ion pump through
an optimized conductance. The optimized conductance and the special internal design of the ion
pump allow the maximum exploitation of the ion pump sorption performance.
The configuration of the ion pump with respect of the getter cartridge provides additional
pumping synergies. Gases released by the ion pump during the operation, are intercepted and
removed by the getter element, with a substantial reduction of back-streaming effects. For the
same reasons, increased pumping efficiency for H2 and CH4 are obtained. Fine titanium
particles which are known to be continuously emitted by ion pumps during operation are also
effectively trapped by the getter element, reducing potential contamination of the vacuum
system.
£ Reduced magnetic interference
£ Able to measure pressure lower
than 10-9 mbar
Applications
£ Improvement of the ultimate
vacuum in UHV-XHV systems
£ Reduction of the footprint and
weight of vacuum systems
£ Scanning /transmission electron
microscopes
£ Surface science equipments
£ Portable analysers vacuum
instrumentations
Dimensions in mm
£ General purpose UHV systems
£ Particle accelerators, synchrotron
radiation sources and related
equipments
Total pump weight (magnets included)
2.2 kg
Total pump volume
0.5 litre
Type of ion pump
Diode
Operation Voltage Ion Element
5.0 kVdc
Operation Voltage NEG Element
12 Vdc
we support your innovation
NEXTorr D 200-5_Layout 1 28/05/2012 11.06 Pagina 2
NEXTorr ®
D 200-5
Pumping speed curves for various gases
NEXTorr D 200-5
s orption tes t (ac c ording to A S T M F 798- 97)
1000
Pumping Speed [l/s]
H2
100
O2
CO
CH4
10
N2
S or ptio n tem p eratur e: 2 5 °C
A c tiv ation: 60' @ 12V (60W )
S orption pres s ure: 3E -6 Torr
1
0,0001
0,001
0,01
0,1
1
10
100
1000
Sorbed Quantity [Torr l]
Initial pumping
speed (l/s)
Gas
NEG activated
NEG saturated
O2
200
4
H2
200
140
6
5
80
4
13
6
Single run
capacity2
5
6
CO
N2
CH4
Argon1
Sorption
capacity (Torr·l)
NEG section
ION section
1
2
3
4
Gas
D.VS.107.3
Total capacity3
O2
9
>1000
H2
280
N/A4
CO
N2
0.8
>240
0.3
CH4
55
>50
50,000 hours at
Getter alloy type
Alloy composition
Getter mass (g)
Getter surface (cm2)
Voltage applied
The SAES Getters Group
manufacturing companies are
ISO9001 certified, the Asian
and Italian companies are
ISO14001certified also. Full
information about our
certifications for each
company of the Group is
available on our website at:
www.saesgetters.com
10-6 Torr
St 172
ZrVFe
28 g
238
DC+5kV
Number of Penning cells
4
Standard bake-out temperature
150 °C
Measured at 3x10-7 Torr.
Capacity values with the NEG element at room temperature, corresponding to a drop of the pumping speed to 10%
of its initial value. A drop to 50% has been considered in the case of CH4.
Total capacity values for each single gas obtained after many reactivations (getter fully consumed). Capacity values for
the various gases are not additive (a getter fully reacted with one gas specie will not sorb another gas).
After the getter element has reached its room temperature H2 capacity (280 Torr·l) it can be “regenerated”. The
regeneration process extracts the H2 stored in the getter. After being regenerated, the pump can start pumping H2
again.
Ordering Information
Product
NEXTorr PUMP
Pump power supply
Power supply cables
Power supply input cable
Output cable ION element
Output cable NEG element
Product description
NEXTorr D 200-5
NEXTorr PS NIOPS-03
NEXTorr KIT OF CABLES-03
NIOPS INPUT CABLE
NIOPS03-OUTPUT CABLE ION-3MT
NIOPS03-OUTPUT CABLE NEG-3MT
Code
5H0170
3B0408
3B0409
3B0398
3B0410
3B0411
© 2011 SAES Getters. Printed in Italy. All rights reserved. SAES® is a registered
trademark of SAES Getters S.p.A., its subsidiaries and affiliates.
SAES Getters reserves the right to change or modify product specifications at any time without notice.
SAES Getters Group
www.saesgetters.com
[email protected]
NEXTorr D300-5_Layout 1 07/06/2012 9.29 Pagina 1
NEXTorr ®
D 300-5
HIGHLIGHTS
General Features
£ High pumping speed for all active
gases
£ Pumping speed for noble
gases and methane
£ Constant pumping speed for
active gases in UHV-XHV
£ No intrinsic pressure limitations
£ Minimal power requirement during
operations
£ Extremely compact and light pump
£ Reduced magnetic interference
The NEXTorr D 300-5 is an extremely compact pump able to sorb gases very effectively and with
large capacity down to the XHV level.
