Alternates
Report of the Committee on
Stephen L. Fox, Intel Corporation, OR [U]
(Alt. to D. H. Collins)
R. Bruce Fraser, Simplex Time Recorder Company, MA [M]
(Alt. to W. R. MacDonald)
Louis H. Greuling, Jr., Industrial Risk Insurers, PA [I]
(Alt. to R. J. Pearce)
Earl D. Neargarth, Fike Corporation, MO [M]
(Alt. to M. Charney)
Heron Peterkin, FM Global, MA [I]
(Alt. to R. B. Bensen)
John G. Ronan, Micron Technology, Inc., ID [U]
(Alt. to F. M. Quinlan)
Daniel R. Steppan, Underwriters Laboratories Inc., IL [RT]
(Alt. to R. G. Backstrom)
Steven R. Trammell, Motorola, TX [U]
(Alt. to S. P. Caley)
Derek A. White, Hughes Associates, Inc., MD [SE]
(Alt. to L. A. McKenna)
Cleanrooms
David A. Quadrini, Chair
Dallas, TX [SE]
Vincent A. DeGiorgio, Secretary
Technology Risk Consulting Services, LLC, MA [SE]
Robert G. Backstrom, Underwriters Laboratories Inc., IL [RT]
Roger B. Benson, FM Global, CA [I]
Aimee Bordeaux, Semiconductor Equipment & Materials
International (SEMI), CA [M]
Stephen P. Caley, Motorola, AZ [U]
Marvin Charney, Kidde-Fenwal Inc./Kidde PLC, CA [M]
Rep. Fire Suppression Systems Association
Dennis H. Collins, Intel Corporation, OR [U]
Steve C. Dryden, Marsh USA, Inc., MO [I]
Charles L. Fraust, Semiconductor Industry Association, CA [M]
L. T. Hutton, ATOFINA Chemicals, CO [M]
Dennis Kirson, United Information Systems Company, Limited,
NM [SE]
Richard M. Lattanzio, Advanced Micro Devices, Inc., TX [U]
David E. Libby, IBM, VT [U]
Norman J. MacDonald, III, FlexHead Industries, Inc., MA [M]
William R. MacDonald, Notifier, CT [M]
Rep. National Electrical Manufacturers Association
Lawrence A. McKenna, Jr., Hughes Associates, Inc., MD [SE]
Thomas L. Multer, Reliable Automatic Sprinkler Company, GA [M]
Rep. National Fire Sprinkler Association
Robert J. Pearce, Jr., Industrial Risk Insurers, CA [I]
Frank M. Quinlan, Micron Technology, Inc., ID [U]
Rodney D. Randall, Earth Tech Microelectronics, CA [M]
Lawrence E. Shea, Shea Technology, NV [M]
Timothy J. Smith, Restoration Technologies Inc., IL, IM
Robert W. Stubblefield, Duke Engineering & Services, TX [SE]
John R. Weaver, Delphi Delco Electronics Systems, IN [U]
Rep. NFPA Industrial Fire Protection Section
William F. Wilke, The RJA Group, Inc., TX [SE]
Staff Liaison: David R. Hague
Committee Scope: This Committee shall have primary responsibility
for documents on fire protection for cleanrooms.
This list represents the membership at the time the Committee was balloted on
the text of this edition. Since that time, changes in the membership may have
occurred. A key to classifications is found at the front of this book.
The Report of the Technical Committee on Cleanrooms is
presented for adoption.
This Report was prepared by the Technical Committee on
Cleanrooms and proposes for adoption, amendments to NFPA 318,
Standard for the Protection of Cleanrooms, 1998 edition. NFPA 3181998 is published in Volume 6 of the 2001 National Fire Codes and in
separate pamphlet form.
This Report has been submitted to letter ballot of the Technical
Committee on Cleanrooms, which consists of 26 voting members.
The results of the balloting, after circulation of any negative votes,
can be found in the report.
830
NFPA 318 — May 2002 ROP — Copyright 2001, NFPA
nominal metric pipe size used is 250 mm. Thus, the document
should state 250 mm not 2.54 cm.
SUBSTANTIATION: NFPA purports to be an international
consensus standards writing organization. Thus, it should write its
documents in the units used throughout most of the world.
Furthermore, US federal legislation [generally ignored] mandates
metric conversion of the United States.
Soft conversion simply makes more sense than mathematical
conversion. Besides, measurements in the science of fire protection
are not all that precise to begin with.
COMMITTEE ACTION: Accept.
NUMBER OF COMMITTEE MEMBERS ELIGIBLE TO VOTE: 26
VOTE ON COMMITTEE ACTION:
AFFIRMATIVE: 25
NOT RETURNED: 1 Wilke
___________________
Note: To assist in review and comment, a preprint of NFPA 318 is
available and downloadable from our Web Site. It is also available on
the CD ROM. Paper copies of the draft are available from NFPA
upon request by calling Customer Service at 1-800-344-3555.
(Log #CP6)
318- 1 - (Title): Accept
SUBMITTER: Technical Committee on Cleanrooms
RECOMMENDATION: Change the Title of NFPA 318 to:
"Standard for the Protection of Semiconductor Fabrication
Facilities"
SUBSTANTIATION: This document is specific to semiconductor
facilities.
COMMITTEE ACTION: Accept.
NUMBER OF COMMITTEE MEMBERS ELIGIBLE TO VOTE: 26
VOTE ON COMMITTEE ACTION:
AFFIRMATIVE: 25
NOT RETURNED: 1 Wilke
___________________
(Log #CP2)
318- 2 - (Entire Document): Accept
SUBMITTER: Technical Committee on Cleanrooms
RECOMMENDATION: Restructure entire document to comply with
the NFPA Manual of Style as follows:
1. Chapter 1 to contain administrative text only.
2. Chapter 2 to contain only referenced publications cited in the
mandatory portions of the document.
3. Chapter 3 to contain only definitions.
4. All mandatory sections of the document must be evaluated for
usability, adoptability, and enforceability language. Generate
necessary committee proposals.
5. All units of measure in document are converted to SI units with
inch/pound units in parentheses.
6. Appendices restructured and renamed as "Annexes."
SUBSTANTIATION: Editorial restructuring, to conform with the
2000 edition of the NFPA Manual of Style.
COMMITTEE ACTION: Accept.
NUMBER OF COMMITTEE MEMBERS ELIGIBLE TO VOTE: 26
VOTE ON COMMITTEE ACTION:
AFFIRMATIVE: 25
NOT RETURNED: 1 Wilke
___________________
(Log #8)
318- 3 - (Entire Document): Accept
SUBMITTER: Dennis Kirson, Albuquerque, NM
RECOMMENDATION: Revise text to read as follows:
"Throughout the document, wherever a percentage LEL is stated, in
essence to define nonflammable, that value should be 25 percent
LEL."
SUBSTANTIATION: This correction is necessary for consistency
within this document and with other NFPA documents.
COMMITTEE ACTION: Accept.
NUMBER OF COMMITTEE MEMBERS ELIGIBLE TO VOTE: 26
VOTE ON COMMITTEE ACTION:
AFFIRMATIVE: 25
NOT RETURNED: 1 Wilke
___________________
(Log #9)
318- 4 - (Entire Document): Accept
SUBMITTER: Dennis Kirson, Albuquerque, NM
RECOMMENDATION: The next edition of this document shall be
written in SI metric units, with English units in parenthesis.
Furthermore, the metric units used should NOT be mathematical
conversions of the current English units, but rather "soft" conversion
to actual values used in countries that are metric. In addition, permit
units to be mixed when this is actual practice [length given as meters,
cm, mm, or Km, as dictated by the circumstance. Pressure as Pascal
or Kbar.]
For example: 1 in. pipe converts to 2.54 cm. However, actual
(Log #CP7)
318- 5 - (Entire Document): Accept
SUBMITTER: Technical Committee on Cleanrooms
RECOMMENDATION: Revise NFPA 318 as shown to incorporate
Article 51 of the UFC.
NFPA 318 sections to which correlation changes are proposed are
listed in the table on page 2.
The correlation changes are intended to represent proposed changes
to NFPA 318 so that NFPA 318 conditions for semiconductor
fabrication facilities would be essentially the same as conditions for
these facilities represented in other nationally recognized codes.
Chapter 1 – General: Revise existing conditions and add new
conditions as follows:
1.1 Scope. This standard applies to all semiconductor fabrication
facilities and comparable research and development areas, in which
hazardous chemicals are used, stored and handled and containing
what is herein defined as a cleanroom or clean zone, or both.
Reason: Correlation with NFPA 1/Chapter 34, NFPA 5000/Chapter
33 and UFC 5101.1.1 scope conditions.
1.5.9* Hazardous Chemical. Any solid, liquid, or gas that has a
degree-of-hazard rating in health, flammability, or reactivity of Class 3
or 4 as ranked by NFPA 704, Standard System for the Identification of the
Hazards of Materials for Emergency Response. When a material has
multiple hazards, all hazards shall be addressed. See also NFPA 1 –
NFPA Uniform Fire Code, Chapter 34 and NFPA 5000 – NFPA Building
Code, Chapter 33.
Reason: Correlation with NFPA 1/Chapter and UFC 5101.2.
1.5 Definitions: Add the following definitions to Section 1.5.
Reason: Correlation with NFPA 1/Chapter 2 & NFPA 5000/Chapter
33 code change proposals, UFC Chapter 2, UFC Chapter 51.
