Vacuum Optics
Standard Viewports
Viewports for Optical Applications
7
Special Viewports and
Additional Components
Optical Fiber Feedthroughs Singlemode
Optical Fiber Feedthroughs Multimode
Accessories for Optical Fiber
Feedthroughs
Contents
Introduction
Page 7-3 to 7-9
Standard Viewports
Standard viewports with demountable O-ring seal
Viewports with permanent joint
Page 7-10 to 7-11
Page 7-12 to 7-16
Viewports for Optical Applications
Viewports for UV-VIS-NIR, CF
Viewports for UV-VIS-NIR, with anti-reflection coating
Viewports for optical applications, KF
Viewports for UV-VIS-NIR, CF
Viewports for VIS-IR, CF
Viewports for IR, CF
Viewports for UV-VIS-NIR, CF
High Precision Optic Series
7
Page 7-17
Page 7-18 to 7-21
Page 7-22 to 7-23
Page 7-24 to 7-26
Page 7-27 to 7-28
Page 7-29 to 7-30
Page 7-31
Page 7-32 to 7-33
Special Viewports and Additional Components
Viewports with conducting, transparent ITO coating
Viewports with luminescent layer
Borosilicate glass in quick access doors (QAD)
Lead-glass safety-caps with radiation shielding
Viewport shutters
Viewports with flanged socket
Page 7-34 to 7-36
Page 7-37
Page 7-38
Page 7-39
Page 7-39
Page 7-40
Optical Fiber Feedthroughs - Singlemode
Page 7-41 to 7-44
Optical Fiber Feedthroughs - Multimode
Page 7-45 to 7-47
Accessories for Optical Fiber Feedthroughs
Page 7-48 to 7-51
7-2
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Vacuum Optics
Vacuum Optics – Applications and Requirements
For a large number of applications it is necessary to transport electromagnetic waves such as light or laser radiation from atmosphere
into vacuum or from vacuum into atmosphere. The range of possible applications covers simple tasks like viewing the inside of a
vacuum chamber or illuminating such a chamber, as well as the defined coupling in and out of light for scientific or processing purposes.
High requirements to optics have to be fulfilled for high-precision, nearly loss-free transmission of optical information. This large number
of applications leads to a variety of optical components and systems with different characteristics.
Monitoring and illumination can be realized with simple viewports made out of borosilicate glass. For defined coupling in and out of
light, viewport materials with defined optical quality, special viewport designs and optical fiber feedthroughs are available. Here, the
application and its requirements define the choice of optical material. The main aspects in choosing the right optical material are
wavelength, transport distance, birefringence or wavefront deformation and possible losses in power or energy.
Viewports are preferred, when the target in the chamber can be reached directly in a straight line or with the help of a small number
of mirrors. Typical viewport materials have a low absorption in the desired wavelength range and feature minimal losses for a given
thickness. Additionally anti-reflection coatings, optimized for the wavelength or wavelength range of interest are used to minimize
surface reflections. High absorbing materials can be used to block radiation e.g. lead-glass is a good X-Ray shielding material. The
choice of materials and components of the flange-to-viewport assembly can be optimized to fulfill special requirements on magnetic
permeability or conductivity.
Optical fibers are used when the source or destination for the radiation is not easily accessible or when flexible guiding of optical
signals or waves is necessary. Here, in comparison to viewports the electromagnetic wave travels a rather long distance through the
optical material, so dispersion (wavelength-dependent velocity of propagation) is relevant. Special fibers minimize or neutralize this
effect.
Not only optical properties like transmission range, parallelism, surface quality or polarization maintenance (PM) are relevant for
vacuum optics components. Further requirements crucial for vacuum components have to be fulfilled. These are for example the right
flange type and size, pressure and temperature stability, radiation and corrosion resistance or requirements to electrical and magnetic
properties as well as minimal outgassing or qualification for cleanroom applications. Such a profile of requirements is accomplished by
a selection of appropriate optic materials, joining technologies and coating or processing methods.
An experienced team of specialists in optics, material sciences and vacuum technology is looking forward to finding a solution for your
special application.
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7-3
7
Vacuum Optics
Basics
Interactions between electromagnetic waves and optical material
When an electromagnetic wave passes through an optical material such as glass, a large number of interactions take place (refraction,
reflection, absorption, scattering). These interactions can change the radiation itself as well as the optical material.
For typical applications in optics, transmission T or alternatively decay in terms of damping L are highly relevant. Both parameters
describe the amount of the original intensity I or power P that remains after transmitting through the optical material.
a)
b)
7
Figure 1 – Basic phenomena when light passes through an optical material.
a) intensities I for direct material transmission (e.g. viewport),
b) powers P when total reflection occurs at the vertical interfaces (optical fiber)
Figure 1 shows the basic phenomena when light passes through an optical material (refractive index n2). In this case the surrounding
medium has a lower optical density (refractive index n1) than the optical material, meaning n1 < n2.
The transmission TGes is defined as the fraction of intensity of the light leaving the material IT2 and intensity of the light coupled into the
material I0 (figure 1a). The intensity being the energy divided by time and area or in other words power density is connected to power P.
So above remarks also apply for powers PT2 and P0 (figure 2a). In this case, for smaller numbers, a decay in power is described by
damping L = 10 log ( PT2 / P0 ). The unit of damping is decibel (dB).
In part a) of figure 1 (viewport) light propagation takes place in a straight line without interference of the vertical interfaces. This is always
the case when the dimensions of the optical material are big compared to the light beam or the beam displacement. This assumption
holds true for conventional viewports.
In part b) the same process is shown supposed that vertical interfaces affect the propagation of light. This is the case for optical
elements where lateral dimensions are small compared to dimensions in the direction of the beam.
Entry into optical material
Light entry is the first part of the whole process. The wave hits interface 1 with the original intensity I0 and angle α. At this event, which
is a transition with growing optical density (n2 > n1), a fraction of the intensity IR1 is reflected under the same angle α, and the rest of the
beam is refracted into the optical material with intensity IT1 and angle β. Because n2 > n1 the angle β is smaller than α. The following
transmission and damping is reached:
and
Neglecting absorption at interface 1 transmission and reflection R1 = IR1 / I0 add up to T1 + R1 = 1. The damping L1 is also called insertion
loss IL.
7-4
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Vacuum Optics
Basics
Beam transmission
The wave with the intensity IT1 or power PT1 propagates in the optical material. Here, further decay in intensity IT(d) or in power
PT(d) takes place, depending on the distance d. This decay is due to absorption and can be described by an exponential decay
IT(d)= IT1 • e-ad with absorption coefficient a. Transmission and damping can be written for this process also:
and
In this case transmission is also called internal or material transmission, damping is also called intrinsic damping or intrinsic loss. In
case of damping, it is common to divide by length to get a length independent value L(d) / d. With optical fibers lengths have to be very
high for significant damping to occur, so the signal loss is divided by length in kilometers. The unit is [L] = dB / km.
Beam exit
The last process is similar to the first process of material entry. The beam is coupled out of the material again. A part of the beam is
reflected with intensity IR2 and angle β and a part of the beam is refracted with intensity IT2 and angle α out of the optical material.
Because the refraction now takes place from high refractive index to low refractive index, the angle of the out-coupled beam is again α,
when the surrounding material is the same on both sides. Transmission and damping are:
and
With optical fibers, L2 is not used at all. Rather a return loss RL is specified, which characterizes the fraction of the signal that is lost
during coupling out. This is a bit misleading, because by its definition RL = 10 log ( PT(d) / PR2 ) return loss is an amplification.
Optical specifications
Concluding, intensity and damping for the whole process can be composed by the values of the single processes:
and
For viewports, where lateral dimensions are big compared to the light beam, it is likely to use the transmission T. Included in this
transmission are material properties, dimensions of the optical element, as well as quality and condition of the surfaces. For optical
fibers, and especially for fiber lengths of a couple of meters, intrinsic loss and return loss are not relevant. Here insertion loss IL = L1 is
the most relevant value, specifying quality of interfaces and of interconnect confectioning.
Only when passing an interface, where the transition takes place from a material with higher refractive index (e.g. glass) to a lower
refractive index (e.g. air), total reflection may occur. This allows for nearly loss-free transport of light over very long distances. If a critical
angle θK is exceeded during transition (e.g. in interface 2 in figure 1 as well as in every vertical interface in figure 1, part b), refraction
is not possible anymore because the resulting angle is too high. In this case the whole wave is reflected back. For this effect to occur a
minimal coupling angle α has to be obeyed. This angle results from:
The sine of this angle is also called numerical aperture NA, which is used for specifying optical fibers. Furthermore an acceptance cone
results for optical fibers. In order to be transmitted through the fiber, light has to be coupled-in within the area of this cone.
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7-5
7
Vacuum Optics
Materials for Vacuum Optics and Their Properties
Transmission and quality of optical materials
Absorption coefficient a, transmission T and reflection R all depend on the wavelength l used in the application. The wavelength and
the spectral width of radiation therefore limit and define the material that can be used. For use as transmission optics, key features are
low absorption meaning high material transmission. In figure 2, some optical materials and their transmission ranges used by VACOM
for ultraviolet (UV), visible (VIS) and infrared radiation are shown.
7
Figure 2 – Transmission ranges for some of the optical materials used by VACOM
These materials are not only suitable for optics applications, but also for vacuum use (pressure and temperature stability). These
materials are in principle only available for viewports. For optical fibers, only quartz (Fused Silica) is used. To make optical fibers
available for applications where a larger transmission range is needed, currently alternatives in material are discussed and tested.
For many applications it is not only important to have a high transmission, but also to ensure that the wave itself or the light path is not
influenced. Examples are microscopy, lithographic applications, optical measurements or high power applications. Here, irregularities
such as inhomogeneity, bubbles, striae or inclusions have to be kept minimal. Also lattice defects and impurities in crystals are a
problem. Especially in high power applications defects in the surface or impurities result in a high energy take-up and could lead to
material damage. According to the requirements, different cleanliness grades and scratch / dig or homogeneity classes are specified.
Quality and cleanliness of optical surfaces
While the optical material itself, as well as cleanliness and quality of the material mainly affects the losses while the radiation is inside
the optical element, the surfaces and their constitution define the losses for entry and discharge of wave. Therefore, these optical
interfaces define the transmissions T1 and T2 and the insertion loss L1 and return loss RL or damping L2. Impurities, scratches and
roughness or surface curvature lead to losses due to scattering or affect the wave.
Surface quality can be improved by using special production methods (e.g. float glass technology, CVD) or additional production
steps (e.g. polishing). For optical surfaces it is common to specify scratches and digs in classes, further form tolerance or flatness
(e.g. inter-ferometrically determined errors with respect to a reference wavelength) and parallelism (inclination of the optical interfaces
to each other).
Scratch / Dig
The different scratch / dig classes are specified by the use of reference samples, which are compared to the optical specimen. The
value specified by the according scratch class is the maximal width of the included scratches in µm. In an optical element with scratch
class 20 for example, scratches are 20 µm in width or lower. The dig class is a measure for the maximal diameter of included point
defects (digs) in 0.01 mm. For example, an optical element with a dig class of 20 holds defects with a maximal diameter of 20 x 0.01 mm
= 0.2 mm. Typical values for scratch / dig are 80 / 50 for standard optics, 60 / 40 for elements with optical quality and 20 / 10 or lower for
high precision optics.
Flatness
Flatness for planar surfaces or more general form tolerance for arbitrary surfaces, describes the difference of the surface tested from an
ideal shape. Because interferometry is used to specify flatness, it is common, to specify flatness as a multiple of the test wavelength λ
(e.g. 632 nm). For flatness, 1 λ is standard quality, λ / 4 is optical quality and λ / 8 and smaller is high precision grade.
To ensure cleanliness of optical elements and vacuum components, vacuum optic products at VACOM are partly available as a
cleanroom packed version with low outgassing rates. For more information, please refer to chapter 2 Service.