The getter cartridge is made of porous sintered getter disks (St 172) stacked in a highly efficient
gas trapping structure featuring pumping speed in excess of 300 l/s (H2). The cartridge is
integrated into a CF 63 flange containing a heating element for the getter activation. After the
activation is carried out (500 °C x 1 h), the pump removes gases at room temperature without
any need for electric power to operate. On the other side of the same flange, a diode ion pump
featuring 6 l/s (Ar) is connected. Gas flows from the vacuum system to the ion pump through
an optimized conductance. The optimized conductance and the special internal design of the ion
pump allow the maximum exploitation of the ion pump sorption performance.
The configuration of the ion pump with respect of the getter cartridge provides additional
pumping synergies. Gases released by the ion pump during the operation, are intercepted and
removed by the getter element, with a substantial reduction of back-streaming effects. For the
same reasons, increased pumping efficiency for H2 and CH4 are obtained. Fine titanium
particles which are known to be continuously emitted by ion pumps during operation are also
effectively trapped by the getter element, reducing potential contamination of the vacuum
system.
£ Able to measure pressure lower
than 10-9 mbar
Applications
£ Improvement of the ultimate
vacuum in UHV-XHV systems
£ Reduction of the footprint and
weight of vacuum systems
£ Scanning /transmission electron
microscopes
£ Surface science equipments
£ Portable analysers vacuum
instrumentations
£ General purpose UHV systems
£ Particle accelerators, synchrotron
radiation sources and related
equipments
we support your innovation
Dimensions in mm
Total pump weight (magnets included)
3.1 kg
Total pump volume
0.6 litre
Type of ion pump
Diode
Operation Voltage Ion Element
5.0 kVdc
Operation Voltage NEG Element
20 Vdc
NEXTorr D300-5_Layout 1 07/06/2012 9.29 Pagina 2
NEXTorr ®
D 300-5
Pumping speed curves for various gases
NEXTorr D 300-5
s orption tes t (ac c ording to A S T M F 798 - 97)
1000
H2
Pumping Speed [l/s]
O2
100
CO
CH4
10
N2
Sorpon temperature:25 °C
Acvaon: 60' @ 20V (100W)
Sorpon pressure: 3E-6 Torr
1
0,0001
0,001
0,01
0,1
1
10
100
1000
Sorbed Quantity [Torr l]
Initial pumping
speed (l/s)
Gas
NEG activated
NEG saturated
O2
H2
300
300
4
6
CO
N2
200
5
100
4
CH4
13
6
Single run
capacity2
5
Argon1
Sorption
capacity (Torr·l)
NEG section
ION section
1
2
3
4
Gas
D.VS.108.3
6
Total capacity3
O2
13
>1500
H2
CO
N2
410
1.1
0.6
CH4
82
N/A4
>360
>75
50,000 hours at
Getter alloy type
Alloy composition
Getter mass (g)
The SAES Getters Group
manufacturing companies are
ISO9001 certified, the Asian
and Italian companies are
ISO14001certified also. Full
information about our
certifications for each
company of the Group is
available on our website at:
www.saesgetters.com
10-6 Torr
St 172
ZrVFe
41 g
Getter surface (cm2)
342
Voltage applied
Number of Penning cells
Standard bake-out temperature
DC+5kV
4
150 °C
Measured at 3x10-7 Torr.
Capacity values with the NEG element at room temperature, corresponding to a drop of the pumping speed to 10% of
its initial value. A drop to 50% has been considered in the case of CH4.
Total capacity values for each single gas obtained after many reactivations (getter fully consumed). Capacity values for
the various gases are not additive (a getter fully reacted with one gas specie will not sorb another gas).
After the getter element has reached its room temperature H2 capacity (410 Torr·l) it can be “regenerated”. The
regeneration process extracts the H2 stored in the getter. After being regenerated, the pump can start pumping H2
again.
Ordering Information
Product
NEXTorr PUMP
Pump power supply
Power supply cables
Power supply input cable
Output cable ION element
Output cable NEG element
Product description
NEXTorr D 300-5
NEXTorr PS NIOPS-04
NEXTorr KIT OF CABLES-04
NIOPS INPUT CABLE
NIOPS04-OUTPUT CABLE ION-3MT
NIOPS04-OUTPUT CABLE NEG-3M
Code
5H0171
3B0415
3B0416
3B0398
3B0418
3B0419
© 2011 SAES Getters. Printed in Italy. All rights reserved. SAES® is a registered
trademark of SAES Getters S.p.A., its subsidiaries and affiliates.
SAES Getters reserves the right to change or modify product specifications at any time without notice.
SAES Getters Group
www.saesgetters.com
[email protected]
NEXTorr D 500-5_Layout 1 28/05/2012 11.04 Pagina 1
NEXTorr ®
D 500-5
HIGHLIGHTS
General Features
£ High pumping speed for all active
gases
£ Pumping speed for noble
gases and methane
£ Constant pumping speed for
active gases in UHV-XHV
£ No intrinsic pressure limitations
£ Minimal power requirement during
operations
£ Extremely compact and light pump
£ Reduced magnetic interference
The NEXTorr D 500-5 is an extremely compact pump able to sorb gases very effectively and with
large capacity down to the XHV level.
