IEEE TRANSACTIONS ON PLASMA SCIENCE, VOL. 26, NO. 1, FEBRUARY 1998 113 Analysis of the Nitrogen Ion Beam Generated in a Low-Energy Plasma Focus Device by a Faraday Cup Operating in the Secondary Electron Emission Mode Héctor Kelly, Alejandro Lepone, Adriana Márquez, Marek J. Sadowski, Jaroslaw Baranowski, and Elzbieta Skladnik-Sadowska Abstract—The energy distribution and flux of fast nitrogen particles generated in a Mather-type plasma focus device operating at 0.4 Torr of N2 pressure is reported. A Faraday Cup operating in the secondary electron emission mode was employed. To determine the total number of beam particles, multiple scattering of the ions was taken into account. It has been possible to register the ion energy up to a lower kinetic energy threshold of 50 keV, which is a value much lower than that obtained with a Thomson spectrometer in a previous work. Index Terms—Faraday cup diagnostic, ion beams, ion energy spectral analysis, plasma focus. I. INTRODUCTION P LASMA FOCUS (PF) devices [1] are intense sources of neutrons, X-ray radiation, ions, and electrons. In particular, attention has been focused on the use of the ion beam generated in a PF to produce ion implantation [2], thermal surface treatment [3], and/or ion-assisted coatings [4], [5] on samples located in front of the coaxial electrodes of the device. In this kind of applications, PF devices are usually operated with N as the filling gas. In order to perform an evaluation of these technological processes, it is necessary to obtain reliable information on the nitrogen ion flux and on the nitrogen ion kinetic energy spectrum. An important difficulty in determining the PF ion spectrum is connected with the recording of the ion energy in the low-energy region of the spectrum, where most of the particles and beam energy content are concentrated. The first reported results concerning PF nitrogen ions were presented by Mozer et al. [6] and Sadowski et al. [7]; however, in these experiments, the nitrogen was present as an impurity. An ion spectrum obtained from a nitrogen operated PF device was reported by Rhee [8], but without deriving the value of the ion flux. Later on, Kelly et al. [9] presented a nitrogen spectrum derived from a Thomson spectrometer equipped Manuscript received August 21, 1997; revised November 10, 1997. This work was supported by the Argentine authorities of UBA and CONICET as well as the Polish State Committee for Scientific Research for a financial support of the bilateral scientific cooperation between INFIP and SINS. H. Kelly, A. Lepone, and A. Márquez are with the Instituto de Fı́sica del Plasma, Departmento de Fı́sica, Facultad de Ciencias Exactas y Naturales, UBA, Ciudad Universitaria, Pab I, 1428, Buenos Aires, Argentina. M. J. Sadowski, J. Baranowski, and E. Skladnik-Sadowska are with the Soltan Institute for Nuclear Studies (SINS), 05-400 Otwock-Swierk, Poland. Publisher Item Identifier S 0093-3813(98)01472-6. with a CR-39 plastic nuclear track detector. By taking into account multiple scattering of the ions and capture and loss of electrons to the background gas, absolute values for the ion flux were obtained in that work. However, due to the unavoidable presence of impurities in the developed track detector, a low-energy threshold of 170 keV was always found in the detected ion energies. A very simple and inexpensive diagnostic to register the PF ion beam with temporal resolution is the Faraday Cup (FC) technique [10], [11], which also has the attractive feature of a fast processing time of the signal (as compared to the large time-consuming Thomson spectrometer technique). FC has been applied to several PF experiments to infer the deuteron ion spectrum by time of flight (TOF) techniques [12]–[15]. Its main difficulties are: 1) a low signal-to-noise ratio and 2) the emission of secondary electrons (SEE) by the energetic ions impinging on the collector. While the improvement of the first point depends on each particular experimental situation (for instance, it has been found [12] that the application of a static transverse magnetic field across the region between the FC collector and a shielding screen greatly suppress noise), SEE effects have been minimized by using graphite collectors [13] or by applying a strong transverse static magnetic field in the vicinities of the collector [12] to capture the electrons. However, SEE was taken into account