7-6
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Vacuum Optics
Materials for Vacuum Optics and Their Properties
Anti-reflection coating of optical surfaces
Transmissions T1 and T2 can be further raised, when anti-reflection (AR) coatings are applied to optical surfaces. These multilayer
systems are based on optical interference. Designing and choosing the right layer system can significantly lower reflectance for one
or some specific wavelengths (e.g. VAR for one, WAR for two wavelengths, from the form of the reflectance curves). Also optimization
of reflectance for a broad range of wavelengths is possible (BBAR, broadband anti-reflection). As an example, reflectance of uncoated
quartz (Fused Silica) viewport as well as the same material with VAR and BBAR coating is shown in figure 3 as a function of wavelength.
The reflectance curves shown on the following pages depict the different coatings schematically and therefore only represent reference
values.
7
Figure 3 – Schematic reflectance curves for a quartz surface: uncoated, with BBAR-coating and with VAR-coating
For materials with a low refractive index (e.g. magnesium fluoride) the overall transmission is mainly defined by material absorption
and not by reflection at the interfaces. Here, applying an anti-reflection coating does not lead to a significant increase in transmission.
Optical Fibers, Feedthroughs and Connectors
The composition of an optical fiber is shown in figure 4. The parts, which allow for light transmission, are a fiber core with a high
refractive index and a fiber cladding with a low refractive index. Light propagation is possible using total reflection. For protection of the
sensitive fiber, additional layers are used. One or more coating layers provide a basic protection. One or more buffers provide further
protection against mechanical stress or damage due to chemicals.
Figure 4 – Composition of an optical fiber
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7-7
Vacuum Optics
Optical Fibers, Feedthroughs and Connectors
The diameter of the fiber core determines if light of just one wavelength or a comparably short wavelength range is transmitted
(singlemode fibers) or if light of a rather large wavelength range (multimode fibers) is transmitted. VACOM standard fibers and their
respective operation wavelengths / wavelength ranges are shown in figure 5. Special fibers are available on request. Please do not
hesitate to contact as for special solutions.
7
Figure 5 – Standard fibers available at VACOM and their respective operations wavelengths / wavelength ranges
With VACOM’s solution, an atmosphere cable, an optical fiber feedthrough with short coupling length and a vacuum cable realize
transporting light from the atmosphere into vacuum or out of vacuum onto the atmosphere. With this assembly, in case of a fiber fracture,
only the broken cable has to be replaced, whereas in a solution with continuous fiber the whole assembly would have to be replaced.
To maintain low insertion losses, high quality in connection technology is required. Therefore VACOM optical fiber feedthroughs use
FC/PC and FC/APC connectors, which couple fiber end faces by physical contact to one another. With FC/APC fiber end faces are
tilted by 8° to minimize back reflections, which is often needed in laser applications. For atmosphere cables, adapters to nearly any
connector are possible.
Handling and Accessories for Optical Components
Optical components and surfaces are very sensitive to scratches, dirt or particles like dust, especially when polished or coated. When
cleaning, only appropriate tools (lint free optic wipes, cleaning sticks) and chemicals (isopropyl alcohol p.a., acetone p.a.) are to be
used. Wiping on coated viewports damages the coating. Please refer to the brochures and data sheets supplied with our products.
If you have questions concerning assembly, installation, cleaning or handling of vacuum optic components, please contact us! We also
offer special cleaning accessories for our products.
7-8
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Standard Viewports
Standard Viewports
Applications of standard viewports made of borosilicate and fused silica are mainly monitoring and illumination tasks. Requirements to
these viewports are primarily the flange type (CF, KF, ISO), desired pressure range and operation temperature.
Viewports with removable O-ring seals are suitable for high vacuum applications and for temperatures up to 150 °C. For higher requirements in pressure or temperature, viewports are required in which glass and flange are permanently joined (e.g. by soldering). To
prevent tensions that occur during heating, cooling or installing viewports most commonly an intermediate material like e.g. Kovar (an
iron-nickel-cobalt alloy) is used that compensates tension. When magnetic permeability is an issue, tantalum, titanium or baked steel is
used as an intermediate material for standard viewports.
At VACOM viewports for the most common CF, KF and ISO flange sizes are available as well as QAD (quick access doors, see Special
viewports) for an easy, quick access to a vacuum chamber. Furthermore, standard viewports are available as Quick CF version with
integrated glass window which can be installed more rapidly.
7
Figure 6 – Schematic transmission of borosilicate glass (top) and fused silica (SiO2, bottom) as a function of wavelength
The reflectance curves shown here and on the following pages depict the different materials schematically and therefore only represent
reference values.
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7-9
Standard Viewports
Standard Viewports with Demountable O-ring Seal
Borosilicate and fused silica (SiO2), KF/ISO demountable
KF Viewport
ISO-K Viewport (flange mounting)
Technical data
Description
Connection type
He leak rate
Window material
7
viewport with demountable O-ring seal (FKM)
KF, ISO-K or ISO-F flange
< 1.0E-9 mbar l/s
borosilicate (Borofloat®33)
or fused silica (Silux®)
- KF, ISO-K: stainless steel 304
- ISO-F: aluminum, anodized
FKM, O-ring
ca. 400...2500 nm (Borofloat®33),
ca. 300...2000 nm (Silux®)
150 °C (with aluminum frame 120 °C)
Flange material
Frame material
Transmission range
Max. bakeout temperature
Viewports
The listed products and replacement parts are also available as clean room products (CRP). Please contact us for
further information.
Order code
Borosilicate
Flange
A
D
L
L2
57
40
10
3.8
77
50
10
3.8
Quartz
Flange connection: KF, T(max) = 150 °C
DN40KF
VPKF40Q-E-Z
DN50KF
VPKF50B-E-Z
VPKF50Q-E-Z
Flange connection: ISO-K (flange mounting with claw clamps), T(max) = 150 °C
DN63ISO-K
VPISOK63B-E-Z
VPISOK63Q-E-Z
VPKF40B-E-Z
98
70
14
3.8
DN100ISO-K
133
102
13
5
DN160ISO-K
VPISOK160Q-E-Z
DN200ISO-K
VPISOK200B-E-Z
VPISOK200Q-E-Z
Flange connection: ISO-F (wall mounting with screws) , T(max) = 120 °C
DN63ISO-F
VPISOF63B-E
VPISOF63Q-E
183
153
17
9
243
200
17
13
130
70
12
3.8
DN100ISO-F
165
102
12
5
DN160ISO-F
VPISOF160Q-E
DN200ISO-F
VPISOF200B-E
VPISOF200Q-E
Flange connection: ISO-K (wall mounting with wall clamps), T(max) = 150 °C
DN63ISO-K
VPISOK63B-E
VPISOK63Q-E
225
153
16
9
285
200
16
13
VPISOK100B-E-Z
VPISOK100Q-E-Z
VPISOK160B-E-Z
VPISOF100B-E
VPISOF100Q-E
VPISOF160B-E
98
70
12
3.8
VPISOK100B-E
VPISOK100Q-E
DN100ISO-K
133
102
12
5
VPISOK160B-E
VPISOK160Q-E
DN160ISO-K
183
153
15
9
DN200ISO-K
243
200
19
13
VPISOK200B-E
VPISOK200Q-E
Option: KF and ISO-K flange made of stainless steel 316L.
7-10
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Standard Viewports
Standard Viewports with Demountable O-ring Seal
ISO-K Viewport (wall mounting)
ISO-F Viewport (wall mounting)
Replacement windows
Order code
Accessories for
Borosilicate glass
VPWB-44X4-CONE
VPKF40B-E
VPWB-54X4-CONE
VPKF50B-E
VPWB-75X4-CONE
VPKISOK63B-E
VPWB-109X5-CONE
VPKISOK100B-E
VPWB-160X9-CONE
Fused silica
VPKISOK160B-E
VPWQ-44X4-CONE
VPKF40Q-E
VPWQ-54X4-CONE
VPKF50Q-E
VPWQ-75X4-CONE
VPKISOK63Q-E
VPWQ-109X5-CONE
VPKISOK100Q-E
VPWQ-160X9-CONE
VPKISOK160Q-E
7
Replacement O-rings
Order code
Accessories for
KF40VR-VP
flange DN40KF
VR53X5-VI400-65
flange DN50KF
VR-74X5-VI563-70
flange DN63ISO
ISO100VR-VP
ISO160VR-VP
flange DN100ISO
flange DN160ISO
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7-11
Standard Viewports
Viewports with Permanent Joint
Borosilicate glass, KF/ISO
KF Viewport
7
ISO Viewport
Technical data
Description
Connection type
He leak rate
Window material
Flange material
Frame material
Transmission range
Max. bakeout temperature
Max. heating and cooling rate
viewports with permanent flange-window-joint
KF, ISO-K flange
< 1.0E-9 mbar l/s
borosilicate (Corning 7056)
stainless steel 304
Kovar®
ca. 400...2500 nm
150 °C
3 K/min
Borosilicate glass, KF/ISO
The listed products and replacement parts are also available as clean room products (CRP). Please contact us for
further information.
Order code
Flange
A
D
L
L2
VPKF16B-L
DN16KF
30
16
13
1.6
VPKF25B-L
DN25KF
40
16
13
1.6
VPKF40B-L
DN40KF
55
32
13
3
VPKF50B-L
Flange connection: ISO-K
DN50KF
75
32
13
3
VPISOK63B-L
DN63ISO-K
95
49
14
3.5
VPISOK100B-L
DN100ISO-K
130
65
16
3.5
VPISOK160B-L
DN160ISO-K
180
90
18
6
VPISOK200B-L
DN200ISO-K
240
135
18
8
VPISOK250B-L
DN250ISO-K
290
135
18
8
Flange connection: KF
7-12
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Standard Viewports
Viewports with Permanent Joint
Borosilicate glass, CF/QCF
CF Viewport
QCF Viewport
Technical data
Description
Connection type
He leak rate
Window material
Flange material
Binding material
Transmission range
Max. bakeout temperature
Max. heating and cooling rate
viewports with permanent flange-window-joint
CF flange
< 1.0E-10 mbar l/s
borosilicate (Corning 7056)
stainless steel 304L or 316LN
Kovar®
ca. 400...2500 nm
7
3 K/min
Borosilicate glass, CF
Some of listed products and replacement parts are also available as clean room products (CRP). Please contact us
for further information.
Order code
Flange
Stainless steel 304L, Kovar® sleeve, T(max) = 350 °C
DN16CF
VPCF16B-L
A
D
L
L2
1.5
34
16
12.7
VPCF40B-L
DN40CF
70
38
12.7
3
VPCF63B-L
DN63CF
114
63
17.4
3.5
VPCF100B-L
DN100CF
152
90
19.9
6
22.3
8
DN160CF
203
136
VPCF160B-L
Magn. permeability µ(r) < 1.005, stainless steel 316LN, tantalum sleeve, T(max) = 120 °C
DN16CF
34
16
VPCF16B-K-NM
12.7
1.5
DN40CF
70
32
12.7
3
VPCF63B-K-NM
DN63CF
114
63
17.4
3.5
VPCF100B-K-NM
VPCF160B-K-NM
DN100CF
DN160CF
152
203
90
136
19.9
22.3
6
8
VPCF40B-K-NM
Borosilicate glass, QCF
The listed products and replacement parts are also available as clean room products (CRP). Please contact us for
further information.
Order code
Flange
A
D
L
L2
DN40QCF
55
25
12
2.5
DN63QCF
87
49
VPQCF63B-L
DN100QCF
134
65
VPQCF100B-L
For further information please see chapter Standard Components - QCF Components.