Ceiling Limit. [As printed in code change proposal for NFPA
1/Chapter 2]
Compressed Gas Container. [As printed in code change proposal for
NFPA 1/Chapter 2]
Compressed Gas System. [As printed in code change proposal for
NFPA 1/Chapter 2]
Control Area. [As printed in code change proposal for NFPA
1/Chapter 2]
Gas-Detection System. [As printed in code change proposal for
NFPA 1/Chapter 2]
831
NFPA 318 — May 2002 ROP — Copyright 2001, NFPA
NFPA 318 Section
Chapter 1
1.1
1.5.9
1.5
Chapter 2
2.1.2.3
2.1.2.6
2.2.3
Chapter 3
3.4
Chapter 4
4.2
4.4
4.5
4.6
4.7
4.8
Chapter 5
5.1.1
5.1.3
5.1.8
5.3.1
5.3.3
5.3.5
5.3.6
5.3.7
5.5.3
5.6
Table 5.1-A
Table 5.1-B
Chapter 6
6.9
Chapter 8
8.9
8.10
Chapter 10
Chapter 11
Proposed Correlation Changes
NFPA 318 Subject
General
Scope
Hazardous Chemical – Definition
Definitions – New/Additional Definitions
▪ Ceiling Limit
▪ Compressed Gas Container
▪ Compressed Gas System
▪ Control Area
▪ Gas-Detection System
▪ Emergency Alarm System
▪ Exempt Amount per Control Area
▪ Exhausted Enclosure
▪ Fabrication Area (Fab Area)
▪ Flammable Vapors or Fumes
▪ Gas Cabinet
▪ Gas Room
▪ Hazardous Chemical Room
▪ Incompatible Materials
▪ Permissible Exposure Limit
▪ Semiconductor Fabrication Facility
▪ Service Corridor
Fire Protection
Sprinklers in gas cabinets
Sprinklers in exhaust ducts
Manual Fire Alarm System [New Section]
Ventilation and Exhaust Systems
General Conditions [New Section & renumber remaining sections]
Construction
Fire Resistance Rating
Electrical Classification
Emergency Power System [New Section]
Occupied Levels of Fab Areas [New Section]
Pass-Throughs in Existing Exit Access Corridors [New Section]
Workstations
Chemical Storage & Handling
Separation of hazardous chemical storage rooms
Hazardous chemical in cleanrooms
Separation of Incompatible Materials [New Section]
Hazardous chemicals in new buildings
Chemical carts
Service corridor width [New Section]
Service corridor not used as means of egress [New Section]
Service corridor – maximum quantities transported [New Section]
Workstations [New Section]
Supply Piping [New Section]
Quantity Limits for Hazardous Materials in a Single Fab Area
Maximum Quantities of Hazardous Chemicals at a Workstation
Hazardous Gas Cylinder Storage & Distribution
Treatment Systems [New Section]
Production & Support Equipment
Gas-Detection Systems [New Section]
Emergency Alarm System [New Section]
Emergency Control Station [New Chapter]
General Safety Precautions [New Chapter]
Emergency Alarm System is a system to provide indication and
warning of emergency situations involving hazardous materials and
summon appropriate aid.
Page(s)
3-5
3
3
3-5
6
6
6
6
7
7
8-10
8
8
9
9
9
10
11-16
11
11
11
12
12
12
12
12
13
13
14-15
16
17
17
18-21
18-20
21
22
23
Exempt Amount per Control Area is the amount of hazardous
material allowed to be stored, used or handled in a control area as set
forth in NFPA 1 – NFPA Uniform Fire Code, Chapter 34 and NFPA 5000 –
NFPA Building Code. The exempt amount per control area is based on
the material state (solid, liquid or gas) and the material storage or use
conditions.
832
NFPA 318 — May 2002 ROP — Copyright 2001, NFPA
Exhausted Enclosure is an appliance or piece of equipment which
consists of a top, a back and two sides providing a means of local
exhaust for capturing gases, fumes, vapors and mists. Such enclosures
include laboratory hoods, exhaust fume hoods and similar appliances
and equipment used to locally retain and exhaust the gases, fumes,
vapors and mists that could be released.
1. Metallic and Noncombustible, Nonmetallic Exhaust Ducts.
Automatic sprinklers shall be provided in metallic and
noncombustible, nonmetallic exhaust ducts when all of the following
conditions are present:
a. Largest interior cross-sectional diameter is equal to or
greater than 10 inches (254 mm); and
b. Ducts are located within the building; and
c. Ducts are conveying flammable vapors or fumes.
2. Combustible Nonmetallic Exhaust Ducts. Automatic sprinklers
shall be provided in combustible nonmetallic exhaust ducts when the
largest interior cross-sectional diameter is equal to or greater than 10
inches (254 mm).
Fabrication Area (Fab Area) is an area within a semiconductor
fabrication facility and related research and development areas in
which there are processes using hazardous chemicals. Such areas
include cleanrooms and clean zones and are allowed to include
ancillary rooms or areas such as dressing rooms and offices that are
directly related to the fab area processes.
Exception: Ducts listed or approved for use without internal automatic
sprinklers.
Flammable Vapors or Fumes are the concentration of flammable
constituents in air that exceed 25 percent of their flammability limit.
2.2.3 Manual Fire Alarm System. A manual fire alarm system shall be
installed throughout buildings containing fabrication areas.
Activation of the alarm system shall initiate a local alarm and transmit
a signal to the emergency control station. Manual fire alarm systems
shall be designed and installed in accordance with NFPA 72, National
Fire Alarm Code.
Gas Cabinet is a fully enclosed, noncombustible enclosure used to
provide an isolated environment for compressed gas cylinders in
storage or use. Doors and access ports for exchanging cylinders and
accessing pressure-regulating controls are allowed to be included.
Gas Room is a separately ventilated, fully enclosed room in which
only compressed gases and associated equipment and supplies are
stored or used.
Chapter 3 – Ventilation & Exhaust Systems: Revise and add new
conditions as follows.
Reason: Correlation with NFPA 1/Chapter 34 and UFC 5101.12
Hazardous Chemical Room is a room used in conjunction with or
serving a fabrication area where hazardous chemicals are stored, used
or transferred from vessels in the room through piping systems to a
fabrication area.
Add new section numbered 3.4 and renumber existing section
3.4/Duct Velocities to 3.5 and existing section 3.5/Controls to 3.6.
3.4 General Conditions.
Incompatible Materials are materials which, when in contact with
each other, have the potential to react in a manner that generates
heat, fumes, gases or byproducts which are hazardous to life or
property.
3.4.1 Fabrication Areas and Cleanrooms. Mechanical exhaust
ventilation shall be provided throughout a fabrication area or
cleanroom at the rate of not less than 1 cubic foot per minute per
square foot (0.044 L/s/m2) of floor area.
[NOTE: Shutoff is already addressed in NFPA 318/Section 3.5.6.]
Permissible Exposure Limit. [As printed in code change proposal for
NFPA 1/Chapter 2]
3.4.2 Workstations. See Sections 3.2 and 3.3 of this standard.
Semiconductor Fabrication Facility is a building or portion of a
building in which hazardous chemicals are used in amounts
exceeding Exempt Amounts per Control Area, and in which electrical
circuits or devices are created on solid crsystalline substances having
electrical conductivity greater than insulators but less than
conductors. These circuits or devices are commonly known as
semiconductors.
3.4.3 Hazardous Chemical Rooms. Exhaust ventilation shall be
provided in hazardous chemical rooms in accordance with NFPA 1 –
NFPA Uniform Fire Code, Chapter 34.
3.4.4 Gas Cabinets. Exhaust ventilation shall be provided for gas
cabinets in accordance with NFPA 1 – NFPA Uniform Fire Code, Chapter
34. For Silane and Silane mixes, also see Section 6.4.2.1 of this
standard.
Service Corridor is a fully enclosed passage used for transporting
hazardous chemicals and for purposes other than required means of
egress.
3.4.5 Exhausted Enclosures. Exhaust ventilation shall be provided
for exhausted enclosures in accordance with NFPA 1 – NFPA Uniform
Fire Code, Chapter 34.
Chapter 2 – Fire Protection: Revise and add new conditions as
follows.
Reason: Correlation with NFPA 1/Chapter 34, NFPA 5000/Chapter
33 and UFC 5101.10.2, 5101.11.
3.4.6 Gas Rooms. Exhaust ventilaton shall be provided in gas rooms
in accordance with NFPA 1 – NFPA Uniform Fire Code, Chapter 34.
2.1.2.3* Gas Cabinets and Exhausted Enclosures. Sprinklers shall be
installed in gas cylinder cabinets and exhausted enclosures that
contain hazardous chemical flammable gases.
3.4 3.5 Duct Velocities. [No changes to existing section except
renumbering.]
3.5 3.6 Controls. [No changes to existing section except
renumbering.]
Exception: Sprinklers are not required in gas cabinets located in a hazardous
chemical room or gas room, other than those cabinets containing Pyrophoric
gases.
Chapter 4 – Construction: Revise and add new conditions as follows.
Reason: Correlation with NFPA 1/Chapter 34, NFPA 5000/Chapter
33 and UFC 5101.8.1, 5101.8.2 & 5101.12 conditions.
2.1.2.6 Exhaust Ducts. All combustible exhausts ducts shall have
Interior automatic sprinklers shall be provided in exhaust ducts
where the conveying vapors, fumes, mists or generated by hazardous
chemicals as follows:
4.2 Fire Resistance Rating. Fabrication areas shall be separated from
each other by 1-hour fire resistance-rated construction. Fabrication
areas cleanrooms shall be separated from adjacent occupancies by
not less than 1-hour fire resistance-rated construction and not less
833
NFPA 318 — May 2002 ROP — Copyright 2001, NFPA
than the fire-resistance rating required in NFPA 5000 - NFPA Building
Code, Chapter ??.
Reason: Correlation with NFPA 1/Chapter 34, NFPA 5000/Chapter
33 UFC 5101.7.2, 5102 & 5103, NFPA and 5000/Chapter 11.
4.4* Electrical Classification.
5.1.1 Hazardous chemical storage and dispensing rooms and gas
rooms shall be separated from the cleanroom fabrication area by not
less than 1-hour fire resistance-rated construction, with the fireresistance rating in accordance with NFPA 5000, NFPA Building Code,
Chapter 8.
4.4.1 General. The fabrication area or cleanroom shall be
considered unclassified electrically with respect to Article 500 of
NFPA 70, National Electrical Code. Article 500 of NFPA 70, National
Electrical Code shall not apply to cleanrooms where the following
requirements are met:
5.1.3 Hazardous chemicals in the cleanroom fabrication area shall be
limited as indicated below.