in the case of deuterium ions by analyzing the FC grid signal [12]; in fact, by comparing this signal to that corresponding to the collector, it was possible to derive the number of secondary electrons ejected per incident ion as a function of the deuteron energy, in reasonable agreement with the experimental values of published in the literature. It must be noted that for ion kinetic typical of PF experiments (several hundreds of energies keV), the values of are very large ( for 100-keV deuterons [12], and for heavy ions it can reach even larger values), so an FC signal containing the SEE contribution in a controlled way has the advantage of being a factor 5 (or more) larger than that corresponding to a pure ion signal. The purpose of this work is to report the energy distribution and flux of fast nitrogen particles generated in a Mather-type PF operating at 0.4 Torr of N pressure. Both quantities are derived from an FC operating in the SEE mode. Multiple scattering of the ions is taken into account to determine the total number of beam particles. The obtained results are 0093–3813/98$10.00 1998 IEEE 114 IEEE TRANSACTIONS ON PLASMA SCIENCE, VOL. 26, NO. 1, FEBRUARY 1998 (a) (b) Fig. 1. (a) Scheme of the Faraday Cup; (b) scheme of the different charge contributions to the grid and collector signals of the FC. compared to those previously obtained employing a Thomson spectrometer [9]. II. THE EXPERIMENT The measurements were performed in our PF II device (4.75 kJ, 30 kV) whose mechanical and electrical parameters can be found elsewhere [16]. An FC located at 119.5 cm far from the focus region (this large distance allowed us to discriminate by time of flight the effects on the FC signals due to electromagnetic radiation and to fast particles), a Rogowski coil (to register the time derivative where is the total discharge current), and a PIN BPX 65 photodiode covered with a 12- m Be filter (to register the temporal evolution of medium-energy X rays, ) and located at 90 from the electrode axis were employed. A scheme of the FC is shown in Fig. 1(a). The FC consisted of a metallic solid grounded cage on whose lower base was located a truncated cone hollow Cu collector. Two ceramic posts (tied to the upper base of the cage) held a circular Cu grid (25% of transparency). Two small magnets [see Fig. 1(a)] generated a traverse magnetic field in the space between grid an collector. Its intensity was 60 G at the center of symmetry, and reached 520 G at 2 mm from the surface of the magnets. The FC entrance pinhole was 0.8 mm in diameter, and it was located at a distance of 10.5 cm from the focus region. A differential pumping ( 10 Torr) was applied to this system, while the pressure in the discharge chamber was kept constant (within 10%) for 5 min. To register the signals ( FC collector, and FC grid, ), a four-channel digitizing oscilloscope, with a sampling rate of 250 Ms s and a frequency bandwidth of 500 MHz, was employed. The delay time of the signals was carefully measured so that the time correlation among the four signals was better than 5 ns. Fig. 2. Typical signals of of the discharge. dI =dt; dX=dt; Ic ; and Ig during the focus stage III. RESULTS After a series of preliminary shots, it was found that the best operating conditions for the FC in this experiment (concerning the signal-to-noise ratio) corresponded to biasing voltages of 200 V for the grid and 700 V for the collector, respectively. Under these conditions, secondary electrons emitted from the collector should be partially collected by the grid. In Fig. 2, typical signals of , and during the focus stage are shown, at a pressure Torr. The main pulse of the trace is well correlated with the corresponding dip in the signal. The collector and grid signals show a first peak (similar in shape to the peak) lasting for 250 ns, followed by a second wider pulse of 1.5 s duration. The first peak is not related to ions, otherwise they would have kinetic energies in the range 2–10 MeV. In fact, when an Al filter 0.75 m thick) was employed to register the FC signals, the first peak was absent from the registers. As the Al filter was thin enough to allow the passage of nitrogen ions with MeV, it was concluded that the first peak was due to X rays or ultraviolet radiation emitted during the focus stage. The second pulse corresponded to nitrogen ions with kinetic energies ranging from 40 keV to 1 MeV. In