17
14
2.5
3.5
VPQCF40B-L
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7-13
Standard Viewports
Viewports with Permanent Joint
Fused silica (SiO2), CF
CF Viewport
7
Technical data
Description
Connection type
He leak rate
Window material
Flange material
Transmission range
Max. bakeout temperature
Max. heating and cooling rate
viewports with permanent flange-window-joint
CF flange
< 1.0E-10 mbar l/s
fused silica (SiO2)
stainless steel 304, 304L or 316LN
ca. 300...2000 nm
200 °C
25 K/min
Fused silica (SiO2), CF
Order code
Flange
A
D
L
L2
Magn. permeability µ(r) < 1.3, stainless steel 304, stainless steel sleeve, T(max) = 200 °C
DN16CF
34
16
8.9
2.5
VPCF16UVQ-L
Heating rate [K/min]
25
VPCF40UVQ-L
DN40CF
70
35
12.7
3.3
25
VPCF63UVQ-L
DN63CF
114
68
17.3
6.4
25
VPCF100UVQ-L
DN100CF
152
98
19.8
6.4
25
VPCF160UVQ-L
DN160CF
203
137
22.4
9.4
25
DN200CF
254
198
24.6
9.4
VPCF200UVQ-L
Magn. permeability µ(r) < 1.005, stainless steel 316LN, titanium sleeve, T(max) = 200 °C
DN16CF
34
16
8.9
2.5
VPCF16UVQ-L-NM
25
25
DN40CF
70
35
12.7
3.3
25
VPCF63UVQ-L-NM
DN63CF
114
68
17.3
6.4
25
VPCF100UVQ-L-NM
DN100CF
152
98
19.8
6.4
25
VPCF40UVQ-L-NM
7-14
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Viewports for Optical Applications
Introduction
The main requirement for a viewport in an optical application is excellent transmission in a defined wavelength range and thus the
choice of the optical material. For UV-VIS-NIR (appr. 200 nm to 7 µm) VACOM offers quartz / fused silica, quartz crystal, sapphire,
magnesium fluoride and calcium fluoride. Zinc selenide and zinc sulfide are mainly used in VIS-IR applications (approx. 0.6 µm to
15 µm). For IR use, the semiconducting viewport materials silicon and germanium are an option.
Further requirements are temperature stability or radiation resistance. Quartz viewports feature high radiation resistance (for e.g. high
power laser applications) while sapphire is applicable in high temperature applications (up to 450 °C).
Depending on further requirements, viewports are available in different configurations. Main differences are optical quality, temperature
stability, magnetic permeability and heating and cooling rates. Here the joining technology (e.g. soldering) and choice of material define
the properties of the product.
For optimized transmission in some commonly used spectral ranges, we offer viewports with different anti-reflection coatings. Furthermore, special AR coatings for individual wavelengths or wavelength ranges are available on request.
Also, exceeding the list of products in this chapter, other materials (e.g. barium fluoride or beryllium) and flange types and sizes are
available. Please do not hesitate to contact us for further questions or requests.
7
Quality and cleanliness of optical surfaces
While the optical material itself, as well as cleanliness and quality of the material mainly affects the losses while the radiation is inside
the optical element, the surfaces and their constitution define the losses for entry and discharge of wave. Therefore, these optical
interfaces define the transmissions T1 and T2 and the insertion loss L1 and return loss RL or damping L2. Impurities, scratches and
roughness or surface curvature lead to losses due to scattering or affect the wave.
Surface quality can be improved by using special production methods (e.g. float glass technology, CVD) or additional production steps
(e.g. polishing). For optical surfaces it is common to specify scratches and digs in classes, further form tolerance or flatness (e.g. interferometrically determined errors with respect to a reference wavelength) and parallelism (inclination of the optical interfaces to each other).
Scratch / Dig
The different scratch/dig classes are specified by the use of reference samples, which are compared to the optical specimen. The value
specified by the according scratch class is the maximal width of the included scratches in µm. In an optical element with scratch class
20 for example, scratches are 20 µm in width or lower. The dig class is a measure for the maximal diameter of included point defects
(digs) in 0.01 mm. For example, an optical element with a dig class of 20 holds defects with a maximal diameter of 20 x 0.01 mm =
0.2 mm. Typical values for scratch/dig are 80/50 for standard optics, 60/40 for elements with optical quality and 20/10 or lower for high
precision optics.
Flatness
Flatness for planar surfaces or more general form tolerance for arbitrary surfaces, describes the difference of the surface tested from an ideal
shape. Because interferometry is used to specify flatness, it is common, to specify flatness as a multiple of the test wavelength λ (e.g. 632 nm).
For flatness, 1 λ is standard quality, λ/4 is optical quality and λ/8 and smaller is high precision grade.
To ensure cleanliness of optical elements and vacuum components, vacuum optic products at VACOM are partly available as a
cleanroom packed version with low outgassing rates. For more information, please refer to chapter 2 Service.
www.vacom-vacuum.com
7-15
Viewports for Optical Applications
Introduction
Anti-reflection coating of optical surfaces
Transmissions T1 and T2 can be further raised, when anti-reflection (AR) coatings are applied to optical surfaces. These multilayer
systems are based on optical interference. Designing and choosing the right layer system can significantly lower reflectance for one
or some specific wavelengths (e.g. VAR for one, WAR for two wavelengths, from the form of the reflectance curves). Also optimization
of reflectance for a broad range of wavelengths is possible (BBAR, broadband anti-reflection). As an example, reflectance of uncoated
quartz (Fused Silica) viewport as well as the same material with VAR and BBAR coating is shown in figure 3 as a function of wavelength.
The reflectance curves shown on the following pages depict the different coatings schematically and therefore only represent reference
values.
For materials with a low refractive index (e.g. magnesium fluoride) the overall transmission is mainly defined by material absorption
and not by reflection at the interfaces. Here, applying an anti-reflection coating does not lead to a significant increase in transmission.
7
7-16
www.vacom-vacuum.com
Viewports for Optical Applications
Viewports for UV-VIS-NIR, CF
Fused silica (SiO2), CF
CF Viewport
Technical data
Description
Connection type
He leak rate
Window material
Flange material
Transmission range
CF viewport with fused silica
CF flange
< 1.0E-10 mbar l/s
fused silica (Corning HPFS 7980)
stainless steel 304 or 316LN
ca. 190...2000 nm (EUVQ),
ca. 250...2000 nm (DUVQ)
200 °C
25 K/min
20/10 (scratch/dig)
< /4 (at 632 nm)
< 10''
see viewports for UV-VIS-NIR,
with anti-reflection coating
Max. bakeout temperature
Max. heating and cooling rate
Surface quality
Flatness
Parallelism
Coating
7
Fused silica (SiO2), CF
Order code
DUV Fused silica (bis 250 nm)
Flange
A
D
L
L2
16
8.9
2.2
EUV Fused silica (bis 190 nm)
Magn. permeability µ(r) < 1.3, stainless steel 304, stainless steel sleeve, T(max) = 200 °C
DN16CF
34
VPCF16DUVQ-L
VPCF16EUVQ-L
VPCF40DUVQ-L
VPCF40EUVQ-L
DN40CF
70
35
12.7
3.3
VPCF63DUVQ-L
VPCF63EUVQ-L
DN63CF
114
68
17.3
6.4
98
19.8
6.4
137
22.4
9.4
DN100CF
152
DN160CF
203
VPCF160DUVQ-L
Magn. permeability µ(r) < 1.005, stainless steel 316LN, titanium sleeve, T(max) = 200 °C
DN16CF
34
VPCF16DUVQ-L-NM
VPCF16EUVQ-L-NM
VPCF100DUVQ-L
16
8.9
2.2
DN40CF
70
35
12.7
3.3
DN63CF
VPCF63EUVQ-L-NM
DN100CF
VPCF100DUVQ-L-NM
For fused silica on KF Flange see Viewports for Optical Applications, KF.
114
68
17.3
6.4
152
98
19.8
6.4
VPCF40DUVQ-L-NM
VPCF63DUVQ-L-NM
www.vacom-vacuum.com
VPCF40EUVQ-L-NM
7-17
Viewports for Optical Applications
Viewports for UV-VIS-NIR, with Anti-reflection Coating
BBAR coated fused silica (SiO2)
CF Viewport
Technical data
Description
7
Connection type
He leak rate
Window material
Flange material
Transmission range
Max. bakeout temperature
Max. heating and cooling rate
Surface quality
Flatness
Coating
Note
7-18
fused silica with broad band anti-reflection coating
with CF flange
CF flange
< 1.0E-10 mbar l/s
fused silica (Corning HPFS 7980)
stainless steel 304 or 316LN
ca. 200...2000 nm
200 °C
25 K/min
20/10 (scratch/dig)
< /4 (at 632 nm)
BBAR1 (ca. 225...450 nm), BBAR2 (ca. 425...760 nm),
BBAR3 (ca. 550...1100 nm)
Please do not hesitate to contact us for special coatings for
individual wavelengths / wavelength ranges.
www.vacom-vacuum.com
Viewports for Optical Applications
Viewports for UV-VIS-NIR, with Anti-reflection Coating
BBAR1 (225 nm ... 450 nm) on fused silica (DUV)
Order code
Flange
A
D
Magn. permeability µ(r) < 1.3, stainless steel 304, stainless steel sleeve, T(max) = 200 °C
DN16CF
34
16
L
L2
7.4
2.5
VPCF40DUVQ-L-BBAR1
DN40CF
70
35
12.7
3.3
VPCF63DUVQ-L-BBAR1
DN63CF
114
68
17.3
6.4
19.8
6.4
VPCF16DUVQ-L-BBAR1
DN100CF
152
98
VPCF100DUVQ-L-BBAR1
Magn. permeability µ(r) < 1.005, stainless steel 316LN, titanium sleeve, T(max) = 200 °C
DN16CF
34
16
VPCF16DUVQ-L-BBAR1-NM
7.4
2.5
DN40CF
70
35
12.7
3.3
VPCF63DUVQ-L-BBAR1-NM
DN63CF
114
68
17.3
6.4
VPCF100DUVQ-L-BBAR1-NM
DN100CF
152
98
19.8
6.4
A
D
L
L2
7.4
2.5
VPCF40DUVQ-L-BBAR1-NM
BBAR2 (425 nm ... 760 nm) on fused silica (DUV)
Order code
Flange
Magn. permeability µ(r) < 1.3, stainless steel 304, stainless steel sleeve, T(max) = 200 °C
DN16CF
34
16
VPCF16DUVQ-L-BBAR2
7
VPCF40DUVQ-L-BBAR2
DN40CF
70
35
12.7
3.3
VPCF63DUVQ-L-BBAR2
DN63CF
114
68
17.3
6.4
19.8
6.4
7.4
2.5
DN100CF
152
98
VPCF100DUVQ-L-BBAR2
Magn. permeability µ(r) < 1.005, stainless steel 316LN, titanium sleeve, T(max) = 200 °C
DN16CF
34
16
VPCF16DUVQ-L-BBAR2-NM
VPCF40DUVQ-L-BBAR2-NM
DN40CF
70
35
12.7
3.3
VPCF63DUVQ-L-BBAR2-NM
DN63CF
114
68
17.3
6.4
VPCF100DUVQ-L-BBAR2-NM
DN100CF
152
98
19.8
6.4
A
D
L
L2
BBAR1 (550 nm ... 1100 nm) on fused silica (DUV)
Order code
Flange
Magn. permeability µ(r) < 1.3, stainless steel 304, stainless steel sleeve, T(max) = 200 °C
DN16CF
34
16
7.4
2.5
VPCF40DUVQ-L-BBAR3
DN40CF
70
35
12.7
3.3
VPCF63DUVQ-L-BBAR3
DN63CF
114
68
17.3
6.4
19.8
6.4
VPCF16DUVQ-L-BBAR3
DN100CF
152
98
VPCF100DUVQ-L-BBAR3
Magn. permeability µ(r) < 1.005, stainless steel 316LN, titanium sleeve, T(max) = 200 °C
DN16CF
34
16
VPCF16DUVQ-L-BBAR3-NM
7.4
2.5
VPCF40DUVQ-L-BBAR3-NM
DN40CF
70
35
12.7
3.3
VPCF63DUVQ-L-BBAR3-NM
DN63CF
114
68
17.3
6.4
DN100CF
152
VPCF100DUVQ-L-BBAR3-NM
Fused silica with BBAR coating on KF flange available on request.