1. Chemical storage and handling meet the requirements of
Chapter 5 of this standard and;
2. Ventilation and exhaust systems meet the requirements of
Chapter 3 of this standard; and
3. The average air change is not less than four cubic feet per minute
per square foot (0.176 L/s/m2) of floor area and the number of air
changes at any location is not less than three cubic feet per minute
per square foot (0.132 L/s/m2) of floor area. The use of recirculated
air shall be allowed.
[NOTE: Item 3 may be (unknown at this time) addressed
through NFPA 5000 – NFPA Building Code.]
4.4.2 Workstations. See Section 8.3.2.
1. To those Hazardous chemicals needed for operations and
maintenance.
2. Quantities of hazardous chemicals shall be limited to those within
the tool or the daily (24-hour) supply of chemicals needed, with
quantities not exceeding the limitations specified in Tables 5.1-A and
5.1-B.
3. Storage of hazardous chemicals in the fabrication area shall be
within approved or listed storage cabinets, gas cabinets, exhausted
enclosures or within a tool, with storage amounts limited to the
Exempt Amounts per Control Area set forth in NFPA 1 – NFPA
Uniform Fire Code, Chapter 34 and NFPA 5000 - NFPA Building Code,
Chapter 33.
4.5 Emergency Power System. An emergency power system shall be
provided for electrically operated equipment and connected control
circuits for the following systems:
5.1.8 Separation of Incompatible Materials. Incompatible hazardous
materials in shall be separated from each other in accordance with
NFPA 1, NFPA Uniform Fire Code, Chapter 34.
1. Hazardous chemical exhaust ventilation systems.
2. Hazardous chemical gas cabinet ventilation systems.
3. Hazardous chemical exhausted enclosure ventilation systems.
4. Hazardous chemical gas room ventilation systems.
5. Hazardous chemical room ventilation systems.
6. Hazardous chemical gas-detection systems.
7. Emergency alarm systems.
8. Manual fire alarm systems.
9. Automatic fire sprinkler system monitoring and alarm systems.
10. Electrically operated systems required elsewhere in this
standard, NFPA 1 – NFPA Uniform Fire Code or NFPA 5000 – NFPA
Building Code applicable to the use, storage or handling of hazardous
chemicals.
5.3.1* In new buildings, hazardous chemicals shall not be permitted
within an exit corridor a service corridor shall be provided when
necessary to transport hazardous chemicals from a liquid storage
room, hazardous chemical room, gas room or from the outside of a
building to the perimeter wall of a fabrication area. In existing
buildings, hazardous chemicals shall be transported in approved
chemical carts.
[NOTE – INFORMATION: Hazardous chemicals in exit corridors
are already addressed in Section 5.3.2.]
5.3.3* Chemical carts transporting or containing hazardous
chemicals shall be designed so that the contents will be fully enclosed.
They shall be capable of containing a spill from the largest single
container transported, with a maximum individual container size of 5
gal (19L) for liquids. The capacity of carts used for transportation of
hazardous chemicals shall not exceed the following:
4.6 Occupied Levels of Fabrication Areas. Occupied levels of
fabrication areas shall be located at or above grade.
4.7 Pass-Throughs in Existing Exit Access Corridors. Self-closing
doors having a fire-protection rating of not less than one hour shall
separate pass-throughs from existing exit access corridors. Passthroughs shall be constructed as required for exit access corridors.
1. Liquids: 55 gallons (208 L).
2. Solids: 500 pounds (227 kg).
3. Compressed Gases: 7 cylinders, up to 40 pounds (181 kg) each.
4.8 Workstations. The portion of a workstation that serves as a
cabinet for hazardous chemicals gases and flammable liquids shall be
noncombustible and, if of metal, shall not be less than 0.044-inch (18
gage) (1.12 mm) steel. Vessels containing hazardous chemicals
located in or connected to a workstation shall be protected from
physical damage and shall not project from the workstation.
Hazardous chemical gases and liquid vessels located within a
workstation shall be protected from seismic forces in an approved
manner in accordance with NFPA 5000, NFPA Building Code. For
compressed gases, see also NFPA 1, NFPA Uniform Fire Code, Chapter 33
and NFPA 55, Standard for the Storage, Use and Handing of Compressed
and Liquefied Gases in Portable Containers. Workstations containing
hazardous chemicals shall be provided with horizontal servicing
clearances of not less than 3 feet (914 mm) for electrical equipment,
gas cylinder connections and similar hazardous conditions, with the
clearances applying only to normal operational procedures and not
to repair or maintenance-related work.
5.3.5 The minimum clear width of a service corridor shall be 5 feet
(1524 mm) or 33 inches (828 mm) wider than the widest cart or truck
used in the service corridor, whichever is greater.
5.3.6 Service corridors shall not be used as a required means of egress.
5.3.7 The maximum quantities of hazardous chemicals transported in a
service corridor at one time shall not exceed two times that set forth in
Section 5.3.3.
5.5.3 Workstations. Each workstation in a fabrication area using
hazardous chemical liquids shall have the following:
1. Drainage piping systems connected to a compatible system for
disposition of such liquids;
2. The work surface provided with a slope or other means for directing
spilled materials to the containment or drainage system; and
3. An approved means of containing or directing spilled or leaked
liquids to the drainage system.
Chapter 5 – Chemical Storage and Handling: Revise existing and add
new conditions as follows:
834
NFPA 318 — May 2002 ROP — Copyright 2001, NFPA
5.6 Supply Piping. Supply piping for hazardous chemical liquids and
gases shall be welded throughout, except for connections to the systems
that are located within a ventilated enclosure if the material is a gas, or an
approved method of drainage or containment is provided for connections
if the material is a liquid.
[NOTE: NFPA 318/Section 6.3.3 addresses similar conditions for
gases – the existing section could be deleted if the proposed new
section is used.]
NOTE: Table based in 2000 UFC/Table 5102-A
TABLE 5.1-A
QUANTITY LIMITS FOR HAZARDOUS MATERIALS IN A SINGLE FABRICATION AREA
Hazard Category
Solids
(lbs/sq. ft.)
Liquids
(gals/sq. ft.)
Gas
(ft3 @ NTP/sq. ft.)
PHYSICAL HAZARD MATERIALS
Combustible Dust
Note b
Combustible Fiber
Loose
Baled
Note b
Note b
Combustible Liquid
Class II
Class III-A
Class III-B
Combination Class I, II and III-A
0.01
0.02
Not Limited
0.04
Cryogenic
Flammable
Oxidizing
Explosives
Note c
1.25
Note b
Note b
Flammable Gas
Gaseous
Liquefied
Note b
Note c
Flammable Liquid
Class I-A
Class I-B
Class I-C
Combination Class I-A, I-B and
I-C
Combination Class I, II and IIIA
Flammable Solid
Organic Peroxide
Unclassified Detonable
Class I
Class II
Class III
Class IV
Class V
Note b
0.0025
0.025
0.025
0.025
0.04
0.001
Note b
Note b
0.025
0.1
Not Limited
Not Limited
Note b
Note b
0.0025
0.01
Not Limited
Not Limited
Oxidizing Gas
Gaseous
Liquefied
Combination of Gaseous and
Liquefied
1.25
1.25
1.25
835
NFPA 318 — May 2002 ROP — Copyright 2001, NFPA
TABLE 5.1-A [continued]
QUANTITY LIMITS FOR HAZARDOUS MATERIALS IN A SINGLE FABRICATION AREA
Hazard Category
PHYSICAL HAZARD MATERIALS
Solids
(lbs/sq. ft.)
Liquids
(gals/sq. ft.)
Gas
(ft3 @ NTP/sq. ft.)
[continued]
Oxidizer
Class 4
Class 3
Class 2
Class 1
Combination Oxidizer Class 1, 2 3
Note b
0.003
0.003
0.003
0.003
Note b
0.03
0.03
0.03
0.03
Pyrophoric
Note b
0.00125
Notes c and d
Unstable Reactive
Class 4
Class 3
Class 2
Class 1
Note b
0.025
0.1
Not Limited
Note b
0.0025
0.01
Not Limited
Note b
Note b
Note b
Not Limited
Water Reactive
Class 3
Class 2
Class 1
Note b
0.25
Not Limited
0.00125
0.025
Not Limited
Carcinogens
Not Limited
Not Limited
Not Limited
Corrosives
Not Limited
Not Limited
Not Limited
Highly Toxics
Not Limited
Not Limited
Note c
Irritants
Not Limited
Not Limited
Not Limited
Sensitizers
Not Limited
Not Limited
Not Limited
Other Health Hazards
Not Limited
Not Limited
Not Limited
Toxics
Not Limited
Not Limited
Note c
HEALTH HAZARD MATERIALS
For SI: 1 pound per square foot = 4.882 kg/m2, 1 gallon per square foot = 0.025 L/m2, 1 foot @ NTP square foot = 0.305 m3
@NTP/m2
a
Hazardous materials within piping shall not be included in the calculated quantities.
Quantity of hazardous materials in a single fabrication shall not exceed exempt amounts in NFPA 1, NFPA Uniform Fire Code,
Chapter 34.
c
The aggregate quantity of flammable, pyrophoric, toxic and highly toxic gases shall not exceed 9,000 cubic feet (254.9m3) at
NTP.
d
The aggregate quantity of pyrophoric gases in the building shall be limited to the amounts for which detached storage is not
required as set forth in NFPA 1, NFPA Uniform Fire Code, Chapter 34.
b
836
NFPA 318 — May 2002 ROP — Copyright 2001, NFPA
NOTE: Table based in 2000 UFC/Table 5102-B
TABLE 5.1-B
MAXIMUM QUANTITIES OF HAZARDOUS CHEMICALS AT A WORKSTATION
Hazardous Chemical
State
Maximum Amount
Flammables, Highly Toxics,
Pyrophorics and Toxics Combined
Gas
3 cylinders
Hazardous Chemical Flammables
Liquid
Solid
15 gallonsa, b, c
5 poundsb, c
Corrosives
Gas
Liquid
Solid
3 cylinders
25 gallonsa, b, c
20 pounds2, 3
Highly Toxics
Liquid
Solid
15 gallonsa, b
5 poundsb
Oxidizers
Gas
Liquid
Solid
3 cylinders
12 gallonsa. b, c
20 poundsb, c
Pyrophorics
Liquid
Solid
0.5 gallond
See Table 1904.2.1
Toxics
Liquid
Solid
15 gallonsa, b, c
5 poundsb, c
Unstable Reactives Class 3
Liquid
Solid
0.5 gallonb, c
5 poundsb, c
Water Reactives Class 3
Liquid
Solid
0.5 gallond
See Table 1904.2.1
For SI: 1 pound = 0.454 kg, 1 gallon = 3.785 L
a
DOT shipping containers with a capacity of greater than 5.3 gallons (20 liters) shall not be located within a tool.