order to evaluate SEE effects on the collector signal, the electron trajectories under the electric and magnetic fields present in the experiment were evaluated. The electric field was obtained by solving numerically Laplace’s equation in the volume defined by the surfaces of the collector, the grid, and a lateral cylinder joining both elements. The voltage on this cylinder was assumed to vary linearly between the collector and grid potentials. The magnetic field distribution was measured in the whole volume between grid and collector by using a Hall probe system. It was recorded one magnetic field value every each 2 mm of spacing. KELLY et al.: NITROGEN ION BEAM GENERATED IN LOW-ENERGY PLASMA FOCUS DEVICE In calculating the electron trajectories, it was taken into account that the energy of secondary electrons released by ions with of some tens of keV (or larger) is 50 eV (or less) [17]. Although this value is somewhat uncertain, the results were not sensitive to changes of this energy within the range 10–100 eV. It was also assumed that secondary electrons were ejected in a direction normal to the surface, because different angles would correspond to larger electron paths in the material and hence to a larger absorption probability. As the presence of the magnetic field breaks the azimuthal symmetry of the problem, it was necessary to calculate the electron trajectories for different angular positions of ejection. In all cases, it was found that the electrons never returned to the collector and always reached the grid plane. For the analysis of the FC signals, the scheme shown in Fig. 1(b) was followed. Let us consider an elementary charge associated to incident ions with energy in the range which will contribute to the FC signals in the time interval The corresponding ion number, will be given as where is the electron charge and is the average charge of the beam with energy [18] (it has been shown [9] that in these experimental conditions, the nitrogen beam reaches an equilibrium charge state due to capture and loss of electrons to the neutral gas). The collector signal will be composed of a fraction of the ions which traverse the grid [where is the transparency of the grid, and is a nondimensional factor which takes into account that the collector is hollow in our experiment; see Fig. 1(a)] plus the SEE contribution where is the effective collector SEE coefficient. The grid signal will have three contributions: the fraction of primary ions collected by the grid, the SEE contribution (where is the effective grid SEE coefficient), and the fraction of secondary electrons ejected from the collector which trapped by the grid, With all of these considerations, the equations for the FC signals are for the collector: (1) for the grid: (2) is the nitrogen mass and is the length between the where ion source and the grid. Note that in the above quoted analysis, it is assumed that the fast particles are produced at the same time and at the same point. This is a reasonable assumption, since the typical ion time of flight 1 s is much larger than the ion production time 0.1 s and also, the distance between the ion source and the Faraday cup ( 1 m) is much greater than those of the source. The ion transit time between grid and collector is also considered negligible. In order to obtain from (1) or (2), the knowledge of the SEE coefficient as a function of is required. According to [19], can be expressed in terms of the electronic stopping power and the incidence angle between the ion 115 Fig. 3. Final spectrum of the nitrogen (including elastic scattering effects) calculated either from the FC grid signal or from the FC collector signal. For comparison purposes, the nitrogen spectrum obtained with a Thomson spectrometer in a previous work under the same PF operating conditions is also shown. and the normal to the surface of the target as (3) where (dependent on the target material and independent on the projectile) takes a value of 0.22 Å/eV for Cu [19]. Equation (3) was employed to calculate the functions and using the values for a Cu target [20]. As the grid is composed of circular wires with a semicircle facing the ion incidence direction, an average value of was obtained in this case, resulting To check the consistency of the above-described formulation, (1) and (2) were used to calculate the grid transparency. By eliminating from these equations, one