98
19.8
6.4
www.vacom-vacuum.com
7-19
Viewports for Optical Applications
Viewports for UV-VIS-NIR, with Anti-reflection Coating
VAR on fused silica (SiO2)
CF Viewport
Technical data
Description
7
Connection type
He leak rate
Window material
Flange material
Transmission range
Max. bakeout temperature
Max. heating and cooling rate
Surface quality
Flatness
Coating
Note
7-20
fused silica with narrow band anti-reflection coating
with CF flange
CF flange
< 1.0E-10 mbar l/s
fused silica (Corning HPFS 7980)
stainless steel 304 or 316LN
ca. 190...2000 nm (EUVQ), ca. 250...2000 nm (DUVQ)
200 °C
25 K/min
20/10 (scratch/dig)
< /4 (at 632 nm)
VAR1 (193 nm), VAR2 (248 nm),
VAR3 (780 nm), VAR4 (1064 nm)
Please do not hesitate to contact us for special coatings for
individual wavelengths / wavelength ranges.
www.vacom-vacuum.com
Viewports for Optical Applications
Viewports for UV-VIS-NIR, with Anti-reflection Coating
VAR1 (193 nm) on fused silica (EUV)
Order code
Flange
A
D
Magn. permeability µ(r) < 1.3, stainless steel 304, stainless steel sleeve, T(max) = 200 °C
DN40CF
70
35
VPCF40EUVQ-L-VAR1
DN63CF
VPCF63EUVQ-L-VAR1
Magn. permeability µ(r) < 1.005, stainless steel 316LN, titanium
DN40CF
VPCF40EUVQ-L-VAR1-NM
DN63CF
VPCF63EUVQ-L-VAR1-NM
114
68
sleeve, T(max) = 200 °C
70
35
114
68
L
L2
12.7
3.3
17.3
6.4
12.7
17.3
3.3
6.4
L
L2
12.7
3.3
17.3
6.4
12.7
17.3
3.3
6.4
L
L2
12.7
3.3
17.3
6.4
12.7
17.3
3.3
6.4
L
L2
12.7
3.3
17.3
6.4
12.7
17.3
3.3
6.4
VAR2 (248 nm) on fused silica (EUV)
Order code
Flange
A
D
Magn. permeability µ(r) < 1.3, stainless steel 304, stainless steel sleeve, T(max) = 200 °C
DN40CF
70
35
VPCF40DUVQ-L-VAR2
DN63CF
VPCF63DUVQ-L-VAR2
Magn. permeability µ(r) < 1.005, stainless steel 316LN, titanium
DN40CF
VPCF40DUVQ-L-VAR2-NM
DN63CF
VPCF63DUVQ-L-VAR2-NM
114
68
sleeve, T(max) = 200 °C
70
35
114
68
7
VAR3 (780 nm) on fused silica (EUV)
Order code
Flange
A
D
Magn. permeability µ(r) < 1.3, stainless steel 304, stainless steel sleeve, T(max) = 200 °C
DN40CF
70
35
VPCF40DUVQ-L-VAR3
DN63CF
VPCF63DUVQ-L-VAR3
Magn. permeability µ(r) < 1.005, stainless steel 316LN, titanium
DN40CF
VPCF40DUVQ-L-VAR3-NM
DN63CF
VPCF63DUVQ-L-VAR3-NM
114
68
sleeve, T(max) = 200 °C
70
35
114
68
VAR4 (1064 nm) on fused silica (EUV)
Order code
Flange
A
D
Magn. permeability µ(r) < 1.3, stainless steel 304, stainless steel sleeve, T(max) = 200 °C
DN40CF
70
35
VPCF40DUVQ-L-VAR4
DN63CF
114
68
VPCF63DUVQ-L-VAR4
Magn. permeability µ(r) < 1.005, stainless steel 316LN, titanium sleeve, T(max) = 200 °C
DN40CF
70
35
VPCF40DUVQ-L-VAR4-NM
DN63CF
114
68
VPCF63DUVQ-L-VAR4-NM
Fused silica with VAR coating in other sizes and on KF flange available on request.
www.vacom-vacuum.com
7-21
Viewports for Optical Applications
Viewports for Optical Applications, KF
Viewports for optical applications
KF Viewport
7
Technical data
Description
Connection type
He leak rate
Flange material
Max. bakeout temperature
Max. heating and cooling rate
7-22
various optical materials with KF flange
KF flange
< 1.0E-9 mbar l/s
stainless steel 304
150 °C
25 K/min
www.vacom-vacuum.com
Viewports for Optical Applications
Viewports for Optical Applications, KF
Fused silica (SiO2), CF
Order code
Flange
A
D
L
L2
S/D
Flatness (632 nm)
VPKF40DUVQ-L
DN40KF
55
36
14
2.5
20/10
/4
VPKF50DUVQ-L
DN50KF
75
36
16
2.5
20/10
/4
Flatness (632 nm)
Sapphire (AI203), KF
Order code
Flange
A
D
L
L2
S/D
VPKF40UVS-L
DN40KF
55
24
13
2
50/20
VPKF50UVS-L
DN50KF
75
24
13
2
50/20
Quartz crystal, Z-Cut (SiO2), KF
Order code
Flange
A
D
L
L2
S/D
Flatness (632 nm)
VPKF40QZCUT-L
DN40KF
55
23
14
2.5
20/10
/4
VPKF50QZCUT-L
DN50KF
75
23
16
2.5
20/10
/4
7
Magnesium fluoride (MgF2), KF
Order code
Flange
A
D
L
L2
S/D
Flatness (632 nm)
VPKF40MGF2-L
DN40KF
55
23
14
2.5
20/10
/4
VPKF50MGF2-L
DN50KF
75
23
16
2.5
20/10
/4
Order code
Flange
A
D
L
L2
S/D
Flatness (632 nm)
VPKF40CAF2-L
DN40KF
55
23
14
2.5
20/10
/4
VPKF50CAF2-L
DN50KF
75
23
16
2.5
20/10
/4
Order code
Flange
A
D
L
L2
S/D
Flatness (632 nm)
VPKF40ZNSE-L
DN40KF
55
23
14
2.5
40/20
/4
DN50KF
75
23
16
2.5
40/20
VPKF50ZNSE-L
Fused silica (SiO2), quartz crystal and zinc selenide available with anti-reflection coating.
/4
Calcium fluoride (CaF2), KF
Zinc selenide (ZnSe), KF
www.vacom-vacuum.com
7-23
Viewports for Optical Applications
Viewports for UV-VIS-NIR, CF
Calcium fluoride (CaF2), CF
CF Viewport
7
Technical data
Description
Connection type
He leak rate
Window material
Flange material
Transmission range
CF viewport with calcium fluoride
CF flange
< 1.0E-10 mbar l/s
calcium fluoride, crystalline
stainless steel 304, 304L or 316LN
ca. 120 nm ... 7 µm
Calcium fluoride (CaF2), CF
Order code
Flange
A
D
L
L2
Heating rate
[K/min]
S/D
Magn. permeability µ(r) < 1.3, stainless steel 304, stainless steel sleeve, T(max) = 200 °C
DN40CF
70
23
12.7
2.5
10
20/10
VPCF40CAF2-L
114
/4
48
17.3
3.8
10
20/10
/4
DN100CF
152 48
VPCF100CAF2-L
Stainless steel 304L, Kovar® sleeve, T(max) = 120 °C
DN16CF
34
16
VPCF16CAF2-K
19.8
3.8
10
20/10
/4
12.7
1.5
3
60/40
/4
VPCF63CAF2-L
DN63CF
Flatness (632 nm)
VPCF40CAF2-K
DN40CF
70
32
12.7
3
3
60/40
/4
VPCF63CAF2-K
DN63CF
114
63
17.4
5
3
60/40
/4
VPCF100CAF2-K
DN100CF
152
89
19.9
6
3
60/40
/4
DN160CF
203 136 22.3
9.5
3
60/40
VPCF160CAF2-K
Magn. permeability µ(r) < 1.005, stainless steel 316LN, tantalum sleeve, T(max) = 120 °C
DN16CF
34
16
12.7
1.5
3
60/40
VPCF16CAF2-K-NM
/4
/4
VPCF40CAF2-K-NM
DN40CF
70
32
12.7
3
3
60/40
/4
VPCF63CAF2-K-NM
DN63CF
114
63
17.4
5
3
60/40
/4
VPCF100CAF2-K-NM
DN100CF
152
89
19.9
6
3
60/40
/4
3
60/40
/4
DN160CF
203 136 22.3
9.5
VPCF160CAF2-K-NM
KF Viewport with calcium fluoride see Viewports for Optical Applications, KF.
7-24
www.vacom-vacuum.com
Viewports for Optical Applications
Viewports for UV-VIS-NIR, CF
Magnesium fluoride (MgF2), CF
CF Viewport
Technical data
Description
Connection type
He leak rate
Window material
Flange material
Transmission range
CF viewport with magnesium fluoride
CF flange
< 1.0E-10 mbar l/s
magnesium fluoride, crystalline
stainless steel 304, 304L or 316LN
ca. 150 nm ... 6 µm
7
Magnesium fluoride (MgF2), CF
Order code
Flange
A
D
L
L2
Heating rate
[K/min]
S/D
Magn. permeability µ(r) < 1.3, stainless steel 304, stainless steel sleeve, T(max) = 200 °C
DN40CF
70
23
12.7
2.5
10
20/10
VPCF40MGF2-L
114
/4
48
17.3
3.8
10
20/10
/4
DN100CF
152 48
VPCF100MGF2-L
Stainless steel 304L, Kovar® sleeve, T(max) = 120 °C
DN16CF
34
16
VPCF16MGF2-K
19.8
3.8
10
20/10
/4
12.7
1.5
3
60/40
/4
VPCF63MGF2-L
DN63CF
Flatness (632 nm)
VPCF40MGF2-K
DN40CF
70
32
12.7
3
3
60/40
/4
VPCF63MGF2-K
DN63CF
114
63
17.4
5
3
60/40
/4
VPCF100MGF2-K
DN100CF
152
89
19.9
6
3
60/40
/4
DN160CF
203 136 22.3
9.5
3
60/40
VPCF160MGF2-K
Magn. permeability µ(r) < 1.005, stainless steel 316LN, tantalum sleeve, T(max) = 120 °C
DN16CF
34
16
12.7
1.5
3
60/40
VPCF16MGF2-K-NM
/4
/4
VPCF40MGF2-K-NM
DN40CF
70
32
12.7
3
3
60/40
/4
VPCF63MGF2-K-NM
DN63CF
114
63
17.4
5
3
60/40
/4
VPCF100MGF2-K-NM
DN100CF
152
89
19.9
6
3
60/40
/4
DN160CF
203 136 22.3
9.5
3
VPCF160MGF2-K-NM
KF Viewport with magnesium fluoride see Viewports for Optical Applications, KF.
60/40
/4
www.vacom-vacuum.com
7-25
Viewports for Optical Applications
Viewports for UV-VIS-NIR, CF
Quartz crystal, Z-Cut (SiO2), CF
CF Viewport
7
Technical data
Description
Connection type
He leak rate
Window material
Flange material
Transmission range
Surface quality
Coating
CF viewport with quartz crystal
CF flange
< 1.0E-10 mbar l/s
quartz crystal, Z-Cut
stainless steel 304, 304L or 316LN
ca. 200...3000 nm
20/10 (scratch/dig)
anti-reflection coating available
Quartz crystal (SiO2), CF
Order code
Flange
A
D
L
L2
Heating rate
[K/min]
Flatness (632 nm)
Magn. permeability µ(r) < 1.3, stainless steel 304, stainless steel sleeve, T(max) = 200 °C
DN40CF
70
23
12.7
2.5
25
VPCF40QZCUT-L
VPCF63QZCUT-L
DN63CF
114
DN100CF
152
VPCF100QZCUT-L
Stainless steel 304L, Kovar® sleeve, T(max) = 120 °C
DN16CF
34
VPCF16QZCUT-K
48
17.3
3.8
25
48
19.8
3.8
25
16
12.7
1.5
3
/2
VPCF40QZCUT-K
DN40CF
70
32
12.7
3
3
/2
VPCF63QZCUT-K
DN63CF
114
63
17.4
5
3
/2
DN100CF
152
89
19.9
6
3
VPCF100QZCUT-K
Magn. permeability µ(r) < 1.005, stainless steel 316LN, tantalum sleeve, T(max) = 120 °C
DN16CF
34
16
12.7
1.5
3
VPCF16QZCUT-K-NM
/2
/2
VPCF40QZCUT-K-NM
DN40CF
70
32
12.7
3
3
/2
VPCF63QZCUT-K-NM
DN63CF
114
63
17.4
5
3
/2
DN100CF
152
89
19.9
6
VPCF100QZCUT-K-NM
KF Viewport with quartz crystal see Viewports for Optical Applications, KF.