Maximum allowable quantities shall be increased 100 percent for use-closed systems operations. When Footnote c also applies, the
increase for both footnotes shall be allowed.
c
Quantities shall be allowed to be increased 100 percent when tools are internally protected with an approved automatic fire
extinguishing or suppression system. When Footnote b also applies, the increase for both footnotes shall be allowed.
d
Allowed only in tools which are internally protected with an approved automatic fire extinguishing or suppression system.
b
Chapter 6 – Hazardous Gas Cylinder Storage and Distribution: Add
reference for treatment systems for highly toxic and toxic gases as
follows.
Reason: Correlation with NFPA 1/Chapter 34, UFC 5101.12.4, IFC
1803.14.3.
8.9.1 General. A gas-detection system shall be provided for hazardous
chemical gases when the physiological warning properties of the gas
are at a higher level than the accepted permissible exposure limit
(PEL) for the gas, for flammable gases and for pyrophoric gases.
8.9.2 Where required.
6.9 Treatment Systems. Treatment systems shall be provided for
highly toxic or toxic compressed gases in accordance with NFPA 1 –
NFPA Uniform Fire Code, Chapter 34.
8.9.2.1 Fabrication Areas. A gas-detection system shall be provided in
fabrication areas at locations in the fabrication area where gas is used
or stored.
Chapter 8 – Production & Support Equipment: Add new conditions
as follows.
Reason: Correlation with NFPA 1/Chapter 34 and, UFC 5101.10.
8.9.2.2 Hazardous Chemical Rooms. A gas-detection system shall be
provided in hazardous chemical rooms when gas is used in the room.
8.9.2.3 Gas Cabinets, Exhausted Enclosures and Gas Rooms. A gasdetection system shall be provided in gas cabinets and exhausted
enclosures. A gas detection system shall be provided in gas rooms
when gases are not located in gas cabinets or exhausted enclosures.
8.9 Gas-Detection Systems.
837
NFPA 318 — May 2002 ROP — Copyright 2001, NFPA
8.9.2.4 Exit Access Corridors. When gases are transported in piping
placed within the space defined by the walls of an exit access corridor
and the floor or roof above the corridor, a gas-detection system shall
be provided where piping is located and in a the corridor.
8.10.2.3 Storage Rooms and Gas Rooms. See NFPA 1, NFPA Uniform
Fire Code, Chapter 34.
8.10.4 Alarm-Initiating Devices. An approved emergency telephone
system, local alarm manual pull stations, or other approved alarminitiating devices are allowed to be used as emergency alarm-initiating
devices.
EXCEPTION: A gas-detection system is not required for occasional
transverse crossings of the corridors by supply piping which is
enclosed in a ferrous pipe or tube for the width of the corridor.
8.10.5 Alarm Signals. Activation of the emergency alarm system shall
sound a local alarm and transmit a signal to the emergency control
station.
8.9.3 Gas-Detection System Operation.
8.9.3.1 Monitoring. The gas-detection system shall be capable of
monitoring the location where gas detection is required at or below
the permissible exposure limit (PEL) or ceiling limit of the gas for
which detection is provided. For flammable gases, the monitoring
detection threshold level shall be vapor concentrations in excess of 25
percent of the lower explosive limit (LEL) or lower flammable limit
(LFL). Monitoring for toxic and highly toxic gases shall also comply
with NFPA 1, NFPA Uniform Fire Code, Chapter 34.
Chapter 10 – Emergency Control Station: Add a new Chapter 10 as
follows.
Reason: Correlation with NFPA 1/Chapter 34 and UFC 5101.6.
Chapter 10 – Emergency Control Station
10.1 Emergency Control Station. An emergency control station shall
be provided on the premises at an approved location, outside of the
fabrication area and shall be continuously staffed by trained
personnel. The emergency control station shall receive signals from
emergency equipment and alarm and detection systems. Such
emergency equipment and alarm and detection systems shall include,
but not necessarily be limited to, the following when such equipment
or systems are required to be provided either by this chapter or
elsewhere in this standard:
8.9.3.2 Alarms. The gas-detection system shall initiate a local alarm
and transmit a signal to the emergency control station when a shortterm hazard condition is detected. The alarm shall be both visual and
audible and shall provide warning both inside and outside the area
where the gas is detected. The audible alarm shall be distinct from all
other alarms.
1. Automatic fire sprinkler system alarm and monitoring systems.
2. Manual fire alarm systems.
3. Emergency alarm systems.
4. Continuous gas-detection systems.
5. Smoke-detection systems.
6. Emergency power system.
8.9.3.3 Shutoff of Gas Supply. The gas-detection system shall
automatically close the shutoff valve at the source on gas supply
piping and tubing related to the system being monitored for which
gas is detected when a short-term hazard condition is detected.
Automatic closure of shutoff valves shall be in accordance with the
following:
1. When the gas-detection sampling point initiating the gasdetection system alarm is at a use location or within a gas valve
enclosure of a branch line downstream of a piping distribution
manifold, the shutoff valve in the gas valve enclosure for the branch
line located in the piping distribution manifold enclosure shall
automatically close.
2. When the gas-detection sampling point initiating the gasdetection system alarm is within a gas cabinet or exhausted enclosure,
the shutoff valve in the gas cabinet or exhausted enclosure for the
specific gas detected shall automatically close.
3. When the gas detection sampling point initiating the gas-detection
system alarm is within a room and compressed gas containers are not
in gas cabinets or exhausted enclosures, the shutoff valves on all gas
lines for the specific gas detected shall automatically close.
4. When the gas detection sampling point initiating the gasdetection system alarm is within a piping distribution manifold
enclosure, the shutoff valve for the compressed gas container of
specific gas detected supplying the manifold shall automatically close.
Chapter 11 – General Safety Precautions: Add a new Chapter 11 as
follows.
Reason: Correlation with NFPA 1/Chapter 34 and UFC 5101.9.
Chapter 11 – General Safety Precautions
11.1 Emergency plan.
11.1.1 Plans and diagrams. Plans and diagrams shall be maintained in
approved locations indicating the approximate plan for each area;
the amount and type of hazardous chemicals stored, handled and
used; locations of shutoff valves for hazardous chemicals supply
piping; emergency telephone locations; and locations of exits.
11.1.2 Plan updating. Plans and diagrams shall be maintained up-todate. The fire department shall be informed of major changes.
11.2 Emergency response team. Responsible persons shall be
designated to an on-site emergency response team and trained to be
liaison personnel for the fire department. These persons shall aid the
fire department in preplanning emergency responses; identifying
locations where hazardous chemicals is stored, handled and used;
and shall be familiar with the chemical nature of hazardous
chemicals. An approved number of personnel for each work shift
shall be designated.
8.10 Emergency Alarm System.
8.10.1 General. Emergency alarm systems shall be provided in
accordance with this section. The exempt provisions of NFPA 1,
NFPA Uniform Fire Code, Chapter 34 shall not apply to emergency alarm
systems required for hazardous chemicals.
11.3 Emergency drills. Emergency drills of the on-site emergency
response team shall be conducted on a regular basis but not less than
once every three months. Records of drills conducted shall be
maintained at the emergency control station for a period of one year.
SUBSTANTIATION: This change will provide general correlation of
NFPA 318 with the following fire codes/standards:
• NFPA 1/NFPA Uniform Fire Code [new/next edition]
• 1997 Uniform Fire Code
• 1998-1999 Uniform Fire Code Supplements
8.10.2 Where required.
8.10.2.1 Service corridors. An emergency alarm system shall be
provided in service corridors, with at least one alarm device in the
service corridor or as otherwise required by the authority having
jurisdiction.
8.10.2.2 Exit Access Corridors and Exit Enclosures. See NFPA 1,
NFPA Uniform Fire Code, Chapter 34.
838
NFPA 318 — May 2002 ROP — Copyright 2001, NFPA
Gas cabinet. Gas cabinets, noncombustible enclosure used in the
storage and use of compressed gas cylinders. A full height
door/sliding window are provided to allow cylinder changes and the
operation of the gas cylinder valves.
SUBSTANTIATION: Explains the difference between gas cabinets
and exhausted enclosures. Gas cabinets are normally limited to three
cylinders because of safety reasons during cylinder changes.
Exhausted enclosures may need to house a number of valves and
fittings, in some cases a number of lecture bottles.
COMMITTEE ACTION: Reject.
COMMITTEE STATEMENT: Rejected at the request of the
submitter.
NUMBER OF COMMITTEE MEMBERS ELIGIBLE TO VOTE: 26
VOTE ON COMMITTEE ACTION:
AFFIRMATIVE: 25
NOT RETURNED: 1 Wilke
• 2000 Uniform Fire Code
COMMITTEE ACTION: Accept.
NUMBER OF COMMITTEE MEMBERS ELIGIBLE TO VOTE: 26
VOTE ON COMMITTEE ACTION:
AFFIRMATIVE: 25
NOT RETURNED: 1 Wilke
COMMENT ON AFFIRMATIVE:
BENSON: This placeholder wording will need a lot of coordination
with existing 318 wording at our next meeting. This is going to be a
big job!
___________________
(Log #CP1)
318- 6 - (1-5 Definitions (GOT)): Accept
SUBMITTER: Technical Committee on Cleanrooms
RECOMMENDATION: Adopt the preferred definitions from the
NFPA Glossary of Terms for the following terms:
Modify definitions as follows:
Compressed Gas. Any material or mixture having, when in its
container, an absolute pressure exceeding 40 psia (an absolute
pressure of 276 kPa) at 70°F (21.1°C) or, regardless of the pressure at
70°F (21.1°C), having an absolute pressure exceeding 104 psia (an
absolute pressure of 717 kPa) at 130°F (54.4°C) or flammable liquid
having a vapor pressure exceeding 40 psi absolute at 100°F (275.8 kPa
at 37.8°C) as determined by ASTM D 323, Standard Test Method for
Vapor Pressure of Petroleum Products.