can evaluate in terms of the experimental quotient and and This was done for the FC signals shown in Fig. 2, and the resulting average value of for the whole analyzed energy domain was 0.26, in good agreement with the geometrical value of 0.25 obtained from a microscopic observation of the FC grid. To obtain the actual spectrum of the nitrogen fast particles arriving per unit solid angle at the entrance pinhole of the FC , it was necessary to take into account the elastic scattering of the particles in the neutral gas. Since this procedure has been detailed elsewhere [9], [21], we will present here only the main results. can be related to in the form (4) where the collecting efficiency of the FC, is a nondimensional factor depending on the parameters of the experiment (filling pressure, pinhole diameter, distance between focus region and pinhole) and on the energy of the nitrogen ions. In this case, it was calculated numerically following its definition from [21]. In Fig. 3, the final spectra of the nitrogen, calculated either from the collector [(1)] or the grid signal [(2)], are shown. For comparison purposes, the spectrum obtained with a Thomson spectrometer in a previous work [9] under the same PF operating conditions is also presented. It can be seen that the 116 IEEE TRANSACTIONS ON PLASMA SCIENCE, VOL. 26, NO. 1, FEBRUARY 1998 scaling law with the ion energy of both the FC and Thomson spectra are similar, and the differences among the absolute values of the ion flux can be attributed to the well-known fluctuations from shot-to-shot in PF devices. It can also be seen that the collector and grid FC spectra are almost the same, which indicates the consistence of the adopted assumptions on the SEE contributions to infer the spectrum. Note also that the lower energy threshold in the FC case is 50 keV, a value much lower than that previously obtained with the Thomson spectrometer. IV. FINAL REMARKS By employing a Faraday Cup in an operating regime in which SEE contributes to both the collector and grid signals, the nitrogen ion spectrum obtained from a small PF device has been derived. The main advantage of this operating regime is that it allows us to register higher amplitude signals 5–10 times) than that obtained by suppressing secondary electrons, which is a valuable point in experiments where the electromagnetic noise is high. It has been possible to register the ion energy up to a lower kinetic energy threshold of 50 keV, a value much lower than that previously obtained with the Thomson spectrometer. Based on the presented data, the total fast particle flux and its energy content (within the energy range 50–1000 keV) reach 3.2 10 ions/sterad and 0.74 J/sterad, respectively. Although several assumptions concerning the behavior of the secondary electrons have been adopted, the similarity between both signals supports the accuracy of the assumptions. Finally, it must be noted that Faraday Cup and Thomson spectrometer ion analysis should be considered as complementary diagnostics, because the first allows a fast processing time of the signals, while through the second the charge state of the beam can be obtained. REFERENCES [1] J. W. Mather, “Dense plasma focus,” in Methods of Experimental Physics, R. H. Lovberg, Ed. London: Academic, 1970, vol. 9, pt. B, ch. 15. [2] J. N. Feugeas, E. C. Llonch, C. O. de González, and G. Galambos, “Nitrogen implantation of AISI 304 stainless steel with a coaxial gun,” J. Appl. Phys., vol. 64, pp. 2648–2651, 1989. [3] J. N. Feugeas, G. Sánchez, C. O. de González, J. D. Hermida, and G. Scordia, “Pulsed ion implantation of nitrogen in pure titanium,” Rad. Eff. Def. Solids, vol. 128, pp. 267–275, 1994. [4] J. Piekoszewski and J. Langner, “High intensity pulsed ion beams in material processing: Equipment and applications,” Nucl. Instrum. Methods Phys. Res., vol. B53, pp. 148–160, 1991. [5] H. Kelly, A. Lepone, A. Márquez, D. Lamas, and C. Oviedo, “Coating on metallic samples produced by a small energy plasma focus,” Plasma Sources Sci. Technol., vol. 5, pp. 1–6, 1996. [6] A. Mozer, M. Sadowski, H. Herold, and H. Schmidt, “Experimental studies of fast deuterons, impurity- and admixture-ions emitted from a plasma focus,” J. Appl. Phys., vol. 53, pp. 2959–2964, 1982. [7] M. Sadowski, J. Zebrowski, E. Rydygier, H. Herold, U. Jager, and H. Schmidt, “Multi-spikes structure of ion pulses generated by plasma focus