3
/2
7-26
www.vacom-vacuum.com
Viewports for Optical Applications
Viewports for VIS-IR, CF
Zinc selenide (ZnSe), CF
CF Viewport
Technical data
Description
Connection type
He leak rate
Window material
Flange material
Transmission range
Coating
CF viewport with zinc selenide
CF flange
< 1.0E-10 mbar l/s
zinc selenide, crystalline
stainless steel 304, 304L or 316LN
ca. 0.6 ... 15 µm
available (optimized for 10.6 µm)
7
Zinc selenide (ZnSe), CF
Order code
Flange
A
D
L
L2
Heating rate
[K/min]
S/D
Magn. permeability µ(r) < 1.3, stainless steel 304, stainless steel sleeve, T(max) = 200 °C
DN40CF
70
23
12.7
2.5
10
40/20
VPCF40ZNSE-L
114
/4
48
17.3
3.8
10
40/20
/4
DN100CF
152 48
VPCF100ZNSE-L
Stainless steel 304L, Kovar® sleeve, T(max) = 120 °C
DN16CF
34
16
VPCF16ZNSE-K
19.8
3.8
10
40/20
/4
12.7
1.5
3
60/40
VPCF63ZNSE-L
DN63CF
Flatness (632 nm)
VPCF40ZNSE-K
DN40CF
70
32
12.7
3
3
60/40
VPCF63ZNSE-K
DN63CF
114
63
17.4
5
3
60/40
VPCF100ZNSE-K
DN100CF
152
89
19.9
6
3
60/40
DN160CF
203 136 22.3
9.5
3
60/40
VPCF160ZNSE-K
Magn. permeability µ(r) < 1.005, stainless steel 316LN, tantalum sleeve, T(max) = 120 °C
DN16CF
34
16
12.7
1.5
3
60/40
VPCF16ZNSE-K-NM
VPCF40ZNSE-K-NM
DN40CF
70
32
12.7
3
3
60/40
VPCF63ZNSE-K-NM
DN63CF
114
63
17.4
5
3
60/40
VPCF100ZNSE-K-NM
DN100CF
152
89
19.9
6
3
60/40
3
60/40
DN160CF
203 136 22.3
9.5
VPCF160ZNSE-K-NM
KF Viewport with zinc selenide see Viewports for Optical Applications, KF.
www.vacom-vacuum.com
7-27
Viewports for Optical Applications
Viewports for VIS-IR, CF
Zinc sulfide (ZnS), CF
CF Viewport
7
Technical data
Description
Connection type
He leak rate
Window material
Flange material
Transmission range
Coating
CF viewport with zinc sulfide
CF flange
< 1.0E-10 mbar l/s
zinc sulfide, crystalline
stainless steel 304, 304L or 316LN
ca. 0.4...13 µm
available
Zinc sulfide (ZnS), CF
Order code
Flange
A
D
Stainless steel 304L, Kovar® sleeve, T(max) = 120 °C
DN16CF
34
16
VPCF16ZNS-K
L
L2
Heating rate
[K/min]
S/D
12.7
1.5
3
60/40
DN40CF
70
32
12.7
3
3
60/40
VPCF63ZNS-K
DN63CF
114
63
17.4
5
3
60/40
VPCF100ZNS-K
DN100CF
152
89
19.9
6
3
60/40
VPCF40ZNS-K
Flatness (632 nm)
DN160CF
203 136 22.3
9.5
3
60/40
VPCF160ZNS-K
Magn. permeability µ(r) < 1.005, stainless steel 316LN, tantalum sleeve, T(max) = 120 °C
DN16CF
34
16
12.7
1.5
3
60/40
VPCF16ZNS-K-NM
DN40CF
70
32
12.7
3
3
60/40
VPCF63ZNS-K-NM
DN63CF
114
63
17.4
5
3
60/40
VPCF100ZNS-K-NM
DN100CF
152
89
19.9
6
3
60/40
DN160CF
203
VPCF160ZNS-K-NM
KF Viewport with zinc sulfide available on request.
136
22.3
9.5
3
60/40
VPCF40ZNS-K-NM
7-28
www.vacom-vacuum.com
Viewports for Optical Applications
Viewports for IR, CF
Silicon (Si), CF
CF Viewport
Technical data
Description
Connection type
He leak rate
Window material
Flange material
Transmission range
CF viewport with silicon
CF flange
< 1.0E-10 mbar l/s
silicon, crystalline
stainless steel 304 or 304L
ca. 1.2 ... 6 µm and far IR (FIR)
7
Silicon (Si), CF
Order code
Flange
A
D
L
L2
Heating rate
[K/min]
S/D
Flatness (632 nm)
Magn. permeability µ(r) < 1.3, stainless steel 304, stainless steel sleeve, T(max) = 200 °C
DN40CF
70
23
12.7
2.5
10
40/20
VPCF40SI-L
48
17.3
3.8
10
40/20
DN100CF
152 48
VPCF100SI-L
Stainless steel 304L, Kovar® sleeve, T(max) = 120 °C
DN16CF
34
16
VPCF16SI-K
19.8
3.8
10
40/20
12.7
1.5
3
20/10
VPCF63SI-L
DN63CF
114
VPCF40SI-K
DN40CF
70
32
12.7
3
3
20/10
VPCF63SI-K
DN63CF
114
63
17.4
5
3
20/10
VPCF100SI-K
DN100CF
152
89
19.9
6
3
20/10
www.vacom-vacuum.com
7-29
Viewports for Optical Applications
Viewports for IR, CF
Germanium (Ge), CF
CF Viewport
7
Technical data
Description
Connection type
He leak rate
Window material
Flange material
Transmission range
CF viewport with germanium
CF flange
< 1.0E-10 mbar l/s
germanium, crystalline
stainless steel 304, 304L or 316LN
ca. 2...15 µm
Germanium (Ge), CF
Order code
Flange
A
D
L
L2
Heating rate
[K/min]
S/D
Flatness (632 nm)
Magn. permeability µ(r) < 1.3, stainless steel 304, stainless steel sleeve, T(max) = 200 °C
DN40CF
70
23
12.7
2.5
10
40/20
VPCF40GE-L
48
17.3
3.8
10
40/20
DN100CF
152 48
VPCF100GE-L
Stainless steel 304L, Kovar® sleeve, T(max) = 120 °C
DN16CF
34
16
VPCF16GE-K
DN40CF
70
32
VPCF40GE-K
19.8
3.8
10
40/20
12.7
1.5
3
20/10
12.7
3
3
20/10
17.4
5
3
20/10
VPCF63GE-L
VPCF63GE-K
DN63CF
DN63CF
114
114
63
DN100CF
152 89
19.9
6
3
20/10
VPCF100GE-K
Magn. permeability µ(r) < 1.005, stainless steel 316LN, tantalum sleeve, T(max) = 120 °C
DN16CF
34
16
12.7
1.5
3
20/10
VPCF16GE-K-NM
VPCF40GE-K-NM
DN40CF
70
32
12.7
3
3
20/10
VPCF63GE-K-NM
DN63CF
114
63
17.4
5
3
20/10
7-30
www.vacom-vacuum.com
Viewports for Optical Applications
Viewports for UV-VIS-NIR, CF
Sapphire (AI2O3), CF
CF Viewport
Technical data
Description
Connection type
He leak rate
Window material
Flange material
Transmission range
Max. bakeout temperature
Max. heating and cooling rate
Surface quality
Flatness
CF viewport with sapphire
CF flange
< 1.0E-10 mbar l/s
sapphire, crystalline
stainless steel 304
ca. 250 nm ... 5 µm
450 °C
25 K/min
50/20 (scratch/dig), 20/10 on request
< 2 (at 632 nm)
7
Sapphire (AI2O3), CF
Order code
Flange
A
D
Magn. permeability µ(r) < 1.3, stainless steel 304, stainless steel sleeve, T(max) = 450 °C
DN16CF
34
15
VPCF16UVS-L
L
L2
7.4
1.5
VPCF40UVS-L
DN40CF
70
24
12.7
2
VPCF63UVS-L
DN63CF
114
37
17.3
2
152
75
19.8
3
DN100CF
VPCF100UVS-L
Sapphire on KF flange see Viewports for Optical Applications, KF.
www.vacom-vacuum.com
7-31
Viewports for Optical Applications
High Precision Optic Series
Technical data
7
 Connection
 Flange material
 Binding material
 He leak rate of glass metal connection
 He leak rate of flange
 Max. bakeout temperature
 Max. heating and cooling rate
 View diameter
 Window thickness
 Window material
KF viewport
Type of flange
KF25
CF viewport
ISOK viewport
ISOF viewport
A
D
L
40 mm
20 mm
27 mm
L2
5 mm
KF40
55 mm
20 mm
19 mm
5 mm
CF40
70 mm
20 mm
16 mm
5 mm
CF63
114 mm
20 mm
20.5 mm
5 mm
CF63
114 mm
44 mm
21.5 mm
12 mm
95 mm
20 mm
15 mm
5 mm
ISOK63
7-32
KF | CF | ISO (see table)
Stainless steel 1.4404 (316 L)
FKM O-ring
<5E-10 mbar l/s
According to the standard flange properties
180 °C
3 K / min
20 / 40 mm
5 mm / 12 mm
Borosilicate, fused silicia, zinc selenide, silicon, calcium flouride, barium flouride,
germanium, sapphire
ISOK63
95 mm
44 mm
19 mm
12 mm
ISOF63
130 mm
20 mm
15 mm
5 mm
ISOF63
130 mm
44 mm
19 mm
12 mm
www.vacom-vacuum.com
Viewports for Optical Applications
HiPO extreme
view diameter 20 mm
Window material
Flatness
Fused silica
Borosilicate
S/D
Parallelism
Coating
Laser damage threshold for
10 ns, 10 Hz
(energy density | λ | beam Ø)
λ/10
10/5
≤ 5“
uncoated
-
λ/10
10/5
≤ 5“
AR261-266 nm
2 J/cm2 | 266 nm | 0.271 mm
λ/10
10/5
≤ 5“
AR350-45 nm
10 J/cm2 | 355 nm | 0.17 mm
λ/10
10/5
≤ 5“
uncoated
J/cm2
λ/10
10/5
≤ 5“
AR400-700 nm
7.5
λ/10
10/5
≤ 5“
AR523-532 nm
10 J/cm2 | 532 nm | 0.226 mm
λ/10
10/5
≤ 5“
AR610-860 nm
7.5 J/cm2 | 810 nm | 0.133 mm
λ/10
10/5
≤ 5“
AR700-1100 nm
7.5 J/cm2 | 810 nm | 0.133 mm
λ/10
10/5
≤ 5“
AR1047-1064 nm
10 J/cm2 | 1064 nm | 0.459 mm
λ/10
10/5
≤ 5“
AR523-532 nm / AR1047-1064 nm
5 J/cm2 | 532 nm | 0.245 mm
10 J/cm2 | 1064 nm | 0.459 mm
HiPO infrarot | 532 nm 0.491 mm
view diameter 20 mm
Window material
Laser damage threshold for
10 ns, 10 Hz
(energy density | λ | beam Ø)
Flatness
S/D
Parallelism
Coating
Calcium flouride
λ/8
20/10
≤ 10“
uncoated
-
Barium flouride
λ/4
40/20
≤ 1‘
uncoated
-
λ/4
40/20
≤ 1‘
AR3000-5000 nm
-
Sapphire
Silicon
Zinc selenide
Germanium
HiPO standard Window material
λ
60/40
≤ 3‘
uncoated
-
λ/2
40/20
≤ 3‘
uncoated
-
λ
40/20
≤ 3‘
AR3000-5000 nm
-
λ
40/20
≤ 1‘
uncoated
-
λ
40/20
≤ 1‘
AR8000-12000 nm
-
λ
40/20
≤ 1‘
uncoated
-
λ
40/20
≤ 1‘
AR8000-12000 nm
-
view diameter 20/40 mm
S/D
Parallelism
λ/10
20/10
≤ 5“
uncoated
-
λ/10
20/10
≤ 5“
AR290-370 nm
5 J/cm2 | 355 nm | 0.35 mm
λ/10
20/10
≤ 5“
AR350-700 nm
7.5 J/cm2 | 532 nm | 0.491 mm
λ/10
20/10
≤ 5“
AR650-1050 nm
7.5 J/cm2 | 810 nm | 0.133 mm
λ/10
20/10
≤ 5“
AR1050-1620 nm
7.5J/cm2 | 1542 nm | 0.189 mm
λ/10
20/10
≤ 5“
uncoated
Fused Silica
λ/10
20/10
≤ 5“
Coating
Laser damage threshold for
10 ns, 10 Hz
(energy density | λ | beam Ø)
Flatness
-
AR350-700 nm
7.5
J/cm2
| 532 nm | 0.504 mm
J/cm2
| 810 nm | 0.144 mm
λ/10
20/10
≤ 5“
AR650-1050 nm
7.5
λ/10
20/10
≤ 5“
AR1050-1620 nm
7.5 J/cm2 | 1542 nm | 0.123 mm
Ordering text:
VP
1
2
-
E
-
3
-
X
4
Order text postion
Property
Example: VPKF25UVQ-E-AR290-370-X1
Options
1
Type of flange
KF25, KF40, CF40, CF63, ISOF63, ISOK63
2
Optical material
B, UVQ, CAF2, BAF2, S, SI, ZNSE, GE
3
Coating according to table
4
View diameter
www.vacom-vacuum.com
1 for 20 mm, 2 for 40 mm
7-33
7
Special Viewports and Additional Components
Special Viewports and Additional Components
ITO (Indium Tin Oxide) is used as a coating to borosilicate or sapphire viewports to allow electric conductivity while maintaining optical
transmission. This prevents charge-build-up, the distortion of electric fields and the adsorption of charged particles (e.g. ceramic powders).
