Gas Filtration Assemblies — Ceramics
Data Sheet A85b
Membralox® Filter Assemblies
Description
Specifications
The Membralox® ceramic filter assemblies
are designed for ultra-high purity gas
filtration applications, providing removal
of particles ≥ 3 nanometer.
Materials
• Medium: High purity, inert alumina
oxide
• Electropolished 316L stainless steel
housing
• < 0.38 µm/15µin Ra internal surface
finish
• Housing meets or exceeds VIM/VAR
specifications
• Cr:Fe (1:1) chromium enriched internal
surface chemistry
• PTFE gaskets
• Inert alumina medium with a precise
pore structure
• 316L stainless steel housing
• Excellent temperature and corrosion
resistance
• Superior dry down characteristics
• Clean room manufactured and
packaged
• 100% helium leak tested
Removal Rating
• ≥ 0.003 µm
Particle Removal Characteristics
• 109 particle reduction1
Connections
• 1⁄4 in, 1⁄2 in or 3⁄4 in Gasket Seal (VCR2 or
compatible)
• 1⁄4 in buttweld or compression fitting
Operating Conditions
(non-CE marked parts)
• Maximum Operating Pressure3
20.7MPa at 50˚C/3000 psig at 122˚F
• Maximum Allowable Forward
Differential Pressure
1.0 MPa at 50˚C/145 psid at 122˚F
Operating Conditions
(CE marked parts)
• Maximum Operating Pressure3
13.8 MPa at 50˚C/2000 psig at 122˚F
• Maximum Allowable Forward
Differential Pressure
1.0 MPa at 50˚C/145 psid at 122˚F
• EU Pressure Equipment Directive:
Assemblies have been evaluated for
compliance with the European Union’s
Pressure Equipment Directive
97/23/EC and are CE marked
Leak Rating
• 100% helium leak tested to 10-9
atm-cm3/s
• Design validated to 10-11 atm-cm3/s
1 Particle rating based on laboratory testing with
NaCl aerosol.
2 VCR is a trademark of Swagelok Co.
3 This pressure is not compliant to the High
Pressure Gas Control law in Japan. The
maximum operating pressure for use in Japan
is 1.0MPaG.
Pressure Drop vs. Gas Flow Rate Curves
MLOX 03-30 Micro High Flow Membralox Assembly
MLOX 028-225 Mini High Flow Membralox Assembly
Flow Rate (scfm) 20˚C
Flow Rate (scfm) 20˚C
0.50
1.00
1.50
0.00
0.50
1.00
1.50
2.00
2.50
10.0
60
10.0
60
8.0
8.0
4.0
620 kPa/90 psig Inlet
20
2.0
0
0.0
0
30
20
10
206 kPa/30 psig Inlet
Pressure Drop (kPa)
6.0
40
Pressure Drop (psid)
Pressure Drop (kPa)
206 kPa/30 psig Inlet
50
40
4.0
20
0
0.0
0
40
20
80
60
Flow Rate (slpm) Air 20˚C
MLOX 03-225 Mini High Flow Membralox Assembly
MLOX 03-600 High Flow Membralox Assembly
Flow Rate (scfm) 20˚C
Flow Rate (scfm) 20˚C
0.50
2.0
620 kPa/90 psig Inlet
Flow Rate (slpm) Air 20˚C
0.00
6.0
40
Pressure Drop (psid)
0.00
1.00
1.50
2.00
0.00
2.50
1.00
2.00
3.00
4.00
5.00
10.0
10.0
206 kPa/30 psig Inlet
60
60
8.0
8.0
20
2.0
620 kPa/90 psig Inlet
0.0
0
40
20
620 kPa/90 psig Inlet
4.0
20
2.0
0
80
60
MLOX 05-900 5 ˝ High Flow Membralox Assembly
Flow Rate (scfm) 20˚C
4.00
5.00
6.00
7.00
10.0
206 kPa/30 psig Inlet
6.0
4.0
620 kPa/90 psig Inlet
20
2.0
0.0
0
50
100
150
Flow Rate (slpm) Air 20˚C
200
250
300
10
5
15
10.0
60
8.0
40
0
0
8.0
206 kPa/30 psig Inlet
Pressure Drop (kPa)
3.00
Pressure Drop (psid)
Pressure Drop (kPa)
60
2.00
160
120
MLOX 11 ˝ High Flow Membralox Assembly
Flow Rate (scfm) 20˚C
1.00
80
40
Flow Rate (slpm) Air 20˚C
Flow Rate (slpm) Air 20˚C
0.00
0.0
0
6.0
40
4.0
620 kPa/90 psig Inlet
20
2.0
0
0.0
0
100
200
300
400
Flow Rate (slpm) Air 20˚C
500
600
700
800
Pressure Drop (psid)
0
6.0
40
Pressure Drop (psid)
4.0
Pressure Drop (kPa)
6.0
Pressure Drop (psid)
Pressure Drop (kPa)
206 kPa/30 psig Inlet
40
Part Numbers / Ordering Information
Part Number*
Fitting Type
Nominal Length (L)
(mm/inch)
Nominal Diameter (D)
(mm/inch)
MLOX 03-30-1/4BW
1
⁄4 in Buttweld
84.1/3.31
20.8/0.82
MLOX 03-30-1/4GS-MM
1
⁄4 in Gasket Seal, Male/Male
84.1/3.31
20.8/0.82
MLOX 03-30-1/4CS
1
⁄4 in Compression Seal, Male/Male
84.1/3.31
20.8/0.82
MLOX 028-225-1/4GS-MF
1
MLOX 03-225-1/4BW
1
MLOX 03-225-1/4GS-MM
1
MLOX 03-225-1/2GS-MM
1
MLOX 03-600-1/4GS-MM
1
MLOX 03-600-1/2GS-MM
1
MLOX 05-900-1/4GS-MM
1
MLOX 05-900-1/2GS-MM
1
MLOX 11-2700-1/2GS-MM
1
MLOX 11-2700-3/4GS-MM
3
⁄4 in Gasket Seal, Male/Female
71.1/2.80
29.7/1.17
⁄4 in Buttweld
84.1/3.31
29.7/1.17
⁄4 in Gasket Seal, Male/Male
84.1/3.31
29.7/1.17
⁄2 in Gasket Seal, Male/Male
84.1/3.31
29.7/1.17
⁄4 in Gasket Seal, Male/Male
84.1/3.31
42.4/1.67
⁄2 in Gasket Seal, Male/Male
84.1/3.31
42.4/1.67
⁄4 in Gasket Seal, Male/Male
127.0/5.00
42.4/1.67
⁄2 in Gasket Seal, Male/Male
127.0/5.00
42.4/1.67
⁄2 in Gasket Seal, Male/Male
285.1/11.22
42.4/1.67
⁄4 in Gasket Seal, Male/Male
285.1/11.22
42.4/1.67
* For CE marked parts, add a “-CE” suffix to the part number (example, MLOX 03-30-1/4BW-CE).
Other configurations are available upon request. Please consult Pall Microelectronics.
Unit Conversion: 1 bar = 100 kilopascals
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© Copyright 2007, Pall Corporation. Pall,
trademark registered in the USA.
A85b
, and Membralox are trademarks of Pall Corporation. ® Indicates a Pall
is a service mark of Pall Corporation.