Interlock. A device, or an arrangement of devices, in which the
operation of one part or one mechanism of the device or
arrangement controls the operation of another part of another
mechanism. (preferred) NFPA 97
Liquid. A material that has a fluidity greater than that of 300
penetration asphalt when tested in accorance with ASTM D 5,
Standard Test Method of Penetration of Bituminous Materials.
Unless otherwise specified, the term liquid includes both flammable
and combustible liquids. (preferred) NFPA 30, 1996 ed
Combustible Liquid. A liquid that has a closed-cup flash point at or
above 37.8°C (100°F). (preferred) NFPA 30
Flammable Liquid. A liquid that has a closed-cup flash point that is
below 37.8°C (100°F) and a maximum vapor pressure of 40 psia
(2068 mm Hg) at 37.8°C (100°F). (preferred) NFPA 30
Noncombustible. A material that, in the form in which it is used and
under the conditions anticipated, will not ignite, burn, support
combustion, or release flammable vapors when subjected to fire or
heat. Materials that are reported as passing ASTM E 136, Standard
Test Method for Behavior of Materials in a Vertical Tube Furnace at
750°C, shall be considered noncombustible materials. (preferred)
NFPA 220
SUBSTANTIATION: Adoption of preferred definitions will assist the
user by providing consistent meaning of defined terms throughout
the National Fire Codes.
COMMITTEE ACTION: Accept.
NUMBER OF COMMITTEE MEMBERS ELIGIBLE TO VOTE: 26
VOTE ON COMMITTEE ACTION:
AFFIRMATIVE: 24
NEGATIVE: 1
NOT RETURNED: 1 Wilke
EXPLANATION OF NEGATIVE:
KIRSON: For the definition of Noncombustible, the Committee
voted to remove the reference to NFPA 220, yet it is still on the ballot!
___________________
(Log #7)
318- 8 - (2-1.2.4 and 2-1.2.4 Exception): Reject
SUBMITTER: Dennis Kirson, Albuquerque, NM
RECOMMENDATION: Revise Section 2.1.2.4 to read as follows:
"2.1.2.4* Automatic quick-response sprinklers sprinkler heads..."
Revise the Exception to Section 2.1.2.4, by adding the words, "quickresponse sprinklers or the" to read as follows:
Exception: Where the open dispensing system is ...the automatic
quick-response sprinklers or the deluge system shall not be required.
SUBSTANTIATION: Editorial correction. To be consistent with
other articles in Chapter 2.
When the Technical Committee revised Section 2.1.2.4 to provide
the option of closed sprinklers or deluge protection, it neglected to
follow through and reword the exception to be consistent. As now
worded, the exception could be interpreted to indicate that a deluge
system is not required, but that a wet sprinkler system is still required.
This was not the Committee’s intent.
COMMITTEE ACTION: Reject.
COMMITTEE STATEMENT: At the request of the submitter.
NUMBER OF COMMITTEE MEMBERS ELIGIBLE TO VOTE: 26
VOTE ON COMMITTEE ACTION:
AFFIRMATIVE: 25
NOT RETURNED: 1 Wilke
___________________
(Log #17)
318- 9 - (2-1.2.6): Accept in Principle
SUBMITTER: Dennis H. Collins, Intel Corp.
RECOMMENDATION: Remove the word "largest".
SUBSTANTIATION: Removes any confusion as to what the diameter
limitation is.
COMMITTEE ACTION: Accept in Principle.
Revise text:
2.1.2.6* All Combustible exhaust ducts shall have interior automatic
sprinklers when where the largest interior cross-sectional diameter
area is equal to or greater than 75 sq in. (480 sq cm) 10 in. (254 mm).
Exception: Ducts approved for use without internal automatic
sprinklers.
A.2.1.2.6 Equivalent to 10 in. (254 mm) diameter duct.
COMMITTEE STATEMENT: The word largest was removed since it
could cause the installation of sprinklers, the revised language
clarifies this situation.
NUMBER OF COMMITTEE MEMBERS ELIGIBLE TO VOTE: 26
VOTE ON COMMITTEE ACTION:
AFFIRMATIVE: 25
NOT RETURNED: 1 Wilke
COMMENT ON AFFIRMATIVE:
BENSON: Editorial, I believe. Drop the "10 in. (254 mm)" at the
end of the requirement.
___________________
___________________
(Log #12)
318- 7 - (1-5 Exhausted enclosure and Gas cabinet): Reject
SUBMITTER: Dennis H. Collins, Intel Corp.
RECOMMENDATION: Add definitions to read as follows:
Exhausted enclosure. Enclosures, noncombustible or
nonpropagrating materials used to house gas jungles, hazardous gas
and liquid fittings, local tool hazardous gas boxes and etc.
839
NFPA 318 — May 2002 ROP — Copyright 2001, NFPA
COMMITTEE STATEMENT: Present language provides more
detail, the proposal is unenforceable.
NUMBER OF COMMITTEE MEMBERS ELIGIBLE TO VOTE: 26
VOTE ON COMMITTEE ACTION:
AFFIRMATIVE: 25
NOT RETURNED: 1 Wilke
(Log #6)
318- 10 - (2-1.2.6, 3.3.6): Reject
SUBMITTER: Dennis Kirson, Albuquerque, NM
RECOMMENDATION: Revise Sections 2-1.2.6 and 3.3.6, by adding a
new last sentence to read as follows:
"A listed and approved carbon dioxide exhaust duct fire suppression
system, actuated while the exhaust fans continue to operate, shall be
permitted as an alternative to sprinklers."
SUBSTANTIATION: Sprinklers installed in exhaust ductwork are
effective fire protection. However, there are undesirable problems
related to such protection [Articles 2.1.2.6.3 - drainage, 2.1.2.6.4 corrosive atmospheres, and 2.1.2.6.5 - ITM]. Carbon dioxide
provides a viable alternative.
On my way to San Diego to attend the December 1999 meeting of
the Technical Committee on Cleanrooms, I flew to Japan and
witnessed the successful testing of a carbon dioxide exhaust duct fire
suppression system at Fenwal [Japan]’s Hachioji R & D Center in
suburban Tokyo. Fenwal was proposing their carbon dioxide exhaust
duct fire suppression system for a cleanroom fabrication facility my
employer was designing for a Japanese -Taiwanese joint venture near
Taipei, Taiwan, ROC. I witnessed the Fenwal CO2 concept work,
several times, under differing circumstances.
Fenwal has installed the CO2 duct fire suppression system in
cleanroom fabrication facilities throughout Japan, after approval, on
a case by case basis, by local fire department jurisdictions. The system
has not yet received national approval from the Japanese Fire
Department Safety Test Center (Laboratory), for listing of the system
in the Japanese Fire Code.
COMMITTEE ACTION: Reject.
COMMITTEE STATEMENT: Listed technology does not exist today.
NUMBER OF COMMITTEE MEMBERS ELIGIBLE TO VOTE: 26
VOTE ON COMMITTEE ACTION:
AFFIRMATIVE: 24
NEGATIVE: 1
NOT RETURNED: 1 Wilke
EXPLANATION OF NEGATIVE:
KIRSON: Carbon dioxide provides a viable alternative to sprinklers
installed in exhaust ductwork. I personally witnessed a series of
successful tests of a CO2 exhaust duct fire suppression system, under
differing circumstances, at Fenwal Controls of Japan, Ltd’s Hachioji
R&D Center in suburban Tokyo. Fenwal has installed the CO2 duct
fire suppression system in cleanroom fabrication facilities throughout
Japan.
The Committee’s justification for rejecting the proposal was that no
such systems are currently listed. This reasoning is inconsistent with
the arguments made to include spot smoke detection, during
Committee deliberations and on the floor of the Association’s
Technical Committee Report Session, May 17, 2000, in Denver, CO,
Since the proposal specified an approved and listed system, the lack
of current listing does not create any problem. However, rejection of
the proposal defeats the encouragement of new technologies.
___________________
(Log #5)
318- 12 - (2-3.1): Reject
SUBMITTER: Dennis Kirson, Albuquerque, NM
RECOMMENDATION: Revise Section 2-3.1, by reinserting the words
"air sampling" in the first sentence to read as follows:
2-3.1* A listed or approved air sampling smoke detection system
shall be provided in the cleanroom return airstream at a point before
dilution from make-up air occurs.
SUBSTANTIATION: This proposal returns to the wording of the
1998 Edition of NFPA 318.
At the December 1999 meeting of the Technical Committee on
Cleanrooms, the Committee voted to retain the requirement that a
listed or approved air sampling smoke detection system be provided
for cleanroom fire protection, as noted on page 129 of the 2000 ROC,
re: Comment 318-7 on Proposal 318-17. The words "air sampling"
were deleted from NFPA 318 by a vote on the floor of the Association
taken at the Technical Committee Report Session, Committee on
Cleanrooms, on Wednesday, May 17, 2000 in Denver, CO.
1. No documentation has ever been presented to the Committee to
justify changing the prior requirement for air sampling smoke
detection.
2. No performance criteria for acceptance of other forms of smoke
detection within the cleanroom environment currently exists within
NFPA 318, or elsewhere.
3. The UL test which justified listing the Notifier ViewTM spot-type
smoke detector for use in air streams up to 4,000 cfm is inadequate
for cleanroom applications. This small scale test configuration
utilizes a 1 sq ft duct. With the exception of air velocity, this UL
acceptance test in no way approximates the conditions encountered
in state-of-the-art cleanroom air streams/paths, particularly the sheer
size [cross-sectional area] of the air stream. It is in no way
representative of a cleanroom air path and is a total misapplication of
fire protection.
4. With the addition of an equivalency statement to this standard
[Art. 1.3], any potential claim that the proposed wording of Art. 2-3.1
, is a restraint of trade, is invalid.