Additionally scintillation films (also known as phosphor films) can be deposited on these viewports to visualize diffraction patterns of electrons. Such coated viewports mainly used in surface analytical techniques such as RHEED (reflection high energy electron diffraction).
In some applications (e.g. RHEED) X-ray radiation is generated or used. To prevent this radiation from leaving the vacuum chamber X-ray
absorbing lead glass caps can be attached to VACOM vacuum viewports.
To keep a clear view, rotatable viewport shutters can be placed on the vacuum-side of the viewport to shield the glass from heat or
material deposition during processing.
In order to position optical elements more flexibly a variety of special designs such as glass-to-metall-adaptors, re-entry-viewports,
viewports connected with metal tubes or bellows are available. With such designs optical elements can for example be dunked into
the vacuum chamber and thus be brought closer to the test object. This can be used for focusing purposes. Another example is the
connection of two chambers with a transparent glass-tube for monitoring purposes.
7
7-34
www.vacom-vacuum.com
Special Viewports and Additional Components
Viewports with Conducting, Transparent ITO Coating
Borosilicate glass with ITO-coating
Technical data
Description
Connection type
He leak rate
Window material
Flange material
Max. bakeout temperature
Max. heating and cooling rate
Coating
borosilicate with ITO coating
CF flange
< 1.0E-10 mbar l/s
borosilicate (Corning 7056)
stainless steel 304L
300 °C
3 K/min
indium tin oxide (ITO)
7
Borosilicate glass with ITO-coating
Order code
Flange
Stainless steel 304L, Kovar® sleeve, T(max) = 300 °C
DN40CF
A
D
L
L2
70
38
12.7
3
VPCF63B-L-ITO
DN63CF
114
63
17.4
3.5
VPCF100B-L-ITO
KF fittings on request.
DN100CF
152
90
19.9
6
VPCF40B-L-ITO
www.vacom-vacuum.com
7-35
Special Viewports and Additional Components
Viewports with Conducting, Transparent ITO Coating
Sapphire with ITO-coating
7
Technical data
Description
Connection type
He leak rate
Window material
Flange material
Max. bakeout temperature
Max. heating and cooling rate
Coating
sapphire with ITO coating
CF flange
< 1.0E-10 mbar l/s
sapphire, crystalline
stainless steel 304L or 316LN
300 °C
3 K/min
indium tin oxide (ITO)
Sapphire with ITO-coating
Order code
Flange
Stainless steel 304L, Kovar® sleeve, T(max) = 300 °C
DN40CF
VPCF40S-L-ITO
VPCF63S-L-ITO
DN63CF
A
D
L
70
38
12.7
3
114
63
17.4
3.5
19.9
6
DN100CF
152
90
VPCF100S-L-ITO
Magn. permeability µ(r) < 1.005, stainless steel 316LN, tantalum sleeve, T(max) = 300 °C
DN40CF
70
38
VPCF40S-L-ITO-NM
L2
12.7
3
VPCF63S-L-ITO-NM
DN63CF
114
63
17.4
3.5
VPCF100S-L-ITO-NM
KF fittings on request.
DN100CF
152
90
19.9
6
7-36
www.vacom-vacuum.com
Special Viewports and Additional Components
Viewports with Luminescent Layer
Borosilicate glass with luminescent layer P43
Technical data
Description
borosilicate glass with luminescent layer P43 and
intermediate ITO coating
CF flange
< 1.0E-10 mbar l/s
borosilicate (Corning 7056)
stainless steel 304L
300 °C
3 K/min
luminescent layer P43 (Gd2O25:Tb)
Connection type
He leak rate
Window material
Flange material
Max. bakeout temperature
Max. heating and cooling rate
Coating
7
Borosilicate glass with luminescent layer P43
Order code
Flange
A
D
L
L2
VPCF40B-L-ITOP43
DN40CF
70
38
12.7
3
VPCF63B-L-ITOP43
DN63CF
114
63
17.4
3.5
VPCF100B-L-ITOP43
Other luminescent layers on request.
DN100CF
152
90
19.9
6
www.vacom-vacuum.com
7-37
Special Viewports and Additional Components
Borosilicate Glass in Quick Access Doors (QAD)
Borosilicate glass in quick access doors (QAD)
DN250CF, DN300CF
DN63CF - DN200CF
7
Technical data
Description
Connection type
He leak rate
Window material
Flange material
Frame material
Transmission range
Max. bakeout temperature
viewport with CF quick access door
CF flange
< 1.0E-9 mbar l/s
borosilicate (Borofloat®33)
stainless steel 304 (aluminum door frame, anodized)
FKM, O-ring
ca. 400...2500 nm
120 °C
Borosilicate glass in quick access doors (QAD)
Order code
Flange
D
D2
D3
D4
L
QAD63VP-AL-304
DN63CF
80
103
63
57
30
QAD100VP-AL-304
DN100CF
124
149
100
95
33
QAD160VP-AL-304
DN160CF
165
194
150
145
35
QAD200VP-AL-304
QAD250VP-AL-304
DN200CF
DN250CF
297
360
274
305
200
350
195
150
43
53
DN300CF
410
368
305
QAD300VP-AL-304
For further information on CF Quick access doors please see chapter Standard Components.
150
53
7-38
www.vacom-vacuum.com
Special Viewports and Additional Components
Lead-glass Safety-caps with Radiation Shielding
Lead-glass safety-caps with radiation shielding
Technical data
Description
lead-glass in stainless steel caps suitable for all CF viewports.
assembly with 3 set screws.
CF flange
lead-glass (lead equivalent ca. 1.6 mm at 100 kV ... 200 kV)
stainless steel 304 or 316L
Connection type
Window material
Frame material
Lead-glass safety-caps with radiation shielding, stainless steel 304
Order code
Flange
A
LGH-100-304
DN100CF
LGH-160-304
DN160CF
7
D
D2
L
L2
160
89
153
25
6
212
138
204
25
6
Lead-glass safety-caps with radiation shielding, stainless steel 316L
Order code
Flange
A
D
D2
L
L2
LGH-16-316
DN16CF
44
15
36
18
6
LGH-40-316
DN40CF
80
36
71
23
6
LGH-63-316
DN63CF
123
66
115
26
6
LGH-100-316
LGH-160-316
DN100CF
DN160CF
160
212
89
138
153
204
25
25
6
6
www.vacom-vacuum.com
7-39
Special Viewports and Additional Components
Viewport Shutters
The rotary feedthrough type MagiDrive MD16 serve as drive for all viewport shutters. The basic version of the rotary
feedthrough is pivote and hold the shutter in any position. Please find further drive options in chapter 10 Mechanical
Feedthroughs.
Viewport shutters
Technical data:
Description
7
viewport shutters protect the vacuum side of a viewport from
material deposition (e.g. in coating applications)
rotary feedthrough MagiDrive MD16
CF flange
250 °C
Drive
Connection type
Max. bakeout temperature
Order code
Flange
A
D
D2
L
L2
VPSCF40
DN40CF
70
37
31.8
116
10
VPSCF63
DN63CF
114
63.5
57
135
19.5
VPSCF100
DN100CF
152
101.6
87
158
35.5
VPSCF160
DN160CF
203
152.4
133.2
173
52.5
Viewports with Flanged Socket
Different glass-metal-constructions make it possible to limit the position of the optical components not only to the flange
connection e. g. on the chamber wall. Tubulations (of metal or glass), flexible hoses or other connection elements allow to
bring the coupling position of the viewport very close to the sample inside the chamber (e. g. to ease the focusing of beams
on the sample surface) or to connect two chambers with a transparent tube.
7-40
www.vacom-vacuum.com
Optical Fiber Feedthroughs – Singlemode
Optical Fiber Feedthroughs – Singlemode
VACOM optical fiber feedthroughs with integrated singlemode fiber are designed for the respective specified wavelength and can be
used in a rather narrow wavelength range surrounding the design wavelength. For geometrical reasons (small fiber core) propagation
of one or few modes is possible. Each singlemode fiber has a cutoff-wavelength. Below that wavelength the singlemode fiber turns into
multimode.
VACOM standard fibers are SM633, SM780, SM850 and SM1310 which already cover a wide range of possible applications. Furthermore, special fibers may be integrated in our feedthroughs on request. Please also find cables and accessories in section “Accessories
for optical fiber feedthroughs”.