The getter cartridge is made of porous sintered getter disks (St 172) stacked in a highly efficient
gas trapping structure featuring pumping speed in excess of 500 l/s (H2). The cartridge is
integrated into a CF 63 flange containing a heating element for the getter activation. After the
activation is carried out (500 °C x 1 h), the pump removes gases at room temperature without
any need for electric power to operate. On the other side of the same flange, a diode ion pump
featuring 6 l/s (Ar) is connected. Gas flows from the vacuum system to the ion pump through
an optimized conductance. The optimized conductance and the special internal design of the ion
pump allow the maximum exploitation of the ion pump sorption performance.
The configuration of the ion pump with respect of the getter cartridge provides additional
pumping synergies. Gases released by the ion pump during the operation, are intercepted and
removed by the getter element, with a substantial reduction of back-streaming effects. For the
same reasons, increased pumping efficiency for H2 and CH4 are obtained. Fine titanium
particles which are known to be continuously emitted by ion pumps during operation are also
effectively trapped by the getter element, reducing potential contamination of the vacuum
system.
£ Able to measure pressure lower
than 10-9 mbar
Applications
£ Improvement of the ultimate
vacuum in UHV-XHV systems
£ Reduction of the footprint and
weight of vacuum systems
£ Scanning /transmission electron
microscopes
£ Surface science equipments
£ Portable analysers vacuum
instrumentations
Dimensions in mm
£ General purpose UHV systems
£ Particle accelerators, synchrotron
radiation sources and related
equipments
we support your innovation
Total pump weight (magnets included)
3.1 kg
Total pump volume
0.7 litre
Type of ion pump
Diode
Operation Voltage Ion Element
5.0 kVdc
Operation Voltage NEG Element
24 Vdc
NEXTorr D 500-5_Layout 1 28/05/2012 11.04 Pagina 2
NEXTorr ®
D 500-5
Pumping speed curves for various gases
NEXTorr D 500-5
s orption tes t (ac c ording to A S T M F 798- 97)
1000
Pumping Speed [l/s]
H2
O2
CO
100
CH4
10
N2
Sorpon temperature: 25 °C
Acvaon: 60' @ 24V (120W)
Sorpon pressure: 3E-6 Torr
1
0,0001
0,001
0,01
0,1
1
10
100
1000
Sorbed Quantity [Torr l]
Initial pumping
speed (l/s)
Gas
NEG activated
NEG saturated
O2
500
4
H2
500
6
CO
N2
CH4
340
200
13
6
Single run
capacity2
5
4
5
6
Argon1
Sorption
capacity (Torr·l)
NEG section
ION section
1
2
3
4
Gas
The SAES Getters Group
manufacturing companies are
ISO9001 certified, the Asian
and Italian companies are
ISO14001certified also. Full
information about our
certifications for each
company of the Group is
available on our website at:
www.saesgetters.com
D.VS.109.3
Total capacity3
O2
17
>2500
H2
680
N/A4
CO
N2
1.4
0.8
CH4
137
>600
>125
50,000 hours at
Getter alloy type
10-6 Torr
St 172
Alloy composition
ZrVFe
Getter mass (g)
Getter surface (cm2)
Voltage applied
68 g
570
DC+5kV
Number of Penning cells
4
Standard bake-out temperature
150 °C
Measured at 3x10-7 Torr.
Capacity values with the NEG element at room temperature, corresponding to a drop of the pumping speed to 10%
of its initial value. A drop to 50% has been considered in the case of CH4.
Total capacity values for each single gas obtained after many reactivations (getter fully consumed). Capacity values for
the various gases are not additive (a getter fully reacted with one gas specie will not sorb another gas).
After the getter element has reached its room temperature H2 capacity (680 Torr·l) it can be “regenerated”. The
regeneration process extracts the H2 stored in the getter. After being regenerated, the pump can start pumping H2
again.
Ordering Information
Product
NEXTorr PUMP
Pump power supply
Power supply cables
Power supply input cable
Output cable ION element
Output cable NEG element
Product description
Code
NEXTorr D 500-5
NEXTorr PS NIOPS-04
NEXTorr KIT OF CABLES-04
NIOPS INPUT CABLE
NIOPS04-OUTPUT CABLE ION-3MT
NIOPS04-OUTPUT CABLE NEG-3MT
5H0172
3B0415
3B0416
3B0398
3B0418
3B0419
© 2011 SAES Getters. Printed in Italy. All rights reserved. SAES® is a registered
trademark of SAES Getters S.p.A., its subsidiaries and affiliates.
SAES Getters reserves the right to change or modify product specifications at any time without notice.
SAES Getters Group
www.saesgetters.com
[email protected]