5. The removal of the words "air sampling" could easily be
misinterpreted by designers and vendors/installers unfamiliar with
the unique challenge of cleanrooms to provide any listed spot-type
smoke detector in the cleanroom underfloor plenum, thereby
decreasing the level of fire protection provided to newly designed
and constructed cleanroom facilities.
COMMITTEE ACTION: Reject.
COMMITTEE STATEMENT: Recent test data which will be
provided to the committee, has shown that Notifier View spot
detector did operate promptly in a clean room environment.
NUMBER OF COMMITTEE MEMBERS ELIGIBLE TO VOTE: 26
VOTE ON COMMITTEE ACTION:
AFFIRMATIVE: 21
NEGATIVE: 4
NOT RETURNED: 1 Wilke
EXPLANATION OF NEGATIVE:
BENSON: My comment is based on the "substantiation" for the
recommended change. The test documentation provided showing
testing of the view detectors in an airstream with <2.5 fpm velocity is
not an adequate validation of acceptable operation in a
semiconductor cleanroom where the velocities can be 16 to 40 times
that!
KIRSON: At the December 1999 meeting of the Technical
Committee on Cleanrooms, the Committee voted to retain the
requirement that a listed or approved air sampling smoke detection
___________________
(Log #13)
318- 11 - (2-1.2.6.1): Reject
SUBMITTER: Dennis H. Collins, Intel Corp.
RECOMMENDATION: Remove first sentence and replace with:
Sprinklers installed in duct systems shall be hydraulically designed to
provide adequate coverage in the horizontal section of the duct.
Add new sentence at the end of the section:
Sprinklers shall be located at the top of the vertical run.
SUBSTANTIATION: Removing the design requirement of 0.5 gpm
over an area as derived by multiplying the distance between the
sprinklers in a horizontal duct by the width of the duct allows the
designer to address large diameter ducts without using some arbitrary
design rule that is unreasonable for larger ducts.
Many exhaust mains in new factories are larger than 5 ft in diameter.
COMMITTEE ACTION: Reject.
840
NFPA 318 — May 2002 ROP — Copyright 2001, NFPA
6. The removal of the words "air sampling" could easily be
misinterpreted by designers and vendors/installers unfamiliar with
the unique challenge of cleanrooms, as authority to provide any listed
spot-type smoke detector in the cleanroom underfloor plenum,
thereby decreasing the level of fire protection intended by NFPA 318
to be provided for newly designed and constructed cleanroom
facilities.
The above excerpt is not Mr. Kirson’s entire substantiation; however,
the items listed above are, in my opinion, some of the more
important reasons listed.
system be provided for cleanroom fire protection, as noted on page
129 of the 2000 ROC, re: Comment 318-7 (Log #12) on Proposal 31817 (Log #19). The words "air sampling" were deleted from NFPA 318
by a vote on the floor of the Association taken at the Technical
Committee Report Session, Committee on Cleanrooms, on
Wednesday, May 17, 2000, in Denver, CO.
1. No documentation has ever been presented to the Committee to
justify changing the prior requirement for air sampling smoke
detection.
2. No performance criteria for acceptance of other forms of smoke
detection within the cleanroom environment currently exists within
NFPA 318, or elsewhere.
3. The Notifier ViewTM spot-type smoke detector is not proven in
cleanrooms applications.
4. The UL test which justified listing the Notifier ViewTM spot-type
smoke detector for use in air streams up to 4,000 cfm is inadequate
for cleanroom applications.
5. This small scale test configuration utilizes a 1 ft2 duct. With the
exception of air velocity, this UL acceptance test in no way
approximates the conditions encountered in state-of-the art
cleanroom air streams/paths, particularly the sheer size [crosssectional area] of the air stream. It is in no way representative of a
cleanroom air path and is a total misapplication of the listing process.
6. The UL testing does not verify the sensitivity [0.03%/ft
obscuration required in 318] when performing the High Velocity
Tests. The tests only verifiy that the detector will not false alarm in
limited high air flow conditions [usually up to a maximum of 4500
fpm] and will respond to a gross smoke test [anywhere within the UL
acceptable window""0.5 - 4%/ft obscuration].
7. UL does not presently have the capability to measure 0.03%/ft
obscuration.
PEARCE: "Air Sampling" should be added. There is still no
documentation provided that shows other technologies work. Air
sampling detectors have been in service for over ten years and have
proven themselves.
Neither UL nor FM have a listing procedure where testing would
assure satisfactory performance of alternative technologies.
STUBBLEFIELD: The vote of the committee was based on the
submission of specific data (refer to the Committee Statement on
Proposal 318-12 (Log #5)). This data has not been provided to date.
Also, high-volume/high-dilution air streams, which are typical in
cleanroom environments, necessitate the most sensitive detection
methods available. Current air sampling systems are capable of
sensitivities in the range of 0.0015 percent obscuration per foot and
beyond, which is greater than any other detection methodology
presented to the committee. I agree with Mr. Kirson’s substantiation
provided in Proposal 318-12 (Log #5) and have included an excerpt
of his most recent comments.
1. No documentation has ever been presented to the Committee to
justify changing the prior requirement for air sampling smoke
detection.
2. No performance criteria for acceptance of other forms of smoke
detection within the cleanroom environment currently exists within
NFPA 318, or elsewhere.
3. The UL testing does not verify the sensitivity [0.03 percent /ft
obscuration required in 318] when performing the High Velocity
Tests. The test only verifies that the detector will not false alarm in
limited high air flow conditions [usually up to a maximum of 4500
fpm] and will respond to a gross smoke test [anywhere within the UL
acceptable window ""0.5 -4 percent/ft obscuration].
4. UL requires a 90 day trial period before the Notifier ViewTM
spot-type smoke detector can be programmed for the 0.03 to 0.5
percent per foot setting.
5. The Notifier ViewTM spot-type smoke detectors are susceptible to
contamination on the optics and mirror. To compensate for dirt, an
algorithm performs a Drift Compensation function making the
detector less sensitive than when initially installed.
___________________
(Log #20)
318- 13 - (2-3.3): Accept in Principle
SUBMITTER: Dennis H. Collins, Intel Corp.
RECOMMENDATION: Add "UV/IR" to the first sentence in Section
2.3.3 to read as follows:
"UV/IR detection shall be provided at silane gas cylinder..."
Remove "6.5" from the first sentence.
SUBSTANTIATION: To eliminate any confusion as to the type of
detection that is needed in silane areas, we are looking for flame
detection in the open dispensing areas.
UV/IR detection is not normally used in gas cabinets with Section
6.5 refers to. Section 2.1.2.2 already requires sprinklers in each gas
cabinet.
COMMITTEE ACTION: Accept in Principle.
Revise Section 2-3.3 replace the word "detection"with the following:
"Optical flame detectors that will respond to the flame signature of
silane...."
Reference to Section 6.5 is deleted as proposed.
COMMITTEE STATEMENT: This wording will not restrict the
application to a specific type of detector.
NUMBER OF COMMITTEE MEMBERS ELIGIBLE TO VOTE: 26
VOTE ON COMMITTEE ACTION:
AFFIRMATIVE: 25
NOT RETURNED: 1 Wilke
___________________
(Log #15)
318- 14 - (2-3.5): Accept
SUBMITTER: Dennis H. Collins, Intel Corp.
RECOMMENDATION: Remove the word "recirculation" from
Section 2.3.5 as a requirement.
SUBSTANTIATION: Section 2.3.1 already requires smoke detection
in the cleanroom air stream. Depending on how the air is supplied to
the cleanroom there may be hundreds of detectors needed to meet
the requirement in Section 2.3.5. The cleanroom’s smoke detection
system can provide the same capability.
COMMITTEE ACTION: Accept.
NUMBER OF COMMITTEE MEMBERS ELIGIBLE TO VOTE: 26
VOTE ON COMMITTEE ACTION:
AFFIRMATIVE: 23
NEGATIVE: 2
NOT RETURNED: 1 Wilke
EXPLANATION OF NEGATIVE:
BENSON: I disagree. Detectors at the RCAH exit will respond to a
problem in the RCAH much faster than the general FAB system. If
this is to be accepted then the exception to 3.1.2 must be removed.
PEARCE: 3.1.2 is dependent on smoke detection after the
recirculation units by eliminating smoke detection units after the
recirculation units Class II filters (which allow 8 ft flame front past the
filter) are permitted.
___________________
841
NFPA 318 — May 2002 ROP — Copyright 2001, NFPA
it from being addressed as high hazard and any associated
requirements.
COMMITTEE ACTION: Accept in Principle.
Add to the proposed text the words "as defined in NFPA 101 "Life
Safety Code". The new Section now reads as follows:
4.1 Semiconductor manufacturing facilities containing clean rooms
and associated support facilities will shall be considered to be general
or special purpose industrial occupancies as defined in NFPA 101
"Life Safety Code".
COMMITTEE STATEMENT: Reference to NFPA 101 is necessary.
NUMBER OF COMMITTEE MEMBERS ELIGIBLE TO VOTE: 26
VOTE ON COMMITTEE ACTION:
AFFIRMATIVE: 25
NOT RETURNED: 1 Wilke
(Log #CP4)
318- 15 - (Chapter 3): Accept
SUBMITTER: Technical Committee on Cleanrooms
RECOMMENDATION: Add the two words "Hazardous Chemical" to
Sections 3.2, 3.3 and 3.4.(in 3.4 also add the word exhaust before
duct) the titles now read as follows;
3.2 Local Hazardous Chemical Exhaust System
3.3 Local Hazardous Chemical Exhaust System Construction,
3.4 Hazardous Chemical Exhaust Duct Velocities.
Delete the word "fume" in Section 3.2.2, the section now reads as
follows:
3.2.2 Energy conservation devices that create a risk of returning
contaminants to the cleanroom air supply shall not be used in fume
exhaust systems.
SUBSTANTIATION: This action is consistant with Committee
Action and Statement on Proposal 318-21 (Log #3).
COMMITTEE ACTION: Accept.
NUMBER OF COMMITTEE MEMBERS ELIGIBLE TO VOTE: 26
VOTE ON COMMITTEE ACTION:
AFFIRMATIVE: 25
NOT RETURNED: 1 Wilke
COMMENT ON AFFIRMATIVE:
BENSON: Editorial, the word "fume" was not deleted from the new
wording of 3.2.2.