r
n
Light propagation (schematic) in a singlemode fiber and
refractive index n as a function of fiber radius r
7
 Ultra high vacuum optical fiber feedthrough
 Integrated singlemode fiber
 Double ended female connector (coupling)
 UHV compatible
Weldable singlemode
feedthrough
Technical data
 He leak rate  Housing material
 Operation temperature
 Max. bakeout temperature  Max. heating / cooling rate
 Coupling length < 1 • 10-10 mbar l/s
stainless steel 304
-25 ... 75 °C
180 °C
3 K/min
41 mm
Singlemode feedthrough in
CF16 flange
Schematic drawing
www.vacom-vacuum.com
Singlemode optical fibers for optical fiber feedthroughs available at VACOM and their
design wavelengths
7-41
Optical Fiber Feedthroughs - Singlemode
Optical Fiber Feedthroughs - Singlemode
Fiber SM633, FC/APC connector
Technical data:
Optical fiber
Wavelength
Numerical aperture
Cut-off wavelength
Coupling
Typical insertion loss
Typical return loss
Ferrule
singlemode fiber SM633
633 nm
0.12
580 nm
FC/APC (8° ferrule angle)
1 dB
60 dB
2.5 mm ceramics (ZrO2)
Fiber construction
Order code
W-SM633-FCAPC
7
Flange
-
Number of feedthroughs
lbl14par
lbl13par
lbl12par
llbl11par
lbl10par
lbl09par
lbl08par
lbl07par
lbl06par
lbl05par
lbl04par
bl03par
1
CF16-SM633-FCAPC-1
DN16CF
1
CF40-SM633-FCAPC-1
DN40CF
1
CF40-SM633-FCAPC-2
DN40CF
2
CF40-SM633-FCAPC-3
DN40CF
3
CF63-SM633-FCAPC-1
DN63CF
1
CF63-SM633-FCAPC-2
DN63CF
2
CF63-SM633-FCAPC-3
DN63CF
3
CF63-SM633-FCAPC-4
CF63-SM633-FCAPC-5
DN63CF
DN63CF
4
5
Fiber SM780, FC/APC connector
Technical data:
Optical fiber
Wavelength
Numerical aperture
Cut-off wavelength
Coupling
Typical insertion loss
Typical return loss
Ferrule
singlemode fiber SM780
780 nm
0.12
720 nm
FC/APC (8° ferrule angle)
1 dB
60 dB
2.5 mm ceramics (ZrO2)
Fiber construction
Order code
W-SM780-FCAPC
7-42
Flange
-
Number of feedthroughs
lbl14par
lbl13par
lbl12par
llbl11par
lbl10par
lbl09par
lbl08par
lbl07par
lbl06par
lbl05par
lbl04par
bl03par
1
CF16-SM780-FCAPC-1
DN16CF
1
CF40-SM780-FCAPC-1
DN40CF
1
CF40-SM780-FCAPC-2
DN40CF
2
CF40-SM780-FCAPC-3
DN40CF
3
CF63-SM780-FCAPC-1
DN63CF
1
CF63-SM780-FCAPC-2
DN63CF
2
CF63-SM780-FCAPC-3
DN63CF
3
CF63-SM780-FCAPC-4
CF63-SM780-FCAPC-5
DN63CF
DN63CF
4
5
www.vacom-vacuum.com
Optical Fiber Feedthroughs - Singlemode
Optical Fiber Feedthroughs - Singlemode
Fiber SM850, FC/APC connector
Technical data:
Optical fiber
Wavelength
Numerical aperture
Cut-off wavelength
Coupling
Typical insertion loss
Typical return loss
Ferrule
singlemode fiber SM850
850 nm
0.12
770 nm
FC/APC (8° ferrule angle)
1 dB
60 dB
2.5 mm ceramics (ZrO2)
Fiber construction
Order code
W-SM850-FCAPC
Flange
-
Number of feedthroughs
lbl14par
lbl13par
lbl12par
llbl11par
lbl10par
lbl09par
lbl08par
lbl07par
lbl06par
lbl05par
lbl04par
bl03par
1
CF16-SM850-FCAPC-1
DN16CF
1
CF40-SM850-FCAPC-1
DN40CF
1
CF40-SM850-FCAPC-2
DN40CF
2
CF40-SM850-FCAPC-3
DN40CF
3
CF63-SM850-FCAPC-1
DN63CF
1
CF63-SM850-FCAPC-2
DN63CF
2
CF63-SM850-FCAPC-3
DN63CF
3
CF63-SM850-FCAPC-4
CF63-SM850-FCAPC-5
DN63CF
DN63CF
4
5
7
Fiber SM1310, FC/PC connector
Technical data:
Optical fiber
Wavelength
Numerical aperture
Cut-off wavelength
Coupling
Typical insertion loss
Typical return loss
Ferrule
singlemode fiber SM1310
1310 nm / 1550 nm
0.12
1260 nm
FC/PC
0.5 dB at 1310 nm
50 dB
2.5 mm ceramics (ZrO2)
Fiber construction
Order code
W-SM1310-FCPC
www.vacom-vacuum.com
Flange
-
Number of feedthroughs
lbl14par
lbl13par
lbl12par
llbl11par
lbl10par
lbl09par
lbl08par
lbl07par
lbl06par
lbl05par
lbl04par
bl03par
1
CF16-SM1310-FCPC-1
DN16CF
1
CF40-SM1310-FCPC-1
DN40CF
1
CF40-SM1310-FCPC-2
DN40CF
2
CF40-SM1310-FCPC-3
DN40CF
3
CF63-SM1310-FCPC-1
DN63CF
1
CF63-SM1310-FCPC-2
DN63CF
2
CF63-SM1310-FCPC-3
DN63CF
3
CF63-SM1310-FCPC-4
CF63-SM1310-FCPC-5
DN63CF
DN63CF
4
5
7-43
Optical Fiber Feedthroughs - Singlemode
Optical Fiber Feedthroughs - Singlemode
Fiber SM1310, FC/APC connector
Technical data:
Optical fiber
Wavelength
Numerical aperture
Cut-off wavelength
Coupling
Typical insertion loss
Typical return loss
Ferrule
singlemode fiber SM1310
1310 nm / 1550 nm
0.12
1260 nm
FC/APC (8° ferrule angle)
0.5 dB
60 dB
2.5 mm ceramics (ZrO2)
Fiber construction
Order code
W-SM1310-FCAPC
7
7-44
Flange
-
Number of feedthroughs
lbl14par
lbl13par
lbl12par
lbl11par
lbl10par
lbl09par
lbl08par
lbl07par
lbl06par
lbl05par
lbl04par
lbl03par
1
CF16-SM1310-FCAPC-1
DN16CF
1
CF40-SM1310-FCAPC-1
DN40CF
1
CF40-SM1310-FCAPC-2
DN40CF
2
CF40-SM1310-FCAPC-3
DN40CF
3
CF63-SM1310-FCAPC-1
DN63CF
1
CF63-SM1310-FCAPC-2
DN63CF
2
CF63-SM1310-FCAPC-3
DN63CF
3
CF63-SM1310-FCAPC-4
CF63-SM1310-FCAPC-5
DN63CF
DN63CF
4
5
QCF16-SM1310-FCAPC-1
DN16QCF
1
QCF40-SM1310-FCAPC-1
QCF63-SM1310-FCAPC-2
DN40QCF
DN63QCF
1
2
QCF100-SM1310-FCAPC-3
DN160QCF
3
www.vacom-vacuum.com
Optical Fiber Feedthroughs – Multimode
Optical Fiber Feedthroughs – Multimode
VACOM optical fiber feedthroughs with integrated multimode fiber are designed for the specified wavelength ranges and already cover
many applications in ultraviolet, visible and near infrared. The fibers MM400UV, MM400IR and MMGE400IR feature a step index
profile (i.e. discrete change in refractive index). The fiber MM50 is a gradient index fiber with an optimized refractive index profile with
minimized mode dispersion (wavelength-dependent propagation of light) commonly found in step index fibers.
Beyond these standard fibers, special fibers are available on request. Please find our ready to use cables, connectors and accessories
in section “Accessories for optical fiber feedthroughs”.
r
n
r
n
7
Light propagation (schematic) in a multimode fiber and
refractive index n as a function of radius r.
Upper part: step index fiber, lower part: gradient index fiber
 Ultra high vacuum optical fiber feedthrough
 Integrated multimode fiber
 Double ended female connector (coupling)
 UHV compatible
Weldable multimode
feedthrough
Technical Data
 He leak rate  Housing material  Operating temperature
 Max. bakeout temperature
 Max. heating / cooling rate
 Coupling length
< 1 • 10-10 mbar l/s
stainless steel 304
-25 ... 75 °C
180 °C
3 K/min
41 mm
Multimode feedthroughs in
CF40 flange
Schematic drawing
Multimode fibers for optical fiber feedthroughs available at VACOM and their operating
wavelength ranges
www.vacom-vacuum.com
7-45
Optical Fiber Feedthroughs - Multimode
Optical Fiber Feedthroughs - Multimode
Fiber MM50, FC/APC connector
Technical data:
Optical fiber
Wavelength
Numerical aperture
Coupling
Typical insertion loss
Ferrule
Order code
Fiber construction
7
W-MM50-FCAPC
multimode fiber MM50
ca. 850...1300 nm
0.2
FC/APC
0.5 dB at 1300 nm
2.5 mm ceramics (ZrO2)
Flange
-
Number of feedthroughslbl03par
lbl14par
lbl13par
lbl12par
lbl11par
lbl10par
lbl09par
lbl08par
lbl07par
lbl06par
lbl05par
lbl04par
1
CF16-MM50-FCAPC-1
DN16CF
1
CF40-MM50-FCAPC-1
DN40CF
1
CF40-MM50-FCAPC-2
DN40CF
2
CF40-MM50-FCAPC-3
DN40CF
3
CF63-MM50-FCAPC-1
DN63CF
1
CF63-MM50-FCAPC-2
DN63CF
2
CF63-MM50-FCAPC-3
DN63CF
3
CF63-MM50-FCAPC-4
DN63CF
4
CF63-MM50-FCAPC-5
DN63CF
5
Fiber MM50, FC/PC connector
Technical data:
Optical fiber
Wavelength
Numerical aperture
Coupling
Typical insertion loss
Ferrule
Order code
Fiber construction
7-46
W-MM50-FCPC
multimode fiber MM50
ca. 850...1300 nm
0.2
FC/PC
0.5 dB at 1300 nm
2.5 mm ceramics (ZrO2)
Flange
-
Number of feedthroughslbl03par
lbl14par
lbl13par
lbl12par
lbl11par
lbl10par
lbl09par
lbl08par
lbl07par
lbl06par
lbl05par
lbl04par
1
CF16-MM50-FCPC-1
DN16CF
1
CF40-MM50-FCPC-1
DN40CF
1
CF40-MM50-FCPC-2
DN40CF
2
CF40-MM50-FCPC-3
DN40CF
3
CF63-MM50-FCPC-1
DN63CF
1
CF63-MM50-FCPC-2
DN63CF
2
CF63-MM50-FCPC-3
DN63CF
3
CF63-MM50-FCPC-4
DN63CF
4
CF63-MM50-FCPC-5
DN63CF
5
www.vacom-vacuum.com
Optical Fiber Feedthroughs - Multimode
Optical Fiber Feedthroughs - Multimode
Fiber MM400UV, FC/PC connector
Technical data:
Optical fiber
Wavelength
Numerical aperture
Coupling
Typical insertion loss
Ferrule
Order code
Fiber construction
W-MM400UV-FCPC
multimode fiber MM400UV
ca. 190...1100 nm
0.22
FC/PC
0.5 dB at 850 nm
2.5 mm metal (ARCAP AP4)
Flange
-
Number of feedthroughs
lbl14par
lbl13par
lbl12par
lbl11par
lbl10par
lbl09par
lbl08par
lbl07par
lbl06par
lbl05par
lbl04par
lbl03par
1
CF16-MM400UV-FCPC-1
DN16CF
1
CF40-MM400UV-FCPC-1
DN40CF
1
CF40-MM400UV-FCPC-2
DN40CF
2
CF40-MM400UV-FCPC-3
DN40CF
3
CF63-MM400UV-FCPC-1
DN63CF
1
CF63-MM400UV-FCPC-2
DN63CF
2
CF63-MM400UV-FCPC-3
DN63CF
3
CF63-MM400UV-FCPC-4
DN63CF
4
CF63-MM400UV-FCPC-5
DN63CF
5
7
Fiber MM400IR, FC/PC connector
Technical data:
Optical fiber
Wavelength
Numerical aperture
Coupling
Typical insertion loss
Ferrule
Fiber construction
Order code
W-MM400IR-FCPC
www.vacom-vacuum.com
multimode fiber MM400IR
ca. 400...2400 nm
(optional 500...2600 nm)
0.22
FC/PC
0.5 dB at 850 nm
2.5 mm metal (ARCAP AP4)
Flange
-
Number of feedthroughs
lbl14par
lbl13par
lbl12par
lbl11par
lbl10par
lbl09par
lbl08par
lbl07par