discharges,” Phys. Lett., vol. 113A, pp. 25–31, 1985. [8] M. J. Rhee, “Compact Thomson spectrometer,” Rev. Sci. Instrum., vol. 55, pp. 1229–1234, 1984. [9] H. Kelly, A. Lepone, and A. Márquez, “Nitrogen ion spectrum from a low energy plasma focus device,” IEEE Trans. Plasma Sci., vol. 25, no. 3, pp. 455–459, 1997. [10] Y. Kondoh, K. Shimoda, and K. Hirano, “Measurements of energetic particle beams in a plasma focus,” Jap. J. Appl. Phys., vol. 20, pp. 393–400, 1981. [11] M. Zakaullah, I. Ahmad, A. Omar, G. Murtaza, and M. M. Beg, “Effects of anode shape on plasma focus operation with argon,” Plasma Sources Sci. Technol., vol. 5, pp. 544–552, 1996. [12] G. Gerdin, W. Stygar, and F. Venneri, “Faraday cup analysis of ion beams produced by dense plasma focus,” J. Appl. Phys., vol. 52, pp. 3269–3275, 1981. [13] W. H. Bostick, H. Kilic, V. Nardi, and C. W. Powell, “Time resolved energy spectrum of the axial ion beam generated in plasma focus discharges,” Nucl. Fus., vol. 33, pp. 413–420, 1993. [14] W. Stygar, G. Gerdin, F. Venneri, and J. Mandrekas, “Particle beams generated by a 6–12.5 kJ dense plasma focus,” Nucl. Fus., vol. 22, pp. 1161–1172, 1992. [15] J. Baranowski, M. Sadowski, E. Skladnik-Sadowska, J. Zebroski, H. Kelly, A. Lepone, and A. Márquez, “Time resolved measurements of deuterium and nitrogen ions from different plasma devices,” in Proc. Int. Symp. Plasma’97, Res. Appl. Plasmas, Jarnoltowek-Opole, Poland, M. Sadowski and H. Rothkaehl, Eds., vol. 1 (contributed papers), pp. 433–436, 1997. [16] H. Kelly and A. Márquez, “Ion-beam and neutron production in a lowenergy plasma focus,” Plasma Phys. Contr. Fus., vol. 38, pp. 1931–1942, 1996. [17] J. S. Pelah, “Faraday cups for laser plasmas,” Rev. Sci. Instrum., vol. 48, pp. 1064–1067, 1977. [18] L. I. Pivovar, V. M. Tubaev, and M. T. Novikov, “Distribution of charges in ion beams after traversal of gaseous targets,” Sov. Phys. JETP, vol. 21, pp. 681–688, 1965. [19] R. J. Beuhler and L. Friedman, “A model of secondary electron yields from atomic and poliatomic ion impacts on copper and tungsten surfaces based upon stopping power calculations,” J. Appl. Phys., vol. 48, pp. 3928–3936, 1977. [20] J. K. Ziegler, TRIM code version 90, IBM Research, 1990. [21] H. Kelly and A. Márquez, “The influence of multiple scattering on the ion spectrum from a Thomson spectrometer in a plasma focus device,” Meas. Sci. Technol., vol. 6, pp. 400–404, 1995. Héctor Kelly was born in Mendoza, Argentina, on February 14, 1948. He received the M.S. degree in 1972, and the Ph.D. degree in physics in 1979, both from Buenos Aires University. Since 1973, he has worked as a researcher at the Plasma Physics Laboratory of the Science Faculty of Buenos Aires University. His current research interests are in powerful electrical discharges and plasma coatings based on electrical discharges. Dr. Kelly is a member of the National Research Council of Science of Argentina since 1980. Alejandro Lepone was born in Buenos Aires, Argentina, on December 22, 1967. He received the M.S. degree from Buenos Aires University in 1995. He joined the Plasma Physics Laboratory of the Science Faculty of Buenos Aires University in 1993. His current research interest is in ion beam generation from electrical discharges. Mr. Lepone is a Fellow of the Buenos Aires University. Adriana Márquez was born in Buenos Aires, Argentina, on August 4, 1964. She received the M.S. degree in 1989, and the Ph.D. degree in physics in 1994, both from Buenos Aires University. She joined the Plasma Physics Laboratory of the Science Faculty of Buenos Aires University in 1987. Her current research interests are in powerful electrical discharges and plasma coatings based on electrical discharges. Dr. Márquez is a fellow of the National Research Council of Science of Argentina. KELLY et al.: NITROGEN ION BEAM GENERATED IN LOW-ENERGY PLASMA FOCUS DEVICE Marek J. Sadowski was born in Warsaw, Poland, on September 20, 1937. He received the M.S. degree from Warsaw University in 1960, the Ph.D. and Dr.Sc., both in plasma physics, from Soltan Institute in 1969 and 1976, respectively. From 1960 until 1968, he was a member of the scientific staff of the Department of Nuclear Physics and Department of Plasma Physics and Technology at SINS in Swierk n. Warsaw, performing experimental studies of various plasma injectors and open-ended magnetic traps. He discovered the Spherical Multipole magnetic