___________________
(Log #10)
318- 18 - (4-4 and Figure 4.3): Accept
SUBMITTER: Dennis Kirson, Albuquerque, NM
RECOMMENDATION: Both Section 4.3 and Figure 4.3 should be
reworded to indicate that Figure 4.3 is an example of an Authority
Having Jurisdiction approved seismic map and not the seismic map
being specified by this document.
SUBSTANTIATION: 1. Figure 4.3 is not consistent with the
different seismic maps used by the various model building codes and
insurance rating bureaus across the US.
2. This map only addresses the United States and is of no value to
the rest of the world in an international standard. It is better to refer
the user to their local AHJ.
COMMITTEE ACTION: Accept.
NUMBER OF COMMITTEE MEMBERS ELIGIBLE TO VOTE: 26
VOTE ON COMMITTEE ACTION:
AFFIRMATIVE: 23
NEGATIVE: 2
NOT RETURNED: 1 Wilke
EXPLANATION OF NEGATIVE:
BENSON: Just because this is an international standard doesn’t
mean we can’t put a USA map in it. Why not use a good map, one
existing in, for example, the UFC. Since the NFPA now owns the
UFC, we could lift the UBC/UFC seismic map and replace the one we
have now with it.
PEARCE: ISO, UBC or ATC zone maps all make good examples.
Any or all can be used.
___________________
(Log #14)
318- 16 - (3-5.5): Accept
SUBMITTER: Dennis H. Collins, Intel Corp.
RECOMMENDATION: Delete Section 3.5.5, smoke removal system
or capability.
SUBSTANTIATION: The use of smoke removal systems is not a life
safety issue but a risk management need. As demonstrated by the fire
modeling conducted by Intel Corporation, clearly indicated one
could safely detect and exit a cleanroom without any other systems in
operation. Study was completed by Hugh Associates, Inc. in 1995-6.
COMMITTEE ACTION: Accept.
NUMBER OF COMMITTEE MEMBERS ELIGIBLE TO VOTE: 26
VOTE ON COMMITTEE ACTION:
AFFIRMATIVE: 23
NEGATIVE: 2
NOT RETURNED: 1 Wilke
EXPLANATION OF NEGATIVE:
BENSON: I disagree, smoke removal systems in a hazardous
occupancy are a very real life safety issue for fire fighters responding
to a fire in a FAB with the tool probably involved in the fire probably
constructed of a plastic material which, if burning, will produce
copious amounts of thick, corrosive, toxic smoke.
PEARCE: The Hughes Associates study only showed improperly
designed smoke removal systems won’t work. Smoke removal is
needed to limit contamination in cleanrooms. It must include
treated make up air to prevent opening the room up and flooding it
with contaminated air.
___________________
(Log #CP3)
318- 19 - (4-5, 6.3.5 (New) ): Accept
SUBMITTER: Technical Committee on Cleanrooms
RECOMMENDATION: Add new Section to 4.5 Welding
Move Section 6.3.5 and related appendix material to new section
4.5.1, new section reads as follows:
4.5 Welding.
4.5.1 Welders and pipefitters shall be trained and qualified for the
specific function they are performing.
4.5.2 Thermoplastic welders for critical components shall be trained
and qualified for the specific function they are performing.
A.4.5.1 Training should be as outlined in SEMI F3, Guideline for
Welding Stainless Steel Tubing for Semiconductor Manufacturing
Applications.
A.4.5.2 Thermoplastic welders should be qualified under DVS
welding standards.
(DVS= Deutscher Verban Fur Schwissen und Verwqandte Verfchren
E. V.)
SUBSTANTIATION: Improper welds can fail due to heat, vibration
and chemical exposure. Failure could result in da,mage to
equipment and danger to personel. Standards for qualifying welders
exist and should be applied to cleanrooms.
COMMITTEE ACTION: Accept.
___________________
(Log #19)
318- 17 - (4-1 (New) ): Accept in Principle
SUBMITTER: Dennis H. Collins, Intel Corp.
RECOMMENDATION: Add new subsection 4.1 to read as follows:
"Semiconductor manufacturing facilities containing clean rooms
and associated support facilities will be considered to be general or
special purpose industrial occupancies."
The other items in Section 4 should become 4.1.1, 4.1.2, 4.1.3 and
4.1.4.
SUBSTANTIATION: NFPA 318 has never really defined the type of
occupancy semiconductor manufacturing was with the exception of
Chapter 9 Appendix A.9.1. This new text will do that. This will keep
842
NFPA 318 — May 2002 ROP — Copyright 2001, NFPA
NUMBER OF COMMITTEE MEMBERS ELIGIBLE TO VOTE: 26
VOTE ON COMMITTEE ACTION:
AFFIRMATIVE: 24
NEGATIVE: 1
NOT RETURNED: 1 Wilke
EXPLANATION OF NEGATIVE:
QUINLAN: 4.5.2 says, "Thermoplastic welders for critical
components shall be trained and qualified for the specific function
they are performing.
The only reference to what "qualified" means is in A.4.5.2 that says,
"...welders should be qualified under DVS welding standards".
Although the intent of the Appendix is to inform and explain, I
believe that the way this proposal is worded, AHJ’s will require
companies to have their welders conform to the DVS standards.
When this proposal was discussed on the floor of our last meeting it
was the committee’s intent to not require thermoplastic welders to
have to comply with a standard the Committee has never seen and
was unaware of before this meeting.
Also, since "Qualified" isn’t defined in this document I referred to
the dictionary. Two of the meanings that show up are, "a. To declare
competent or capable; certify. b. To make legally capable; license."
I believe that it is premature to include this proposal into NFPA 318
until it is better understood.
COMMITTEE ACTION: Accept in Principle.
Change the title of Section 3.5 to "Hazardous Chemical Exhaust
Controls"
In section 3.5.4 delete the word "fume", the section now reads as
follows:
3.5.4 Fume Exhaust dampers, where required for balancing or
control of the exhaust system, shall be of the locking type.
Renumber existing section 3.5.6 to 3.1.4.
COMMITTEE STATEMENT: Clarifies the requirements for
hazardous exhaust systems.
NUMBER OF COMMITTEE MEMBERS ELIGIBLE TO VOTE: 26
VOTE ON COMMITTEE ACTION:
AFFIRMATIVE: 25
NOT RETURNED: 1 Wilke
COMMENT ON AFFIRMATIVE:
BENSON: Editorial, this applies to 3.5.1 not 5.5.1.
___________________
(Log #4)
318- 22 - (5-5.2): Accept in Principle
SUBMITTER: David E. Libby, IBM
RECOMMENDATION: Insert the word "hazardous" as follows:
"The emergency power shall operate the hazardous exhaust system
at not less than 50 percent capacity when it is demonstrated...".
SUBSTANTIATION: This follows on from my proposal for 5.5.1.
COMMITTEE ACTION: Accept in Principle.
COMMITTEE STATEMENT: See Committee Proposal 318-15 (Log
#CP4).
NUMBER OF COMMITTEE MEMBERS ELIGIBLE TO VOTE: 26
VOTE ON COMMITTEE ACTION:
AFFIRMATIVE: 23
NEGATIVE: 2
NOT RETURNED: 1 Wilke
EXPLANATION OF NEGATIVE:
BENSON: Why is this needed if we changed the title of Section 3.5
to include the word "hazardous"? This applies to 3.5.2 not 5.5.2.
PEARCE: Hazardous exhaust system is not defined
___________________
(Log #2)
318- 20 - (5-3.1 Exception (New) ): Accept in Principle
SUBMITTER: David E. Libby, IBM
RECOMMENDATION: Add exception as follows
Exception: Ducts approved for use without internal sprinklers in
lengths of 10 feet or less may be used for local workstation exhaust
hookups.
SUBSTANTIATION: Ribbed flexible ducts are now available that are
non combustible or "fire safe" and should be allowed in limited
lengths to allow flexibility of installation and rearrangement of
workstations.
COMMITTEE ACTION: Accept in Principle.
Revise text:
3.3.1* Ribbed Flexible connections unless listed for fume exhaust
and for use without internal automatic sprinkler protection, shall not
be used in exhaust ductwork that is connected to combustible
workstations or to workstations where combustible chemicals are
used.
COMMITTEE STATEMENT: The changes better describe the
application of flexible connections.
NUMBER OF COMMITTEE MEMBERS ELIGIBLE TO VOTE: 26
VOTE ON COMMITTEE ACTION:
AFFIRMATIVE: 24
NEGATIVE: 1
NOT RETURNED: 1 Wilke
EXPLANATION OF NEGATIVE:
PEARCE: This is misleading. This allows any AHJ to "approve"
poorly constructed ducts for use as connectors. Ducts used without
sprinklers should be listed in accordance with FM 4922 only.
COMMENT ON AFFIRMATIVE:
BENSON: Editorial, this exception applies to 3.3.1 not 5.3.1.
___________________
(Log #18)
318- 23 - (6-4.2.1): Accept in Part
SUBMITTER: Dennis H. Collins, Intel Corp.
RECOMMENDATION: Move Section 6.4.2.1 to Section 6.5
Silane/Toxic Mixes Storage and Dispensing.
Section 6.4.2.1 should replace 6.5.3(b).
Make the last sentence of 6.5.3(b) a stand alone item to read as
follows:
(c) The ventilation system shall be provided with an automatic
emergency source of power to operate at full capacity.
Make existing items c-f down to d-g.
SUBSTANTIATION: NFPA 318 never intended to have silane in
cabinets. It is not a risk free installation even though the SEMATECH
study indicated under the right condition as noted in Section 6.4.2.1
the risk is acceptable. However when section 6.4.2.1 was added, it was
not added to the silane/toxic mix section where silane is in cabinets.
There is no reason to put silane in cabinets in an open landscape
configuration and we should not allow it or encourage it with the
expectation of toxic mixes.
COMMITTEE ACTION: Accept in Part.
Add Section 6.4.2.1 to Section 6.5 Silane/Toxic Mixes Storage and
Dispensing.Section 6.4.2.1 should replace 6.5.3(b).