lbl06par
lbl05par
lbl04par
lbl03par
1
CF16-MM400IR-FCPC-1
DN16CF
1
CF40-MM400IR-FCPC-1
DN40CF
1
CF40-MM400IR-FCPC-2
DN40CF
2
CF40-MM400IR-FCPC-3
DN40CF
3
CF63-MM400IR-FCPC-1
DN63CF
1
CF63-MM400IR-FCPC-2
DN63CF
2
CF63-MM400IR-FCPC-3
DN63CF
3
CF63-MM400IR-FCPC-4
DN63CF
4
CF63-MM400IR-FCPC-5
DN63CF
5
7-47
Optical Fiber Feedthroughs – FSMA 905
Optical fiber feedthroughs for vacuum applications with FSMA connectors
Technical data
 Coupling
FSMA (SMA-905)
 Insertion loss
< 1.2 dB
 Wavelength range UV-VIS
190 to 1100 nm
 Wavelength range VIS-IR
400 to 2400 nm
 Numerical aperture
0.22
 Core diameter
200 μm | 400 μm | 600 μm
 Housing material
Stainless steel 1.4404 (316L)
 Ferrule material Ceramic (ZrO2)
 Flange systems
KF | CF | QCF
 Bakeout temperatureCF: 180 °C, 250 °C
(depending on model)
KF: 120 °C
3 K/min
< 1 x 10 -10 mbar l/s
 Max. heating and cooling rate
 He leak rate
Fiber construction
7
Transmission curves
Transmission
von
Transmission
ofUV-VIS-Fasern
UV-VIS-fibers
100
90
80
70
Transmission[%]
[%]
transmission
70
Transmission
transmission[%]
[%]
1m
90
10 m
80
Transmission
von
Transmission
of VIS-IR-Fasern
VIS-IR-fibers
100
1m
60
50
40
30
50
40
30
20
20
10
10
0
10 m
60
0
200
300
400
500
600
700
800
900 1000 1100 1200 1300 1400 1500 1600
200
Wellenlänge[nm]
[nm]
wavelength
400
600
800
1000
1200
1400
1600
1800
2000
2200
Wellenlänge
[nm]
wavelength [nm]
Order code:
1
-
MM
2
3
-
FSMA
4
5
Example: CF16-MM200UV-FSMA-1-T250
Order code position
Attribute
1
Flange
2
Core diameter [μm]
3
UV or IR version: UV/IR
4
Number of optical fiber feedthroughs per flange
5
Optional - "T250" for a high temperature model
7-48
www.vacom-vacuum.com
Optical Fiber Feedthroughs – FSMA 905
FSMA 905 for weldable or screw-in solutions
Optical fiber feedthroughs
in screw-in adapter
T-MM200UV-FSMA
Weldable optical fiber feedthroughs
as standard version
Weldable optical fiber
feedthroughs for 250 °C
W-MM200UV-FSMA
W-MM200UV-FSMA-T250
T-MM200IR-FSMA
W-MM200IR-FSMA
W-MM200IR-FSMA-T250
T-MM400UV-FSMA
W-MM400UV-FSMA
W-MM400UV-FSMA-T250
T-MM400IR-FSMA
W-MM400IR-FSMA
W-MM400IR-FSMA-T250
T-MM600UV-FSMA
W-MM600UV-FSMA
W-MM600UV-FSMA-T250
T-MM600IR-FSMA
W-MM600IR-FSMA
W-MM600IR-FSMA-T250
FSMA 905 on KF flange
Standard version
KF40-MM200UV-FSMA-1
KF40 1x
KF40-MM400UV-FSMA-1
KF40-MM600UV-FSMA-1
KF40-MM200UV-FSMA-2
KF40 2x
KF40-MM400UV-FSMA-2
7
KF40-MM600UV-FSMA-2
KF40-MM200UV-FSMA-3
KF40 3x
KF40-MM400UV-FSMA-3
KF40-MM600UV-FSMA-3
FSMA 905 on CF flange
CF16
CF40 1x
CF40 2x
CF40 3x
www.vacom-vacuum.com
Standard version
Model for 250 °C
CF16-MM200UV-FSMA-1
CF16-MM200UV-FSMA-1-T250
CF16-MM200IR-FSMA-1
CF16-MM200IR-FSMA-1-T250
CF16-MM400UV-FSMA-1
CF16-MM400UV-FSMA-1-T250
CF16-MM400IR-FSMA-1
CF16-MM400IR-FSMA-1-T250
CF16-MM600UV-FSMA-1
CF16-MM600UV-FSMA-1-T250
CF16-MM600IR-FSMA-1
CF16-MM600IR-FSMA-1-T250
CF40-MM200UV-FSMA-1
CF40-MM200UV-FSMA-1-T250
CF40-MM200IR-FSMA-1
CF40-MM200IR-FSMA-1-T250
CF40-MM400UV-FSMA-1
CF40-MM400UV-FSMA-1-T250
CF40-MM400IR-FSMA-1
CF40-MM400IR-FSMA-1-T250
CF40-MM600UV-FSMA-1
CF40-MM600UV-FSMA-1-T250
CF40-MM600IR-FSMA-1
CF40-MM600IR-FSMA-1-T250
CF40-MM200UV-FSMA-2
CF40-MM200UV-FSMA-2-T250
CF40-MM200IR-FSMA-2
CF40-MM200IR-FSMA-2-T250
CF40-MM400UV-FSMA-2
CF40-MM400UV-FSMA-2-T250
CF40-MM400IR-FSMA-2
CF40-MM400IR-FSMA-2-T250
CF40-MM600UV-FSMA-2
CF40-MM600UV-FSMA-2-T250
CF40-MM600IR-FSMA-2
CF40-MM600IR-FSMA-2-T250
CF40-MM200UV-FSMA-3
CF40-MM200UV-FSMA-3-T250
CF40-MM200IR-FSMA-3
CF40-MM200IR-FSMA-3-T250
CF40-MM400UV-FSMA-3
CF40-MM400UV-FSMA-3-T250
CF40-MM400IR-FSMA-3
CF40-MM400IR-FSMA-3-T250
CF40-MM600UV-FSMA-3
CF40-MM600UV-FSMA-3-T250
CF40-MM600IR-FSMA-3
CF40-MM600IR-FSMA-3-T250
7-49
Accessories for Optical Fiber Feedthroughs
Introduction
You can easily realize a complete solution with the provided accessories for optical fiber feedthroughs consisting of
atmosphere side fiber cable, feedthrough and vacuum compatible cable. Especially the fiber cables represent only a small
choice of our product range. Only a few combinations of cable length and plug configuration are listed as an example for fiber
SM1310.
The provided cables are available for all standard fibers at any length and with many possible plug types. We are pleased to
provide a solution espacially adapted to your requirements.
In addition, we gladly offer you special accessories e. g. for the cleaning of connector ferrules.
7
FC Coupling
Singlemode and multimode FC coupling
FC coupling for FC connector
Flange with holes for two M2 screws
Coupling of FC/PC to FC/PC or FC/APC to FC/APC
For singlemode or multimode connectors
Ceramic sleeve (ZrO2)
Technical data:
Operating temperature
Max. bakeout temperature
Order code
7-50
-40...85 °C
200 °C
KUP-A-FC
Description
for air side
KUP-V-FC
UHV compatible
Number lbl03par
lbl14par
lbl13par
lbl12par
lbl11par
lbl10par
lbl09par
lbl08par
lbl07par
lbl06par
lbl05par
lbl04par
of feedthroug
www.vacom-vacuum.com
Accessories for Optical Fiber Feedthroughs
Optical Fiber Cables
Atmospheric cables
Optical fiber cable for use in atmosphere
With protective jacket (hollow hose)
Technical data:
Optical fiber
Material connector
Interlock
Order code
www.vacom-vacuum.com
SM1310
zinc
threading / key
Length
[m]
Connector
Configuration
KAB-A-SM1310-500-FCAPC-SE
KAB-A-SM1310-1000-FCAPC-SE
0.5
1.0
FC/APC single-sided
FC/APC single-sided
KAB-A-SM1310-3000-FCAPC-SE
3.0
FC/APC single-sided
KAB-A-SM1310-5000-FCAPC-SE
5.0
FC/APC single-sided
KAB-A-SM1310-500-FCAPC-DE
KAB-A-SM1310-1000-FCAPC-DE
0.5
1.0
FC/APC double-sided
FC/APC double-sided
KAB-A-SM1310-3000-FCAPC-DE
3.0
FC/APC double-sided
KAB-A-SM1310-5000-FCAPC-DE
5.0
FC/APC double-sided
KAB-A-SM1310-500-FCPC-SE
0.5
FC/PC single-sided
KAB-A-SM1310-1000-FCPC-SE
1.0
FC/PC single-sided
KAB-A-SM1310-3000-FCPC-SE
3.0
FC/PC single-sided
KAB-A-SM1310-5000-FCPC-SE
5.0
FC/PC single-sided
KAB-A-SM1310-500-FCPC-DE
0.5
FC/PC double-sided
KAB-A-SM1310-1000-FCPC-DE
1.0
FC/PC double-sided
KAB-A-SM1310-3000-FCPC-DE
3.0
FC/PC double-sided
KAB-A-SM1310-5000-FCPC-DE
5.0
FC/PC double-sided
KAB-A-SM1310-500-FCAPC-FCPC
0.5
FC/APC, FC/PC
KAB-A-SM1310-1000-FCAPC-FCPC
1.0
FC/APC, FC/PC
KAB-A-SM1310-3000-FCAPC-FCPC
3.0
FC/APC, FC/PC
KAB-A-SM1310-5000-FCAPC-FCPC
5.0
FC/APC, FC/PC
l
b
7
7-51
Accessories for Optical Fiber Feedthroughs
Optical Fiber Cables
Ultra high vacuum cables
Optical fiber cable for ultra high vacuum applications
Technical data:
Optical fiber
Material connector
Interlock
Max. bakeout temperature
Order code
7
7-52
SM1310
stainless steel 303
threading / key
180 °C
Length
[m]
Connector
Configuration
KON-V-SM1310-500-FCAPC-SE
KON-V-SM1310-1000-FCAPC-SE
0.5
1.0
FC/APC single-sided
FC/APC single-sided
KON-V-SM1310-3000-FCAPC-SE
3.0
FC/APC single-sided
KON-V-SM1310-5000-FCAPC-SE
5.0
FC/APC single-sided
KON-V-SM1310-500-FCAPC-DE
KON-V-SM1310-1000-FCAPC-DE
0.5
1.0
FC/APC double-sided
FC/APC double-sided
KON-V-SM1310-3000-FCAPC-DE
3.0
FC/APC double-sided
KON-V-SM1310-5000-FCAPC-DE
5.0
FC/APC double-sided
KON-V-SM1310-500-FCPC-SE
0.5
FC/PC single-sided
KON-V-SM1310-1000-FCPC-SE
1.0
FC/PC single-sided
KON-V-SM1310-3000-FCPC-SE
3.0
FC/PC single-sided
KON-V-SM1310-5000-FCPC-SE
5.0
FC/PC single-sided
KON-V-SM1310-500-FCPC-DE
0.5
FC/PC double-sided
KON-V-SM1310-1000-FCPC-DE
1.0
FC/PC double-sided
KON-V-SM1310-3000-FCPC-DE
3.0
FC/PC double-sided
KON-V-SM1310-5000-FCPC-DE
5.0
FC/PC double-sided
KON-V-SM1310-500-FCAPC-FCPC
0.5
FC/APC, FC/PC
KON-V-SM1310-1000-FCAPC-FCPC
1.0
FC/APC, FC/PC
KON-V-SM1310-3000-FCAPC-FCPC
3.0
FC/APC, FC/PC
KON-V-SM1310-5000-FCAPC-FCPC
5.0
FC/APC, FC/PC
l
b
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Accessories for Optical Fiber Feedthroughs
Connectors for Optical Fiber Cables
Technical data:
Suitable for cable diameter
Strain relief
Product life
Operating temperature
Max. bakeout temperature
0.9...3.5 mm
150 N
> 1000 connection cycles
-40...85 °C
180 °C
Atmospheric connectors
Connector for use in atmosphere
Housing material: zinc
Order code
CONN-SM-FCAPC-A
CONN-SM-FCPC-A
Accessories for
SM633, SM780, SM850, SM1310
SM633, SM780, SM850, SM1310
Connector
lbl14par
lbl13par
lbl12par
lbl11par
lbl10par
lbl09par
lbl08par
lbl07par
lbl06par
lbl05par
lbl04par
lbl03par
FC/APC
FC/PC
MM50
FC/APC
CONN-MM50-FCPC-A
MM50
FC/PC
CONN-MM400-FCPC-A
MM400UV, MM400IR, MMGE400IR
FC/PC
CONN-MM50-FCAPC-A
Ultra high vacuum connectors
Connectors for ultra high vacuum applications
Cleaned in ultrasonic bath
Packed for vacuum application
Housing material: stainless steel 303
Order code
CONN-SM-FCAPC-V
CONN-SM-FCPC-V
www.vacom-vacuum.com
Accessories for
SM633, SM780, SM850, SM1310
SM633, SM780, SM850, SM1310
Connector
lbl14par
lbl13par
lbl12par
lbl11par
lbl10par
lbl09par
lbl08par
lbl07par
lbl06par
lbl05par
lbl04par
lbl03par
FC/APC
FC/PC
CONN-MM50-FCAPC-V
MM50
FC/APC
CONN-MM50-FCPC-V
CONN-MM400-FCPC-V
MM50
MM400UV, MM400IR, MMGE400IR
FC/PC
FC/PC
7-53
7