configuration, and after that he designed and studied Kactus SM-facility, which led to the known multipole Q-machines. From September 1968 until July 1969, he worked in Princeton Plasma Physics Lab., USA, performing experiments with Spherator. From 1970 until 1973, he worked as an Assistant Professor in Lab. Hot Plasma Physics at SINS, developing laser interferometers and particle analyzers for dense plasma studies. From 1973 until 1980, he was Associate Professor in the Department of High-Temperature Plasma at SINS, working with different Plasma Focus (PF) facilities. In 1980–1981, as a Fellow of the Humboldt Foundation, he worked with Nessi PF facility at IPF in Stuttgart, Germany. From 1983 until 1988, he was Associate Professor in the Department of Thermonuclear Research at SINS, working on development of plasma diagnostic methods and studies of PF discharges. Since 1988, he has been Head of the Thermonuclear Research Department. He is the author or main coauthor of more than 160 scientific papers on plasma physics and CFR, which have been published in recognized scientific journals or proceedings of international conferences. He has been a Visiting Professor at IPF in Stuttgart, at Kurchatov Institute in Moscow, and recently at the Universities of Buenos Aires and Tandil, Argentina. Dr. Sadowski is a member of the Polish Physical Society, European Physical Society, and Polish Society for Applied Electromagnetism. Jaroslaw Baranowski was born in Warsaw, Poland, on February 8, 1948. He received the M.S. degree from Warsaw University in 1969, and the Ph.D degree in plasma physics from Soltan Institute in 1996. Since 1970, he has been working as a member of the scientific staff at the Department of Thermonuclear Research, and since 1980, at the Department Plasma Physics and Technology at SINS in Swierk n. Warsaw. He has been engaged in experimental studies with corpuscular diagnostic methods in plasma focus and ionotron-type facilities. He is author or coauthor of more than 60 scientific papers on plasma physics and CFR, which have been published in scientific journals or proceedings of international conferences. He has also been engaged in a scientific collaboration with the Institute of Plasma Physics at the National Science Center Kharkov Institute of Physics and Technology (Ukraine), the Czech Technical University in Prague (Czech Republik), and the Universities of Buenos Aires and Tandil, Argentina. Dr. Baranowski is a Member of the Polish Nuclear Society. 117 Elzbieta Skladnik-Sadowska was born in Paprotnia n. Warsaw, Poland, on August 25, 1938. She received the M.S. degree from Warsaw University in 1961, and the Ph.D. degree in plasma physics from Soltan Institute in 1976. From 1959 until 1961, she worked as a Junior Assistant in the Institute of Experimental Physics at Warsaw University. In 1962, she was nominated Research Assistant in the Department of Plasma Physics and Technology, and she concentrated on experimental studies of so-called multi-rod plasma injectors. In 1966, she was nominated Senior Assistant at the same department. In 1970, she moved to the Laboratory of Hot Plasma Physics, where she started research on corpuscular plasma diagnostics. In 1976, she spent six months at Physico-Technical Institute in Kharkov, Ukraine. In 1976, she became Assistant Professor in the Department of High-Temperature Plasma Physics at SINS. In that year, she was appointed the leader of a group engaged in studies of plasma interactions with magnetic fields. She also developed Thomson-type spectrometers adapted for studies of plasma streams. In 1983, she was nominated Assistant Professor in the Department of Thermonuclear Research in Swierk. Acting as a head of the Plasma Diagnostic Group, she performed studies of mass- and energy-spectra of ions emitted from different plasma facilities. Since 1988, she has been engaged in research on Plasma Focus (PF) facilities. In 1992 she spent two months at IPF in Stuttgart, Germany, participating in experimental studies of high-current PF discharges. In 1993, she stayed another six weeks in Stuttgart to carry out time-resolved measurements of gas-puffed PF discharges, and in 1995 she spent four weeks at Universities of Buenos Aires and Tandil, Argentina. Dr. Skladnik-Sadowska is a Member of the Plasma Physics Section at the Polish Academy of Sciences.
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