Make the last sentence of 6.5.3(b) a stand alone item to read as
follows:
(c) The ventilation system shall be provided with an automatic
emergency source of power to operate at full capacity.
Make existing items c through f down to d through g.
COMMITTEE STATEMENT: Clarifies the use of cabinets and the
ventilation rates of silane mixes.
___________________
(Log #3)
318- 21 - (5-5.1): Accept in Principle
SUBMITTER: David E. Libby, IBM
RECOMMENDATION: Insert the word "hazardous" as follows:
"The hazardous exhaust ventilaton system shall have an emergency
source of power. The...".
SUBSTANTIATION: Not all exhaust sustems are hazardous and
therefore should be exempt from this requirement. Hazardous
would include combustible/flammable vapors.
843
NFPA 318 — May 2002 ROP — Copyright 2001, NFPA
NUMBER OF COMMITTEE MEMBERS ELIGIBLE TO VOTE: 26
VOTE ON COMMITTEE ACTION:
AFFIRMATIVE: 24
NEGATIVE: 1
NOT RETURNED: 1 Wilke
EXPLANATION OF NEGATIVE:
BENSON: Silane can be placed in gas cabinets safely provided the
ventilation requirements of 6.4.2.1 are met. There are even
additional protection devices in cabinets in the form of automatic
sprinklers and gas detectors that you may not have in an open
manifold rack. No installation is risk free. Why should we be overly
prescriptive and tell people they can’t use cabinets. I agree that
6.4.2.1 should in addition be incorporated into 6.5.3.
One A recent innovation dopant source that is an alternative to the
conventional high-pressure gas cylinder is called the subatmospheric
dopant gas source. This gas source looks like a high-pressure cylinder
except that it is filled with a microporous material that adsorbs the
dopant gas. During normal operation, the gas cylinder pressure is
reduced below one atmosphere and the gas is withdrawn. Under leak
scenarios, the gas release rate from these new subatmospheric
reduced flow systems is decreased by a factor of 30 to 60 thousands as
compared to a conventional high-pressure cylinder sources equipped
with a restricted-flow orifice. These systems offer a considerable
reduction in fire hazard. There are also process advantages since the
gas in the new system is at 100 percent concentration rather than at
10 to 15 percent concentration typical in high pressure systems
because of safety reasons. including a larger fraction of usable
product and a lower frequency of cylinder changes. In addition, the
systems are can be located at or within the process tool ion implanter
or CVD tool, eliminating long runs of costly co-axial tubing from the
gas vault.
SUBSTANTIATION: The current wording of 6.6.2 mandates the use
of one particular dopant gas source delivery system. The proposed
change is intended to transform the requirements to a performance
statement, which identifies the primary characteristic of the gas
source that results in a safer system. By establishing a performance
statement, it allows for new technology to meet the desired standard.
The text in the appendix has been reorganized and supplemental
information added to clarify that there is more than one method of
achieving the reduction in flow intended. The charging language in
the body of the standard is not limited to specific processes. Dopant
gases are used in Diffusion and Epitaxy as well as CVD and ion
implantation processes. Ion implantation is referenced in the text as
a process example. An alternative would be to list all of the processes
that could apply.
The standard should not prohibit the use of conventional highpressure gas cylinders irregardless of the limitations on the source
delivery system or the methods used to achieve an intrinsically low
release rate. The Compressed Gas Association believes that the
marketplace, and not the regulations, should decide the application
of new technology. The regulations should allow the use of highpressure cylinder systems designed in a manner as to achieve an
intrinsically low release rate, as well as the use of subatmospheric or
other comparable delivery systems.
COMMITTEE ACTION: Reject.
COMMITTEE STATEMENT: The two systems are not equivalent
either from a safety or delivery perspective.
NUMBER OF COMMITTEE MEMBERS ELIGIBLE TO VOTE: 26
VOTE ON COMMITTEE ACTION:
AFFIRMATIVE: 25
NOT RETURNED: 1 Wilke
___________________
(Log #CP9)
318- 24 - (6-6.2): Accept
SUBMITTER: Technical Committee on Cleanrooms
RECOMMENDATION: Move Section 6.6.2 and related appendix
material to Appendix Section A.6.6.1.
SUBSTANTIATION: It is intended to make this section nonmandatory.
COMMITTEE ACTION: Accept.
NUMBER OF COMMITTEE MEMBERS ELIGIBLE TO VOTE: 26
VOTE ON COMMITTEE ACTION:
AFFIRMATIVE: 23
NEGATIVE: 2
NOT RETURNED: 1 Wilke
EXPLANATION OF NEGATIVE:
BENSON: Disagree. The issue here is not only a fire protection
issue but also a big life safety issue. Getting rid of high pressure
cylinders of highly flammable and highly toxic gases and using
subatmospheric sources when the process will allowis a "no brainer".
We should be driving this type of new and safer technology just like
RFO’s and automated cylinder valves. This should remain a
requirement in 318.
PEARCE: The use of low pressure technology is safer and should
drive technology. Changing the requirement without a review of the
high pressure technology leaves voids in needed protection.
___________________
(Log #11)
318- 25 - (6-6.2 and A-6-6.2): Reject
SUBMITTER: Larry Fluer, Fluer, Inc./Rep. Compressed Gas
Association
RECOMMENDATION: Propose that Section 6.6.2 of NFPA 318 be
changed as follows:
"Subatmospheric Flammable dopant gas sources supply containers,
including subatmospheric gas sources, shall be used instead of have
intrinsically low release rates as compared to conventional high
pressure cylinder flammable gas sources, whenever process
compatibility will allow."
Also change the related reference material in Section A.6.6.2 of
Appendix A of NFPA 318-2000 as follows:
A.6.6.2 Traditionally, Conventional high-pressure cylinders have
been used to contain flammable dopant gases such as arsine, and
phosphine and diborane used, for example, in chemical vapor
deposition (CVD) and ion implantation operations. In ion
implanters, It is common to have small dopant gas cylinders in a gas
cabinet located within the implanter enclosure. Coventional high
pressure gas cylinders used in ion implanters typically contain a 10 to
15 percent mixture of the dopant gas at pressures of 350 to 1800 psig.
Reduced flow systems offer a considerable decrease in toxic gas
release and fire hazard. One example of a reduced flow system is by
the use of a restricted-flow orifice installed in the cylinder valve. The
typical restricted-flow orifice will decrease the flow from a
conventional unrestricted high-pressure cylinder by a factor of 100 to
500.
___________________
(Log #1)
318- 26 - (8-8): Accept in Principle
NOTE: This Proposal appeared as Comment 318-11 (Log #14)
which was held from the May ROC on Proposal N/A.
SUBMITTER: Mike Sherman, FSI Int’l
RECOMMENDATION: Change "less than 20 percent" to "no greater
than 25 percent."
SUBSTANTIATION: Conflicts with at least five other NFPA
standards; no technical justification.
1. NFPA 30/1996, Section 1-6, definition for "ventilation:" "...over
one fourth..."
2. NFPA 497/1997, Section 1-3, definition for "adequate
ventilation:" "...exceeding 25 percent..."
3. NFPA 69/1997, Paragraph 3-3.1, Requirements: "...at or below 25
percent..."
4. NFPA 496/1998, Paragraph 6-3.1, Requirements: "...less than 25
percent..."
5. NFPA 33/1995, Section 5-2, Requirements: "...not exceed 25
percent..."
844
NFPA 318 — May 2002 ROP — Copyright 2001, NFPA
COMMITTEE ACTION: Accept in Principle.
COMMITTEE STATEMENT: See Committee Action and Statement
on Proposal 318-3 (Log #8).
NUMBER OF COMMITTEE MEMBERS ELIGIBLE TO VOTE: 26
VOTE ON COMMITTEE ACTION:
AFFIRMATIVE: 25
NOT RETURNED: 1 Wilke
___________________
(Log #CP10)
318- 28 - (Chapter 10, Appendix C): Accept
SUBMITTER: Technical Committee on Cleanrooms
RECOMMENDATION: Update referenced SEMI documents to
latest edition.
SUBSTANTIATION: To allow public comment regarding the latest
edition of these documents.
COMMITTEE ACTION: Accept.
NUMBER OF COMMITTEE MEMBERS ELIGIBLE TO VOTE: 26
VOTE ON COMMITTEE ACTION:
AFFIRMATIVE: 25
NOT RETURNED: 1 Wilke
(Log #16)
318- 27 - (9-1.1): Accept in Principle
SUBMITTER: Dennis H. Collins, Intel Corp.
RECOMMENDATION: Add 9.1.1 to read as follows:
9.1.1 Exit access travel distance shall be limited to 250 ft.
SUBSTANTIATION: 318 refers you to the NFPA life safety code to
figure out the distances, this allows 318 to stand alone on this issue.
COMMITTEE ACTION: Accept in Principle.
Add the following to Section 9.1.1:
9.1.1 Travel distance, measured in accordance with Section 7.6 (of
NFPA 101 Life Safety Code), shall not exceed 200 ft (60 m).
Exception No. 1: Travel distance shall not exceed 250 ft (76 m) in
buildings protected throughout by an approved, supervised
automatic sprinkler system in accordance with Section 9.7.(NFPA
101:40.2.6.1)
COMMITTEE STATEMENT: Extracted from NFPA 101, Life Safety
Code.
NUMBER OF COMMITTEE MEMBERS ELIGIBLE TO VOTE: 26
VOTE ON COMMITTEE ACTION:
AFFIRMATIVE: 25
NOT RETURNED: 1 Wilke
___________________
___________________
(Log #CP8)
318- 29 - (Appendix C): Accept
SUBMITTER: Technical Committee on Cleanrooms
RECOMMENDATION: Add SEMI Standard S-14 0200 to the
referenced publications Section .
SUBSTANTIATION: Reference to this industry standard is needed.
COMMITTEE ACTION: Accept.
NUMBER OF COMMITTEE MEMBERS ELIGIBLE TO VOTE: 26
VOTE ON COMMITTEE ACTION:
AFFIRMATIVE: 25
NOT RETURNED: 1 Wilke
___________________
845